JP2010214532A - Method for manufacturing disc-shaped substrate and tool for placing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a disc-shaped substrate hard to damage or break workpieces when the workpieces are inserted into a metal shaft in a process of grinding the outer circumferential surfaces of the workpieces. <P>SOLUTION: The method for manufacturing the disc-shaped substrate includes: a process of grinding the inner circumferential surfaces of the workpieces; a process of successively inserting and laminating the workpieces whose inner circumferential surfaces are ground in the metal shaft 71 mounted with a protective cap 72 that is arranged on one end part of the metal shaft 71 and formed of resin at least with respect to the surface; and a process of grinding the outer circumferential surfaces of the laminated workpieces. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a method for manufacturing a disk-shaped substrate such as a glass substrate for a magnetic recording medium.

  In recent years, production of information recording media such as magnetic disks has been activated in response to increasing demand for recording media. Here, as a disk-shaped substrate used as a substrate for a magnetic disk, an aluminum substrate and a glass substrate are widely used. This aluminum substrate is characterized by high workability and low cost, and one glass substrate is characterized by excellent strength, surface smoothness and flatness. In particular, recently, the demand for miniaturization and high density of the disk substrate has been remarkably increased, and the degree of attention of the glass substrate capable of achieving high density with small roughness of the surface of the substrate has increased.

  Here, in Patent Literature 1, a pair of glass substrate workpieces that are in contact with both a pair of work shafts that hold about 350 to 400 glass substrates in a stacked state and a pair of glass substrate work bundles, respectively. A method of polishing an outer peripheral end of a glass substrate work by an outer peripheral end surface polishing machine comprising a pair of rotating nylon brushes for polishing an outer peripheral end surface and a chamfered surface is disclosed.

JP 2002-123931 A

  However, in order to hold the glass substrate work on the work shaft, it is necessary to insert the glass substrate work into the work shaft through a circular hole formed in the center thereof and to overlap them. At this time, since the work shaft is made of a hard material such as metal, there is a problem that the glass substrate work is easily damaged or broken.

  The present invention has been made to solve the technical problems as described above, and the object of the present invention is to insert the workpiece into the metal shaft in the step of polishing the outer peripheral surface of the workpiece. It is an object of the present invention to provide a method for manufacturing a disk-shaped substrate that hardly damages or damages a workpiece.

  In order to achieve such an object, the disk-shaped substrate manufacturing method of the present invention includes a step of polishing an inner peripheral surface of the disk-shaped substrate, and a tip portion of the disk-shaped substrate whose inner peripheral surface is polished is coated with a resin. The method includes a step of sequentially inserting and laminating the metal shaft, and a step of polishing an outer peripheral surface of the laminated disk-shaped substrate.

  Here, a step of removing the coated resin from the tip of the metal shaft after the step of laminating, and a step of attaching a fixing member for fixing the laminated disk-shaped substrate in place of the removed resin to the tip of the metal shaft It is preferable that a resin member is further embedded in the axial direction of the metal shaft so that the inner peripheral surface of the disk-shaped substrate is in contact with the resin member.

  The disk-shaped substrate mounting jig of the present invention is a jig for stacking and mounting the disk-shaped substrates in order to polish the outer peripheral surface of the disk-shaped substrate when manufacturing the disk-shaped substrate, The first resin member is embedded in the axial direction, and a metal shaft for inserting the disk-shaped substrate through the opening of the disk-shaped substrate, and at least the surface of the metal shaft disposed at one end of the metal shaft are formed of resin. And a mounting table on which the disk-shaped substrate is mounted, which is disposed at the other end of the metal shaft.

  Here, it is preferable that the 2nd resin member can be removed from the edge part of a metal shaft.

  According to the present invention configured as described above, it is possible to provide a method for manufacturing a disk-shaped substrate having a high yield as compared with a case where these configurations are not employed.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
FIGS. 1-1 (a) to (d) and FIGS. 1-2 (e) to (h) are diagrams showing a manufacturing process of a disk-shaped substrate (disk substrate) to which the present embodiment is applied.

(Primary lapping process)
FIG. 1-1 (a) shows the primary lapping process. In this step, first, lapping is performed for the first time by the lapping machine 40, and the surface 11 of the workpiece 10 as a disk-shaped substrate is ground smoothly.
Here, FIG. 2 is a diagram illustrating the structure of the wrapping machine 40.
The wrapping machine 40 shown in FIG. 2 includes a lower surface plate 21a on which the workpiece 10 is placed, and an upper surface plate 21b for applying pressure necessary for holding the workpiece 10 from above and performing lapping.
Here, a tooth portion 42 is provided on the outer peripheral portion of the lower surface plate 21a, and a sun gear 44 is provided on the central portion of the lower surface plate 21a. Further, the lower surface plate 21a has a workpiece 10 when lapping is performed. A disk-shaped carrier 30 is positioned for positioning.
In the wrapping machine 40 shown in FIG. 2, five carriers 30 are installed. A tooth portion 32 is provided on the outer peripheral portion of the carrier 30, and meshes with both the tooth portion 42 and the sun gear 44 of the lower surface plate 21a. Further, the lower surface plate 21a and the upper surface plate 21b are provided with rotation shafts 46a and 46b for rotating them at the center.

In this primary lapping process, the work 10 is first placed on the lower surface plate 21a of the lapping machine 40 using the carrier 30.
FIG. 3 is a diagram illustrating the carrier 30 in more detail. As described above, the carrier 30 shown in FIG. 3 is provided with the tooth portion 32 on the outer peripheral portion. In addition, a plurality of circular holes 34 in which the workpiece 10 is placed when lapping is performed are formed. The diameter of the hole 34 is slightly larger than the diameter of the workpiece 10. By doing in this way, it can suppress that an extra stress is applied to a part of outer periphery end of the workpiece | work 10 at the time of lapping, Therefore The outer periphery end of the workpiece | work 10 becomes difficult to be damaged. In the present embodiment, the diameter of the hole 34 is, for example, about 1 mm larger than the diameter of the workpiece 10. The holes 34 are arranged at substantially equal intervals. In the case of the present embodiment, for example, 35 holes 34 are opened.

  As a material of the carrier 30, for example, an epoxy resin reinforced by mixing aramid fiber or glass fiber can be used. Further, the thickness of the carrier 30 is made thinner than the finished thickness of the workpiece 10 in this step so as to come into contact with the upper surface plate 21b during lapping in this step and not hinder the lapping. For example, when the finished thickness of the workpiece 10 is 1 mm, the thickness of the carrier 30 is 0.2 mm to 0.6 mm thinner than that.

After the workpiece 10 is placed in the hole 34 of the carrier 30, the upper surface plate 21 b is moved until it contacts the workpiece 10, and the lapping machine 40 is operated.
The operation of the wrapping machine 40 at this time will be described with reference to FIG. When the lapping machine 40 is operated, the upper rotating shaft 46b in the drawing is rotated in one direction, and the upper surface plate 21b is rotated in the same one direction. Further, the lower rotating shaft 46a in the figure is rotated in the opposite direction to the rotation of the rotating shaft 46b, and the lower surface plate 21a is rotated in the same direction as the rotating shaft 46a. Thereby, the tooth part 42 of the lower surface plate 21a also rotates in the same direction as the rotating shaft 46a. The sun gear 44 at the center also rotates in the same direction as the rotation shaft 46a.
Thus, by rotating the upper surface plate 21b, the lower surface plate 21a, and the sun gear 44, the carrier 30 meshing with these gears performs a so-called planetary motion in which the rotation motion and the revolution motion are combined. Similarly, the workpiece 10 fitted in the carrier 30 also performs planetary motion. By doing so, the workpiece 10 can be wrapped more accurately and quickly.

  In this embodiment mode, lapping can be performed using an abrasive. Although it does not specifically limit as an abrasive, For example, the abrasives which consist of an alumina or a diamond can be used by slurrying. Or you may use the grindstone which these abrasives disperse | distributed and contained in the upper surface plate 21b and the lower surface plate 21a.

(Inner and outer grinding process)
FIG. 1-1 (b) shows the inner and outer peripheral grinding steps. In this step, grinding that is roughing of the inner peripheral surface of the opening 12 of the workpiece 10 and the outer peripheral surface of the outer periphery 13 is performed. In the present embodiment, the inner peripheral surface and the outer peripheral surface are simultaneously ground. Specifically, the opening 12 provided in the center of the workpiece 10 is ground by the inner peripheral grindstone 22, and the outer periphery 13 of the workpiece 10 is ground by the outer peripheral grindstone 23. At this time, the inner peripheral surface 22 and the outer peripheral surface 23 of the workpiece 10 are sandwiched between the inner peripheral grindstone 22 and the outer peripheral grindstone 23 and simultaneously processed. Thereby, it is possible to easily ensure the concentricity between the inner diameter and the outer diameter.
In the present embodiment, the inner peripheral grindstone 22 and the outer peripheral grindstone 23 have a wavy surface. Therefore, not only can the inner peripheral surface of the opening 12 and the outer peripheral surface of the outer periphery 13 of the workpiece 10 be ground, but also the chamfering of the edges of the opening 12 and the outer periphery 13 can be performed.

(Inner circumference polishing process)
FIG. 1-1 (c) shows the inner periphery polishing step. In this step, polishing is performed to further smooth the inner peripheral surface of the opening (opening) 12 of the workpiece 10 that has been subjected to grinding that is roughing in the inner and outer peripheral grinding step shown in FIG.
Specifically, the workpieces 10 are first stacked and set on a holder (not shown). And the brush 24 is inserted in the center of the opening 12 of the workpiece | work 10 set to this holder. Then, the inner peripheral surface of the workpiece 10 is polished by rotating the brush 24 at a high speed while pouring the polishing liquid into the opening 12 of the workpiece 10. In the present embodiment, since the brush 24 is used for polishing, the inner peripheral surface of the workpiece 10 is polished, and the chamfered portion of the edge of the opening 12 performed in the inner and outer peripheral grinding process described above is similarly performed. Can be polished. As the polishing liquid, for example, a slurry obtained by dispersing cerium oxide abrasive grains in water can be used.

  FIG. 4 is a view showing an example of the brush 24 used in the inner periphery polishing step. The brush 24 includes a brush part 61 formed by arranging hair tips in a spiral shape, and a shaft 62 formed continuously at both ends of the brush part 61 and forming one end and the other end. Yes. For example, when the inner peripheral surface of a small-diameter disk such as 0.85 inch is polished as the opening 12 of the work 10, it is necessary to make the core of the brush 24 thinner. In this case, in this embodiment, for example, a plurality of wires (material: for example, mild steel wire (SWRM), hard steel wire (SWRH), stainless steel wire (SUSW), brass wire (BSW), workability, rigidity, etc. The brush portion 61 is formed by sandwiching the hair of the brush (material: for example, nylon (trade name of DuPont)) and twisting the wire in which the hair is sandwiched. By twisting this wire to form the brush portion 61, the brush bristles formed on the brush portion 61 can be formed in a spiral shape, and the polishing liquid is pivoted in the opening 12 of the inserted workpiece 10. It is possible to flow in the direction. Therefore, the polishing liquid can be transported satisfactorily.

(Secondary lap process)
FIG. 1-1 (d) shows the secondary lapping process. In this step, the surface 11 of the workpiece 10 that has been lapped in the primary lapping step shown in FIG.
As a device for performing lapping in the secondary lapping process, a lapping machine 40 shown in FIG. 1-1 (a) can be used. The wrapping method, conditions, and the like can be performed in the same manner as described with reference to FIG.

(Outer periphery polishing process)
FIG. 1-2 (e) shows the outer periphery polishing step. In this step, polishing is performed to further smooth the outer peripheral surface of the outer periphery 13 of the workpiece 10 that has been subjected to grinding that is roughing in the inner and outer peripheral grinding step shown in FIG.
Specifically, the workpiece 10 is first laminated on the opening 12 of the workpiece 10 through the jig 25, and the workpiece 10 is set on the jig 25. And while pouring polishing liquid into the location of the outer periphery 13 of the workpiece | work 10, it contacts the workpiece | work 10 which laminated | stacked the brush 26, and rotates it at high speed. Thereby, the outer peripheral surface of the workpiece | work 10 can be grind | polished. In the present embodiment, since the brush 26 is used for polishing, the outer peripheral surface of the workpiece 10 is polished, and the chamfered portion of the edge of the outer periphery 13 performed in the inner and outer peripheral grinding process described above is also polished in the same manner. be able to. As the polishing liquid, as in the case of the inner peripheral polishing step, for example, a slurry obtained by dispersing cerium oxide abrasive grains in water can be used.

(Primary polishing process)
FIG. 1-2 (f) shows the primary polishing process. In this step, in the secondary lapping step shown in FIG. 1-1 (d), the surface 11 of the lapped workpiece 10 is further polished by polishing using a polishing machine 50, and further smoothness is improved. I will raise it. The polishing machine 50 has substantially the same configuration as the lapping machine 40 described above, but the materials used for polishing are partially different as shown below.
In the present embodiment, when polishing is performed, for example, a hard polishing cloth formed of urethane and a slurry obtained by dispersing cerium oxide abrasive grains in water and slurrying can be used as an abrasive.

(Secondary polishing process)
FIG. 1-2 (g) shows the secondary polishing step. In this step, the surface 11 of the workpiece 10 polished in the primary polishing step shown in FIG. 1-2 (f) is further polished by performing precise polishing, and the surface 11 is finally finished. .
In this embodiment, when performing this polishing, for example, a suede-like soft polishing cloth can be used as a polishing material by dispersing cerium oxide abrasive grains or colloidal silica in a solvent such as water to form a slurry. .

(Final cleaning / inspection process)
FIG. 1-2 (h) shows the final cleaning / inspection process. In the final cleaning, dirt such as the used abrasive is removed in the series of steps described above. For the cleaning, a method such as chemical cleaning with a detergent (chemical) using ultrasonic waves can be used.
In the inspection process, for example, the surface of the workpiece 10 is inspected for scratches or distortions by an optical inspection device using a laser.

  Here, when shifting from the secondary lapping process to the outer periphery polishing process, it is necessary to remove the workpiece 10 from the lapping machine 40 and stack and set it on the jig 25.

5A to 5C are diagrams illustrating a jig 25 to which the present embodiment is applied.
As shown in FIG. 5 (a), the jig 25 is disposed at one end of the metal shaft 71, in which the workpiece 10 is inserted through the opening 12 and stacked and set, and at least the surface is made of resin. And a protective cap 72 (second resin member) formed in (1). Also, a placement table 73 placed on the other end of the metal shaft 71 and on which the workpiece 10 is placed when the workpiece 10 is set on the metal shaft 71, and a resin member 74 embedded in the axial direction of the metal shaft 71 ( First resin member). Furthermore, both ends of the metal shaft 71, the joint between the protective cap 72 and the metal shaft 71, and the joint between the mounting table 73 and the metal shaft 71 are threaded, as shown in FIG. In addition, the metal shaft 71, the protective cap 72, and the mounting table 73 are coupled to each other to form the jig 25 by joining the threaded portions to each other.

  Moreover, FIG.5 (c) is BB sectional drawing of the jig | tool 25 in Fig.5 (a). As described above, the resin member 74 is embedded and arranged in the axial direction of the metal shaft 71, but the resin member 74 is formed so as to protrude from the circumferential portion of the circular metal shaft 71. In the present embodiment, the resin member 74 is attached to three or more multiple locations (four locations in the figure) with respect to the circumferential direction of the metal shaft 71.

Next, a process of stacking and setting the workpiece 10 removed from the wrapping machine 40 on the jig 25 described above will be described.
6A to 6C are diagrams illustrating a process of stacking and setting the workpiece 10 on the jig 25. FIG.
First, as shown in FIG. 6A, the workpiece 10 is sequentially inserted and laminated on the metal shaft 71 of the jig 25 through the opening 12 (see FIG. 1). Here, for example, 150 workpieces 10 are stacked. At this time, since the protective cap 72 is attached to the distal end portion of the metal shaft 71, it is difficult for an operator to scratch or damage the inner peripheral surface of the workpiece 10 when inserting the workpiece 10 into the metal shaft 71. . That is, the tip of the metal shaft 71 is made of a metal such as stainless steel and is hard, so that if the protective cap 72 is not attached, the inner peripheral surface of the workpiece 10 is likely to be damaged. On the other hand, in the present embodiment, since the protective cap 72 formed of a resin that is a soft material is attached, it is difficult to damage the inner peripheral surface of the workpiece 10.

  Next, the protective cap 72 is removed as shown in FIG. As a result, the threaded portion of the tip of the metal shaft 71 is exposed.

  Next, as shown in FIG. 6C, the fixing nut 75 is attached to the distal end portion of the metal shaft 71. The fixed nut 75 is internally threaded to fit the tip of the metal shaft 71, and the metal shaft 71 and the fixed nut 75 are coupled by screwing. The fixing nut 75 is a fixing member for pressing and fixing the workpiece 10 in the next outer periphery polishing step. In other words, in the outer periphery polishing step described with reference to FIG. 1-2E, the workpiece 10 is fixed by the fixing nut 75, and the workpiece 10 can be polished with high accuracy.

  In this embodiment, the protective cap 72 is prepared and attached to the tip of the metal shaft 71 as a member different from the metal shaft 71. However, the metal shaft 71 whose tip is covered with resin is used. Is also possible. However, in this case, it is preferable that the coated resin can be removed as described in the process of FIG.

5 (a) to 5 (b) and FIG. 6 (a), the protective cap 72 has a cylindrical shape whose upper portion is a drawing shape, and this drawing shape portion is illustrated as a straight line. It is not limited to.
FIGS. 7A to 7C are diagrams illustrating the shape of the protective cap 72 with three examples.
The protective cap 72a illustrated in FIG. 7A is an example in which the upper diaphragm-shaped portion is expanded to the lower part of the protective cap 72 illustrated in FIG. Further, the protective cap 72b shown in FIG. 7B is an example of a bullet shape in which the tip portion is configured by a curved surface. Furthermore, the protective cap 72c shown in FIG. 7C is an example of a spindle shape with a sharp tip.
The protective caps 72, 72 a, 72 b, 72 c in the examples given above can be appropriately selected from the viewpoints of workability, protection of the inner peripheral surface of the workpiece 10, and the like.

  In the present embodiment, the resin member 74 is embedded and attached to the metal shaft 71. However, the present invention is not limited to this, and the resin member 74 may be configured so that the inner peripheral surface of the workpiece 10 contacts the resin member 74. The form does not matter. That is, the resin member 74 may be attached so that the workpiece 10 and the metal shaft 71 are not in direct contact with each other. In the present embodiment, the resin member 74 is prepared and attached as a member different from the metal shaft 71. However, the resin member 74 is not required to be a separate member, and the surface of the metal shaft 71 is made of resin. It may be covered and integrated. Therefore, for example, the heat softening resin may be heated to be softened, applied to the surface of the metal shaft 71, and then cooled to form a resin film on the surface of the metal shaft 71.

Further, in the examples shown in FIGS. 5A to 5C and FIGS. 6A to 6B, the resin member 74 has a rectangular parallelepiped shape, but is not limited thereto.
FIG. 8A is a diagram illustrating another shape of the resin member 74.
The resin member 74 shown in FIG. 8A is an example in which a tapered slope 741 is formed at the upper end of the resin member 74. By making the side into which the workpiece 10 is inserted into such a shape, it is possible to make the inner peripheral surface of the workpiece 10 less likely to be damaged when the workpiece 10 is inserted into the metal shaft 71. Further, from the viewpoint of making the inner peripheral surface of the workpiece 10 less likely to be damaged, the engagement diameters of the protective cap 72 and the resin member 74 may be matched.
FIG. 8B illustrates the case where the engagement cap 72 and the resin member 74 have the same engagement diameter. As can be seen from FIG. 8B, in this case, a step between the protective cap 72 and the resin member 74 does not occur. Therefore, when the workpiece 10 is inserted into the metal shaft 71, it is possible to suppress the inner peripheral surface of the workpiece 10 from being caught on the upper portion of the resin member 74. Therefore, not only is the inner peripheral surface of the workpiece 10 less likely to be damaged, but the workpiece 10 can be inserted into the metal shaft 71 more smoothly. That is, it is also effective from the viewpoint of improving workability.

(A)-(d) is the figure which showed the manufacturing process of the disk shaped board | substrate (disk board | substrate) to which this Embodiment is applied. (E)-(h) is the figure which showed the manufacturing process of the disk shaped board | substrate (disk board | substrate) to which this Embodiment is applied. It is a figure explaining the structure of the wrapping machine. It is the figure explaining the carrier in more detail. It is the figure which showed an example of the brush used in an inner periphery grinding | polishing process. (A)-(c) is the figure explaining the jig | tool with which this Embodiment is applied. (A)-(c) is the figure explaining the process of laminating | stacking a workpiece | work on a jig | tool and setting. (A)-(c) is the figure which showed and demonstrated three examples about the shape of the protective cap. (A) is the figure illustrated about other shapes of a resin member. (B) is the figure explaining the case where the engagement diameter of a protective cap and a resin member was match | combined.

DESCRIPTION OF SYMBOLS 10 ... Work, 11 ... Surface, 12 ... Opening, 13 ... Outer periphery, 25 ... Jig, 30 ... Carrier, 40 ... Lapping machine, 50 ... Polishing machine, 71 ... Metal shaft, 72, 72a, 72b, 72c ... Resin Cap, 73 ... mounting table, 74 ... resin member, 75 ... fixing nut

Claims (5)

A method of manufacturing a disk-shaped substrate,
Polishing the inner peripheral surface of the disk-shaped substrate;
The step of laminating the disk-shaped substrate with the inner peripheral surface polished sequentially into a metal shaft whose tip is covered with a resin; and
And polishing the outer peripheral surface of the laminated disk-shaped substrate. A method for manufacturing a disk-shaped substrate, comprising: Removing the coated resin from the tip of the metal shaft after the laminating step;
The disk-shaped substrate according to claim 1, further comprising a step of attaching a fixing member that fixes the laminated disk-shaped substrate in place of the removed resin to the tip end portion of the metal shaft. Manufacturing method.   3. The disk-shaped substrate according to claim 1, wherein a resin member is further embedded in an axial direction of the metal shaft, and an inner peripheral surface of the disk-shaped substrate is brought into contact with the resin member. Production method. When manufacturing a disk-shaped substrate, a jig for laminating and mounting the disk-shaped substrate in order to polish the outer peripheral surface of the disk-shaped substrate,
A first resin member embedded in the axial direction, and a metal shaft for inserting the disk-shaped substrate through the opening of the disk-shaped substrate;
A second resin member disposed on one end of the metal shaft and having at least a surface formed of resin;
A disk-shaped substrate mounting jig, comprising: a mounting table disposed on the other end of the metal shaft and mounting the disk-shaped substrate.   The disk-shaped substrate mounting jig according to claim 4, wherein the second resin member can be removed from an end portion of the metal shaft.

Images