JP2010214753A - Method of manufacturing liquid jetting head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid jetting head in which deformation of a nozzle formation substrate is suppressed and reduction in the accuracy of droplet landing positions is suppressed. <P>SOLUTION: A gap agent 80 is disposed a plurality of times along a nozzle array 15. Therefore, the gap agent 80 can be disposed at many positions with a narrow distance D therebetween in the direction of the nozzle array 15 (Y axis direction). Therefore, deformation of the nozzle formation substrate 17 along the nozzle array 15 can be suppressed while preventing an adhesive sheet 70 from flowing into a nozzle opening due to pressurization and heating. The method of manufacturing the liquid jetting head in which the accuracy of the droplet landing positions is good and a reduction in drawing quality is small can be obtained. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method of manufacturing a liquid ejecting head that ejects liquid as droplets from nozzle openings.

A liquid ejecting head that ejects liquid as droplets from a nozzle opening is applied to, for example, a liquid ejecting apparatus used for manufacturing an image recording apparatus such as a printer and a color filter of a liquid crystal display device.
As such a liquid ejecting head, there is a liquid ejecting head in which a pressure fluctuation is generated in a liquid in a pressure chamber, a liquid droplet is ejected from a nozzle opening, and the liquid droplet reaches a target such as a recording medium. This liquid ejecting head includes a pressure chamber and a flow path unit including a nozzle opening and a common liquid chamber. The flow path unit includes a flow path forming substrate and a nozzle forming substrate in which nozzle openings are formed.
The flow path forming substrate as the substrate and the nozzle plate as the nozzle forming substrate are made of a sheet-like adhesive material in which escape holes are formed in accordance with the positions of the nozzle holes as the nozzle openings. It is heated and heated while being interposed and bonded. Here, the deformation-regulating spacer as the gap agent or the deformation-regulating paste agent regulates the deformation of the sheet-like adhesive in the thickness direction and suppresses the deformation of the escape hole, so that the sheet-like adhesive opens the nozzle. There is known a manufacturing method that prevents entry (for example, see Patent Document 1).

Japanese Patent Laid-Open No. 5-209154 (page 3, FIG. 6 and FIG. 7)

FIG. 10 shows an ink chamber forming substrate 34 as a flow path forming substrate, a gap agent 80, a nozzle forming substrate 17, an adhesive sheet 70 that is a sheet-like adhesive, a nozzle opening 16, a droplet 1, and a recording medium P. A schematic cross-sectional view is shown.
In FIG. 10, when bonding is performed by applying pressure through the gap agent 80 and bonding is performed, the nozzle forming substrate 17 is deformed due to the presence of the gap agent 80, and a deviation occurs in the opening direction of the nozzle opening 16. Does not reach the position to be reached, and the arrival position accuracy decreases. Therefore, the drawing quality is degraded.

  The present invention has been made to solve the above-described problems, and can be realized as the following forms or application examples.

[Application Example 1]
A pressure chamber to which a liquid is applied; a flow path forming substrate communicating with the pressure chamber; a nozzle forming substrate including a nozzle row in which nozzle openings for ejecting the liquid are arranged; the flow path forming substrate and the nozzle A liquid jet head manufacturing method comprising: an adhesive sheet that bonds a forming substrate; and a gap agent that is disposed between the flow path forming substrate and the nozzle forming substrate. A step of arranging the gap agent on at least one of the flow path forming substrate or the nozzle forming substrate a plurality of times, and pressurizing and heating the flow path forming substrate and the nozzle forming substrate through the adhesive sheet And a step of adhering to the liquid jet head.

  According to this application example, since the gap agent is arranged a plurality of times along the nozzle row, many gap agents are arranged along the nozzle row with a narrow interval. Therefore, while preventing the adhesive sheet from flowing into the nozzle opening due to pressurization and heating, the deformation of the nozzle forming substrate along the nozzle row is suppressed, the liquid arrival position accuracy is good, and the drawing quality is hardly deteriorated. A method for manufacturing an ejection head is obtained.

[Application Example 2]
A method of manufacturing a liquid jet head, wherein the gap agent is arranged until the gap agents come into contact with each other.
In this application example, the gap agent is linearly arranged along the nozzle row, so that the deformation of the nozzle forming substrate can be further suppressed, the arrival position accuracy of the droplet is better, and the drawing quality is reduced. Fewer methods of manufacturing a liquid jet head can be obtained.

[Application Example 3]
The method of manufacturing a liquid jet head, wherein the gap agent has fine particles dispersed in a fluid dispersion medium.
In this application example, since the gap agent containing fine particles has fluidity, it is possible to easily control the application position and application amount of the gap agent, and to obtain a method of manufacturing a liquid ejecting head in which the gap agent can be easily arranged. .

1 is a diagram illustrating a schematic configuration of a printer according to an embodiment. FIG. 3 is a schematic exploded perspective view of the liquid ejecting head as viewed obliquely from above. FIG. 2 is a schematic partial cross-sectional view showing a configuration of a head unit. The partial top view which looked at the adhesive agent sheet before adhesion | attachment from the ink chamber formation board | substrate side. The schematic perspective view of a gap agent application device. Sectional drawing showing the application | coating method of a gap agent. The top view showing the application position of a gap agent. The figure showing the flatness of the nozzle formation board after manufacture of a liquid jet head at the time of applying without moving a gap agent application device. FIG. 10 is a diagram illustrating the flatness of the nozzle forming substrate after manufacturing the liquid jet head when the gap agent coating apparatus is moved and coating is performed again. FIG. 10 is a schematic partial cross-sectional view of a conventional liquid jet head.

Hereinafter, embodiments will be described in detail with reference to the drawings.
In the drawings, in order to make the explanation easy to understand, some of the components are omitted or the respective components are exaggerated.

In the following description, a case where the liquid ejecting head manufactured by the manufacturing method of the embodiment is mounted on the printer 100 as the image recording apparatus will be described as an example.
FIG. 1 is a diagram illustrating a schematic configuration of the printer 100. In FIG. 1, the X direction indicates the main scanning direction in which the carriage 104 moves, and the Y direction indicates the sub scanning direction in which the recording medium P is transferred. The Z direction is a direction orthogonal to the X direction and the Y direction.

  As shown in FIG. 1, the printer 100 includes a liquid ejecting head 10, a carriage 104, a carriage moving mechanism 105, a platen roller 106, and an ink cartridge 107.

The liquid ejecting head 10 is attached to the recording medium P side (the lower surface in the Z direction in FIG. 1) of the carriage 104 and ejects ink as droplets onto the surface of the recording medium P. The carriage moving mechanism 105 includes a timing belt 108, a driving pulley 111, a driven pulley 112, and a motor 109. The timing belt 108 is engaged with the carriage 104 and is stretched between the driving pulley 111 and the driven pulley 112. The drive pulley 111 is connected to the output shaft of the motor 109.
Therefore, when the motor 109 is operated, the carriage 104 is guided by the guide rod 110 installed on the printer 100 and reciprocates in the X direction which is the main scanning direction.

  The platen roller 106 receives a driving force from the motor 103 and moves the recording medium P in the Y direction, which is the sub-scanning direction. The ink cartridge 107 stores ink and is detachably attached to the carriage 104. The ink cartridge 107 supplies ink to the liquid ejecting head 10.

  The printer 100 configured in this manner reciprocates the carriage 104 in the X direction by the carriage moving mechanism 105 and moves the recording medium P in the Y direction by the platen roller 106 while attaching the liquid ejecting head attached to the carriage 104. By ejecting ink from 10 as droplets, an image or the like can be recorded on a recording medium P such as recording paper.

The liquid jet head 10 will be described with reference to FIG.
FIG. 2 is a schematic exploded perspective view of the liquid jet head 10 as viewed obliquely from above. The X direction, Y direction, and Z direction shown in FIG. 2 are the same as the X direction, Y direction, and Z direction shown in FIG.

  As shown in FIG. 2, the liquid ejecting head 10 includes a supply needle unit 12, a head case 18, a head unit 26, and a head cover 19.

The supply needle unit 12 is provided with a plurality of ink supply needles 11 for introducing the ink in the ink cartridge 107 shown in FIG. 1 into the liquid ejecting head 10.
The head case 18 has a base portion 27 to which the supply needle unit 12 and the wiring board 20 are attached, and a hollow box-like case that extends downward from the bottom portion of the base portion 27 and has the head unit 26 attached to the opening surface. Part 28.
As a material for the head case 18 and the supply needle unit 12, for example, an epoxy-based synthetic resin or the like is preferably used.

  The base portion 27 of the head case 18 is partitioned with a substrate disposing portion 23 where the wiring substrate 20 is disposed. The wiring board 20 is provided with a connection terminal (not shown) to which electronic components for various drive signals are mounted and a terminal on one end side of the flexible cable 24 connected to the actuator unit 13 is connected. The wiring board 20 includes a connector 25 to which a control cable such as an FFC (flexible flat cable) from a control device or the like is electrically connected.

The head unit 26 includes an actuator unit 13 and a flow path unit 14. Details of the head unit 26 will be described later.
The head cover 19 is attached to the attachment portion on the distal end side of the head case 18 in a state where the outer peripheral edge of the surface of the nozzle forming substrate 17 of the liquid jet head 10 is covered and the nozzle opening 16 is exposed.

The head unit 26 will be described with reference to FIGS.
FIG. 3 is a schematic partial cross-sectional view showing the configuration of the head unit 26. The X direction and Z direction shown in FIG. 3 are the same as the X direction and Z direction shown in FIGS. 1 and 2.
As shown in FIG. 3, the head unit 26 is configured by stacking the actuator unit 13 and the flow path unit 14.

The actuator unit 13 includes at least a pressure chamber forming substrate 50, a diaphragm 52, a lid member 54, and a piezoelectric vibrator 56 as a pressure element.
In addition, each said board | substrate may be comprised from the some board | substrate. For example, a ceramic plate made of alumina or zirconia (ZrO ₂ ) having a thickness of about 150 μm is preferably used as the pressure chamber forming substrate 50, and a through hole serving as the pressure chamber 60 is opened. The pressure chamber 60 has a one-to-one correspondence with the nozzle openings 16 that eject droplets.

As the diaphragm 52, for example, an alumina or zirconia thin plate having a thickness of about 10 μm is preferably used. A driving electrode (not shown) is formed on one surface, and a piezoelectric vibrator 56 made of PZT or the like is fixed thereon. Has been.
The lid member 54 is provided with, for example, a supply plate 38 a serving as a supply side communication port 38 described later and a nozzle through hole 36 a serving as a part of the nozzle communication port 36 on a ceramic plate such as alumina or zirconia.

  Both sides of the pressure chamber forming substrate 50 are sealed by the vibration plate 52 and the lid member 54 to form the pressure chamber 60. At this time, the piezoelectric vibrator 56 fixed to the vibration plate 52 faces the pressure chamber 60 via the vibration plate 52. In addition, one opening of the supply through hole 38 a provided on the lid member 54 serving as the supply side communication port 38 and the nozzle communication hole 36 a serving as a part of the nozzle communication port 36 communicates with both ends of the pressure chamber 60 in the X direction. The other opening communicates with the flow path unit 14 side.

  Since the pressure chamber forming substrate 50, the vibration plate 52, and the lid member 54 are made of a ceramic plate such as alumina or zirconia as described above, they can be integrally formed by firing. For example, the green sheet (unfired sheet material) is processed by cutting or punching to form necessary through holes and the like, and each sheet shape of the pressure chamber forming substrate 50, the diaphragm 52, and the lid member 54 is formed. A precursor is formed.

  Then, by laminating and firing the sheet-like precursors, the sheet-like precursors are integrated into a single ceramic sheet. In this case, since each sheet-like precursor is integrally fired, no special bonding treatment is required. Moreover, high sealing performance can be obtained at the joint surface of each sheet-like precursor.

  Note that a plurality of pressure chambers 60 each including the piezoelectric vibrator 56 are formed in one ceramic sheet, that is, the actuator unit 13. Further, a terminal at one end of a flexible cable 24 such as a TCP (tape carrier package) shown in FIG. 2 is electrically connected to a terminal portion of the piezoelectric vibrator 56.

  The piezoelectric vibrator 56 in the actuator unit 13 is a so-called flexural vibration mode piezoelectric element. Therefore, when the piezoelectric vibrator 56 is driven to bend and deform, the pressure chamber 60 contracts and expands due to the bending vibration of the piezoelectric vibrator 56. However, the piezoelectric vibrator 56 is not limited to this bending vibration mode.

Below, the flow path unit 14 is demonstrated.
As shown in FIGS. 2 and 3, the flow path unit 14 includes a nozzle forming substrate 17, an ink chamber forming substrate 34 as a flow path forming substrate, and a supply port forming substrate 32.

As shown in FIG. 2, the nozzle formation substrate 17 has a plurality of nozzle openings 16, and the plurality of nozzle openings 16 are arranged in a row along the Y direction to form a plurality of nozzle rows 15. ing. In this embodiment, four nozzle rows 15a, 15b, 15c, and 15d are formed. The nozzle rows 15a, 15b, 15c, and 15d are divided into two, and the nozzle rows 15a and 15b constitute a plate nozzle row group 21a, and the nozzle rows 15c and 15d constitute a plate nozzle row group 21b.
In addition, as a constituent material of the nozzle formation board | substrate 17, a thin plate material made from stainless steel is used suitably, for example, and it produces by press work etc.

  The ink chamber forming substrate 34 has a plurality of ink chambers 33 serving as a plurality of liquid chambers to which ink introduced from the ink cartridge 107 side is supplied and a plurality of nozzles serving as a plurality of third communication holes that are part of the nozzle communication ports 36. A through hole 36c is formed. As a constituent material of the ink chamber forming substrate 34, for example, a thin plate material made of stainless steel is preferably used, and is formed by pressing or the like.

The supply port forming substrate 32 becomes a part of the nozzle communication port 36, a plurality of nozzle communication holes 36b serving as second communication holes for guiding ink from the pressure chamber 60 to the nozzle openings 16, and a supply-side communication port functioning as an orifice. A supply passage hole 38 b serving as a plurality of first communication holes that become a part of 38 and guide ink from the ink chamber 33 to the pressure chamber 60 and a compliance portion 31 that alleviates pressure fluctuations in the ink chamber 33 are formed.
The compliance unit 31 is not provided on the supply port forming substrate 32 but may be provided on the substrate by inserting another substrate between the ink chamber forming substrate 34 and the nozzle forming substrate 17 described later. .

  As a constituent material of the supply port forming substrate 32, for example, a thin plate material made of stainless steel is preferably used. For example, two thin metal plates 62 and 63 such as non-rust steel such as stainless steel are laminated and bonded via an adhesive film (not shown).

  Both the thin metal plate 62 and the thin metal plate 63 are made of stainless steel. The nozzle through hole 36b and the supply through hole 38b may be formed by etching or pressing. The supply port forming substrate 32 serves as a joint surface with the actuator unit 13.

The flow path unit 14 has a nozzle forming substrate 17 on one surface (lower side in the Z direction in FIG. 3) of the ink chamber forming substrate 34, a supply port forming substrate 32 on the other surface (upper side), and an adhesive sheet. The supply port forming substrate 32, the ink chamber forming substrate 34, and the nozzle forming substrate 17 are joined and integrally manufactured.
In FIG. 3, only the adhesive sheet 70 between the ink chamber forming substrate 34 and the nozzle forming substrate 17 is shown.

In FIG. 3, openings 16 a and 33 a are formed in the adhesive sheet 70 according to the nozzle openings 16, the ink chambers 33, and the like. An opening 71 is also formed between the nozzle openings 16 in the X-axis direction, and a gap agent 80 is disposed near the nozzle opening 16 of the opening 71.
As the gap agent 80, a paste in which fine particles are dispersed can be used. The fine particles may be dispersed in the adhesive. Further, the diameter of the fine particles is not limited, but in the embodiment, those having a diameter of several μm to several tens of μm are used. As the fine particles, an epoxy resin, a urethane resin, a polyimide resin, or the like can be used.

Hereinafter, the adhesive sheet 70 and the gap agent 80 that join the ink chamber forming substrate 34 and the nozzle forming substrate 17 will be described in detail with reference to FIGS. 3 and 4.
FIG. 4 is a partial plan view of the adhesive sheet 70 before bonding as viewed from the ink chamber forming substrate 34 side. In the drawing, the nozzle forming substrate 17 is shown together, and only a portion corresponding to one of the plate nozzle row group 21a or the plate nozzle row group 21b in FIG. 2 is shown.
The X direction and Y direction shown in FIG. 4 are the same as the X direction and Y direction shown in FIGS.

3 and 4, an adhesive sheet 70 includes two adhesive portions 72 in which a plurality of openings 16a are formed in a row, two adhesive portions 73 in which openings 33a are formed, and a connecting portion. A tie bar 74 and an edge 75 are provided.
Since FIG. 4 shows only approximately half of the adhesive sheet 70, the adhesive sheet 70 actually includes four adhesive portions 72 and four adhesive portions 73.

The opening 16 a is formed with a diameter slightly larger than the diameter of the nozzle opening 16. This is because when the ink chamber forming substrate 34 and the nozzle forming substrate 17 are pressure-bonded, the nozzle opening 16 is not blocked even if the crushed adhesive flows toward the nozzle opening 16 side.
The opening 33 a is also formed slightly larger than the ink chamber 33.

The adhesive portions 72 and 73 are connected to the edge portion 75 by tie bars 74. In addition, the tie bar 74 connects one adhesive part 72 and the other adhesive part 72 to form an opening 71 surrounded by the tie bar 74 and the adhesive part 72.
By providing the tie bar 74 and the edge portion 75, the adhesive sheet 70 is integrated, and the work efficiency of the operation of attaching the adhesive sheet 70 to the nozzle forming substrate 17 is improved. .

The adhesive sheet 70 is positioned and pasted so that the centers of the plurality of openings 16 a of the adhesive sheet 70 are aligned with the centers of the nozzle openings 16.
As a constituent material of the adhesive sheet 70, for example, a film adhesive having a thickness of about 25 μm is preferably used.

On the nozzle forming substrate 17 corresponding to the opening 71, the gap agent 80 is arranged in the vicinity of the nozzle opening 16 along the nozzle rows 15a and 15b (15c and 15d).
In FIG. 4, the distance of the gap agent 80 between the rows is B, the distance between the center of the nozzle opening 16 and the center of the gap agent 80 is C, and the distance between the gap agents 80 is D.
For example, B is preferably about 1.45 mm and C is about 0.82 mm, and is preferably as short as possible, for example, about 0.52 is preferable, and D is preferably as narrow as possible, and may be continuous.

In the method of manufacturing the liquid jet head 10, the step of arranging the gap agent 80, the ink chamber forming substrate 34 as the flow path forming substrate, the supply port forming substrate 32, and the nozzle forming substrate 17 are pressed through the adhesive sheet 70. Heating and bonding.
Hereinafter, a method for manufacturing the liquid jet head 10 will be described focusing on a method for arranging the gap agent 80. Other manufacturing methods are described in the description of the above components.
In FIG. 5, the schematic perspective view of the gap agent coating device 200 used for arrangement | positioning of the gap agent 80 was shown. The X direction, Y direction, and Z direction shown in FIG. 5 are the same directions as the X direction, Y direction, and Z direction shown in FIGS. 1 and 2.

The gap agent 80 is arranged on the nozzle array shown in FIG. 4 on at least one of the ink chamber forming substrate 34 as the flow path forming substrate and the supply port forming substrate 32 or the nozzle forming substrate 17 using the gap agent applying device 200. The gap agent 80 is disposed along the line 15.
In FIG. 5, the gap agent coating apparatus 200 includes a protrusion 210. A gap agent 80 (not shown) is pushed out from the tip 211 of the protrusion 210 as necessary.
The protrusion 210 of the gap agent application device 200 is disposed toward the substrate on which the gap agent 80 is applied.

Sectional drawing showing the process of arrange | positioning the gap agent 80 was shown to Fig.6 (a)-(f). In FIG. 6, a part of the gap agent 80 arranged side by side near the nozzle opening 16 shown in FIG. 4 is shown. The Y-axis and Z-axis shown in FIG. 6 are the same directions as the Y-direction and Z-direction shown in FIGS.
In FIG. 6A, the protrusion 210 of the gap agent applying device 200 is disposed toward the nozzle forming substrate 17 on which the adhesive sheet 70 is disposed. The protrusions 210 are arranged between the tie bars 74 of the adhesive sheet 70 along the nozzle row 15 shown in FIG. Here, the distance between the adjacent protrusions 210 is D1.
Next, the gap agent coating device 200 is moved in the Z-axis direction toward the nozzle forming substrate 17.

  In FIG. 6B, the protrusion 210 is brought into contact with the nozzle forming substrate 17 or is brought close to the nozzle forming substrate 17 to the barely contacting position. Specifically, the gap agent 80 pushed out from the protrusion 210 is brought close to contact with the nozzle forming substrate 17.

In FIG. 6C, when the gap agent 80 is pushed out from the projection 210 and from the tank of the gap agent 80 (not shown) through the hole 212 and the gap agent 80 comes into contact with the nozzle forming substrate 17, the gap agent application device 200 is moved to the nozzle. Move in the Z-axis direction away from the formation substrate 17.
In FIG. 7, the top view showing the application position of the gap agent 80 in the state of FIG.6 (c) was shown. The gap agent 80 is arranged along the nozzle row 15 at an interval of D1.

  In FIG. 6D, the gap agent coating device 200 is shifted in the Y-axis direction. The shifting direction may be either positive or negative as long as it is the Y axis. The shifting distance may be such that the protrusion 210 does not overlap the gap agent 80 once applied. In the embodiment, it is moved by a distance of D1 / 2.

  In FIG. 6E, the protrusion 210 is brought into contact with the nozzle forming substrate 17 again, or is brought close to the nozzle forming substrate 17 to the barely touching position.

In FIG. 6 (f), the gap agent 80 is again pushed out from the protrusion 210 through the hole 212, and when the gap agent 80 comes into contact with the nozzle forming substrate 17, the gap agent applying device 200 is separated from the nozzle forming substrate 17. Move in the direction.
Here, the gap agent 80 is not pushed out from the protrusion 210 that does not need to be applied. For example, the gap agent 80 is not pushed out from the protrusion 210 that applies the gap agent 80 at a position not along the nozzle row 15.
The above arrangement operation is repeated to narrow the gap D of the gap agent 80 along the nozzle row 15. In the embodiment, it was repeated twice so that the interval D becomes D1 / 2 (see the plan view shown in FIG. 4).
Here, the disposition operation may be repeated three times or more, and the gap D of the gap agent 80 may be narrowed until the adjacent gap agent 80 comes into contact.

In the step of bonding by pressurization and heating, after the step of disposing the gap agent 80, the ink chamber forming substrate 34, the supply port forming substrate 32 and the nozzle forming substrate 17 as the flow path forming substrate are interposed via the adhesive sheet 70. Press and heat to bond.
The pressurizing pressure and heating temperature vary depending on the adhesive sheet 70, but for example, the pressurizing pressure is 3 kg / cm ² and the heating temperature is 120 ° C. The pressurizing pressure and heating temperature may be applied stepwise instead of at once.
The liquid ejecting head 10 is obtained by the manufacturing method described above.

FIG. 8 is a diagram illustrating the flatness of the nozzle forming substrate 17 after the liquid ejecting head 10 is manufactured when the gap agent applying apparatus 200 is not moved in the Y-axis direction and the placement operation is performed only once. . The horizontal axis indicates the position of the gap agent 80, and the vertical axis indicates the deviation from the center value.
In FIG. 8, it can be seen that the nozzle forming substrate 17 is finely wavy according to the position of the gap agent 80. Furthermore, the deviation from the center value is large.

FIG. 9 is a diagram illustrating the flatness of the nozzle forming substrate 17 after the liquid ejecting head 10 is manufactured when the gap agent coating apparatus 200 is moved in the Y-axis direction and the placement operation is repeated twice.
In FIG. 9, it can be seen that the waviness of the nozzle forming substrate 17 is increased, and the influence of the gap agent 80 on the flatness is reduced. Also, the deviation from the center value is reduced.

The ejection operation of the liquid ejection head 10 having the above-described configuration will be described with reference to FIG.
Ink is supplied from the ink cartridge 107 to the ink chamber 33 of the ink chamber forming substrate 34 through an ink supply port (not shown). The ink supplied from the ink cartridge 107 is also supplied to the pressure chamber 60 and the nozzle communication port 36 of the actuator unit 13 via the supply side communication port 38. As a result, the ink is filled up to the ink chamber 33, the supply side communication port 38, the pressure chamber 60, the nozzle communication port 36, and the nozzle opening 16.

  When the piezoelectric vibrator 56 of the actuator unit 13 is driven to bend and deform, the pressure chamber 60 contracts due to the bending vibration of the piezoelectric vibrator 56. When the pressure chamber 60 contracts, the ink stored in the pressure chamber 60 is pressurized. At this time, since the supply side communication port 38 functions as an orifice, the ink is ejected as droplets from the nozzle opening 16 which is a part of the nozzle communication port 36. Further, when the bending deformation of the piezoelectric vibrator 56 is released, the pressure chamber 60 expands. When the pressure chamber 60 expands, ink is sucked from the ink chamber 33 through the supply side communication port 38, and the pressure chamber 60 is filled with ink. Ink is supplied from the ink cartridge 107 to the ink chamber 33 via an ink supply port (not shown).

  As described above, when the piezoelectric vibrator 56 of the actuator unit 13 is driven to bend and deform, the pressure chamber 60 repeatedly contracts and expands due to the bending vibration of the piezoelectric vibrator 56 and ejects ink from the nozzle openings 16 as droplets. be able to.

The effect of the said embodiment is as follows.
(1) Since the gap agent 80 is arranged a plurality of times along the nozzle row 15, the gap agent 80 can be arranged in a large amount by narrowing the interval D in the nozzle row 15 direction. Therefore, the deformation of the nozzle forming substrate 17 along the nozzle row 15 can be suppressed while preventing the adhesive sheet 70 from flowing into the nozzle opening 16 due to pressurization and heating, and the drawing position can be accurately drawn. A method of manufacturing the liquid jet head 10 with little deterioration in quality can be obtained.

  (2) Since the gap agent 80 can be arranged linearly along the nozzle row 15, the deformation of the nozzle forming substrate 17 can be further suppressed, the droplet arrival position accuracy is better, and the drawing quality is improved. A method for manufacturing the liquid jet head 10 with less reduction can be obtained.

  (3) Since the gap agent 80 containing fine particles has fluidity, it is possible to easily control the application position and application amount of the gap agent 80, and to easily arrange the gap agent 80. Is obtained.

Various modifications other than the above-described embodiment can be made.
Any method may be used to apply pressure to the pressure chamber 60. For example, it may be due to heat. Specifically, a heating element may be arranged in the pressure chamber 60.
Further, the pressure generating element is not limited to the piezoelectric vibrator 56 of these embodiments. For example, not only bending vibration but also stretching vibration and sliding vibration may be used.

The intervals D and D1 for hitting the gap agent 80 are not limited to the embodiment. For example, D may not be equally spaced.
Further, the gap agent 80 may be applied by being extruded to one place through the hole 212. For example, the extrusion may be performed in several times.

  The number of the protrusions 210 of the gap agent coating apparatus 200 is not limited to that shown in the embodiment. For example, the number of protrusions 210 may be one. Further, the arrangement of the protrusions 210 is not limited to that shown in the embodiment.

  DESCRIPTION OF SYMBOLS 10 ... Liquid ejecting head, 14 ... Channel unit, 15 ... Nozzle row, 16 ... Nozzle opening, 17 ... Nozzle formation substrate, 32 ... Supply port formation substrate as a channel formation substrate, 34 ... Ink as a channel formation substrate Chamber forming substrate, 60 ... pressure chamber, 70 ... adhesive sheet, 80 ... gap agent.

Claims (3)

A pressure chamber in which the liquid is pressurized,
A flow path forming substrate communicating with the pressure chamber;
A nozzle forming substrate including a nozzle row in which nozzle openings for ejecting the liquid are arranged;
An adhesive sheet for bonding the flow path forming substrate and the nozzle forming substrate;
A liquid jet head manufacturing method comprising a gap agent disposed between the flow path forming substrate and the nozzle forming substrate,
Arranging the gap agent a plurality of times along at least one of the flow path forming substrate or the nozzle forming substrate along the nozzle row;
And a step of pressing and heating the flow path forming substrate and the nozzle forming substrate through the adhesive sheet to bond them. The method of manufacturing a liquid jet head according to claim 1,
The method of manufacturing a liquid jet head, wherein the gap agent is arranged until the gap agents contact each other. In the manufacturing method of the liquid jet head according to claim 1 or 2,
The gap agent is characterized in that fine particles are dispersed in a fluid dispersion medium.

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