JP2010210580A5 - - Google Patents
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- JP2010210580A5 JP2010210580A5 JP2009059804A JP2009059804A JP2010210580A5 JP 2010210580 A5 JP2010210580 A5 JP 2010210580A5 JP 2009059804 A JP2009059804 A JP 2009059804A JP 2009059804 A JP2009059804 A JP 2009059804A JP 2010210580 A5 JP2010210580 A5 JP 2010210580A5
- Authority
- JP
- Japan
- Prior art keywords
- state
- glass substrate
- bonding position
- warpage
- concave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Description
このような接着位置ずれを生じた状態で室温に冷却して熱膨張が元に戻った場合、接着位置が初期の（加熱前の）接着位置に対して若干外側にずれていることにより、室温状態では保護体15がガラス基板16に対して接着層34を介して内側に引張る応力を生じる。このため、ガラス基板16自体はガラス基板16の保護体15側の面側が凹む凹反りを呈することになる。このガラス基板16の凹反り量は加熱状態での凸反り量に比べて絶対値としては数分の一程度に小さく、この凹反りにより接着位置を内側に戻そうとする力は、加熱時の外側にずらそうとする応力に比べて十分に小さい。そのため、室温に戻した状態でのガラス基板16の凹反りは、殆どその状態を維持し続ける。あるいは元の平坦な状態に漸近するにしても、かなりの長時間を要する。 When the thermal expansion is restored after cooling to room temperature in such a state where the bonding position is shifted, the bonding position is slightly shifted outward from the initial bonding position (before heating). In this state, the protective body 15 generates a stress that pulls the glass substrate 16 inward via the adhesive layer 34. Therefore, the glass substrate 16 itself exhibits a concave warp in which the surface of the glass substrate 16 on the protective body 15 side is recessed. The amount of concave warpage of this glass substrate 16 is about a fraction of the absolute value compared to the amount of convex warpage in the heated state, and the force to return the bonding position to the inside by this concave warpage is It is sufficiently small compared to the stress to be shifted outward. For this reason, the concave warpage of the glass substrate 16 in the state where the temperature is returned to room temperature almost maintains that state. Alternatively, even if asymptotic to the original flat state, a considerable time is required.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009059804A JP5305996B2 (en) | 2009-03-12 | 2009-03-12 | Radiation detector and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009059804A JP5305996B2 (en) | 2009-03-12 | 2009-03-12 | Radiation detector and manufacturing method thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010210580A JP2010210580A (en) | 2010-09-24 |
| JP2010210580A5 true JP2010210580A5 (en) | 2012-03-15 |
| JP5305996B2 JP5305996B2 (en) | 2013-10-02 |
Family
ID=42970892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009059804A Active JP5305996B2 (en) | 2009-03-12 | 2009-03-12 | Radiation detector and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5305996B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5647581B2 (en) * | 2010-11-29 | 2015-01-07 | 富士フイルム株式会社 | Radiography equipment |
| JP5629593B2 (en) | 2011-02-01 | 2014-11-19 | 株式会社東芝 | Radiation detector |
| US8415628B1 (en) * | 2011-10-31 | 2013-04-09 | General Electric Company | Hermetically sealed radiation detector and methods for making |
| JP6200173B2 (en) * | 2013-03-21 | 2017-09-20 | キヤノン株式会社 | Radiation detection apparatus and radiation detection system |
| JP6270450B2 (en) * | 2013-12-13 | 2018-01-31 | キヤノン株式会社 | Radiation detection apparatus, radiation detection system, and method of manufacturing radiation detection apparatus |
| JP2016061655A (en) | 2014-09-17 | 2016-04-25 | 株式会社東芝 | Scintillator, radiation detector and radiation inspector |
| JPWO2019244610A1 (en) * | 2018-06-22 | 2021-07-08 | 富士フイルム株式会社 | Radiation detector and radiation imaging device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4612815B2 (en) * | 2004-08-10 | 2011-01-12 | キヤノン株式会社 | Radiation detection apparatus, scintillator panel, manufacturing method thereof, and radiation detection system |
| JP4921180B2 (en) * | 2006-01-25 | 2012-04-25 | キヤノン株式会社 | Radiation detection apparatus and radiation imaging system |
| WO2008117821A1 (en) * | 2007-03-27 | 2008-10-02 | Kabushiki Kaisha Toshiba | Scintillator panel and radiation detector |
| JP5004848B2 (en) * | 2007-04-18 | 2012-08-22 | キヤノン株式会社 | Radiation detection apparatus and radiation detection system |
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2009
- 2009-03-12 JP JP2009059804A patent/JP5305996B2/en active Active
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