JP2010253658A5 - - Google Patents

Claims (10)

  A housing having a rotationally symmetric inner peripheral surface, the top being hermetically sealed and having a circular lower opening at the bottom, and gas flowing at a flow rate having a downward component along the circumferential direction of the inner peripheral surface of the housing; A non-contact work holding device comprising: a flow path that ejects into a housing to form a swirling flow, and the inner peripheral surface includes a reduced diameter portion that decreases in diameter toward the lower opening direction. A non-contact work holding device unit comprising an even number of non-contact work holding devices according to claim 1, wherein the spiral flow path has a right-handed number and a left-facing number equal to each other. Contact work holding unit. The non-contact work holding device unit according to claim 2, wherein the non-contact work holding devices having a right-handed and left-handed flow path are alternately arranged in a rotationally symmetrical manner about one axis.   The non-contact work holding device according to claim 1, wherein a block member is inserted into a top portion of the housing, and the flow path is formed in a spiral shape between the block member and the inner peripheral surface. . 5. The non-circular flow path according to claim 4 , wherein spiral ridges are provided on an outer peripheral surface of the block, and the spiral flow paths are formed by contacting the ridges with the inner peripheral surface. Contact workpiece holding device. The non-contact workpiece holding device according to claim 5 , wherein the block member includes a rotationally symmetric protrusion that is reduced in diameter toward the lower opening. The non-contact according to claim 6 , wherein a control flow path that communicates the block member along a rotational symmetry axis is provided, and the control flow path is further communicated to the outside of the housing via a control valve. Work holding device. The supply flow path for supplying the gas to the upper portion of the block member is hermetically connected to the housing, according to claim 7, wherein the control channel on the inside of the supply passage is characterized in that it is provided Non-contact work holding device. The non-contact work holding apparatus according to claim 8 , wherein the lower opening has a region whose diameter is increased downward. The non-contact work holding apparatus according to claim 4 , wherein a plurality of the spiral flow paths are provided.