JP2010173857A - Floating conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a floating conveying device capable of quickly centering a plate-like body by eliminating influences of the shape and the weight of the plate-like body. <P>SOLUTION: This floating conveying device includes: a base 1 including a plate-like conveying surface (a top surface 1<SB>1</SB>) to send the plate-like bodies along the conveying surface; a first injecting means for injecting gas from the conveying surface to float the plate-like bodies from the conveying surface and to move the floated plate-like bodies along the conveying surface; and a second injecting means (2F<SB>1</SB>-2H<SB>1</SB>and 2F<SB>2</SB>-2H<SB>2)</SB>for injecting gas in order to hold the plate-like bodies floated by the first injecting means in the center position I<SB>2</SB>of the conveying surface. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a levitating and conveying apparatus, and more particularly, to a levitating and conveying apparatus that levitates a plate-like substrate when conveying a wafer, a glass plate, or the like as the plate-like substrate.

  As a system that floats a plate-like substrate and conveys the plate-like substrate in this state, for example, there is a system that conveys a glass plate for a TFT type liquid crystal display. This transport system is shown in FIG. This transport system is configured by a combination of a transfer unit 100 and a control unit 200. The transfer unit 100 floats the rectangular glass plate 300 and moves it in the movement direction 310. The control unit 200 stops and stops in a state where the glass plate 300 is floated, and changes the direction in the change direction 311. Furthermore, although not shown, the transport system includes a processing unit that performs various processes on the glass plate 300.

  The transfer unit 100 is usually connected and used in order to move the glass plate 300 linearly. An example of the transfer unit 100 is shown in FIG. The transfer unit 100 includes a base 110 and an enclosure member 120. The base 110 is provided with a supply system 111 for supplying a gas for floating the glass plate 300, for example, a nitrogen gas, an argon gas, dry air, or other gas that does not affect the glass plate 300.

  An upper surface 112 of the base 110 covered by the enclosure member 120 is a conveyance surface of the conveyance path, and a plurality of ejection holes 113 are formed in the upper surface 112. As shown in FIG. 22, the ejection hole 113 is inclined with respect to the upper surface 112, and the inclination direction of the ejection hole 113 is inclined toward the center 112 </ b> A of the moving direction 310 of the glass plate 300. The center 112A is also the center of the upper surface 112.

  In addition to the ejection holes 113, as shown in FIG. 23, the ejection ejection holes 115 are arranged parallel to the moving direction 310 of the glass plate 300 and inclined with respect to the upper surface 112. Yes.

  The ejection holes 113 and 115 are formed between the upper surface 112 and the auxiliary holes 114 and 116. The auxiliary holes 114 and 116 communicate with the supply system 111, respectively. Since the diameters of the ejection holes 113 and 115 are small, the auxiliary holes 114 and 116 are preliminary holes having a large diameter that are formed in the base 110 in advance when the ejection holes 113 and 115 are formed.

  The gas supplied from the supply system 111 is ejected from the ejection holes 113 and 115 through the auxiliary holes 114 and 116. The jet direction of the gas from the jet holes 113 and 115 is inclined obliquely upward with respect to the upper surface 112. In addition, the gas from the ejection hole 113 is perpendicular to the moving direction 310 and the gas from the ejection hole 115 is parallel. Such gas ejection is represented planarly by the ejection directions 113A and 115A in FIG.

  Thus, the glass plate 300 is lifted and moved in the moving direction 310 by the gas jetted in the jetting directions 113A and 115A from the jet holes 113 and 115, and at the same time, the center of the glass plate 300 is along the center 112A of the upper surface 112. Since it moves, the side surface of the glass plate 300 does not contact the side wall of the enclosure member 120. That is, the center of the glass plate 300 moves to the center 112 </ b> A of the upper surface 112 by the aligning action of each ejection hole 113. By aligning the glass plate 300, the glass plate 300 is moved in a non-contact state with respect to the enclosure member 120.

  The control unit 200 receives the glass plate 300 sent from the transfer unit 100, and stops the glass plate 300, changes the stationary and moving direction, rotates the glass plate 300 itself, and the like. The control unit 200 performs control such as stopping and resting on the glass plate 300 by ejecting gas.

  A processing system for the glass plate 300 is constructed by combining such a transport system including the transfer unit 100 and the control unit 200 and various processing units. An example of this transport system is shown in Japanese Patent Application No. 3-328052.

  By the way, the conventional levitation transport apparatus has the following problems. That is, the ejection hole 113 of the transfer unit performs both the floating of the glass plate 300 and the alignment with respect to the glass plate 300 by gas ejection. For this reason, when the glass plate 300 becomes heavy, the alignment effect by the ejection hole 113 with respect to the glass plate 300 becomes weak. As a result, the glass plate 300 meanders and the movement time increases, and the glass plate 300 collides with the enclosure member 120.

  An object of the present invention is to solve such a problem and to provide a levitating and conveying apparatus capable of quickly aligning a plate-like substrate, excluding the influence of the shape and weight of the plate-like substrate. .

  The present invention according to claim 1 comprises a plate-like substrate by providing a plate-like conveying surface, a base for sending the plate-like substrate along the conveying surface, and jetting gas from the conveying surface. In order to keep the plate-like substrate levitated from the conveying surface and moved along the conveying surface along the conveying surface, and the plate-like substrate levitated by the first ejecting means at the central position of the conveying surface, And a second jetting means for jetting gas.

  With this configuration, the plate-like substrate sent to the upper surface of the base portion floats with the gas from the first ejection means. At the same time, the plate-like substrate is quickly moved toward the center of the upper surface of the base by the gas from the second ejection means. Thus, the plate-like substrate moves linearly on the upper surface without meandering and protruding from the upper surface of the base.

  According to a second aspect of the present invention, in the levitation conveyance apparatus according to the first aspect, the second ejection means includes two side ejection portions arranged along both sides on the conveyance surface, and these And a supply system for supplying gas to the two side jetting portions, each side jetting portion having a plurality of jet holes for jetting gas in the central direction of the transport surface.

  According to a third aspect of the present invention, in the levitation conveyance apparatus according to the second aspect, each of the side ejection portions is movable in the central direction of the conveyance surface.

  According to a fourth aspect of the present invention, in the levitation conveyance apparatus according to the first aspect, the second ejection unit is disposed on the conveyance surface so as to sandwich the center of the conveyance surface, and the center of the conveyance surface. It is characterized by comprising two surface side ejection portions for ejecting gas in the direction and a supply system for supplying gas to these surface side ejection portions.

  According to a fifth aspect of the present invention, in the levitation conveyance apparatus according to the fourth aspect, each of the surface-side ejection portions includes at least one ejection hole array along the transport surface, and the ejection hole array includes: A plurality of ejection holes arranged toward the center of the conveying surface, each of the ejection hole rows ejecting gas toward the center of the conveying surface and having a plurality of ejection holes arranged along the conveying surface It is characterized by that.

  According to a sixth aspect of the present invention, in the levitation conveyance apparatus according to the fourth aspect, each of the surface-side ejection units includes at least one ejection slit row along the transport surface, and the ejection slit row includes: A plurality of ejection slits are provided toward the center of the transport surface, and each of the ejection slit rows includes a plurality of ejection slits that eject gas toward the center of the transport surface and are arranged along the transport surface. It is characterized by that.

2 is a plan view showing a base portion of the levitation transport apparatus according to Embodiment 1. FIG. It is sectional drawing which shows the II cross section of FIG. It is sectional drawing which shows the II-II cross section of FIG. It is explanatory drawing for demonstrating the mode of the ejection of gas. It is explanatory drawing for demonstrating the mode of the alignment by the ejected gas. It is sectional drawing which shows the base of the levitation conveyance apparatus concerning Embodiment 2. FIG. 10 is a plan view showing a base portion of a levitation transport apparatus according to Embodiment 3. FIG. It is sectional drawing which shows the III-III cross section of FIG. FIG. 6 is a perspective view showing an ejection device according to a third embodiment. It is a perspective view which shows the ejection apparatus concerning Embodiment 4. FIG. 10 is a cross-sectional view showing a cross section of a base according to a fifth embodiment. FIG. 10 is a plan view showing a base portion of a levitation transport apparatus according to a sixth embodiment. It is sectional drawing which shows the IV-IV cross section of FIG. It is a perspective view which shows the part of the slit of FIG. FIG. 10 is a plan view showing an ejection slit structure used in the seventh embodiment. It is sectional drawing which shows the VV cross section of FIG. It is a perspective view which shows the groove | channel of FIG. It is sectional drawing which shows the cross section of the shielding board of FIG. It is a bottom view which shows the bottom face of the shielding board of FIG. It is a top view which shows the conventional plate-shaped base | substrate conveyance system. It is a perspective view which shows the conventional transfer unit. It is sectional drawing which shows the XI-XI cross section of FIG. It is sectional drawing which shows the XII-XII cross section of FIG. It is explanatory drawing which shows the ejection direction by the conventional transfer unit.

[Embodiment 1]
Next, Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a plan view showing a base portion of the levitation transport apparatus according to the first embodiment. FIG. 2 is a cross-sectional view showing a II cross section of FIG. FIG. 3 is a cross-sectional view showing a II-II cross section of FIG. FIG. 4 is an explanatory diagram for explaining a state of gas ejection. FIG. 5 is an explanatory diagram for explaining a state of alignment by the ejected gas.

In Embodiment 1, the base 1 shown in FIG. 1 is used instead of the base 110 of FIG. The base 1 has a long rectangle with respect to the moving direction 310. And, the base 1 has an upper surface 1 ₁ is a flat plate-like body.

In the vicinity of the end portion of the upper surface 1 ₁ of the base portion 1, it is set set lines 1A _1, 1A _2. Further, setting lines 1B ₁ and 1B ₂ are set inside the setting lines 1A ₁ and 1A ₂ , and setting lines 1C ₁ and 1C ₂ are set inside thereof.

The setting lines 1A _{1 to} 1C ₁ and 1A _{2 to} 1C ₂ are for arranging the buoyant holes. That is, as shown in FIG. 2, the setting lines 1A ₁ and 1A ₂ are provided with a large number of ejection holes 2A ₁₁ and 2A ₂₁ and a large number of auxiliary holes 2A ₁₂ and 2A _22, and the setting lines 1B ₁ and 1B ₂ are provided. the, a number of ejection holes 2B _11, 2B ₂₁ and a number of auxiliary holes 2B _12, 2B _22, respectively. Further, the setting lines 1C ₁ and 1C ₂ are provided with a large number of ejection holes 2C ₁₁ and 2C ₂₁ and a large number of auxiliary holes 2C ₁₂ and 2C ₂₂ .

The ejection holes 2A _{11 to} 2C ₁₁ , 2A _{21 to} 2C ₂₁ and the auxiliary holes 2A _{12 to} 2C ₁₂ , 2A _{22 to} 2C ₂₂ are respectively the same as the ejection holes 113 and the auxiliary holes 114 of FIG. The ejection hole 2A ₁₁ and the auxiliary holes 2A _12, ejection hole 2B ₁₁ and the auxiliary hole 2B _12, ejection hole 2C ₁₁ and the auxiliary hole 2C _12, discharge holes 2A ₂₁ and the auxiliary holes 2A _22, discharge holes 2B ₂₁ and the auxiliary hole 2B ₂₂ and the ejection hole 2C ₂₁ and the auxiliary hole 2C ₂₂ constitutes flying jet portion _{2A 1, 2B 1, 2C 1} , 2A 2, 2B 2, 2C 2 , respectively. Further, all the ejection holes 2A ₁₁ , 2B ₁₁ , 2C ₁₁ , 2A ₂₁ , 2B ₂₁ , 2C ₂₁ form a levitation ejection hole array, respectively.

Setting lines 1D ₁ , 1D ₂ , 1E ₁ and 1E ₂ are set between the setting line 1C ₁ and the setting line 1C ₂ , respectively. The setting lines 1D ₁ , 1D ₂ , 1E ₁ , 1E ₂ are for arranging the moving ejection holes. That is, the setting lines 1D ₁ and 1D ₂ are provided with a large number of ejection holes 2D ₁₁ and 2D ₂₁ and a large number of auxiliary holes 2D ₁₂ and 2D ₂₂ . The setting lines 1E ₁ and 1E ₂ are provided with a large number of ejection holes 2E ₁₁ and 2E ₂₁ and a large number of auxiliary holes 2E ₁₂ and 2E ₂₂ .

The ejection holes 2E ₁₁ and 2E ₂₁ and the auxiliary holes 2E ₁₂ and 2E ₂₂ are the same as the ejection holes 115 and the auxiliary holes 116 in FIG. 23, respectively, and send the glass plate in the moving direction 310. Each ejection hole 2D ₁₁ , 2D ₂₁ and each auxiliary hole 2D ₁₂ , 2D ₂₂ send the glass plate in a direction opposite to the moving direction 310. The ejection hole 2D ₁₁ and the auxiliary hole 2D ₁₂ , and the ejection hole 2D ₂₁ and the auxiliary hole 2D _{22 form} the first movement ejection parts 2D ₁ and 2D ₂ , respectively. The ejection hole 2E ₁₁ , the auxiliary hole 2E ₁₂ , and the ejection hole 2E ₂₁ and auxiliary hole 2E _{22 form} second moving ejection portions 2E ₁ and 2E ₂ , respectively.

Between one end of the upper surface 1 ₁ of the base portion 1 and the set lines 1A _1, and between the other end portion of the upper surface 1 ₁ and the set line 1A _2, setting the line 1F _1, 1F _2, respectively Is set. To set the line 1A _1, 1B _1, each between 1C ₁ is set set line 1G _1, IH _1, respectively, between each set line _{1A 2, 1B 2, 1C 2} , setting the line 1G _2, IH ₂ is set for each. That is, the setting lines 1A ₁ , 1B ₁ , 1C ₁ and the setting lines 1F ₁ , 1G ₁ , 1H ₁ are alternately arranged. Similarly, the setting lines 1A ₂ , 1B ₂ , 1C ₂ and the setting lines 1F ₂ , 1G are arranged. ₂ and 1H ₂ are alternately arranged. As a result, the setting lines 1F ₁ , 1G ₁ , 1H ₁ are arranged at regular intervals, and similarly, the setting lines 1F ₂ , 1G ₂ , 1H ₂ are arranged at regular intervals.

As shown in FIG. 3, the setting lines 1F ₁ and 1F ₂ are provided with a large number of ejection holes 2F ₁₁ and 2F ₂₁ and a large number of auxiliary holes 2F ₁₂ and 2F ₂₂ . Each ejection hole 2F _11, 2F ₂₁ is, in the upward direction relative to the upper surface 1 ₁ of the base 1, and ejecting a gas toward the center 1 ₂ of the top surface 1 _1.

The ejection hole 2F ₁₁ and the auxiliary hole 2F ₁₂ located on the setting line 1F ₁ constitute the alignment ejection part 2F ₁ for aligning the glass plate 300. As shown in FIG. 4, the ejection hole 2 </ b> F ₁₁ of the alignment ejection portion 2 </ b> F ₁ ejects gas toward the side wall 301 of the glass plate 300 in the ejection direction θ <b> 1. Ejection direction θ1 of the gas at this time, when the ejection direction of the gas ejection hole 2A ₁₁ of flying jet portion 2A ₁ is ejected is .theta.2, it is set as follows. Incidentally, ejection direction .theta.1, .theta.2 is an angle relative to the top surface 1 _1.

0 (zero) <ejection direction θ1 <ejection direction θ2
By such setting of the ejection directions θ1 and θ2, the force generated by the ejection of gas acts on the glass plate 300. That is, the jetted gas in the ejection direction .theta.1, the force W ₁ of the glass plate 300 is received by a centering force W ₁₁ is a force parallel to the upper surface 1 ₁ is a perpendicular force to the top surface 1 ₁ levitation It is divided into a force W _12. Similarly, the jetted gas in the ejection direction .theta.2, the force W ₂ of the glass plate 300 is subjected is divided into a centering force W ₂₁ and levitation force W _22.

  Since the ejection direction θ1 is smaller than the ejection direction θ2, the relationship between the propulsive force and the levitation force is as follows.

Alignment force W ₂₁ <Alignment force W ₁₁
Levitation force W ₂₂ > Levitation force W ₁₂
As a result, the alignment force W ₁₁ of the alignment ejection portion 2F ₁ becomes larger than the alignment force W ₂₁ of the levitation ejection portion 2A ₁ , so that the glass plate 300 is mainly formed by the gas in the ejection direction θ1. There moves to the center 1 ₂ of the top surface _1.

In a similar manner to setting line 1F _1, the set line 1F _2, a plurality of ejection holes 2F ₂₁ and a number of auxiliary holes 2F ₂₂ is provided. The ejection hole 2F ₂₁ and the auxiliary hole 2F ₂₂ constitute a centering ejection part 2F ₂ . Tone ejection direction of the gas core for ejecting portion 2F ₂ is ejected is adjusted with opposing like ejection direction of the gas from the core for ejecting portion 2F _1, regulation ejection hole ₂₁ DOO alignment for ejection of the core for jet portion 2F ₂ and ejection hole 2F ₁₁ parts 2F ₁ are arranged. Thus, alignment for ejecting portion 2F ₂ is paired with ejection portion 2F ₁ for alignment, it performs alignment for the glass plate.

The setting lines 1G ₁ and 1G ₂ are provided with a large number of ejection holes 2G ₁₁ and 2G ₂₁ and a large number of auxiliary holes 2G ₁₂ and 2G ₂₂ . Configure the ejection hole 2G ₁₁ and the auxiliary hole 2G ejection portion 2G ₁ for ₁₂ transgression alignment, constituting the ejection hole 2G ₂₁ and the auxiliary hole 2G ₂₂ transgression alignment for ejecting portion 2G _2. Ejection portion 2G _1, 2G ₁ for alignment is the same as the alignment ejection portion 2F _1, 2F _2, each ejection hole 2G _11, 2G ₂₁ is toward the center 1 ₂ of the top surface 1 _1, the ejection direction θ1 Each gas is ejected.

The setting lines 1H ₁ and 1H ₂ are provided with a large number of ejection holes 2H ₁₁ and 2H ₂₁ and a large number of auxiliary holes 2H ₁₂ and 2H ₂₂ . Configure the ejection hole 2H ₁₁ and the auxiliary hole 2H ₁₂ ejection portion 2H ₁ for transgressions alignment, constituting the ejection hole 2H ₂₁ and the auxiliary hole 2H ₂₂ transgression alignment for ejecting portion 2H _2. Ejection portion 2H _1, 2H ₁ for alignment is the same as the alignment ejection portion 2F _1, 2F _2, each ejection hole 2H _11, 2H ₂₁ is toward the center 1 ₂ of the top surface 1 _1, the ejection direction θ1 Each gas is ejected.

The ejection hole 2F ₁₁ on setting line 1F ₁ and ejection hole 2G ₁₁ on setting line 1G ₁ and ejection hole 2H ₁₁ on setting line IH ₁ forms a first surface jetting unit, also setting the line 1F the ejection hole 2F ₂₁ on ₂ settings and ejection holes 2G ₂₁ on line 1G ₂ and discharge holes 2H ₂₁ on setting line IH ₂ to form a second side ejection part. Furthermore, the first and second surface-side ejection portions and the supply system (not shown) constitute second ejection means.

  Next, the operation of the first embodiment will be described.

The glass plate 300 sent to the base 1 floats with the gas ejected from the surfacing ejection portions 2A _{1 to} 2C ₁ and 2A _{2 to} 2C ₂ . Moreover, the glass plate 300 is sent to the moving direction 310 by the gas ejected from the first moving ejection portions 2D ₁ and 2D ₂ .

At the same time, gas from the alignment jetting portion corresponding to the width of the glass plate 300, for example, the alignment jetting portions 2F ₁ and 2F ₂ is jetted to the side wall 301 of the glass plate 300 as shown in FIG. The The gas blown, glass plate 300 is moved to the center 1 _2, alignment with respect to the glass plate 300 is performed.

As described above, according to the first embodiment, the floating ejection portions 2A _{1 to} 2C ₁ , 2A _{2 to} 2C ₂ , the first movement ejection portions 2D ₁ and 2D ₂ , and the second movement ejection portions 2E ₁ and 2E. Apart from ₂ , centering ejection portions 2F _{1 to} 2H ₁ and 2F _{2 to} 2H ₂ are provided. And since the alignment with respect to the glass plate 300 is performed by the gas ejected from the alignment jetting portions 2F _{1 to} 2H ₁ and 2F _{2 to} 2H ₂ , even if the glass plate 300 becomes heavy, it is strongly ejected for alignment. The alignment with respect to the glass plate 300 can be performed by the gas to be performed.

Also, adjusting the core for ejecting portion 2F ₁ through 2h ₁ DOO alignment for ejecting portion 2F ₂ through 2h ₂ it has arranged in order toward the center 1 ₂ of the top surface 1 _1. As a result, from the ejection portion 2F ₁ through 2h ₁ DOO alignment for ejecting portion 2F ₂ through 2h ₂ for alignment in accordance with the width of the glass plate, by selecting the ejection portion for optimal alignment, any Alignment of the width glass plate can be performed. That is, after conveyance of a glass plate, conveyance of a glass plate having a width different from that of the glass plate (hereinafter referred to as mixed conveyance of glass plates) is enabled.

[Embodiment 2]
Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 6 is a cross-sectional view showing the base of the levitation transport apparatus according to the second embodiment.

In the second embodiment, instead of the floating ejection portions 2A _{1 to} 2C ₁ and 2A _{2 to} 2C ₂ used in the first embodiment, the floating ejection portions 11A _{1 to} 11C ₁ and 11A ₂ to 11 shown in FIG. 11C ₂ is used. That is, the floating ejection portions 11A ₁ and 11A _{2 according to the second} embodiment include a large number of ejection holes 11A ₁₁ and 11A ₂₁ and a large number of auxiliary holes 11A ₁₂ and 11A ₂₂ . The auxiliary holes 11A ₁₂ and 11A ₂₂ are the same as the auxiliary holes 2A ₁₂ and 2A _{22 of the} first embodiment, respectively.

Unlike the ejection holes 2A ₁₁ and 2A _{21 of the} first embodiment, the ejection holes 11A ₁₁ and 11A ₂₁ eject gas in a direction perpendicular to the upper surface 10 _{1 of the} base 10. In other words, in the second embodiment, an ejection direction θ2 in Fig. 5 is 90 degrees, the jet holes 11A _11, 11A ₂₁ is used as floating dedicated glass plate.

The floating ejection portions 11B ₁ and 11C ₁ include a large number of ejection holes 11B ₁₁ and 11C ₁₁ and a large number of auxiliary holes 11B ₁₂ and 11C ₁₂ , and the floating ejection portions 11B ₂ and 11C ₂ include a large number of ejection holes 11B. and a _21, 11C ₂₁ and the plurality of auxiliary holes 11B _22, 11C _22.

The ejection holes 11B ₁₁ and 11C ₁₁ and the auxiliary holes 11B ₁₂ and 11C ₁₂ are the same as the ejection hole 11A ₁₁ and the auxiliary hole 11A ₁₂ , respectively, and the ejection holes 11B ₂₁ and 11C ₂₁ and the auxiliary holes 11B ₂₂ and 11C ₂₂ are ejected. the hole 11A ₂₁ and the auxiliary holes 11A ₂₂ are each identical.

Further, the second embodiment includes the same first moving ejection portions 11D ₁ and 11D ₂ and the second moving ejection portions 11E ₁ and 11E ₂ as in the first embodiment.

  Further, in the second embodiment, although not shown, the same alignment jetting portion as in the first embodiment is provided.

Thus, according to the second embodiment, the floating ejection portions 11A _{1 to} 11C ₁ and 11A _{2 to} 11C ₂ eject gas in a direction perpendicular to the upper surface 10 _{1 of the} base 10, so that even if the glass plate becomes heavy, by the levitating ejection portions _{11A 1 ~11C 1, 11A 2 ~11C} 2 Doo alignment for ejecting portion, it is possible by floating the glass sheet along the center of the upper surface 10 ₁ is moved.

Further, since the floating ejection portions 11A _{1 to} 11C ₁ and 11A _{2 to} 11C ₂ eject gas in a direction perpendicular to the upper surface 10 _{1 of the} base 10, the ejection direction θ1 in FIG.
0 <θ1 <90
In this way, it can be set over a wide range.

[Embodiment 3]
Next, a third embodiment of the present invention will be described with reference to FIGS. FIG. 7 is a plan view showing the base of the levitation transport apparatus according to the third embodiment. 8 is a cross-sectional view showing a cross section taken along the line III-III in FIG. FIG. 9 is a perspective view showing the ejection device according to the third embodiment.

  The levitating and conveying apparatus according to the third embodiment is a transfer unit in a conveying system that conveys a plate-like substrate by levitating, and includes a base 21, an enclosure member 22, and alignment parts 23 and 24 as side ejection parts. .

The enclosure material 22 is the same as the enclosure material 120 of FIG. The base portion 21 includes levitation jet portions 21A _{1 to} 21A ₆ , jet holes 21B ₁₁ and 21B _12, and auxiliary holes 21B ₁₂ and 21B ₂₂ each having jet holes 21A _{11 to} 21A ₆₁ and auxiliary holes 21A _{12 to} 21A _62. , First moving jetting portions 21B ₁ , 21B ₂ , and second moving jetting portions 21C ₁ , 21C ₁₁ , 21C ₁₂ and auxiliary holes 21C ₁₂ , 21C ₂₂ , respectively. 21C ₂ is provided.

The floating ejection portions 21A _{1 to} 21A ₃ and 21A _{4 to} 21A ₆ are the same as the floating ejection portions 2A _{1 to} 2C ₁ and 2A _{2 to} 2C _{2 of the first} embodiment, respectively, and the first moving ejection portion 21B. ₁ and 21B ₂ are the same as the first moving ejection portions 2D ₁ and 2D ₂ of the first embodiment. Further, the second moving ejection portions 21C ₁ and 21C ₂ are the same as the second moving ejection portions 2E ₁ and 2E _{2 of the first} embodiment.

  The alignment portions 23 and 24 include drive devices 23A and 24A, four expansion devices 23B and 24B, and four ejection devices 23C and 24C, respectively.

  The telescopic devices 23B and 24B pass through the through holes 22A formed in the enclosure member 22 and connect the four ejection devices 23C and 24C to the driving devices 23A and 24A, respectively. The expansion and contraction devices 23B and 24B expand and contract in the direction perpendicular to the moving direction 310 and toward the center of the base 21 under the control of the drive devices 23A and 24A, respectively. The expansion devices 23B and 24B send the gas from the drive devices 23A and 24A to the ejection devices 23C and 24C, respectively.

  The driving devices 23A and 24A drive the four telescopic devices 23B and 24B, respectively. That is, the driving devices 23A and 24A expand and contract the four expansion and contraction devices 23B and 24B toward the center of the base portion 21 according to the width of the glass plate 300 that is sent. Thus, the drive devices 23A and 24A position the ejection devices 23C and 24C in the vicinity of the side wall of the glass plate 300. At the same time, the driving devices 23A and 24A send gas to the ejection devices 23C and 24C via the expansion devices 23B and 24B, respectively.

As shown in FIG. 9, the ejection device 23 </ b> C has a rectangular parallelepiped shape and is elongated in the feeding direction of the glass plate 300. The inside of the ejection device 23C is hollow. A plurality of ejection holes 23C ₂ are formed in the front surface 23C ₁ of the ejection device 23C, that is, the surface facing the ejection device 24C. The ejection hole 23C ₂ is formed in the front surface 23C ₁ so as to be located at the lower part of the side surface of the floated glass plate 300. In addition, the ejection holes 23C ₂ are opened in a row in the longitudinal direction of the ejection device 23C. Thus, the ejection hole 23C ₂ ejects gas in a horizontal direction with respect to the upper surface of the base portion 21, that is, with an inclination angle of 0 (zero) with respect to the upper surface. Since each ejection device 24C is the same as the ejection device 23C, description thereof is omitted.

The four ejection devices 23C and 24C eject the gas sent from the drive devices 23A and 24A from the ejection holes 23C ₂ toward the center of the base portion 21, respectively. At this time, the ejection devices 23 </ b> C and 24 </ b> C eject gas to the lower part of the side surface of the glass plate 300. As a result, according to the third embodiment, the ejection devices 23C and 24C can move the glass plate 300 by gas ejection so that the center of the glass plate 300 is positioned at the center of the base portion 21.

  Moreover, since the ejection devices 23C and 24C eject gas to the lower side surface of the floated glass plate 300, the glass plate 300 can be moved to the center of the base 21 even if the thickness of the glass plate 300 is different.

  Furthermore, since gas is ejected from near the side surface of the glass plate 300 at an inclination angle of 0 (zero), the alignment force acting on the glass plate 300 can be increased. As a result, the center of the glass plate 300 can be moved to the center of the base 21 in a short time.

[Embodiment 4]
Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 10 is a perspective view showing the ejection device of the fourth embodiment.

In the fourth embodiment, an ejection device 25 shown in FIG. 10 is used instead of the ejection devices 23C and 24C of the third embodiment. The ejection device 25 is obtained by dividing the ejection devices 23C and 24C into a split type. That is, the ejection device 25 includes an upper part 25A and a lower part 25B. The upper portion 25A and the lower portion 25B have the same box shape. A plurality of rectangular cutouts 25B ₂ are provided in the opening 25B _{1 of the} lower portion 25B. The opening 25B ₁ of the lower 25B to cover the opening of the upper 25A, top 25A can be attached to the lower portion 25B. When the upper portion 25A is attached to the lower portion 25B, the notch 25B ₂ becomes the ejection hole.

  According to the fourth embodiment, when dust or the like adheres to the inside of the ejection device 25 and the gas flow deteriorates, the upper portion 25A and the lower portion 25B are separated to easily clean the inside of the ejection device 25. Enable. That is, the fourth embodiment makes it possible to simplify daily maintenance and inspection for the ejection device 25.

[Embodiment 5]
Next, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 11 is a sectional view showing a section of the base according to the fifth embodiment.

The fifth embodiment is different from the third embodiment in the following points. That is, in Embodiment 3, gas supply to the ejection devices 23C and 24C is performed by the driving devices 23A and 24A. In the fifth embodiment, gas is supplied from the base 30. As in the third embodiment, the base portion 30 of the fifth embodiment includes floating jet portions 31A _{1 to} 31A ₆ , first moving jet portions 31B ₁ and 31B _2, and second moving jet portions 31C ₁ and 31C _2. Is provided inside.

  The base 30 of the fifth embodiment includes supply devices 32 and 33 inside. The supply devices 32 and 33 are provided along the upper surface 30 b of the base 30 and on both sides of the base 30. The supply devices 32 and 33 receive gas supply from a supply system (not shown). Then, the supply devices 32 and 33 flow the supplied gas upward.

  Further, jetting devices 34 and 35 are placed on the upper surface 30 </ b> B of the base 30 and on the upper ends of the feeding devices 32 and 33. The ejection devices 34 and 35 are rectangular parallelepipeds having a hollow interior, similar to the ejection devices 23C and 24C. A plurality of ejection holes are provided in the same manner as the ejection devices 23C and 24C on the front surface where the ejection devices 34 and 35 face each other. Such ejection devices 34 and 35 eject gas toward the lower part of the side surface of the glass plate 300 in the same manner as the ejection devices 23C and 24C of the third embodiment.

  Thus, according to the fifth embodiment, a device for supplying gas to the outside of the base 30 and the enclosure 30A can be eliminated.

[Embodiment 6]
Next, Embodiment 6 of the present invention will be described with reference to FIGS. FIG. 12 is a plan view showing the base of the levitation transport apparatus according to the sixth embodiment. 13 is a cross-sectional view showing a cross section taken along the line IV-IV in FIG. FIG. 14 is a perspective view showing a slit portion of FIG.

The levitation conveyance apparatus according to the sixth embodiment is a transfer unit in a conveyance system that conveys a plate-like substrate by levitation. In the sixth embodiment, a base 40 shown in FIG. 12 is used instead of the base 1 of the first embodiment. On the upper surface 40 _{1 of the} base 40, alignment slit rows 41 _{1 to} 41 _n , 42 _{1 to} 42 _n , levitation slit rows 43 ₁ to 43 _n , 44 _{1 to} 44 _n , and a large number of ejection holes 45 ₁₁ , 45 are provided. First moving ejection hole arrays 45 ₁ , 45 ₂ having ₂₁ and second moving ejection hole arrays 45 ₂ , 45 ₄ having a large number of ejection holes 45 ₃₁ , 45 ₄₁ are provided. The first movement ejection hole arrays 45 ₁ and 45 ₂ and the second movement ejection hole arrays 45 ₂ and 45 ₄ are the first movement ejection hole arrays 2D ₁₁ and 2D ₂₁ and the second movement ejection holes in FIG. Since they are the same as the columns 2E ₁₁ and 2E ₂₁ , their descriptions are omitted. The alignment slit rows 41 _{1 to} 41 _n and the alignment slit rows 42 _{1 to} 42 _n form surface-side ejection portions, respectively, and these two surface-side ejection portions form second ejection means.

The alignment slit rows 41 _{1 to} 41 _n are provided at equal intervals toward the center of the upper surface 40 ₁ . The alignment slit rows 41 _{1 to} 41 _n include a plurality of ejection slits 41 _{11 to} 41 _n1 , respectively. Jetting slit 41 ₁₁ is formed as follows. That is, as shown in FIG. 14, the ejection slit 41 ₁₁ is provided in the auxiliary hole 41 ₁₂ inside the base portion 40. Auxiliary hole 41 ₁₂ is a hollow bore extending in the longitudinal direction of the base 40 supplied with gas from the supply system (not shown). Auxiliary hole 41 ₁₂ parts of the facing on the upper surface 40 ₁ of the base portion 40 has a triangular prism shape. A slit provided between the triangular prism portion of the auxiliary hole 41 ₁₂ and the upper surface 40 _{1 of the} base portion 40 is an ejection slit 41 ₁₁ .

The ejection slit 41 ₁₁ is opened in the direction of the angle θ3 with respect to the upper surface 40 ₁ . The angle θ3 is the same as the ejection direction θ1 of the first embodiment. Thus, the ejection slit 41 ₁₁ ejects the alignment gas from the upper surface 40 _{1 at the} angle θ 3, that is, the ejection direction θ ₁ and toward the center of the upper surface 40 ₁ .

Others in the ejection slits 41 _{11 to} 41 _n1 are the same as the ejection slit 41 ₁₁ .

As with the alignment slit rows 41 _{1 to} 41 _n , the alignment slit rows 42 _{1 to} 42 _n are provided side by side at equal intervals toward the center of the upper surface 40 ₁ . As with the alignment slit rows 41 _{1 to} 41 _n , the alignment slit rows 42 _{1 to} 42 _n include a plurality of ejection slits 42 _{11 to} 42 _n1 , respectively. The ejection slit 42 ₁₁ is provided between the auxiliary holes 42 _{12 to} 42 _n2 and the upper surface 40 ₁ . The ejection slits 42 _{11 to} 42 _n1 are used for alignment, similar to the alignment slit rows 41 _{1 to} 41 _n , from the upper surface 40 ₁ to the angle θ 3, that is, the ejection direction θ ₁ and toward the center of the upper surface 40 ₁ . Of gas.

By the these alignment slit rows 41 ₁ to 41 _n and the alignment slit column 42 ₁ through 42 _n, to fit the center of the glass plate to be transported to the center of the upper surface 40 ₁ of the base portion 40.

The levitation slit rows 43 ₁ to 43 _n include ejection slits 43 ₁₁ to 43 _n1 and auxiliary holes 43 ₁₂ to 43 _n2 , respectively. The levitation slit rows 44 _{1 to} 44 _n are respectively provided with ejection slits 44 _{11 to} 44 _n1 and auxiliary holes 44 _{12 to} 44 _n2 . The levitation slit row 43 ₁ to 43 _n and the levitation slit row 44 _{1 to} 44 _n are aligned with the alignment slit row 41 _{1 to} 41 _n and the alignment slit row 42 _{1 to} 42 _n except for the following points. Each has the same structure. In other words, a floating slit rows 43 ₁ ~ 43 _n jetting slit 43 ₁₁ ~ 43 _n1 of the angle of the jetting slit 44 ₁₁ ~ 44 _n1 is spaced of flying slit matrix 44 ₁ ~ 44 _n, Embodiment 1 is the same as the ejection direction θ2. As a result, the levitation slit rows 43 ₁ to 43 _n and 44 _{1 to} 44 _n float the glass plate in the same manner as in the first embodiment.

Thus, according to the sixth embodiment, since the ejection slit used in the for levitation and alignment is an elongated shape, just working off the upper surface 40 ₁ obliquely, it is possible to form the ejection slit. In addition, since one ejection slit corresponds to a plurality of ejection holes, a structure for ejecting a gas for alignment or levitation can be formed with a small number of man-hours.

[Embodiment 7]
Next, a seventh embodiment of the present invention will be described with reference to FIGS. FIG. 15 is a plan view showing the ejection slit structure used in the seventh embodiment. 16 is a cross-sectional view showing a VV cross section of FIG. FIG. 17 is a perspective view showing the groove of FIG. 18 is a cross-sectional view showing a cross section of the shielding plate of FIG. FIG. 19 is a bottom view showing the bottom surface of the shielding plate of FIG.

  In the seventh embodiment, the ejection slit of the sixth embodiment has a different structure. That is, as shown in FIGS. 15 and 16, the ejection slit structure 50 for forming the ejection slit of the seventh embodiment is formed by the shielding plate 51, the groove 52 and the supply hole 53.

Groove 52 is provided on the upper surface 40 ₁ of the base portion 40. As shown in FIG. 17, the groove 52 includes a bottom surface 52A. The bottom surface 52A is a rectangle having a width L1, and is long along the top surface 40 ₁ of the base. A side surface 52B is formed at one end of the bottom surface 52A so as to be orthogonal to the bottom surface 52A. The upper end of the side surface 52B is at right angles with the upper surface 40 _1, the width of the side surface 52B is in the depth of the groove 52. A slope 52C is formed at the other end of the bottom surface 52A. The inclined surface 52C is inclined so that the angle is θ4 with respect to the upper surface 40 ₁ . The upper end of the slope 52C intersects the upper surface 40 ₁ . Thus, the groove 52 has a slope 52C inclined at an angle θ4, and has a trapezoidal shape with the maximum opening being the width L2.

  The supply holes 53 are round holes formed in the base 40, and are provided at regular intervals at portions where the bottom surface 52A intersects the inclined surface 52C. Gas is supplied to the supply hole 53 from a supply system (not shown).

  The shielding plate 51 is placed in the groove 52. As shown in FIG. 18, the shielding plate 51 is a plate having a trapezoidal cross section. That is, the side surface 51 </ b> A of the shielding plate 51 has the same shape as the side surface 52 </ b> B of the groove 52. When the shielding plate 51 is placed in the groove 52, the side surface 51A contacts the side surface 52B. One end of the upper surface 51B and the lower surface 51C of the shielding plate 51 is the upper and lower ends of the side surface 51A. The upper surface 51B and the lower surface 51C are perpendicular to the side surface 51A. The width of the upper surface 51B is shorter than the width L2 of the shielding plate 51 by a predetermined length. Similarly, the width of the lower surface 51C is shorter than the width L1 of the shielding plate 51 by a predetermined length. When the shielding plate 51 is placed in the groove 52, the lower surface 51 </ b> C contacts the bottom surface 52 </ b> A of the groove 52.

  A surface formed between the other ends of the upper surface 51B and the lower surface 51C is an inclined surface 51D. The slope 51D has the same shape as the slope 52C of the groove 52. Since the width of the upper surface 51B is shorter than the width L2 by a predetermined length and the width of the lower surface 51C is shorter than the width L1 by a predetermined length, when the shielding plate 51 is placed in the groove 52, the inclined surface 51D becomes the inclined surface 52C of the groove 52. Get away from. At this time, the inclined surface 51D faces the inclined surface 52C and keeps a certain distance from the inclined surface 52C. As a result, an ejection slit 50A having a gas ejection angle of θ4 is formed.

  A spacer 51E is provided on the slope 51D of the shielding plate 51. The thickness of the spacer 51E is equal to the distance between the slope 51D and the slope 52C. Further, as shown in FIG. 19, the spacers 51E are arranged on the inclined surfaces 51D at equal intervals so as not to cover the supply holes 53 and to maintain a good gas flow. When the shielding plate 51 is placed in the groove 52 by the spacer 51E, the side surface 51A comes into close contact with the side surface 52B. That is, by simply placing the shielding plate 51 in the groove 52 by the spacer 51E, positioning or the like is unnecessary, and the ejection slit 50A can be reliably formed.

  The ejection slit 50A formed in this way can be used for levitation and alignment as in the sixth embodiment. At this time, the angle θ4 may be changed between the ascent and the alignment.

Further, when the ejection slit 50A is formed, it is not necessary to process the upper surface 40 ₁ of the base 40 using a cutter or the like. As a result, the formation of the ejection slit 50A can be simplified, and the setting of the angle θ4 can be simplified.

  As described above, the present invention comprises a plate-shaped substrate by providing a plate-shaped conveyance surface, a base for sending the plate-shaped substrate along the conveyance surface, and jetting gas from the conveyance surface. In order to keep the plate-like substrate levitated from the conveying surface and the plate-like substrate levitated from the conveying surface along the conveying surface, and the plate-like substrate levitated by the first ejecting means at the center position of the conveying surface And a second jetting means for jetting gas.

  Accordingly, since the second ejection means is provided exclusively for the guide and alignment, a strong force for alignment by gas ejection can be applied to the plate substrate even when the plate substrate becomes heavy. . As a result, the meandering of the plate-like substrate can be prevented, the plate-like substrate can be quickly moved to the center position of the base, and the plate-like substrate can be conveyed without contact.

  In the present invention, the second ejection means includes two side ejection portions arranged along both sides on the transport surface, and a supply system that supplies gas to these two side ejection portions. Each of the lateral ejection portions is provided with a number of ejection holes for ejecting gas in the central direction of the transport surface. Moreover, in this invention, each said side ejection part is movable to the center direction of the said conveyance surface, It is characterized by the above-mentioned.

  Accordingly, when, for example, a tubular member is used as each side ejection portion, each side ejection portion can be formed using a simple material. Furthermore, by making each side ejection part movable, it is possible to deal with plate-like substrates having different widths.

  In the present invention, the second ejection means is arranged on the conveyance surface so as to sandwich the center of the conveyance surface, and two surface-side ejection portions that eject gas in the central direction of the conveyance surface, and these surfaces And a supply system for supplying gas to the side ejection portion. In the present invention, each of the surface-side ejection portions includes at least one ejection hole array along the transport surface, and the ejection hole array is provided in a plurality of rows toward the center of the transport surface, Each of the ejection hole arrays includes a plurality of ejection holes that eject gas toward the center of the transport surface and are arranged along the transport surface.

  Thereby, since the 2nd ejection means is provided in the conveyance surface, it can make unnecessary to provide the mechanism for ejecting gas on a conveyance surface. Moreover, since the 2nd ejection means is automatically selected according to the width | variety of a glass plate, the mixed conveyance of the glass plate of arbitrary width is enabled. As a result, the apparatus becomes simple, and the reliability of the apparatus can be improved.

  In the present invention, each of the surface side ejection portions includes at least one ejection slit row along the transport surface, and the ejection slit rows are provided in a plurality of rows toward the center of the transport surface, The slit row includes a plurality of ejection slits that eject gas toward the center of the transport surface and are arranged along the transport surface.

  Thus, since one ejection slit corresponds to a plurality of ejection holes, the formation of the second ejection means can be simplified.

₁ , 10, 21, 30, 40, 110 Base 1 ₁ , 10 ₁ , 30B, 40 ₁ , 112, 51B, upper surface 1 ₂ center 1A _{1 to} 1H ₁ , 1A _{2 to} 1H ₂ setting line 2A _{1 to} 2C ₁ , 2A _{2 to} 2C ₂ , 11A _{1 to} 11C ₁ , 11A _{2 to} 11C ₂ ,
21A _{1 to} 21A ₆ , 31A _{1 to} 31A ₆ Levitating jet part 2D ₁ , 2D ₂ , 11D ₁ , 11D ₂ , 21B ₁ , 21B ₂ , 31B ₁ ,
31B ₂ first moving ejection portion 2E ₁ , 2E ₂ , 11E ₁ , 11E ₂ , 21C ₁ , 21C ₂ , 31C ₁ ,
31C ₂ second ejection part 2F _{1 to} 2H ₁ , 2F _{2 to} 2H ₂ centering ejection part 2A _{11 to} 2H ₁₁ , 2A _{21 to} 2H ₂₁ , 11A _{11 to} 11E ₁₁ ,
11A _{21 to} 11E ₂₁ , 21A _{11 to} 21A ₆₁ , 21B ₁₁ , 21C ₁₁ ,
23C ₂ , 45 _{11 to} 45 ₄₁ , 113, 115 ejection holes 2A _{12 to} 2H ₁₂ , 2A _{22 to} 2H ₂₂ , 11A _{12 to} 11E ₁₂ ,
11A _{22 to} 11E ₂₂ , 21A _{12 to} 21A ₆₂ , 21B ₁₂ , 21B ₂₂ ,
_{21C 12, 21C 22, 114,116,41 12} ~41 n2,
42 _{12 to} 42 _n2 , 43 ₁₂ to 43 _n2 , 44 _{12 to} 44 _n2 Auxiliary hole 22, 120, 30A Enclosure 22A Through hole 23, 24 Centering portion 23C ₁ Front 23A, 24A Drive device 23B, 24B Extending device 23C, 24C, 25, 34, 35 Ejection device 23C ₁ front surface 25A upper part 25B lower part 25B ₁ opening 25B ₂ notch 32, 33 supply device 41 _{1 to} 41 _n alignment slit row 41 _{11 to} 41 _n1 , 42 _{11 to} 42 _n1 , 43 ₁₁ to 43 _n1 , 44 _{11 to} 44 _n1 ,
50A ejection slits 42 _{1 to} 42 _n alignment slit rows 43 ₁ to 43 _n and 44 _{1 to} 44 _n floating slit rows 45 ₁ and 45 ₂ first movement ejection hole rows 45 ₃ and 45 ₄ second movement ejection Hole array 50 Ejection slit structure 51 Shield plate 51A Side surface 51C Lower surface 51D Slope 51E Spacer 52 Groove 52A Bottom surface 52B Side surface 52C Slope 53 Supply hole 130 Processing plate 100 Transfer unit 111 Supply system 112A Center 113A, 115A Ejection direction 140 Sealing plate 200 unit 300 glass plate 310 moving direction 311 turning direction L1, L2 the width W _11, W ₂₁ aligning force W _12, W ₂₂ levitation force .theta.1, .theta.2 ejection direction .theta.3, .theta.4 angle

Claims (6)

A base for providing a plate-shaped transport surface, and for feeding the plate-shaped substrate along the transport surface;
A first jetting means for floating a plate-like substrate from the carrying surface and moving the floated plate-like substrate along the carrying surface by jetting gas from the carrying surface;
A levitating and conveying apparatus comprising: a second ejecting means for ejecting gas in order to keep the plate-like substrate levitated by the first ejecting means at the center position of the conveying surface. The second ejection means includes two side ejection portions arranged along both sides on the transport surface, and a supply system that supplies gas to the two side ejection portions, The levitation conveyance apparatus according to claim 1, wherein the side ejection portion includes a plurality of ejection holes for ejecting gas toward the center of the conveyance surface. The levitation conveyance apparatus according to claim 2, wherein each of the side ejection parts is movable in a central direction of the conveyance surface. The second ejection means is disposed on the conveyance surface so as to sandwich the center of the conveyance surface, and is provided with two surface-side ejection portions that eject gas in the center direction of the conveyance surface, and these surface-side ejection portions. The levitation conveyance apparatus according to claim 1, further comprising a supply system that supplies gas. Each of the surface-side ejection portions includes at least one ejection hole array along the transport surface, and the ejection hole array is provided in a plurality of rows toward the center of the transport surface. The levitation conveyance apparatus according to claim 4, further comprising a plurality of ejection holes that eject gas toward the center of the conveyance surface and are arranged along the conveyance surface. Each of the surface-side ejection parts includes at least one ejection slit row along the transport surface, and the ejection slit row is provided in a plurality of rows toward the center of the transport surface, and each of the ejection slit rows is The levitation conveyance apparatus according to claim 4, further comprising a plurality of ejection slits that eject gas toward the center of the conveyance surface and are arranged along the conveyance surface.

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