JPH09277134A - Vacuum-attracting work fixing device and method - Google Patents

Vacuum-attracting work fixing device and method

Info

Publication number
JPH09277134A
JPH09277134A JP11300396A JP11300396A JPH09277134A JP H09277134 A JPH09277134 A JP H09277134A JP 11300396 A JP11300396 A JP 11300396A JP 11300396 A JP11300396 A JP 11300396A JP H09277134 A JPH09277134 A JP H09277134A
Authority
JP
Japan
Prior art keywords
hole
control
inner diameter
control hole
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11300396A
Other languages
Japanese (ja)
Inventor
Kiyoshi Agawa
清 阿川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11300396A priority Critical patent/JPH09277134A/en
Publication of JPH09277134A publication Critical patent/JPH09277134A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum-attracting work fixing device and method which can make a wide application to various works without having no restrictions due to the shapes of the works. SOLUTION: This device is formed smaller than the maximum inside diameter of a control hole 12 and larger than the minimum inside diameter, has a though hole whose diameter is smaller than the minimum inside diameter of the control hole 12, and is provided with an elastic piece 15 which is disposed inside the control hole 12. When the control hole 12 not covered with a work 1 is negatively-pressurized by a vacuum source 8, at least a part of piece 15 is elastically-compressed and drawn into a small-diameter hole part 12a while closing the through hole to close the control hole 12.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、加工を行うワーク
を載置台上に真空吸着して保持するタイプの真空吸着式
ワーク固定装置及び方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction type work fixing device and method of a type in which a work to be processed is vacuum sucked and held on a mounting table.

【0002】[0002]

【従来の技術】加工等を行うワークを載置台上に一時固
定しておく方法の一つとして、真空吸着による保持方法
がある。また、この真空吸着を行う場合で、ワークが大
きいとき、複数の真空吸着孔を用いて吸着しなければ固
定が不安定になるようなケースもある。この場合では、
個々の真空吸着孔を真空源に独立して接続させた構造に
すると、構造が複雑になって大型化し、また設備費も多
くかかる。そこで、載置台の内部に真空源につながるエ
ア室を設けて、このエア室に真空吸着孔を連通させてお
き、エア室内を負圧化させることによって全ての真空吸
着孔に同時に吸着力を持たせることができる構造にした
装置もある。
2. Description of the Related Art One of the methods for temporarily fixing a work to be processed on a mounting table is a holding method by vacuum suction. Further, in the case of performing this vacuum suction, when the work is large, there are cases where the fixation becomes unstable unless suction is performed using a plurality of vacuum suction holes. In this case,
If the structure is such that each vacuum suction hole is independently connected to a vacuum source, the structure becomes complicated and the size becomes large, and the equipment cost also increases. Therefore, an air chamber connected to the vacuum source is provided inside the mounting table, the vacuum suction hole is communicated with this air chamber, and the suction pressure is simultaneously applied to all the vacuum suction holes by making the air chamber negative pressure. There is also a device with a structure that allows it.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、エア室
を負圧化させて全ての真空吸着孔に同時に吸着力を持た
せることができる構造にした従来の真空吸着式ワーク固
定装置では、載置台上にセットするワークが全ての真空
吸着孔を覆って塞いだ状態にして配置されないと、ワー
クで塞がれていない真空吸着孔の部分はエア漏れを起
し、負圧化を阻害して吸着力を低下させる。このため、
使用できるワークの形状に制限を受けることになり、ワ
ークに合った位置に真空吸着孔を設けた色々なタイプの
載置台を用意しておかねばならず、経費や保管場所等の
問題があった。
However, in the conventional vacuum suction type work fixing device having a structure in which the vacuum of the air chamber is made negative so that all vacuum suction holes can simultaneously have suction force, If the workpiece to be set on is not placed so as to cover all the vacuum suction holes and block it, air leakage will occur at the vacuum suction holes that are not blocked by the work, obstructing negative pressure and attracting force. Lower. For this reason,
Since the shape of the work that can be used is limited, it is necessary to prepare various types of mounting tables that have vacuum suction holes at positions that match the work, which causes problems such as cost and storage location. .

【0004】本発明は、上記問題点に鑑みてなされたも
のであり、その目的はワークの形状に制限を受けること
なく、色々なワークに幅広く適用することができるよう
にした真空吸着式ワーク固定装置及び方法を提供する。
さらに、他の目的は、以下に説明する内容の中で順次明
らかにして行く。
The present invention has been made in view of the above problems, and its purpose is not limited to the shape of the work, but can be widely applied to various works, and is a vacuum suction type work fixing. An apparatus and method are provided.
Further, other objects will be clarified sequentially in the contents described below.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、真空源と、ワークが載置される載置台
と、前記載置台の載置面側に近い方が遠い方に比べて内
径が大きく形成されている複数の制御孔と、前記制御孔
内に配置されて、前記制御孔の最大内径よりも小さく、
かつ前記制御孔の最小内径よりも大きく形成されている
とともに、前記制御孔の前記最小内径よりも小さい内径
で作られている貫通孔を有する弾性変形可能な駒とを備
えており、前記ワークによって塞がれていない前記制御
孔が前記真空源により負圧化されると、前記駒の少なく
とも一部が弾性圧縮されて前記貫通孔を閉じながら前記
制御孔の最小内径の孔の部分内に向かって引き込まれて
前記制御孔を閉じることを要部としている。
In order to achieve the above object, the present invention provides a vacuum source, a mounting table on which a work is mounted, and one closer to the mounting surface side of the mounting table. A plurality of control holes having an inner diameter larger than that of the control holes, and the control holes are arranged in the control holes and are smaller than the maximum inner diameter of the control holes
And an elastically deformable piece having a through hole made larger than the minimum inner diameter of the control hole and having an inner diameter smaller than the minimum inner diameter of the control hole. When the unblocked control hole is negatively pressured by the vacuum source, at least a part of the bridge is elastically compressed to close the through hole and move toward the inside of the hole having the minimum inner diameter of the control hole. The main part is that the control hole is retracted to close the control hole.

【0006】また、本発明は上記目的を達成するため
に、ワークが載せられる載置面に複数形成されている吸
着孔を通じて、前記ワークを載置面上に真空吸着して保
持する真空吸着式ワーク固定方法において、前記載置面
側に近づくのに従って内径が大きく形成されている複数
の制御孔を前記吸着孔に対応して設けておくとともに、
前記制御孔の最大内径よりも小さく、かつ前記制御孔の
最小内径よりも大きく形成されて、略中心には前記制御
孔の最小内径よりも小さい径の貫通孔を設けた弾性変形
可能な駒を前記制御孔の最大内径側の孔部分に配置し、
前記ワークで塞がれていない前記制御孔が真空源により
負圧化されると、前記駒の少なくとも一部が弾性圧縮さ
れて前記貫通孔を閉じながら前記最小内径の孔部分内に
引き込まれるようにして前記制御孔を閉じ、この閉じら
れた制御孔に対応する前記吸着孔からの吸引を止めて前
記ワークが載せられている部分に対応している吸着孔に
だけ真空吸着力が生じるようにしたことを要部としてい
る。
Further, in order to achieve the above object, the present invention is a vacuum suction type in which the work is vacuum-sucked and held on the mounting surface through a plurality of suction holes formed on the mounting surface on which the work is mounted. In the work fixing method, a plurality of control holes having an inner diameter that increases toward the mounting surface side are provided corresponding to the suction holes,
An elastically deformable piece having a through hole having a diameter smaller than the maximum inner diameter of the control hole and larger than the minimum inner diameter of the control hole and having a diameter smaller than the minimum inner diameter of the control hole is provided at the substantially center. Arranged in the hole portion on the maximum inner diameter side of the control hole,
When a negative pressure is applied to the control hole which is not blocked by the work by a vacuum source, at least a part of the piece is elastically compressed to be drawn into the hole portion having the minimum inner diameter while closing the through hole. The control hole is closed, and suction from the suction hole corresponding to the closed control hole is stopped so that the vacuum suction force is generated only in the suction hole corresponding to the portion on which the work is placed. That is the main part.

【0007】以上の本発明によれば、ワークにより塞が
れていない制御孔は、負圧化されると駒によって自動的
に閉じられてエア漏れが防げる。このため、使用できる
ワークの形状に制限を受けることなく、一つのワーク固
定装置で色々なワークに幅広く適用することが可能とな
る。
According to the present invention described above, the control hole which is not blocked by the work is automatically closed by the piece when the negative pressure is applied to prevent air leakage. For this reason, one work fixing device can be widely applied to various works without being restricted by the shape of the work that can be used.

【0008】[0008]

【発明の実施の形態】図1は及び図2は本発明の一実施
例として示す真空吸着式ワーク固定装置を示すもので、
図1はその概略構成断面図、図2は図1のA−A線に沿
う方向より見た上面図である。なお、図1の断面部分は
図2のB−B線に沿って断面しているものである。
1 and 2 show a vacuum suction type work fixing device shown as an embodiment of the present invention.
1 is a schematic sectional view of the structure, and FIG. 2 is a top view seen from the direction along the line AA of FIG. The cross section of FIG. 1 is taken along the line BB of FIG.

【0009】図1及び図2において、この真空吸着式ワ
ーク固定装置は、ワーク1が載置される載置台2を有し
ている。この載置台2は、載置台本体部3と、この載置
台本体部3上に密着配置されている載置面板4等で構成
されており、載置台本体部3内にはエア室5が形成され
ている。このエア室5には、パイプ6が接続され、この
パイプ6の途中に電磁弁7を設けて、真空源8及び圧縮
エア源9と吸気用のバルブ10をパイプ6にそれぞれ接
続させている。そして、電磁弁7を切り替えることによ
って、エア室5に対して真空源8,圧縮エア源9,吸気
用のバルブ10を択一的に接続することができる構造に
なっている。
1 and 2, this vacuum suction type work fixing device has a mounting table 2 on which a work 1 is mounted. The mounting table 2 is composed of a mounting table body 3 and a mounting face plate 4 and the like which are closely arranged on the mounting table body 3, and an air chamber 5 is formed in the mounting table body 3. Has been done. A pipe 6 is connected to the air chamber 5, an electromagnetic valve 7 is provided in the middle of the pipe 6, and a vacuum source 8 and a compressed air source 9 and an intake valve 10 are connected to the pipe 6, respectively. By switching the electromagnetic valve 7, the vacuum source 8, the compressed air source 9, and the intake valve 10 can be selectively connected to the air chamber 5.

【0010】さらに詳述すると、載置台本体部3は、底
面に底壁板13を取り付けて上記エア室5を形成してい
る。加えて、エア室5の天壁11には、この天壁11を
上下に貫通した状態にして、複数個(本実施例では15
個)の制御孔12が点在して形成されている。この制御
孔12が点在している範囲は、汎用性を高めるために最
大サイズの加工品(ワーク)と対応する位置にわたって
いる。また、制御孔12は、小径孔部12aと、この小
径孔部12aの上方より連続して形成されている大径孔
部12bとを有しているとともに、大径孔部12bは上
方(載置面板4側)に向かうに従って序々に内径が大き
くなるようにしてすり鉢状に形成されている。
More specifically, the mounting table body 3 has a bottom wall plate 13 attached to the bottom surface thereof to form the air chamber 5. In addition, the top wall 11 of the air chamber 5 is provided with a plurality (15
The individual control holes 12 are formed in a scattered manner. The range in which the control holes 12 are scattered extends to a position corresponding to a workpiece (workpiece) of maximum size in order to enhance versatility. Further, the control hole 12 has a small diameter hole portion 12a and a large diameter hole portion 12b formed continuously from above the small diameter hole portion 12a, and the large diameter hole portion 12b is above (mounted). It is formed in a mortar shape so that the inner diameter gradually increases toward the placing surface plate 4 side).

【0011】載置面板4は、載置台本体部3の天壁11
上に積層された状態で取り付けられているとともに、制
御孔12と対応する位置には吸着孔14が形成されてい
る。なお、この吸着孔14の内径は後述する駒15が弾
性変形しても外へ飛び出ない大きさで形成されている。
The mounting face plate 4 is a top wall 11 of the mounting table body 3.
The suction holes 14 are attached in a stacked state on the upper side, and suction holes 14 are formed at positions corresponding to the control holes 12. The inner diameter of the suction hole 14 is formed so as not to protrude outside even if the piece 15 described later is elastically deformed.

【0012】加えて、制御孔12の大径孔部12b内に
は駒15が配設されている。この駒15は、図5及び図
6に示すように、ゴム材で弾性を有した球状に形成され
ており、通気用の複数の貫通孔16が球心を通って複数
形成されている。なお、貫通孔16の内径は制御孔12
の小径孔部12aの内径よりも小さく形成されている。
また、駒15の外径は制御孔12の大径孔部12bの最
大内径よりも小さく、かつ小径孔部12aの内径よりも
大きく形成されている。
In addition, a piece 15 is arranged in the large diameter hole portion 12b of the control hole 12. As shown in FIGS. 5 and 6, the piece 15 is formed of a rubber material into a spherical shape having elasticity, and a plurality of through holes 16 for ventilation are formed through a spherical center. The inner diameter of the through hole 16 is the same as that of the control hole 12.
Is formed smaller than the inner diameter of the small diameter hole portion 12a.
Further, the outer diameter of the piece 15 is smaller than the maximum inner diameter of the large diameter hole portion 12b of the control hole 12 and larger than the inner diameter of the small diameter hole portion 12a.

【0013】そして、この駒15は、エア室5内が負圧
化されていない状態では大径孔部12b内に止まってい
る(図3参照)。一方、エア室5内が負圧化されると貫
通孔16を通ってエア室5内にエアが吸い込まれること
になる。このとき、ワーク1が吸着孔14を塞いで配置
されている場合は、ワーク1の吸着保持が終了するとワ
ーク1が吸着孔14に密着されて閉じることにより、エ
アの吸い込みが終了するので、貫通孔16内をエアがそ
れ以上流れず、大径孔部12b内に止まったままの状態
におかれる(図3参照)。
The piece 15 remains in the large-diameter hole portion 12b when the inside of the air chamber 5 is not under negative pressure (see FIG. 3). On the other hand, if the inside of the air chamber 5 is made negative, the air is sucked into the air chamber 5 through the through hole 16. At this time, when the work 1 is arranged so as to close the suction hole 14, when the work 1 is sucked and held, the work 1 is brought into close contact with the suction hole 14 to be closed, so that the suction of air is completed, so that the penetration is performed. The air does not flow any more in the hole 16 and remains in the large-diameter hole portion 12b (see FIG. 3).

【0014】これに対して、ワーク1が吸着孔14を塞
いでいない場合は、貫通孔16内をエアが流れ続けるの
で、駒15を小径孔部12a内に引き込もうとする力が
長い時間働く。すると、駒15が弾性圧縮されながら、
この駒15の一部が小径孔部12a内に引き込まれる。
また、駒15が弾性圧縮されると貫通孔16も閉じら
れ、この駒15が密閉栓となって制御孔12を閉じる
(図4参照)。
On the other hand, when the work 1 does not block the suction hole 14, the air continues to flow in the through hole 16, so that the force for pulling the piece 15 into the small diameter hole portion 12a works for a long time. Then, while the piece 15 is elastically compressed,
A part of this piece 15 is drawn into the small diameter hole portion 12a.
Further, when the piece 15 is elastically compressed, the through hole 16 is also closed, and the piece 15 serves as a sealing plug to close the control hole 12 (see FIG. 4).

【0015】次に、このように構成された真空吸着式ワ
ーク固定装置の動作を説明する。まず、載置面板4上に
ワーク1を載せる。この場合、ワーク1のサイズ、形状
により、ワーク1で塞がれた吸着孔14とワーク1で塞
がれていない吸着孔14とができる。図1において、同
図中の(b)で示す制御孔12はワーク1で塞がれ、
(a)で示す制御孔12はワーク1で塞がれていない。
Next, the operation of the vacuum suction type work fixing device thus constructed will be described. First, the work 1 is placed on the placement face plate 4. In this case, depending on the size and shape of the work 1, the suction holes 14 blocked by the work 1 and the suction holes 14 not blocked by the work 1 can be formed. In FIG. 1, the control hole 12 shown in FIG. 1B is closed by the work 1.
The control hole 12 shown in (a) is not blocked by the work 1.

【0016】次いで、電磁弁7の切り替えによりエア室
5内が真空源8に接続されて、エア室5内が負圧化され
ると、各制御孔12内で駒15の貫通孔16を通して空
気がエア室5に向かって抜かれるようにして流れる。そ
して、ワーク1が吸着孔14を塞いで配置されている場
合は、吸着孔14にワーク1が吸着保持され、その後は
エアが貫通孔16内をそれ以上流れない。このため、駒
15が大径孔部12b内に止まったままの状態におか
れ、真空吸着固定が保持される。一方、ワーク1が吸着
孔14を塞いでいない場合は、貫通孔16内をエアが流
れ続けるので、駒15を小径孔部12a内に引き込もう
とする力が働く。すると、駒15が弾性圧縮されて、こ
の駒15の一部が小径孔部12a内に引き込まれる。ま
た、駒15が弾性圧縮されるときに、貫通孔16も閉じ
られ、この駒15が密閉栓となって制御孔12を閉じる
(図4参照)。こうして、ワーク1で塞がれていない吸
着孔14と対応している制御孔12は駒15で閉じられ
る。図1は、この状態を示している。
Next, when the inside of the air chamber 5 is connected to the vacuum source 8 by switching the solenoid valve 7 and the inside of the air chamber 5 is made negative pressure, the air is passed through the through hole 16 of the bridge 15 in each control hole 12. Flows toward the air chamber 5 as if it were pulled out. When the work 1 is arranged so as to close the suction hole 14, the work 1 is suction-held in the suction hole 14, and thereafter, air does not flow in the through hole 16 any more. For this reason, the piece 15 is left in the large-diameter hole portion 12b, and the vacuum suction fixing is maintained. On the other hand, when the work 1 does not block the suction hole 14, the air continues to flow in the through hole 16, so that a force acts to pull the piece 15 into the small diameter hole portion 12a. Then, the piece 15 is elastically compressed, and a part of the piece 15 is drawn into the small diameter hole portion 12a. Further, when the piece 15 is elastically compressed, the through hole 16 is also closed, and the piece 15 serves as a sealing plug to close the control hole 12 (see FIG. 4). In this way, the control hole 12 corresponding to the suction hole 14 not blocked by the work 1 is closed by the piece 15. FIG. 1 shows this state.

【0017】ワーク1の加工が終了したら、電磁弁7が
制御されてエア室5内と真空源8との間が断たれ、これ
に変わって吸気用のバルブ10が開放される。すると、
そのバルブ10を通してエア室5内にエアが吸気され
て、エア室5内が略大気圧になる。すると、ワーク1の
真空吸着固定も解かれる。一方、弾性圧縮されて小径孔
部12a内に引き込まれて小径孔部12aを塞いでいた
駒15は、そのまま保持される。そして、次のワーク1
が同一形状で同位置にセットするときには、ワーク1を
載置面板4上に載せ、電磁弁7を介してエア室5内と真
空源8を連通させるようにして、以上の動作を繰り返
す。したがって、この構造では、2回目以降の動作で
は、ワーク1が塞いでいる部分における制御孔12内だ
けのエア抜きを行ってワーク1を保持することになるの
で、2回目以降でのエア漏れはなくなる。
When the machining of the work 1 is completed, the solenoid valve 7 is controlled to disconnect the inside of the air chamber 5 from the vacuum source 8, and instead, the intake valve 10 is opened. Then
Air is sucked into the air chamber 5 through the valve 10 and the inside of the air chamber 5 becomes substantially atmospheric pressure. Then, the vacuum suction fixation of the work 1 is also released. On the other hand, the piece 15 that has been elastically compressed and drawn into the small diameter hole portion 12a to close the small diameter hole portion 12a is held as it is. And the next work 1
When the workpieces 1 are set to the same position with the same shape, the work 1 is placed on the mounting face plate 4 and the inside of the air chamber 5 and the vacuum source 8 are made to communicate with each other via the electromagnetic valve 7, and the above operation is repeated. Therefore, in this structure, in the second and subsequent operations, the work 1 is held by bleeding only the inside of the control hole 12 in the part where the work 1 is blocked, so that air leakage from the second and subsequent times does not occur. Disappear.

【0018】次に、ワーク1の形状やセット位置が変わ
る場合には、電磁弁7の切り替えによりエア室5に圧縮
エア源9を接続させ、この圧縮エア源9よりエア室5内
に圧縮空気を送り込む。すると、それまで小径孔部12
a内に引き込まれて塞いでいた駒15が小径孔部12a
内より大径孔部12b内に戻され、全ての制御孔12が
開放された元の状態に戻る。また、元の位置に戻された
駒15は自己弾性復帰されて元の形状に戻される。な
お、エア室5に圧縮空気を送り込んでいる過程では駒1
5がその圧縮空気により載置面板4側へ吹き上げられる
こともある。この場合、吸着孔14は駒15が外へ飛び
出さない大きさに設けられているので、駒15の不用意
な飛び出しは確実に防止されるようになっている。次い
で、ワーク1を載置面板4上に配置し、電磁弁7を介し
て真空源8をエア室5に接続させ、このエア室5内を負
圧化すると、ワーク1で塞がれていない部分に対応する
制御孔12が駒15で塞がれて固定に必要な真空圧を得
る。
Next, when the shape or set position of the work 1 changes, the compressed air source 9 is connected to the air chamber 5 by switching the solenoid valve 7, and the compressed air source 9 compresses the compressed air into the air chamber 5. Send in. Then, until then, the small diameter hole 12
The piece 15 that has been pulled into the inside of a and is closed has a small diameter hole 12a.
It is returned from the inside into the large-diameter hole portion 12b, and returns to the original state in which all the control holes 12 are opened. Further, the piece 15 returned to the original position is elastically returned to the original shape. In addition, in the process of sending the compressed air into the air chamber 5, the piece 1
5 may be blown up to the mounting face plate 4 side by the compressed air. In this case, since the suction holes 14 are provided in such a size that the piece 15 does not jump out, the piece 15 is prevented from being accidentally jumped out. Next, the work 1 is placed on the mounting face plate 4, the vacuum source 8 is connected to the air chamber 5 via the electromagnetic valve 7, and the inside of the air chamber 5 is made negative pressure. The control hole 12 corresponding to the portion is closed by the piece 15 to obtain the vacuum pressure required for fixing.

【0019】したがって、本実施例の構造によれば、ワ
ーク1により塞がれていない制御孔12は、負圧化され
ると駒15によって自動的に閉じられるので、ワーク1
で全ての制御孔12に対応している部分を全て閉じなく
てもエア漏れが生じることもない。これにより、使用で
きるワーク1の形状に制限を受けることなく、一つのワ
ーク固定装置で色々なワークに幅広く適用することがで
きる。これにより、載置台の台数を減らすことができ、
経済面や保管場所等の面で有利に展開することができ
る。
Therefore, according to the structure of this embodiment, the control hole 12 which is not blocked by the work 1 is automatically closed by the piece 15 when the negative pressure is applied.
Therefore, air leakage does not occur even if all the portions corresponding to all the control holes 12 are not closed. As a result, one work fixing device can be widely applied to various works without being restricted by the shape of the work 1 that can be used. As a result, the number of mounting tables can be reduced,
It can be advantageously developed in terms of economy and storage location.

【0020】なお、上記実施例では、大径孔部12bを
円錐状に形成した構造を開示したが、小径孔部12aと
の間に段差を持たせた構造にしても差し支えないもので
ある。しかし、本実施例の構造のように、円錐状にした
場合では、駒の密着性が向上し、制御孔12を閉じると
きのシール性が良くなる。
In the above embodiment, the large diameter hole portion 12b is formed in a conical shape, but a structure having a step between the large diameter hole portion 12a and the small diameter hole portion 12a may be used. However, in the case of the conical shape as in the structure of this embodiment, the adhesion of the pieces is improved, and the sealing property when closing the control hole 12 is improved.

【0021】また、駒15として球状をした弾性体を使
用した構造を開示したが、例えば図7及び図8に示すよ
うに、駒15を円錐台形に形成し、その略中心に上下方
向に貫通した孔20を設けた構造としても差し支えない
ものである。図9及び図10は図7及び図8に示した円
錐台形の駒15を使用した場合における動作状態図であ
る。図9及び図10において図1乃至図4と同一符号を
付すものは同一部材を示している。そして、この円錐台
形をした駒15は、エア室5内が負圧化されていない状
態では大径孔部12bの上部に止まっている(図9参
照)。一方、エア室5内が負圧化されると貫通孔20を
通ってエア室5内にエアが吸い込まれることになる。こ
のとき、ワーク1が吸着孔14を塞いで配置されている
場合は、ワーク1の吸着保持が終了するとエアの吸い込
みが終了するので、貫通孔20内をエアがそれ以上流れ
ず、大径孔部12b内に止まったままの状態におかれる
(図3参照)。
Although a structure using a spherical elastic body as the piece 15 has been disclosed, the piece 15 is formed in a truncated cone shape and penetrates in the vertical direction substantially at its center as shown in FIGS. 7 and 8, for example. It does not matter even if the structure is provided with the hole 20. 9 and 10 are operation state diagrams when the truncated cone-shaped piece 15 shown in FIGS. 7 and 8 is used. 9 and 10, the same reference numerals as those in FIGS. 1 to 4 denote the same members. The frustoconical piece 15 remains on the upper portion of the large-diameter hole 12b when the air chamber 5 is not under negative pressure (see FIG. 9). On the other hand, when the inside of the air chamber 5 is made negative, the air is sucked into the air chamber 5 through the through hole 20. At this time, when the work 1 is arranged so as to close the suction hole 14, the suction of the work 1 is finished and the suction of air is finished, so that the air does not flow any more in the through hole 20 and the large diameter hole is formed. It is left in the state of being stopped inside the portion 12b (see FIG. 3).

【0022】これに対して、ワーク1が吸着孔14を塞
いでいない場合は、貫通孔20内をエアが流れ続けるの
で、駒15を小径孔部12a内に引き込もうとする力が
長く働く。すると、駒15が弾性圧縮されながら、この
駒15の一部が小径孔部12a内に引き込まれる。ま
た、駒15が弾性圧縮されると、貫通孔20も閉じら
れ、この駒15が密閉栓となって制御孔12を閉じるこ
とになる(図10参照)。以下の動作は、図1乃至図4
に示した動作と同じである。
On the other hand, when the work 1 does not block the suction hole 14, the air continues to flow in the through hole 20, so that the force for pulling the piece 15 into the small diameter hole portion 12a works for a long time. Then, while the piece 15 is elastically compressed, a part of the piece 15 is drawn into the small diameter hole portion 12a. When the piece 15 is elastically compressed, the through hole 20 is also closed, and the piece 15 serves as a sealing plug to close the control hole 12 (see FIG. 10). The following operations are shown in FIGS.
It is the same as the operation shown in.

【0023】[0023]

【発明の効果】以上説明したとおり、本発明によれば、
使用できるワークの形状に制限を受けることがなく、一
つのワーク固定装置で色々なワークに幅広く適用するこ
とができる。これにより、載置台の台数を減らすことが
でき、経済面や保管場所等の面で有利になる等の効果が
期待できる。
As described above, according to the present invention,
The shape of the work that can be used is not limited, and one work fixing device can be widely applied to various works. As a result, the number of mounting tables can be reduced, and advantages such as economic advantages and storage location advantages can be expected.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の形態例として示す真空吸着式ワーク固
定装置の概略構成断面図である。
FIG. 1 is a schematic configuration cross-sectional view of a vacuum suction type work fixing device shown as an embodiment of the present invention.

【図2】図1のA−A線に沿う方向より見た上面図であ
る。
FIG. 2 is a top view seen from the direction along the line AA of FIG.

【図3】本発明装置の動作説明図である。FIG. 3 is an operation explanatory view of the device of the present invention.

【図4】本発明装置の動作説明図である。FIG. 4 is an operation explanatory diagram of the device of the present invention.

【図5】本発明装置で使用している駒を単品で示す側面
図である。
FIG. 5 is a side view showing, as a single piece, a piece used in the device of the present invention.

【図6】図5のC−C線に沿う断面図である。6 is a sectional view taken along the line CC of FIG.

【図7】前記駒の変形例を示す側面図である。FIG. 7 is a side view showing a modified example of the piece.

【図8】図7のD−D線に沿う断面図である。8 is a cross-sectional view taken along the line DD of FIG.

【図9】本発明装置の動作説明図である。FIG. 9 is a diagram illustrating the operation of the device of the present invention.

【図10】本発明装置の動作説明図である。FIG. 10 is a diagram illustrating the operation of the device of the present invention.

【符号の説明】[Explanation of symbols]

1 ワーク 2 載置台 3 載置台本体部 4 載置面板 5 エア室 8 真空源 9 圧縮エア源 12 制御孔 12a 小径孔部 12b 大径孔部 13 載置台本体部 14 吸着孔 15 駒 16 貫通孔 20 貫通孔 1 Work 2 Mounting Table 3 Mounting Table Main Body 4 Mounting Face Plate 5 Air Chamber 8 Vacuum Source 9 Compressed Air Source 12 Control Hole 12a Small Diameter Hole 12b Large Diameter Hole 13 Mounting Platform Main Body 14 Adsorption Hole 15 Piece 16 Through Hole 20 Through hole

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 真空源と、 ワークが載置される載置台と、 前記載置台の載置面側に近い方が遠い方に比べて内径が
大きく形成されている複数の制御孔と、 前記制御孔内に配置されて、前記制御孔の最大内径より
も小さく、かつ前記制御孔の最小内径よりも大きく形成
されているとともに、前記制御孔の前記最小内径よりも
小さい内径で作られている貫通孔を有する弾性変形可能
な駒とを備えており、 前記ワークによって塞がれていない前記制御孔が前記真
空源により負圧化されると、前記駒の少なくとも一部が
弾性圧縮されて前記貫通孔を閉じながら前記制御孔の最
小内径の孔の部分内に向かって引き込まれて前記制御孔
を閉じることを特徴とする真空吸着式ワーク固定装置。
1. A vacuum source, a mounting table on which a work is mounted, a plurality of control holes having an inner diameter larger on the side closer to the mounting surface of the mounting table than on the side farther, It is arranged in the control hole, is formed to be smaller than the maximum inner diameter of the control hole and larger than the minimum inner diameter of the control hole, and is made to have an inner diameter smaller than the minimum inner diameter of the control hole. An elastically deformable piece having a through hole is provided, and when the control hole that is not blocked by the work is negatively pressured by the vacuum source, at least a part of the piece is elastically compressed to penetrate the through hole. A vacuum suction type work fixing device characterized in that while closing the control hole, the control hole is drawn toward the inside of the hole having the smallest inner diameter of the control hole to close the control hole.
【請求項2】 前記載置台がワークを載置する載置面板
を有し、前記載置台側に前記制御孔の大径の孔部分を、
前記小径の孔部分に近づくに従って序々に小さくなるす
り鉢状に設けるとともに、前記載置面板に前記制御孔に
対応し、かつ前記駒が抜け出ない大きさの吸着孔を形成
している請求項1に記載の真空吸着式ワーク固定装置。
2. The mounting table has a mounting surface plate on which a work is mounted, and the large-diameter hole portion of the control hole is provided on the mounting table side.
The suction hole is provided in a mortar shape that gradually decreases toward the small-diameter hole portion, and a suction hole having a size that corresponds to the control hole and that does not allow the piece to come out is formed on the mounting surface plate. The vacuum suction type work fixing device described.
【請求項3】 前記駒を、略球体状に形成している請求
項2に記載の真空吸着式ワーク固定装置。
3. The vacuum suction type work fixing device according to claim 2, wherein the piece is formed in a substantially spherical shape.
【請求項4】 前記貫通孔を、前記駒の球心を通して複
数設けた請求項3に記載の真空吸着式ワーク固定装置。
4. The vacuum suction type work fixing device according to claim 3, wherein a plurality of the through holes are provided through the spherical center of the piece.
【請求項5】 前記駒を円錐台状に形成しているととも
に、前記貫通孔を前記円錐台の中心を上下に貫通させて
設けた請求項2に記載の真空吸着式ワーク固定装置。
5. The vacuum suction type work fixing device according to claim 2, wherein the piece is formed in a truncated cone shape, and the through hole is provided by vertically penetrating the center of the truncated cone.
【請求項6】 下部側にエア室が設けられるとともに、
上側に近づくのに従って内径が大きくなるようにして前
記エア室より連続して設けられている複数の制御孔を有
した載置台本体部と、 前記制御孔に対応して吸着孔を設けて前記載置台本体部
上に配設されている載置面板と、 前記制御孔内に配置されて、前記制御孔の最大内径より
も小さく、かつ前記制御孔の最小内径よりも大きく形成
されているとともに、前記制御孔の最小内径よりも小さ
い内径で作られている貫通孔を有する弾性変形可能な駒
と、 前記エア室内を負圧化するための真空源と、 前記エア室へ圧縮エアを送る圧縮エアー源とを備えてお
り、 前記エア室内が負圧化されると、前記載置面板に載せら
れるワークによって塞がれていない前記吸着孔と対応し
ている前記制御孔内に配置されている前記駒の一部が弾
性圧縮されて前記貫通孔を閉じながら前記制御孔内に引
き込まれて該制御孔を閉じることを特徴とする真空吸着
式ワーク固定装置。
6. An air chamber is provided on the lower side, and
The mounting table main body having a plurality of control holes continuously provided from the air chamber such that the inner diameter increases toward the upper side, and suction holes are provided corresponding to the control holes. A mounting face plate disposed on the mounting table main body, and arranged in the control hole, smaller than the maximum inner diameter of the control hole, and larger than the minimum inner diameter of the control hole, An elastically deformable piece having a through hole having an inner diameter smaller than the minimum inner diameter of the control hole, a vacuum source for making the air chamber negative pressure, and compressed air for sending compressed air to the air chamber. And a suction source that is not blocked by a work placed on the placement plate when the air chamber is negatively pressured, and the suction hole is disposed in the control hole that corresponds to the suction hole. Before the piece is elastically compressed Drawn into the control hole while closing the through hole vacuum suction type workpiece fixing device characterized by closing the control hole.
【請求項7】 ワークが載せられる載置面に複数形成さ
れている吸着孔を通じて、前記ワークを載置面上に真空
吸着して保持する真空吸着式ワーク固定方法において、 前記載置面側に近づくのに従って内径が大きく形成され
ている複数の制御孔を前記吸着孔に対応して設けておく
とともに、 前記制御孔の最大内径よりも小さく、かつ前記制御孔の
最小内径よりも大きく形成されて、略中心には前記制御
孔の最小内径よりも小さい径の貫通孔を設けた弾性変形
可能な駒を前記制御孔の最大内径側に配置し、 前記ワークで塞がれていない前記制御孔が真空源により
負圧化されると、前記駒の少なくとも一部が弾性圧縮さ
れて前記貫通孔を閉じながら前記最小内径の孔部分内に
引き込まれるようにして前記制御孔を閉じ、この閉じら
れた制御孔に対応する前記吸着孔からの吸引を止めて前
記ワークが載せられている部分に対応している吸着孔に
だけ真空吸着力が生じるようにしたことを特徴とする真
空吸着式ワーク固定方法。
7. A vacuum suction type work fixing method, wherein the work is vacuum-sucked and held on the mounting surface through a plurality of suction holes formed on the mounting surface on which the work is mounted. A plurality of control holes whose inner diameters are formed to increase as they approach each other are provided corresponding to the suction holes, and are formed to be smaller than the maximum inner diameter of the control holes and larger than the minimum inner diameter of the control holes. , An elastically deformable piece having a through hole having a diameter smaller than the minimum inner diameter of the control hole is disposed substantially at the center on the maximum inner diameter side of the control hole, and the control hole not blocked by the work is When a negative pressure is applied by a vacuum source, at least a part of the bridge is elastically compressed to close the through hole so that the bridge is drawn into the hole portion having the minimum inner diameter, and the control hole is closed. Pair of holes The vacuum suction work fixing method is characterized in that the suction from the corresponding suction hole is stopped and the vacuum suction force is generated only in the suction hole corresponding to the portion on which the work is placed.
JP11300396A 1996-04-11 1996-04-11 Vacuum-attracting work fixing device and method Pending JPH09277134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11300396A JPH09277134A (en) 1996-04-11 1996-04-11 Vacuum-attracting work fixing device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11300396A JPH09277134A (en) 1996-04-11 1996-04-11 Vacuum-attracting work fixing device and method

Publications (1)

Publication Number Publication Date
JPH09277134A true JPH09277134A (en) 1997-10-28

Family

ID=14601015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11300396A Pending JPH09277134A (en) 1996-04-11 1996-04-11 Vacuum-attracting work fixing device and method

Country Status (1)

Country Link
JP (1) JPH09277134A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010044402A (en) * 1998-07-04 2010-02-25 Laser Imaging Systems Gmbh & Co Kg Scanner system
JP2010269373A (en) * 2009-05-19 2010-12-02 Taiyo Tec Co Vacuum suction device and suction tool constituting implement
CN109277968A (en) * 2018-11-30 2019-01-29 深圳市优米佳自动化设备有限公司 A kind of vacuum suction device
WO2023139634A1 (en) * 2022-01-18 2023-07-27 ヤマハロボティクスホールディングス株式会社 Suction stage and method for holding workpiece

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010044402A (en) * 1998-07-04 2010-02-25 Laser Imaging Systems Gmbh & Co Kg Scanner system
JP2010269373A (en) * 2009-05-19 2010-12-02 Taiyo Tec Co Vacuum suction device and suction tool constituting implement
CN109277968A (en) * 2018-11-30 2019-01-29 深圳市优米佳自动化设备有限公司 A kind of vacuum suction device
WO2023139634A1 (en) * 2022-01-18 2023-07-27 ヤマハロボティクスホールディングス株式会社 Suction stage and method for holding workpiece

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