JP2010276213A - Air shower device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air shower device with little leakage of dust to keep cleanliness. <P>SOLUTION: A first side housing is provided with an air filter for purifying the air from an air blower, an airtight sealing filter structure composed of an air filter primary-side chamber supporting the air filter and an air filter secondary-side chamber surrounding the air filter, and a jet panel formed by dispersing a number of air jet nozzles on the air filter secondary-side chamber of the airtight sealing filter structure, and the pressurized air from the air blower is distributed from the air jet nozzles through the air filter primary-side chamber, the air filter, and the air filter secondary-side chamber. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an air shower apparatus, and more particularly, to an air shower that is installed in an entrance / exit of a clean room or work room for manufacturing semiconductors and precision machines, or for manufacturing and processing food, and prevents dust from flowing into the clean room and work room. It relates to the device.

  Conventionally, air showers have been installed at the entrance and exit of clean rooms or work rooms that manufacture semiconductors and precision machinery, and food manufacturing and processing so that dust and germs are not brought into the clean room. The work is done after spraying and blowing off dust, hair, and other deposits from the clothing and head.

  In this air shower apparatus, there are a type in which a circulating air flow is formed in order to quickly remove dust that has risen into the shower chamber due to an air jet air flow, and a type in which no circulating air flow is formed in order to reduce costs.

  For example, as shown in FIG. 9, the type that forms the circulating airflow includes main body cases 901 and 902 and a ceiling case 903. The main body case 901 purifies the air blower 904 as a blower and air ( An air filter 905 for removing dust is provided. In the main body case 901, an air jet is generated by an air blower 904, and air is ejected from an air shower ejection port via a flow channel duct (air passage indicated by an arrow). In such a conventional air shower apparatus, since the inside of the main body case 901 has a positive pressure, air leakage (leakage) occurs from a joint portion such as a flow channel duct. Therefore, in order to prevent the leakage of air from the joint part such as a flow duct, the joint part is sealed to prevent air leakage. However, the main body case 901 is extremely large, for example, a height H200 cm × width W20 cm × Due to the size of the depth D100 cm, the sealing work length is long, the work is difficult, and there is a concern that even if it is sealed, it will leak. Further, when the main body case 902 has the same configuration as that of the main body case 901, there are problems that the sealing work length is doubled and the work is doubled.

  In addition, such air shower devices are conventionally shipped in a gate-type completed state, so that there is a problem that the volume becomes large and the shipping cost for on-site installation becomes high. there were. In order to solve the above problems, the air shower apparatus has been conventionally disassembled into a plurality of case bodies, that is, each case is shipped in a disassembled state.

  For example, Patent Document 1 discloses a structure in which three separable three cases (housings) are assembled into a gate shape to form a space serving as a shower chamber, and air from an air blower provided therein is formed in the housing. In an air shower device that jets into a shower room through a duct, a room that is fluidly independent from the flow duct is provided in a part of the ceiling case (housing), a through hole is formed in the room, and the room is connected via the through hole. A structure assembled by connecting with bolts is disclosed.

  According to the above, the casing can be separated into a plurality of parts, the airtightness of the connecting portion is improved, and the assembly and installation at the site can be simplified.

  Further, Patent Document 2 is an air shower apparatus that includes a machine room including a filter and a fan and a shower room connected to the machine room, and blows clean air purified in the machine room into the shower room. The casing of the machine chamber is divided into a plurality of casing units that open on the shower chamber side, and the housing portion for the filter and the pressure chamber forming member is constituted by a casing unit that is divided into at least two parts. It was made to connect via the bending flange of a part.

  According to the above, a large space is not required for the painting work and the assembling work, and the workability and the weight reduction can be achieved at the time of transport and assembling before assembling.

JP 2001-62413 A JP 2003-254572 A

  As described above, in the conventional air shower apparatus, the inside of the side surface casing has a positive pressure, and air leakage (leakage) occurs from a joint portion such as a flow channel duct. Therefore, in order to prevent leakage, leakage is prevented by sealing the joint. However, the side case is extremely large, so the sealing work length is long and work is difficult. The possibility was high.

  Accordingly, a first object of the present invention is to provide an air shower apparatus that minimizes air leakage from a joint such as a flow duct.

  A second object of the present invention is to provide an air shower apparatus that is disassembled into a plurality of case bodies, shipped, and easily assembled.

  In order to achieve the above object, a first air shower device of the present invention is surrounded by first and second side surface housings and a ceiling housing combined with the first and second side surface housings. A space that becomes a shower chamber is formed in a gate shape, and at least air from a blower provided inside the first side surface housing is formed from an opening formed in the first side surface housing. In the air shower apparatus to be supplied to the first air passage, the first side surface housing includes an air filter for purifying air from the blower, an air filter primary chamber that supports the air filter, and the air filter. A machine-sealed filter structure composed of an air filter secondary side chamber provided to surround the air filter, and a plurality of air jet nozzles are dispersed in the air filter secondary side chamber of the machine-sealed filter structure. A jet panel formed, and the pressurized air from the blower passes through the air filter primary side chamber, the air filter and the air filter secondary side chamber, and is sent out from the air jet nozzle. The configuration.

  According to the second air shower apparatus of the present invention, in the first air shower apparatus, a pressure shielding partition plate is further provided on an upper portion of the machine-sealed filter structure.

  According to a third air shower device of the present invention, in the first or second air shower device, a fan for an air curtain is provided in the ceiling housing.

  According to a fourth air shower device of the present invention, in any one of the first to third air shower devices, the first and second side surface housings are connected to at least three corners of the ceiling housing. And a connection portion that fits the ceiling portion housing at a portion corresponding to the connection portion of the ceiling portion housing of the first and second side surface housings.

The exploded block diagram of one Example of the air shower apparatus of this invention is shown. The exploded block diagram of one Example of the side part housing | casing of the air shower apparatus of this invention is shown. It is a figure which shows one Example in the middle of the assembly of the side part housing | casing of this invention. It is a figure which shows one Example after the assembly of the side part housing | casing of this invention. It is a figure which shows one Example of the cross-sectional structure of the front of the air shower apparatus of this invention. It is a figure which shows another Example of the cross-sectional structure of the front of the air shower apparatus of this invention. It is a figure which shows another Example of the air shower apparatus of this invention. It is a figure which shows another Example of the air shower apparatus of this invention. The perspective view of an example of the conventional air shower apparatus is shown.

  Hereinafter, an air shower apparatus according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is an exploded view of an embodiment of an air shower apparatus according to the present invention. As shown in FIG. 1, the air shower apparatus according to the present embodiment has a first side face casing 102, a second side face casing 103, a ceiling casing 101, and a person entering the air shower apparatus. The entrance door 104 and the exit door 105 for allowing a person to leave the air shower apparatus can be attached. Note that the entrance door and the exit door are not indispensable components, and there is a simple doorless type air shower apparatus that does not include the entrance door and the exit door.

  The air shower apparatus according to the present embodiment is formed in a gate shape with the side casing 102, the side casing 103, and the ceiling casing 101, and further, the entrance door 104 and a person for leaving the air shower apparatus. An exit door 105 is provided to form an air shower chamber.

FIG. 5 is a schematic diagram of a cross-sectional configuration of the front of the air shower apparatus shown in FIG. The entrance door 104 is omitted. In FIG. 5, the first side surface housing 102, the ceiling portion housing 101, and the second side surface housing 103 are formed with flow channel ducts through which air (air) flows in the housing. Thus, in the state where the plurality of casings 102, 101, 103 are assembled and installed in a gate shape, an air flow as indicated by an arrow in the figure is generated.
Further, in the first side surface housing 102, for example, a fan motor 18 which is a blower, an air filter 12 for purifying (dust removing) air, and the like are provided, and the air is pressurized by such a configuration. The air is blown into the casing of the air shower apparatus, and is directed toward the shower room from a plurality of openings provided in the first side face casing 102, the ceiling side casing 101, and the second side face casing 103, respectively. Air will be ejected.
Further, a pressure shielding partition plate 15, an air filter primary side chamber 11, an air filter 12, and an air filter secondary side chamber 13 are provided in the first side surface casing 102. Reference numeral 501 denotes an illuminating device that illuminates the inside of the air shower apparatus, and reference numeral 502 denotes, for example, a dehumidifier or a cooler apparatus that dehumidifies the inside of the air shower apparatus. In FIG. 5, the second side surface housing 103 is formed with a flow channel duct, and an air shower apparatus in the case where air from the fan motor 18 flows as indicated by an arrow is shown. However, it goes without saying that, similarly to the first side surface housing 102, a configuration in which a fan motor, which is a blower, or an air filter can be provided.

  Next, the configuration of the first side surface casing 102, which is a feature of the present invention, will be described in more detail with reference to FIG. FIG. 2 shows an embodiment of a disassembled configuration of the first side surface casing 102 of the present embodiment. In FIG. 2, the configuration of the first side surface housing 102 is shown, but the configuration of the second side surface housing 103 can be the same.

Now, the assembly and structure of the first side surface housing 102 will be described in detail with reference to FIG. As shown in FIG. 2, the first side surface housing 102 of this embodiment includes an air filter 12 that cleans air, an air filter primary side chamber 11 that supports the air filter 12, and an air filter secondary side chamber. 13, an air jet panel 14 formed by dispersing a large number of air jet nozzles 204, and a pressure shielding partition plate 15 (described later) are sequentially assembled to form a so-called machine-sealed filter structure. Yes. The machine-sealed filter structure is stored in the space 201 of the first side surface casing 102. Further, the space 203 of the first side surface housing 102 accommodates the dustproof member 16 and the power distribution panel 17 provided with the power distribution board 171. Further, the space 202 of the first side surface housing 102 is configured to be attached with a fan motor 18 as a blower and an intake hole 19 for sucking air.
Next, the assembly procedure of the machine-sealed filter structure described above will be described in detail with reference to FIGS. First, the air filter 12 is brought into close contact with the filter primary side chamber 11. The filter primary side chamber 11 constitutes a sealed container except for a portion where the air filter 12 is attached. Therefore, all the pressurized air from the fan motor 18 is sent to the air filter 12.
Subsequently, the filter secondary side chamber 13 is placed on the air filter 12 so as to surround the air filter 12, and the filter primary side chamber 11 and the filter secondary side chamber 13 are sealed with screws or the like, for example. The filter secondary side chamber 13 constitutes a sealed container so that all the pressurized air from the filter primary side chamber 11 passes through the air filter 12.
Note that the front upper portion 503 (shown in FIG. 5) of the filter secondary chamber 13 is opened, and the air purified by the air filter 12 is supplied to the ceiling housing 101 and the second side housing 103 by arrows. It is supplied as follows. FIG. 3 is a view showing a state where the filter primary side chamber 11, the air filter 12 and the filter secondary side chamber 13 are attached to the space 201 of the first side face housing 102.
Next, a pressure shielding partition plate 15 is attached in close contact with the upper part of the filter primary side chamber 11 and the filter secondary side chamber 13 so that the air from the connecting portion between the filter primary side chamber 11 and the filter secondary side chamber 13 It is designed not to leak into the flow duct. Further, the jet panel 14 is attached to the filter structure, and the mounting of the filter structure in the space 201 of the first side surface housing 102 is completed. FIG. 4 shows a completed view of the first side surface housing 102.
With this configuration, air from the fan motor 18 is supplied to the filter primary side chamber 11 through the opening 205 into the filter primary side chamber 11. All the air supplied to the filter primary side chamber 11 is purified by the air filter 12 and supplied to the filter secondary side chamber 13. As a result, the air supplied to the filter secondary side chamber 13 is flow path ducts of the first side face casing 102, the ceiling side casing 101, and the second side face casing 103 as shown by arrows in FIG. To the shower room. On the other hand, the air contaminated in the shower chamber returns to the fan motor 18 through the intake hole 19, and this air is sent again to the filter structure. This operation is repeated.
As a result, the inside of the filter primary side chamber 11, the air filter 12, and the filter secondary side chamber 13 can be set to a positive pressure, and most of the inside of the flow duct can be set to a negative pressure. It is not necessary to seal most of the housing, and the workability of assembling the air shower device is dramatically improved.

  The fan motor 18 forms an air jet stream inside the first side surface casing 102. The formed air jet stream is blown out into the shower chamber by the air jet nozzle 204. The dirty air in the shower chamber is sucked from the air intake hole 19, generates an air jet stream by the fan motor 18, and is cleaned by the air filter 12 to obtain clean air that collects dust.

  The air ejected from the air jet nozzle 204 is blown into the clean room with vibration of about 13 Hz to 15 Hz. The air blown from the air jet nozzle causes vibrations that are stronger and weaker than flat air, and the blown air promotes the cleaning in the clean room.

  The dust-proof member 16 is located on the ceiling of the side housing 102 and forms a distribution duct for carrying the air jet airflow from the machine-sealed filter structure and prevents the air jet airflow from leaking outside the housing. ing. The power distribution panel 17 provided with the power distribution board 171 is provided so as to be attached and detached by screws or the like. In this way, air is taken in through the intake hole 19 and air flows out of the air shower chamber by the air jet nozzle, preventing dust from flowing into the clean room.

In this example, only the indoor air supply port is provided as the air supply port, but an outdoor air intake port is provided to prevent leakage of bacteria and the like from the inside of the clean room to the outside as in a bio-related laboratory. In the case of this purpose, when the outlet door 105 is opened, the outdoor suction port may be opened, the fan motor 18 may be operated, and the air in the clean room may be purified.
With this configuration, even if an air flow flows from the air shower room into the clean room, the air jet air flow is clean air in which dust is collected by the air filter 12, and even if it flows into the clean room, the cleanliness of the clean room Can be maintained.

  Next, the sealing of the joint portion for preventing the leakage of air from the joint portion such as the flow duct as in the prior art by forming the above-mentioned machine-sealed filter structure in the first side surface casing 102. The reason why the work can be reduced will be described in detail. First, the pressure shielding partition plate 15 is provided on the upper part of the filter secondary side chamber 13 surrounding the filter primary side chamber 11 and the air filter 12, so that the air that has been pressurized by the fan motor 18 and has not passed through the air filter 12. In other words, so-called unpurified air can be prevented from leaking from the joint portion between the filter primary side chamber 11 and the filter secondary side chamber 13. Further, by providing the filter secondary side chamber 13 surrounding the air filter 12, this space is sealed, and the air pressurized by the fan motor 18 surely passes through the air filter 12 and becomes clean air. As a result, it is possible to greatly prevent the possibility that dust remaining without being cleaned will leak out from the seam or the like. In the past, this part was prevented from leaking dust that remained without being cleaned by air due to the sealing work. According to this, the working time can be greatly reduced.

  Next, another embodiment of the present invention will be described with reference to FIG. FIG. 6 shows a second embodiment of the air shower apparatus of the present invention. FIG. 6 shows an air shower apparatus having an air curtain fan 20 inside the ceiling casing 101. In addition, the same code | symbol is attached | subjected about the component similar to FIG. 5, and description is abbreviate | omitted.

  In this embodiment, compared with the first embodiment, the pressure shielding partition plate 15 is not provided, but an air filter secondary side chamber 601 different from the air filter secondary side chamber 13 shown in FIG. It has a structure. That is, the air shower apparatus configured as described above has a confidential structure due to the ceiling casing 101, the second side casing 103, the filter primary chamber 11 and the filter secondary chamber 601 surrounding the air filter 12, and as a result. The air that is not purified by the air filter 12 can be prevented from leaking to the side surface casing 102. Further, the sealing work takes a lot of work time and labor, but according to the present embodiment, it is possible to prevent leakage of dust to the outside with a simple configuration.

  With such a configuration, the model of the air shower apparatus having the air curtain fan on the ceiling and the model without the air curtain fan are the same for the first side surface casing 102 or the second side surface casing 103. 5 can be used, and the shape of the filter secondary side chamber for preventing the inside of the side surface casing from being positive pressure is slightly changed, so that the air shower device having the configuration shown in FIG. 5 or the air shower device having the configuration shown in FIG. It can be. Therefore, it is possible to share the side surface casing, and the cost of the air shower device can be reduced.

FIG. 7 shows a third embodiment of the present invention. FIG. 7 illustrates a connection portion between the ceiling casing 101, the side surface casing 102, and the side surface casing 103. Reinforcing members 702-1, 702-2, and 702 having fitting holes 701-1, 701-2, 701-3, and 701-4 (hereinafter also referred to as connection portions) at the four corners of the ceiling casing 101, respectively. -3, 702-4. On the other hand, the protrusions 703-1, 703-2, 703-3, and 703-4 (hereinafter also referred to as connection portions) are provided on the side surface housing 102 and the side surface housing 103.
When the ceiling housing 101, the side surface housing 102, and the side surface housing 103 are assembled, the fitting holes 701-1, 701-2, 701-3, 701-4 of the ceiling housing 101 and the side surface housing The projecting portions 703-1, 703-2, 703-3, and 703-4 of the body 102 and the side surface case 103 are fitted, and the ceiling case 101, the side surface case 102, and the side surface case 103 are assembled. And an air shower device is formed.

  Usually, at the time of assembly and installation, it is necessary to place the ceiling casing 101 on the side casing 102 and the side casing 103, but in order to mount the ceiling casing on the two side casings, It was difficult to align and match the ceiling housing 101, the side surface housing 102, and the side surface housing 103, which was a time-consuming operation. However, as in the present embodiment, by having the fitting hole and the convex protrusion, the convex protrusion and the fitting hole are fitted and positioned when the ceiling housing is placed. As a result, the assembly and installation work time can be shortened, and the displacement of the ceiling housing can be prevented.

  FIG. 8 shows a fourth embodiment of the present invention. FIG. 8 shows a connection portion of the ceiling casing 101, the side surface casing 102, and the side surface casing 103. Reinforcing members 702-1, 702-2, and 702-3 having fitting holes 701-1, 701-2, and 701-3 are provided at three corners of the ceiling casing 101, respectively. However, the difference from the embodiment shown in FIG. 7 is that the reinforcing member 702-4 has no fitting hole.

  If comprised in this way, when assembling the ceiling housing | casing 101, the side part housing | casing 102, and the side part housing | casing 103, the fitting holes 701-1, 701-2, 701-3 of the ceiling housing | casing 101 and a side surface The projections 703-1, 703-2, and 703-3 of the unit housing 102 and the side unit housing 103 are fitted to each other to form an air shower device.

  FIG. 8 does not have only one combination of the protrusion and the fitting hole as compared with FIG. Accordingly, when the ceiling casing is placed on the side casing, the orientation of the ceiling casing is not mistaken, installation work is facilitated, and workability can be improved.

  In the third and fourth embodiments, the configuration in which the fitting holes are provided in the ceiling casing 101 and the protrusions are provided in the side surface casing 102 and the side surface casing 103 has been described. It is also possible to provide a protrusion on the side surface housing 102 and the side surface housing 103 and provide a fitting hole.

  Although the present invention has been described in detail above, the present invention is not limited to the embodiments of the air shower apparatus described herein, and can be easily applied to other air shower apparatuses. Nor.

  Side housing 102, side housing 103, ceiling housing 101, entrance door 104 exit door 105, air filter 12, primary chamber 11, 11, secondary chamber 13, 601 , Air jet panel ... 14, pressure shielding partition plate ... 15, dustproof member ... 16, power distribution panel ... 171, power distribution panel ... 17, fan motor ... 18, air inlet ... 19, air jet nozzle ... 204, lighting device ... 501, Cooler device ... 502, fitting hole ... 701-1, 701-2, 701-3, 701-4, reinforcing member ... 702-1, 702-2, 702-3, 702-4, convex protrusion ... 703-1, 703-2, 703-3, 703-4.

Claims (4)

Surrounded by the first and second side surface housings and the ceiling portion housing combined with the first and second side surface housings, a space serving as a shower chamber is formed in a gate shape, and at least the first In an air shower apparatus for supplying air from an air blower provided inside one side surface casing into the shower chamber from an opening formed in the first side surface casing,
An air filter for purifying air from the blower, an air filter primary side chamber that supports the air filter, and air that surrounds the air filter are provided in the first side surface housing. A machine-sealed filter structure constituted by a filter secondary side chamber, and a jet panel formed by dispersing a number of air jet nozzles in the air filter secondary side chamber of the machine-sealed filter structure. And an air shower device for sending pressurized air from the blower device through the air filter primary side chamber, the air filter and the air filter secondary side chamber and from the air jet nozzle. .   2. The air shower apparatus according to claim 1, further comprising a pressure shielding partition plate provided on an upper portion of the sealed filter structure. The air shower apparatus according to claim 1 or 2,
An air shower apparatus, wherein the ceiling casing is provided with a fan for an air curtain. In the air shower apparatus in any one of Claim 1 to 3,
At least three corners of the ceiling housing have connection portions that fit into the first and second side housings, and the ceiling housing of the first and second side housings. An air shower apparatus having a connection portion that fits into the ceiling housing at a portion corresponding to the connection portion.

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