JP2010173125A - Liquid ejection head and liquid ejection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head, securing sufficiently the rigidity of a piezoelectric element unit including a piezoelectric element and a fixed member for joining the piezoelectric element. <P>SOLUTION: This liquid ejection head includes a first and second pressure generation chamber lines juxtaposed respectively on a flow channel-forming substrate, to be communicated with nozzle openings 13A, 13B for ejecting a liquid, the first and second piezoelectric elements 16A, 16B for changing respectively volumes thereof via a vibration plate, the common fixed member 33 arranged in an opposite side opposite to the first and second pressure generation chamber lines, and joined with one part of the piezoelectric elements, and a signal line film 35 supplied from outside with a driving signal for driving each piezoelectric element, the piezoelectric elements are joined to the fixed member 33, while made to correspond to the first and second pressure generation chamber lines to be dividedly cut comb-shapedly, and a leg part 41 is fixed on an end face in a vibration plate side of the fixed member, to regulate a position of an end face in a vibration plate side of each piezoelectric element. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus, and is particularly useful when applied to a system that ejects liquid by driving a longitudinal vibration type piezoelectric element.

  As a typical example of a liquid ejecting head, for example, an ink jet recording head that ejects ink droplets from nozzle openings using pressure generated by displacement of a piezoelectric element is known. As one type, pressure generation chambers are formed in the flow path forming substrate so as to communicate with the nozzle openings in a row direction, and piezoelectric elements (piezoelectric vibrators) are arranged in the vertical direction via a vibration plate in a region facing each pressure generation chamber. There is an apparatus in which an ink droplet is ejected from a nozzle opening by expanding and contracting a pressure generating chamber using longitudinal vibration generated by applying a voltage to the piezoelectric element (for example, see Patent Document 1). The piezoelectric element of such an ink jet recording head is housed in a housing portion of a head case (base) via a fixing member (support substrate), and is usually mounted on the head case via a circuit board formed of FPC or the like. Is electrically connected to a conductive pad of a wiring board (upper closing plate) provided on the board.

  As an ink jet recording head using such longitudinal vibration, a single piezoelectric element unit is formed by fixing a large number of integrated piezoelectric elements on the side surface of a fixing member, and the two piezoelectric element units are combined into a head. A device that is accommodated in the holder accommodating portion and disposed on the side surface of the holder has also been proposed (for example, see Patent Document 2).

  Here, in order to achieve further miniaturization of this type of ink jet recording head, a piezoelectric element unit in which a piezoelectric element is directly bonded to both side surfaces of the fixing member to reduce the interval between the nozzle openings between the opposing rows. It is conceivable to form this and dispose it on the flow path forming substrate. However, in this case, sufficient strength cannot be ensured due to structural problems such as the fixing member being cut when the piezoelectric element is cut into a comb-like shape corresponding to the pressure generating chamber. Cause the problem. Note that there is Patent Document 3 as a publicly known document that discloses a structure in which a piezoelectric element and a fixing member that fixes the piezoelectric element are simultaneously cut.

JP 2004-74740 A Japanese Patent Laid-Open No. 2000-218774 (page 3, FIGS. 4, 7) JP 2004-142437 A

  As described above, in the prior art, in order to achieve further downsizing of the longitudinal vibration type ink jet recording head, the piezoelectric element unit including the piezoelectric element and the fixing member that joins the piezoelectric element needs to have a structure that can sufficiently secure the rigidity. is there.

  Such a need exists not only in an ink jet recording head that ejects ink, but also in a liquid ejecting head that ejects liquid other than ink.

  SUMMARY An advantage of some aspects of the invention is that it provides a liquid ejecting head and a liquid ejecting apparatus that can sufficiently ensure the rigidity of a piezoelectric element unit including a piezoelectric element and a fixing member that joins the piezoelectric element.

An aspect of the present invention that achieves the above object includes a first and a second pressure generation chamber rows that are arranged in parallel to the flow path forming substrate by forming a row so as to communicate with a nozzle opening that ejects liquid, The first and second piezoelectric elements that change the volumes of the first and second pressure generating chamber rows via the diaphragm formed on the path forming substrate, and the first and second piezoelectric elements. A common fixing member disposed on the opposite side of the first and second pressure generating chamber rows and joined with a part of the first and second piezoelectric elements; and the first and second piezoelectric elements And a wiring board connected to the first and second piezoelectric elements so that a drive signal for driving the element is supplied from the outside, and the first and second piezoelectric elements are the first and second piezoelectric elements. Cut into comb teeth corresponding to the pressure generating chamber row and join to the fixing member, The end surface of the vibration plate side of the fixing member in the liquid ejecting head is characterized in that fixed leg portion for regulating the position of the end surface of the vibration plate side of the first and second piezoelectric elements.
According to this aspect, since two rows of piezoelectric elements can be bonded to one fixed member, the interval between the nozzle openings facing each other can be reduced, and the printing density can be reduced along with downsizing of the apparatus. Not only can it contribute to improvement, but there is no need to separate the legs in accordance with the piezoelectric elements. As a result, the rigidity of the leg portion can be made sufficiently high, and even if the fixing member is shared by the first and second piezoelectric elements, sufficient mechanical strength of the portion can be ensured.

  Here, it is desirable that the leg portion is fixed to the fixing member with an adhesive, and the position of the end face on the diaphragm side is adjusted by the thickness of the adhesive. This is because the height of the leg can be easily adjusted according to the position of the end face of the piezoelectric element on the flow path substrate side.

  Further, it is desirable that the leg portion has a concave groove extending in the longitudinal direction on the end face on the side of the fixing member, and is bonded by pouring an adhesive into the concave groove. This is because by guiding the adhesive along the concave groove, it is possible to prevent the adhesive from flowing out to the piezoelectric element side, and it is possible to prevent the influence of the adhesive on the piezoelectric element from affecting its vibration characteristics.

  Furthermore, the wiring board has an input terminal to which a drive signal for driving the first and second piezoelectric elements is supplied from the outside, and an output terminal for supplying the drive signal to the first and second piezoelectric elements. A first wiring portion comprising a flexible signal line film formed, and having an input terminal on one side of the fixing member and an output terminal for supplying the drive signal to the first piezoelectric element; And a second wiring portion having an output terminal that wraps around the other side surface of the fixing member from the first wiring portion and supplies the driving signal to the second piezoelectric element. desirable. This is because one signal line film can be shared by two rows of piezoelectric elements, and the number of parts can be reduced accordingly.

According to another aspect of the invention, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspect.
According to this aspect, the liquid ejecting apparatus can be miniaturized and the number of parts can be reduced.

FIG. 2 is a schematic cross-sectional view of a recording head according to an embodiment. It is principal part sectional drawing of FIG. It is a schematic perspective view which extracts and shows one of the piezoelectric element units. It is explanatory drawing which shows the manufacturing process of a piezoelectric element unit. It is a schematic sectional drawing which shows the assembly process in the manufacturing method which concerns on embodiment. 1 is a schematic configuration diagram of a recording apparatus according to an embodiment.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing an ink jet recording head which is an example of a liquid jet head according to an embodiment of the present invention, and FIG. 2 is a main cross-sectional view thereof.

  As shown in both figures, the ink jet recording head 10 of this embodiment has two rows of pressure generation chambers 11A and 11B communicating with nozzle openings 13A and 13B for ejecting ink droplets, respectively. Here, a plurality of pressure generation chamber rows 11A and 11B are arranged in parallel on the flow path forming substrate 12 in a direction perpendicular to the plane of FIG. 1 and FIG. 2 to form first and second pressure generation chamber rows. Yes.

  More specifically, in the flow path forming substrate 12, the pressure generation chamber rows 11A and 11B are partitioned by partition walls in the surface layer portion on one surface side thereof, and the width direction thereof (perpendicular to the paper surface of FIGS. 1 and 2). And a reservoir serving as a common ink chamber (liquid chamber) for supplying ink to each of the pressure generating chamber rows 11A and 11B outside the first and second pressure generating chamber rows. 21A and 21B are provided through the flow path forming substrate 12 in the thickness direction. The pressure generation chamber rows 11A and 11B communicate with the reservoirs 21A and 21B through ink supply paths 22A and 22B. In the present embodiment, the ink supply paths 22A and 22B are formed with a narrower width than the pressure generation chamber rows 11A and 11B, and the flow path resistance of ink flowing into the pressure generation chamber rows 11A and 11B from the reservoirs 21A and 21B. It plays a role to keep the constant. Further, nozzle communication holes 23A and 23B penetrating the flow path forming substrate 12 are formed on the end portions of the pressure generating chamber rows 11A and 11B opposite to the reservoirs 21A and 21B. Such a flow path forming substrate 12 can be suitably formed by, for example, a silicon single crystal substrate, and the pressure generating chamber rows 11A and 11B provided on the flow path forming substrate 12 etch the flow path forming substrate 12. It can form suitably.

  A nozzle plate 14 in which nozzle openings 13A and 13B are formed is bonded to one surface side of the flow path forming substrate 12 via an adhesive or a heat welding film, and each nozzle opening 13A and 13B is connected to the flow path forming substrate 12. Are communicated with each of the pressure generating chamber rows 11A and 11B through nozzle communication holes 23A and 23B. Further, a diaphragm 15 is joined to the other surface side of the flow path forming substrate 12, that is, the opening surface side of the pressure generation chamber rows 11A and 11B, and the pressure generation chamber rows 11A and 11B are sealed by the vibration plate 15. Has been.

  The vibration plate 15 is formed of a composite plate of, for example, an elastic film 24 made of an elastic member such as a resin film and a support plate 25 made of, for example, a metal material that supports the elastic film 24. The 24 side is joined to the flow path forming substrate 12. Here, the elastic film 24 is made of a PPS (polyphenylene sulfide) film having a thickness of about several μm, and the support plate 25 is made of a stainless steel plate (SUS) having a thickness of about several tens of μm. In addition, islands 26A and 26B with which the tip portions of the piezoelectric elements 16A and 16B abut are provided in regions of the diaphragm 15 facing the pressure generation chamber rows 11A and 11B. That is, a thin portion 27 thinner than other regions is formed in a region of the diaphragm 15 that faces the peripheral edge of each of the pressure generating chamber rows 11A and 11B, and an island portion 26A is formed inside the thin portion 27, respectively. , 26B are provided. Further, in this embodiment, in the region facing the reservoirs 21 </ b> A and 21 </ b> B of the vibration plate 15, like the thin portion 27, the support plate 25 is removed by etching and the compliance portion 28 </ b> A configured substantially only by the elastic film 24. , 28B are provided. The compliance portions 28A and 28B absorb the pressure change by the deformation of the elastic film 24 of the compliance portions 28A and 28B when the pressure change in the reservoirs 21A and 21B occurs. It plays the role of keeping the pressure constant.

  The first and second piezoelectric elements 16A and 16B that change the volumes of the first and second pressure generating chamber rows 11A and 11B via the diaphragm 15 are formed by the pressure generating chamber 11 of the common fixing member 33, respectively. The respective base end portions are joined to both side surfaces that are orthogonal to the formed surfaces, and the piezoelectric element unit 17 is formed together with the fixing member 33. Here, the piezoelectric element 16A is joined to the left side surface of the fixing member 33 in FIG. 1 in a direction perpendicular to the paper surface, and the piezoelectric element 16B is orthogonal to the right side surface of the fixing member 33 in FIG. Are joined in various directions. Although not shown, the piezoelectric elements 16A and 16B may be joined to the surface of the fixing member 33 facing the side where the pressure generating chamber 11 is formed. In this case, the thickness of the fixing member 33 is increased, and the surface that joins the first wiring portion 35A of the piezoelectric element 16A and the surface that joins the second wiring portion 35B of the piezoelectric element 16B are the fixing member 33. It protrudes to the surface direction side of the flow path forming substrate 12 from the side surface. With this configuration, there is an effect that the wiring portions 35A and 35B and the piezoelectric elements 16A and 16B are easily joined. Here, the fixing member 33 can be suitably formed by SUS, for example, but is not limited thereto. The fixing member 33 is not limited to a single plate-like member, and may be a laminate of a plurality of plate-like members. Thus, when the fixing member 33 is formed of a laminated plate, the both side surfaces thereof mean not both side surfaces of each laminated plate but both side surfaces of the fixing member 33 itself that is laminated and integrated.

  Here, the piezoelectric element 16A forms a piezoelectric element forming member in which a piezoelectric material and an electrode forming material are alternately sandwiched and stacked, and this piezoelectric element forming member is associated with each pressure generating chamber 11 and comb teeth. It is formed by cutting into a shape. The piezoelectric element 16 </ b> B is also formed by cutting a similarly formed piezoelectric element forming member into a comb tooth shape corresponding to each pressure generating chamber 11. That is, in this embodiment, the plurality of piezoelectric elements in each of the piezoelectric elements 16A and 16B are integrally formed. The base end portions of the piezoelectric elements 16 </ b> A and 16 </ b> B are fixed to the fixing member 33. The piezoelectric elements 16A and 16B are fixed in a state where the distal end side opposite to the base end side is in contact with the island portions 26A and 26B of the diaphragm 15.

  Further, a signal line film 35 having wiring for supplying signals for driving the piezoelectric elements 16A and 16B is connected to the surface opposite to the fixing member 33 in the vicinity of the base end portions of the piezoelectric elements 16A and 16B. Has been.

  In this embodiment, since one piezoelectric element unit 17 is formed by arranging two rows of piezoelectric elements 16A and 16B on opposite sides of the common fixing member 33, a drive signal is sent to the piezoelectric elements 16A and 16B. The signal line film 35 for supply includes a first wiring portion 35A having an output terminal for supplying a drive signal to the first piezoelectric element 16A on one side surface (left side surface in FIG. 2) of the fixing member 33. The second wiring portion having an output terminal for supplying a drive signal to the second piezoelectric element 16B from the first wiring portion 35A to the other side surface (the right side surface in FIG. 2) of the fixing member 33. 35B. The description regarding this part will be described later.

  Although this embodiment shows a case where four piezoelectric element units 17 are provided, each piezoelectric element unit 17 is accommodated in each of four accommodating portions 18 included in a head case 19 fixed on the diaphragm 15. is there. That is, the ink jet recording head 10 of this embodiment is provided with a total of four piezoelectric element units 17 having the piezoelectric elements 16A and 16B. Corresponding to this, since the rows of nozzle openings 13A, 13B are provided, eight rows of nozzle openings 13A, 13B are provided.

  Further, on the head case 19, a wiring substrate 37 provided with a plurality of conductive pads to which input terminals of the respective wirings of the first and second wiring portions 35A and 35B of the signal line film 35 are connected is fixed. The housing portion 18 of the head case 19 is substantially closed by the wiring board 37. In other words, the wiring board 37 has a slit-like opening 38 formed in a region facing the housing part 18 of the head case 19, and the signal line film 35 extends from the opening 38 of the wiring board 37 to the outside of the housing part 18. Has been drawn to.

  Note that one opening 38 of the wiring board 37 is provided for each accommodating portion 18, that is, four openings are provided in this embodiment, and each piezoelectric element unit 17 provided in one accommodating portion 18 is provided. One signal line film 35 is drawn out from one opening 38.

  Here, in this embodiment, the signal line film 35 is a flexible printed circuit board (FPC) on which a driving IC (not shown) for driving the piezoelectric elements 16A and 16B is mounted, for example, a tape carrier package (TCP) or a chip. It consists of a flexible member such as an on-film (COF). And each wiring of the signal wire | line film 35 is connected to the electrode formation material which comprises piezoelectric element 16A, 16B by the solder | pewter, anisotropic conductive material, etc. in the base end part side, for example. On the other hand, on the tip end side, each wiring is bonded to each conductive pad of the wiring board 37. Specifically, each wiring is connected to the wiring substrate 37 in a state in which the leading end portion of the signal line film 35 drawn out from the opening 38 of the wiring substrate 37 to the outside of the housing portion 18 is bent along the surface of the wiring substrate 37. Bonded to each of the conductive pads. That is, the signal line film 35 is bent at about 90 degrees at the opening 38 of the wiring board 37 and joined to a conductive pad provided on the surface of the wiring board 37.

  3A and 3B are views showing one of the piezoelectric element units 17 in the present embodiment connected to the signal line film 35, wherein FIG. 3A is a schematic perspective view seen from one side, and FIG. 3B is seen from the other side. FIG. As clearly shown in the figure, the signal line film 35 has an input terminal to which a drive signal for driving the piezoelectric elements 16A and 16B is supplied via the wiring board 37, and an output for supplying the drive signal to the piezoelectric elements 16A and 16B. A flexible member having a terminal is electrically connected to the wiring board 37 through a single wiring 34 and supplied with a drive signal. The drive signal is supplied to the piezoelectric element together with the piezoelectric element 16A. 16B can be supplied. Therefore, the first wiring portion 35A and the second wiring portion 35B are provided. Here, the first wiring portion 35A has an input terminal connected to the wiring board 37 on one side surface side (the right side surface side in FIG. 3A) of the fixing member 33 and supplies a driving signal to the piezoelectric element 16A. Output terminal. The second wiring portion 35B has an output terminal that feeds a drive signal to the piezoelectric element 16B from the first wiring portion 35A to the other side surface (the left side surface in FIG. 3A) of the fixing member 33. is doing. That is, the first wiring portion 35A and the second wiring portion 35B are configured to function as a single circuit board via the connecting portion 35C that wraps around at one end face of the fixing member 33. Further, the driving IC 42 for selectively driving the piezoelectric elements 16A and 16B is mounted only on the first wiring portion 35A, but this single element drives not only the piezoelectric element 16A but also the piezoelectric element 16B.

  Here, the upper end surface of the leg portion 41 is fixed to the lower end surface of the fixing member 33 facing the pressure generating chamber 11, and the piezoelectric element unit 17 is integrated with the flow path forming substrate 12. When doing so, the tip position of the piezoelectric elements 16A and 16B is restricted to a predetermined position by contacting the diaphragm 15. That is, the lower end surface of the leg portion 41 is formed so as to be flush with the front end surfaces of the piezoelectric elements 16A and 16B. Thus, not only the overall rigidity of the piezoelectric element unit 17 can be improved, but also the reaction force caused by the vertical movement of the piezoelectric elements 16A and 16B in the figure can be supported by the flow path forming substrate 12. it can. The left and right end surfaces of the leg portion 41 are formed to be flush with the left and right end surfaces of the piezoelectric elements 16A and 16B.

  4A and 4B are diagrams showing one of the piezoelectric element units 17 extracted in this embodiment, where FIG. 4A is a schematic perspective view thereof, and FIG. 4B is a schematic cross-sectional view showing a mode when the piezoelectric elements 16A and 16B are separated. (C) is explanatory drawing which shows notionally the arrangement | positioning aspect of the nozzle opening which forms a row in the right and left both sides of a leg part, (d) is a schematic end view shown in the aspect at the time of adhere | attaching a leg part to a fixing member. .

  Among these, as shown in FIG. 4A, the piezoelectric element unit 17 in this embodiment includes a fixing member 33, piezoelectric elements 16A and 16B having upper portions bonded to the left and right sides of the fixing member 33, and piezoelectric elements. It has the leg part 41 fixed to the lower end surface of the fixing member 33 between 16A and 16B. Here, the piezoelectric elements 16 </ b> A and 16 </ b> B are configured to be separated in correspondence with the pressure generation chamber rows 11 </ b> A and 11 </ b> B in a state where the piezoelectric elements 16 </ b> A and 16 </ b> B are bonded to the fixing member 33. More specifically, as shown in FIG. 4B, the piezoelectric elements 16A and 16B are cut out one by one without being interfered with each other by the oblique cutting lines 45A and 45B while being joined to the fixing member 33.

  Thus, since the leg portion 41 is cut before being fixed to the fixing member 33 in a state where the piezoelectric elements 16A and 16B are joined to the fixing member 33, the leg portion 41 is cut together with the piezoelectric elements 16A and 16B. There is nothing. That is, the rigidity of the leg portion 41 can be maintained high. Therefore, in combination with this, the mechanical strength of the piezoelectric element unit 17 can be made sufficient. Further, as described above, the piezoelectric elements 16A and 16B are separated without being interfered with each other by the oblique cutting lines 45A and 45B, so that the positions of the piezoelectric elements 16A and 16B can be changed as shown in FIG. The nozzle openings 13A and 13B are shifted by a half pitch δ in the column direction. Although it is not essential to shift the half pitch in this way, the piezoelectric elements 16A and 16B facing each other at a small interval are arranged in a staggered manner, so that the printing density can be substantially doubled.

  Here, when the leg portion 41 is bonded to the fixing member 33, the leg portion 41 and the piezoelectric element are placed with the upper surface of the leg portion 41 in contact with the lower surface of the fixing member 33, as shown in FIG. The lower surfaces of the elements 16A and 16B are brought into contact with the surface plate 43, and the adhesive 44 is injected into the adhesive injection basin 33A shown in FIG. Thus, due to the capillary action associated with the injection of the adhesive 44, the adhesive 44 is caused to wrap around the concave groove 41A formed so as to extend in the longitudinal direction between the fixing member 33 and the leg 41, particularly on the upper surface of the leg 41. Glue. At this time, the height of the leg 41 is finely adjusted by the thickness of the adhesive 44. The position of the leg portion 41 in the width direction of the fixing member 33 is restricted between the positioning members 43A and 43B disposed on the surface plate 43.

  The piezoelectric element unit 17 formed by the procedure as described above is assembled in a process as shown in FIG. In FIG. 5, the signal line film 35 connected to the piezoelectric element 16A is omitted. First, as shown in FIG. 5A, the piezoelectric element unit 17 in which the piezoelectric elements 16A and 16B, the fixing member 33, and the leg portion 41 are integrated is aligned with a predetermined position with respect to the flow path forming substrate 12. That is, the position of the piezoelectric element unit 17 with respect to the flow path forming substrate 12 is adjusted and fixed while visually confirming that the tip surfaces of the piezoelectric elements 16A and 16B are in exact contact with the corresponding island portions 26A and 26B. Thereafter, as shown in FIG. 5B, the head case 19 is fixed to the flow path forming substrate 12 while the piezoelectric element unit 17 fixed to the flow path forming substrate 12 is accommodated in the accommodating portion 18. At this time, the piezoelectric element unit 17 is fixed to the head case 19 by the adhesive 44 through the end surface of the fixing member 33.

  In such an ink jet recording head 10, when ejecting ink droplets, the volume of each pressure generating chamber row 11 </ b> A, 11 </ b> B is changed by deformation of the piezoelectric element 16 and the diaphragm 15 to change from the predetermined nozzle openings 13 </ b> A, 13 </ b> B. Ink droplets are ejected. Specifically, when ink is supplied from an ink cartridge (not shown) to the reservoirs 21A and 21B, the ink is distributed to the pressure generating chamber rows 11A and 11B via the ink supply paths 22A and 22B. At this time, by applying a voltage to the piezoelectric elements 16A and 16B via the first and second wiring portions 35A and 35B of the signal line film 35, these are selectively contracted. Thereby, the diaphragm 15 is deformed together with the piezoelectric elements 16A and 16B, the volume of the pressure generating chamber rows 11A and 11B is expanded, and ink is drawn into the pressure generating chamber rows 11A and 11B. Then, after the ink is filled up to the nozzle openings 13A and 13B, the voltage applied to the electrode forming material of the piezoelectric elements 16A and 16B is released according to the drive signal supplied through the wiring board 37. As a result, the piezoelectric elements 16A and 16B are expanded to return to the original state, and the diaphragm 15 is also displaced to return to the original state. As a result, the volume of the pressure generation chamber rows 11A and 11B contracts, the pressure in the pressure generation chamber rows 11A and 11B increases, and ink droplets are ejected from the nozzle openings 13A and 13B.

  As mentioned above, although one Embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above. In the case of having a piezoelectric element and legs joined to both sides of the fixing member, if the structure is such that the leg can take on the mechanical strength as an integral member without being cut out in the same manner as the piezoelectric element, the further There are no special restrictions. Therefore, the present invention is not limited to the case where the piezoelectric element unit 17 is first aligned and fixed to the flow path substrate side. After the piezoelectric element unit 17 is accommodated in the accommodating portion 18 of the head case 19, the head case 19 in which the piezoelectric element unit 17 is integrated may be fixed to the flow path forming substrate 12. In this case, as shown in FIG. 3A, a notch 35D is formed at the lowermost portion of the connecting portion 35C so that the lower end of the fixing member 33 can be partially exposed, and the piezoelectric element unit 17 is thus formed. When positioning and fixing to the head case 19, the end surface of the fixing member 33 exposed through the notch 35 </ b> D may be brought into contact with the head case 19. However, the first alignment of the piezoelectric element unit 17 can perform the alignment while visually observing the positions of the piezoelectric elements 16A and 16B with respect to the island portions 26A and 26B, so that the alignment accuracy can be maintained high. it can.

  Furthermore, for example, as a pressure generating means, a heat generating element is arranged in the pressure generating chamber and a droplet is generated from the nozzle opening by a bubble generated by the heat generated by the heat generating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  The ink jet recording head as described above constitutes a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on the ink jet recording apparatus. FIG. 6 is a schematic view showing an example of the ink jet recording apparatus.

  In the ink jet recording apparatus shown in FIG. 6, the recording head units 1A and 1B having the ink jet recording head are provided with cartridges 2A and 2B constituting the ink supply means in a detachable manner, and the recording head units 1A and 1B are mounted. The carriage 3 is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be movable in the axial direction. The recording head units 1A and 1B, for example, are configured to eject a black ink composition and a color ink composition, respectively.

  The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted is moved along the carriage shaft 5. The On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S that is a recording medium such as paper fed by a paper feed roller (not shown) is wound around the platen 8. It is designed to be transported.

  In the above-described embodiment, an ink jet recording head has been described as an example of a liquid ejecting head. However, the present invention is widely intended for all liquid ejecting heads, and is a liquid ejecting head that ejects liquid other than ink. Of course, it can also be applied. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

  DESCRIPTION OF SYMBOLS 10 Inkjet recording head, 11A, 11B Pressure generation chamber row | line | column, 12 Flow path formation board | substrate, 13A, 13B Nozzle opening, 14 Nozzle plate, 15 Diaphragm, 16A, 16B Piezoelectric element, 17 Piezoelectric element unit, 18 Storage part, 19 Head case, 26A, 26B Island part, 33 fixing member, 34 wiring, 35 signal line film, 35A, 35B first and second wiring part, 37 wiring board, 38 opening part, 41 leg part, 41A concave groove, 44 adhesive

Claims (5)

A first and second pressure generation chamber rows formed in a row so as to communicate with nozzle openings for ejecting liquid and arranged in parallel with the flow path forming substrate, respectively, and a diaphragm formed on the flow path forming substrate First and second piezoelectric elements for changing the volumes of the first and second pressure generating chamber rows, and the first and second pressure generating chamber rows of the first and second piezoelectric elements, respectively. Is provided on the opposite side and a common fixing member to which a part of the first and second piezoelectric elements are joined and a drive signal for driving the first and second piezoelectric elements are supplied from the outside. And a wiring board connected to the first and second piezoelectric elements,
The first and second piezoelectric elements are cut into comb teeth corresponding to the first and second pressure generating chamber rows and joined to the fixing member, and are attached to the end face of the fixing member on the diaphragm side. Is a liquid jet head in which legs for regulating the positions of the end faces of the first and second piezoelectric elements on the diaphragm side are fixed. The liquid ejecting head according to claim 1,
The liquid ejecting head according to claim 1, wherein the leg portion is fixed to the fixing member with an adhesive, and the position of the end surface on the diaphragm side is adjusted by the thickness of the adhesive. The liquid ejecting head according to claim 2,
The liquid ejecting head according to claim 1, wherein the leg portion has a concave groove extending in a longitudinal direction on an end surface of the fixing member, and is bonded by pouring an adhesive into the concave groove. The liquid ejecting head according to any one of claims 1 to 3,
The wiring board is formed with an input terminal to which a drive signal for driving the first and second piezoelectric elements is supplied from the outside and an output terminal for supplying the drive signal to the first and second piezoelectric elements. A first wiring portion having an output terminal for supplying the drive signal to the input terminal and the first piezoelectric element on one side surface of the fixing member. And a second wiring part having an output terminal that goes around from the first wiring part to the other side surface of the fixing member and supplies the driving signal to the second piezoelectric element. Liquid ejecting head.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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