JP2010182781A - Suction nozzle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction nozzle for conveying a lid, surely mounting the lid on a container by stably sucking the lid by the suction nozzle even if there is warpage in the lid. <P>SOLUTION: The suction nozzle for vacuum sucking a lid to mount the lid on an opening of a container includes: a central cavity 3 formed along the central axis L of the nozzle 1; a sucking surface 2 formed in the front end portion of the nozzle; coupling cavities 5, 6 communicating with the central cavity 3 and formed in a direction substantially parallel to the sucking surface 2; and a plurality of suction holes 7 communicating with the coupling cavities 6 and opening to the sucking surface 2, wherein the suction holes 7 open near the peripheral portion of the sucking surface 2. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  In the present invention, when an electronic component such as a semiconductor or an optical application device is hermetically sealed, the lid (lid body) is picked up from the lid supply stage, transported, and placed on the opening of the sealing container. The present invention relates to a suction nozzle for handling by suction.

  In general, in a sealing device such as a seam welding machine, when the electronic component 51 is accommodated in the container 52 and sealed as shown in FIG. 3, the suction nozzle 55 extends from the supply stage 54 to the opening of the container 52. It is transported while vacuum suction. And the general adsorption | suction system used at this time is demonstrated based on FIG. FIG. 4 is a schematic diagram showing the configuration of the adsorption system. In FIG. 4, 56 is a control unit, 57 is a vacuum pump, 58 is a tubular member such as a nylon hose that communicates from the vacuum pump 57 to the suction nozzle 55, and this tubular member 58 has an electromagnetic valve 59 on the vacuum pump 57 side. A suction sensor 60 is interposed in series on the suction nozzle 55 side.

  First, the control unit 56 issues a command to the vacuum pump 57 to cause the tubular member 58 to generate a negative pressure. Normally, the vacuum pump 57 is in a state in which a negative pressure is always generated when the apparatus on which the suction system is mounted is in operation. At this time, the electromagnetic valve 59 is closed according to a command from the control unit 56, and no negative pressure is transmitted to the suction nozzle 55. Therefore, the adsorption sensor 60 shows a substantially zero output value (pressure fluctuation value) with respect to the control unit 56.

  Next, when the suction nozzle 55 moves to a predetermined position for picking up the lid 53 and comes into contact with the lid 53, the electromagnetic valve 59 is opened by a command from the control unit 56, and the negative pressure generated by the vacuum pump 57 is applied to the suction nozzle 55. Until the lid 53 is adsorbed. As a result, the adsorption sensor 60 senses a negative pressure and changes the pressure fluctuation value, which is an output value, from zero to -15 kPa, for example. The control unit 56 that has acquired the pressure fluctuation value stores, for example, -10 kPa as a threshold value in advance. As a result of comparing the two, the control unit 56 determines that the suction state is normal when the acquired pressure fluctuation value is higher than the threshold value (if the acquired absolute value of the pressure is lower than the threshold value). The tool 55 is moved toward the container 52.

Further, even if the pressure fluctuation value sufficient for the suction nozzle 55 to suck and lift the lid 53 is -7 kPa, the output fluctuation of the vacuum pump 57 or the vibration applied to the lid 53 when the suction nozzle 55 moves. Impact must be taken into account. Therefore, the threshold is set to −10 kPa in consideration of the margin here. The suction nozzle 55 generally has a structure as shown in FIG. 5A is a side view of the suction nozzle 55, and FIG. 5B is a view taken along the line XX in FIG. 5A (a front view of the suction surface 55A). 5, 55A is a suction surface, 55B is a counterbore surface recessed in the suction surface 55A, and 55C is a through-hole formed along the central axis of the suction nozzle 55. Here, the counterbore surface 55B is recessed in order to apply the negative pressure in the through hole 55C to a wider area of the lid 53 that is the object to be adsorbed.

  However, actual lids are not only high in flatness but also have many warps. In particular, this phenomenon is remarkable in the lid 61 with a window for an optical element as shown in FIG. 6A is a plan view of the lid 61, and FIG. 6B is a view taken from the direction of arrows YY in FIG. 6A (viewed from the end face direction of the plate). In the lid 61 with a window, a translucent plate 61B such as sapphire is fixedly provided at a central opening of a metal plate 61A such as Kovar. Thus, when the thing with a different expansion coefficient is fixed through heat processing, it is very difficult to avoid the curvature when returning to normal temperature. Even if the lid is not a windowed lid, internal stress may occur during punching from the plate material or during surface treatment with temperature change, and warping may occur due to this effect.

  Here, a state in which the warped lid 61 is sucked using the conventional suction nozzle 55 shown in FIG. 5 and the suction system shown in FIG. 4 will be described with reference to FIG. FIG. 7A shows a state in which the suction nozzle 55 comes into contact with the lid 61 placed on the supply stage 62 and the electromagnetic valve 59 is opened to start suction. Here, since the suction nozzle 55 generates a pressing force in the direction of the arrow A at the time of the contact, the amount of warping of the lid 61 is reduced and exceeds the threshold value of the pressure fluctuation of the suction sensor 60, for example, −10 kPa ( Below the threshold pressure absolute value).

  The control unit 56 that has acquired the pressure fluctuation value determines that the suction has been normally performed, and raises the suction nozzle 55 in the direction of arrow A as shown in FIG. At this time, since the pressing force in the direction of arrow A disappears, warping of the lid 61 increases. Along with this, the area of the gap 63 increases and the amount of air leakage also increases. As a result, it is conceivable that the negative pressure decreases and the pressure fluctuation value indicated by the adsorption sensor 60 becomes, for example, around -7 kPa. If the suction nozzle 55 continues to move toward the container 52 in this state, the output of the vacuum pump 57 fluctuates during that time or the suction nozzle 55 vibrates, and the lid 61 may drop off or be displaced. Increases nature. If these occur, it becomes a fatal problem for the sealing operation. Of course, the control unit 56 may stop the movement of the suction nozzle 55 upon sensing a change in the output of the suction sensor 60 (decrease in negative pressure), but this also inevitably interrupts a series of sealing operations.

  Therefore, as a method for dealing with this problem, a method as shown in FIG. 8A is a side view of the suction nozzle 64, and FIG. 8B is a ZZ arrow view (front view of the suction surface 64A) in FIG. 8A. The suction nozzle 64 is provided with a groove around the outside of the counterbore surface 64B, and an O-ring 65 is fitted in the groove. A part of the O-ring 65 slightly protrudes from the suction surface 64A, and the protruding amount can be finely adjusted with the set screw 66 on the back surface.

Japanese Unexamined Patent Publication No. 2003-243428 (page 3, FIG. 1)

  However, since the O-ring used here needs to be a rubber-like material having elasticity, generation of dust due to contact with the lid, deterioration due to secular change, etc. cannot be avoided, and when it is pressed against the lid Due to its elasticity, it is difficult to maintain the mounting accuracy at the target value of about 50 μm. Therefore, the present invention provides a suction nozzle that reliably handles the lid and copes with warping of the lid without using an elastic member.

As a first aspect of the present invention, when an electronic component is housed in a container and the opening of the container is closed and hermetically sealed with a lid, the lid is vacuum-adsorbed and placed on the opening of the container A suction nozzle, which is formed in a central cavity formed along the central axis of the nozzle, a suction surface formed at the tip of the nozzle, and in a direction substantially parallel to the suction surface, communicating with the central cavity. And a plurality of suction holes that open to the suction surface and communicate with the connection cavity, the suction holes being opened near the peripheral edge of the suction surface. It is to provide.

According to a second aspect of the present invention, the suction surface has a flat surface except for the opening of the suction hole provided in the vicinity of the peripheral edge portion thereof and a blocking portion that closes the opening to the suction surface of the central cavity. The suction nozzle described as the first aspect is provided.

Further, according to a third aspect of the present invention, the connection cavity includes a first connection cavity communicating with the central cavity and a pair of second connection cavities communicating with the first connection cavity. The suction nozzle according to any one of the first and second aspects, characterized in that one end communicates with a second connection cavity and the other end opens on the suction surface.

  According to the first aspect of the present invention, the suction hole opening is not provided in the vicinity of the center of the lid where a large gap is generated by warping of the lid, and the plurality of suction holes are provided in the vicinity of the peripheral edge of the lid having a relatively small gap. The amount of air that leaks and enters the adsorption hole is small. Therefore, in addition to obtaining a stable adsorption force, the determination of adsorption / non-adsorption determined from the output of the adsorption sensor is also stabilized.

  According to the second aspect of the present invention, since a large recess close to the area of the lid is not provided on the suction surface, a plurality of openings provided in the vicinity of the peripheral portion of the suction surface are provided as gaps through which air enters the opening. Only the peripheral edge of the surface is obtained, and a stable adsorption force can be obtained.

  According to the third aspect of the present invention, the first and second coupling cavities can be arranged to allow the cavities to communicate from the central cavity to the suction holes, so that the suction is easily performed only in the vicinity of the peripheral portion of the suction surface. A hole can be opened.

The side view and bottom view of the suction nozzle which show embodiment of this invention The perspective view of the suction nozzle which shows embodiment of this invention The perspective view which shows the adsorption | suction operation | movement of the conventional lid Schematic diagram showing a conventional lid adsorption system Side view and bottom view showing a conventional suction nozzle A plan view and a side view showing an example of a conventional lid Side view showing lid suction operation Side view and bottom view showing another conventional suction nozzle

  Next, an embodiment of a suction nozzle according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 shows a suction nozzle according to the present invention, FIG. 1 (a) is a side view of the suction nozzle 1, and FIG. 1 (b) is an NN arrow view in FIG. 1 (a) (of the suction surface 2). Front view). Here, reference numeral 1 denotes a suction nozzle, 2 denotes a suction surface, and a central cavity 3 is formed along the central axis L of the nozzle. The lower end 3A of the central cavity 3 is blocked by a set screw 4 to prevent air from flowing. 1A and 1B, a portion denoted by reference numeral 5 is a first connection cavity provided in parallel to the suction surface 2. The central portion of the first connection cavity 5 communicates with the central cavity 3, and the openings 5 </ b> A and 5 </ b> B at both ends thereof are blocked by the set screw 4 to prevent air from flowing.

  Further, a portion denoted by reference numeral 6 in FIG. 1B is a second connection cavity, which is a pair of cavities provided in parallel to the suction surface 2 and in parallel to each other with the central cavity 3 interposed therebetween. Also. Each of the second connection cavities 6 has a central portion communicating with the first connection cavity 5, and the openings 6 </ b> A and 6 </ b> B at both ends thereof are blocked by the set screw 4, thereby preventing air from flowing. Yes. 1 (a) is a suction hole, one end communicates with the vicinity of both ends of the second connection cavity, and the other end is connected to the suction surface 2 as shown in FIG. 1 (b). The four openings 7A are opened.

  As shown in FIG. 1, the suction surface 2 has four openings 7A and 3A (the surface of the set screw 4 is slightly recessed from the suction surface 2), which is a central cavity blockage portion. One plane is formed. Accordingly, as shown in FIG. 2 which is a perspective view of the suction nozzle according to the embodiment of the present invention, the interval between the portions M where the gap is the largest with respect to the suction surface 2 due to warping of the lid 61 is, for example, 100 μm. In this case, the maximum portion of the gap at the opening end of the opening 7A of the embodiment is 51 μm. In this case, the gap area of the portion with the maximum interval M is 3.75 square mm in total at two locations on the opposite side, and the gap area around the opening 7A is 1.20 square mm in total at four locations.

  Because of the gap area difference, when the suction nozzle is sucking the lid in the past, the value indicated by the suction sensor was about -15 kPa, whereas the suction nozzle of the embodiment did not use the lid under the same conditions. The value indicated by the adsorption sensor when adsorbing was up to -30 kPa. As a result, there is not much difference from the threshold value of −10 kPa, and the determination of whether or not the suction is unstable is stable and the suction force itself is stable as compared with the conventional case. The stability of the process of placing on the container is improved, and the yield is also improved.

DESCRIPTION OF SYMBOLS 1 Adsorption nozzle 2 Adsorption surface 3 Central cavity 4 Set screw 5 1st connection cavity 6 2nd connection cavity 7 Adsorption hole 7A Opening part

Claims (3)

An adsorption nozzle for vacuum-adsorbing and placing the lid on the opening of the container when the electronic component is housed in the container and the opening of the container is closed and hermetically sealed with the lid. A central cavity formed along the central axis, a suction surface formed at the tip of the nozzle, a connection cavity that communicates with the central cavity and is formed in a direction substantially parallel to the suction surface, and the connection cavity. A suction nozzle comprising: a plurality of suction holes communicating with the suction surface, wherein the suction holes are opened near a peripheral portion of the suction surface. 2. The suction surface according to claim 1, wherein the suction surface is a flat surface except for an opening of the suction hole provided in the vicinity of a peripheral edge portion thereof and a blocking portion that blocks an opening to the suction surface of the central cavity. The suction nozzle described. The connection cavity includes a first connection cavity that communicates with the central cavity and a pair of second connection cavities that communicate with the first connection cavity, and one end of the adsorption hole communicates with the second connection cavity. The suction nozzle according to claim 1, wherein the other end is open to the suction surface.

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