JP2010212549A - Laser oscillation device and laser beam machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser oscillation device capable of performing stable laser output without changing set values of laser output corresponding to a beam mode. <P>SOLUTION: The laser oscillation device includes a beam mode-switching means 21 for switching an output beam mode and is provided with a control unit 30 which outputs a beam mode switching signal to the beam mode-switching means 21. An output command arithmetic means 23 for inputting a signal from a laser output setting unit 22 and the signal from the control unit 30 and holding an output signal from a laser output setting unit 22 in synchronism with beam mode switching not to exceed a voltage value corresponding to each beam mode is provided between the laser output setting unit 22 and a comparator 24. A power supply command arithmetic means 26 for inputting the signal from the control unit 30 and holding an output signal of the comparator 24 in synchronism with the beam mode switching not to exceed a voltage value corresponding to each beam mode is provided between the comparator 24 and a high-voltage power source 8. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a laser oscillation device and a laser processing machine capable of selectively setting the shape of a laser beam.

  In recent years, laser oscillators have been equipped with beam mode switching means to switch the beam mode, switching the laser light between higher order mode and lower order mode, welding processing and quenching processing in higher order mode, cutting processing in lower order mode, etc. Laser oscillation devices that can switch modes according to applications have begun to be widely used.

  In such a conventional laser oscillation device, the allowable value of the laser output also changes with the switching of the beam mode of the laser beam, so if the allowable value is adjusted to the higher order mode, the mirror in the lower order mode is broken, On the other hand, if the permissible value is matched with the low order mode, there is a problem that the output of the high order mode can be suppressed.

  Therefore, in order to obtain the maximum allowable output for each beam mode that can be switched while protecting the mirror of the laser resonator, a plurality of setting values to be compared with the output signal from the laser light detector are provided, and the laser output according to the beam mode. An invention in which a set value is selected is known (see Patent Document 1).

  In the invention described in Patent Document 1, the laser output setting device has a plurality of setting values, and selects a laser output setting value in accordance with switching of the beam mode of the laser light. FIG. 11 shows the relationship between the high-voltage power supply output and the laser output for the high-order mode and the low-order mode of this laser oscillation device.

  As shown in FIG. 11, in the low-order mode during use, the laser output is about 60 to 80% with the same high-voltage power supply output as compared to the high-order mode when the beam mode switching means such as the aperture is not used. descend. This is because the use of beam mode switching means such as an aperture limits the laser optical path in the laser resonator and limits the range in which the laser resonance phenomenon occurs.

  The relationship between the high voltage power output and the laser output is in a proportional relationship where the laser output increases monotonously as the high voltage power output increases, and in a saturated state where the laser output does not increase much even if the high voltage power output increases. Exists.

This is because the excitation medium in the laser resonator is thermally saturated by the output energy from the high voltage power supply. This saturation phenomenon is more prominent in the lower order mode using the beam mode switching means such as the aperture than in the higher order mode when the beam mode switching means such as the aperture is not used. Thus, even if the high voltage power supply output is increased, the phenomenon that does not contribute much to the increase of the laser output varies depending on whether or not the beam mode switching means such as the aperture is used.
Japanese Patent Publication No. 6-26270

  The conventional laser oscillation apparatus has a plurality of setting values in the laser output setting device, and selects the laser output setting value according to the switching of the beam mode of the laser beam. The laser output set value and the changeover switch are necessary, and the configuration is complicated. In addition, when changing the laser output setting, it is necessary to change a plurality of settings simultaneously.

  As described above, the laser output setting device is provided with the same number of laser output setting values and changeover switches as the number of beam modes. Therefore, when changing the laser output output from the laser oscillation device, the beam mode of each laser beam is changed. It is necessary to change the corresponding laser output setting value. When laser processing is frequently performed by changing the beam mode or laser power of the laser beam, complicated setting change work is required.

  When the beam mode switching means such as the aperture is not used, the relationship between the high voltage power supply output and the laser output is changed and the laser output is increased even when the output of the high voltage power supply is increased. The increase rate of the output is remarkably lowered, and a phenomenon that the laser output reaches a saturation state occurs, and the utilization efficiency of the high voltage power supply output is remarkably deteriorated. Furthermore, in the worst case, when the output of the high voltage power supply is increased, there is a problem that the laser output is lowered due to the occurrence of thermal saturation in the laser resonator.

  The present invention provides a laser oscillation device and a laser processing machine capable of stable laser output without resetting a laser output setting device when the laser output is the same even when the beam mode is switched. With the goal.

  In order to solve the above problems, a laser oscillation device according to the present invention includes a laser resonator provided with a beam mode switching means for switching an output beam mode, a high-voltage power supply for supplying power to the laser resonator, and the laser resonance. A photodetector for measuring the laser beam output from the detector, a laser output setting unit for setting a set value of the laser beam output from the laser resonator, an output signal of the photodetector and the laser output setting unit And a control device that outputs a beam mode switching signal to the beam mode switching means is provided, and a signal from the laser output setting unit and the control device are provided. In synchronization with the beam mode switching, the output signal from the laser output setting unit is kept so as not to exceed the voltage value corresponding to each beam mode. An output command computing means for those provided between the comparator and the laser output setting unit.

  With this configuration, excessive laser output irradiation can be prevented by suppressing the laser output command value to the comparator to be compared with the output signal of the photodetector to a voltage value corresponding to the beam mode. In addition, when changing the laser output output from the laser oscillation device, it is not necessary to change the setting value of the laser output setting unit corresponding to the beam mode of each laser beam, and the beam mode and laser power of the laser beam are frequently changed. The work can be simplified even when laser processing is performed with the change.

  Further, another laser oscillation device of the present invention is provided with a laser resonator provided with a beam mode switching means for switching an output beam mode, a high voltage power source for supplying power to the laser resonator, and an output from the laser resonator. A photodetector for measuring the laser beam, a laser output setting unit for setting a setting value of the laser beam output from the laser resonator, an output signal of the photodetector and a setting value of the laser output setting unit. Comparing and providing a comparator that feeds back to the high-voltage power supply, and providing a control device that outputs a beam mode switching signal to the beam mode switching means, inputs a signal from the control device, and synchronizes with the beam mode switching. A power command calculation means for holding the output signal of the comparator so as not to exceed a voltage value corresponding to each beam mode is provided between the comparator and the high voltage power source. Than is.

  With this configuration, by clipping the command to the high-voltage power supply with a voltage value corresponding to the beam mode, the output of the high-voltage power supply is not increased above a certain value, so that the efficiency of use of the high-voltage power supply is significantly reduced. Disappear. In addition, it does not occur that the laser output is lowered due to thermal saturation in the laser resonator.

  Furthermore, another laser oscillation apparatus of the present invention is provided with a laser resonator provided with a beam mode switching means for switching an output beam mode, a high voltage power source for supplying power to the laser resonator, and an output from the laser resonator. A photodetector for measuring the laser beam, a laser output setting unit for setting a setting value of the laser beam output from the laser resonator, an output signal of the photodetector and a setting value of the laser output setting unit. A comparator that compares and feeds back to the high-voltage power supply; and a controller that outputs a beam mode switching signal to the beam mode switching means is provided, and a signal from the laser output setting unit and a signal from the controller are Input and output command to hold the output signal from the laser output setting unit so as not to exceed the voltage value corresponding to each beam mode in synchronization with beam mode switching An arithmetic means is provided between the laser output setting unit and the comparator, and a signal from the control device is input, and the output signal of the comparator is equal to or higher than a voltage value corresponding to each beam mode in synchronization with beam mode switching. The power supply command calculation means for holding the power supply is provided between the comparator and the high voltage power supply.

  With this configuration, in addition to the above-described effects, even if the laser output command is commanded incorrectly, the output command is limited by the output command calculation means. Therefore, the apparatus can be prevented from being damaged without generating an excessive voltage or an excessive current from the high voltage power supply, and the safety and reliability of the laser oscillation apparatus can be further improved.

  In addition, the laser processing machine of the present invention includes a processing table on which a workpiece is placed, a driving unit that moves at least one of the movement of the processing table and the laser beam condensing unit, and a numerical control unit that controls the driving unit. Any of the laser oscillation devices described above that generate laser light is provided.

  With this configuration, in addition to the same effects as described above, the laser oscillation device is comprehensively controlled by the numerical control means, so that the reliability of the laser processing can be improved and the introduction of defective products of the workpiece can be prevented.

  As described above, the present invention eliminates the need to change the setting value of the laser output setting unit corresponding to the beam mode used when changing the laser output, and frequently changes the laser beam mode and laser power. Even when processing is performed, the work can be simplified, and at the same time, the setting of the laser output can be unified and the excessive laser output irradiation can be prevented.

  In addition, since the high-voltage power supply output is not increased above a certain value, the use efficiency of the high-voltage power supply is improved and the generation of thermal saturation in the laser resonator is prevented, thereby stabilizing the laser output and improving the reliability. Can be planned.

  Hereinafter, the best mode for carrying out the present invention will be described with reference to FIGS.

(Embodiment 1)
FIG. 1 is a block diagram of Embodiment 1 of the laser oscillation apparatus of the present invention.

  In FIG. 1, the laser oscillation apparatus of this embodiment includes laser beams 1 and 2, an output mirror 3 constituting a laser resonator, a reflecting mirror 4 constituting a laser resonator, a discharge tube 5 made of a dielectric, and an anode electrode 6. , A cathode electrode 7, a high voltage power supply 8 for supplying power to the laser resonator via the anode electrode 6 and the cathode electrode 7, a heat exchanger 9 for lowering the laser gas temperature, a blower 10 for circulating the laser gas, a gas circulation tube 11, An integrating sphere 12 for diffusing a minute laser beam, a photodetector 13 for measuring the power of the laser beam output from the laser resonator, an aperture 20 for shaping the beam mode, and an aperture 20 inserted in the optical path to switch the output beam mode. Beam mode switching means 21, laser output setting unit 22 for setting the set value of the output of the laser beam from the laser resonator, and signals from the laser output setting unit 22 And an output command calculation means 23 for holding the output signal from the laser output setting unit 22 so as not to exceed the voltage value corresponding to each beam mode in synchronization with beam mode switching, A comparator 24 that compares the output signal of the detector 13 with a set value of the laser output setting unit 22 and feeds back to the high voltage power supply 8, an amplifier 25 that amplifies the photodetector signal, and a beam mode switching to the beam mode switching means 21. A control device 30 for outputting a signal is provided.

  The structure is such that an anode electrode 6 and a cathode electrode 7 are arranged at both ends of the discharge tube 5, and these anode electrode 6 and cathode electrode 7 are connected to a high voltage power source 8 to discharge laser gas inside the discharge tube 5. Yes. A gas circulation tube 11 is connected to the discharge tube 5, and a heat exchanger 9, a blower 10, and a heat exchanger 9 are arranged in the middle of the gas circulation tube 11 so that the laser gas circulates. In this embodiment, laser gas is allowed to flow from the anode electrode 6 to the cathode electrode 7. In the present embodiment, two discharge tubes 5 are connected to face each other, but they may be arranged in parallel and folded back by a reflecting mirror to be optically connected, or one or more than three may be connected. Good.

  At each end where the discharge tubes 5 are not connected, the output mirror 3 and a reflecting mirror 4 composed of a partial reflecting mirror having a transmittance of about 0.5% and a reflectance of 99.5% are arranged to form a laser resonator. Is configured. The laser resonator outputs a high-power laser beam 1 from the output mirror 3, while the reflecting mirror 4 outputs a low-power laser beam 2 in proportion to the laser beam 1.

  The output of the laser beam 1 is detected by measuring the laser output of the laser beam 2 with a laser beam detector comprising the integrating sphere 12 and the photodetector 13 provided on the integrating sphere 12. Yes.

  The measured signal from the photodetector 13 is input to the comparator 24 via the amplifier 25.

  Further, a set value signal (voltage value) V 1 of the laser light output from the laser output setting unit 22 is input to the output command calculation means 23, and an output signal V 4 from the output command calculation means 23 is input to the comparator 24. I am doing so.

  The comparator 24 compares the input output signal V4 with the signal from the amplifier 25. When the laser output is less than a predetermined value, the comparator 24 gives a power increase command, and when the laser output exceeds a predetermined value, the power decrease command. When the laser output is a predetermined value, a command to keep the current power is output to the high voltage power supply 8 as a power command.

  Further, an aperture 20 is disposed in the vicinity of the output mirror 3 of the laser resonator described above, and the beam mode of the laser beam is switched by switching the aperture 20.

  The aperture 20 is switched by beam mode switching means 21 connected to the aperture 20.

  A control device 30 is connected to the beam mode switching means 21 so that the beam mode is switched by a signal from the control device 30.

  The control device 30 outputs a signal (voltage data) V2 to the output command calculation means 23 in synchronism with the output of the signal to the beam mode switching means 30.

  The operation of the laser oscillation apparatus configured as described above will be described.

  In this laser oscillation device, a laser gas is circulated in the discharge tube 5. A high voltage power supply 8 connected to the anode electrode 6 and the cathode electrode 7 provided around the discharge tube 5 generates a discharge in the discharge tube 5. The laser gas is excited by the discharge and is output as laser light 1 to the outside through the reflecting mirror 4 and the output mirror 3. Laser gas is sent by a blower 10 inside a gas circulation tube 11 that forms a laser gas circulation path together with the discharge tube 5, and a heat exchanger 9 is arranged to lower the temperature of the laser gas raised by the discharge and blower 10. Has been.

  The reflecting mirror 4 outputs a minute laser beam 2 proportional to the laser beam 1 irradiated from the laser resonator by a mirror having a transmittance of about 0.5% and a reflectance of 99.5%. This laser beam 2 is converted into an electrical signal by a laser beam detector composed of an integrating sphere 12 and a photodetector 13, and is output to a comparator 24 via an amplifier 25.

  On the other hand, the set value signal set by the laser output setting unit 22 is converted into an output command optimal for the beam mode by the output command calculation means 23 and input to the comparator 24. The comparator 24 compares the output signal of the amplifier 25 with the feedback signal to the high voltage power supply 8 as a power supply command signal.

  The aperture 20 installed on the laser beam path in the laser resonator is in a state that can be selected by the beam mode switching means 21 according to the beam mode of the laser beam by the control signal of the control device 30, and is welded and quenched. It can be switched according to the processing application such as cutting. At the same time, the control device 30 outputs a reference voltage switching signal, a reference voltage data signal, and the like as control signals to the output command calculation means 23 and the power supply command calculation means 26 according to the beam mode of the laser beam. Since the reference voltage switching signal, the reference voltage data signal, and the like are stored in the control device 30 as initial values for each beam mode, it is easy to cope with the mode switching.

  FIG. 2 shows an example of the laser light intensity distribution in the higher order mode when the aperture is not used, and FIG. 3 shows an example of the laser light intensity distribution in the lower order mode when the aperture is used.

  It is suitable for welding and quenching as high-order mode applications when no aperture is used, and suitable for cutting as a low-order mode application when using apertures.

  FIG. 4 is a circuit configuration diagram showing an example of the configuration of the output command calculation means.

  In FIG. 4, the output command calculation means 23 is clipped based on the clip data 41 that suppresses the input signal V1 from the laser output setting unit 22 that is equal to or higher than the reference voltage to the reference voltage value, and the voltage data V2 that is input from the control device 30. A reference voltage unit 42 for outputting a reference voltage V3 to the means 41 is provided.

  The clip means 41 receives the input signal V1 from the laser output setting unit 22 and the reference voltage V3 from the reference voltage unit 42, and the calculation that inputs the output of the operational amplifier 43 and outputs the output signal V4. The reference voltage unit 42 includes a DA converter 45 that DA converts the voltage data V2 from the control device 30 and outputs a reference voltage V3.

  The operation of the output command calculation means configured as described above will be described.

  A reference voltage V3 is generated by the DA converter 45 of the reference voltage unit 42 based on a reference voltage switching signal or a reference voltage data signal synchronized with the beam mode switching signal from the control device 30 and output to the operational amplifier 43.

  When the set value signal V1 is input from the laser output setting unit 22, it is compared with the reference voltage V3. When the set value signal V1 is equal to or lower than the reference voltage V3, the voltage value V1 is output as a voltage signal by the operational amplifier 44. Is done.

  However, when the set value of the laser output setting unit 22 is higher than the reference voltage V3, it is clipped by the operational amplifier 43 and the same voltage value as the reference voltage V3 is output from the operational amplifier 44 as an output signal.

  By providing the reference voltage unit 42 in this way, switching to the beam mode is facilitated, and an accurate voltage command is supplied to the comparator 24, thereby improving the stability of the laser output.

  Further, since the reference voltage unit 42 is configured by the DA converter 45, the setting value stored in the control device 30 can be switched more accurately, so that it is stable against aging.

  Although the DA converter 45 is used for the reference voltage unit 42, the present invention is not limited to this element, and the reference voltage may be switched and controlled using a resistor and a switching element.

  Thus, by changing the reference voltage of the reference voltage section such as the reference voltage switching signal and the reference voltage data signal synchronized with the beam mode switching signal from the control device 30, the optimum laser output command value for each beam mode is selected. And stable laser light can be output.

  FIG. 5 shows the relationship between the laser output command value input of the output command calculation means and the output command calculation output.

  In the high-order mode, the laser output command value input is output as the output command as it is, but in the low-order mode, the laser output command value input is clipped at the point P1 and the input voltage rises. The output command does not rise above a certain value.

  As described above, according to the present embodiment, excessive laser output irradiation can be prevented by clipping the laser output command value with a voltage value corresponding to the beam mode. In addition, when changing the laser output output from the laser oscillation device, it is not necessary to change the setting value of the laser output setting unit corresponding to the beam mode of each laser beam, and the beam mode and laser power of the laser beam are frequently changed. Simplification of the work can also be realized when laser processing is performed with changes.

  In the laser oscillation device having the above configuration, each component is provided with a control element and controlled in each signal processing or each configuration. However, the laser oscillation device is provided with a CPU connected to each configuration. You may make it control each process collectively.

(Embodiment 2)
FIG. 6 is a block diagram of Embodiment 2 of the laser oscillation apparatus of the present invention.

  In FIG. 6, the laser oscillation device of this embodiment includes laser beams 1 and 2, an output mirror 3 constituting a laser resonator, a reflecting mirror 4 constituting a laser resonator, a discharge tube 5 made of a dielectric, and an anode electrode 6. , A cathode electrode 7, a high voltage power supply 8 for supplying power to the laser resonator via the anode electrode 6 and the cathode electrode 7, a heat exchanger 9 for lowering the laser gas temperature, a blower 10 for circulating the laser gas, a gas circulation tube 11, An integrating sphere 12 for diffusing a minute laser beam, a photodetector 13 for measuring the power of the laser beam output from the laser resonator, an aperture 20 for shaping the beam mode, and an aperture 20 inserted in the optical path to switch the output beam mode. Beam mode switching means 21, laser output setting unit 22 for setting the set value of the output of the laser beam from the laser resonator, output signal and laser of the photodetector 13 The comparator 24 that compares the set value of the output setting unit 22 and feeds back to the high voltage power supply 8, the amplifier 25 that amplifies the photodetector signal, and the signal from the control device 30 are input and compared in synchronization with the beam mode switching. Power supply command calculation means 26 for holding the output signal of the device 24 so as not to exceed the voltage value corresponding to each beam mode, and a control device 30 for outputting a beam mode switching signal to the beam mode switching means 21.

  In the present embodiment, the output command calculation unit 23 of the first embodiment is deleted, and the setting value signal (voltage value) V1 of the laser light output of the laser output setting unit 22 is input to the comparator 24. A power supply command for inputting a signal V5 as a comparison result from the device 24 and inputting a signal (voltage data) V6 synchronized with a beam mode switching signal from the control device 30 and outputting the signal V8 to the high voltage power supply 8 The difference from the first embodiment is that the calculation means 26 is provided between the comparator 24 and the high voltage power supply 8.

  Since other structures and operations are the same as those of the first embodiment, the same reference numerals are given and description thereof is omitted.

  FIG. 7 is a block diagram of the power supply command calculation means 26. The power supply command calculation means 26 is a clip means 51 for suppressing an input signal equal to or higher than the reference voltage among the input signals V5 from the comparator 24 to a reference voltage value, and a control device. A reference voltage unit 52 that outputs a reference voltage V7 to the clip means 51 based on voltage data V6 input from 30 is provided.

  The clip means 51 receives an input signal V5 from the comparator 24 and a reference voltage V7 from the reference voltage unit 52, and an operational amplifier 54 that receives the output of the operational amplifier 53 and outputs an output signal V8. The reference voltage unit 52 includes a DA converter 55 that DA converts the voltage data V6 from the control device 30 and outputs a reference voltage V7.

  By providing the reference voltage unit 52, switching to the beam mode is facilitated, and an accurate voltage command is supplied to the high voltage power source, thereby improving the stability of the laser output.

  In addition, since the reference voltage unit 52 is configured by the DA converter 55, switching can be performed more accurately with the set value stored in the control device 30, so that it is stable against aging.

  The operation of the power supply command calculation means configured as described above will be described.

  A reference voltage V7 is generated by the DA converter 55 of the reference voltage unit 52 based on a reference voltage switching signal or a reference voltage data signal synchronized with the beam mode switching signal from the control device 30 and output to the operational amplifier 53.

  When the comparison result signal V5 is inputted from the comparator 24, it is compared with the reference voltage V7. When the set value signal V5 is equal to or lower than the reference voltage V7, the voltage value V5 is outputted as a voltage signal by the operational amplifier 54. .

  However, when the comparison result signal V5 of the comparator 24 is higher than the reference voltage V7, it is clipped by the operational amplifier 53 and the same voltage value as the reference voltage V7 is output from the operational amplifier 54 as an output signal.

  Although the reference voltage unit 52 has been described using the DA converter 55, the present invention is not limited to this element, and the reference voltage may be switched and controlled using a resistor and a switching element.

  As described above, by changing the reference voltage of the reference voltage unit such as the reference voltage switching signal and the reference voltage data signal synchronized with the beam mode switching signal from the control device 30, an optimum power command signal for each beam mode can be selected. Stable laser light without aging can be output.

  FIG. 8 shows the relationship between the power command input and the power command calculation output of the power command calculation means.

  In the high-order mode, the power command input is output as the power command output as it is, but in the low-order mode, the power command input is clipped at the point P2 and the output command is output even if the input voltage rises. It does not rise above a certain value.

  As described above, according to the present embodiment, when changing the laser output output from the laser oscillation device, it is not necessary to change the set value corresponding to the beam mode of each laser beam, and the laser beam is frequently Simplification of work can also be realized when laser processing is performed by changing the beam mode or laser power.

  In addition, by clipping the command to the high voltage power supply with a voltage value corresponding to the beam mode, the output of the high voltage power supply is not increased above a certain value, so that the utilization efficiency of the high voltage power supply is not significantly reduced. Further, it is possible to prevent the laser output from being lowered by generating thermal saturation in the laser resonator.

  In the laser oscillation device having the above configuration, each component is provided with a control element and controlled in each signal processing or each configuration. However, the laser oscillation device is provided with a CPU connected to each configuration. You may make it control each process collectively.

(Embodiment 3)
FIG. 9 is a block diagram of Embodiment 3 of the laser oscillation apparatus of the present invention.

  In FIG. 9, the laser oscillation device of this embodiment includes laser beams 1 and 2, an output mirror 3 constituting a laser resonator, a reflecting mirror 4 constituting a laser resonator, a discharge tube 5 made of a dielectric, and an anode electrode 6. , A cathode electrode 7, a high voltage power supply 8 for supplying power to the laser resonator via the anode electrode 6 and the cathode electrode 7, a heat exchanger 9 for lowering the laser gas temperature, a blower 10 for circulating the laser gas, a gas circulation tube 11, An integrating sphere 12 for diffusing a minute laser beam, a photodetector 13 for measuring the power of the laser beam output from the laser resonator, an aperture 20 for shaping the beam mode, and an aperture 20 inserted in the optical path to switch the output beam mode. Beam mode switching means 21, laser output setting unit 22 for setting the set value of the laser beam output from the laser resonator, and signals from the laser output setting unit 22 And an output command calculation means 23 for holding the output signal from the laser output setting unit 22 so as not to exceed the voltage value corresponding to each beam mode in synchronization with beam mode switching, The comparator 24 that compares the output signal of the detector 13 with the set value of the laser output setting unit 22 and feeds back to the high voltage power supply 8, the amplifier 25 that amplifies the photodetector signal, and the signal from the control device 30 are input. Control for outputting a beam mode switching signal to the power supply command calculation means 26 and the beam mode switching means 21 for holding the output signal of the comparator 24 so as not to exceed the voltage value corresponding to each beam mode in synchronization with the beam mode switching. A device 30 is provided.

  In this embodiment, the second embodiment is added to the first embodiment. In the first embodiment, the power command calculation means 26 of the second embodiment is provided between the comparator 24 and the high voltage power supply 8. Is.

  Since the output command calculation unit 23, the power supply command calculation means 26, and the overall structure and operation, which are the characteristics of the present embodiment, are the same as those in the first and second embodiments, the same reference numerals are given and the description thereof is omitted.

  As described above, according to the present embodiment, excessive laser output irradiation can be prevented by clipping the laser output command value with a voltage value corresponding to the beam mode. In addition, when changing the laser output output from the laser oscillation device, it is not necessary to change the setting value of the laser output setting unit corresponding to the beam mode of each laser beam, and the beam mode and laser power of the laser beam are frequently changed. Simplification of the work can also be realized when laser processing is performed with changes.

  In addition, by clipping the command to the high voltage power supply with a voltage value corresponding to the beam mode, the output of the high voltage power supply is not increased above a certain value, so that the utilization efficiency of the high voltage power supply is not significantly reduced. Further, it is possible to prevent the laser output from being lowered by generating thermal saturation in the laser resonator.

  Furthermore, even if the laser output command is commanded incorrectly, the output command is limited by the output command calculation means, so that irradiation of excessive laser output is prevented, and the command to the high voltage power supply is limited by the power command calculation means, The apparatus can be prevented from being damaged without generating an excessive voltage or an excessive current from the high-voltage power supply, and the safety and reliability of the laser oscillation device can be further improved.

  In the laser oscillation device having the above configuration, each component is provided with a control element and controlled in each signal processing or each configuration. However, the laser oscillation device is provided with a CPU connected to each configuration. You may make it control each process collectively.

(Embodiment 4)
FIG. 10 shows a configuration diagram of the laser beam machine according to Embodiment 4 of the present invention.

  The laser processing machine includes a processing table 63 on which a processing workpiece 64 is placed, a driving unit 62 that moves at least one of a movement of the processing table 63 or a condensing unit 67 that collects laser light, and a numerical value that controls the driving unit 62. The control unit 61, the laser oscillation device 65 described in any of the first to third embodiments, and the laser beam path 66 are included.

  The laser beam emitted from the laser oscillation device 65 is transmitted through a laser beam path 66 composed of a folding mirror or the like, collected by the focusing unit 67, irradiated onto the workpiece 64, and processing is started. At the same time, a command is output to the drive means 62 by the numerical control means 61, and the workpiece 64 is machined by operating at least one of the machining table 63 or the light collecting means 67.

  According to the laser processing machine, the laser output command can be commanded under the same processing conditions regardless of the beam mode switching, and the workability is improved. Further, even when the laser output command is wrong, it is possible to prevent the irradiation of the laser beam that is larger than that of the laser oscillation device, and to accurately irradiate the output power of the laser beam.

  Furthermore, since the laser oscillation device is comprehensively controlled by the numerical control means, it is possible to improve the reliability of laser processing and to prevent defective products from being mixed into the workpiece.

  INDUSTRIAL APPLICABILITY The laser oscillation device and laser processing machine of the present invention can prevent excessive laser output irradiation and simplify the laser output setting work, and are useful for laser oscillation devices and laser processing machines having a beam mode selection function. It is.

Block diagram of Embodiment 1 of the laser oscillation apparatus of the present invention High-order mode laser light intensity distribution diagram when no aperture is used Low-order mode laser beam intensity distribution when using aperture FIG. 3 is a circuit configuration diagram of an output command calculation unit according to the first embodiment of the present invention. FIG. 3 is a relationship diagram between a laser output command value input and an output command calculation output of the output command calculation means according to the first embodiment of the present invention. The block diagram in Embodiment 2 of the laser oscillation apparatus of this invention The circuit block diagram of the power supply command calculating means of Embodiment 2 of this invention FIG. 6 is a relationship diagram between the power command input and the power command calculation output of the power command calculation means according to the second embodiment of the present invention. The block diagram in Embodiment 3 of the laser oscillation apparatus of this invention Configuration diagram of laser beam machine in Embodiment 4 of the present invention Relationship diagram between high voltage power output and laser output

DESCRIPTION OF SYMBOLS 1 Laser beam 2 Laser beam 3 Output mirror 4 Reflecting mirror 5 Discharge tube 6 Anode electrode 7 Cathode electrode 8 High voltage power supply 9 Heat exchanger 10 Blower 11 Gas circulation tube 12 Integrating sphere 13 Photo detector 20 Aperture 21 Beam mode switching means DESCRIPTION OF SYMBOLS 22 Laser output setting part 23 Output command calculating means 24 Comparator 25 Amplifier 26 Power supply command calculating means 30 Control apparatus 41 Clip means 42 Reference voltage part 43, 44 Operational amplifier 45 DA converter 51 Clip means 52 Reference voltage part 53, 54 Calculation Amplifier 55 DA converter

Claims (12)

A laser resonator provided with a beam mode switching means for switching an output beam mode; a high-voltage power supply for supplying power to the laser resonator; a photodetector for measuring laser light output from the laser resonator; A laser output setting unit that sets a set value of the output of the laser beam from the laser resonator, and compares the output signal of the photodetector with the set value of the laser output setting unit and feeds back to the high voltage power source A control device that outputs a beam mode switching signal to the beam mode switching means, inputs a signal from the laser output setting unit and a signal from the control device, and performs beam mode switching. Output command calculation means for holding the output signal from the laser output setting unit in synchronism so as not to exceed a voltage value corresponding to each beam mode. Laser oscillation device provided between the comparator and over The output setting unit. The output command calculation unit includes a reference voltage unit that changes corresponding to each beam mode, and a clip unit that suppresses an input signal equal to or higher than a reference voltage among input signals from the laser output setting unit to a reference voltage value. The laser oscillation device according to claim 1. 3. The laser oscillation device according to claim 2, wherein the reference voltage unit includes a DA converter that changes a setting value corresponding to each beam mode stored in the control device in synchronization with a beam mode switching signal. A laser resonator provided with a beam mode switching means for switching an output beam mode; a high-voltage power supply for supplying power to the laser resonator; a photodetector for measuring laser light output from the laser resonator; A laser output setting unit that sets a set value of the output of the laser beam from the laser resonator, and compares the output signal of the photodetector with the set value of the laser output setting unit and feeds back to the high voltage power source And a comparator that outputs a beam mode switching signal to the beam mode switching means, inputs a signal from the controller, and outputs the comparator in synchronization with beam mode switching. A laser oscillation device in which power supply command calculation means for holding a signal so as not to exceed a voltage value corresponding to each beam mode is provided between the comparator and the high voltage power supply. . The power command calculation means includes a reference voltage unit that changes corresponding to each beam mode, and a clip means that suppresses an input signal that is equal to or higher than a reference voltage among input signals from the comparator to a reference voltage value. 4. The laser oscillation device according to 4. 6. The laser oscillation device according to claim 5, wherein the reference voltage unit includes a DA converter that changes a set value corresponding to each beam mode stored in the control device in synchronization with a beam mode switching signal. A laser resonator provided with a beam mode switching means for switching an output beam mode; a high-voltage power supply for supplying power to the laser resonator; a photodetector for measuring laser light output from the laser resonator; A laser output setting unit for setting a set value of the output of laser light from the laser resonator, and a comparator for comparing the output signal of the photodetector with the set value of the laser output setting unit and feeding back to the high voltage power source A control device that outputs a beam mode switching signal to the beam mode switching means, inputs a signal from the laser output setting unit and a signal from the control device, and synchronizes with the beam mode switching Output command calculation means for holding the output signal from the output setting unit so as not to exceed the voltage value corresponding to each beam mode, the laser output setting unit and the ratio A power supply command calculation means for inputting a signal from the control device and holding the output signal of the comparator so as not to exceed a voltage value corresponding to each beam mode in synchronization with beam mode switching. A laser oscillation device provided between the comparator and the high voltage power source. The output command calculation means includes a reference voltage section that changes corresponding to each beam mode, and clip means that suppresses an input signal that is equal to or higher than a reference voltage among input signals from the laser output setting section to a reference voltage value. Item 8. The laser oscillation device according to Item 7. 9. The laser oscillation device according to claim 8, wherein the reference voltage unit includes a DA converter that changes a setting value corresponding to each beam mode stored in the control device in synchronization with a beam mode switching signal. 8. The power supply command calculation means includes a reference voltage unit that changes corresponding to each beam mode, and a clip means that suppresses an input signal that is equal to or higher than a reference voltage among input signals from the comparator to a reference voltage value. The laser oscillation apparatus in any one of 9. The laser oscillation device according to claim 10, wherein the reference voltage unit includes a DA converter that changes a setting value corresponding to each beam mode stored in the control device in synchronization with a beam mode switching signal. A laser beam is generated from a processing table on which a workpiece is placed, a driving unit that moves at least one of a movement of the processing table and a laser beam condensing unit, a numerical control unit that controls the driving unit, and a laser beam. A laser processing machine comprising the laser oscillation device according to any one of 11.

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