JP5218730B2 - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid from nozzle openings, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as liquid.

  As an ink jet recording head that is a liquid ejecting head, for example, a pressure generation chamber communicating with a nozzle opening and a longitudinal direction one end side of the pressure generation chamber are provided across the short direction of the pressure generation chamber. A flow path forming substrate formed with a communication portion communicating with the chamber, a piezoelectric element formed on one surface side of the flow path forming substrate, and an adhesive agent on the surface of the flow path forming substrate on the piezoelectric element side Some have a reservoir forming substrate that has a reservoir portion that is joined to form a part of the reservoir together with the communication portion (see, for example, Patent Document 1).

  A compliance substrate having a flexible portion is bonded to a surface of the reservoir forming substrate opposite to the flow path forming substrate, and a flexible portion is bonded to a region opposite to the reservoir portion. The pressure fluctuation when the ink is introduced and the pressure fluctuation when the ink is ejected are absorbed.

  In addition, there is one in which a reservoir is provided in a region facing the piezoelectric element holding portion of the reservoir forming substrate joined to the flow path forming substrate (see, for example, Patent Documents 2 and 3).

  According to this, the ink jet recording head can be reduced in size in the longitudinal direction of the pressure generating chamber.

Japanese Patent Laying-Open No. 2005-219243 (FIGS. 3-5, pages 6-8) JP 2001-105611 A (FIGS. 6 to 8, pages 8 to 9) JP 2004-106316 A (FIG. 11, page 6)

  However, in the configuration of Patent Document 1, in order to improve the ink supply capability and the pressure fluctuation capability to the reservoir, there is a problem that the width of the reservoir portion must be increased and the head becomes large.

  Further, the configurations of Patent Documents 2 and 3 have a problem that pressure fluctuation cannot be absorbed and excellent ink ejection characteristics cannot be obtained. Furthermore, when a drive circuit for driving a piezoelectric element is mounted on a reservoir forming substrate, there is a problem that a compliance substrate that generates compliance cannot be arranged.

  In addition, when ink is introduced into the reservoir through the ink inlet that communicates with the reservoir, bubbles stay on both sides of the ink inlet, particularly at the corner of the reservoir away from the ink inlet. As a result, the supply characteristics deteriorate due to the growth of the volume of the reservoir section, and bubbles cannot be discharged at a desired timing, causing problems such as bubbles being discharged together with ink. There is.

  Such a problem exists not only in an ink jet recording head that ejects ink but also in a liquid ejecting head that ejects liquid other than ink.

  In view of such circumstances, it is an object of the present invention to provide a liquid ejecting head and a liquid ejecting apparatus that can prevent bubbles from staying and improve liquid supply characteristics and liquid ejecting characteristics.

An aspect of the present invention that solves the above-described problems includes a flow path forming substrate in which pressure generation chambers communicating with nozzle openings for ejecting liquid are arranged in parallel in the width direction, and the pressure on one surface side of the flow path forming substrate. A pressure generating element provided in a region opposite to the generation chamber and a holding portion for arranging the pressure generating element are provided on one surface side while being bonded to a surface of the flow path forming substrate on the pressure generating element side. And a reservoir portion serving as a common liquid chamber of the plurality of pressure generating chambers is provided across the direction in which the pressure generating chambers are arranged side by side. A first reservoir portion that is provided through the protective substrate in the thickness direction, and a surface that is provided in communication with the first reservoir portion and is opposite to the flow path forming substrate. open to region side which faces the holding portion, the protective substrate transmural And a second reservoir unit, not a compliance substrate which flexible portion is provided in a region facing the reservoir portion on the opposite side is provided with the flow path forming substrate of the protective substrate In addition, an introduction port for introducing a liquid into the reservoir portion is provided in a region of the compliance substrate facing the second reservoir portion, and the second reservoir portion is a region facing the introduction port. A deep groove portion provided in the longitudinal direction of the pressure generation chamber until reaching the first reservoir portion, and provided on both sides of the deep groove portion in the juxtaposition direction of the pressure generation chamber and deeper than the deep groove portion. The liquid ejecting head includes a shallow groove portion having a shallow depth.
In this aspect, by providing the second reservoir portion as the reservoir portion, the capacity of the liquid chamber can be increased, the head can be reduced in size, and a flexible portion having a large area can be provided. In addition, it is possible to improve the liquid supply characteristics and the liquid ejection characteristics by reliably absorbing the pressure fluctuation. Further, by providing the deep groove portion as the second reservoir portion, it is possible to prevent the liquid supply characteristic from deteriorating by securing the flow rate of the liquid, and to provide the second reservoir by providing the shallow groove portion. It is possible to prevent the bubbles from staying by increasing the flow rate of the liquid in the section. Thereby, the liquid supply characteristic and the liquid ejection characteristic can be improved.

  Here, it is preferable that the flow path forming substrate is provided with a communication portion that communicates with a plurality of pressure generation chambers and constitutes a part of the liquid chamber. According to this, the volume of the liquid chamber can be further secured by the communication portion, and excellent liquid supply characteristics and liquid ejection characteristics can be obtained.

  The pressure generating element is preferably electrically connected to a flexible printed board on which a drive circuit for driving the pressure generating element is mounted. According to this, it is not necessary to mount the drive circuit on the protective substrate, and the second reservoir portion can be formed with a wide area.

  According to another aspect of the invention, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspect. According to this, it is possible to realize a liquid ejecting apparatus with improved liquid ejecting characteristics and liquid supply characteristics.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is a schematic perspective view of an ink jet recording head which is an example of a liquid jet head according to Embodiment 1 of the present invention, and FIG. 2 is a plan view of FIG. As shown in the figure, the flow path forming substrate 10 is formed of a silicon single crystal substrate having a plane orientation (110) in this embodiment, and one surface thereof is previously formed of silicon dioxide by thermal oxidation to a thickness of 0.5 to 2 μm. The elastic film 50 is formed.

  In the flow path forming substrate 10, pressure generating chambers 12 partitioned by a plurality of partition walls 11 are arranged in parallel in the width direction (short direction) by anisotropic etching from the other surface side. In addition, an ink supply path 14 and a communication path 15 are partitioned by a partition wall 11 on one end side in the longitudinal direction of the pressure generating chamber 12 of the flow path forming substrate 10. In addition, a communication portion 13 constituting a part of the reservoir 100 serving as an ink chamber (liquid chamber) common to the pressure generation chambers 12 is formed at one end of the communication passage 15. That is, the flow path forming substrate 10 is provided with a liquid flow path including a pressure generation chamber 12, a communication portion 13, an ink supply path 14, and a communication path 15.

  The ink supply path 14 communicates with one end side in the longitudinal direction of the pressure generation chamber 12 and has a smaller cross-sectional area than the pressure generation chamber 12. For example, in the present embodiment, the ink supply path 14 has a width smaller than the width of the pressure generation chamber 12 by narrowing the flow path on the pressure generation chamber 12 side between the reservoir 100 and each pressure generation chamber 12 in the width direction. It is formed with.

  In other words, the flow path forming substrate 10 is connected to the pressure generation chamber 12, the ink supply path 14 having a smaller cross-sectional area in the short direction of the pressure generation chamber 12, the ink supply path 14, and the ink supply. A communication passage 15 having a cross-sectional area larger than the cross-sectional area in the short direction of the path 14 is provided by being partitioned by a plurality of partition walls 11.

  A nozzle forming member in which a nozzle opening 21 communicating with the vicinity of the end of each pressure generating chamber 12 opposite to the ink supply path 14 is formed on the surface of the flow path forming substrate 10 where the pressure generating chamber 12 opens. In one example, the nozzle plate 20 is fixed by an adhesive, a heat welding film, or the like. The nozzle plate 20 is made of, for example, glass ceramics, a silicon single crystal substrate, stainless steel, or the like.

  On the other hand, as described above, the elastic film 50 having a thickness of, for example, about 1.0 μm is formed on the surface of the flow path forming substrate 10 opposite to the nozzle plate 20, and the elastic film 50 is formed on the elastic film 50. An insulator film 55 having a thickness of, for example, about 0.4 μm is formed. Further, on the insulator film 55, a lower electrode film 60 having a thickness of, for example, about 0.2 μm, a piezoelectric layer 70 having a thickness of, for example, about 1.0 μm, and a thickness of, for example, about 0 The upper electrode film 80 having a thickness of 0.05 μm is laminated by film formation and lithography to form the piezoelectric element 300. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric layer 70, and the upper electrode film 80. In general, one electrode of the piezoelectric element 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In the present embodiment, the lower electrode film 60 is used as a common electrode of the piezoelectric element 300 and the upper electrode film 80 is used as an individual electrode of the piezoelectric element 300. However, there is no problem even if this is reversed for convenience of a drive circuit and wiring. In any case, the piezoelectric active part 320 is formed for each pressure generating chamber 12. Here, a device in which the piezoelectric element 300 is provided on a predetermined substrate (on the flow path forming substrate 10) so as to be displaceable and the piezoelectric element 300 is driven is referred to as an actuator device. In the present embodiment, the piezoelectric element 300 is provided as a pressure generating element that causes a pressure change in the ink (liquid) in the pressure generating chamber 12. In the above-described example, the elastic film 50, the insulator film 55, and the lower electrode film 60 function as a diaphragm. However, the present invention is not limited to this. For example, the elastic film 50 and the insulator film 55 are provided. Instead, only the lower electrode film 60 may act as a diaphragm. Further, the piezoelectric element 300 itself may substantially serve as a diaphragm.

  The piezoelectric layer 70 is made of a piezoelectric material formed on the lower electrode film 60. As the piezoelectric layer 70, for example, a ferroelectric material such as lead zirconate titanate (PZT) or a material obtained by adding a metal oxide such as niobium oxide, nickel oxide, or magnesium oxide to the ferroelectric material is suitable. The piezoelectric layer 70 is formed thick enough to suppress the thickness so as not to generate cracks in the manufacturing process and to exhibit sufficient displacement characteristics. For example, in this embodiment, the piezoelectric layer 70 is formed with a thickness of about 1 to 2 μm.

  In addition, the upper electrode film 80 of each piezoelectric element 300 has a lead electrode 90 such as gold (Au) extending to the vicinity of the end of the flow path forming substrate 10 opposite to the ink supply path 14. Each is connected. A voltage is selectively applied to each piezoelectric element 300 via the lead electrode 90. Specifically, a flexible print in which a drive circuit 120 for driving the piezoelectric element 300 is mounted on the end portion of the lead electrode 90 extending to the outside of the piezoelectric element holding portion 32 of the protective substrate 30 described later in detail. The substrate 121 is electrically connected, and a drive signal from the drive circuit 120 is supplied to the lead electrode 90 via the flexible printed circuit board 121.

  As the drive circuit 120, for example, a circuit board, a semiconductor integrated circuit (IC), or the like can be used. Examples of the flexible printed circuit board 121 include a chip on film (COF) and a tape carrier package (TCP).

  Further, on the flow path forming substrate 10 on which the piezoelectric element 300 is formed, the protective substrate 30 provided with the piezoelectric element holding portion 32 which is a holding portion having a space that does not hinder the movement of the piezoelectric element 300 is an adhesive. 39. In addition, the piezoelectric element holding part 32 should just have a space of the grade which does not inhibit the motion of the piezoelectric element 300, and the said space may be sealed or may not be sealed.

  The protective substrate 30 is provided with a reservoir portion 31 across the direction in which the pressure generating chambers 12 are arranged. The reservoir unit 31 is connected to the communication unit 13 and constitutes a reservoir 100 serving as an ink chamber (liquid chamber) common to the plurality of pressure generating chambers 12.

  Here, the reservoir portion 31 is provided in a concave shape on the opposite side of the protective substrate 30 from the first reservoir portion 33 provided through the protective substrate 30 in the thickness direction and the flow path forming substrate 10 of the protective substrate 30. And a second reservoir section 34.

  The first reservoir portion 33 is provided in a region facing the communication portion 13 of the flow path forming substrate 10 so as to penetrate the protective substrate 30 in the thickness direction and communicate with the communication portion 13.

  The second reservoir section 34 has a concave shape provided in communication with the first reservoir section 33 on the surface of the protective substrate 30 opposite to the surface bonded to the flow path forming substrate 10. Further, the second reservoir portion 34 is provided on the region side facing the piezoelectric element holding portion 32. In other words, the reservoir unit 31 has a first reservoir unit 33 penetrating the protective substrate 30 in the thickness direction and the first reservoir unit 33 on the side opposite to the flow path forming substrate 10 toward the piezoelectric element holding unit 32 side. And a second reservoir portion 34 as a widened portion that widens in width. The reservoir 100, which is a common liquid chamber of the plurality of pressure generating chambers 12 of the present embodiment, includes the reservoir portion 31 including the first reservoir portion 33 and the second reservoir portion 34, and the communication portion 13. ing.

  Thus, by providing the reservoir portion 31 with the second reservoir portion 34 that widens toward the piezoelectric element holding portion 32 side, the capacity of the reservoir 100 can be increased. The position of the wall opposite to the pressure generating chamber 12 can be disposed on the pressure generating chamber 12 side, and the width direction in the longitudinal direction of the pressure generating chamber 12 of the ink jet recording head can be reduced in size.

  Further, by providing the second reservoir portion 34 in the reservoir portion 31, the area of the flexible portion 44 of the compliance substrate 40 can be increased. Thereby, the pressure fluctuation in the reservoir 100 when the ink is supplied to the reservoir 100 can be surely absorbed by the flexible portion 44 and the pressure fluctuation at the time of ink ejection can be absorbed by the flexible portion 44. . As a result, the occurrence of crosstalk due to the influence of pressure fluctuations can be reduced, and the ink ejection characteristics can be improved.

  The second reservoir portion 34 includes a deep groove portion 35 and a shallow groove portion 36 formed shallower than the deep groove portion 35.

  In detail, the deep groove portion 35 is a region opposite to the introduction port 46 provided in the compliance substrate 40 bonded on the protective substrate 30 to be described later. It is provided in the central portion and is provided until it reaches the first reservoir portion 33 along the longitudinal direction of the pressure generating chamber 12.

  The shallow groove portion 36 is provided with a depth smaller than that of the deep groove portion 35 on both sides of the deep groove portion 35 in the direction in which the pressure generating chambers are juxtaposed.

  In the present embodiment, the first reservoir portion 33 and the second reservoir portion 34 gradually increase in width toward the side opposite to the piezoelectric element 300 as shown in FIG. It is set up to be bigger. This is because, when ink is introduced into the reservoir portion 31 from an inlet 46, which will be described in detail later, the ink is supplied evenly across the plurality of pressure generating chambers 12 arranged side by side.

  Examples of the material of the protective substrate 30 include glass, ceramic material, metal, resin, and the like, but it is preferable that the protective substrate 30 is formed of a material substantially the same as the coefficient of thermal expansion of the flow path forming substrate 10. In this embodiment, a silicon single crystal substrate that is the same material as the flow path forming substrate 10 is used. As described above, the protective substrate 30 is made of the same material as the thermal expansion coefficient of the flow path forming substrate 10, so that the thermal expansion coefficient is different even when the ink jet recording head is heated at the time of ink discharge or manufacturing. Therefore, it is possible to prevent the occurrence of warping and the occurrence of breakage such as cracks.

  In addition, a compliance substrate 40 including a sealing film 41 and a fixing plate 42 is bonded onto the protective substrate 30. Here, the sealing film 41 is made of a material having low rigidity and flexibility (for example, a polyphenylene sulfide (PPS) film having a thickness of 6 μm). One surface of the two reservoir portions 34 is sealed. The fixing plate 42 is made of a hard material such as metal (for example, stainless steel (SUS) having a thickness of 30 μm). Since the region of the fixing plate 42 facing the reservoir 100 is an opening 43 that is completely removed in the thickness direction, one surface of the reservoir 100 is sealed only with a flexible sealing film 41. The flexible part 44 which can be bent and deformed is provided.

  Further, the fixing plate 42 of the compliance substrate 40 includes a protruding portion 45 that protrudes in a region opposite to the second reservoir portion 34, and the protruding portion 45 introduces an inlet 46 for introducing ink into the reservoir 100. Is provided. That is, the introduction port 46 is provided in a region opposite to the second reservoir unit 34, and the ink introduced from the introduction port 46 passes through the first reservoir unit 33 and the communication unit 13 from the second reservoir unit 34. Via the pressure generation chamber 12.

  At this time, the second reservoir portion 34 of the protective substrate 30 is provided with the deep groove portion 35 in a region opposite to the introduction port 46, so that the flow rate of ink supplied from the introduction port 46 by the deep groove portion 35 is reduced. Can be ensured, and ink supply characteristics are not deteriorated. That is, if the entire second reservoir 34 is shallowly formed in order to increase the flow rate of the reservoir 31, the flow rate is increased, but the flow rate cannot be ensured and the ink supply characteristics are deteriorated. By providing the portion 35, it is possible to secure the flow rate and prevent the ink supply characteristics from deteriorating.

  Further, when the ink introduced from the introduction port 46 passes over the shallow groove portion 36, the flow velocity of the ink is increased by the shallow groove portion 36, and bubbles are formed on the shallow groove portion 36, particularly in the corner portion of the second reservoir portion 34. Can be prevented from staying. That is, in the case where the entire second reservoir 34 is formed at the same depth as the deep groove 35 without providing the shallow groove 36 in the second reservoir 34, the ink flowing through the corner of the second reservoir 34 is formed. The flow rate becomes slow, bubbles stay in the corners of the second reservoir portion 34, the staying bubbles grow and the volume of the reservoir 100 is reduced to deteriorate the supply characteristics, and the bubbles are removed at a desired timing. It cannot be discharged, causing problems such as bubbles being discharged together with ink.

  Therefore, by providing the deep groove portion 35 and the shallow groove portion 36 opposite to the introduction port 46 as the second reservoir portion 34, the bubbles can be discharged at a desired timing without deteriorating the ink supply characteristics. Ink ejection characteristics can be obtained.

(Other embodiments)
As mentioned above, although each embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above. For example, in the first embodiment described above, the communication portion 13 constituting a part of the reservoir 100 is provided on the flow path forming substrate 10 in the direction in which the pressure generating chambers 12 are arranged, but the present invention is not particularly limited thereto. For example, the communication portion 13 of the flow path forming substrate 10 may be divided into a plurality of pressure generation chambers 12 and only the reservoir portion 31 may be used as the reservoir. Further, for example, only the pressure generation chamber 12 is provided in the flow path forming substrate 10, and a reservoir portion is provided in a member (for example, the elastic film 50, the insulator film 55, etc.) interposed between the flow path forming substrate 10 and the protective substrate 30. An ink supply path 14 that communicates the pressure generation chamber 31 with each pressure generation chamber 12 may be provided. Thereby, further miniaturization of the ink jet recording head can be achieved.

  In the first embodiment described above, the shallow groove portion 36 having a uniform depth is provided as the second reservoir portion 34. However, the present invention is not particularly limited to this, and for example, the shallow groove portion is pressurized from the deep groove portion 35 side. You may provide so that a depth may gradually become small toward the outer side of the parallel arrangement direction of the generation | occurrence | production chambers 12. FIG. That is, the depth may gradually decrease toward both outer sides of the second reservoir portion 34. As a result, the flow velocity in the vicinity of the corner of the second reservoir portion 34 in which bubbles are particularly likely to stay can be increased, and bubbles can be prevented from staying.

  Furthermore, for example, in the above-described first embodiment, the flexible printed circuit board 121 on which the drive circuit 120 is mounted is connected to the lead electrode 90. However, the present invention is not particularly limited to this, for example, a compliance board on the protective board 30 When an area for mounting the drive circuit 120 can be secured in an area other than 40, the drive circuit 120 is mounted on the protective substrate 30, and the drive circuit 120 and the lead electrode 90 are connected by a connection wiring such as a bonding wire. It may be.

  In the first embodiment described above, the single flexible portion 44 is provided on the compliance substrate 40. However, the present invention is not particularly limited thereto. For example, a plurality of openings 43 are provided in the fixed plate 42, thereby providing a plurality of flexible portions 44. The flexible portion 44 may be provided.

  In the above-described embodiment, the thin film type (flexural vibration type) piezoelectric element is exemplified as the pressure generating element that applies pressure to the liquid in the pressure generating chamber. However, the pressure generating element is not particularly limited to this, For example, a thick film type piezoelectric element formed by a method such as attaching a green sheet or a longitudinal vibration type piezoelectric element in which a piezoelectric material and an electrode forming material are alternately stacked to expand and contract in the axial direction is used. be able to. In addition, as a pressure generating element, a heat generating element is disposed in the pressure generating chamber, and a liquid droplet is discharged from the nozzle opening by a bubble generated by heat generation of the heat generating element, or static electricity is generated between the diaphragm and the electrode. Thus, it is possible to use one that deforms the diaphragm by electrostatic force and ejects droplets from the nozzle openings.

  In addition, the ink jet recording heads of these embodiments constitute a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and are mounted on the ink jet recording apparatus. FIG. 3 is a schematic view showing an example of the ink jet recording apparatus.

  As shown in FIG. 3, in the recording head units 1A and 1B having the ink jet recording head I, cartridges 2A and 2B constituting ink supply means are detachably provided, and a carriage on which the recording head units 1A and 1B are mounted. 3 is provided on a carriage shaft 5 attached to the apparatus body 4 so as to be movable in the axial direction. The recording head units 1A and 1B, for example, are configured to eject a black ink composition and a color ink composition, respectively.

  The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted is moved along the carriage shaft 5. The On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S which is a recording medium such as paper fed by a paper feed roller (not shown) is wound around the platen 8. It is designed to be transported.

  In the first embodiment described above, an ink jet recording head has been described as an example of a liquid ejecting head. However, the present invention is widely intended for all liquid ejecting heads, and is a liquid ejecting a liquid other than ink. Of course, the present invention can also be applied to an ejection head. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

2 is a schematic perspective view of a recording head according to Embodiment 1. FIG. 2A and 2B are a plan view and a cross-sectional view of the recording head according to the first embodiment. 1 is a schematic view of an ink jet recording apparatus according to an embodiment.

Explanation of symbols

  I ink jet recording head (liquid ejecting head), II ink jet recording apparatus (liquid ejecting apparatus), 10 flow path forming substrate, 12 pressure generating chamber, 13 communicating portion, 14 ink supply path, 15 communicating path, 20 nozzle plate, 21 nozzle opening, 30 protective substrate, 31 reservoir portion, 32 piezoelectric element holding portion (holding portion), 33 first reservoir portion, 34 second reservoir portion, 35 deep groove portion, 36 shallow groove portion, 40 compliance substrate, 41 sealing Stop film, 42 Fixing plate, 43 Opening part, 44 Flexible part, 45 Projection part, 46 Inlet, 50 Elastic film, 55 Insulator film, 60 Lower electrode film, 70 Piezoelectric layer, 80 Upper electrode film, 90 Lead Electrode, 100 reservoir, 120 drive circuit, 121 flexible printed circuit board, 30 0 Piezoelectric element, 320 Piezoelectric active part

Claims (4)

A pressure generating chamber communicating with a nozzle opening for ejecting liquid is provided in a region facing the pressure generating chamber arranged in parallel in the width direction and the pressure generating chamber on one surface side of the channel forming substrate. A pressure generating element, and a protective substrate that is bonded to the surface of the flow path forming substrate on the pressure generating element side and that has a holding portion on one side of the pressure generating element,
The protective substrate is provided with a reservoir portion serving as a common liquid chamber of the plurality of pressure generating chambers in the direction in which the pressure generating chambers are arranged side by side, and the reservoir portion extends the protective substrate in the thickness direction. A first reservoir portion that is provided so as to penetrate through the first reservoir portion, and a region that is provided in communication with the first reservoir portion and that is opposite to the flow path forming substrate and faces the holding portion. And a second reservoir portion that does not penetrate the protective substrate ,
A compliance substrate having a flexible portion provided in a region facing the reservoir portion is provided on a surface of the protective substrate opposite to the flow path forming substrate, and the second reservoir of the compliance substrate is provided. In the area opposite to the part, an introduction port for introducing liquid into the reservoir part is provided,
A deep groove provided in the region opposite to the introduction port until the second reservoir reaches the first reservoir over the longitudinal direction of the pressure generating chamber, and the pressure generation in the deep groove A liquid jet head comprising: a shallow groove portion that is provided on both sides of the chamber in the side-by-side direction and is shallower than the deep groove portion.   The liquid ejecting head according to claim 1, wherein the flow path forming substrate is provided with a communication portion that communicates with a plurality of pressure generating chambers and constitutes a part of the liquid chamber.   The liquid ejecting head according to claim 1, wherein a flexible printed circuit board on which a driving circuit for driving the pressure generating element is mounted is electrically connected to the pressure generating element.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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