JP2010192563A - Organic electroluminescence display apparatus and method for manufacturing organic the electroluminescence display apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic EL (electroluminescence) display apparatus with an organic EL layer appropriately patterned, even when conducting a plasma processing on the surface of banks to appropriately patterning the organic EL layer. <P>SOLUTION: The organic electroluminescence display apparatus includes a first electrode 2, a conductive layer 4, a light-emitting layer 5, and a second electrode 6 laminated on a substrate 1 from the substrate 1 side in this order, and a bank 3 for surrounding the circumference of the conductive layer 4 and the light-emitting layer 6. The concentration of fluorine atom on the surface of the conductive layer 4 of the organic electroluminescence display apparatus is not more than 6 atom% with respect to all the element contents, when measurement is performed by X-ray photoelectron spectroscopy. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention relates to an organic electroluminescence (EL) display device and a method for manufacturing an organic electroluminescence display device. More specifically, the present invention relates to an organic EL display device in which an organic EL layer is formed by a wet method such as an inkjet method and a method for manufacturing the same.

The organic EL display device has excellent visibility and responsiveness such as contrast and viewing angle, and is capable of lower power consumption, thinner and lighter, and flexible display body. FPD (Flat Panel Display) is attracting attention. At present, compared to liquid crystal displays (LCDs) and plasma display panels (PDPs), the level of technical perfection and industrial infrastructure are still inferior. Although it is only mounted on car audio and some mobile information devices, it is theoretically the best FPD, so future market expansion is expected.

An organic EL display device displays an image by driving an organic EL panel in which a self-luminous organic EL element is arranged for each pixel. The organic EL panel includes a pair of electrodes, at least one of which has translucency, and an organic EL layer formed of an organic material disposed between the pair of electrodes. Examples of the organic EL layer include a light emitting layer that emits light when a voltage is applied, and a hole injection layer that is provided to increase the light emission efficiency of the light emitting layer.

Examples of the material for the organic EL layer include low-molecular organic EL materials and high-molecular organic EL materials. When a low molecular organic EL material is used, a method of forming a film by vapor deposition under vacuum is generally used. However, since film formation unevenness easily occurs, it is difficult to increase the size. On the other hand, when a polymer organic EL material is used, wet methods such as an inkjet method, a nozzle coating method, and a printing method are generally used. In particular, in recent years, a method of forming red, green, and blue color layers on a substrate by an inkjet method has been widely used (see, for example, Patent Document 1).

In the method described in Patent Document 1, an organic EL layer is formed as follows using a polymer organic EL material. First, a bank made of an organic material is formed as a pixel partition member on a substrate. Lithography or printing is used to form the bank. Subsequently, the surface of the bank is subjected to plasma treatment using a gas containing a fluorine compound or the like. Since the surface of the bank is made liquid-repellent by performing the plasma treatment, it is difficult for the liquid material to get over the bank even if the liquid material is ejected into the area partitioned by the bank using an ink jet method or the like. The patterning accuracy of the EL layer is improved.

Japanese Patent No. 3328297

However, in the case of using a method of performing a plasma treatment to make the bank surface liquid repellent, the organic EL layer formed in the opening of the bank may not be appropriately patterned depending on the process conditions.

The present invention has been made in view of the above-described situation, and an organic EL layer in which the organic EL layer is appropriately patterned even when performing plasma treatment on the surface of the bank in order to appropriately pattern the organic EL layer. An object of the present invention is to provide a display device and a method of manufacturing an organic EL display device capable of appropriately patterning an organic EL layer.

The present inventor has made various studies on the reason why appropriate patterning is not performed when patterning the organic EL layer in the bank, and has focused on the surface composition of the organic EL layer and the manufacturing conditions of the organic EL layer. In this specification, the organic EL layer refers to a light emitting layer that emits light when a constant voltage is applied, a hole injection layer that is formed to smoothly inject holes or electrons into the light emitting layer, and electrons. It refers to a buffer layer (conductive layer) such as an injection layer, an intermediate layer formed to prevent extra electrons from being injected into the light emitting layer.

For example, in order to appropriately pattern the organic EL layer in the pixel, first, a bank having an opening corresponding to the pixel is provided, and subsequently, a fluorine-containing gas is applied to the surface of the bank in order to increase patterning accuracy. After performing the plasma treatment used and further applying an organic EL layer to the opening of the bank and then subjecting it to a certain condition such as a drying step, depending on the condition, the fluorine on the surface of the bank may be the surface of the organic EL layer. And the surface of the organic EL layer was found to be liquid repellent. In this case, even if a coating liquid for an organic EL layer made of another material is applied onto the organic EL layer, the coating liquid for the organic EL layer made of the other material is repelled and is not easily patterned properly. Become.

In addition, as a result of intensive studies, the inventor has formed a certain condition with respect to the surface of the organic EL layer after forming the lower organic EL layer in the bank and before entering the next organic EL layer forming step. It has been found that the fluorine content on the surface of the organic EL layer can be reduced by carrying out the rinsing step, and the inventors have conceived that the above problems can be solved brilliantly and have reached the present invention.

In other words, the present invention provides an organic electroluminescent device having a first electrode, a conductive layer, a light emitting layer, and a second electrode laminated on a substrate in this order from the substrate side, and a bank surrounding the conductive layer and the light emitting layer. The luminescence display device is an organic electroluminescence display device in which the concentration of fluorine atoms on the surface of the conductive layer is 6 atomic% or less with respect to the total amount of elements as measured by X-ray photoelectron spectroscopy.

Further, the present invention provides an organic electroluminescent device having a first electrode, a conductive layer, a light emitting layer, and a second electrode laminated on a substrate in this order from the substrate side, and a bank surrounding the conductive layer and the light emitting layer. A method of manufacturing a luminescence display device, wherein the manufacturing method performs a lyophilic process on a surface of a bank by a lyophilic process on a surface of a conductive layer side of a first electrode and a plasma process using a fluorine-containing gas. A step, a step of applying a conductive layer on the first electrode, a step of immersing the surface of the conductive layer and the surface of the bank in an organic solvent at 120 ° C. or higher, and a step of applying a light emitting layer on the conductive layer In this order.

The organic EL display device of the present invention and the organic EL display device produced by the method of manufacturing the organic EL display device of the present invention have a first electrode, a conductive layer, a light emitting layer, and a second electrode on the substrate side. And a bank surrounding the periphery of the conductive layer and the light emitting layer. One of the first electrode and the second electrode is an anode and the other is a cathode. When the organic EL display device of the present invention is a bottom emission type, a translucent material is used for the substrate and the first electrode. When the organic EL display device is a top emission type, the second electrode is translucent. These materials are used. When a current flows through each organic EL layer such as a conductive layer and a light emitting layer through the first electrode or the second electrode, the light emitting layer emits light, and image display is performed. The conductive layer is not particularly limited as long as it has a higher electrical conductivity at room temperature (25 ° C.) than the light-emitting layer. Generally, a buffer layer, a hole transport layer, a hole injection layer, an electron transport layer, Sometimes called an electron injection layer or the like. The conductive layer has a function of smoothly injecting holes or electrons received from the first electrode or the second electrode into the light emitting layer and a function of flattening the unevenness of the substrate surface. The light emitting layer emits light by recombination of holes injected from the anode and electrons injected from the cathode.

In the organic EL display device of the present invention, the concentration of fluorine atoms on the surface of the conductive layer is 6 atomic% or less with respect to the total amount of elements as measured by X-ray photoelectron spectroscopy. X-ray photoelectron spectroscopy (XPS) is a technique for irradiating a sample with characteristic X-rays such as Al and Mg and measuring the kinetic energy of photoelectrons generated by the photoelectric effect. This is a method for quantitative analysis of elements (atomic%, atomic%) and analysis of their chemical bonding state.

When the concentration of fluorine atoms on the surface of the conductive layer is 6 atomic% or less with respect to the total amount of elements as measured by XPS, the coating solution for the light emitting layer, which is an organic material, is applied to the surface of the conductive film. When applied, it is easy to obtain a uniform layer. As a result, for example, holes in the light emitting layer are generated, and the possibility of a leak failure that occurs when the second electrode formed on the light emitting layer and the conductive layer are directly connected can be reduced.

The configuration of the organic EL display device of the present invention is not particularly limited by other components as long as such components are formed as essential.

The surface of the first electrode is preferably subjected to lyophilic treatment, and the surface of the bank is preferably subjected to liquid repellent treatment by plasma treatment using a fluorine-containing gas. Since the 1st electrode located in the lower layer of a conductive layer has lyophilic property, the coating liquid used as the material of a conductive layer is easy to adjust on a 1st electrode, and a uniform layer structure is obtained. Further, since the surface of the bank has liquid repellency, it is possible to make it difficult for the coating liquid that becomes the material of the conductive layer to remain on the surface of the bank. Therefore, by performing these treatments, the conductive layer can be easily patterned appropriately.

The method for producing an organic EL display device of the present invention includes a step of lyophilic treatment of the surface of the first electrode, a step of lyophobic treatment of the surface of the bank by plasma treatment using a fluorine-containing gas, A step of forming a conductive layer, a step of immersing the surface of the conductive layer and the surface of the bank in an organic solvent at 120 ° C. or higher, and a step of forming a light emitting layer on the conductive layer in this order. As described in the preferred embodiment of the present invention described above, the surface of the first electrode is subjected to a lyophilic process, and the surface of the bank is subjected to a liquid repellent process, whereby the conductive layer is easily patterned appropriately. Further, by using plasma treatment as the liquid repellent treatment, the surface of the bank can be easily liquid repellent treated.

In the method for manufacturing an organic EL display device of the present invention, liquid repellency is reduced between the surface of the conductive film and the surface of the bank between the step of forming the conductive layer and the step of forming the light emitting layer. Processing is done. At this time, the liquid repellency can be sufficiently reduced by using an organic solvent at 120 ° C. or higher. However, when an organic solvent at a relatively low temperature (for example, room temperature (25 ° C.)) is used, sufficient liquid repellency is obtained. Liquid property is not obtained.

According to the manufacturing method of the present invention, since the liquid repellency of the surface of the conductive layer is reduced, it is easy to obtain a uniform layer when the light emitting layer coating liquid, which is an organic material, is applied to the surface of the conductive film. Moreover, according to the manufacturing method of the present invention, the above-described organic EL display device according to the present invention in which the concentration of fluorine atoms on the surface of the conductive layer is 6 atomic% or less with respect to the total amount of elements when measured by XPS. Can be easily manufactured.

As a process of the manufacturing method of the organic EL display device of the present invention, as long as such a manufacturing process is essential, it is not particularly limited by other manufacturing processes.

The organic solvent is preferably an aromatic solvent. Even when using a mixture of polyethylenedioxythiophene and polystyrene sulfonic acid (PEDOT / PSS) suitable as a material for the conductive layer by using an aromatic solvent as a solvent for the immersion treatment, the conductive layer The surface of the conductive layer can be made liquid repellent without dissolving.

The organic solvent is preferably a hydrocarbon solvent. Even when a mixture of polyethylenedioxythiophene and polystyrene sulfonic acid (PEDOT / PSS), which is suitable as a material for the conductive layer, is used as a solvent for the immersion treatment by using a hydrocarbon solvent, the conductive layer The surface of the conductive layer can be made liquid repellent without dissolving.

ADVANTAGE OF THE INVENTION According to this invention, even when it is a case where a plasma process is performed to the surface of a bank in order to pattern an organic EL layer appropriately, the organic EL display device by which the organic EL layer was patterned appropriately can be obtained.

1 is a schematic cross-sectional view of an organic EL display device of Embodiment 1. FIG. 1 is a schematic plan view of an organic EL display device according to Embodiment 1. FIG.

Embodiments will be described below, and the present invention will be described in more detail with reference to the drawings. However, the present invention is not limited only to these embodiments.

Embodiment 1
FIG. 1 is a schematic cross-sectional view of the organic EL display device according to the first embodiment. As shown in FIG. 1, the organic EL display device according to Embodiment 1 has an anode 2, a buffer layer 4, a light emitting layer 5, and a cathode 6 laminated on a substrate 1 in this order from the substrate 1 side. A bank 3 is provided on the substrate 1 and the anode 2 so as to surround the periphery of the buffer layer 4 and the light emitting layer 5. The buffer layer 4 corresponds to a so-called hole transport layer, hole injection layer, electron transport layer, electron injection layer, and the like, and these may have a single layer structure or a stacked structure.

FIG. 2 is a schematic plan view of the organic EL display device according to the first embodiment. As shown in FIG. 2, the bank 3 is provided with a circular opening, and a light emitting layer 5 is formed in the opening. Further, as shown in FIG. 2, a plurality of openings are provided in rows and columns in the vertical direction and the horizontal direction, respectively. In Embodiment 1, the shape of the opening is not limited to a circle, and may be an ellipse, an oval, a rectangle, or the like. The diameter of the opening can be set to 100 μm, for example.

Below, the manufacturing method of the organic electroluminescence display of Embodiment 1 is explained in full detail.

As the substrate 1, for example, an insulating substrate made of an inorganic material such as glass or quartz, a plastic such as polyethylene terephthalate, or a ceramic such as alumina can be used. On the substrate 1, wiring for performing drive control of organic EL display and switching elements such as thin film transistors (TFTs) may be formed.

A plurality of anodes 2 are formed for each pixel. As a material of the anode 2, for example, a transparent metal oxide such as indium tin oxide (ITO) can be used. The anode 2 is formed using a vapor deposition method, an EB (Electron Beam Deposition) method, an MBE (Molecular Beam Epitaxy) method, a sputtering method, a spin coating method, a printing method, an inkjet method, or the like. Can do.

The bank 3 plays a role of partitioning the buffer layer 4 and the light emitting layer 5 for each pixel. For example, an insulating material made of an organic material such as polyimide can be used. The bank 3 can be formed by a photolithography method, a printing method, or the like. When the photolithography method is used, first, the material of the bank 3 is applied on the substrate 1 and the anode 2 by a spin coating method or the like, and a resist layer is applied thereon. Subsequently, a mask is produced in accordance with the shape of the bank 3, and the resist is exposed and developed to leave a resist in accordance with the shape of the bank 3. Finally, etching is performed to remove the material of the bank 3 other than that under the resist. In this way, the bank 3 partially having an opening can be formed.

A buffer layer 4 and a light emitting layer 5 are formed in the opening of the bank 3. Examples of the method for applying the buffer layer 4 and the light emitting layer 5 include inkjet methods, spin coating methods, nozzle coating methods, slit coating methods, wet coating methods such as die coating methods, printing methods such as offset printing and intaglio printing, and laser transfer. Examples thereof include wet coating methods. When the buffer layer 4 and the light emitting layer 5 are formed, when an ink jet method is used before the coating process, the surface of the anode 3 is made lyophilic and the surface of the bank 3 is made so that the discharge liquid is uniformly spread. Provides liquid repellency. The lyophilic treatment for imparting lyophilicity to the surface of the anode 2 and the lyophobic treatment for imparting liquid repellency to the surface of the bank 3 are easily performed by performing plasma treatment on the respective surfaces. This expands the range of selection of anode materials and bank materials.

As a specific method of lyophilic treatment and lyophobic treatment, after treatment with oxygen plasma, treatment with oxygen and CF ₄ mixed plasma makes the lyophilicity to the surface of the anode 2 the surface of the bank 3. And a method of imparting liquid repellency to each.

The buffer layer (hole injection / transport layer) 4 has a function of injecting carriers such as holes and electrons into the light emitting layer 5 and a function of absorbing surface roughness of the anode 2. As a material of the buffer layer 4, a mixture of polyethylene dioxythiophene and polystyrene sulfonic acid (PEDOT / PSS) (manufactured by Starck Vitech, trade name: Baytron P CH8000) can be used. Films can be formed under normal pressure. Specifically, a coating liquid having the following material composition is applied by an inkjet method, and then vacuum-dried at room temperature to form a buffer layer 4 having a film thickness of 60 nm.

<Buffer layer 4 material composition>
Baytron P CH8000 1 part by weight Water 3 parts by weight Ethanol 4 parts by weight Ethylene glycol 2 parts by weight

Subsequently, a rinsing process is performed in which the entire substrate including the buffer layer 4 is immersed in an organic solvent at 120 ° C. or higher for several minutes. Here, it is necessary to use an organic solvent that does not dissolve the buffer layer 4. When PEDOT / PSS is used as the buffer layer, examples of the organic solvent used in the rinsing step include aromatic solvents such as toluene, anisole, xylene, and tetralin, and hydrocarbon solvents such as decalin.

And after taking out the whole board | substrate containing the buffer layer 4 from an organic solvent and air-drying, baking for 10 minutes is performed on 200 degreeC conditions. The concentration of fluorine atoms on the surface of the buffer layer 4 after these treatments is 6 atomic% or less with respect to the total amount of elements. If the rinsing step is not performed or the rinsing step is performed using tetralin at a temperature lower than 120 ° C., the fluorine content on the surface of the buffer layer 4 is not sufficiently reduced, and other components are further formed on the buffer layer 4. In the case of forming the buffer layer, the light emitting layer 5 and the like, the coating liquid is repelled, making it difficult to perform appropriate patterning.

The light emitting layer 5 is made of a polymer organic EL light emitting material and emits light by recombination of carriers. The light emitting layer 5 can be formed using a method of forming a film by vapor deposition under vacuum, a method of forming a film by coating or printing under normal pressure, and the like. When using the latter method of forming a film by coating or printing under normal pressure, a method of patterning by ink jet is preferable. As a material of the light emitting layer 5, for example, a polyfluorene compound represented by the following chemical formula (1) can be used.

The compound represented by the above formula (1) is a copolymer compound of a fluorene ring having an alkyl chain (R, R ') and at least one or more units (A, A'). l and m are integers of 1 or more, and n is 0 or an integer of 1 or more. As the units of A and A ′, dimethylbenzene, pyridine, benzene, anthracene, spirobifluorene, carbazole unit, benzoamine, bipyridine, benzothiadiazole and the like can be used. The molecular weight of the polyfluorene compound represented by the chemical formula (1) is preferably several hundreds of thousands, and the color of light emission varies depending on the unit to be copolymerized and the ratio of l, m, and n.

The material composition of the light emitting layer 5 is as shown below. A coating liquid having the following material composition is applied by an inkjet method, and then baked at 200 ° C. for 60 minutes in a nitrogen atmosphere to form a light-emitting layer having a thickness of 80 nm.

<Material composition of the light emitting layer 5>
Green light emitting polymer light emitting material (Compound 1) 1 part by weight xylene 60 parts by weight tetralin 60 parts by weight

The cathode 6 is an electrode formed on the light emitting layer 5 and the bank 3, and is a stack of a low work function layer formed of a material having a low work function and a metal layer having a relatively strong chemical durability (for example, Ca / Al, Ce / Al, Cs / Al, Ba / Al, etc.). The cathode 6 can be formed by using a vapor deposition method, an EB method, an MBE method, a sputtering method, a spin coating method, a printing method, an ink jet method, or the like.

Finally, the organic EL display is completed by sealing with a glass cap or the like in an inert gas atmosphere such as nitrogen.

In the first embodiment, a bottom emission in which a light-transmitting material is used as the first electrode closer to the substrate 1 and a light-shielding material is used as the second electrode farther from the substrate 1 in the pair of electrodes. The organic EL display device of the type has been described. In the present invention, these are arranged in reverse, that is, a light-shielding material is used as the first electrode, and a light-transmitting material is used as the second electrode. It is good also as a top emission type organic EL display device in which is used.

Evaluation Test The organic EL display devices of Examples 1 to 3 and Comparative Examples 1 to 3 were actually produced using the method for manufacturing an organic EL display device of the present invention, and an evaluation test was performed on each organic EL display device. .

In Example 1, as a rinsing process for reducing the fluorine content on the surface of the buffer layer, the entire substrate including the buffer layer was immersed in tetralin heated to 150 ° C. for 5 minutes. And when the fluorine content of the surface of a buffer layer was measured by XPS (The JEOL Co., Ltd. make, brand name: JPS9200), it was 3 atomic% with respect to the total element amount. In addition, after performing these treatments, when the light emitting layer coating liquid was ejected onto the buffer layer by an inkjet method, the light emitting layer coating liquid could be uniformly spread on the buffer layer within the pixel. Furthermore, when the lighting test was actually performed using the organic EL display device of Example 1, the inside of the pixels emitted light uniformly.

In Example 2, as a rinsing step for reducing the fluorine content on the surface of the buffer layer, the entire substrate including the buffer layer was immersed in tetralin heated to 120 ° C. for 5 minutes. As a result, when the fluorine content on the surface of the buffer layer was measured by XPS (trade name: JPS9200, manufactured by JEOL Ltd.), it was 6 atomic% with respect to the total amount of elements. In addition, after performing these treatments, when the light emitting layer coating liquid was ejected onto the buffer layer by an inkjet method, the light emitting layer coating liquid could be uniformly spread on the buffer layer within the pixel. Furthermore, when the lighting test was actually performed using the organic EL display device of Example 2, the inside of the pixels emitted light uniformly.

In Example 3, as a rinsing process for reducing the fluorine content on the surface of the buffer layer, the entire substrate including the buffer layer was immersed in decalin heated to 150 ° C. for 5 minutes. As a result, when the fluorine content on the surface of the buffer layer was measured by XPS (trade name: JPS9200, manufactured by JEOL Ltd.), it was 2 atomic% with respect to the total element amount. In addition, after performing these treatments, when the light emitting layer coating liquid was ejected onto the buffer layer by an inkjet method, the light emitting layer coating liquid could be uniformly spread on the buffer layer within the pixel. Further, when the lighting test was actually performed using the organic EL display device of Example 3, the inside of the pixels emitted light uniformly.

In Comparative Example 1, as a rinsing step for reducing the fluorine content on the surface of the buffer layer, the entire substrate including the buffer layer was immersed in tetralin heated to 100 ° C. for 5 minutes. As a result, the fluorine content on the surface of the buffer layer was measured by XPS (trade name: JPS9200, manufactured by JEOL Ltd.) and found to be 10 atomic% with respect to the total amount of elements. In addition, after performing these treatments, when the coating liquid for the light emitting layer was ejected onto the buffer layer by the ink jet method, a part of the surface of the buffer layer was exposed. Furthermore, when the lighting test was actually performed using the organic EL display device of Comparative Example 1, the inside of the pixel did not light. This is presumably because a portion where the buffer layer having a relatively low resistance and the cathode are in contact with each other is generated in a part of the pixel, thereby causing a leakage current.

In Comparative Example 2, as a rinsing step for reducing the fluorine content on the surface of the buffer layer, the entire substrate including the buffer layer was immersed in tetralin heated to 25 ° C. for 5 minutes. As a result, the fluorine content on the surface of the buffer layer was measured by XPS (trade name: JPS9200, manufactured by JEOL Ltd.) and found to be 14 atomic% with respect to the total amount of elements. In addition, after performing these treatments, when the coating liquid for the light emitting layer was ejected onto the buffer layer by the ink jet method, a part of the surface of the buffer layer was exposed. Furthermore, when the lighting test was actually performed using the organic EL display device of Comparative Example 2, the inside of the pixel did not light. This is presumably because a portion where the buffer layer having a relatively low resistance and the cathode are in contact with each other is generated in a part of the pixel, thereby causing a leakage current.

In Comparative Example 3, the rinsing process for reducing the fluorine content on the surface of the buffer layer was not performed. As a result, the fluorine content on the surface of the buffer layer was measured by XPS (trade name: JPS9200, manufactured by JEOL Ltd.) and found to be 15 atomic% with respect to the total amount of elements. In addition, after performing these treatments, when the coating liquid for the light emitting layer was ejected onto the buffer layer by the ink jet method, a part of the surface of the buffer layer was exposed. Furthermore, when the lighting test was actually performed using the organic EL display device of Comparative Example 3, the inside of the pixel did not light. This is presumably because a portion where the buffer layer having a relatively low resistance and the cathode are in contact with each other is generated in a part of the pixel, thereby causing a leakage current.

1: Substrate 2: Anode (first electrode)
3: Bank 4: Buffer layer (conductive layer)
5: Light emitting layer 6: Cathode (second electrode)

Claims (5)

An organic electroluminescence display device having a first electrode, a conductive layer, a light emitting layer, and a second electrode laminated on a substrate in this order from the substrate side, and having a bank surrounding the conductive layer and the light emitting layer. ,
An organic electroluminescence display device, wherein the concentration of fluorine atoms on the surface of the conductive layer is 6 atomic% or less with respect to the total amount of elements as measured by X-ray photoelectron spectroscopy. The surface of the first electrode is lyophilic treated,
The organic electroluminescence display device according to claim 1, wherein the surface of the bank is subjected to a liquid repellent treatment by a plasma treatment using a fluorine-containing gas. A method for manufacturing an organic electroluminescence display device, comprising: a first electrode, a conductive layer, a light emitting layer, and a second electrode laminated on a substrate in this order from the substrate side; and a bank surrounding the conductive layer and the light emitting layer. Because
The manufacturing method includes a step of lyophilic treatment of the surface of the first electrode on the conductive layer side;
A step of performing a liquid repellent treatment on the surface of the bank by a plasma treatment using a fluorine-containing gas;
Applying a conductive layer on the first electrode;
A step of immersing the surface of the conductive layer and the surface of the bank in an organic solvent at 120 ° C. or higher;
And a step of coating a light emitting layer on the conductive layer in this order. 4. The method of manufacturing an organic electroluminescence display device according to claim 3, wherein the organic solvent is an aromatic solvent. 4. The method of manufacturing an organic electroluminescence display device according to claim 3, wherein the organic solvent is a hydrocarbon solvent.

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