JP2010269469A - Transfer device and transfer method - Google Patents

Transfer device and transfer method Download PDF

Info

Publication number
JP2010269469A
JP2010269469A JP2009121253A JP2009121253A JP2010269469A JP 2010269469 A JP2010269469 A JP 2010269469A JP 2009121253 A JP2009121253 A JP 2009121253A JP 2009121253 A JP2009121253 A JP 2009121253A JP 2010269469 A JP2010269469 A JP 2010269469A
Authority
JP
Japan
Prior art keywords
frame
transfer
installation
temporary assembly
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009121253A
Other languages
Japanese (ja)
Other versions
JP5357625B2 (en
Inventor
Shigeru Fujiwara
Kentaro Ishibashi
Shinya Itani
Mitsunori Kokubo
Hiroyoshi Sugiura
慎也 伊谷
光典 小久保
裕喜 杉浦
健太郎 石橋
茂 藤原
Original Assignee
Toshiba Mach Co Ltd
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Mach Co Ltd, 東芝機械株式会社 filed Critical Toshiba Mach Co Ltd
Priority to JP2009121253A priority Critical patent/JP5357625B2/en
Publication of JP2010269469A publication Critical patent/JP2010269469A/en
Application granted granted Critical
Publication of JP5357625B2 publication Critical patent/JP5357625B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

Provided is a transfer device capable of preventing a transfer defect from occurring when transferring a transfer pattern formed on each mold to a plurality of molded articles and performing high-definition transfer.
A molded product / mold installation body 13 in which a frame 37A provided so as to be movable toward and away from a fixed frame 74, and a molded product and a mold can be stacked and installed. And one servo motor 95 for moving the frame 74, and a frame 37B is interposed between the fixed frame and the frame 74, and between the opposing surfaces of the fixed frame and the frame 37B and between the frames 37A and 37B. Between the opposing surfaces, a molded product / mold installation body 13 is provided.
[Selection] Figure 17

Description

  The present invention relates to a transfer apparatus and a transfer method for transferring a fine transfer pattern formed on a mold onto a molded product.

  In recent years, a mold (mold) is produced by forming an ultrafine transfer pattern on a quartz substrate or the like by an electron beam drawing method or the like, and the mold is applied to a resist film formed on the surface of the substrate to be molded as a predetermined pressure. Research and development has been conducted on nanoimprint technology for transferring the transfer pattern formed on the mold by pressing (see, for example, Non-Patent Document 1).

  Conventionally, as a transfer device that performs nanoimprinting (a transfer device for transferring a fine transfer pattern formed on a mold to a molding product), a plurality of molds and a plurality of coatings are sandwiched between opposing surfaces of two frames. Molded products are placed in a state of being alternately stacked, and the two frames are moved relative to each other in a direction approaching each other, so that pressing force is applied to the sandwiched die and the product to be molded. 2. Description of the Related Art There is known a transfer device that transfers a fine transfer pattern formed on a product to be molded (for example, see Patent Document 1).

JP 2007-176037 A

Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 25 (2001) 192-199

  However, in the case of the transfer apparatus described in Patent Document 1, since transfer is performed in a state where a plurality of molds and a plurality of molded articles are alternately stacked in a sandwich shape, if the mold thickness and surface accuracy are poor, There has been a problem that it tends to be accumulated in the transfer result. In addition, there is a problem that it takes time to separate the mold and the molded product that overlap each other after transfer.

  The present invention has been made in view of the above problems, and when transferring a transfer pattern formed on each mold to a plurality of molded articles, the thickness of the mold and poor surface accuracy are the transfer results. Transfer device and transfer method that do not cause accumulation and prevent high-definition transfer by preventing the occurrence of transfer failure, and that can easily separate the mold and the molded product after transfer. The purpose is to provide.

  The first aspect of the present invention includes a first frame that is fixedly provided, a second frame that is provided so as to be movable toward and away from the first frame, and the first frame. The molded product / mold installation portion provided between the opposing surfaces of the second frame and the second frame and capable of installing the molded product and the mold in an overlapping manner, and the first frame with respect to the first frame By moving the second frame in the approaching direction, a pressing force is applied to the molding product and the mold installed in the molding product / mold installation section, and the fine frame formed on the mold Drive means for transferring a transfer pattern to the molding product and returning the second frame to an initial position after the transfer; and between the first frame and the second frame, the second frame Due to the movement of the frame in the approaching direction relative to the first frame. At least one third frame that is pushed and moves in a direction approaching the first frame is interposed, and between the opposing surfaces of the second frame and the third frame adjacent thereto, the first frame If there are a plurality of the third frames, between the opposing surfaces of the third frame adjacent to the third frame and the opposing surfaces of the third frames adjacent to each other, Each of the transfer devices is provided.

  According to a second aspect of the present invention, in the transfer device according to the first aspect, after the transfer operation, the third frame is moved to an initial position that is separated from the first frame and the second frame. Further, the transfer device is provided with a release means for returning to an initial position separated from an adjacent third frame when there are a plurality of the third frames.

  The invention according to claim 3 is the transfer device according to claim 2, wherein the release means permits the free movement of the third frame when the second frame moves for transfer, Further, when the second frame moves back to the initial position after the transfer, the third frame is returned to the initial position by the moving force of the second frame following the movement of the second frame. This is a transfer device comprising interlocking means.

  According to a fourth aspect of the present invention, in the transfer device according to any one of the first to third aspects, the first frame, the third frame, and the second frame are in a horizontal direction. The transfer devices are arranged in a row.

  Invention of Claim 5 is the transfer method to the said to-be-molded product made | formed using the transfer apparatus of any one of Claims 1-4.

  According to the present invention, it is possible to simultaneously perform transfer between a plurality of frames in a state where a minimum number of molds and workpieces are stacked. Therefore, the thickness of the mold and the poor surface accuracy are not accumulated in the transfer result, and high-definition transfer can be performed by preventing the occurrence of transfer failure. In addition, since the minimum number of molds and the molded product are transferred between the frames, the transferred mold and molded product can be easily separated.

1 is a plan view showing a schematic configuration of a transfer system 1 including a transfer device according to an embodiment of the present invention. FIG. 4 is a diagram showing a manufacturing process of an HDD substrate including a transfer process of a molded product W. FIG. 4 is a diagram showing a manufacturing process of an HDD substrate including a transfer process of a molded product W. 2 is a front view showing a schematic configuration of a transfer device 3. FIG. FIG. 5 is a view taken in the direction of arrow V in FIG. 4. It is VI arrow directional view in FIG. It is a VII arrow line view in FIG. It is a VIII-VIII arrow line view in FIG. It is an enlarged view of the IX part of FIG. FIG. 5 is an X arrow view (enlarged view) in FIG. 4. It is a side view of FIG. 4 is an enlarged view showing a relationship between an installation body 13 and a pressing body 15 of the transfer device 3. FIG. It is a figure which shows the installation operation | movement of the jig | tool 17 to the installation body 13. FIG. It is a figure which shows the installation operation | movement of the jig | tool 17 to the installation body 13. FIG. It is a figure which shows the installation operation | movement of the jig | tool 17 to the installation body 13. FIG. It is a front view which simplifies and shows the principal part structure of the transfer apparatus 3 provided with the release means. FIG. 6 is a front view illustrating the operation of the transfer device 3 during transfer in order from (a) to (c). It is a front view which shows release operation (operation which returns to an initial position) after transfer of transfer device 3 to (a)-(c) in order. 4 is a front view of the temporary assembly / separation unit 7. FIG. 4 is a side view of the temporary assembly / separation unit 7. FIG. It is a XXI arrow line view in FIG. It is a XXII-XXII arrow line view in FIG. FIG. 6 is a diagram showing the operation of the temporary assembly / separation unit 7. FIG. 6 is a diagram showing the operation of the temporary assembly / separation unit 7. FIG. 6 is a diagram showing the operation of the temporary assembly / separation unit 7. FIG. 6 is a diagram showing the operation of the temporary assembly / separation unit 7. 2 is a diagram illustrating a schematic configuration of a single-axis robot 133. FIG. 2 is a diagram showing a schematic configuration of a single-axis robot 135. FIG. It is a side view of the cylindrical coordinate type robot 137. It is a top view of the cylindrical coordinate type robot 137. It is a figure which shows schematic structure of the clamper 149 of the cylindrical coordinate type robot 137. It is a figure which shows schematic structure of the clamper 31 of the articulated robot 159. FIG. It is a figure which shows the modification of the form of transcription | transfer. It is a front view which simplifies and shows the principal part structure of the transfer apparatus 3B provided with the release means of the modification. It is a front view which simplifies and shows the principal part structure of 3 C of transfer apparatuses provided with the release means of another modification. It is a front view which simplifies and shows the principal part structure of transfer apparatus 3D provided with the release means of another modification. It is a front view which simplifies and shows the principal part structure of the transfer apparatus 3E in case there are multiple 3rd frames. It is a front view which simplifies and shows the principal part structure of the transfer apparatus 3F with which the whole was equipped with the attitude | position inclined diagonally. It is a principal part enlarged view of the transfer apparatus of FIG.

  FIG. 1 is a plan view showing a schematic configuration of a transfer system 1 according to an embodiment of the present invention.

  Hereinafter, for convenience of explanation, one horizontal direction is defined as the X-axis direction, another horizontal direction that is orthogonal to the X-axis direction is defined as the Y-axis direction, and the vertical direction is defined as the Z-axis direction. To do.

  The transfer system 1 is installed in a clean room and transfers a fine transfer pattern to each of a plurality of molded articles W. The transfer device 3 and the transfer device 3 before the transfer of the fine transfer pattern are transferred. The molded product stocker 5 for storing the molded product (material to be transferred) W and the molded product W after the fine transfer pattern is transferred, and the mold M and the molded product W are temporarily assembled or separated. Temporary assembly / separation unit 7 to be molded, molded article conveyance means 9 for conveying molded article W between molded article stocker 5 and temporary assembly / separation unit 7, temporary assembly / separation unit 7 and transfer device 3, a temporary assembly transport means 11 that transports the temporarily assembled mold M and the workpiece W (temporary assembly TA), and a robot 12 that mounts and removes a detachment prevention body 18 to be described later. It is configured with.

  Here, the molded product W and the like to be transferred by the transfer system 1 (transfer device 3) will be described in detail with examples.

  2 and 3 are diagrams showing a manufacturing process of the HDD substrate including a transfer process of the molded product W2 (molded product W).

  The molded product W2 is, for example, a base of a discrete media HDD substrate having track bits. FIG. 2A shows a molded product W2 before transfer. FIG. 2B shows the product W2 and the like when the product W2 is sandwiched between the molds MA and MB (each mold M) for transfer. FIG. 3C shows the molded product W2 after transfer.

  As shown in FIG. 2 (a), for example, the molded product W2 before transfer is formed of palladium (Pd) having a thickness of about 30 nm on both sides in the thickness direction of a flat glass disk substrate W1 having a diameter of 2.5 inches. ) A base layer and a perpendicular magnetic recording material cobalt chromium platinum (CoCrPt) having a thickness of about 50 nm are deposited to form the magnetic layers W3A and W3B. , W5B are deposited, and the resist films W7A, W7B are applied on the SiO2 films W5A, W5B, for example, by spin coating.

  As will be described in detail later, a fine transfer pattern (transfer formed with fine irregularities) formed on the mold M is formed on the molded product W2 before transfer shown in FIG. Pattern) is transferred (see FIG. 2B).

  As shown in FIG. 3C, in the molded product W2 after the transfer, the fine uneven patterns of the respective molds MA and MB are transferred onto the surfaces of the resist films W7A and W7B. As the resist films W7A and W7B, an ultraviolet curable resin (UV resin), a thermosetting resin, a thermoplastic resin, or the like can be used. In the state shown in FIG. 2A, the resist films W7A and W7B are cured. However, it is cured during the transfer shown in FIG.

  Subsequently, as shown in FIG. 3D, the magnetic layers W3A and W3B are patterned. Specifically, the SiO2 films W5A and W5B are etched by RIE (Reactive Ion Etching) until the surfaces of the magnetic layers W3A and W3B are reached by using the resist films W7A and W7B transferred with fine irregularities as a mask. Then, the magnetic layers W3A and W3B are etched using this pattern. The groove region thus formed becomes the separation region. The patterned magnetic layers W3A and W3B form a recording track band.

  Subsequently, as shown in FIG. 3E, SiO.sub.2 films W9A and W9B having a thickness of about 50 nm are formed on the entire surface of the substrate, and groove portions of the respective magnetic layers W3A and W3B are filled to form isolation regions. Thereafter, the surfaces of the SiO2 films W9A and W9B are polished and flattened by chemical mechanical polishing (CMP). Then, by forming diamond like carbon as the protective films W11A and W11B on the entire surface, a magnetic recording medium (HDD substrate) WP is obtained as shown in FIG.

  The transfer system 1 (transfer device 3) is in charge of the steps shown in FIGS. 2A, 2B, and 3C among the manufacturing steps shown in FIGS. . Moreover, although it is not clear in FIG.2 and FIG.3, the to-be-molded product W and each type | mold M (MA, MB) are formed in the thin disc shape which has a circular center through-hole in the center part.

  Next, the transfer device 3 will be described in detail.

  4 is a front view showing a schematic configuration of the transfer device 3, FIG. 5 is a view taken along arrow V in FIG. 4, FIG. 6 is a view taken along arrow VI in FIG. 4, and FIG. 4 is a view taken along arrow VII in FIG. 4, FIG. 8 is a view taken along arrow VIII-VIII in FIG. 4, and FIG. 9 is an enlarged view of a portion IX in FIG.

  10 is a view (enlarged view) in the direction of arrow X in FIG. 4, FIG. 11 is a side view of FIG. 10, and FIG. 12 is an enlarged view of the relationship between the installation body 13 and the pressing body 15 of the transfer device 3. FIG. In addition, the installation body 13 shown in FIG. 9 or the like is provided with a jig 17 on which a temporary assembly TA composed of a mold M (MA, MB) and a product to be molded W is installed. FIGS. 13 to 15 are diagrams showing an installation operation of the jig 17 on the installation body 13, and FIG. 16 is a front view showing a simplified configuration of a main part of the transfer device 3 provided with a release means. FIG. 17 is a front view illustrating the transfer operation of the transfer device 3 in order from (a) to (c), and FIG. 18 shows the release operation (transfer to the initial position) after transfer of the transfer device 3 ( It is a front view shown in order from a) to (c).

  The transfer device 3 is, for example, a fine transfer formed on one surface in the thickness direction of the circular flat plate-shaped workpiece W on one surface in the thickness direction of the first mold MA in the circular flat plate shape. A fine transfer pattern formed on one surface in the thickness direction of the circular flat plate-shaped second mold MB is formed on the other surface in the thickness direction of the circular flat plate-shaped article W by transferring the pattern. This is a transfer device, and is configured to include an installation body 13 on which the jig 17 is detachably installed, and a pressing body 15 facing the installation body 13.

  The entire structure of the transfer device 3 will be described. The transfer device 3 includes a base frame 77 as shown in FIG. A fixed frame (first frame) 74 is integrally provided at one end of the base frame 77 in the X-axis direction via a spacer 79, and a support frame is provided at the other end of the base frame 77 in the X-axis direction. 81 is provided. The fixed frame 74 and the support frame 81 are connected to each other by four tie rods 83 extending in the X-axis direction.

  Two movable frames (a second frame and a third frame) 37 are provided at an intermediate portion of the base frame 77 in the X-axis direction (that is, an intermediate portion between the fixed frame 74 and the support frame 81). 81 are arranged in series with 81. Here, the movable frame 37 on the support frame 81 side (movable frame 37A in FIG. 16) corresponds to the second frame, and the movable frame 37 on the fixed frame (first frame) 74 side (movable frame 37B in FIG. 16). ) Corresponds to the third frame. Therefore, when it is necessary to distinguish between them later, these movable frames may be referred to as the second frame 37 (37A) and the third frame 37 (37B).

  When viewed from the X-axis direction, the fixed frame 74, the movable frame 37, and the support frame 81 are formed in a rectangular shape (as shown in FIGS. 6, 7, and 8) and substantially overlap each other. The four tie rods 83 are provided in the vicinity of the four corners of the fixed frame 74 and the support frame 81, and in the vicinity of the four corners of the two movable frames 37, the through holes 85 through which the tie rods 83 pass. Is provided. Therefore, the tie rods 83 and the movable frame 37 are not in contact with each other.

  The support frame 81 is supported by the base frame 77 via a spacer 87 and a linear guide bearing 89. Therefore, when the tie rod 83 slightly expands and contracts in the X-axis direction due to the application or removal of the pressing force during transfer to the molding target W, the support frame 81 moves with respect to the base frame 77 in accordance with the expansion / contraction. It moves in the axial direction.

  The two movable frames 37 are respectively supported by the base frame 77 via linear guide bearings 91. Further, the movable frame 37 (second frame 37A) on the support frame 81 side is supported by the support frame 81 via a ball screw 93 as shown in FIG. Then, under the control of the control device 55, the movable frame 37 (second frame 37A) on the support frame 81 side is moved relative to the support frame 81 (base frame 77) by an actuator such as a servo motor (drive means) 95. It is possible to move and position in the X-axis direction.

  More specifically, as shown in FIG. 5, one end portion of the screw shaft 97 of the ball screw 93 extending in the X-axis direction is integrally provided on the movable frame 37 (second frame 37A) on the support frame 81 side. It has been. The ball screw 93 passes through the inside of the through hole 105 provided in the support frame 81. A nut 99 is engaged with an intermediate portion of the screw shaft 97 in the X-axis direction. A connecting member 101 that is cylindrical and formed in a cup shape is integrally provided at the other end of the nut 99 in the X-axis direction. The other end (the end opposite to the nut 99) of the connecting member 101 in the X-axis direction is connected to the rotation output shaft of the servo motor 95 via the coupling 103. The connecting member 101 is rotatably supported by a cylindrical bearing support 109 via a bearing 107. The bearing support 109 is provided integrally with the support frame 81. The housing of the servo motor 95 is integrally provided on the support frame 81 via the servo motor support 111.

  Further, the movable frame 37 on the fixed frame 74 side, which is the third frame 37B, is not particularly connected to a direct driving means, and is pushed by the movement of the second frame 37A in the approaching direction with respect to the fixed frame 74. Thus, it can move dynamically in the direction approaching the fixed frame 74.

  Further, between the opposing surfaces of the two movable frames 37 (second frame 37A and third frame 37B) and between the opposing surfaces of the fixed frame 74 and the movable frame 37 (third frame 37B) on the fixed frame 74 side. Are provided with a set of an installation body 13 and a pressing body 15 which is an installation part of the temporary assembly TA (installation part of a molded product / mold). As long as the pressing body 15 and the installation body 13 are provided with the pressing body 15 on one of the opposing surfaces and the installation body 13 on the other of the opposing surfaces, the arrangement may be freely determined for each opposing surface. In this embodiment, the installation bodies 15 are provided on the surfaces of the two movable frames 37 on the fixed frame 74 side, and the pressing bodies are provided on the surfaces of the fixed frame 74 and the movable frame 37 on the fixed frame 74 side on the support frame 81 side. 45 is provided.

  In the case of this embodiment, the fixed frame 74, the third frame 37B, the second frame 37A, and the support frame 81 are arranged in this order in the horizontal direction, and when the jig 17 is attached to the installation body 13, The installation surface 33 of the jig 17 is oriented in the horizontal direction. The moving direction of the movable frame 37 is also set to the horizontal direction.

  With the above configuration, the servo motor 95 is driven to move the second frame 37A in the direction approaching the fixed frame 74 as shown by the arrow A1 in FIG. A pressing force can be applied to the pressing body 15 and the installation body 13 between the opposing surfaces of the frame 37A and the third frame 37B, and the third pressing force can be applied to the third body 37B as shown by an arrow A2 in FIG. The frame 37B can be moved in a direction approaching the fixed frame 74, and finally a pressing force is applied between each pressing body 15 and the installation body 13 as shown in FIG. As a result, a pressing force is applied to the molded product TA held by the jig 17 of the installation body 15 so that the fine transfer pattern formed on the mold M can be transferred to the molded product W. Yes.

  Further, by operating the servo motor 95 in the reverse direction, the second frame 37A can be released to the initial position, but the third frame 37B having no direct drive means returns to the initial position as it is. I can't do it.

  Therefore, in this embodiment, release means is provided for returning the third frame 37B to the initial positions separated from the fixed frame 74 and the second frame 37A after the transfer operation. As the release means of the present embodiment, when the second frame 37A for transfer is moved, the third frame 37B is allowed to move freely, and after the transfer, the second frame 37A returns to the initial position. Further, interlocking means 110 for returning the third frame 37B to the initial position by the moving force of the second frame 37A following the movement of the second frame 37A is provided.

  As shown in FIGS. 16 to 18, the interlocking means 110 as the release means in this case has a predetermined distance between the adjacent frames 74 and 37B and 37A and 37B (each movable frame 37 is in the initial position). If the distance between the adjacent frames is greater than or equal to the distance between the adjacent frames, when the distance between the adjacent frames is less than a predetermined length, It has the characteristic of allowing the movable frame 37 to move freely without any transmission of movement force. Specifically, long holes 112 that are long in the length direction are provided at both ends, the length is long enough to connect the fixed frame 74 to the second frame 37A, and an intermediate portion in the length direction is fixed to the third frame 37B. The connecting bar 111 is fixed to the second frame 37A and the fixed frame 74, and the pin 116 is slidably fitted into each elongated hole 112 of the connecting bar 111.

  The fixed frame 74, the two movable frames 37, the central axis CL 1 of the support frame 81 (the central axis extending in the X-axis direction) CL 1, the central axis of the installation body 13, and the jig 17 installed on the installation body 13. The central axis, the central axis of the pressing body 15, and the central axis of the ball screw 93 are coincident with each other.

  As shown in FIG. 4, the base frame 77 is located below the axis CL1 in the Y-axis direction. In consideration of the force applied when the temporary assembly TA is pressed by the installation body 13 and the pressing body 15, the linear guide bearing 89 of the support frame 81 is provided at a position that substantially coincides with the axis CL1 in the Y-axis direction. Yes. On the other hand, the linear guide bearing 91 of the movable frame 37 is provided below the axis CL1 in the Y-axis direction.

  As a result, as shown in FIG. 5, when viewed from the Y-axis direction, the installation body 13 can be seen from above without being obstructed by the base frame 77 and the tie rod 83. The installation (loading) of the jig (the jig on which the temporary assembly TA is installed) 17 to the installation body 13 and the unloading from the installation body 13 are easy. Note that reference numeral GL in FIG. 4 indicates a horizontal floor surface.

  As shown in FIGS. 8, 10, and 11, the clamper 41 is provided above the installation body 13 and below the installation body 13. The clamper 41 includes a shaft portion 115 and a claw portion 117 provided integrally with the shaft portion 115 at the tip portion of the shaft portion 115. The shaft portion 115 is movable in the X-axis direction with respect to the movable frame 37, and is rotated at an angle of 90 °, for example, with an axis parallel to the X-axis as a rotation center. .

  And before installing the jig | tool 17, the nail | claw part 117 (shaft part 115) has evacuated to the position of PS1 shown in FIG. 10, FIG. When the jig 17 is installed on the installation body 13 by the temporary assembly conveying means 11, the shaft portion 115 (claw portion 117) extends to the position of PS2, and the claw portion 117 rotates 90 ° (position of PS3). After that, the shaft portion 115 (claw portion 117) is retracted to the installation body 13 side, and the claw portion 117 pushes the flange portion 35 of the installation body 13 so that the jig 17 is clamped. (Refer to the position of PS4).

  The operation of each clamper 41 described above is performed by an actuator such as a robot cylinder (not shown) under the control of the control device 55, for example.

  As shown in FIG. 9, the jig 17 includes a main body member 19 and a support member constituting member 21 and is integrally configured. Accordingly, the jig 17 includes a disc-shaped base end portion 23 having a predetermined thickness, a disc-shaped distal end portion 25 having a predetermined thickness, and a columnar (pin-shaped) support body. 27. The proximal end portion 23, the distal end portion 25, and the support body 27 are arranged coaxially, and are connected in the order of the proximal end portion 23, the distal end portion 25, and the support body 27. The outer diameter of the base end portion 23 is larger than the outer diameter of the distal end portion 25, and the outer diameter of the support body 27 is smaller than the outer diameter of the distal end portion 25.

  On the outer periphery of the distal end portion 25 on the base end portion 23 side, a ring-shaped recess (a gripped portion) 29 is formed, and the temporary assembly TA is installed by the temporary assembly transport means 11 17 is transported, the hand 31 of the temporary assembly transport means 11 is engaged with the gripped portion 29 (see FIGS. 13, 14, and 29), and the jig 17 on which the temporary assembly TA is installed is removed. It is designed to grip. Note that the jig 17 may be integrally formed without being configured as a separate body, such as the main body member 19 and the support member constituting member 21.

  In the temporary assembly TA, the mold MA, the workpiece W, and the mold MB are overlapped in this order in the thickness direction. More specifically, in the temporary assembly TA, one surface in the thickness direction of the mold MA on which the fine transfer pattern is formed and one of the surfaces in the thickness direction of the molded product W onto which the fine transfer pattern is transferred. The thickness of the molded product W to which the fine transfer pattern is transferred and one surface in the thickness direction of the mold MB on which the fine transfer pattern is formed are overlapped with each other. The other surfaces in the direction overlap each other in surface contact. The temporary assembly TA is formed in a circular flat plate shape having a central through hole (see FIGS. 9 and 12).

  A circular installation surface 33 having a predetermined size is formed on the jig 17. The installation surface 33 is configured by a flat surface (end surface in the thickness direction) of the distal end portion 25. When the temporary assembly TA is installed on the jig 17, one surface in the thickness direction of the temporary assembly TA is in surface contact with the installation surface 33. More specifically, when the temporary assembly TA is installed on the jig 17, the back surface of the mold MB in the temporary assembly TA (the other surface in the thickness direction of the mold MB where the fine transfer pattern is not formed). The entire surface (the entire back surface of the mold MB corresponding to the surface on which the fine transfer pattern is formed) is in surface contact.

  Further, the installation surface 33 is not provided with any grooves or holes used for vacuum suction or the like for holding the temporary assembly TA, and the installation surface 33 is completely provided if negligible processing errors are ignored. It has a flat surface.

  As already understood, the support body 27 is provided on the jig 17 so as to protrude vertically from the central portion of the installation surface 33. The support 27 is used when the temporary assembly TA is installed on the jig 17 (including after the installation), and when the jig 17 on which the temporary assembly TA is installed is installed on the installation body 13. It is intended to prevent the temporary assembly TA from dropping due to gravity by being fitted in the center through hole of the temporary assembly TA in advance (including after installation). In addition, the support 27 is arranged so that the temporary assembly TA is mounted on the installation surface 33 in the direction in which the installation surface 33 is deployed (for example, in the Y-axis direction shown in FIG. 9). It is for positioning.

  Further, a ring-shaped detachment preventing body 18 is fitted to the front end side of the support body 27 from the position where the temporary assembly TA is fitted, along with the temporary assembly TA. This disengagement prevention body 18 is located more than the position where the temporary assembly TA is fitted when the support 27 is fitted into the central through hole of the temporary assembly TA to prevent the temporary assembly TA from falling. The temporary assembly TA is prevented from coming off from the support 27 by being fitted to the front end side of the support 27 side by side with the temporary assembly TA. Therefore, the protruding length of the support 27 from the installation surface 33 is such that when the disengagement prevention body 18 is fitted to the front end side of the support 27 in this way, the tip protrudes beyond the disengagement prevention body 18. Such extended dimensions are set.

  The ring-shaped detachment prevention body 18 is configured to have a thickness and weight sufficiently larger than the temporary assembly TA, and both end surfaces of a predetermined size are formed on a plane perpendicular to the axial direction. Further, since the thickness is sufficiently larger than the temporary assembly TA, the axial length of the fitting surface of the anti-detachment body 18 with respect to the support body 27 is set to be equal to or larger than the diameter of the support body 27. ing.

  In addition, as shown in FIG. 12, when the temporary assembly TA is installed in surface contact with the installation surface 33, the temporary outer surface of the support 27 fitted in the central through hole of the temporary assembly TA is temporarily installed. At a position protruding outward from the assembly TA, a stepped portion 27a is provided for making the diameter smaller so that the tip end side is disengaged from the position and fitted into the prevention body 18. On the other hand, when the ring-shaped detachment prevention body 18 is fitted to the support body 27, the end of the inner peripheral surface 18a on the side adjacent to the temporary assembly TA interferes with the stepped portion 27a on the support body 27 side. An annular relief recess 18b to be avoided is provided. When the temporary assembly TA and the detachment prevention body 18 are fitted on the outer periphery of the pin-shaped support body 27, the fitting gap between the detachment prevention body 18 and the support body 27 is fitted into the support body 27 of the temporary assembly TA. It is set to be larger than the gap.

  The installation body 13 is formed in a columnar shape having a disc-shaped flange 35 on the base end side. The flange 35 is supported by the movable frame 37 of the transfer device 3. A cylindrical recess 39 is provided at the distal end portion of the installation body 13, and the base end portion 23 of the jig 17 is formed on the side surface and the bottom surface (a plane developed in the Y-axis direction) of the recess 39. By fitting (fitting) and clamping the jig 17 with the clamper 41 (see FIGS. 10 and 11), the jig 17 is integrally installed at a predetermined position of the installation body 13. ing. In this way, the installation surface 33 of the jig 17 installed on the installation body 13 faces the horizontal direction.

  As shown in FIG. 9, the pressing body 15 is formed in a columnar shape having a disc-shaped flange 43 on the base end side. At the tip of the pressing body 15, there is provided a pressing surface 45 that is a plane that comes into surface contact with the end surface of the detachment prevention body 18 that is disposed on the other surface (back surface of the mold MB) side of the temporary assembly TA. The pressing surface 45 is a plane of a predetermined size that is parallel to and faces the installation surface 33 of the jig 17 installed on the installation body 13. The pressing surface 45 and the both ends of the detachment support 18 are not provided with any grooves or holes for vacuum-sucking the mold MB, and are completely flat if processing errors are ignored. Yes.

  Then, in order to sandwich and press the temporary assembly TA installed on the installation body 13 via the jig 17 between the installation body 13 and the pressing body 15 (see FIG. 15), the pressing body 15 The installation body 13 can be moved and positioned relative to the pressing body 15 in a direction (X-axis direction) approaching / separating from the pressing body 15. As already understood, when the temporary assembly TA is sandwiched and pressed between the installation body 13 and the pressing body 15, one surface in the thickness direction of the temporary assembly TA (the back surface of the mold MA) is the installation surface. The other surface in the thickness direction of the temporary assembly TA (the back surface of the mold MB) is in surface contact with one end surface of the detachment preventing body 18. In addition, a hole 47 into which the tip of the support body 27 enters when the pressing is performed is provided in the center of the pressing surface 45 of the pressing body 15. The outer diameter of the support 27 is slightly smaller than the inner diameter of the hole 47.

  The pressing body 15 is provided with an air passage (through hole) 49, and one end of the air passage 49 communicates with the bottom of the hole 47. The other end of the air path 49 is connected to a filter (not shown) and a negative pressure generator (not shown) such as a vacuum pump. The installation body 13 and the pressing body 15 connect the temporary assembly TA and the detachment prevention body 18 together. When sandwiched and pressed, the air in the hole 47 is sucked to remove fine particles present in the hole 47 in an extremely small amount.

  Similarly, the installation body 13 is also provided with an air path (through-hole) 51, and when the jig 17 is installed on the installation body 13, the air in the recess 39 is sucked into the recess 39. The fine particles generated by contact with the side surface of the jig 17 and the side surface of the base end portion 23 of the jig 17 or the fine particles originally existing in the recess 39 are removed.

  The installation body 13 is supported by the movable frame 37 via the load cell 53. Then, the pressing force when the temporary assembly TA installed in the jig 17 is sandwiched and pressed by the installation body 13 and the pressing body 15 is measured by the load cell 53, and the control device 55 (FIG. 1) is measured. ), Control is performed so that the pressing force by the pressing body 15 (installation body 13) becomes a predetermined pressing force determined in advance according to the detection result of the load cell 53.

  Further, when the jig 17 on which the temporary assembly TA is installed is installed on the installation body 13, the strain generating body of the load cell 53 is caused by the rotational moment due to the weight of the temporary assembly TA, the jig 17 and the installation body 13. Although distortion occurs in the (strain generation section) 58, the transfer device 3 is provided with a distortion reduction means 56 for reducing the distortion.

  Explaining in detail with an example, the load cell 53 is configured to include, for example, a main body portion 57 having a circular through hole 54 in the central portion and formed in a disk shape with a predetermined thickness. An annular concave portion 59 is formed in the middle portion of the radial direction 57. By forming the concave portion 59, the main body portion 57 includes an annular central portion 61, an annular strain generating portion 58 positioned outside the central portion 61, and the strain generating portion 58. It is divided into an annular outer peripheral portion 63 located outside.

  The central portion 61 is provided integrally with the installation body 13 via the spacer 66, and the outer peripheral portion 63 is provided integrally with the movable frame 37. The strain generating portion 58 is provided with a strain gauge (not shown). Then, when a rightward force is applied to the installation body 13 in FIG. 9, distortion occurs in the strain generating portion 58, and the pressing force of the temporary assembly TA by the installation body 13 and the pressing body 15 can be measured. It can be done.

  A cylindrical guide member 65 is integrally provided at the center of the base end portion of the installation body 13. For example, the guide member 65 is engaged with the cylindrical guide member support 67 in a sliding pair, and the guide member 65 is almost free from rattling with respect to the cylindrical guide member support 67. Thus, it can be moved in the X-axis direction. That is, the outer diameter of the guide member 65 is very slightly smaller than the inner diameter of the guide member support 67. The cylindrical guide member support 67 is integrally provided on a movable frame 37 described later in detail. As a result, the rotational moment due to the weight of the temporary assembly TA, the jig 17 and the installation body 13 can be received by the guide member 65 and the cylindrical guide member support 67, and the strain generating portion 58 of the load cell 53 can be received. The generated strain (initial strain) can be reduced.

  The guide member 65 and the guide member support 67 are located in a through hole 54 provided in the center of the main body 57, and the load cell 53 and the spacer 66 are recessed portions 69 formed in the movable frame 37. Located in. Further, as the cylindrical guide member support 67, a linear guide bearing that rolls against the guide member 65 may be adopted. In this case, it is desirable that radial pressure is applied to the guide member 65 engaged with the cylindrical guide member support 67.

  Further, the transfer device 3 is provided with a pressing surface deforming means 71 that elastically deforms the central portion of the pressing surface 45 of the pressing body 15 so as to protrude slightly toward the jig 17 installed on the installation body 13. Yes.

  Specifically, the pressing body 15 is provided integrally with a fixed frame 74, which will be described later in detail, at the base end. The fixed frame 74 is provided with a recess 73, and an actuator composed of a piezo element 75 or the like is installed in the recess 73. The piezo element 75 expands and contracts in the X-axis direction under the control of the control device 55. One end of the piezo element 75 in the X-axis direction is in contact with the bottom of the recess 73, and the other end of the piezo element 75 in the X-axis direction is in contact with the center of the base end of the pressing body 15. . In the state shown in FIG. 9 in which no voltage is applied to the piezo element 75, the length of the piezo element 75 (the length in the X-axis direction) and the depth of the recess 73 coincide with each other. When a voltage is applied to 75, the piezoelectric element 75 extends according to the value of the voltage applied, and the central portion of the pressing surface 45 is appropriately elastically deformed into a convex shape.

  Next, the temporary assembly / separation unit 7 will be described.

  19 is a front view of the temporary assembly / separation unit 7, FIG. 20 is a side view of the temporary assembly / separation unit 7, FIG. 21 is a view taken along arrow XXI in FIG. 19, and FIG. It is a XXII-XXII arrow line view in FIG.

  The temporary assembly / separation unit 7 generates a temporary assembly TA from the molds MA and MB and the molded product W before the fine transfer pattern is transferred, and the molds MA and MB and the fine transfer pattern. Is a device for separating the temporary assembly TA composed of the molded product W to which the mold is transferred into the molds MA and MB and the molded product W.

  The temporary assembly / separation unit 7 includes a jig holder 119 that can hold the jig 17 and a mold holder 121 that is provided above the jig holder 119 and that can hold the mold MB on its lower surface. Thus, the jig holder 119 is movable and positionable relative to the mold holder 121 in a direction (Z-axis direction) approaching and separating from the mold holder 121.

  More specifically, the temporary assembly / separation unit 7 includes a base frame 123, and the jig holder 119 is interposed at the intermediate portion of the base frame 123 in the height direction via the linear guide bearing 125. It is supported by. The jig holder 119 can be moved and positioned in the Z-axis direction under the control of the control device 55 by an actuator such as a servo motor 126 and a ball screw 129.

  The upper portion 127 of the jig holding body 119 is configured in the same manner as the installation body 13 of the transfer device 3 described above, so that the jig 17 positioned and installed above can be held by the clamper 41. It has become.

  The mold holder 121 is provided integrally with the base frame 123 above the base frame 123. A lower portion 131 of the mold holding body 121 is configured in the same manner as the pressing body 15 of the transfer device 3 described above. However, the lower portion 131 is provided with an air path 132 for vacuum-sucking the mold MB, and the back surface (upper surface) of the mold MB is brought into contact with the planar lower surface of the lower portion 131 to perform vacuum suction. The type MB is held.

  The jig holder 119 is positioned below and away from the mold holder 121, the jig holder 119 holds the jig 17 on which the mold MA is installed, and the mold holder 121 is the mold. In a state where the MB is held, the molded product W before being transferred is placed on the mold MA, and the jig holder 119 is raised until the molded product W contacts the mold MB. Temporary assembly in which the mold MA, the workpiece W, and the mold MB overlap each other on the jig 17 by releasing the holding of the mold MB by the mold holding body 121 and moving the jig holding body 119 downward. TA is set up.

  Next, the robot 12 that attaches and removes the detachment prevention body 18 to the upper side of the temporary assembly TA installed in the jig 17 will be described. As shown in FIG. 1 with a simplified arrow, the robot 12 first grips a ring-shaped detachment prevention body 18 that has been retracted to a position that does not interfere with the assembly of the temporary assembly TA, and a jig 17 It is placed on the temporary assembly TA assembled above and serves to fit the support 27. Further, at the time of separation, the detachment preventing body 18 placed on the upper side of the temporary assembly TA that has been transferred is gripped and lifted, and is again retracted to a position that does not interfere with the assembly of the next temporary assembly TA. .

  Note that the molded product W before being transferred is transported from the stocker 5 by the molded product transport means 9. In addition, the jig 17 in which the mold MA, the workpiece W, and the mold MB are stacked is released from the holding of the jig holder 119 by the clamper 41, and then transferred by the temporary assembly transport unit 11. 3 and is installed on the installation body 13 of the transfer device 3.

  Further, the jig 17 on which the temporary assembly TA including the molded product W transferred by the transfer device 3 is installed is unloaded by the temporary assembly transport means 11 and held by the temporary assembly / separation unit 7. It is designed to be installed on the body 119.

  Thereafter, the jig 17 is held by the clamper 41, the jig holder 119 is raised, the mold holder 121 is brought into contact with the mold MB, the mold MB is held by vacuum suction, and the jig holder 119 is lowered. Thus, the mold MB is separated from the assembly TA.

  In this state, the mold MA and the molded product W to which the transfer has been performed are installed on the jig holder 119 together with the jig 17. After this, the molded product W that has been transferred is conveyed to the stocker 5 by the molded product conveying means 9.

  Next, the stocker 5 will be described.

  As shown in FIG. 1, the stocker 5 includes a stocker 5A that stores a molded product W before transfer and a stocker 5B that stores a molded product W after transfer. The stocker 5A is configured so that a plurality of disk-shaped molded products W are arranged so that their thickness directions are in the vertical direction, and the molded products W are arranged at predetermined intervals in the vertical direction. And can be stored. The stocker 5B is configured similarly to the stocker 5A.

  Next, the molded product conveying means 9 will be described in detail.

  The molded product conveyance means 9 includes, for example, a first molded product conveyance means 133 configured by a single axis robot, a second molded product conveyance means 135 configured by a single axis robot, and a cylindrical coordinate robot. And a third article-conveying means 137 configured as described above.

  The single-axis robot 133 conveys the molded product W before transfer between the stocker 5A for the molded product before transfer and the cylindrical coordinate robot 137. The single-axis robot 135 is a cylindrical coordinate robot. The molded product W after transfer is transported between 137 and the stocker 5B for the molded product after transfer. The cylindrical coordinate type robot 137 conveys the molded product W between the uniaxial robots 133 and 135 and the temporary assembly / separation unit 7.

  As shown in FIG. 27 (FIG. 27 (a) is a plan view of the single-axis robot 133, and FIG. 27 (b) is a side view of the single-axis robot 133), the first article transfer means (single-axis robot) 133 is formed. Is configured to include a housing 139 and a movable frame 141 that can be moved and positioned in the Y-axis direction with respect to the housing. A clamper 143 is provided at the tip of the movable frame 141, and the disc-shaped workpiece W is clamped by the clamper 143 and conveyed in the Y-axis direction. Clamping by the clamper 143 is performed by gripping the arc-shaped outer periphery of the workpiece W in the vertical direction. The housing of the stocker 5A can be moved and positioned in the vertical direction, and each molded product W stored in the stocker 5A can be carried out by the single-axis robot 133 one by one. . Note that the second article-conveying means (single-axis robot) 135 (see FIG. 28) is also configured in the same manner as the single-axis robot 133 except that the moving stroke of the movable frame 141 is different.

  As shown in FIG. 29 (a side view of the cylindrical coordinate robot 137) and FIG. 30 (a plan view of the cylindrical coordinate robot 137; a view taken along arrow XXX in FIG. 29), a third article conveying means (cylindrical coordinate type) The robot 137 includes a housing 145 and an arm 147 extending in the horizontal direction. The arm 147 is movable and positionable in the Z-axis direction, and is also rotatable and positionable about an axis CL2 that extends in the Z-axis direction through the center of the housing 145.

  The axis CL2 passes through the base end side of the arm 147 in the longitudinal direction. A clamper 149 is provided on the tip end side of the arm 147, and the disc-shaped workpiece W is clamped and conveyed by the clamper 149. Clamping by the clamper 149 is performed by using two opposing members 151 and 153 on two arcuate outer peripheral portions (two opposing outer peripheral portions) of the molded product W. It is designed to be sandwiched with very little force from the direction. As described above, since the part holding the molded product W is different from each single-axis robot 133, 135, the cylindrical coordinate robot 137 holds the molded product W without interfering with each single-axis robot 133, 135. It can be held instead. That is, for example, the workpiece W held by the single-axis robot 133 can be held by the cylindrical coordinate robot 137 while being held.

  In addition, projections 155 and 157 for preventing the molded product W from falling are formed at the lower ends of the members 151 and 153 constituting the clamper 149 (FIG. 2A, FIG. 31 (c)). And when installing the molded product W in the temporary assembly / separation unit 7, the outer diameter of the mold MA is made larger than the outer diameter of the molded product W in order to avoid interference between the members 151, 153 and the mold MA. Slightly smaller.

  As shown in FIG. 1, the clamper 149 of the cylindrical coordinate robot 137 moves along an arcuate locus. Then, a single molded product W is received from the robot 133 at the position P1 and conveyed to the position P2 of the temporary assembly / separation unit 7, and a single molded product W is received at the position P2 of the temporary assembly / separation unit 7. , It is transported to the position P3 and delivered to the uniaxial robot 135.

  Next, the temporary assembly transport unit 11 will be described in detail.

  The temporary assembly transport unit 11 transports the temporary assembly TA and the disengagement prevention body 18 installed in the jig 17 between the temporary assembly / separation unit 7 and the transfer device 3 (temporary assembly TA and disengagement). The prevention body 18 is transported together with the jig 17), and is composed of, for example, an articulated robot 159. As shown in FIG. 32, a band (clamper) 31 is provided at the tip of the arm of the articulated robot 159, and the jig 17 can be held and transported by the clamper 31. .

  Next, the operation of the transfer system 1 will be described.

  As an initial state, the molded product W before transfer is stored in the stocker 5A, and the robots 133, 135, 137, 159 and the transfer device 3 do not hold the molded product W or the jig 17, It is assumed that the temporary assembly / separation unit 7 holds the jig 17 in which only the mold MA is installed and the mold MB (see FIG. 25).

  In this initial state, under the control of the controller 55, the robot 133 takes out one molded product W from the stocker 5A and transports it to the position P1 in FIG. Then, the workpiece W having the position P1 is held by the robot 137 and conveyed to the position P2 of the temporary assembly / separation unit 7 (see FIGS. 1 and 25). From the state shown in FIG. 25, the arm 147 of the robot 137 is lowered (the jig holder 119 may be raised), the product W is brought into contact with the mold MA installed on the jig 17, and the clamper is moved. The holding by 149 is released and the product W is placed on the mold MA. Thereafter, the arm 147 of the robot 137 is rotated to retract the clamper 149 (arm 147) from the position P2.

  Subsequently, the jig holder 119 is raised so that the product W and the mold MB are brought into contact with each other so that the mold MA, the product W, and the mold MB overlap in this order on the jig 17 from below ( Thereafter, the holding of the mold MB by the mold holding body 121 is released, and the jig holding body 119 is lowered. Thereby, temporary assembly TA is installed in the jig | tool 17 (refer FIG. 23). In this state, one surface in the thickness direction of the temporarily assembled temporary assembly TA (the back surface of the mold MA) is in surface contact with the installation surface 33 of the jig 17. Even if a part of the temporary assembly TA (through hole in the center) is in contact with (fitted to) the support body 27 provided in the jig 17, The assembly TA is prevented from dropping due to gravity. In the above state, the temporary assembly TA is positioned and installed with respect to the installation surface 33 in the deployment direction of the installation surface 33.

  Next, under the control of the control device 55, the robot 12 is moved, and the detachment prevention body 18 is placed on the upper side of the temporary assembly TA and fitted to the support body 27.

  Subsequently, the jig 17 (the jig on which the temporary assembly TA and the detachment prevention body 18 are installed) 17 existing at the position P2 is gripped by the hand 31 of the robot 159 (see FIG. 23), and the robot 159 is moved. Used to convey to the transfer device 3.

  Thereafter, the installation body 13 (movable frame 37) is moved, the installation body 13 and the jig 17 are engaged, and the jig 17 installed on the installation body 13 is clamped by the clamper 41. Then, the installation of the jig 17 on the installation body 13 is completed (see FIGS. 13 and 14). Then, by installing the jig 17 on the installation body 13 in this way, the installation surface 33 of the jig 17 faces the horizontal direction, and the support body 27 also faces the horizontal direction.

  The jig 17 in which the temporary assembly TA is installed is installed in the transfer device 3. The robot 159 conveys the jig 17 to a predetermined space between the installation body 13 and the pressing body 15. However, the orientation is changed from a vertical posture to a horizontal posture.

  Further, in the case of the transfer device 3, since there are two places where the transfer operation is performed at the same time, jigs (temporary assemblies TA and prevention of detachment) are respectively attached to the installation bodies 13 of the second frame 37A and the third frame 37B. The jig 17 on which the body 18 is installed is installed. Thereafter, the arm of the robot 159 is retracted.

  In this state, the movable frame 37 is moved, and the temporary assembly TA is sandwiched between the pressing body 15 and the installation body 13 to perform transfer (see FIG. 15). The movement at this time will be described with reference to FIG.

  First, the servo motor 95 is driven to move the second frame 37A in a direction approaching the fixed frame 74 as indicated by an arrow A1 in FIG. Then, as a result of the approach, the pressing body 15 and the installation body 13 between the opposing surfaces of the second frame 37A and the third frame 37B come into contact with each other via the temporary assembly TA and the disengagement prevention body 18, whereby both A pressing force is generated in the meantime. Then, this time, the third frame 37B is pushed by the second frame 37A and moves closer to the fixed frame 74 as shown by the arrow A2 in FIG. As shown in FIG. 17 (c), a pressing force can be applied simultaneously between the two pressing bodies 15 and the installation body 13.

  Therefore, a pressing force can be applied to the molded product TA held by the jig 17 of the installation body 13, and a fine transfer pattern formed on the mold M can be transferred to the molded product W. In this transfer operation, the connecting bar 111 constituting the interlocking unit 110 moves so as not to obstruct the movement of the movable frame 37, and prepares for the next release role. Further, at the time of transfer, a detachment preventing body 18 is interposed between the pressing body 15 and the temporary assembly TA, and one end surface of the detachment preventing body 18 is on the other surface of the temporary assembly TA (the back surface of the mold MB). Transfer by pressing is performed in a state where the surface comes into contact and the other end surface of the detachment preventing body 18 is in surface contact with the pressing surface 45 of the pressing body 15.

  In this transfer device 3, it is only necessary to equip one servo motor 95 as a driving means, so that an excessive mechanism is eliminated, and a simple structure is used, and individual pressing bodies 15 and installation bodies 13 are used simultaneously at a plurality of locations. Transfer. Therefore, unlike the conventional sandwiching process in which a plurality of molds and molded products are alternately stacked, the thickness and surface accuracy of the mold M are not accumulated in the transfer result. Therefore, high-definition transfer can be performed by preventing the occurrence of transfer failure. In addition, since simultaneous transfer is performed at a plurality of locations individually, it is possible to easily separate the mold M and the product W after the transfer as will be described later.

  Further, after the transfer, the servo motor 95 is operated in reverse to release the second frame 37A toward the initial position as shown by an arrow B1 in FIGS. 18 (a) and 18 (b). Then, following the return movement of the second frame 37A to the initial position, the moving force of the second frame 37A is transmitted to the third frame 37B by the connecting bar 111, and the force shown in FIG. As indicated by the arrow B2, the third frame 37B is released to the initial position. When returning to the initial position, the pin 116 moves and stops at the end of the long hole 112 of the connecting bar 111, so that the third frame 37B is restrained from returning excessively.

  After the second frame 37A and the third frame 37B are released to the initial positions, the temporary assembly TA and the detachment prevention body 18 including the molded product W having the fine transfer pattern transferred on both surfaces in the thickness direction are subsequently obtained. Is transferred from the transfer device 3 using a robot 159 and transferred to the temporary assembly / separation unit 7 (see FIG. 23).

  After this transfer, the arm of the robot 159 is retracted, and the removal prevention body 18 at the uppermost stage is removed by the operation of the robot 12. Subsequently, the jig 17 installed on the jig holder 119 of the temporary assembly / separation unit 7 is clamped by the clamper 41 of the jig holder 119, the jig holder 119 is raised, and the mold MB and the mold are held. The mold 121 is held in contact with the body 121 to hold the mold MB (see FIG. 26), and the jig holder 119 is lowered (see FIG. 24).

  Subsequently, the product to be molded (the product to be molded placed on the mold MA installed on the jig 17 installed on the jig holder 119) W is transported to the position P3 by the robot 137, and is transported. The molded product W is transported to the stocker 5B by the robot 135, stored in the stocker 5B, and the initial state is restored. At the time of this separation, the temporary assembly TA transferred individually at two locations is simply disassembled, so that the disassembly operation can be easily performed.

  By the way, when the jig 17 is installed on the installation body 13 of the transfer apparatus 3 in the transfer system 1, the jig 159 is positioned at a predetermined position by the robot 159, and the installation body 13 (movable frame) of the transfer apparatus 3 is placed. 37) is moved, but the installation body 13 may be stopped at a predetermined position, and the jig 17 may be moved by the robot 159. Thus, when comprised, it may replace with the installation body 13 (movable frame 37), or you may comprise so that the press body 15 may be moved and positioned in an X-axis direction.

  According to the transfer device 3, when the temporary assembly TA is fitted on the support body 27 of the jig 17, the disengagement prevention body 18 is fitted on the upper side thereof, so that the jig 17 is set in the transfer device 3. When the installation surface 33 of the jig 17 and the support 27 are oriented in the horizontal direction, or the jig 17 in which the temporary assembly TA is installed between the transfer device 3 and the temporary assembly / separation unit 7 is used. It is possible to prevent the temporary assembly TA from being detached from the support 27 when transporting.

  That is, since the support body 27 protruding in the horizontal direction is fitted in the central through hole of the temporary assembly TA, the load of the temporary assembly TA is supported by the support body 27, and thereby the temporary assembly TA. Is prevented from falling due to gravity, but with that alone, the temporary assembly TA may fall off when the support 27 is oriented in the horizontal direction. Therefore, it is conceivable to simply increase the protruding dimension of the support 27. However, simply increasing the length of the support 27 prevents the temporary assembly TA from falling off the support 27. The position of the solid TA does not change easily. In order to cope with this, the transfer device 3 is provided with a detachment prevention body 18.

  This detachment prevention body 18 is sufficiently larger in thickness than the temporary assembly TA and sufficiently large in weight. Accordingly, since the frictional resistance between the support 27 and the support 27 becomes larger than that of the temporary assembly TA in the state of being fitted to the outer periphery of the support 27, the resistance against the ease of falling off can be greatly increased. Therefore, it is possible to prevent the position shift and dropout. Further, in order for the detachment prevention body 18 to fall off, the detachment prevention body 18 must slide in the axial direction at least as much as the thickness thereof, so that the detachment prevention body 18 is in spite of the orientation of the support body 27 being horizontal. There is almost no possibility that the temporary assembly TA will fall off, thereby reliably preventing the temporary assembly TA from falling off.

  As described above, even when the installation surface 33 is oriented in the horizontal direction, the temporary assembly TA and the detachment prevention body 18 are stably installed on the installation body 13 together with the jig 17. Without providing a clamper, it is possible to suppress the occurrence of transfer failure to the molded product W with a simple configuration.

  That is, by flowing air with a higher degree of cleanness, for example, from above to below, in the space between the pressing body 15 and the temporary assembly TA installed on the jig 17 installed on the installation body 13, Since the particulates existing in the air in the space around the temporary assembly TA can be prevented from being retained and the particulates can be eliminated, and the temporary assembly TA is held by the jig 17 without vacuum suction. The installation surface 33 of the jig 17 (installation surface with which the temporary assembly TA comes into contact) 33, the both end surfaces of the detachment prevention body 18 and the pressing surface 45 of the pressing body 15 can be made to be almost completely flat, and transfer is performed. It is possible to press the entire surface of the product W or the molds MA and MB with a uniform pressing force, and to prevent the occurrence of transfer failure due to a partial lack of pressing force.

  Further, since it is not necessary to hold the temporary assembly TA with the jig 17 using a clamper, the configuration of the apparatus is simplified, and a thin plate-like temporary assembly TA is applied by partially applying a clamping force with the clamper. The risk of bending is avoided, and the occurrence of transfer defects can be prevented.

  In addition, since the temporary assembly TA is installed in the jig 17, the temporary assembly (temporary assembly before being transferred to the molded product W) TA is installed in the transfer device 3, or the temporary assembly TA is temporarily installed. When unloading the assembly (temporary assembly transferred to the product W) TA from the transfer device 3, the robot 159 may hold the jig 17, and the temporary assembly TA can be easily transported.

  Further, according to the transfer device 3, when the jig 17 on which the temporary assembly TA is installed is installed on the installation body 13, the rotational moment due to the weight of the temporary assembly TA, the jig 17, and the installation body 13 is obtained. Since distortion generated in the strain generating body 58 of the load cell 53 can be reduced, the pressing force at the time of transfer can be made correct, and accurate transfer can be performed.

  Further, the transfer device 3 includes the piezo element 75 that elastically deforms the central portion of the pressing surface 45 of the pressing body 15 so as to protrude slightly toward the installation body 13 side. It is possible to prevent the phenomenon that the transfer is not performed at the center of the molded product W or the transfer becomes insufficient.

  Incidentally, the transfer system 1 includes one transfer device 3, one stocker 5, one temporary assembly / separation unit 7, one robot 133, one robot 135, and one robot. 159, but the number of each device may be changed according to the process work time (tact time) of each device.

  For example, if the tact time of the transfer device 3 is about half that of the other devices, one transfer device 3, two stockers 5, two temporary assembly / separation units 7, and two The robots 133, 135, 137, and 159 may constitute a system.

  In addition, in the transfer system 1, the product W is sandwiched between the molds MA and MB, and transfer is performed on both surfaces in the thickness direction of the product W, but one of the molds MA and MB is transferred. A fine transfer pattern may be transferred to only one surface in the thickness direction of the product W without using a mold (see FIG. 33).

  In the transfer device 3, the ring-shaped detachment prevention body 18 is shown separately from the mold M. However, the detachment prevention body 18 is formed integrally with the adjacent mold MB from the beginning. Is also possible.

  Further, the transfer system 1 may be configured such that the jig 17 is deleted.

  That is, when installing the temporary assembly in which the transfer device is a plane of a predetermined size facing in the horizontal direction and the mold and the molded product overlap, one surface of the temporary assembly An installation body having an installation surface that is a plane in contact with the surface, and a horizontal penetration of the temporary assembly when the temporary assembly protrudes horizontally from the installation surface and is installed in surface contact with the installation surface. By fitting into the hole, a support body that supports the temporary assembly and prevents the temporary assembly from dropping due to gravity, and both end faces are formed in a plane perpendicular to the axial direction, and the support body is the temporary assembly. When the temporary assembly is prevented from falling by being fitted into the central through-hole of the assembly, it is aligned with the temporary assembly at the front end side of the support body from the position where the temporary assembly is fitted. A ring-shaped disengagement that prevents the temporary assembly from coming off from the support by fitting. A pressing surface for pressing the other surface of the temporary assembly through the anti-separation body, which is a flat surface of a predetermined size facing the stationary body and the installation surface of the installation body in parallel. It is good also as a transfer device which has a press body which is provided, and puts and presses a temporary assembly installed in the installation body in cooperation with the installation body.

Further, in the transfer device 3 of the above-described embodiment, an example in which the interlocking means 110 using the connecting bar 111 is employed as the release means for releasing the third frame 37B without driving following the movement of the second frame 37A. However, as in the transfer device 3B shown in FIG. 34, actuator-type release means 120 for individually releasing the third frame 37B may be provided on the fixed frame 74. This actuator type release means 120 includes:
The rod 124 is opposed to the bracket 123 of the third frame 37 </ b> B, the base end side of the rod 124 is engaged with the nut 122 fixed to the fixed frame 74, and the nut 124 is driven by the motor 126. And the bracket 123 is pushed with the tip of the rod 124 to move the third frame 37B to the initial position. What is indicated by reference numeral 127 is a stopper that prevents the third frame 37B from passing the initial position.

  Further, like the transfer device 3C shown in FIG. 35, the tip 125 of the rod 124 may be connected to the bracket 123 with some play in the moving direction.

  Further, like the transfer device 3D shown in FIG. 36, the second frame 37A and the third frame 37B may be connected by a string-like body 130 such as a slackable chain as interlocking means (release means). . In this case, when the string-like body 130 is fully extended, the moving force applied to the second frame 37A is transmitted to the third frame 37B via the string-like body 130, and the third frame 37B starts to move. When the third frame 37B returns to the initial position, the third frame 37B is positioned by the action of the stopper 127. Further, since the string-like body 130 is fully extended when the second frame 37A returns to the initial position, the third frame 37B is restrained by the string-like body 130 and moves to the fixed frame 74 side. do not do. Further, in FIG. 36, the stopper 127 is deleted, and the third frame 37B and the fixed frame 74 are connected by the string-like body 130 in the same manner as the second frame 37A and the third frame 37B. May be.

  Moreover, although the case where the two movable frames 37 are provided has been described in the above embodiment, three or more movable frames 37 (37A, 37B, 37C) may be provided as in the transfer device 3E of FIG. .

  In the above embodiment, since the installation body 13 and the pressing body 15 are arranged in the horizontal direction, the removal preventing body 18 is supported in a pin-like manner for the purpose of preventing the temporary assembly TA from falling off from the support body 27. Although the case where the temporary assembly TA is fitted side by side with the front end side of the body 27 has been described, as shown in FIG. 38, the installation body 13 and the pressing body 15 are placed so that the installation surface of the jig 17 faces obliquely upward. By disposing the temporary assembly TA, it is possible to prevent the temporary assembly TA from falling off while omitting the use of the drop prevention body 18. In this case, as shown in FIG. 39, the transfer device 3F may be arranged such that the central axis CL1 is inclined at, for example, 15 ° with respect to the horizontal line (GL).

3, 3B, 3C, 3D, 3E, 3F Transfer device 13 Installation body (Installation part of molded product / mold)
37 Movable frame 37A Second frame (movable frame)
37B Third frame (movable frame)
74 Fixed frame (first frame)
95 Servo motor (drive means)
110 Interlocking means (release means)
120 Release means 130 String-like body (interlocking means, release means)
TA Temporary assembly of molded product and mold

Claims (5)

  1. A first frame fixedly provided;
    A second frame provided so as to be movable in a direction approaching / separating from the first frame;
    An installation part of a molded product / mold, which is provided between opposing surfaces of the first frame and the second frame and can be installed with the molded product and the mold;
    By moving the second frame in a direction approaching the first frame, a pressing force is applied to the molding product and the mold installed in the molding product / mold installation section. Driving means for transferring a fine transfer pattern formed on the mold onto the molding object and returning the second frame to an initial position after the transfer;
    With
    Between the first frame and the second frame, at least one moved by the movement of the second frame in the approaching direction with respect to the first frame and moving in the direction approaching the first frame A third frame is interposed,
    When there are a plurality of third frames between the facing surfaces of the second frame and the third frame adjacent thereto, between the facing surfaces of the first frame and the third frame adjacent thereto, and The transfer apparatus, wherein the molding part / mold setting part is provided between the opposing surfaces of the third frames adjacent to each other.
  2. The transfer device according to claim 1,
    After the transfer operation, the third frame is placed at an initial position separated from the first frame and the second frame, and when there are a plurality of the third frames, adjacent third frames. A transfer device is provided, wherein release means is provided for returning to an initial position apart from the first position.
  3. The transfer device according to claim 2,
    The release means comprises:
    When the second frame is moved for transfer, the third frame is allowed to move freely, and the second frame is moved when the second frame returns to the initial position after the transfer. A transfer device comprising: interlocking means for returning the third frame to the initial position by the moving force of the second frame following the movement of the second frame.
  4. The transfer device according to any one of claims 1 to 3,
    The transfer apparatus, wherein the first frame, the third frame, and the second frame are arranged in a horizontal direction.
  5.   The transfer method to the said to-be-molded product characterized by being made using the transfer apparatus of any one of Claims 1-4.
JP2009121253A 2009-05-19 2009-05-19 Transfer apparatus and transfer method Active JP5357625B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009121253A JP5357625B2 (en) 2009-05-19 2009-05-19 Transfer apparatus and transfer method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009121253A JP5357625B2 (en) 2009-05-19 2009-05-19 Transfer apparatus and transfer method

Publications (2)

Publication Number Publication Date
JP2010269469A true JP2010269469A (en) 2010-12-02
JP5357625B2 JP5357625B2 (en) 2013-12-04

Family

ID=43417911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009121253A Active JP5357625B2 (en) 2009-05-19 2009-05-19 Transfer apparatus and transfer method

Country Status (1)

Country Link
JP (1) JP5357625B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012199514A (en) * 2011-03-04 2012-10-18 Canon Inc Imprint system and imprint method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153096U (en) * 1984-09-12 1986-04-10
JP2004074770A (en) * 2002-06-18 2004-03-11 Meiki Co Ltd Press molding apparatus and control method therefor
JP2004358857A (en) * 2003-06-06 2004-12-24 Meiki Co Ltd Apparatus for forming resin formed product having fine uneven surface
JP2006048881A (en) * 2004-08-09 2006-02-16 Toshiba Corp Device and method for imprinting
JP2006167744A (en) * 2004-12-14 2006-06-29 Meiki Co Ltd Horizontal multi-stage press apparatus for separator of fuel cell

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153096U (en) * 1984-09-12 1986-04-10
JP2004074770A (en) * 2002-06-18 2004-03-11 Meiki Co Ltd Press molding apparatus and control method therefor
JP2004358857A (en) * 2003-06-06 2004-12-24 Meiki Co Ltd Apparatus for forming resin formed product having fine uneven surface
JP2006048881A (en) * 2004-08-09 2006-02-16 Toshiba Corp Device and method for imprinting
JP2006167744A (en) * 2004-12-14 2006-06-29 Meiki Co Ltd Horizontal multi-stage press apparatus for separator of fuel cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012199514A (en) * 2011-03-04 2012-10-18 Canon Inc Imprint system and imprint method

Also Published As

Publication number Publication date
JP5357625B2 (en) 2013-12-04

Similar Documents

Publication Publication Date Title
US10793378B2 (en) Transfer apparatus and article taking-out method
JP6512248B2 (en) Transport apparatus, transport method, exposure apparatus, and device manufacturing method
US9339978B1 (en) Press system with interleaved embossing foil holders for nano-imprinting of recording media
US9120348B1 (en) Press system with embossing foil free to expand for nano-imprinting of recording media
KR101690532B1 (en) Large area imprint lithography
US7137309B2 (en) High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
US8545164B2 (en) Systems and methods for repositioning row bars used for manufacturing magnetic heads
JP5610330B2 (en) System that enhances conveyor transport performance
CN100377326C (en) Component-supplying head device, component-supplying device, comonent-mounting device, and method of moving mounting head portion
US6167322A (en) Intelligent wafer handling system and method
KR101059009B1 (en) substrate bonding method and apparatus
JP5259693B2 (en) Workpiece transfer device
US8489227B2 (en) Transport method and transport apparatus
KR100621957B1 (en) Manufacturing System for Microstructure
US20050126605A1 (en) Apparatus and method for cleaning surfaces
TWI506719B (en) Substrate processing system and method
KR20100029089A (en) Loading/unloading system serving a sheet cutting centre, feeding tray therefor and relative handling method
CN103963421A (en) Detaching apparatus and detaching method
KR101590660B1 (en) Apparatus for processing substrate, method for processing substrate, and storage medium recording program
US20030211275A1 (en) Method of simultaneous two-disk processing of single-sided magnetic recording disks
JP2005153091A (en) Transfer method and transfer device
JP4699767B2 (en) Constant temperature imprint embossing system
US20090321000A1 (en) Method and apparatus for manufacturing plate-like structure
JP4814527B2 (en) Imprint and embossing alignment system
KR101112065B1 (en) Apparatus for transferring and dividing substrate of brittle material

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120313

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130524

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130611

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130808

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130827

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130830

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150