JP2010221161A - Aerosol injection nozzle, and aerosol injection nozzle with reducer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an aerosol injection nozzle equipped with an injection opening having a long direction and a short direction and injecting the aerosol prepared by dispersing solid particles in gas and to propose a structure for more uniformizing the spatial distribution or speed distribution of the aerosol injected from the aerosol injection nozzle. <P>SOLUTION: The aerosol injection nozzle 25 is equipped with an aerosol flow channel 30 having an introducing opening 36 for introducing the aerosol, the injection opening 31 having the long and short directions crossing each other at an almost right angle and injecting the aerosol and an area gradually reducing part 33 being a flow channel through which the aerosol passes from the introducing opening 36 to the injection opening 31 and becoming small in flow channel area as a fluid advances. The flow channel cross section of the area gradually reducing part 33 is formed into a track shape (sports ground shape) demarcated by two segments 82 and 82 almost parallel to the long direction of the injection opening 31 and two circular arcs 81 and 81. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an injection nozzle used in a blasting method or an aerosol deposition method.

  Conventionally, an air blasting method is known as a method for performing partial surface grinding of a workpiece made of metal, ceramic, glass, plastic, or the like. This method performs partial cutting and polishing of the workpiece by injecting a projection material (fine solid particles such as an abrasive) dispersed in a compressed gas from a nozzle and colliding with the workpiece at a high speed. It is. Hereinafter, the fine solid particles dispersed in the gas and floating in the gas are referred to as “aerosol”.

  Conventionally, an aerosol deposition method is known as a method of forming a ceramic thin film used as a piezoelectric actuator or the like. In this method, an aerosol formed by dispersing ceramic fine particles in a gas is sprayed from a nozzle and sprayed onto the substrate surface at a high speed, whereby fine particles are pulverized and deposited on the substrate to form a ceramic thin film. The aerosol deposition method utilizes a normal temperature impact solidification phenomenon of ceramic fine particles and eliminates the sintering process at 1000 ° C. or higher, which has been performed in the conventional ceramic thin film forming method. Therefore, it is not necessary to design a thin film in consideration of dimensional accuracy, and a fine nanocrystal structure is formed by crushing fine particles, and a ceramic thin film having an extremely smooth surface can be manufactured.

In the processing using the above-described air blasting method or the film formation using the aerosol deposition method, it may be necessary to grind to a uniform depth or form a film with a uniform thickness over a wide range. Therefore, Patent Document 1 proposes a nozzle structure that is advantageous for injecting aerosol over a wider range than a nozzle having a circular injection opening. The nozzle described in Patent Document 1 has a rectangular lead-out opening having a long direction and a short length direction for injecting aerosol, and the short direction of the lead-out opening is a short direction toward the opening inside the nozzle. A cross-sectional area reduced portion having a shape in which the dimension continuously decreases and the longitudinal direction of the lead-out opening continuously increases in the longitudinal direction toward the opening; and a constant cross-sectional area portion following the reduced cross-sectional area; A flow path having both is provided. With such a configuration, it is said that an aerosol having a uniform concentration is ejected over the longitudinal direction of the outlet opening of the nozzle, and the spraying aerosol is scattered in a constant direction and speed.
JP 2003-247080 A

  Incidentally, whether or not the solid particles in the aerosol passing through the nozzle follow the airflow can be determined using the Stokes number S. When the Stokes number S is sufficiently smaller than 1, the solid particles substantially follow the air flow. When the Stokes number S is larger than 1, the solid particles move regardless of the air flow, and the Stokes number S becomes 1. If they are close, the solid particles follow the airflow, but do not match perfectly but move in a complicated manner. Considering the movement in the nozzle of solid particles with a Stokes number S close to 1 on the assumption of this, if the flow path area of the nozzle is rapidly reduced, the solid particles do not follow the movement of the air flow and collide with the inner wall of the nozzle. On the contrary, if the flow channel area of the nozzle is rapidly expanded, the solid particles are not uniformly dispersed throughout the flow channel, and the solid particle density at the substantially central portion of the flow channel becomes higher than the others. In other words, even when the Stokes number S of the solid particles passing through the nozzle is close to 1, in order to make the concentration of the aerosol sprayed from the nozzle (solid distribution of the solid particles) and the velocity distribution of the aerosol uniform, It is necessary to make the change in the flow path shape more gradual.

  The present invention has been made in order to solve the above-described problems. For example, the present invention includes an injection opening having a long direction and a short direction as described in Patent Document 1, and is solid in a gas. An object of the present invention is to propose an aerosol injection nozzle for injecting an aerosol in which particles are dispersed, and to make the spatial distribution and velocity distribution of the aerosol injected from the nozzle more uniform.

  The aerosol injection nozzle of the present invention includes an introduction opening for introducing aerosol, an injection opening for injecting aerosol having a longitudinal direction and a short direction substantially perpendicular to each other, and a flow through which the aerosol passes from the introduction opening to the injection opening. And an aerosol flow path having an area gradually decreasing portion that reduces the area of the flow path as the fluid advances, and the flow path cross-section of the area gradually decreasing portion of the aerosol flow path is the longitudinal direction of the injection opening. A shape defined by two arcs that are substantially parallel and centered at a point, and two arcs sandwiched by the two straight lines of a circle centered on the point (hereinafter, “ Track shape)).

  The area gradually decreasing portion of the aerosol flow path may be defined by two planes and two partial conical surfaces.

  The injection opening may have a track shape, and the length of the injection opening in the longitudinal direction may be smaller than the length of the introduction opening in the longitudinal direction.

  In addition, the area gradually decreasing portion gradually decreases the distance between the two straight lines and gradually reduces the circle to which the two arcs belong as the distance between the two straight lines decreases along the center line direction of the aerosol flow path. It may be a diameter.

  The aerosol injection nozzle may be provided for injecting the aerosol to a device that realizes the aerosol deposition method.

  An aerosol injection nozzle with a reducer according to the present invention includes the aerosol injection nozzle and a reducer connected to the introduction opening of the aerosol injection nozzle, and the reducer includes a substantially circular inlet opening for introducing aerosol, and the aerosol An aerosol provided with an outlet opening that is intimately connected to the introduction opening of the injection nozzle, and a channel through which the aerosol passes from the inlet opening to the outlet opening, and the area gradually increasing as the fluid advances And a flow path.

  The inlet cross-section of the aerosol injection nozzle, the outlet opening of the reducer, and the channel cross-section at the area gradually decreasing portion of the aerosol channel of the reducer can all have a track shape.

  Alternatively, both the introduction opening of the aerosol injection nozzle and the outlet opening of the reducer may be circular, and the aerosol flow path of the reducer may have a truncated cone shape with an inclination of a generatrix with respect to an axis of 6 ° or less. .

  In the aerosol spray nozzle with a reducer according to the present invention, the aerosol spray nozzle and the reducer are integrally formed.

  The present invention has the following effects.

  According to the present invention, the flow path of the area gradually decreasing portion is sandwiched between two plane portions substantially parallel to the longitudinal direction of the injection opening and the flow path area is gradually decreased. It is uniformly accelerated over a direction substantially parallel to the longitudinal direction of the injection opening. Further, in the area gradually decreasing portion, the flow area is smoothly reduced, so that the separation of the flow of the aerosol flow hardly occurs, and the change in the shape of the cross section of the flow path is gentle, so that the solid particles in the aerosol Is uniformly distributed following the movement of the. Therefore, the spatial distribution and velocity distribution of the aerosol ejected from the aerosol ejection nozzle having the ejection opening having the long direction and the short direction can be made more uniform.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the following description, the same or corresponding elements are denoted by the same reference symbols throughout the drawings, and redundant description thereof is omitted.

The aerosol injection nozzle and the aerosol injection nozzle with a reducer according to the present invention are, for example, fine solid particles dispersed in a gas in a process using an air blast method or a film forming process using an aerosol deposition method ( (Hereinafter referred to as “aerosol”). Here, the aerosol injection nozzle and the aerosol injection nozzle with a reducer used in the film forming process using the aerosol deposition method will be described, but the application of the aerosol injection nozzle and the aerosol injection nozzle with a reducer according to the present invention is implemented in this embodiment. It is not limited to the form.
[Film Forming Apparatus 10]
First, the film forming apparatus 10 provided with an aerosol spray nozzle (hereinafter simply referred to as “spray nozzle 25”) will be described. A known apparatus can be used as the film forming apparatus 10 except for the spray nozzle 25 and the reducer 26, and the present invention is not limited to the structure of the film forming apparatus 10 itself. Only the schematic configuration of will be described.

  FIG. 1 is a diagram showing a schematic configuration of a film forming apparatus using an aerosol deposition method. As shown in FIG. 1, the film forming apparatus 10 includes an aerosol generator 13 that generates aerosol by dispersing material particles in a carrier gas, and a chamber 14 that performs film formation inside. The aerosol generator 13 is a container in which material particles are housed, and an aerosol is generated by introducing a carrier gas from the gas cylinder 11 through the carrier gas transport pipe 12 into the container. One end of an aerosol carrier tube 24 is inserted into the upper part of the aerosol generator 13, and an injection nozzle 25 is connected to the other end of the aerosol carrier tube 24 via a reducer 26.

  The material constituting the material particles is not particularly limited as long as it can be used in the aerosol deposition method. For example, lead zirconate titanate (PZT) which is a piezoelectric material, inorganic powder such as alumina, resin Organic powders such as can be used. In this embodiment, ceramics are used as the material constituting the material particles. The particle size of the material particles may be any particle size that can be used for the aerosol deposition method, but may be, for example, about several μm to several tens of μm. The carrier gas is not particularly limited as long as it can be used in the aerosol deposition method, and for example, inert gas such as helium and argon, nitrogen, air, oxygen and the like can be used.

  The chamber 14 is a decompression container to which an exhaust pump 18 for decompressing the interior is connected. Inside the chamber 14, a substrate holder 17 for holding a base material 16 that is an object to be processed is provided on the ceiling. A spray nozzle 25 is disposed below the substrate holder 17. The substrate holder 17 is provided with a moving mechanism (not shown) that moves the base material 16 in the front-rear direction and the left-right direction while maintaining the horizontal plane. With such a configuration, the injection nozzle 25 and the base material 16 held in a state of being suspended from the lower surface of the substrate holder 17 so as to be movable in a substantially horizontal direction are opposed to each other inside the chamber 14. In addition, it does not specifically limit as a material of the board | substrate 23, For example, a metal, a silicon | silicone, a semiconductor, resin etc. may be sufficient.

  In the chamber 14, a sensor device 21 for measuring the concentration of aerosol ejected from the ejection nozzle 25 is disposed between the ejection nozzle 25 and the base material 16. A signal output from the sensor device 21 is sent to the feedback control circuit 22 for processing. The feedback control circuit 22 controls the aerosol generator 13 and the gas cylinder 11 in order to adjust the concentration of aerosol sprayed from the spray nozzle 25 onto the base material 16 and the amount of aerosol colliding with the base material 16.

In the film forming process using the film forming apparatus 10 having the above configuration, first, the aerosol generator 13 disperses the material particles in the carrier gas to generate the aerosol. Here, when the internal pressure of the chamber 14 is made lower than the internal pressure of the aerosol generator 13, the aerosol in the aerosol generator 13 is sucked into the aerosol transport pipe 24 by the differential pressure, and the reducer is passed through this. 26. Further, the aerosol is accelerated through the reducer 26 and the injection nozzle 25, and is ejected from the injection nozzle 25 to the outside and sprayed onto the substrate 16. In this way, by causing the aerosol sprayed from the spray nozzle 25 to collide with the surface of the base material 16 at a high speed, the material particles colliding with the surface of the substrate 23 are crushed and deposited, whereby a ceramic thin film is formed.
[Injection nozzle 25]
Subsequently, the injection nozzle 25 will be described.

  The injection nozzle 25 includes an introduction opening 36 for introducing an aerosol, an injection opening 31 for injecting the aerosol, and an aerosol flow path 30 through which the aerosol passes from the introduction opening 36 to the injection opening 31. The injection opening 31 is an opening having a long direction and a short direction, and the introduction opening 36 is a substantially circular opening. The injection nozzle 25 has a feature in the shape of the aerosol flow path 30, and here, the aerosol flow path 30 will be described.

  2 is a front view of the aerosol flow path shape of the injection nozzle according to the embodiment of the present invention, FIG. 3 is a side view of the aerosol flow path shape of the injection nozzle, FIG. 4 is a plan view of the aerosol flow path shape of the injection nozzle, FIG. 5 is a sectional end view taken along the line VV in FIG. 3, and FIG. 6 is a perspective view of the aerosol flow path shape of the injection nozzle. 2-6, in order to understand the shape of the space called the aerosol flow path 30 provided in the inside of the injection nozzle 25, the external shape of the aerosol flow path 30 is conceptually shown by a solid line, and the external shape of the injection nozzle 25 is shown. Is indicated by a two-dot chain line. The outer shape of the aerosol flow path 30 is the inner wall (inner circumference) shape of the injection nozzle 25.

  As shown in FIGS. 2 to 6, the aerosol flow path 30 has an area constant portion 32 that is continuous with the injection opening 31 and has a substantially constant flow area, and a flow area that is continuous with the constant area portion 32 as the fluid advances. The area gradually decreasing portion 33 is provided. In the present embodiment, the area gradually decreasing portion 33 is continuous with the introduction opening 36. Here, a straight line connecting the center of the introduction opening 36 and the center of the injection opening 31 is referred to as a “flow path center line 60”, and a cross section of the aerosol flow path 30 substantially orthogonal to the flow path center line 60 is referred to as “flow path crossing”. The area of the cross section of the flow path is referred to as “flow area”.

  The constant area portion 32 of the aerosol flow path 30 has a flow path cross-sectional shape substantially the same as the injection opening 31 and extends substantially parallel to the flow path center line 60. The injection opening 31 is sandwiched between two straight lines having a symmetrical center at a point (center point) that is the center of the injection opening 31 and the two straight lines of a circle having the central point as a circle. It has a shape defined by two arcs (hereinafter referred to as “track shape (stadium shape)”). The injection opening 31 is, for example, a level in which the chord length W of the arc portion is 0.4 mm and the length D of the straight line portion is 10 mm (see FIG. 2), and is a slit-like opening. . The injection opening 31 has a track shape, but the chord length W of the arc portion is sufficiently smaller than the length D of the line segment of the straight line portion. It can be regarded as a substantially rectangular shape having a short direction.

  The injection opening 31 is not limited to a track shape or a substantially rectangular opening, and has a long direction and a short direction that are substantially orthogonal so that aerosol can be sprayed to a relatively wide area at a time. As long as it is an opening, it may be, for example, an opening having a long round shape or a chamfered rectangular shape. However, the size of the opening of the injection opening 31 and the ratio of the length direction to the length direction are not limited, but the length of the injection opening 31 is longer than the length (diameter) of the introduction opening 36 in the long direction. Is also small. For example, the injection nozzle 25 can be designed to a level in which the longitudinal dimension of the injection opening 31 is 10 mm and the diameter of the introduction opening 36 is 18 mm.

  As shown in FIG. 6, the area gradually decreasing portion 33 of the aerosol flow path 30 has a truncated cone 93 in which the longitudinal dimension of the injection opening 31 is the diameter of the upper circle 91 and the diameter of the introduction opening 36 is the diameter of the lower circle 92. Both shoulders 94, 94 have outer shapes cut out by two planes 97, 97 symmetrical with respect to the flow path center line 60, respectively. The flat surface 97 is substantially parallel to the longitudinal direction of the injection opening 31, includes a straight line 95 formed at the boundary between the constant area portion 32 and the gradually decreasing area 33, and overlaps with the axis of the truncated cone 93. It has a larger inclination with respect to the line 60 than the bus 96 of the truncated cone 93.

  As shown in FIG. 5, the cross section of the flow path of the area gradually decreasing portion 33 is substantially parallel to the longitudinal direction of the injection opening 31 and has two symmetrical points about a point G on the flow path center line. This is a shape (track shape) defined by two straight lines L1 and L2 and two arcs 81 and 81 sandwiched by two straight lines L1 and L2 of a circle C centered on the same point G. That is, the channel cross section of the area gradually decreasing portion 33 has a track shape defined by two arcs 81, 81 facing each other and two line segments 82, 82 substantially parallel to the longitudinal direction of the injection opening 31. It has a shape. Here, the surface formed by the continuous arc 81 of the channel cross section of the area gradually decreasing portion 33 is defined as “partial conical surface portion 35”, and the surface formed by the continuous line segment 82 is defined as “planar surface”. Part 34 ". Since the outer peripheral shape of the area gradually decreasing portion 33 is the inner peripheral (inner wall) shape of the injection nozzle 25, the flat portion 34 and the partial conical surface portion 35 together form the inner peripheral surface (inner wall surface) of the injection nozzle 25.

  In the area gradually decreasing portion 33, the distance between the two line segments 82, 82 forming the track shape of the cross section of the flow path maintains a substantially parallel relationship as it approaches the injection opening 31 along the flow path center line 60. However, the circle gradually narrows, and the circle to which the two arcs 81 and 81 belong is gradually reduced in diameter. Further, on the upstream side of the area gradually decreasing portion 33, the chord of the arc 81 is longer than the line segment 82 that forms the track shape of the cross section of the flow path, but on the downstream side of the area gradually decreasing portion 33, In comparison, the arc 81 has a short chord. As described above, in the area gradually decreasing portion 33, the aspect ratio (length) of the line segment 82 forming the track shape of the flow path cross section and the chord of the arc 81 as it approaches the injection opening 31 (area constant portion 32). Ratio) increases, and the flow passage area of the injection nozzle 25 gradually decreases.

  In the area gradually decreasing portion 33 having the shape of the channel cross section as described above, the substantially circular introduction opening 36 is substantially equal to the track-like (substantially rectangular) introduction opening 36 having a long direction and a short direction. The channel area is smoothly reduced to the constant area portion 32 having the channel cross-sectional shape, and the change in the shape of the channel cross-section is suppressed.

  The aerosol passing through the aerosol flow path 30 having the above configuration is accelerated while passing through the area gradually decreasing portion 33 where the flow path area gradually decreases, and further passes through the area constant portion 32 and is ejected from the injection opening 31.

  At this time, the flow path of the area gradually decreasing portion 33 is sandwiched between two plane portions 34 and 34 substantially parallel to the longitudinal direction of the injection opening 31 and the flow path area is gradually decreased, so that it passes through the area gradually decreasing portion 33. The aerosol is uniformly accelerated over a direction substantially parallel to the longitudinal direction of the injection opening 31. Further, in the area gradually decreasing portion 33, since the flow path area is smoothly reduced, separation of the flow of the aerosol flow hardly occurs, and the change in the shape of the cross section of the flow path is gradual, so that the solid particles in the aerosol are Disperses uniformly following the movement of the airflow.

  In addition, since the direction of the aerosol flow that passes through the constant area 32 of the aerosol flow path 30 is arranged to be substantially parallel to the direction in which the constant area 32 extends, that is, the direction in which the flow path center line 60 extends, The aerosol flow ejected from the ejection opening 31 has a constant direction and velocity in which the solid particles are scattered over the longitudinal direction of the ejection opening 31.

FIG. 7 is a diagram showing the relationship between the velocity or density of the solid particles ejected from the ejection nozzle according to the embodiment of the present invention and the longitudinal position of the ejection opening of the ejection nozzle. As shown in this figure, the aerosol flow injected through the injection nozzle 25 having the aerosol flow path 30 described above is such that the aerosol passes through the area gradually decreasing portion 33 and the area constant portion 32, so that the length of the injection opening 31 is increased. It has a uniform spatial distribution (density) and velocity distribution over the length direction.
[Reducer 26]
Here, the reducer 26 connected to the introduction opening 36 of the injection nozzle 25 will be described.

  The reducer 26 includes a substantially circular inlet opening 41 for introducing aerosol, an outlet opening 46 connected in close contact with the inlet opening 36 of the injection nozzle 25, and an aerosol flow path through which the aerosol passes from the inlet opening 41 to the outlet opening 46. 40. The reducer 26 is also characterized by the shape of the aerosol flow path 40. Here, the aerosol flow path 40 will be described.

  FIG. 8 is a side view of the aerosol flow path shape of the aerosol spray nozzle with a reducer. In FIG. 8, in order to understand the shape of the space of the aerosol flow path 30 provided inside the injection nozzle 25 and the aerosol flow path 40 provided inside the reducer 26, the aerosol flow path 30 and the aerosol flow path 40 The outer shape is conceptually indicated by a solid line, and the outer shapes of the injection nozzle 25 and the reducer 26 are indicated by a two-dot chain line. The outer shapes of the aerosol channel 30 and the aerosol channel 40 are the inner wall (inner circumference) shapes of the injection nozzle 25 and the reducer 26.

  As shown in FIG. 8, the aerosol flow path 40 of the reducer 26 includes an inlet portion 42 that is continuous with the inlet opening 41 connected to the aerosol carrier tube 24 and has a substantially constant flow path area, and the inlet portion 42 and the outlet opening 46. And an area gradually increasing portion 43 that increases in flow path area as the fluid advances. In the present embodiment, the area gradually increasing portion 43 and the outlet opening 46 are continuous. Here, a straight line connecting the center of the inlet opening 41 and the center of the outlet opening 46 is referred to as a “flow path center line 61”, and a cross section of the aerosol flow path 40 substantially orthogonal to the flow path center line 61 is referred to as “flow path crossing”. The area of the cross section of the flow path is referred to as “flow area”.

  If the tube diameter is too large, the aerosol transport tube 24 requires a large gas flow rate to transport the aerosol. Therefore, the flow passage cross section of the inlet 42 connected to the aerosol transport pipe 24 is formed in a circular shape having a diameter of about several millimeters in accordance with the diameter of the aerosol transport pipe 24.

  The area gradually increasing portion 43 is a portion that absorbs a difference in diameter between the aerosol transport pipe 24 and the introduction opening 36 of the injection nozzle 25. The outer shape of the area gradually increasing portion 43, that is, the inner peripheral shape of the area gradually increasing portion 43 of the reducer 26 is a truncated cone shape having the inlet portion 42 as an upper circle and the outlet opening 46 as a lower circle and having a gentle spread angle θ. Here, when the angle between the generating line of the truncated cone forming the outer shape of the area gradually increasing portion 43 and the flow path center line 61 overlapping the axis of the truncated cone is 1 / 2θ, the spread The angle θ is in the range of 2 to 12 °. As shown in FIG. 19, the inventors confirmed that the flow of fluid does not peel from the wall when the spread angle θ of the area gradually increasing portion 43 is 2 to 12 °. It is set to 12 °.

As described above, the area gradually increasing portion 43 has a flow passage area that smoothly expands and the shape of the cross section of the flow passage is gradual, so that the aerosol gradually passes through the reducer 26 to the introduction opening 36 of the injection nozzle 25. The solid particles can be made to sufficiently follow the gas flow to be uniformly dispersed.
[Embodiment 1]
Next, the injection nozzle 25 and the reducer 26 according to Embodiment 1 of the present invention will be described. The injection nozzle 25 has the aerosol flow path 30 described above, and the reducer 26 has the aerosol flow path 40 described above. Detailed descriptions of these aerosol flow paths 30 and 40 are omitted.

  9 is a front view of the injection nozzle according to the first embodiment of the present invention, FIG. 10 is a side view of the injection nozzle according to the first embodiment, FIG. 11 is a plan view of the injection nozzle according to the first embodiment, and FIG. FIG. 13 is a rear view of the injection nozzle according to Embodiment 1, FIG. 13 is a side view of the aerosol injection nozzle with reducer according to Embodiment 1, and FIG. 14 is a plan view of the aerosol injection nozzle with reducer according to Embodiment 1. .

  As shown in FIGS. 9 to 12, the injection nozzle 25 has two nozzle members 50 and 50 in which grooves forming the aerosol flow path 30 are formed, and the surfaces in which the grooves of the nozzle members 50 and 50 are formed are aligned with each other. It is comprised by fasteners 54, 54, etc., such as a bolt etc. to fasten. The grooves formed in the nozzle members 50 and 50 have substantially the same shape, and the outer shape of the aerosol flow path 30 is formed by the inner wall of the groove. An injection opening 31 for injecting aerosol appears at one end (front surface) of the injection nozzle 25 thus configured, and an introduction opening 36 for introducing aerosol appears at the other end (rear surface).

  As shown in FIGS. 13 to 14, the reducer 26 includes two reducer members 65, 65 in which grooves for forming the aerosol flow path 40 are formed, and surfaces on which the grooves of the reducer members 65, 65 are formed. It comprises fasteners 62, 62, etc., such as bolts that are fastened together. The grooves formed in the reducer members 65 and 65 have substantially the same shape, and the outer shape of the aerosol flow path 40 is formed by the inner wall of the groove. An outlet opening 46 through which the aerosol flows out appears at one end of the reducer 26 thus configured, and an inlet opening 41 through which the aerosol flows in appears at the other end.

Then, the reducer 26 and the injection nozzle 25 are joined so that the outlet opening 46 of the reducer 26 and the introduction opening 36 of the injection nozzle 25 are in close contact with each other, so that an aerosol injection nozzle 27 with a reducer is configured. In the aerosol jet nozzle 27 with a reducer, an aerosol flow path 40 of the reducer 26 and an aerosol flow path 30 of the spray nozzle 25 are continuously formed.
[Embodiment 2]
Next, the injection nozzle 25 and the reducer 26 according to Embodiment 2 of the present invention will be described. In the second embodiment, the injection nozzle 25 and the reducer 26 are integrally formed as an integrated aerosol injection nozzle 27 with a reducer.

  15 is a side view of an aerosol injection nozzle with a reducer according to Embodiment 2, FIG. 16 is a plan view of the aerosol injection nozzle with a reducer according to Embodiment 2, and FIG. 17 is a cross-sectional view taken along the arrow XVII-XVII in FIG. 18 is a cross-sectional view taken along arrow XVIII-XVIII in FIG.

  As shown in FIGS. 15 to 18, the aerosol jet nozzle 27 with a reducer includes two nozzle members 70 formed with grooves that form an aerosol flow path 30 that functions as a spray nozzle and an aerosol flow path 40 that functions as a reducer. 70 and a fastener (not shown) such as a bolt that fastens the surfaces of the nozzle members 70 and 70 on which the grooves are formed. The grooves formed in the nozzle members 70 and 70 have substantially the same shape, and the outer shapes of the aerosol flow path 30 functioning as an injection nozzle and the aerosol flow path 40 functioning as a reducer are continuous by the inner wall of the groove. Is shaped. An injection opening 31 for injecting aerosol appears at one end of the aerosol injection nozzle 27 with a reducer thus configured, and an inlet opening 41 connected to the aerosol carrier tube 24 appears at the other end.

  The introduction opening 36 of the aerosol flow path 30 functioning as an injection nozzle has two straight lines that are substantially parallel to the longitudinal direction of the injection opening 31 and have a center on a certain point on the flow path center line. Is a track-shaped opening defined by two arcs sandwiched between the two straight lines of a circle centered at. In other words, the aerosol is introduced into the injection opening 31 having a longitudinal direction and a short direction substantially orthogonal to each other, the flow path cross section of the aerosol flow path 30 including the constant area portion 32 and the gradually decreasing area 33, and the aerosol flow path 30. All of the introduction openings have a track shape.

  On the other hand, the outlet opening 46 of the aerosol flow path 40 functioning as a reducer has substantially the same track shape as the introduction opening 36. For this reason, the aerosol flow path 40 functioning as a reducer is also similar to the aerosol flow path 30 functioning as an injection nozzle, and has an outer shape in which a truncated cone is cut out by two planes substantially parallel to the longitudinal direction of the injection opening 31. As a result, the channel cross section of the area gradually increasing portion 43 also has a track shape.

  Thus, the introduction opening 36 of the aerosol flow path 30 functioning as an injection nozzle and the outlet opening 46 of the aerosol flow path 40 functioning as a reducer can be track-shaped instead of circular. According to this configuration, the aerosol spray nozzle 27 with a reducer can be made compact while maintaining its function.

  The present invention relates to a nozzle for injecting fine solid particles dispersed in a gas in a process of injecting fine solid particles dispersed in a gas, such as an air blasting method or an aerosol deposition method. It is useful as a nozzle with a reducer.

It is the figure which showed schematic structure of the film-forming apparatus using the aerosol deposition method. It is a front view of the aerosol flow path shape of the injection nozzle which concerns on embodiment of this invention. It is a side view of the aerosol flow path shape of an injection nozzle. It is a top view of the aerosol flow path shape of an injection nozzle. It is a VV arrow cross-sectional end view in FIG. It is a perspective view of the aerosol flow path shape of an injection nozzle. It is a figure which shows the relationship between the speed or density of the solid particle injected from the injection nozzle which concerns on embodiment of this invention, and the elongate direction position of the injection opening of an injection nozzle. It is a side view of the aerosol flow path shape of the aerosol injection nozzle with a reducer. It is a front view of the injection nozzle concerning Embodiment 1 of the present invention. 4 is a side view of the injection nozzle according to Embodiment 1. FIG. 2 is a plan view of an injection nozzle according to Embodiment 1. FIG. 4 is a rear view of the injection nozzle according to Embodiment 1. FIG. It is a side view of the aerosol injection nozzle with a reducer concerning Embodiment 1. 3 is a plan view of an aerosol injection nozzle with a reducer according to Embodiment 1. FIG. 6 is a side view of an aerosol injection nozzle with a reducer according to Embodiment 2. FIG. 6 is a plan view of an aerosol injection nozzle with a reducer according to Embodiment 2. FIG. It is XVII-XVII arrow sectional drawing in FIG. It is XVIII-XVIII arrow directional cross-sectional view in FIG. It is a figure which shows the relationship between the spreading angle of a reducer, and flow separation.

DESCRIPTION OF SYMBOLS 10 Film-forming apparatus 11 Gas cylinder 12 Carrier gas conveyance pipe 13 Aerosol generator 14 Chamber 15 Nozzle 16 Base material 17 Substrate holder 18 Exhaust pump 21 Sensor apparatus 22 Feedback control circuit 24 Aerosol conveyance pipe 25 Injection nozzle 26 Reducer 27 Aerosol injection nozzle with reducer 30 Aerosol flow path 31 Injection opening 32 Outlet part 33 Area gradually decreasing part 34 Plane part 35 Partial conical surface part 36 Introduction opening 40 Aerosol channel 41 Inlet opening 42 Inlet part 43 Area gradually increasing part 46 Outlet opening

Claims (9)

An introduction opening for introducing an aerosol, an injection opening for injecting aerosol having a longitudinal direction and a short direction substantially orthogonal to each other, and a flow path through which the aerosol passes from the introduction opening to the injection opening. An aerosol flow path having an area gradually decreasing portion where the flow path area is reduced,
The flow path cross section in the area gradually decreasing part of the aerosol flow path is
The image is defined by two straight lines that are substantially parallel to the longitudinal direction of the injection opening and centered on a point, and two arcs sandwiched between the two straight lines of a circle centered on the point. A shape formed (hereinafter referred to as “track shape”),
Aerosol spray nozzle. The area gradually decreasing portion of the aerosol flow path is defined by two planes and two partial conical surfaces,
The aerosol injection nozzle according to claim 1. The injection opening has a track shape, and the longitudinal length of the injection opening is smaller than the longitudinal length of the introduction opening.
The aerosol injection nozzle according to claim 1 or 2. As the area gradually decreases, the distance between the two straight lines gradually decreases and the circle to which the two arcs belong is gradually reduced in diameter as it approaches the injection opening along the center line direction of the aerosol flow path. ing,
The aerosol injection nozzle according to claim 3. Equipped to inject aerosol into a device that realizes the aerosol deposition method,
The aerosol injection nozzle as described in any one of Claims 1-4. The aerosol injection nozzle according to any one of claims 1 to 5,
A reducer connected to the introduction opening of the aerosol injection nozzle,
The reducer is a substantially circular inlet opening for introducing aerosol, an outlet opening connected in close contact with the inlet opening of the aerosol injection nozzle, and a flow path through which the aerosol passes from the inlet opening to the outlet opening. An aerosol flow path provided with an area gradually increasing portion in which the flow path area increases as the fluid advances,
Aerosol spray nozzle with reducer. The introduction cross-section of the aerosol injection nozzle, the outlet opening of the reducer, and the channel cross section in the area gradually decreasing portion of the aerosol flow channel of the reducer are all track-shaped.
The aerosol injection nozzle with a reducer according to claim 6. The introduction opening of the aerosol injection nozzle and the outlet opening of the reducer are both circular, and the aerosol flow path of the reducer has a truncated cone shape with an inclination of a generatrix with respect to an axis of 6 ° or less.
The aerosol injection nozzle with a reducer according to claim 6. The aerosol spray nozzle and the reducer are formed integrally;
The aerosol injection nozzle with a reducer according to any one of claims 6 to 8.

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