JP2010186593A - Sample holder assembly, set of a plurality of sample holders, holder height adjustment tool, and sample holder base - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample holder base for fixing a plurality of sample holders prepared in corresponding to respective shapes of the plurality of samples having different thicknesses and sizes on one sample holder base simultaneously, and for analyzing surfaces of the samples with high reliability. <P>SOLUTION: The sample holders 1, 2 include: sample holder bodies respectively having sample housing parts 11, 16 for forming sample mounting spaces and holder fixing projection parts 35, 36 arranged on bottom parts of the sample housing parts 11, 16; and holder height adjustment tools respectively having spacers 13, 18 having recessed parts for housing the holder fixing projection parts 35, 36 on upper parts, holder fixing means (pressing screws) 15, 21 for fixing the holder fixing projections 35, 36 on the spacers 13, 18 in upper parts of the spacer 13, 18, and spacer fixing means (fixing screws) 14, 19 for fixing the spacers 13, 18 by inserting in either of the spacer mounting recessed parts m<SB>14</SB>, m<SB>24</SB>in lower parts of the spacers 13, 18. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sample holder base used in a surface analyzer such as an electron probe microanalyzer (EPMA) or an electron microscope, a set of a plurality of sample holders arranged on the sample holder base, a sample holder base and a plurality of samples The present invention relates to a sample holder assembly composed of holders and a holder height adjusting jig for adjusting the height of a set of a plurality of sample holders.

  A surface analysis apparatus such as an EPMA or an electron microscope irradiates a sample accommodated in a lens barrel with an excitation source such as an electron beam, and emits secondary electrons, reflected electrons, and characteristics X emitted from the sample by irradiation of the excitation source. Detecting lines, etc., morphological observation of the sample surface and elemental analysis of extremely small parts. When performing surface analysis with EPMA, in order to perform highly accurate elemental analysis, the measurement sample surface is set so that the conditions such as the penetration depth of the incident electron beam and the escape distance of the generated characteristic X-ray are equal in any part of the sample. Align the sample surface horizontally so that is perpendicular to the incident direction of the electron beam, attach it to the sample holder, and adjust the height so that the sample analysis surface and the top surface of the sample holder are aligned. There is. The analysis is performed by fixing the sample holder to a sample holder base that can be introduced into the sample stage of the surface analyzer.

For example, as shown in FIG. 16, a conventional sample holder base has a structure in which a sub-base 141 is fixed to four corners 51a, 51b, 51c, 51d on a base 142 having a handle 144. I'm taking it. This structure is used to adjust the insufficient height so that there is a sample surface to be analyzed at a predetermined height. As shown in FIG. 16A, nine sample holder mounting holes r ₁₁ , r ₁₂ ,..., R ₁₉ are evenly provided in the sub-base 141, and only nine sample holders are provided at the maximum. Can not be fixed to. Further, except for the sample holder mounting hole _{r 15} located in the center of the sub-base 141, a sample holder mounting hole _{r 11, r} 12, 8 single sample holder fixing screw holes 41a corresponding to ... _{r 19,} 41b, ... 41h are provided on the side surfaces of the sub-base 141, respectively, and a push screw for fixing the sample holder can be introduced. On the other hand, in the center of the sample holder mounting holes r ₁₅ of the sub-base 141 a daunting position of introduction of the set screw for the sample holder fixed to the fixing of the sample holder into the sample holder mounting holes r _15, sub Two sample holder fixing screw holes 91 a and 91 b are provided in the vicinity of the sample holder mounting hole r ₁₅ of the base 141 in a direction perpendicular to the main surface of the sub base 141.

As an example, the conventional sample holder main body (161, 162) composed of the sample storage part 161 and the holder fixing convex part 162 fixed to the conventional sample holder base is shown in FIGS. 18 (a) and 18 (b). ), Eight sample fixing screw holes 103a, 103b,... 103h (some are not shown), and the holder fixing convex portion 162 is formed at the center of the sub-base 141 shown in FIG. of the sample holder mounting holes _{r 15} other samples holder mounting hole _r 11 _{except, r} 12, ... inserted into one of the _{r 19,} sample holder fixing screw hole 41a corresponding to the respective, 41b, ... A fixing screw is introduced into one of 41h and fixed. Here, the sample accommodating unit 161 of the sample holder body (161, 162), for example, 26 mm outer diameter _{l 21,} the height _{h 31} is 23 mm, the depth _{h 32} is 20 mm.

19 (a) and 19 (b) show a sample holder main body (171, 172) that is larger than the sample holder main body (161, 162) and includes a sample storage portion 171 and a holder fixing convex portion 172. ), Including eight sample fixing screw holes 104a, 104b,... 104h (partially omitted), and the holder fixing convex portion 172 at the center of the sub-base 141 shown in FIG. of the sample holder mounting holes _{r 15} other samples holder mounting hole _r 11 _{except, r} 12, ... inserted into one of the _{r 19,} sample holder fixing screw hole 41a corresponding to the respective, 41b, ... It is fixed via one of 41h. Here, the sample holder 171 of the sample holder main body (171, 172) has, for example, an outer diameter l ₃₁ of 32.5 mm, a height h ₃₁ and a depth h ₃₂ of the sample holder 161 shown in FIG. The same.

On the other hand, FIG. 20 shows an example of a dedicated sample holder fixed to the center of a sub-base 141 of a conventional sample holder base, and a sample holder main body (181, 182) including a sample storage portion 181 and a holder fixing convex portion 182. ) Includes eight sample fixing screw holes 105a, 105b,... 105h (partially omitted) and sample holder fixing holes 183a, 183b, and the sample holder main body (181, 182) is shown in FIG. insert the holder fixing protrusions 182 on the sample holder mounting holes _{r 15} of the sub-base 141 shown in (a), through the sample holder fixing holes 183a, 183b and the sample holder fixing screw holes 91a, and 91b Then, it is fixed to the sub-base 141 with a fixing screw or the like. The sample holder 181 of the sample holder body (181, 182) has the same outer diameter l ₂₁ , height h ₃₁ and depth h _{32 as} the sample holder 161 shown in FIG.

FIG. 23 shows a state in which the sample holder main bodies 211, 212,... 219 are respectively fixed to the sample holder mounting holes r ₁₁ , r ₁₂ ,... R ₁₉ of the sub-base 141 of the conventional sample holder base. Here, the sample holder main bodies 211 to 219 are large enough to accommodate a sample having a diameter of 25 mm, for example. Conventional sample holder base, for the sample holder body 215 fixed to the center of the sample holder mounting holes _{r 15} of the sub-base 141 shown in FIG. 23, the sample holder fixing holes 183a as shown in FIG. 20, the 183b The provided sample holder body (181, 182) had to be used separately.

  FIG. 17 shows an analyzable region 151 that can be analyzed when the analysis by EPMA is performed using the conventional sample holder base shown in FIG. When using the conventional sample holder base, when the usable area 152 which is a space that can be used freely by fixing the sample holder is 100 mm × 100 mm × 50 mm, for example, the analyzable area 151 is 90 mm. It is defined within a range of × 90 mm. Further, even if there is a step of about 6 mm in the height of each analysis sample mounted on the sub-base 141, the analysis can be performed. There is no obstacle such as a backscattered electron detector or a crystal protection electrostatic trap on the lower surface of the objective lens of the EPMA main body, and the sample space is designed to be large so that it can be used for various samples. As a typical analysis sample, an embedded sample that has been hardened with resin and subjected to a treatment such as polishing is fixed to the sample storage portions 161, 171 and 181 shown in FIGS. In addition, analysis samples having a diameter of about 25 mm or about 32 mm and a thickness of about 15 mm are often used, and the shape of the analysis sample is relatively limited.

As shown in FIG. 21, a circular bottom portion 291 is fixed to a bottom portion of a sample mounting space of a conventional sample holder main body (191, 292) composed of a sample storage portion 191 and a holder fixing convex portion 292 by a fixing screw 286. Yes. The sample holder body (191, 292) is provided with eight sample fixing screw holes 106a, 106b,... 106h (partially omitted). Here, for example, the outer diameter l ₄₁ of the sample storage portion 191 is 26 mm, the height h ₄₁ is 30 mm, and the depth h ₄₂ is 20 mm.

Further, as shown in FIG. 22, a circular bottom 293 is fixed by a fixing screw 287 at the bottom of the sample mounting space of the conventional sample holder main body (201, 294) composed of the sample storage portion 201 and the holder fixing convex portion 294. Has been. The sample holder main body (201, 294) is provided with eight sample fixing screw holes 107a, 107b,... 107h (partially omitted). Here, for example, the outer diameter l ₅₁ of the sample storage unit 201 is 39 mm, the height h ₅₁ is 23 mm, and the depth h ₅₂ is 13 mm. When sample holder bodies having different heights such as the sample holder body (191, 292) and the sample holder body (201, 294) are used for the analysis, individual sample holder bases are prepared or shown in FIG. In addition, it is necessary to adjust the height by rearranging the columns 51a to 51d that support the sub-base 141 to other columns. Further, as described above, the conventional sample holder base shown in FIG. 16 is adjusted in height by fixing the sub-base 141 to the base 142 via the columns 51a to 51d, and the sub-base 141 is plate-shaped. Therefore, the sample holder main body (191, 292) and the sample holder main body (201, 294) having different heights cannot be mounted on the sub-base 141 at the same time for analysis.

  In this way, since the stroke of the sample stage is limited during the analysis, the columnar sub-base is fixed by setting up a column on the sample holder base so that there is a sample surface to be analyzed at a height that can be analyzed. The height is adjusted by taking the structure. At this time, it is possible to fix a plurality of sample holders to one sample holder base, but for the above reasons, there is a disadvantage that sample holders having different heights cannot be fixed simultaneously.

FIG. 24 shows a state in which the sample holder main bodies 221, 222, 223, and 224 are respectively fixed to the sample holder mounting holes r ₁₁ , r ₁₃ , r ₁₇ , and r ₁₉ of the sub-base 141 of the conventional sample holder base. Show. Here, the sample holder bodies 221 to 224 can store a sample having a diameter of 32 mm. However, as shown in FIG. 24, the sub-base 141 can store sample holders 221 and 222 that can store a sample having a diameter of 32 mm. Etc., only 4 can be fixed on the sub-base 141.

Here, FIG. 25 shows another example of a conventional sample holder base. The sub-base 231 includes four sample holder dedicated mounting holes q ₁₁ , q ₁₂ , q ₁₃ , q ₁₄ , and four sample holder fixing screw holes 71a, 71b, 71c, 71d (partially omitted). The sample holder main bodies 233 and 234 are fixed to the sample holder dedicated mounting holes q ₁₁ and q ₁₃ by fixing screws 73 and 72, respectively. The sub base 231 is fixed to a base 235 provided with a handle 232 by support columns 61a, 61b, 61c, 61d. The sample holder base shown in FIG. 25 is used as a dedicated sample holder base for analyzing a sample having a diameter exceeding 32 mm that cannot be fixed by the sample holder base shown in FIG. Thus, conventionally, when using sample holders having different sizes according to the size of the sample, it is necessary to prepare a sample holder base corresponding to the size of the sample holder to be used.

  Therefore, a recess that can accommodate a plurality of sample stands, a pressing member (cap) having a frame edge portion that forms an opening window that exposes a part of the mounting surface of each sample stand accommodated in the recesses, A spring (biasing means) that is arranged inside and urges each sample stage upwardly toward the frame edge of the pressing member and urges each sample stage so that the upper surfaces of a plurality of samples having different thicknesses are at the same horizontal level. There has been proposed a sample holder that is fixed in such a manner (Patent Document 1). In EPMA, since the sample is measured in an ultra-high vacuum environment, when the sample is taken in and out of the sample chamber of the lens barrel, the inside of the sample chamber of the lens barrel must be pressurized and depressurized each time. It took a lot of work time to exchange. According to the invention described in Patent Document 1, a plurality of types of samples having different thicknesses can be collectively stored in the concave portion of the sample holder, and the upper surface can be fixed to the same horizontal level. The time for exchanging the sample holder with the decompression operation can be shortened, and the sample can be analyzed efficiently.

JP-A-8-254511

  However, in the invention described in Patent Document 1, a plurality of samples are accommodated in a rectangular concave portion in which four corners provided in a single sample holder are cut, and depending on the size and structure of the sample holder to be used. The number and shape of samples that can be fixed are limited.

  In view of the above-described problems, the present invention is highly reliable by simultaneously fixing a plurality of sample holders prepared in accordance with the shapes of a plurality of samples having different thicknesses and sizes on one sample holder base. A sample holder base enabling surface analysis of a sample, a set of a plurality of sample holders arranged on the sample holder base, a sample holder assembly composed of a sample holder base and a plurality of sample holders, a plurality of sample holders An object of the present invention is to provide a holder height adjusting jig that adjusts the height of the set.

  In order to achieve the above object, an aspect of the present invention includes a sample holder base having a plurality of spacer mounting recesses arranged on the upper surface, and a plurality of samples fixed to the sample holder base via the plurality of spacer mounting recesses, respectively. The present invention relates to a sample holder assembly including a holder. That is, each of the plurality of sample holders constituting the sample holder assembly includes (a) a sample storage portion forming a sample mounting space, and a holder fixing convex portion provided at the bottom of the sample storage portion. (B) a spacer having a height for adjusting the distance between the bottom of the sample storage portion and the upper surface of the sample holder base, and having a recess at the top for storing the holder fixing convex portion; A holder fixing means for fixing the holder fixing convex portion to the spacer, and a holder height adjusting jig having a spacer fixing means for inserting and fixing the spacer into any one of the spacer mounting concave portions below the spacer. The gist.

  Another aspect of the present invention relates to a set of a plurality of sample holders fixed to a sample holder base in which a plurality of spacer mounting recesses are arranged on the upper surface via a plurality of spacer mounting recesses. That is, each of the plurality of sample holders includes (a) a sample holder main body having a sample storage portion forming a sample mounting space, and a holder fixing convex portion provided at the bottom of the sample storage portion; A spacer having a height for adjusting the distance between the bottom of the sample storage portion and the upper surface of the sample holder base, and having a concave portion for accommodating the holder fixing convex portion at the top, and a holder fixing convex portion above the spacer And a holder height adjusting jig having spacer fixing means for fixing the spacer by inserting the spacer into any one of the spacer mounting recesses at the lower portion of the spacer. Then, a plurality of sample holder main bodies having different heights of the sample storage portions and a holder height adjusting jig adapted to each of the plurality of sample holder main bodies form a pair, and the height of the upper surface of the sample storage portion is the same. It is selected so that it becomes.

  According to still another aspect of the present invention, a sample holder base having a plurality of spacer mounting recesses arranged on the upper surface is provided with a plurality of sample holder main bodies having different heights from each other, and the upper surface of the sample storage portion is The present invention relates to a holder height adjusting jig for fixing to be the same. That is, the holder height adjusting jig has (1) a concave portion for accommodating a holder fixing convex portion provided at the bottom of the sample storage portion of the sample holder main body, and the bottom of the sample storage portion and the sample A spacer having a height for adjusting the distance between the upper surface of the holder base, (b) holder fixing means for fixing the holder fixing convex portion to the spacer at the upper portion of the spacer, and (c) a spacer at the lower portion of the spacer. And a spacer fixing means for inserting and fixing in any of the spacer mounting recesses.

  According to still another aspect of the present invention, the heights of the sample storage portions are mutually connected via spacers each having a concave portion for storing a holder fixing convex portion provided at the bottom of the sample storage portion provided in the sample holder main body. The present invention relates to a sample holder base for fixing a plurality of different sample holder bodies so that the heights of the upper surfaces of the sample storage portions are the same. That is, the gist of this sample holder base is that a plurality of spacer mounting recesses for inserting spacer fixing means provided at the lower portions of the spacers are arranged on the upper surface.

  According to the present invention, a plurality of sample holders prepared in accordance with the shapes of a plurality of samples having different thicknesses and sizes are simultaneously fixed on one sample holder base to perform highly reliable surface analysis of the sample. Sample holder base enabling, a set of a plurality of sample holders arranged on the sample holder base, a sample holder assembly composed of a sample holder base and a plurality of sample holders, a height of a set of a plurality of sample holders It is possible to provide a holder height adjusting jig for adjusting the height of the holder.

It is sectional drawing which shows an example which fixes the sample holder main body from which the height which concerns on the 1st Embodiment of this invention differs to one sample holder base via a holder height adjustment jig. It is a top view which shows an example which fixes the sample holder main body from which the height which concerns on the 1st Embodiment of this invention differs to one sample holder base via a holder height adjustment jig. 1 shows an example of a structure of a sample holder base according to a first embodiment of the present invention. An example of the holder height adjustment jig which concerns on the 1st Embodiment of this invention is shown (the 1). An example of the holder height adjustment jig which concerns on the 1st Embodiment of this invention is shown (the 2). It is sectional drawing which shows an example which fixes the sample holder main body from which the magnitude | size which concerns on the 2nd Embodiment of this invention differs to one sample holder base via a holder height adjustment jig. It is a top view which shows an example which fixes the sample holder main body from which the magnitude | size which concerns on the 2nd Embodiment of this invention differs to one sample holder base via a holder height adjustment jig. An example of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 1). An example of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 2). An example of the fixation to the sample holder base of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 1). An example of the fixation to the sample holder base of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 2). An example of the fixation to the sample holder base of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 3). An example of the fixation to the sample holder base of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 4). The example which fixes the sample holder main body which concerns on the 2nd Embodiment of this invention to the sample holder base is shown (the 5). An example of the fixation to the sample holder base of the sample holder main body which concerns on the 2nd Embodiment of this invention is shown (the 6). The structure of the conventional sample holder base is illustrated. The usable area | region and analysis possible area | region in the conventional sample holder base are illustrated. An example of the conventional sample holder main body is shown (the 1). An example of the conventional sample holder main body is shown (the 2). An example of the conventional sample holder main body is shown (the 3). An example of the conventional sample holder main body is shown (the 4). An example of the conventional sample holder main body is shown (the 5). An example of fixing a sample holder main body to a conventional sample holder base is shown (No. 1). An example of fixing the sample holder main body to the conventional sample holder base is shown (part 2). An example of fixing the sample holder main body to the conventional sample holder base is shown (No. 3).

  Next, first and second embodiments of the present invention will be described with reference to the drawings. In the following diagrams, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic and the aspect ratio is different from the actual one. In addition, it goes without saying that portions with different ratios are included between the drawings.

  Further, the following first and second embodiments exemplify apparatuses and methods for embodying the technical idea of the present invention, and the technical idea of the present invention is a component article. The material, shape, structure, arrangement, etc. are not specified below. The technical idea of the present invention can be variously modified within the scope of the claims.

(First embodiment)
As shown in FIGS. 1 and 2, the sample holder assembly according to the first embodiment of the present invention includes a sample holder base 22 having a plurality of spacer mounting recesses m ₁₄ , m ₂₄ ,. , A sample holder assembly including sample holders 1 and 2 fixed to the sample holder base 22 via spacer mounting recesses m ₁₄ and m ₂₄ , respectively.

The first sample holder 1 includes a first sample holder body (11, 35) having a sample storage portion 11 forming a sample mounting space and a holder fixing convex portion 35 provided at the bottom of the sample storage portion 11. A first spacer 13 having a height for adjusting the distance between the bottom of the sample storage unit 11 and the upper surface of the sample holder base 22 and having a recess for storing the holder fixing projection 35, The holder fixing means (press screw) 15 for fixing the holder fixing convex portion 35 to the first spacer 13 at the upper portion of the spacer 13, and the first spacer 13 at the lower portion of the first spacer 13 is connected to the spacer mounting concave portion m _14. And a first holder height adjusting jig (13, 14, 15) having a spacer fixing means (fixing screw) 14 that is inserted into and fixed to.

On the other hand, the second sample holder 2 includes a second sample holder body (16, 16) having a sample storage portion 16 forming a sample mounting space and a holder fixing convex portion 36 provided at the bottom of the sample storage portion 16. 36) and a second spacer 18 having a height for adjusting the distance between the bottom of the sample storage unit 16 and the upper surface of the sample holder base 22 and having a recess for storing the holder fixing projection 36, Holder fixing means (press screw) 21 for fixing the holder fixing projection 36 to the second spacer 18 at the upper part of the second spacer 18, and the second spacer 18 at the lower part of the second spacer 18 comprising a second holder having a spacer fixing means (fixing screw) 19 that secure inserted into m ₂₄ height adjustment jig and (18, 19, 21).

The sample storage unit 11 of the first sample holder 1 is prepared according to the thickness of the sample 301, and the circular bottom 12 is attached to the bottom of the sample mounting space. In the sample holder assembly according to the first embodiment, the holder fixing convex portion 35 is fixed to the first spacer 13 by a set screw 15 as a holder fixing means. Further, the first spacer 13 is fixed to a spacer mounting screw hole (spacer mounting recess) m ₁₄ of a sample holder base 22 having a handle 23 by a fixing screw 14 as a spacer fixing means (sample holder base 22). (Refer to FIG. 3 for the plan view). The sample storage portion 16 of the second sample holder 2 is equipped with a circular bottom portion 17 prepared according to the thickness of the sample 302. In the sample holder assembly according to the first embodiment, the holder fixing convex portion 36 is fixed to the second spacer 18 by a set screw 21 as a holder fixing means. Further, the second spacer 18 is fixed to a spacer mounting screw hole (spacer mounting recess) m ₂₄ of the sample holder base 22 by a fixing screw 19 as a spacer fixing means.

On the sample holder base 22, the total height T _{mes obtained} by adding the height h ₆₁ of the sample storage portion 11 of the first sample holder 1 and the height s ₆₁ of the first spacer 13, and the second The value obtained by adding the height h ₇₁ of the sample holder 16 of the sample holder 2 and the height s ₇₁ of the second spacer 18 is adjusted to be equal to each other.

  2 is a top view showing a state in which the sample storage portion 11 of the first sample holder 1 and the sample storage portion 16 of the second sample holder 2 are fixed side by side on the sample holder base 22 shown in FIG. 1 (corresponding to the cross-sectional view seen from the II direction of the top view shown in FIG. 2). The sample storage unit 11 of the first sample holder 1 includes sample fixing screw holes 29a, 29b, 29c, 29d and the like for fixing the sample 301 (not shown), and similarly, the sample of the second sample holder 2 The storage unit 16 also includes sample fixing screw holes 31a, 31b, 31c, and 31d for fixing the sample 302 (not shown). Here, the horizontal sizes of the sample storage portion 11 of the first sample holder 1 and the sample storage portion 16 of the second sample holder 2 are equal. Here, the “horizontal direction” is a direction parallel to the main surface (surface) of the sample holder base 22.

3A is a top view of the sample holder base 22 used in the sample holder assembly according to the first embodiment, FIG. 3B is a side view seen from below in FIG. 3A, and FIG. c) is a side view seen from the right side of FIG. 3A, and FIG. 3D is a rear view. As shown in FIG. 3 (a), the sample holder base 22 is provided with a plurality spacer mounting recess _m 11 of (total of _{18), m 12, ... m 28} . Each of the 18 spacer mounting recesses m ₁₁ , m ₁₂ ,... M ₂₈ is provided with a female screw whose vertical direction is the direction of the rotation axis on the upper surface of the sample holder base 22. Therefore, is inserted into the spacer male screw as the fixing means (fixing screw) 14, 19 are screw holes for the spacer attachment, respectively (the recess for the spacer _{attachment) m 11, m 12, ...} m 28 shown in FIG. 1, screws is fixed to; (18, 19, 21 13, 14, 15) are screw holes for the spacer attachment (concave spacer _{attachment) m 11, m 12, ...} m 28 multiple holders height adjustment jig by. Since the sample holder body (11, 35; 16, 36) is fixed to each holder height adjusting jig (13, 14, 15; 18, 19, 21), the sample holder body (11, 35; 16, 36) is easy to fix. That is, even when a plurality of sample holder bodies are arranged on the upper surface of the sample holder base 22 in a 3 × 3, 4 × 4, etc. matrix, a tool space is secured at the center of the matrix, It is not necessary to prepare a simple sample holder. The sample holder base 22 includes a handle 23 that is necessary when the sample holder base 22 is taken in and out of the sample chamber (or sample preparation chamber) in the lens barrel of the surface analyzer. Here, the sample holder base 22 does not include the sub-base 141 as compared with the conventional sample holder base shown in FIG.

FIG. 4 shows an example of the first holder height adjusting jig 1 </ b> S used when the first sample holder 1 is fixed to the sample holder base 22. 4A corresponds to a cross-sectional view of the side view of FIG. 4B viewed from the IVA-IVA direction. The first spacer 13 shown in FIG. 4 is a spacer for fixing to one of the spacer mounting screw holes (spacer mounting recesses) m ₁₁ , m ₁₂ ,... M ₂₈ of the sample holder base 22 shown in FIG. In order to fix the fixing means (fixing screw) 14 and the holder fixing convex portion 35 (see FIG. 1) of the sample holder main body, a screw hole 26 for a pressing screw for introducing the holder fixing means (pressing screw) 15 is provided. Prepare. FIG. 5 shows an example of the second holder height adjusting jig 2 </ b> S used when the second sample holder 2 is fixed to the sample holder base 22. FIG. 5A corresponds to a cross-sectional view seen from the VA-VA direction of the side view of FIG. The second spacer 18 shown in FIG. 5 is different in height from the first spacer 13 shown in FIG. The second spacer 18 similarly to the first spacer 13, a spacer fixing for fixing to either the specimen holder spacer mounting screw holes (recesses spacer _attachment) m ₁₁ of the base _{22, m 12,} ... _{m 28} Means (fixing screw) 19 and a screw screw hole 27 for introducing a holder fixing means (pressing screw) 21 for fixing the holder fixing convex portion 36 (see FIG. 1) of the sample holder main body are provided. .

Here, the height of the 1st spacer 13 and the 2nd spacer 18 is an example, and is not limited to this.

  As described above, according to the sample holder base 22 according to the first embodiment of the present invention, the sample storage unit 11 of the first sample holder 1 and the sample storage unit of the second sample holder 2 having different heights. 16, the heights of the sample storage unit 11 and the sample storage unit 16 can be adjusted through the first spacer 13 and the second spacer 18, respectively. The sample holder body (11, 35) and the second sample holder body (16, 36) can be simultaneously fixed on the sample holder base 22.

  As the first sample holder body (11, 35) and the second sample holder body (16, 36), conventional sample holders can be adopted. When conventional sample holders are employed as the first sample holder body (11, 35) and the second sample holder body (16, 36), they are provided above the first spacer 13 and the second spacer 18. Needless to say, the shape and size of the recess may be designed to match the shape and size of the holder fixing projections 35 and 36.

(Second Embodiment)
As shown in FIGS. 6 and 7, the sample holder assembly according to the second embodiment of the present invention includes a sample holder base 22 having a plurality of spacer mounting recesses m ₁₄ , m ₂₄ ,. , A sample holder assembly including sample holders 3 and 4 fixed to the sample holder base 22 via the spacer mounting recesses m ₁₄ and m ₂₄ , respectively.

The first sample holder 3 includes a first sample holder main body (24, 37) having a sample storage portion 24 that forms a sample mounting space and a holder fixing convex portion 37 provided on the bottom of the sample storage portion 24. A first spacer 18 having a height for adjusting the distance between the bottom of the sample storage unit 24 and the upper surface of the sample holder base 22 and having a recess for storing the holder fixing projection 37, The holder fixing means (press screw) 21 for fixing the holder fixing convex portion 37 to the first spacer 18 at the upper portion of the spacer 18, and the first spacer 18 at the lower portion of the first spacer 18 is connected to the spacer mounting concave portion m _14. And a first holder height adjusting jig (18, 19, 21) having a spacer fixing means (fixing screw) 19 that is inserted into and fixed to.

On the other hand, the second sample holder 4 includes a second sample holder main body (16, 16) having a sample storage portion 16 forming a sample mounting space and a holder fixing convex portion 36 provided at the bottom of the sample storage portion 16. 36) and a second spacer 18 having a height for adjusting the distance between the bottom of the sample storage unit 16 and the upper surface of the sample holder base 22 and having a recess for storing the holder fixing projection 36, Holder fixing means (press screw) 21 for fixing the holder fixing projection 36 to the second spacer 18 at the upper part of the second spacer 18, and the second spacer 18 at the lower part of the second spacer 18 comprising a second holder having a spacer fixing means (fixing screw) 19 that secure inserted into m ₂₄ height adjustment jig and (18, 19, 21).

The sample storage unit 24 of the first sample holder body (24, 37) has a size prepared according to the size of the sample 303, and a circular bottom 25 is attached to the bottom of the sample storage unit 24. . In the first sample holder main body (24, 37), the holder fixing convex portion 37 is fixed to the first spacer 18 by the holder fixing means (press screw) 21. Further, the first spacer 18 is fixed to a spacer mounting screw hole (spacer mounting recess) m ₁₄ of the sample holder base 22 by a spacer fixing means (fixing screw) 19 (a plan view of the sample holder base 22 is shown in FIG. 3). The sample storage unit 16 of the second sample holder body (16, 36) has a size prepared according to the size of the sample 304, and a circular bottom 17 is attached to the bottom of the sample storage unit 16. . In the second sample holder main body (16, 36), the holder fixing convex portion 36 is fixed to the second spacer 18 by the holder fixing means (press screw) 21. Further, the second spacer 18 is fixed to a spacer mounting screw hole (spacer mounting recess) m ₂₄ of the sample holder base 22 by a spacer fixing means (fixing screw) 19. Here, the value of the total height T _{mes obtained} by adding the height h ₈₁ of the sample storage portion 24 of the first sample holder 3 and the height s ₈₁ of the first spacer 18 on the sample holder base 22, The value obtained by adding the height h ₉₁ of the sample storage portion 16 of the second sample holder 4 and the height s ₉₁ of the second spacer 18 is adjusted to be equal to each other.

As shown in FIG. 7, the sample storage unit 24 of the first sample holder 3 includes sample fixing screw holes 32a, 32b, 32c, 32d and the like for fixing the sample 303 (not shown). The sample storage unit 16 of the second sample holder 4 includes sample fixing screw holes 31a, 31b, 31c, 31d and the like for fixing a sample 304 (not shown). Here, the horizontal sizes of the sample storage portion 24 of the first sample holder 3 and the sample storage portion 16 of the second sample holder 4 are different. As defined in the first embodiment, the “horizontal direction” is a direction parallel to the main surface (surface) of the sample holder base 22. Further, the sizes of the sample storage portion 24 of the first sample holder 3 and the sample storage portion 16 of the second sample holder 4 are examples, and are not limited thereto. Further, the sample holder base 22 shown in FIG. 3A also includes the fixing positions on the sample holder base 22 of the sample storage portion 24 of the first sample holder 3 and the sample storage portion 16 of the second sample holder 4. Spacer mounting screw holes (spacer mounting recesses) m ₁₁ , m ₁₂ ,... M ₂₈ can be selected.

  8 and 9 exemplify types of the sample holder main body according to the second embodiment of the present invention. In general, brass or Al alloy is used as the material of the sample holder body.

8A and 8B show an example of the structure of the sample holder main body 41. FIG. The sample holder main body 41 includes a sample storage portion 411 and a holder fixing convex portion 412 provided at the bottom of the sample storage portion 411. The sample storage unit 411 has, for example, an outer diameter l ₁₁ of 26 mm, a height h ₁₁ of 23 mm, a depth h ₁₂ of 20 mm, and sample fixing screw holes 81a, 81b,.

9A and 9B illustrate the structure of the sample holder main body 42. FIG. The sample holder main body 42 includes a sample storage portion 421 and a holder fixing convex portion 422 provided at the bottom of the sample storage portion 421. The sample storage part 421 has an outer diameter l ₁₁ and a height h ₁₁ equal to the sample storage part 411 shown in FIG. 8, a depth h ₁₃ of 13 mm, for example, and sample fixing screw holes 82a, 82b,. Partly omitted). The sample holder main body 42 further includes a circular bottom portion 424 and a height adjusting male screw 425 integrated with the circular bottom portion 424. Height adjustment male screw 425 has a female screw and screwed passing through the sample accommodating portion 421 and the holder fixing protrusions 422, by rotating the circular bottom 424, it is possible to adjust the depth h _13. Further, the adjusted depth h ₁₃ can be fixed by pressing the fixing screw 275 against the height adjusting male screw 425. The size of the sample holder main bodies 41 and 42 shown in FIGS. 8 and 9 is an example, and is not limited to this. It is possible to use sample holders having the same structure as the sample holder main bodies 41 and 42 shown in FIGS. 8 and 9 and various sizes.

FIGS. 10 to 15 show examples of installation of various sample holder bodies on the sample holder base 22 in the sample holder assembly according to the second embodiment of the present invention. As shown in FIG. 10, the sample holder base 22 used in the sample holder assembly according to a second embodiment top, a plurality (3 × 3 pieces) spacer mounting recess _{m 11, m} 12 of, ... _{m 28} Each of the spacer mounting recesses m ₁₁ , m ₁₂ ,... M ₂₈ is provided with a female screw whose vertical direction is the direction of the rotation axis on the upper surface of the sample holder base 22. Therefore, the male screw (fixing screw) 19 as a spacer fixing means shown in FIG. 6, screw holes for the spacer attachment respectively (spacer mounting recess) m _{11, m} 12, is inserted into _... m _28, by screws a plurality of holders height adjustment jig (18, 19, 21) are screw holes for the spacer attachment (concave spacer _{attachment) m 11,} m _12, is fixed to ... _{m 28.} Since the sample holder main bodies 81, 82,... 89 are fixed to the respective holder height adjusting jigs (18, 19, 21), it is easy to fix the plurality of sample holder main bodies 81, 82,.

That is, even when a plurality of sample holder bodies 81, 82,... 89 are arranged on the upper surface of the sample holder base 22 in a 3 × 3, 4 × 4, etc. matrix, the holder height adjusting jig (18, 19 and 21), a tool space is secured in the center of the matrix, so that it is not necessary to prepare a special sample holder. The sample holder main bodies 81 to 89 include, for example, the sample storage portion 421 shown in FIG. 9 and can store a sample having a diameter of 25 mm. Conventional sample holder base 22, central to the sample holder mounting holes r _15, special sample holder body having a specimen holder fixing holes 183a, 183b shown in FIG. 20 of the sub-base 141 shown in FIG. 23 (181, 182) had to be prepared and fixed. However, according to the sample holder assembly according to the second embodiment of the present invention, as shown in FIG. 10, the sample holder main body 85 located at the center of the sample holder base 22 is shown in FIGS. Since it can be fixed to the spacer mounting recess m ₁₉ by the spacer fixing means (fixing screws) 14, 19, etc., which are male screws, via the spacers 13, 18, etc., the push inserted into the fixing screw hole A tool space for rotating the screw can be secured. Therefore, it is not necessary to prepare a special sample holder having the sample holder fixing holes 183a and 183b as shown in FIG. 20, and the same shape as the other sample holder main body 81 and the like fixed to the sample holder base 22 Can be used as is.

As shown in FIG. 11, the sample holder base 22 used in the sample holder assembly according to the second embodiment has a plurality (five) of spacer mounting recesses m ₁₁ , m ₁₃ , m ₁₉ , m ₂₆ , m ₂₈ is provided on the top surface, and each of the spacer mounting recesses m ₁₁ , m ₁₃ , m ₁₉ , m ₂₆ , m ₂₈ is provided with a female screw whose vertical direction is the direction of the rotation axis on the top surface of the sample holder base 22. It has been. Therefore, male screws (fixing screws) 19 as spacer fixing means shown in FIG. 6 are inserted into spacer mounting screw holes (spacer mounting recesses) m ₁₁ , m ₁₃ , m ₁₉ , m ₂₆ , m ₂₈ , respectively. The plurality of holder height adjusting jigs (18, ₁₉ , 21) are fixed to the spacer mounting screw holes (spacer mounting recesses) m ₁₁ , m ₁₃ , m ₁₉ , m ₂₆ , m ₂₈ by screws, Since the sample holder main bodies 91, 92,... 95 are fixed to the holder height adjusting jig (18, 19, 21), it is easy to fix the sample holder main bodies 91, 92,. That is, even when a plurality of sample holder main bodies 91, 92,... 95 are arranged on the upper surface of the sample holder base 22 in a matrix, by using the holder height adjusting jig (18, 19, 21), Since a tool space is secured in the center of the matrix, it is not necessary to prepare a special sample holder.

12 shows a spacer fixing recess m ₁₄ , m ₁₅ , m ₁₉ , m ₂₄ , m ₂₅ provided with a female screw of the sample holder base 22, and a male screw as a spacer fixing means shown in FIG. (fixing screw) 19 is inserted respectively, the plurality of holders by screwing height adjustment jig (18, 19, 21) is fixed to the spacer mounting recess _{m 14, m 15, m 19} , m 24, m 25 , 105 are fixed to the holder height adjusting jigs (18, 19, 21). Each of the sample holder main bodies 91 to 95 and the sample holder main bodies 101 to 105 can store a sample having a diameter of 32 mm. As shown in FIG. 24, in the sub base 141, only four sample holder bodies 221, 222 and the like that can store a sample having a diameter of 32 mm can be fixed on the sub base 141. However, as shown in FIG. 11, on the sample holder base 22 according to the second embodiment, five sample holder bodies 91 to 95 having the same size as the sample holder bodies 221 and 224 shown in FIG. Can be fixed. Further, as shown in FIG. 12, the spacer mounting recesses m ₁₄ , m ₁₅ , m ₁₉ , m ₂₄ , and m ₂₅ of the sample holder base 22 are the same as the sample holder main bodies 91 to 95 in a pattern different from FIG. The sample holder bodies 101 to 105 having a size can be fixed via the holder height adjusting jigs (18, 19, 21) shown in FIG.

In FIG. 13, male screws (fixing screws) 19 as spacer fixing means shown in FIG. 6 are inserted into the spacer mounting recesses m ₁₄ , m ₁₅ , m ₂₄ , and m ₂₅ of the sample holder base 22, respectively. A plurality of holder height adjusting jigs (18, 19, 21) are fixed to the spacer mounting recesses m ₁₄ , m ₁₅ , m ₂₄ , m ₂₅ , and each holder height adjusting jig (18, 19, 21) is fixed. The sample holder main body 111, 112, 113, 114 is fixed to the above. Each of the sample holder bodies 111 to 114 can store a sample having a diameter of 38 mm. As shown in FIG. 25, conventionally, in order to fix the sample holder main body 233 or 234 for storing a sample having a diameter exceeding 32 mm, a dedicated sample holder base 22 must be used. However, as shown in FIG. 13, in the sample holder base 22 according to the second embodiment, sample holder bodies 111 to 114 that can store a sample having a diameter of 38 mm can also be fixed.

In FIG. 14, male screws (fixing screws) 19 as spacer fixing means shown in FIG. 6 are inserted into the spacer mounting recesses m ₁₄ , m ₁₇ , m ₂₂ , m ₂₅ of the sample holder base 22, respectively. by a plurality of holders height adjustment jig (18, 19, 21) is a spacer mounting recess _{m 14, m 17, m 22} , m 25, is fixed, each of the holder height adjustment jig (18, 19, 21), sample holder bodies 121, 122, 123, 124 are fixed. The sample holder main bodies 121 and 124, the sample holder main body 122, and the sample holder main body 123 have different sizes. Here, for example, the sample holder main bodies 121 and 124 can store a sample having a diameter of 32 mm, the sample holder main body 122 can store a sample having a diameter of 40 mm, and the sample holder main body 123 can store a sample having a diameter of 42 mm. 15 shows that the sample holder main body 132 and the sample holder main body 131 having different sizes are arranged in the spacer mounting concave portion m ₁₃ and the spacer mounting concave portion m ₂₁ of the sample holder base 22 so that the holder height adjustment shown in FIG. They are fixed via jigs (18, 19, 21), respectively. Here, the sample holder main body 132 includes, for example, the sample storage portion 421 shown in FIG. 9 and can store a sample having a diameter of 25 mm. The sample holder main body 131 can store a sample having a diameter of 70 mm. In addition, the kind and fixing position of the sample holder main body fixed on the sample holder base 22 are not limited to what was shown in FIGS.

  As described above, according to the sample holder base 22 according to the second embodiment of the present invention, the sample storage portion 24 of the first sample holder 3 and the sample storage portion of the second sample holder 4 having different sizes. 16, since the fixing position of the sample holder on the sample holder base 22 can be easily changed through the holder height adjusting jigs (18, 19, 21), the first sample A plurality of sample holders having different sizes such as the holder main body (24, 37) and the second sample holder main body (16, 36) can be simultaneously fixed on one sample holder base 22.

(Other embodiments)
As described above, the present invention has been described according to the first and second embodiments. However, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

  For example, the number and position of holes (spacer mounting recesses) for mounting spacers in the sample holder base 22 shown in FIG. 3A are not limited to this. Similar to the sample holder main body and the spacer, it can be changed as necessary.

  The sample holder base 22 of the present invention can be applied to various surface analysis apparatuses such as EPMA and electron microscope.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

1-4 Sample holders 1S, 2S ... Holder height adjustment jigs 11, 16, 24, 161, 171, 181, 191, 2011, 411, 421 ... Sample storage portions 41, 42, 81-89, 91-95 , 101 to 105, 111 to 114, 121 to 124, 131, 132, 211 to 219, 221 to 224, 233, 234 ... sample holder main body 12, 17, 25, 291, 293, 424 ... circular bottom 13, 18 ... Spacer 14, 19, 72, 73, 275, 286, 287 ... Fixing screw 15, 21 ... Push screw 22 ... Sample holder base 23, 144, 232 ... Handle 26, 27 ... Fixing screw holes 29a-29d, 31a-31d , 32a to 32d, 81a to 81h, 82a to 82h, 103a to 103h, 104a to 104h, 105a to 105h, 106a to 1 6h, 107a to 107h ... Sample fixing screw holes 35, 36, 37, 162, 182, 292, 294, 412, 422 ... Holder fixing convex portions 41a to 41h, 71c, 71d, 91a, 91b, ... Sample Holder fixing screw holes 183a, 183b ... Sample holder fixing holes 51a-51d, 61a-61d ... Posts 141,231 ... Sub-bases 142,235 ... Base 151 ... Analysable region 152 ... Available region 425 ... Height adjustment male Screws 301 to 304 ... Samples m _{11 to} m ₂₈ ... Spacer mounting recesses q _{11 to} q ₁₄ ... Sample holder dedicated mounting holes r _{11 to} r ₁₉ ... Sample holder mounting holes

Claims (11)

A sample holder assembly comprising a sample holder base in which a plurality of spacer mounting recesses are arranged on an upper surface, and a plurality of sample holders respectively fixed to the sample holder base via the plurality of spacer mounting recesses, Each of the plurality of sample holders includes a sample holder main body having a sample storage portion forming a sample mounting space, and a holder fixing convex portion provided at the bottom of the sample storage portion;
A spacer having a height for adjusting a distance between a bottom portion of the sample storage portion and an upper surface of the sample holder base and having a concave portion for accommodating the holder fixing convex portion, and the holder at the upper portion of the spacer A holder fixing means for fixing a fixing convex portion to the spacer, and a holder height adjusting jig having a spacer fixing means for inserting and fixing the spacer into any one of the spacer mounting concave portions below the spacer. The sample holder assembly characterized by the above-mentioned.   The sample holders are arranged so that the plurality of sample holder bodies having different heights from each other have the same height on the upper surface of the sample storage unit by using suitable holder height adjusting jigs. The sample holder assembly according to claim 1, wherein the sample holder assembly is fixed to a base.   3. The sample according to claim 1, wherein the plurality of spacer mounting recesses are provided with a female screw, and the spacer fixing means is a male screw provided so as to be rotatable with respect to the spacer. Holder assembly.   A plurality of sample holder bodies having at least one of a shape and a size of the sample storage portion are set to have the same height on the upper surface of the sample storage portion by using a suitable holder height adjusting jig. The sample holder assembly according to any one of claims 1 to 3, wherein the sample holder assembly is fixed to the sample holder base. A set of a plurality of sample holders fixed to the sample holder base having a plurality of spacer mounting recesses arranged on the upper surface via the plurality of spacer mounting recesses, each of the plurality of sample holders being
A sample holder main body having a sample storage portion forming a sample mounting space, and a holder fixing convex portion provided at the bottom of the sample storage portion;
A spacer having a height for adjusting a distance between a bottom portion of the sample storage portion and an upper surface of the sample holder base and having a concave portion for accommodating the holder fixing convex portion, and the holder at the upper portion of the spacer A holder fixing means for fixing a fixing convex portion to the spacer, and a holder height adjusting jig having a spacer fixing means for inserting and fixing the spacer into any one of the spacer mounting concave portions below the spacer. A plurality of the sample holder bodies having different heights from each other and a holder height adjusting jig adapted to each of the plurality of sample holder bodies to form a pair, and the height of the upper surface of the sample holder A set of a plurality of sample holders, characterized in that they are selected to be the same.   6. The plurality of samples according to claim 5, wherein the plurality of spacer mounting recesses are provided with female screws, and the spacer fixing means is a male screw provided so as to be rotatable with respect to the spacers. A set of holders.   6. The set of a plurality of sample holders according to claim 5, wherein the plurality of spacer mounting recesses are provided with a female screw, and the spacer fixing means is a male screw provided integrally with the spacer. . In order to fix a plurality of sample holder bodies having different heights of the sample storage portions to the sample holder base having a plurality of spacer mounting recesses arranged on the upper surface so that the heights of the upper surfaces of the sample storage portions are the same. Holder height adjustment jig,
The sample holder main body has a concave portion for accommodating a holder fixing convex portion provided at the bottom portion of the sample storage portion, and the distance between the bottom portion of the sample storage portion and the upper surface of the sample holder base is set. A spacer having a height to be adjusted;
Holder fixing means for fixing the holder fixing convex portion to the spacer at the top of the spacer;
Spacer fixing means for inserting and fixing the spacer into any of the spacer mounting recesses at a lower portion of the spacer.   9. The holder height according to claim 8, wherein the plurality of spacer mounting recesses are provided with a female screw, and the spacer fixing means is a male screw provided rotatably with respect to the spacer. Adjustment jig. A plurality of sample holder main bodies having different heights from each other are provided through spacers each having a concave portion for storing a holder fixing convex portion provided at the bottom of a sample storage section provided in the sample holder main body. A sample holder base for fixing so that the height of the upper surface of the sample storage portion is the same,
A sample holder base comprising a plurality of spacer mounting recesses arranged on the upper surface for inserting a spacer fixing means provided at each lower portion of the spacer.   Each of the plurality of spacer mounting recesses is provided with a female screw whose vertical direction is the direction of the rotation axis on the upper surface of the sample holder base, and the spacer fixing means that is a male screw is inserted thereinto. The sample holder base according to claim 10, wherein the sample holder base is fixed.

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