JP2010269373A - Vacuum suction device and suction tool constituting implement - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably suck and hold an object even when the object is not arranged at a part of suction holes due to a shape, a size or the like of the object, to be more simply manufactured at a low cost, to reduce frequency of malfunction, and to improve durability. <P>SOLUTION: A plurality of sucking parts having the sucking holes capable of holding the object by decompression suction are arranged at predetermined intervals, a storage part 52 is disposed at the halfway of the suction hole, the opening 521 at the vacuum source side of the storage part 52 is arranged on an upper side, the opening 522 at the object side thereof is on a lower side, and a sphere 6 is stored in the storage part 52. When the object is arranged at the opening at the object side of the suction hole, the object is sucked with decompression at the suction hole. When the object is not arranged at the opening at the object side of the suction hole, the sphere 6 is floated by pressure caused by the inflow of the outside air and closes the opening 521 at the vacuum source side of the storage part, so that the suction hole is blocked. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a vacuum suction device that holds an object such as an iron plate, glass, and a semiconductor wafer by suction under reduced pressure, and a suction unit component used in the vacuum suction device.

  2. Description of the Related Art Conventionally, a vacuum suction device is used that sucks and holds an object under reduced pressure when performing processes such as processing, assembly, and conveyance on the object such as an iron plate, glass, and a semiconductor wafer. This vacuum suction device has a suction table having a plurality of suction holes, performs vacuum suction at each suction hole by pressure reduction by a vacuum pump, and holds an object under reduced pressure.

  By the way, in the vacuum suction device, when the object is not placed on the openings of some of the suction holes due to the shape and size of the object and remains open, outside air is released from the openings of the suction holes in the open state. There is a problem that the degree of decompression decreases due to the inflow, the adsorption force of the object is reduced, and stable holding becomes difficult, or adsorption holding itself becomes difficult.

  For this reason, Patent Documents 1 and 2 propose vacuum suction devices that can stably suck and hold an object even when the object cannot be placed on the openings of some suction holes due to the shape of the object. The vacuum suction devices of Patent Documents 1 and 2 are provided with a ball valve that urges the ball in the direction of the suction hole opening with a spring inside the suction hole, and the suction hole on which the object is placed performs decompression suction by opening the suction hole. In the inside of the suction hole where the object is not placed, the flow path is closed by pressing the ball against the biasing force of the spring caused by the inflow of outside air, and the inflow of outside air from the suction hole is prevented to maintain a reduced pressure state. Is.

JP 2001-267271 A JP 61-8250 A

  However, since the vacuum suction devices of Patent Documents 1 and 2 require processing to install a spring in a small suction hole at the time of manufacture, difficult manufacturing work is required, and difficult manufacturing work and springs for each suction hole are required. There is a problem that the manufacturing cost becomes high. In addition, the structure having a spring has a high frequency of failure such that the elastic force of the spring decreases according to the degree of use, or the spring does not normally urge the ball due to an unintended cause such as an impact. Therefore, a vacuum suction device that can be manufactured at a low cost with a simpler manufacturing operation and has a low durability and high durability is desired.

  The present invention is proposed in view of the above problems, and can stably hold and hold an object even when the object is not disposed at the opening of some of the suction holes due to the shape and size of the object. An object of the present invention is to provide a vacuum suction device that can be manufactured at a low cost with a simpler manufacturing operation, has a low frequency of failure, and has a high durability, and an adsorbent component used in the vacuum suction device.

The vacuum suction device according to the present invention includes a plurality of suction portions having suction holes capable of holding an object by vacuum suction at a predetermined interval, and a storage portion is provided in the middle of the suction hole. The opening on the object side of the housing part is disposed on the lower side, the spherical body is housed in the housing part, and the object is disposed on the object side opening of the suction hole. If the object is decompressed and sucked by the suction hole, and the object is not disposed in the opening on the object side of the suction hole, the sphere is floated by the pressure of the outside air flowing into the container. The suction hole is blocked by closing the opening on the vacuum source side of the part.
In the above configuration, when the object is not arranged due to the blockage due to the floating of the sphere, when the object is not arranged at the opening of some of the suction holes due to the shape or size of the object by blocking the suction hole In addition, the object can be stably adsorbed and held. Further, a difficult process such as installing a spring in the suction hole is not required, and the manufacturing can be performed with a simple manufacturing process. In addition, since a difficult manufacturing process is not required and parts such as a spring can be reduced, the manufacturing cost can be reduced. In addition, since the structure does not have a spring structure or the like having a high frequency of failure and uses the gravity drop of the sphere and the floating of the sphere by air supply, the failure frequency can be reduced and the durability can be increased.

Moreover, the vacuum suction device of the present invention is characterized in that the accommodating portion is cylindrical and the diameter of the accommodating portion is 110 to 170% of the diameter of the sphere.
If the gap between the container and the sphere is too narrow, even when an object is placed in the suction hole, the sphere will rise instantaneously and the opening on the vacuum source side of the container will be blocked. If the gap is too wide, the sphere may not rise even when the object is not placed in the suction hole. However, the above configuration prevents such a situation and places the object in the suction hole. In this case, it is possible to reliably prevent the opening from being closed due to the rising of the sphere, and when the object is not disposed in the suction hole, the sphere can be reliably lifted to perform the opening and closing.

The vacuum suction device of the present invention is characterized in that the specific gravity of the sphere is 1.1 to 1.5.
If the sphere is too light, when the water is applied to improve the adsorptivity when the object is adsorbed, the sphere that closes the opening on the vacuum source side of the container will not fall due to water droplet adsorption etc. If the sphere is too heavy, the sphere may not rise. However, the above configuration prevents such a situation and secures the rise of the sphere, while releasing the sphere with the opening closed. It can be reliably dropped later.

Further, the vacuum suction device of the present invention is provided with a substantially tapered contact portion that narrows toward the opening on the vacuum source side on the upper portion of the housing portion that is continuous with the opening on the vacuum source side of the housing portion, The contact portion is formed in a mirror-like shape that is rounded so as to follow the outer shape of the sphere.
With the above configuration, the contact between the sphere and the abutting portion is improved, the gap is surely eliminated, and the opening on the vacuum source side of the housing portion can be more reliably closed with the sphere, and the suction force can be more reliably reduced by suction. Can be maintained.

Further, the vacuum suction device of the present invention has the suction portion centered on a through hole that constitutes a part of the suction hole, and an attachment portion that is attached to the attachment hole of the suction stand on which the object is placed. A light-transmitting base that has a flow path that constitutes the remaining portion of the suction hole, the storage section that stores the sphere in the middle of the flow path, and is screwed onto the mounting section And a sealed space that can be decompressed by being connected to a vacuum source is provided below the suction table, the base is disposed in the sealed space, and the end on the vacuum source side of the flow path of the base is sealed It is characterized by being open to space.
In the above configuration, the suction portion can be easily configured by the mounting portion and the base. In addition, by making the base body provided with the housing part separate from the mounting part, the mounting part, which is a part that requires more strength, and the base body that requires more workability are formed of materials that match the respective characteristics. It becomes possible. Further, by making the base body translucent, it is possible to visually recognize the inside of the base body, which has a more complicated structure than the mounting portion, and to enhance the convenience during failure or maintenance. In addition, by attaching the base member by screwing, the replacement work can be easily performed when the base needs to be replaced. Further, by opening the end portion of the base body to the sealed space, the suction holes of the plurality of suction portions can be easily decompressed collectively.

Further, in the vacuum suction device of the present invention, the mounting portion is a mounting bolt screwed into the mounting hole of the suction base from the installation side of the object, and the tip of the mounting bolt protruding from the mounting hole of the suction base The base is screwed in the vicinity to connect the through hole of the mounting bolt and the flow path of the base.
In the above configuration, by using the mounting portion as the mounting bolt, the suction portion can be further reduced in size and cost, and as a result, the vacuum suction device can be further reduced in size and cost.

In the vacuum suction device of the present invention, the inside of the sealed space is connected to a pressurizing unit capable of pressurization, and an air flow reverse to that during decompression is applied to the suction hole by pressurization of the sealed space by the pressurizing unit. It is a feature that can be generated.
With the above configuration, it becomes possible to discharge dust, such as cutting scraps entering the suction hole when water is absorbed into the suction hole and water entering the suction hole, from the opening on the object side of the suction hole. The device can be easily and reliably cleaned.

Further, the suction part component of the present invention is used in a vacuum suction device in which a plurality of suction parts having suction holes capable of holding an object by vacuum suction are arranged at predetermined intervals, and constitutes the suction part. The vacuum suction device includes a flow path that forms at least a part of the suction hole of the suction portion, a storage portion that is provided in the middle of the flow path, and a sphere that is stored in the storage portion. In the attached state, the opening on the vacuum source side of the housing portion is disposed on the upper side, and the opening on the object side of the housing portion is disposed on the lower side.
In the above-described configuration, the suction hole can be blocked when the object is not arranged due to the blockage due to the floating of the sphere, and the target is formed in the opening of a part of the suction hole of the vacuum suction device depending on the shape and size of the object. Even when an object is not arranged, the object can be stably adsorbed and held by the vacuum adsorption device. Further, a difficult process such as installing a spring inside is not required, and the manufacturing can be performed with a simple manufacturing process. In addition, since a difficult manufacturing process is not required and parts such as a spring can be reduced, the manufacturing cost can be reduced. In addition, it does not have a spring structure with a high frequency of failure, but reduces the frequency of failure of the suction tool components and vacuum suction device by using the gravity drop of the sphere and the floating of the sphere by air supply, making it durable Can increase the sex.

  The vacuum suction device or the suction tool component of the present invention can stably hold and hold the target object even when the target object is not disposed at the opening of some of the suction holes due to the shape or size of the target object, It is possible to manufacture at a low cost with a simpler manufacturing operation, and it is possible to reduce the frequency of failures and increase durability.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a partially longitudinal schematic explanatory view showing a state in which a vacuum suction device according to a first embodiment of the present invention is connected to a vacuum pump and a pressure pump. The perspective view of the vacuum suction apparatus of 1st Embodiment. The longitudinal cross-sectional view of the vacuum suction apparatus of 1st Embodiment. (A) Longitudinal explanatory drawing which shows an adsorption | suction part in case there exists arrangement | positioning of the target object in the vacuum suction apparatus of 1st Embodiment, (b) is an adsorption | suction part of the same figure (a), and there is no target object arrangement | positioning. Longitudinal explanatory diagram showing the case. (A) is longitudinal explanatory drawing which shows the adsorption | suction part in case there exists arrangement | positioning of the target object in the vacuum suction apparatus of 2nd Embodiment, (b) does not have target object arrangement | positioning by the adsorption | suction part of the same figure (a). Longitudinal explanatory diagram showing the case.

[Vacuum Suction Device of First Embodiment]
A vacuum suction apparatus according to a first embodiment of the present invention will be described. 1 is a partially longitudinal schematic explanatory view showing a state in which the vacuum suction device of the first embodiment is connected to a vacuum pump and a pressure pump, FIG. 2 is a perspective view of the vacuum suction device of the first embodiment, and FIG. FIG. 4A is a longitudinal sectional view of a vacuum suction device, FIG. 4A is a longitudinal sectional view showing a suction portion when an object is arranged in the vacuum suction device of the first embodiment, and FIG. It is vertical explanatory drawing which shows the case where there is no arrangement | positioning of an object in the adsorption | suction part of a).

  As shown in FIGS. 1 to 3, the vacuum suction device 1 of the first embodiment is a box-shaped box having a plate-like suction stand 2 on which an object 100 is installed and an open top surface having side walls and a bottom plate. 3 is formed with a tube joint 4 and a base body 5 (corresponding to a suction part component) in a sealed space formed on the lower side of the suction stand 2, and the object 100 is sucked under reduced pressure. The suction part which has the suction hole which can be held by is accommodated. A plurality of the suction portions are arranged at predetermined intervals corresponding to the mounting holes 21 formed so as to penetrate the suction table 2. In this example, the suction portions correspond to the mounting holes 21 arranged at regular intervals in a matrix form in the vertical and horizontal directions. Are arranged.

  A decompression pump 11 corresponding to a vacuum source and a pressurization pump 12 corresponding to a pressurizing unit are connected to a sealed space formed by the adsorption table 2 and the box body 3. The pressure can be reduced by being connected, and the pressure can be increased by being connected to a pressure unit. The decompression pump 11 is connected to the sealed space via a decompression pipe 111 that is a pipe that allows gas to flow out of the sealed space, and a cock 112 that opens and closes the sealed space with respect to the decompression pipe 111. The pressurizing pump 12 is connected to the sealed space via a pressurizing pipe 121 that is a pipe that allows gas to flow into the sealed space from the pressurizing pump 12 and a cock 122 that opens and closes the sealed space with respect to the pressurizing pipe 121. Has been.

  As shown in FIG. 4, the tube joint 4 corresponding to the mounting portion constituting the suction portion has a through hole 41 penetrating in the longitudinal direction constituting a part of the suction hole of the suction portion. Male screw portions 42 and 43 are formed on the outer peripheral surface. The upper male screw portion 42 is screwed into the female screw portion 22 formed in the attachment hole 21 of the suction stand 2, and the tube joint 4 is fixed to the suction stand 2 by this screwing, and one of the attachment holes 21. The part and the through hole 41 communicate with each other. The lower male screw portion 43 is screwed into a female screw portion 54 formed in a flow path 51 of the base body 5 which will be described later. By this screwing, the tube joint 4 and the base body 5 are fixed, and the through hole 41 and The flow path 51 communicates.

  The base 5 constituting the suction part has a substantially U-shaped cross-sectional flow path 51 into which the outside air flows, which constitutes the remaining part of the suction hole of the suction part, and the side of the flow path 51 where the object 100 is installed. In the vicinity of the opening, a female screw portion 54 to be screwed with the male screw portion 43 of the tube joint 4 is formed. In the middle of the flow path 51, in this example, a cylindrical accommodating portion 52 is provided at a lower portion on the right side of the substantially U-shaped bottom portion, and the spherical body 6 is accommodated in the accommodating portion 52. The ratio of the diameter of the storage portion 52 to the diameter of the sphere 6 is appropriate as long as the sphere 6 can perform a predetermined operation with gravity and an inflow pressure of outside air, which will be described later. 110 to 170% of the diameter of 6 is preferable. As an example, for example, the diameter of the accommodating portion 52 is 5 mm, the diameter of the sphere 6 is about 4 mm, and the portion of the channel 51 having a small diameter is about 1.5 to 2 mm.

  The specific gravity of the sphere 6 is also appropriate as long as the predetermined operation is possible, but the specific gravity of the sphere 6 is preferably set to 1.1 to 1.5. Furthermore, it is preferable that the sphere 6 is formed of a material having high elasticity and adhesion, which can improve the adhesion with the contact portion 53 and prevent air leakage. For example, when the sphere 6 is formed of silicon resin, The preferable requirement of specific gravity and the requirement of adhesion can be satisfied. Moreover, although the base | substrate 5 can be formed with a suitable raw material, it is preferable to form with translucent materials, such as a silicon resin and a vinyl chloride resin.

  An object-side opening 522 is formed as a part of the flow path 51 at the lower side portion of the accommodating portion 52, and the size and shape of the object-side opening 522 is such that the sphere 6 is pulled out from the lower end of the accommodating portion 52. It is formed so that there is no. A vacuum source side opening 521 is formed as a part of the flow path 51 at the upper end of the accommodating part 52, and the size and shape of the vacuum source side opening 521 is such that the sphere 6 does not come out from the upper end of the accommodating part 52. The channel 51 formed on the vacuum source side with respect to the vacuum source side opening 521 is formed with a diameter smaller than the diameter of the accommodating portion 52. In the accommodating part 52, the vacuum source side opening 521 is arranged on the upper side, and the object side opening 522 is arranged on the lower side, so that it is possible to use the pressure acting on the sphere 6 and the flow of outside air. ing.

  A substantially tapered contact portion 53 that narrows toward the vacuum source side opening 521 is provided on the upper portion of the storage portion 52 that is continuous with the vacuum source side opening 521 of the storage portion 52. It is formed in a slightly rounded mirror surface so as to follow the outer shape of the sphere 6. Furthermore, the end of the flow path 51 of the base 5 on the side of the vacuum source is open to a sealed space formed by the suction table 2 and the box 3.

  When using the vacuum suction device 1 of the first embodiment, the object 100 is placed in contact with the suction table 2 and the decompression pump 11 is driven to open the cock 112, and the suction table 2 and the box body 3 is depressurized. By this decompression, the inside of the flow path 51 in which one end portion of the flow path 51 constituting the suction hole of the suction portion is open to the sealed space, the through hole 41 communicating with this, and the inside of the mounting hole 21 are further formed. In the suction hole where the object is disposed in the object side opening, that is, the opening of the through hole 41 or the hole where the object 100 is disposed in the opening of the mounting hole 21, the flow path 51, the through hole 41 and further, the object 100 is sucked under reduced pressure through the mounting hole 21. At this time, since the opening of the attachment hole 21 or the opening of the through hole 41 is closed by the object 100, the inflow of outside air stops, and the sphere 6 is positioned in the vicinity of the bottom of the housing portion 52 without being raised.

  On the other hand, in the suction hole where the object is not arranged in the object-side opening, that is, the opening of the through hole 41 or the hole where the object 100 is not arranged in the opening of the attachment hole 21, the opening of the attachment hole 21 or Since there is no blockage of the object 100 with respect to the opening of the through hole 41, the outside air flows in, the sphere 6 is floated by the pressure into which the outside air flows and abuts against the abutting portion 53 of the housing portion 52, thereby closing the vacuum source side opening 521. . As a result, the suction hole of the suction portion, that is, the flow path by the flow path 51 and the through hole 41, or the flow path by the attachment hole 21 in addition to this, is closed. By this blockage, a predetermined degree of vacuum or a degree of vacuum in the sealed space is ensured, and the holding of the object 100 by vacuum suction is reliably maintained. In addition, the dashed-dotted line of FIG. 4 has shown the flow of the airflow.

  When the holding by the vacuum suction in the vacuum suction device 1 is finished, the cock 112 is closed and the vacuum pump 11 is stopped. As a result, even in the accommodating portion 52 where the sphere 6 has floated, the sphere 6 falls and is positioned at the bottom of the accommodating portion 52, and the object 100 that has been depressurized and sucked can be removed.

  Further, when cleaning the vacuum suction device 1, the pressurizing pump 12 is driven to open the cock 122 and pressurize the sealed space formed by the suction table 2 and the box 3. By this pressurization, the inside of the flow path 51 and the through hole 41 communicating therewith, and further the inside of the mounting hole 21 are pressurized, and the suction hole of the suction portion, that is, the inside of the flow path 51 and the through hole 41, or the flow Inside the passage 51, the through hole 41, and the mounting hole 21, an air flow opposite to the air flow at the time of depressurization is generated, and the processing waste and the like entering the inside are discharged.

  The vacuum suction apparatus 1 according to the first embodiment blocks some suction holes depending on the shape, size, etc. of the object 100 by blocking the suction holes when the object 100 is not disposed due to the blockage due to the floating of the sphere 6. Even when the object 100 is not disposed in the opening, the object 100 can be stably adsorbed and held. Further, a difficult process such as installing a spring in the suction hole is unnecessary, and the manufacturing can be performed with a simple manufacturing process. Further, since a difficult manufacturing process is not required and parts such as a spring can be reduced, the manufacturing cost can be reduced. In addition, since it does not have a spring structure or the like with a high frequency of failure and uses the gravity drop of the sphere 6 and the floating of the sphere 6 by air supply, the failure frequency can be reduced and the durability can be increased. it can.

  In addition, the contact portion 53 having a rounded mirror-like surface and substantially tapered so as to follow the outer shape of the sphere 6 enhances the contact between the sphere 6 and the contact portion 53, thereby reliably eliminating the gap. The vacuum source side opening 521 can be more reliably closed with the sphere 6, and the suction force can be more reliably maintained by vacuum suction. In addition, by flowing a backflow airflow with the pressurizing pump 12, dust such as cutting dust entering the suction hole when the object 100 is adsorbed and cut, and water entering the suction hole are removed from the object of the suction hole. It becomes possible to discharge from the opening on the side, and the cleaning operation of the vacuum suction device 1 can be performed easily and reliably.

  Moreover, the adsorption part can be simply constituted by the tube joint 4 and the base body 5 which are the attachment parts. In addition, by making the base body 5 provided with the accommodating portion 52 separately from the tube joint 4 that is the mounting portion, the mounting portion (tube joint 4) that is a portion that requires more strength and the base body that requires more workability. 5 can be formed of a material matching the respective characteristics. Further, by attaching the base body 5 by screwing, the replacement work can be easily performed when the base body 5 needs to be replaced. Further, by opening the end of the base 5 to the sealed space, the suction holes of the plurality of suction portions can be easily decompressed collectively.

  Further, in the case where the accommodating portion 52 is cylindrical and the diameter is 110 to 170% of the diameter of the sphere 6, when the object 100 is placed in the suction hole, the opening blockage due to the rising of the sphere 6 is ensured. In the case where the object 100 is not disposed in the suction hole, the spherical body 6 can be reliably raised and the opening can be closed. Further, by setting the specific gravity of the sphere 6 to 1.1 to 1.5, it is possible to reliably drop the sphere 6 whose opening is closed after releasing the decompression while ensuring the ascent of the sphere 6 is ensured. Further, by making the base body 5 translucent, it is possible to visually recognize the inside of the base body 5 having a relatively complicated structure, and to enhance the convenience at the time of failure or maintenance.

[Vacuum Suction Device of Second Embodiment]
Next, a vacuum suction device according to a second embodiment of the present invention will be described. FIG. 5 (a) is a longitudinal sectional view showing the suction part when the object is arranged in the vacuum suction device of the second embodiment, and FIG. 5 (b) is the target in the suction part of FIG. 5 (a). It is vertical explanatory drawing which shows the case where there is no arrangement | positioning. Configurations not particularly mentioned in the second embodiment are the same as those in the first embodiment.

  As shown in FIG. 5, the vacuum suction device of the second embodiment includes a mounting bolt 4 a and a base 5 a (suction unit component) in which a suction unit having a mounting hole capable of holding the object 100 by vacuum suction corresponds to the mounting unit. And is accommodated in a depressurizable and pressurizable sealed space formed by the adsorption platform 2a and the box. A plurality of the suction portions are arranged at predetermined intervals corresponding to the mounting holes 21a formed penetrating the suction table 2a. In this example, the suction portions also correspond to the mounting holes 21a arranged at regular intervals in a matrix form vertically and horizontally. Are arranged.

  The mounting bolt 4a corresponding to the mounting portion constituting the suction portion has a through hole 41a penetrating in the longitudinal direction constituting a part of the suction hole of the suction portion, and a male screw portion on the bolt main body arranged on the lower side. 42a is formed. Further, the attachment hole 21a of the suction stand 2a is formed in a stepped shape so as to accommodate the head and the main body of the attachment bolt 4a, and a female screw portion 22a is formed in the lower portion having a small diameter. Then, the mounting bolt 4a is inserted into the mounting hole 21a from the upper side, which is the installation side of the object 100, and the male screw portion 42a is screwed into the female screw portion 22a to fix the mounting bolt 4a and the suction stand 2a. Is done. The vicinity of the tip of the mounting bolt 4a is provided so as to protrude from the lower side of the suction table 2a, and the male screw portion 42a projects to the lower side of the suction table 2a.

  The base body 5a constituting the suction part has a flow path 51a that forms the remaining suction hole of the suction part and into which the outside air flows, and in the vicinity of the opening of the flow path 51a on the side where the object 100 is installed, A female screw portion 54a to be screwed with the male screw portion 42a in the vicinity of the protruding tip is formed. By the threaded engagement of the male screw portion 42a and the female screw portion 54a, the through hole 41a of the mounting bolt 4a and the flow path 51a of the base body 5a are connected. In the middle of the flow path 51a, in this example, a cylindrical accommodating portion 52a is provided at a lower portion on the left side of the bottom folded portion, and the spherical body 6 is accommodated in the accommodating portion 52a. A suitable configuration similar to that of the first embodiment can be adopted for the ratio of the diameter of the accommodating portion 52a to the diameter of the sphere 6a, the specific gravity of the sphere 6a, and the material of the base 5a.

  An object-side opening 522a is formed as a part of the flow path 51a on the side of the lower end of the accommodating part 52a, and the size and shape of the object-side opening 522a is such that the sphere 6a comes out of the lower end of the accommodating part 52a. It is formed so that there is no. A vacuum source side opening 521a is formed as a part of the flow path 51a at the upper end of the accommodating part 52a, and the size and shape of the vacuum source side opening 521a is such that the sphere 6a does not come out of the upper end of the accommodating part 52a. The flow path 51a on the vacuum source side from the vacuum source side opening 521a is formed with a diameter smaller than the diameter of the accommodating portion 52a. In the accommodating part 52a, the vacuum source side opening 521a is arranged on the upper side, and the object side opening 522a is arranged on the lower side, so that the pressure due to the gravity and external air flowing into the sphere 6a can be used. ing.

  A substantially tapered contact portion 53a that narrows toward the vacuum source side opening 521a is provided on the upper portion of the storage portion 52a that is continuous with the vacuum source side opening 521a of the storage portion 52a. It is formed in a slightly rounded mirror surface so as to follow the outer shape of the sphere 6a. Furthermore, the end on the vacuum source side of the flow path 51a of the base body 5a is open to a sealed space formed by the suction table 2a and the box.

  When using the vacuum suction device of the second embodiment, the object 100 is placed in contact with the suction table 2a, and the inside of the sealed space is decompressed by the decompression pump 11 (not shown). By this pressure reduction, the inside of the flow path 51a in which one end of the flow path 51a constituting the suction hole of the suction portion is open to the sealed space and the through hole 41a communicating with the flow path 51a is decompressed, and the object side opening is opened. At the suction hole where the object 100 is disposed, that is, the hole where the object 100 is disposed in the opening of the through hole 41a, the object 100 is sucked under reduced pressure through the flow path 51a and the through hole 41a. At this time, since the opening of the through hole 41a is blocked by the object 100, the inflow of outside air stops, and the sphere 6a does not rise and is positioned near the bottom of the housing portion 52a.

  On the other hand, in the suction hole where the object is not arranged in the opening on the object side, that is, in the hole where the object 100 is not arranged in the opening of the through hole 41a, the obstruction of the object 100 with respect to the opening of the through hole 41a is blocked. Therefore, the outside air flows in, and the spherical body 6a is floated by the pressure at which the outside air flows and contacts the contact portion 53a of the housing portion 52a, thereby closing the vacuum source side opening 521a. Thereby, the suction hole of the adsorption part, that is, the flow path by the flow path 51a and the through hole 41a is closed. By this blockage, a predetermined degree of vacuum or a degree of vacuum in the sealed space is secured, and the holding of the object 100 by vacuum suction is reliably maintained. In addition, the dashed-dotted line of FIG. 5 has shown the flow of the airflow. Then, when the holding by the vacuum suction is finished, the vacuum pump is stopped, and the spherical body 6a falls and is positioned at the bottom of the housing part 52a even when the spherical body 6a has floated, and the vacuum suction has been stopped. The object 100 is removed.

  Further, when cleaning, a pressurizing pump (not shown) is driven to pressurize the sealed space formed by the adsorption platform 2a and the box. By this pressurization, the flow path 51a and the interior of the through hole 41a communicating with the flow path 51a are pressurized, and the suction hole of the suction portion, that is, the flow path 51a and the through hole 41a generate an air flow opposite to the air flow during decompression. And letting out the processing debris that has entered inside.

  The vacuum suction device according to the second embodiment has the same effects as those of the first embodiment. In addition, the mounting portion is a mounting bolt 4a, thereby reducing the size and cost of the suction portion, and thus the vacuum suction device. Can be further reduced in size and cost.

[Modifications of Embodiment, etc.]
In addition to the configurations of the inventions and embodiments, the invention disclosed in the present specification is specified by changing these partial configurations to other configurations disclosed in the present specification within the applicable range, or these To which the other configurations disclosed in this specification are added and specified, or those partial configurations are deleted and specified to the extent that partial effects can be obtained, and are specified as a superordinate concept. The vacuum in the present invention means an appropriate reduced pressure state in which the pressure is lower than the outside air and the object can be sucked under reduced pressure.

  INDUSTRIAL APPLICABILITY The present invention can be used in the case where a target object such as an iron plate, glass, a semiconductor wafer or the like is processed, assembled, transported, etc., and held by being sucked under reduced pressure.

DESCRIPTION OF SYMBOLS 1 ... Vacuum suction apparatus 2 ... Suction stand 21 ... Mounting hole 22 ... Female screw part 3 ... Box body 4 ... Tube joint 41 ... Through-hole 42, 43 ... Male screw part 5 ... Base | substrate 51 ... Channel 52 ... Accommodating part 521 ... Vacuum source side opening 522 ... Object side opening 53 ... Contact part 54 ... Female screw part 6 ... Sphere 2a ... Suction table 21a ... Mounting hole 22a ... Female screw part 4a ... Mounting bolt 41a ... Through hole 42a ... Male screw part 5a ... Substrate 51a ... Flow path 52a ... Housing part 521a ... Vacuum source side opening 522a ... Object side opening 53a ... Contact part 54a ... Female screw part 6a ... Spherical body 11 ... Decompression pump 111 ... Decompression pipe 112 ... Cock 12 ... Pressure Pump 121 ... Pressure tube 122 ... Cock 100 ... Object

Claims (8)

A plurality of suction parts having suction holes capable of holding the object by vacuum suction are arranged at predetermined intervals,
An accommodation part is provided in the middle of the suction hole, the opening on the vacuum source side of the accommodation part is arranged on the upper side, and the opening on the object side of the accommodation part is arranged on the lower side,
A sphere is accommodated in the accommodating portion,
When the object is disposed in the opening on the object side of the suction hole, the object is decompressed and sucked through the suction hole,
When the object is not arranged in the opening on the object side of the suction hole, the sphere is lifted by the pressure of the outside air flowing in to close the opening on the vacuum source side of the housing part, thereby A vacuum suction device characterized by blocking a suction hole. The housing portion is cylindrical,
The vacuum suction device according to claim 1, wherein a diameter of the accommodating portion is 110 to 170% of a diameter of the sphere.   The vacuum suction device according to claim 1 or 2, wherein the specific gravity of the sphere is 1.1 to 1.5. A substantially tapered contact portion that narrows toward the opening on the vacuum source side is provided on the upper portion of the housing portion that is continuous with the opening on the vacuum source side of the housing portion,
The vacuum suction device according to any one of claims 1 to 3, wherein the contact portion has a rounded mirror surface shape so as to follow the outer shape of the sphere. The adsorption part,
A mounting portion that has a through-hole that forms a part of the suction hole as a center, and is attached to an attachment hole of a suction table on which the object is installed
It has a flow path that constitutes the remaining portion of the suction hole, and is provided with the accommodating portion that accommodates the sphere in the middle of the flow path, and a translucent base that is screwed onto and attached to the attachment portion. And
A sealed space that can be decompressed by being connected to a vacuum source on the lower side of the adsorption table,
The vacuum suction according to any one of claims 1 to 4, wherein the base is disposed in a sealed space, and an end of a flow path of the base on the vacuum source side is opened to the sealed space. apparatus. The mounting portion is a mounting bolt that is screwed into the mounting hole of the suction table from the installation side of the object,
6. The through hole of the mounting bolt and the flow path of the base are connected by screwing the base in the vicinity of the tip of the mounting bolt protruding from the mounting hole of the suction stand. The vacuum suction apparatus described. Connect the inside of the sealed space to a pressurizing part capable of pressurization,
The vacuum suction device according to claim 5 or 6, wherein the vacuum suction device has a configuration capable of generating an airflow in the suction hole opposite to that during decompression by pressurizing the sealed space by the pressurizing unit. A suction part component that is used in a vacuum suction device in which a plurality of suction parts having suction holes capable of holding an object by vacuum suction are arranged at predetermined intervals, and that constitutes the suction part,
A flow path constituting at least a part of the suction hole of the suction portion;
A housing provided in the middle of the flow path;
A sphere accommodated in the accommodating portion,
In the attached state to the vacuum suction device, the suction part component is characterized in that the opening on the vacuum source side of the housing part is disposed on the upper side and the opening on the object side of the housing part is disposed on the lower side.

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