JP2010192808A - Electron beam drawing device, and device and method for controlling power for heating cathode of electron gun of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam drawing device capable of suppressing variation of power supplied to a cathode of an electron gun even when the resistance value of the cathode varies; and to provide a device and method for controlling power for heating the cathode of the electron gun of the same. <P>SOLUTION: Power outputted from a power source 11 is transmitted to a secondary side by an insulation transformer 12, and supplied to a cathode 1. A current value and a voltage value supplied to the cathode 1 are measured, and the measured current and voltage values are subjected to AD conversion by an AD conversion part 16. Based on the current and voltage values subjected to the AD conversion, the resistance value of the cathode 1 is calculated by a resistance value calculation part 19. Based on the calculated latest resistance value and one or more resistance values calculated before them, a resistance value to be calculated next is estimated by a minimum estimation error filter 20. Based on the estimated resistance value, a current setting value of the power source 11 is changed by a control part 21. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electron beam drawing apparatus having an improved power control apparatus that controls power for cathode heating of an electron gun, a power control apparatus that controls power for cathode heating of the electron gun of the drawing apparatus, and a power control method.

  As an electron gun used for an electron beam drawing apparatus, a thermionic emission electron gun and a field emission electron gun (FEG) are known.

  The general thermoelectron emission electron gun shown in FIG. 9 mainly includes an emitter (also referred to as “filament”) as a cathode 1, a Wehnelt electrode 2 to which a negative bias voltage is applied, and a grounded anode 3. It has.

The cathode emitter 1 emits electrons when heated, and is made of, for example, lanthanum boride (LaB ₆ ). By supplying power for heating the cathode from the power control circuit 4, the cathode 1 is heated to a temperature of about 1800K.

  The electrons emitted from the cathode 1 are once converged at the crossover point CP by the electric field generated by the bias voltage applied to the Wehnelt electrode 2 and are applied to the anode 3 by the electric field generated by the acceleration voltage (for example, −50 kV). It is accelerated toward. Thereby, the electron beam B is emitted from the electron gun.

  It is known to draw a pattern on a mask for manufacturing an LSI using an electron beam drawing apparatus to which this type of thermionic emission electron gun is applied. In order to draw with high accuracy, it is necessary to maintain the current density of the electron beam constant. For this purpose, it is necessary to control the temperature of the cathode 1 to be constant. Therefore, the power supplied from the power control circuit 4 to the cathode 1 is controlled to be constant.

  FIG. 10 is a schematic diagram showing a configuration of a conventional power control device 40. Electric power from a cathode heating power source (hereinafter referred to as “power source”) 41 is transmitted to the secondary side (high voltage side) of the insulating transformer 42 and then supplied to the cathode 1 via the rectifier 43. Then, a current value and a voltage value are measured by an ammeter 44 and a voltmeter 45 provided on the primary side of the insulating transformer 42. The measured current value and voltage value are multiplied by the multiplier 46 to obtain a power value, and the current value of the power supply 41 is changed based on the obtained power value and a predetermined power setting value. Thereby, the power supplied to the cathode 1 is feedback-controlled.

  However, in this power control device 40, since the current value and voltage value supplied to the secondary cathode 1 of the insulating transformer 42 are not measured, there is a problem that the accuracy of feedback control is lowered.

  A field emission electron gun is known that measures the primary-side current value of an insulating transformer and approximates the secondary-side current value from the measured current value (see, for example, Patent Document 1).

  By the way, the resistance value of the cathode largely fluctuates due to the change with time (see FIG. 4). In some cases, the resistance value may vary by about 1%. When the resistance value of the cathode fluctuates in this way, the power supplied to the cathode fluctuates greatly in the power control by the power control device 40 shown in FIG. As a result, the temperature of the cathode is changed, and the current density of the electron beam is changed. As described above, since the fluctuation of the current density reduces the drawing accuracy, the cathode must be replaced. Since the electron beam lithography apparatus cannot be used while replacing the cathode, it is desired to extend the life of the cathode.

  As described above, in order to extend the life of the cathode, it is necessary to suppress fluctuations in the power supplied to the cathode even if the resistance value of the cathode fluctuates. It was difficult to suppress fluctuations in the supplied power.

JP-A-5-283031

  In view of the above problems, an object of the present invention is to provide an electron beam drawing apparatus capable of suppressing fluctuations in power supplied to the cathode even if the resistance value of the cathode of the electron gun fluctuates, and the electron beam drawing apparatus An object is to provide a power control device and a power control method for heating a cathode of an electron gun.

  In order to solve the above-described problem, a first aspect of the present invention is an electron beam lithography apparatus including a power control device that controls power for cathode heating of an electron gun, wherein the power control device includes power output from a power source. An insulation transformer for transmitting the voltage to the secondary side, a current value measurement unit for measuring a current value flowing through the cathode connected to the secondary side of the insulation transformer, and a voltage value measurement unit for measuring a voltage value applied to the cathode; An analog-to-digital conversion unit that converts the current value and the voltage value, a resistance value calculation unit that calculates a resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit, and a resistance value calculation unit And a control unit that changes the current setting value of the power supply based on the calculated resistance value.

  According to a second aspect of the present invention, there is provided an electron beam lithography apparatus including a power control apparatus that controls power for heating a cathode of an electron gun. The power control apparatus supplies power output from a power source to a secondary side. Insulating transformer for transmission, current value measuring unit for measuring the current value flowing in the cathode connected to the secondary side of the insulating transformer, voltage value measuring unit for measuring the voltage value applied to the cathode, current value and voltage An analog-to-digital conversion of the value, a resistance value calculation unit that calculates the resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit, and the latest value calculated by the resistance value calculation unit Based on the resistance value and at least one or more resistance values calculated before that, a resistance value estimation unit that estimates a resistance value to be calculated next, and a resistance value estimated by the resistance value estimation unit , Electric Characterized by comprising a control unit for changing the current setpoint.

  In the second aspect, the resistance value estimation unit can be configured by a minimum estimation error filter that estimates a resistance value in accordance with a sequential least square algorithm.

  According to a third aspect of the present invention, there is provided a power control apparatus that controls power for cathode heating of an electron gun of an electron beam lithography apparatus, an insulation transformer that transmits power output from a power source to a secondary side, and insulation A current value measuring unit that measures a current value flowing through the cathode connected to the secondary side of the transformer, a voltage value measuring unit that measures a voltage value applied to the cathode, and an AD that converts the current value and the voltage value from analog to digital A conversion unit; a resistance value calculation unit that calculates a resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit; and a current of the power source based on the resistance value calculated by the resistance value calculation unit And a control unit for changing the set value.

  According to a fourth aspect of the present invention, there is provided a power control device that controls power for cathode heating of an electron gun of an electron beam lithography apparatus, an insulation transformer that transmits power output from a power source to a secondary side, and insulation A current value measuring unit that measures a current value flowing through the cathode connected to the secondary side of the transformer, a voltage value measuring unit that measures a voltage value applied to the cathode, and an AD that converts the current value and the voltage value from analog to digital Based on the conversion unit, the current value and the voltage value converted by the AD conversion unit, the resistance value calculation unit that calculates the resistance value of the cathode, the latest resistance value calculated by the resistance value calculation unit, and the previous resistance value A resistance value estimation unit that estimates a resistance value to be calculated next based on at least one resistance value that is calculated in step (b), and a current setting value of the power source based on the resistance value estimated by the resistance value estimation unit. Change Characterized by comprising a control unit.

  In the fourth aspect, the resistance value estimation unit can be configured by a minimum estimation error filter that estimates a resistance value according to a sequential least square algorithm.

  According to a fifth aspect of the present invention, there is provided a power control method for controlling power for heating a cathode of an electron gun of an electron beam lithography apparatus, wherein a current value supplied to a cathode connected to a secondary side of an insulation transformer and A step of measuring a voltage value, a step of analog-digital conversion of the current value and the voltage value, a step of calculating a resistance value of the cathode based on the current value and the voltage value after the analog-digital conversion, and the calculated resistance value And a step of changing a current setting value of a power source connected to the primary side of the isolation transformer.

  According to a sixth aspect of the present invention, there is provided a power control method for controlling power for heating a cathode of an electron gun of an electron beam lithography apparatus, wherein a current value supplied to a cathode connected to a secondary side of an insulating transformer and A step of measuring a voltage value, a step of analog-to-digital conversion of the current value and the voltage value, a step of calculating a resistance value of the cathode based on the current value and the voltage value after the analog-digital conversion, and the latest resistance value, A step of estimating a resistance value to be calculated next based on at least one or more resistance values calculated before that, and a power supply connected to the primary side of the isolation transformer based on the estimated resistance value And a step of changing the current set value.

  According to the first and third aspects of the present invention, the current value and voltage value of the cathode are AD converted by the AD conversion unit, and the resistance value of the cathode is calculated by the resistance value calculation unit based on the current value and voltage value after AD conversion. Since the control unit is configured to change the current setting value of the power source based on the calculated resistance value, even if the resistance value of the cathode of the electron gun fluctuates, the power supplied to the cathode is calculated. Variations can be suppressed.

  According to the second and fourth aspects of the present invention, the current value and voltage value of the cathode are AD-converted by the AD conversion unit, and the resistance value of the cathode is calculated by the resistance value calculation unit based on the current value and voltage value after AD conversion. A resistance value estimator that estimates a resistance value to be calculated next, based on the latest resistance value and at least one or more resistance values calculated before that value. Based on the first and third aspects, since the current setting value of the power source is changed by the control unit based on the above, even if the resistance value of the cathode of the electron gun fluctuates, Can be further suppressed.

  According to the fifth aspect of the present invention, the cathode current value and voltage value are AD converted, the cathode resistance value is calculated based on the current value and voltage value after AD conversion, and the cathode resistance value is calculated based on the calculated resistance value. By changing the current setting value of the power supply, even if the resistance value of the cathode of the electron gun fluctuates, fluctuations in the power supplied to the cathode can be suppressed.

  According to the sixth aspect of the present invention, the current value and voltage value of the cathode are AD-converted, and the cathode resistance value is calculated based on the current value and voltage value after AD conversion. And estimating a resistance value to be calculated next based on at least one resistance value calculated in advance, and changing the current setting value of the power source based on the estimated resistance value to Even when the resistance value fluctuates, fluctuations in the power supplied to the cathode can be further suppressed than in the fifth aspect.

1 is a schematic diagram showing a configuration of an electron beam drawing apparatus 100 in Embodiment 1 of the present invention. In Embodiment 1 of this invention, it is the schematic which shows the structure of the electric power control apparatus 10 for the cathode heating of an electron gun. In Embodiment 1 of this invention, it is a flowchart explaining the electric power control method for cathode heating. It is a figure which shows the change of the resistance value of a cathode. In Embodiment 1 of this invention, (a) is a figure which shows the change of the setting electric current value of a power supply, (b) is a figure which shows the fluctuation | variation of the electric power supplied to a cathode. In Embodiment 2 of this invention, it is the schematic which shows the structure of the electric power control apparatus 30 for the cathode heating of an electron gun. In Embodiment 2 of this invention, it is a flowchart explaining the electric power control method for cathode heating. In Embodiment 2 of this invention, (a) is a figure which shows the change of the setting electric current value of a power supply, (b) is a figure which shows the fluctuation | variation of the electric power supplied to a cathode. It is the schematic which shows the structure of a general thermoelectron emission type electron gun. It is the schematic which shows the structure of the electric power control apparatus 40 for the conventional cathode heating. It is the schematic which shows the structure of the electric power control apparatus 50 for the cathode heating of an electron gun. (A) is a figure which shows the change of the setting electric current value of a power supply, (b) is a figure which shows the fluctuation | variation of the electric power supplied to a cathode.

  Hereinafter, embodiments of the present invention will be described in detail.

  As described above, even if the power value is obtained from the current value and voltage value measured on the primary side of the isolation transformer, and the power source current is changed based on the obtained power value and the set power value, the power supplied to the cathode It was difficult to suppress fluctuations.

  Therefore, as shown in FIG. 11, a power control device 50 that measures the current value and voltage value supplied to the cathode 1 on the secondary side of the insulating transformer 52 can be considered. In this power control device 50, the current value and voltage value are measured by an ammeter 54 and a voltmeter 55 provided on the secondary side of the insulating transformer 52, and the measured current value and voltage value are converted into voltage / frequency (hereinafter “V”). / F ”) is converted into a frequency signal by the converters 56A and 56B and transmitted to the primary side of the insulating transformer 52 via a transmission line such as an optical fiber cable. The transmitted signal is converted into a voltage signal by frequency / voltage (hereinafter referred to as “F / V”) converters 57 </ b> A and 57 </ b> B and is input to the calculator 58. The computing unit 58 computes the resistance value of the cathode 1 from the current value and the voltage value, and changes the current setting value of the power source 51 based on the computed resistance value.

  According to the power control device 50 shown in FIG. 11, the current setting value of the power source 51 is normally changed with a period B of 1 sec to 10 sec. That is, when there is a change in the resistance value of the cathode as shown by the solid line L1 in FIG. 4, the current setting value of the power supply 51 is changed in the cycle B as shown in FIG. When the current setting value of the power source 51 is changed in this way, the power supplied to the cathode 1 changes as shown in FIG.

  FIG. 1 is a conceptual diagram showing a configuration of an electron beam drawing apparatus according to Embodiment 1 of the present invention. The electron beam drawing apparatus 100 shown in FIG. 1 includes a drawing unit 150 and a control unit 160.

  The drawing unit 150 includes an electron column 102 and a drawing chamber 103. In the electron column 102, an electron gun 201, an illumination lens 202, a blanking (BLK) deflector 218, a blanking (BLK) aperture 219, a first shaping aperture 203, a shaping lens 204, a shaping deflector 205, a first 2 shaping aperture 206, reduction lens 216, objective lens 207, sub deflector 212, and main deflector 214 are arranged. In the drawing chamber 103, an XY stage 105 on which a mask blank as the sample M is placed is arranged so as to be movable in the XY directions.

  The electron gun 201 has an emitter that is a cathode 1, a Wehnelt electrode 2, and an anode 3. The anode 3 is grounded (ground fault).

  The control unit 160 includes an electron gun power supply 230 and a drawing control circuit 240. In the electron gun power source 230, a cathode heating power control device (hereinafter referred to as “power control device”) 10, an acceleration power source 232, and a bias power source 234 are provided. The power control device 10 controls the power supplied to the cathode 1 to be constant in order to heat the cathode (emitter) 1 to about 1800K, for example. The acceleration power source 232 applies a predetermined acceleration voltage (for example, −50 kV) to the cathode 1. The bias power source 234 applies a bias voltage (Wernert voltage) to the Wehnelt electrode 2 so that the emission current detected by an ammeter (not shown) becomes a target value.

  In FIG. 1, constituent parts necessary for explaining the first embodiment are shown. Needless to say, the electron beam drawing apparatus 100 normally includes other necessary components.

  The electron beam 200 emitted from the electron gun 201 illuminates the entire first shaping aperture 203 having a rectangular hole, for example, a rectangular hole, by the illumination lens 202. Here, the electron beam 200 is first formed into a rectangle, for example, a rectangle. Then, the electron beam 200 of the first aperture image that has passed through the first shaping aperture 203 is projected onto the second shaping aperture 206 by the shaping lens 204. The position of the first aperture image on the second shaping aperture 206 is deflection-controlled by the shaping deflector 205, and the beam shape and dimensions can be changed. As a result, the electron beam 200 is shaped. The electron beam 200 of the second aperture image that has passed through the second shaping aperture 206 is reduced by the reduction lens 216, focused by the objective lens 207, and deflected by the main deflector 214 and the sub deflector 212. . As a result, the electron beam 200 is irradiated to a desired position on the sample M on the XY stage 105 that moves continuously. The deflection voltages of the main deflector 214 and the sub deflector 212 are controlled by the drawing control unit 240.

  Further, when the electron beam 200 on the sample reaches an irradiation time in which a desired irradiation amount is incident on the sample M, the BLK deflector 218 deflects the electron beam 200 and the BLK aperture 219 cuts the electron beam 200. The deflection voltage of the BLK deflector 218 is controlled by the drawing control unit 240. In addition, the inside of the electron column 102 and the drawing chamber 103 are evacuated by a vacuum pump (not shown) to form a vacuum atmosphere in which the pressure is lower than the atmospheric pressure.

  FIG. 2 is a schematic diagram showing a configuration of the power control apparatus 10 in the electron beam drawing apparatus 100.

  The power control apparatus 10 includes an insulating transformer 12 that transmits power from the power source 11 to the secondary side (high voltage side). The power transmitted to the secondary side of the insulating transformer 12 is rectified by the rectifier 13 and then supplied to the cathode 1. On the secondary side of the insulation transformer 12, an ammeter 14 and a voltmeter 15 for measuring the current value and the voltage value supplied to the cathode 1, and the measured current value and voltage value are analog / digital (hereinafter referred to as “A / A 20-bit A / D converter 16 for converting the signal and a P / S converter 17 for converting the digital signal after the A / D conversion into parallel / serial (hereinafter referred to as “P / S”). ing. According to such a configuration, the current value and voltage value supplied to the cathode 1 can be sampled on the order of μsec.

  The primary side (low voltage side) of the insulating transformer 12 is serial / parallel (hereinafter referred to as “S / P”) S connected to the P / S converter 17 via a transmission line such as an optical fiber cable. / P conversion unit 18, resistance value calculation unit 19 that calculates a resistance value from the current value and voltage value after S / P conversion, and the current of power supply 11 based on the resistance value calculated by resistance value calculation unit 19 A control unit 21 is provided for controlling the power supplied to the cathode 1 to be a predetermined power setting value by changing the value.

  Next, a power control method for heating the cathode will be described with reference to FIG.

  According to the flowchart shown in FIG. 3, first, a target power value is set in the control unit 21 (step S10). This target power value is a value for controlling the cathode 1 to a desired temperature (for example, 1800 K). When the power value is set in step S10, power is output from the power supply 11. This electric power is transmitted to the secondary side of the insulating transformer 12, further rectified by the rectifier 13, and then supplied to the cathode 1.

  Next, the current value and voltage value supplied to the cathode 1 are measured by the ammeter 14 and the voltmeter 15 (step S11). The measured current value and voltage value are A / D converted by the A / D converter 16 (step S12). The signal after A / D conversion is P / S converted by the P / S converter 17 and then transmitted to the S / P converter 18 via the transmission path. Then, the resistance value of the cathode 1 is calculated by the resistance value calculation unit 19 from the current value and the voltage value subjected to S / P conversion by the S / P conversion unit 18 (step S13).

  Next, it is determined whether or not the timing at which the latest resistance value is calculated in step S13 is a predetermined timing (step S14). In this step S14, it is determined whether or not a predetermined time A has elapsed since the previous change of the current set value of the power supply 11, that is, whether or not feedback control is to be performed. The predetermined time A can be set within a range of 1 msec to 10 msec, for example. If it is determined in step S14 that the predetermined timing is reached, the current setting value of the power supply 11 is changed based on the resistance value calculated in step S13 (step S15). That is, feedback control is executed. Thereafter, this routine is temporarily terminated.

  On the other hand, if it is determined in step S14 that the predetermined timing is not reached, the routine is temporarily terminated without changing the current set value of the power source 11, that is, without performing feedback control. In this case, sampling of current value and voltage value and calculation of resistance value are performed. Therefore, the sampling period is shorter than the feedback period A.

  When this routine is started again after the next time, first, the same target power value as the previous time is set in step S10. Thereafter, the current value and the voltage value are measured in step S11, and further, the processing after step S12 is performed.

  According to the power control device 10, the current setting value of the power source 11 is normally changed in a cycle A of 1 msec to 10 msec shorter than the cycle B. That is, if there is a change in the resistance value of the cathode 1 as indicated by the solid line L1 in FIG. 4, the current setting value of the power source 11 is changed in the cycle A as shown in FIG. When the current setting value of the power supply 11 is changed in this way, the power supplied to the cathode 1 changes to FIG. Note that the time t0 shown in FIG. 4 and the time t0 shown in FIG. 5 are the same time.

  As described above, in the first embodiment, the current value and the voltage value measured on the secondary side of the insulating transformer 12 are A / D converted by the 20-bit A / D conversion unit 16 and then the resistance value is calculated on the primary side. Then, based on the calculated resistance value, the current value of the power source 11 is changed at a period A of 1 msec to 10 msec, thereby comparing with the power fluctuation (see FIG. 12B) controlled by the power control device 50. Thus, fluctuations in the power supplied to the cathode 1 can be suppressed (see FIG. 5B). Thereby, the temperature fluctuation of the cathode 1 can be reduced and the fluctuation of the current density of the electron beam can be suppressed, so that the drawing accuracy of the electron beam drawing apparatus can be improved. In addition, since fluctuations in power are suppressed, oscillation of supply power can be prevented.

  Next, with reference to FIG. 6, the power control apparatus 30 for cathode heating of the electron gun in Embodiment 2 of this invention is demonstrated. This power control apparatus 30 can be applied to the electron beam drawing apparatus 100 instead of the power control apparatus 10 shown in FIG.

  The power control apparatus 30 according to the second embodiment is different from the power control apparatus 10 according to the first embodiment in that a minimum estimation error filter 20 is provided between the resistance value calculation unit 19 and the control unit 21.

When the time when the latest resistance value is calculated by the resistance value calculation unit 19 is denoted by t _i , the minimum estimated error filter 20 and the latest resistance value calculated at this time t _i and the previous time t _i−1 , A digital filter that estimates a resistance value calculated at the next time t _{i + 1} according to a sequential least squares (RLS) algorithm using at least one resistance value calculated in t _i-2 ,. It is. As the resistance values calculated at the times t _i−1 , t _i−2 ,..., Those stored in an internal or external memory (not shown) may be read and used. The number of resistance values to be read can be set in the range of several hundred to several thousand. According to the minimum estimation error filter 20, it is possible to estimate a change in the resistance value of the cathode 1, as indicated by a broken line L2 in FIG. The control unit 21 changes the current setting value of the power source 11 based on the estimated resistance value.

  Next, a power control method for cathode heating using the power control device 30 will be described with reference to FIG. The flowchart shown in FIG. 7 is different from the flowchart shown in FIG. 3 in that steps S16 and S17 are included.

  According to the flowchart shown in FIG. 7, similarly to the flowchart shown in FIG. 3, the target power value is set in the control unit 21 (step S10), the current value and the voltage value are measured (step S11), and A / D conversion is performed. Then, the resistance value of the cathode 1 is calculated (step S13).

And the latest resistance value at the time t _{i when} the latest resistance value is calculated by the minimum estimation error filter 20 and the resistance values calculated at the previous times t _i−1 , t _i−2 ,. Using, the resistance value calculated at the next time t _{i + 1} is estimated according to the RLS algorithm (step S16).

Next, similarly to the flowchart shown in FIG. 3, it is determined whether or not the timing (time t _i ) at which the latest resistance value is calculated in step S13 is a predetermined timing (step S14). That is, it is determined whether or not a predetermined time A has elapsed since the timing when the current set value of the power supply 11 was changed last, that is, whether or not feedback control is performed. The predetermined time A can be set within a range of 1 msec to 10 msec, for example.

  When it is determined in step S14 that the predetermined timing is reached, the control unit 21 changes the current setting value of the power supply 11 based on the resistance value estimated in step S16 (step S17). That is, feedback control is executed. Thereafter, this routine is temporarily terminated.

  On the other hand, if it is determined in step S14 that the predetermined timing is not reached, this routine is temporarily terminated without changing the current set value of the power supply 11.

  According to the power control device 30, when there is a variation in the resistance value of the cathode 1 as indicated by the solid line L1 in FIG. 4, the variation in the resistance value can be estimated in advance as indicated by the broken line L2 in FIG. . Based on the estimated resistance value, the current setting value of the power supply 11 is changed in the period A as shown in FIG. In this way, by changing the current setting value based on the estimated resistance value, fluctuations in the power supplied to the cathode 1 compared to the fluctuations in power controlled by the power control apparatus 10 (see FIG. 5B). (Refer to FIG. 8B.) As a result, the temperature fluctuation of the cathode 1 can be further reduced as compared with the first embodiment, and the fluctuation of the current density of the electron beam is further suppressed. Therefore, it is possible to further improve the drawing accuracy of the electron beam drawing apparatus 100. Further, similarly to the first embodiment, since fluctuations in the power supplied to the cathode 1 are suppressed, oscillation of the supplied power is possible. Can be prevented.

DESCRIPTION OF SYMBOLS 1 Cathode 10, 30 Power control apparatus 11 Power supply 12 Insulation transformer 13 Rectifier 14 Ammeter (current value measurement part)
15 Voltmeter (Voltage measurement unit)
16 A / D conversion unit 19 Resistance value calculation unit 20 Minimum estimation error filter (resistance value prediction unit)
21 control unit 100 electron beam drawing apparatus

Claims (6)

In an electron beam drawing apparatus equipped with a power control device that controls the power for heating the cathode of the electron gun,
The power control device
An isolation transformer that transmits power output from the power source to the secondary side;
A current value measuring unit for measuring a current value flowing through the cathode connected to the secondary side of the insulating transformer;
A voltage value measuring unit for measuring a voltage value applied to the cathode;
An AD converter for analog-to-digital conversion of the current value and the voltage value;
A resistance value calculation unit that calculates a resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit;
An electron beam drawing apparatus comprising: a control unit that changes a current setting value of the power source based on the resistance value calculated by the resistance value calculation unit. In an electron beam drawing apparatus equipped with a power control device that controls the power for heating the cathode of the electron gun,
The power control device
An isolation transformer that transmits power output from the power source to the secondary side;
A current value measuring unit for measuring a current value flowing through the cathode connected to the secondary side of the insulating transformer;
A voltage value measuring unit for measuring a voltage value applied to the cathode;
An AD converter for analog-to-digital conversion of the current value and the voltage value;
A resistance value calculation unit that calculates a resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit;
Based on the latest resistance value calculated by the resistance value calculation unit and at least one resistance value calculated before that, a resistance value estimation unit that estimates a resistance value to be calculated next;
An electron beam drawing apparatus comprising: a control unit that changes a current setting value of the power source based on the resistance value estimated by the resistance value estimation unit. In the power control device for controlling the power for heating the cathode of the electron gun of the electron beam drawing device,
An isolation transformer that transmits power output from the power source to the secondary side;
A current value measuring unit for measuring a current value flowing through the cathode connected to the secondary side of the insulating transformer;
A voltage value measuring unit for measuring a voltage value applied to the cathode;
An AD converter for analog-to-digital conversion of the current value and the voltage value;
A resistance value calculation unit that calculates a resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit;
And a control unit that changes a current setting value of the power source based on the resistance value calculated by the resistance value calculation unit. . In the power control device for controlling the power for heating the cathode of the electron gun of the electron beam drawing device,
An isolation transformer that transmits power output from the power source to the secondary side;
A current value measuring unit for measuring a current value flowing through the cathode connected to the secondary side of the insulating transformer;
A voltage value measuring unit for measuring a voltage value applied to the cathode;
An AD converter for analog-to-digital conversion of the current value and the voltage value;
A resistance value calculation unit that calculates a resistance value of the cathode based on the current value and the voltage value converted by the AD conversion unit;
Based on the latest resistance value calculated by the resistance value calculation unit and at least one resistance value calculated before that, a resistance value estimation unit that estimates a resistance value to be calculated next;
And a control unit that changes a current setting value of the power source based on the resistance value estimated by the resistance value estimation unit. . In a power control method for controlling power for cathode heating of an electron gun of an electron beam drawing apparatus,
Measuring a current value and a voltage value supplied to the cathode connected to the secondary side of the isolation transformer;
Analog-to-digital conversion of the current value and voltage value;
Calculating a resistance value of the cathode based on a current value and a voltage value after analog-digital conversion;
And a step of changing a current setting value of a power source connected to the primary side of the insulation transformer based on the calculated resistance value. A power control method for heating a cathode of an electron gun of an electron beam drawing apparatus. In a power control method for controlling power for cathode heating of an electron gun of an electron beam drawing apparatus,
Measuring a current value and a voltage value supplied to the cathode connected to the secondary side of the isolation transformer;
Analog-to-digital conversion of the current value and voltage value;
Calculating a resistance value of the cathode based on a current value and a voltage value after analog-digital conversion;
Estimating a resistance value to be calculated next based on the latest resistance value and at least one or more resistance values calculated before;
And a step of changing a current setting value of a power source connected to the primary side of the isolation transformer based on the estimated resistance value, and a power control method for heating the cathode of the electron gun of the electron beam drawing apparatus .

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