JP2010253658A5 - - Google Patents

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Publication number
JP2010253658A5
JP2010253658A5 JP2009109824A JP2009109824A JP2010253658A5 JP 2010253658 A5 JP2010253658 A5 JP 2010253658A5 JP 2009109824 A JP2009109824 A JP 2009109824A JP 2009109824 A JP2009109824 A JP 2009109824A JP 2010253658 A5 JP2010253658 A5 JP 2010253658A5
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JP
Japan
Prior art keywords
work holding
flow path
holding device
contact
contact work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009109824A
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English (en)
Japanese (ja)
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JP2010253658A (ja
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Publication date
Application filed filed Critical
Priority to JP2009109824A priority Critical patent/JP2010253658A/ja
Priority claimed from JP2009109824A external-priority patent/JP2010253658A/ja
Publication of JP2010253658A publication Critical patent/JP2010253658A/ja
Publication of JP2010253658A5 publication Critical patent/JP2010253658A5/ja
Withdrawn legal-status Critical Current

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JP2009109824A 2009-04-28 2009-04-28 非接触ワーク保持装置 Withdrawn JP2010253658A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009109824A JP2010253658A (ja) 2009-04-28 2009-04-28 非接触ワーク保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009109824A JP2010253658A (ja) 2009-04-28 2009-04-28 非接触ワーク保持装置

Publications (2)

Publication Number Publication Date
JP2010253658A JP2010253658A (ja) 2010-11-11
JP2010253658A5 true JP2010253658A5 (https=) 2012-01-05

Family

ID=43315171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009109824A Withdrawn JP2010253658A (ja) 2009-04-28 2009-04-28 非接触ワーク保持装置

Country Status (1)

Country Link
JP (1) JP2010253658A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5871524B2 (ja) * 2011-08-30 2016-03-01 富士機械製造株式会社 部品装着ヘッド
JP5928691B2 (ja) * 2012-01-20 2016-06-01 村田機械株式会社 吸引チャック及び移載装置
JP5921323B2 (ja) * 2012-05-11 2016-05-24 株式会社妙徳 搬送保持具及び搬送保持装置
CN111673559B (zh) * 2020-05-14 2022-07-15 瑟德莱伯(嘉兴)科技智造有限公司 一种基于气流压力式的硅片减薄磨削机构

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