JP2010209403A - Current introducing structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a current introducing structure capable of keeping a vacuum state in a vacuum chamber, and enhancing durability by preventing electrolytic corrosion in a cooling medium storage part. <P>SOLUTION: The current introducing structure 20 for introducing the current in an auxiliary anode 9 in a film deposition chamber 3 comprises a water-cooling jacket 15 for storing a coil 17 and cooling water Wa, an insulation conductor part 19 forming the excessive portion of the coil 17, and a sealing structure part 23 which is provided to the outer peripheral wall part 15e of the water-cooling jacket 15 and exposes the tip of the insulation conductor part 19 to the vacuum side with the insulation conductor part 19 penetrating therethrough while keeping the vacuum around the water-cooling jacket 15. As a result, any contact need not be provided between the insulation conductor part 19 and other conductor parts in the water-cooling jacket 15 for storing cooling water Wa, any possibility of electrolytic corrosion caused by the cooling water Wa can be reduced, and the durability of the coil 17 can be enhanced. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a current introduction structure for introducing a current into a coil which is disposed in a vacuum chamber such as a film forming apparatus and functions as an auxiliary anode around a main hearth, for example.

  In a film forming apparatus using the RPD method or the like, high-density plasma is focused directly on a tablet as a film forming material, and as a result, the tablet is sublimated and diffused to adhere to an upper substrate to form a film. This type of film forming apparatus (see Patent Document 1) includes a vacuum chamber in which a film forming process is performed, and a plasma gun that emits a plasma beam is attached to a side wall of the vacuum chamber. The bottom of the vacuum chamber is provided with a main hearth for holding a tablet as a film forming material and focusing a plasma beam. Further, an auxiliary anode (also referred to as “ring hearth”) surrounding the main hearth is arranged around the main hearth.

  As shown in FIG. 6, a mode in which an electromagnet 102 including an electromagnet coil 101 is known as the auxiliary anode 100 is known. In this aspect, it is necessary to prevent the auxiliary anode 100 from being heated by heat generated by the electromagnet 102 and the radiant heat of the plasma beam. For example, the auxiliary anode 100 is cooled and protected by a water cooling method. In the case of the water cooling method, the auxiliary anode 100 is provided with a water cooling jacket 103 that accommodates the cooling water Wa introduced from the cooling water pipe. Since the inside of the water cooling jacket 103 that accommodates the coil 101 and the cooling water Wa is in the atmosphere side state, when the current is drawn into or extracted from the coil 101 from the outside of the water cooling jacket 103, the vacuum chamber 104 is structurally held in vacuum. It is necessary to consider. Therefore, normally, the current is introduced into the coil 101 by using the current introduction terminal 105 which is airtightly attached to the outer wall of the water cooling jacket 103.

  The current introduction terminal 105 is made of a conductor and is airtightly attached to the water cooling jacket 103 via an insulator. An external terminal 105a is provided outside the current introduction terminal 105, that is, on the vacuum side, and the lead wire 106 wired in the vacuum chamber 104 is connected to the external terminal 105a by pressure bonding. An inner terminal 105b is provided inside the current introduction terminal 105, that is, on the atmospheric pressure side for accommodating the cooling water Wa. A lead wire 107 that leads to the coil 101 is crimped to the internal terminal 105b.

JP-A-7-316794

  However, in the conventional structure for introducing a current into the coil 101 accommodated in the water cooling jacket 103, the crimp connection point between the lead wire 107 from the coil 101 and the inner terminal 105b of the current introduction terminal 105 is the cooling water Wa. Therefore, there is a possibility that electrolytic corrosion may occur at the crimping connection portion, and there is room for improvement from the viewpoint of improving durability.

  An object of the present invention is to solve the above-described problems, and is a current introduction structure capable of maintaining the vacuum state in the vacuum chamber and improving the durability by preventing the electrolytic corrosion in the cooling medium accommodating portion. The purpose is to provide.

  The present invention relates to a cooling medium housing portion for housing a coil and a cooling medium in a current introduction structure for covering the insulating film and introducing a current to the coil disposed in the vacuum chamber so that the coil functions as an electromagnet. And an insulating conductor portion that is an excess part of the coil and an outer wall of the cooling medium housing portion, and the insulating conducting wire portion penetrates while maintaining a vacuum around the cooling medium housing portion to vacuum the tip of the insulating conducting wire portion. And a seal structure exposed to the side.

  According to the present invention, the insulated conductor portion that is an excess portion of the coil penetrates the seal structure portion, and the tip is exposed to the vacuum side. Therefore, it is not necessary to provide a contact point between the insulated conductor portion and the other conductor portion in the cooling medium accommodating portion for accommodating the cooling medium, and the risk of electrolytic corrosion due to the cooling medium can be reduced. As a result, the durability of the coil can be improved.

  Furthermore, the seal structure part includes a main body part through which the insulated conductor part penetrates, an outer seal part that seals an outside that is a vacuum side of the insulated conductor part that penetrates the main body part, and an inner side of the insulated conductor part that penetrates the main body part. It is preferable to have an inner seal portion for sealing. Since the hermeticity can be maintained by the seal structure of at least two stages of the outer seal portion and the inner seal portion, the vacuum can be maintained more surely, and at least one of the outer seal portion and the inner seal portion must function. Since the vacuum can be maintained, it is resistant to deterioration and it is easy to improve durability.

  The seal structure portion includes a main body portion through which the insulated conductor portion penetrates, and a seal portion that is attached to the main body portion and surrounds and seals the insulated conductor portion that penetrates the main body portion in an annular shape. It is preferable that it can be attached to the outer wall of the cooling medium housing portion with the seal portion attached. Before the main body is mounted on the outer wall of the cooling medium housing portion, the sealing portion can be attached to the main body to form a reliable sealing state, so that it is easy to achieve both airtightness and reduced burden associated with the mounting work. .

  Furthermore, a through-hole for mounting the main body is formed in the outer wall of the cooling medium accommodating portion. The main body is fitted into the through-hole, and the cylindrical portion through which the insulated conductor portion penetrates, and the cooling medium accommodating It is preferable to have an overhanging portion that comes into contact with the outer wall of the portion and is airtightly fixed. According to this configuration, it is possible to easily ensure airtightness by fitting the main body portion to the through hole so that the overhanging portion is brought into contact with the outer wall of the cooling medium housing portion.

  Further, a through hole for mounting the main body is formed on the outer wall of the cooling medium accommodating portion. The main body has a cylindrical portion that fits into the through hole and through which the insulated conductor portion passes, and is sealed. The part is inserted from one end side of the cylindrical part, and is attached to the one end part side of the cylindrical part with an annular and elastic seal member that is fitted around the insulated conductor part. It is preferable to have a seal compression part that penetrates the insulated conductor part and presses the seal member. According to this configuration, airtightness can be easily ensured by compressive deformation of the seal member.

  ADVANTAGE OF THE INVENTION According to this invention, while maintaining the vacuum state in a vacuum chamber, the electrical corrosion in a cooling medium accommodating part can be prevented, and durability can be aimed at.

It is sectional drawing which shows a film-forming apparatus typically. It is sectional drawing which shows the electric current introduction structure which concerns on embodiment of this invention. It is sectional drawing along the III-III line of FIG. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3. It is sectional drawing of a seal structure part, (a) is sectional drawing along the Va-Va line | wire of FIG. 3, (b) is sectional drawing along the Vb-Vb line | wire of FIG.3 (b). It is sectional drawing which shows the conventional electric current introduction structure.

  Hereinafter, a preferred embodiment of a current introduction structure according to the present invention will be described with reference to the drawings. First, a film forming apparatus to which the current introduction structure according to this embodiment is applied will be described.

  As shown in FIG. 1, a film forming apparatus 1 is an apparatus for forming a film on a substrate W by an RPD (reactive plasma vapor deposition) method, and adopts a conveyance form commonly called an inline type. The film forming apparatus 1 includes a vacuum film forming chamber (vacuum chamber) 3 in which a film forming process is performed, and the substrate W is transported along the predetermined path above the film forming chamber 3.

  A pressure gradient type plasma gun 5 is provided on the side wall of the film forming chamber 3, and a main hearth 7 holding a tablet T as a film forming material and an auxiliary anode (“ 9) is also provided. The plasma beam B irradiated from the plasma gun 5 is guided to the main hearth 7 to be focused, and the tablet T is sublimated and diffused. The substrate W is formed by sublimated evaporated particles.

  As shown in FIGS. 2 and 3, the auxiliary anode 9 includes a permanent magnet 11 that annularly surrounds the vicinity of the upper portion of the main hearth 7 and is slightly eccentric with respect to the axis of the main hearth 7. Is provided with an annular electromagnet 13 arranged concentrically with the permanent magnet 11. The auxiliary anode 9 includes an annular (doughnut-shaped) water cooling jacket 15 that houses the permanent magnets 11 and the electromagnets 13 arranged in two upper and lower stages. Cooling water (cooling medium) Wa is accommodated in the water cooling jacket 15 to cool and protect the auxiliary anode 9 and the main hearth 7 from the heat generated by the electromagnet 13 and the radiant heat from the plasma beam B. The plasma beam B is guided by the magnetic field of the auxiliary anode 9. Further, by adjusting the electromagnet 13 of the auxiliary anode 9, the flight direction distribution of the evaporated particles can be controlled, and as a result, the film thickness distribution can be made uniform.

  The coil 17 constituting the electromagnet 13 is formed by a wound lead wire (see FIG. 5) 17a, and an electrically insulating film (insulating film) 17b is coated over the entire length of the lead wire 17a. Has been. As a form of the lead wire 17a covered with the insulating film 17b, for example, a form in which the outer periphery of the lead wire 17a is covered with a double or more heat shrinkable tube such as a fluorine heat shrinkable flexible tube is preferable. A lead wire 19 (hereinafter referred to as “insulated conductor portion”) 19 that protrudes from the current drawing side of the coil 17 and the current drawing side of the coil 17 protrudes through the insulated conductor portion 19. As a result, the coil 17 functions as the electromagnet 13.

  Hereinafter, the current introduction structure 20 for causing the coil 17 to function as the electromagnet 13 will be described. The current introduction structure 20 according to the present embodiment includes structures on both the current drawing side and the drawing side of the current to the coil 17, but the structure on the drawing side and the drawing side is the same, so the drawing side is taken as an example. Detailed description on the drawer side will be omitted.

  A circular plate-like connecting portion 7 a projecting radially outward is provided at the lower portion of the main hearth 7. An annular electrically insulating portion 7b is attached to the upper surface of the connecting portion 7a along the periphery, and the connecting portion 7a is fixed to the support plate 21 via the electrically insulating portion 7b. The support plate 21 is formed with a circular hole 21a from which the main hearth 7 protrudes. An annular electrical insulating portion 21b surrounding the main hearth 7 is disposed on the upper surface of the support plate 21, and an annular water cooling jacket 15 is fixed to the upper surface of the electrical insulating portion 21b. A cooling water Wa introduced from the cooling water pipe is accommodated in the water cooling jacket 15.

  The water cooling jacket 15 is made of a conductor such as copper, and includes a base portion 15a fixed on the support plate 21 and a cover portion 15b attached on the base portion 15a. The cover portion 15b is formed in a bag shape so as to cover the upper surface of the base portion 15a, and is bolted to the base portion 15a in an airtight manner through gaskets 15m and 15n such as O-rings. An annular (doughnut-shaped) appearance is formed in a state where the cover portion 15b and the base portion 15a are integrated.

  The cover portion 15b has an inverted U-shaped cross section, and has an inner peripheral wall portion 15d facing the main hearth 7 and an outer peripheral wall portion 15e. A through hole 15 f is formed in the outer peripheral wall portion 15 e through which the insulated conductor portion 19 protruding from the coil 17 as an excessive portion is passed. The through hole 15f is fitted with a seal structure 23 for maintaining airtightness between the inner side and the outer side of the water cooling jacket 15.

  The seal structure portion 23 includes a main body portion 25 attached to the through hole 15f. The main body 25 includes a cylindrical portion 25a that fits in the through hole 15f, and a rectangular protruding portion 25b that protrudes radially outward from the vicinity of the center of the outer periphery of the cylindrical portion 25a. A seal member 25k such as an O-ring is mounted on the projecting portion 25b on the contact surface with the outer peripheral wall portion 15e, and a flat contact surface 15g that contacts the projecting portion 25b is formed on the outer peripheral wall portion 15e. . The overhang portion 25b is bolted to the outer peripheral wall portion 15e, and as a result, the sealing member 25k abuts against the contact surface 15g so as to surround the through hole 15f, and the airtightness is maintained.

  The insulated conductor portion 19 protruding as an excess portion of the coil 17 extends through the cylindrical portion 25 a of the main body portion 25. When inserted into the through hole 15f of the outer peripheral wall portion 15e, the cylindrical portion 25a has one end portion 25c facing the outside (vacuum side) of the water cooling jacket 15 and the other end facing the inside, that is, the inside of the water cooling jacket 15. 25d. An outer seal portion 27 that seals around the insulated conductor portion 19 is attached to one end portion 25c side of the cylindrical portion 25a, and an inner side that seals around the insulated conductor portion 19 is attached to the other end portion 25d side. A seal portion 29 is attached.

  Near the center of the cylindrical portion 25a, an annular seal member abutting portion 25e protruding in the radially inward direction is provided, and one end portion 25c of the cylindrical portion 25a is provided with a male screw (screwed portion). 25f is formed. An annular gasket (seal member) 31 passed through the insulated conductor portion 19 is inserted into the cylindrical portion 25a from the one end portion 25c side. The gasket 31 is made of a fluorine-based elastic rubber. After the gasket 31 is inserted, a metal flanged sleeve 33 is inserted into the cylindrical portion 25a, and then the cap nut 35 is screwed and fastened to the male screw 25f of the cylindrical portion 25a. The cap nut 35 is formed with a hole 35a through which the insulated conductor portion 19 passes.

  When the cap nut 35 is tightened, the inner surface of the cap nut 35 comes into contact with the flange of the flanged sleeve 33 and presses the flanged sleeve 33 toward the inside of the cylindrical portion 25a, that is, the seal member contact portion 25e side. The flanged sleeve 33 abuts on the gasket 31 and receives compression from the cap nut 35 to compress and deform the gasket 31. As a result, the gasket 31 seals around the insulated conductor portion 19. The outer seal compression portion 37 is configured by the flanged sleeve 33 and the cap nut 35. Further, the gasket 31 surrounds the insulated conductor 19 in an annular shape on the outer side (vacuum side) than the seal member abutting portion 25e, and is sandwiched between the seal compression portion 37 and the seal member abutting portion 25e so as to be insulated. It seals around 19 and functions as an outer sealing member.

  A female screw (threaded portion) 25g is formed at the other end 25d of the cylindrical portion 25a. An annular gasket (seal member) 39 passed through the insulated conductor 19 is inserted from the other end 25d side. The gasket 39 is made of a fluorine-based elastic rubber. After the gasket 39 is inserted, a metal threaded sleeve 41 through which the insulated conductor portion 19 is passed is screwed and fastened to the other end portion 25d of the cylindrical portion 25a.

  When the threaded sleeve 41 is tightened, the tip of the threaded sleeve 41 abuts on the gasket 39 and compresses and deforms the gasket 39. As a result, the gasket 39 seals around the insulated conductor portion 19. The threaded sleeve 41 corresponds to the inner seal compression part. The gasket 39 annularly surrounds the insulated conductor 19 on the inner side (atmosphere side) of the seal member abutting portion 25e, and is sandwiched between the threaded sleeve 41 and the seal member abutting portion 25e so as to be insulated. It seals around 19 and functions as an inner sealing member.

  Further, a lead wire protection portion 43 that covers and protects the insulated conductor portion 19 is bolted to the outer surface of the overhang portion 25 b of the main body portion 25. The insulated conducting wire portion 19 penetrating the seal structure portion 23 and exposed to the vacuum side passes through the lower portion of the lead wire protecting portion 43, and the leading end of the insulated conducting wire portion 19 is a current introduction terminal provided at the bottom of the film forming chamber 3. 45. The current introduction terminal 45 penetrates the outer wall of the film forming chamber 3 in an airtight manner, and an external terminal 45 a connected to the external lead wire 47 is provided at a portion protruding to the outside of the film forming chamber 3. Current is drawn into the insulated conductor portion 19 through the external lead wire 47 and the current introduction terminal 45, and further, current is introduced into the coil 17 through the insulated conductor portion 19. The tip of the insulated conductor 19 for drawing current from the coil 17 is also connected to the current introduction terminal 45 and connected to another external lead wire.

  Next, a procedure for assembling the current introduction structure 20 will be described. As the water-cooled jacket 15 is fixed at a predetermined position so as to accommodate the permanent magnet 11 and the electromagnet 13, the insulated conductor portion 19 serving as an excess portion of the coil 17 is pulled out from the through hole 15f of the cover portion 15b. Next, after the seal structure portion 23 is passed through the insulated lead wire portion 19 drawn outward from the through hole 15f, the seal structure portion 23 is attached to the through hole 15f. Here, the insulated conductor portion 19 is passed through the threaded sleeve 41, the gasket 39, the main body portion 25, the gasket 31, the flanged sleeve 33, and the cap nut 35 in this order.

  Next, gaskets 31 and 39 are inserted from both ends of the cylindrical portion 25a of the main body portion 25, respectively. Thereafter, the flanged sleeve 33 is inserted from the one end portion 25c side, and the cap nut 35 is screwed and tightened. Further, the threaded sleeve 41 is screwed and tightened from the other end 25d side of the cylindrical portion 25a. As a result, the outer gasket 31 is compressed and can be easily sealed around the outer insulated conductor 19, and the inner gasket 39 can be compressed and easily sealed around the inner insulated conductor 19. .

  After the outer seal portion 27 and the inner seal portion 29 are attached to the main body portion 25 to form a reliable sealing state, the main body portion 25 is inserted into the through hole 15f, and the overhang portion 25b is bolted to the outer peripheral wall portion 15e. . Thus, in the current introduction structure 20 according to the present embodiment, the outer seal portion 27 and the inner seal are attached to the main body portion 25 before the main body portion 25 of the seal structure portion 23 is airtightly attached to the through hole 15f of the water cooling jacket 15. Since the part 29 can be attached to form a reliable sealed state, it is easy to achieve both airtightness and reduction of the burden associated with the attaching operation.

  As described above, according to the current introduction structure 20 according to the present embodiment, the insulated conductive wire portion 19 serving as the surplus portion of the coil 17 penetrates the seal structure portion 23 and the tip is exposed to the vacuum side. Accordingly, there is no need to provide a contact between the insulated conductor portion 19 and the other conductor portion in the water cooling jacket 15 that accommodates the cooling water Wa, the risk of electrolytic corrosion due to the cooling water Wa can be reduced, and the durability of the coil 17 can be reduced. Can be improved. In addition, although the front-end | tip of the insulated conducting wire part 19 is connected to the electric current introduction | transduction terminal 45, since this connection location is in a vacuum, it is not influenced by corrosion etc.

  Further, in the conventional current introduction structure (see FIG. 6), since the crimp connection of the lead wire 107 in the water cooling jacket 103 is necessary, it is essential to perform the caulking process on the crimp connection part. The drying process was also necessary. On the other hand, in the present embodiment, since the terminal connection of the insulated conductor portion 19 is performed on the vacuum side, the caulking work and the drying time of the connection place are omitted, and further, no skill is required for the assembly, Efficiency can be improved.

  Further, in this embodiment, since the airtightness can be maintained by the seal structure of at least two stages of the outer seal portion 27 and the inner seal portion 29, the vacuum can be more reliably realized. If at least one of the seal portions 29 is functioning, the vacuum can be maintained, so that it is resistant to deterioration and the durability can be easily improved.

  Furthermore, the outer peripheral wall portion 15e of the water cooling jacket 15 is formed with a through hole 15f for mounting the main body portion 25, and the main body portion 25 is fitted into the through hole 15f and the cylinder through which the insulated conductor portion 19 passes. And a projecting portion 25b that comes into contact with the outer peripheral wall portion 15e of the water cooling jacket 15 and is airtightly fixed. According to this configuration, it is possible to easily ensure airtightness by fitting the main body portion 25 to the through hole 15f so that the overhang portion 25b contacts the outer peripheral wall portion 15e.

  Further, the outer seal portion 27 is inserted from the end portion 25c side of the tubular portion 25a, and has an annular and elastic gasket 31 that is fitted around the insulated conductor portion 19, and an end portion 25c of the tubular portion 25a. The insulation conducting wire part 19 penetrates and the seal compression part 37 that presses the gasket 31 is mounted on the side. The inner seal portion 29 is inserted from the end portion 25d side of the tubular portion 25a, and has an annular and elastic gasket 39 that fits around the insulated conductor portion 19, and an end portion 25d of the tubular portion 25. And a threaded sleeve (seal compressing portion) 41 that presses the gasket 39 while being attached to the side. According to this configuration, it is possible to easily ensure airtightness by compressive deformation of the gaskets 31 and 39 corresponding to the seal members.

  As mentioned above, although this invention was concretely demonstrated based on the embodiment, this invention is not limited to the said embodiment. For example, in the above-described embodiment, the water cooling jacket is shown as the cooling medium accommodating portion, and the seal structure attached to the water cooling jacket has been described as an example. However, the insulated conductor portion penetrates the outer wall of the water cooling jacket, and the insulated conductor portion is A mode in which a seal structure is provided by directly assembling a seal member or the like on the penetrating outer wall may be used.

  DESCRIPTION OF SYMBOLS 3 ... Film-forming chamber (vacuum chamber), 13 ... Electromagnet, 15 ... Water cooling jacket (cooling medium accommodating part), 15e ... Outer peripheral wall part (outer wall of cooling medium accommodating part), 15f ... Through-hole, 17 ... Coil , 17b ... insulating film, 19 ... insulated lead wire part, 20 ... current introduction structure, 23 ... seal structure part, 25 ... main body part, 25a ... cylindrical part, 25b ... overhang part, 25c, 25d ... end part of cylindrical part 27 ... Outer seal part (seal part) 29 ... Inner seal part (seal part) 31 ... Gasket (seal member) 37 ... Seal compression part 39 ... Gasket (seal member) 41 ... Threaded sleeve (seal Compression section), Wa ... cooling water (cooling medium).

Claims (5)

In the current introduction structure for covering the insulating film and introducing the current to the coil disposed in the vacuum chamber so that the coil functions as an electromagnet.
A cooling medium accommodating portion for accommodating the coil and the cooling medium;
An insulated conductor portion that becomes an excess portion of the coil;
A seal structure part that is provided on an outer wall of the cooling medium accommodation part and that allows the insulating conductor part to penetrate therethrough while maintaining a vacuum around the cooling medium accommodation part to expose the tip of the insulating conductor part to the vacuum side; A current introduction structure comprising: The seal structure is
A main body portion that penetrates the insulated conductor portion, an outer seal portion that seals the vacuum side of the insulated conductor portion that penetrates the main body portion, and an inner side of the insulated conductor portion that penetrates the main body portion are sealed. The current introduction structure according to claim 1, further comprising an inner seal portion. The seal structure is
A main body portion through which the insulated conductor portion penetrates, and a seal portion that is attached to the main body portion and surrounds and seals the insulated conductor portion that penetrates the main body portion in an annular shape,
The current introduction structure according to claim 1, wherein the main body portion can be attached to an outer wall of the cooling medium housing portion in a state where the seal portion is attached. A through-hole for mounting the main body portion is formed on the outer wall of the cooling medium housing portion,
The main body has a tubular portion that fits into the through-hole, penetrates through the insulated conductor portion, and an overhanging portion that comes into contact with the outer wall of the cooling medium housing portion and is airtightly fixed. 4. The current introduction structure according to claim 3, wherein A through-hole for mounting the main body portion is formed on the outer wall of the cooling medium housing portion,
The main body portion has a cylindrical portion that fits into the through hole and through which the insulated conductive wire portion passes,
The seal portion is inserted from one end side of the tubular portion, and is an annular and elastic seal member that is externally fitted to the insulated conducting wire portion, and one end portion side of the tubular portion The current introduction structure according to claim 3, further comprising: a seal compression portion that is attached to the insulation conductor portion and penetrates the insulated conductor portion and presses the seal member.

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