JP2010172190A - Planar electromagnetic actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact and low-cost planar electromagnetic actuator configured by a plurality of movable plates being arrayed. <P>SOLUTION: A planar electromagnetic actuator is configured to include: a plurality of movable plates 3 arrayed in at least one row within a frame-shaped yoke member 5, in a state in which each movable plate 3 is supported by a torsion bar 2 in a rotatable manner to a stationary section 1 and at least the stationary section 1 is interposed therebetween, a driving coil set along the peripheral edge of each movable plate 3; and a pair of magnetostatic field generating means 4 that apply a magnetostatic field to the driving coil area near opposing side sections parallel to the axial lines of the torsion bars 2 of the plurality of movable plates 3. The magnetostatic field generating means 4 are provided on the outer side of the stationary section 1 such that opposing magnetic poles face each other with the plurality of movable plates 3 therebetween. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an electromagnetically driven planar electromagnetic actuator, and more particularly to a small and inexpensive planar electromagnetic actuator configured by arranging a plurality of movable plates.

  In a conventional planar type electromagnetic actuator, for example, a movable plate 3 pivotally supported by a torsion bar 2 on a frame-like fixed portion 1 shown in FIG. 20A, and a peripheral portion of the movable plate 3 A pair of a drive coil (not shown) laid and a pair of the movable plates 3 arranged outside the fixed portion 1 in a direction perpendicular to the axis of the torsion bar 2, and a current flowing through the drive coil. A static magnetic field generating means 4 for generating a rotational force in the opposite side portion of the movable plate 3 parallel to the axis of the torsion bar 2 by the generated electromagnetic force, and the pair of static magnetic field generating means 4 outside the fixed portion 1. A planar-type electromagnetic actuator for one-dimensional scanning configured to include a frame-like yoke member 5 that is magnetically coupled to each other, or the movable plate 3 as shown in FIG. Provided outside the movable plate 6 And the outer movable plate 7 is pivotally supported on the fixed portion 1 by an outer torsion bar 8, and the inner movable plate 6 is supported by the outer movable plate 7 on the outer torsion bar. 8 is rotatably supported by an inner torsion bar 9 orthogonal to the axis of 8, a drive coil (not shown) is laid along the peripheral edge of each movable plate, and the axes of the outer torsion bar 8 and the inner torsion bar 9. There is a two-dimensional scanning planar type electromagnetic actuator constructed by arranging a pair of static magnetic field generating means 4 and 10 facing each other with the movable plates in between in a direction orthogonal to the fixed portion 1. A one-dimensional and two-dimensional scanning actuator can be obtained by providing a reflective mirror on the movable plate 3 of these planar electromagnetic actuators.

  On the other hand, optical MEMS (Micro Electro Mechanical Systems) has attracted particular attention in recent years. This optical MEMS is a fusion of micromachine technology and micro-optical technology, and research and development and application development are progressing in various fields such as optical fiber communication, optical disk memory, optoelectronic equipment, image processing, and optical calculation. In this optical MEMS, for example, a micromirror arranged in an array is quickly moved to reflect light and used as an optical switch for optical fiber communication (for example, refer to Patent Document 1), and hundreds of thousands of micromirrors are used. A semiconductor optical switch in which a plurality of pieces are integrated is irradiated with light from a light source, and individual micromirrors are quickly tilted according to image information to turn on / off reflected light to display an image (for example, patents) Reference 2).

Japanese Patent Laid-Open No. 11-258527 JP-A-8-146911

  However, all of such conventional optical switches are configured by a movable plate that is electrostatically driven, and there is no optical switch configured by arranging a plurality of planar electromagnetic actuators in an array.

  By the way, if an arrayed optical switch is configured using the planar electromagnetic actuator shown in FIG. 20, for example, the configuration shown in FIG. 21 or FIG. 22 is obtained. That is, a configuration in which a plurality of one-dimensional scanning planar electromagnetic actuators shown in FIG. 20A is arranged in a line in a direction perpendicular to the axis of the torsion bar 2 as shown in FIG. As shown in b), a configuration of arranging in a matrix is conceivable. Similarly, a configuration in which a plurality of planar electromagnetic actuators for two-dimensional scanning shown in FIG. 20 (b) are arranged in a line as shown in FIG. 22 (a), or as shown in FIG. 22 (b). A configuration arranged in a matrix is also conceivable.

  However, in the case where the optical switch is configured by arranging the one-dimensional or two-dimensional scanning planar type electromagnetic actuators individually manufactured in this manner as an array, the optical switch becomes large due to the presence of the yoke member 5, and the parts There is a problem that the score increases and the cost increases.

  Accordingly, the present invention has been made paying attention to the above-mentioned problems, and an object thereof is to provide a small and inexpensive planar type electromagnetic actuator configured by arranging a plurality of movable plates.

  For this purpose, the invention according to claim 1 is pivotally supported by a fixed portion so as to be rotatable by a torsion bar inside one yoke member formed in a frame shape, and at least the fixed portion is interposed therebetween. A plurality of movable plates arranged in at least one row in a state, a drive coil laid along the peripheral edge of each movable plate, and the fixed portions with opposite magnetic poles facing each other with the plurality of movable plates in between And a pair of static magnetic field generating means for applying a static magnetic field to the drive coil portion in the vicinity of the opposite side parallel to the axis of the torsion bar of the plurality of movable plates.

  With such a configuration, a driving coil is laid along the peripheral edge of the frame-shaped yoke member that is rotatably supported by the torsion bar on the fixed portion, and at least the fixed portion is interposed therebetween. A static magnetic field is applied from the outside of the fixed portion to the drive coil portion in the vicinity of the opposite side parallel to the axis of the torsion bars of the plurality of movable plates arranged in at least one row in a state of being in contact with each other.

  Specifically, the planar electromagnetic actuator of the present invention has a plurality of lines arranged in a line such that the normal line of the magnetic pole surface of the static magnetic field generating means and the axis line of the torsion bar are orthogonal to each other. The movable plate may be arranged. Alternatively, as in claim 3, a plurality of movable plates arranged in a line are arranged so that the normal line of the magnetic pole surface of the static magnetic field generating means and the axis of the torsion bar intersect diagonally, and the plurality of movable plates are arranged. The pair of static magnetic field generating means may be arranged so as to straddle the plate.

  In the case of claim 2, the plurality of movable plates arranged in a row are arranged in a plurality of rows in a direction orthogonal to the opposing direction of the static magnetic field generating means, and the pair of the movable plates are arranged to straddle the plurality of movable plates in the row direction. The static magnetic field generating means may be arranged. Alternatively, in the case of claim 3, as in claim 5, a plurality of movable plates arranged in a row may be arranged in a plurality of rows in the direction opposite to the static magnetic field generating means.

  In this case, each of the movable plates may be arranged to be aligned and supported by a torsion bar on a frame-like fixed portion formed individually as in claim 6, and individually as in claim 7. It is good also as a structure which is axially supported by the formed frame-shaped fixing | fixed part with a torsion bar, and each said fixing | fixed part mutually arrange | positions closely.

  In the case of claim 3, as in claim 8, the side surface portion of the fixed portion facing the static magnetic field generating means may be formed in a shape parallel to the arrangement direction of the movable plates.

  According to a ninth aspect of the present invention, the movable plate includes an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is attached to the fixed portion by an outer torsion bar. The inner movable plate is pivotally supported by the outer movable plate and is pivotally supported by the inner torsion bar orthogonal to the axis of the outer torsion bar. The inner movable plate is orthogonal to the axis of each torsion bar. The pair of static magnetic field generating means is arranged with a plurality of the movable plates in the direction, and another static magnetic field generating means is arranged with the movable plate in the direction perpendicular to the axis of the inner torsion bar.

  Furthermore, in the configuration of claim 10, the movable plate includes an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is attached to the fixed portion by an outer torsion bar. The inner movable plate is pivotally supported by the outer movable plate so as to be pivotable by an inner torsion bar orthogonal to the axis of the outer torsion bar. The inner movable plate is inclined with respect to the axis of each torsion bar. The pair of static magnetic field generating means is arranged with a plurality of the movable plates in between in the intersecting direction.

  According to the planar electromagnetic actuator of the present invention, a static magnetic field is applied to the drive coil portion near the opposite side parallel to the axis of the torsion bars of the plurality of movable plates arranged in a line or a plurality of lines by a pair of static magnetic field generating means. By adopting the configuration to act, the static magnetic field generating means corresponding to the plurality of movable plates can be shared, and the number of parts of the planar type electromagnetic actuator configured by arranging the plurality of movable plates in an array is reduced. Can do. Therefore, the planar electromagnetic actuator can be reduced in size and cost.

  In addition, a plurality of movable plates are arranged in a direction obliquely intersecting the axis of the torsion bar, and a pair of static magnetic field generating means is arranged with the plurality of movable plates interposed in a direction perpendicular to the alignment direction of the plurality of movable plates. By doing so, the distance from the static magnetic field generating means to each movable plate can be made substantially equal, and a substantially uniform static magnetic field can be applied to the necessary portion of the movable plate. Therefore, variation in the rotation angle of each movable plate can be suppressed.

  Furthermore, if a plurality of movable plates are pivotally supported by one fixed portion, the plurality of movable plates, torsion bars, and fixed portions can be integrally formed by micromachining technology, and the distance between the movable plates. And the movable plate can be densely arranged. Therefore, the planar electromagnetic actuator can be further reduced in size and cost.

  If the movable plate is configured to be rotatable around the axes of the two torsion bars, the optical path can be switched in a two-dimensional direction.

It is a schematic block diagram which shows 1st Embodiment of the planar type electromagnetic actuator by this invention. It is a schematic block diagram which shows the other example of arrangement | positioning of the movable chip | tip in 1st Embodiment. It is a schematic block diagram which shows 2nd Embodiment of the planar type electromagnetic actuator by this invention. It is a schematic block diagram which shows the modification of the movable chip | tip in 2nd Embodiment. It is a schematic block diagram which shows 3rd Embodiment of the planar type electromagnetic actuator by this invention. It is a schematic block diagram which shows 4th Embodiment of the planar type electromagnetic actuator by this invention. It is a schematic block diagram which shows 5th Embodiment of the planar type | mold electromagnetic actuator by this invention. It is a schematic block diagram which shows 6th Embodiment of the planar type | mold electromagnetic actuator by this invention. It is a schematic block diagram which shows the modification of the movable chip | tip in 6th Embodiment. It is a schematic block diagram which shows 7th Embodiment of the planar type electromagnetic actuator by this invention. It is a schematic block diagram which shows 8th Embodiment of the planar type electromagnetic actuator by this invention. It is a schematic block diagram which shows 9th Embodiment of the planar type | mold electromagnetic actuator by this invention. It is a schematic block diagram which shows the other structure of the movable chip | tip shown in FIG. 12, and the example of arrangement | positioning. FIG. 13 is a schematic configuration diagram illustrating still another configuration of the movable chip illustrated in FIG. 12 and an arrangement example thereof. It is a schematic block diagram which shows 10th Embodiment of the planar type | mold electromagnetic actuator by this invention. It is a schematic block diagram which shows 11th Embodiment of the planar type | mold electromagnetic actuator by this invention. It is a schematic block diagram which shows the other structural example of the movable plate shown in FIG. It is a schematic block diagram which shows the example of arrangement | positioning of the movable chip | tip formed separately in 11th Embodiment. It is a schematic block diagram which shows 12th Embodiment of the planar type | mold electromagnetic actuator by this invention. It is a schematic block diagram of a planar type electromagnetic actuator, (a) is for one-dimensional scanning, (b) shows for two-dimensional scanning. FIG. 21A is an explanatory diagram illustrating a configuration example in which a plurality of primary-type electromagnetic actuators for primary scanning are arranged. It is explanatory drawing which shows the structural example which arranged the planar type | mold electromagnetic actuator of the two-dimensional scanning of FIG.20 (b).

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 shows a schematic configuration diagram when applied to an optical switch, for example, in a first embodiment of a planar electromagnetic actuator according to the present invention. The same reference numerals are used for the same elements as those of the planar electromagnetic actuator shown in FIG.

  In FIG. 1, the planar electromagnetic actuator of the first embodiment is an optical switch planar electromagnetic actuator having a plurality of movable plates arranged in an array, and includes a single frame-shaped yoke member 5 and a plurality of yoke members 5. The movable chip 11 and the static magnetic field generating means 4 are provided.

  The yoke member 5 magnetically couples different magnetic pole ends of a static magnetic field generating means 4 to be described later to improve the magnetic efficiency of the static magnetic field generating means 4, and is generally formed of a soft magnetic material. .

  A movable tip 11 is provided inside the one yoke member 5. The movable chip 11 is an optical switch unit that rotates to switch the optical path. The movable chip 11 can be rotated by a torsion bar 2 on a frame-shaped fixed unit 1 on which a movable plate 3 having a reflection mirror 12 is individually formed. As shown in FIG. 1, it has a structure that is pivotally supported, and is provided with three aligned in a direction perpendicular to the axis of the torsion bar 2 sandwiched between static magnetic field generating means 4 described later. Alternatively, as shown in FIG. 2, the individually formed frame-shaped fixing portions 1 are brought into close contact with each other and three in a direction perpendicular to the axis of the torsion bar 2 in the direction facing the static magnetic field generating means 4 ( a)), or three (see FIG. 5B) aligned in the direction in which the torsion bar 2 extends in a direction perpendicular to the opposing direction of the static magnetic field generating means 4.

  A driving coil (not shown) is laid along the peripheral edge of each movable plate 3, and this driving coil is connected to an electrode terminal (not shown) provided on the fixed portion 1 via the torsion bar 2. Thus, a drive current can be supplied from the outside.

  A pair of static magnetic field generating means 4 are arranged outside the fixed portion 1 with the movable plate 3 interposed between them so that the normal line of the magnetic pole surface and the axis of the torsion bar 2 are perpendicular to each other and opposite magnetic poles facing each other. It is arranged. The static magnetic field generating means 4 acts on the drive coil portion in the vicinity of the opposite side of the movable plate 3 parallel to the axis of the torsion bar 2 and interacts with the current flowing through the portion of the drive coil. For example, the movable plate 3 is made of a permanent magnet. The static magnetic field generating means 4 may be inserted between the movable chips 11 arranged in a line as shown in FIG. 1 and arranged respectively, or as shown in FIG. A pair of three movable chips 11 closely arranged in the direction perpendicular to the axis 2 may be disposed at both ends thereof, and the extending direction of the torsion bar 2 as shown in FIG. A pair of elongate static magnetic field generating means 4 straddling the three movable chips 11 may be disposed with three movable chips 11 arranged in close proximity to each other.

  In this case, in the configuration of FIG. 1, the distance from the static magnetic field generating means 4 to the opposite side portion of each movable plate 3 is equal for each movable plate 3, so that the vicinity of the opposite side of each movable plate 3 parallel to the axis of the torsion bar 2 A uniform static magnetic field can be applied to the drive coil portion of the portion. As a result, the current in the drive coil portion in the vicinity of the opposite side of the movable plate 3 parallel to the axis of the torsion bar 2 interacts with the static magnetic field to rotate each movable plate 3 at substantially the same rotation angle. A reflection mirror 12 provided on the surface of the movable plate 3 switches the optical path of incident light in a one-dimensional direction. On the other hand, the configuration of FIG. 2A is the same as that in which the static magnetic field generating means 4 is excluded from between the movable chips 11 in FIG. 1, and can be downsized by the thickness of the excluded static magnetic field generating means 4. The number of parts is reduced by the amount excluded by the static magnetic field generating means 4, and the cost can be reduced. However, in this case, the middle movable plate 3 shown in FIG. 2 (a) is farther from the static magnetic field generating means 4 than the other movable plates 3, so that the drive coil laid on the movable plate 3 has The acting static magnetic field strength is reduced. Therefore, when the drive current is the same as the drive currents of the other movable plates 3, the rotation angle of the movable plate 3 becomes small, but the drive current or the number of turns of the drive coil is adjusted to adjust each of the movable plates 3. The rotation angles can be matched. In the configuration of FIG. 2B, the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 is the same for each movable plate 3 as in FIG. Can act.

  With this configuration, the first embodiment can provide an array-type planar electromagnetic actuator for an optical switch that switches an optical path in a one-dimensional direction, and surrounds a plurality of movable chips 11 arranged in an array. Therefore, it is only necessary to provide one frame-like yoke member 5, which can be made smaller than the case of FIG. 21A in which a plurality of individual planar electromagnetic actuators of FIG. Further, an inexpensive array type electromagnetic actuator having a reduced number of parts can be provided.

  In the case of the configuration shown in FIG. 1 or FIG. 2 (b), the static magnetic field strength acting on each movable plate 3 of the plurality of movable chips 11 arranged can be made uniform, and the rotation angle of each movable plate 3 varies. Can be suppressed. Further, in the case of the configuration shown in FIG. 2A, the array-type planar electromagnetic actuator can be further reduced in size and cost.

Next, a second embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals, and here, different parts from the first embodiment will be described.
In the second embodiment shown in FIG. 3, the movable chip 11 is supported in such a manner that three movable plates 3 are pivotally supported by one fixed portion 1 by a torsion bar 2 so as to be orthogonal to the axis of the torsion bar 2. A single chip configuration aligned close to each other, and a fixed portion 1, a torsion bar 2, a movable plate 3, and a drive coil (not shown) laid along the peripheral edge of the movable plate 3 by a micromachining technique are integrated. It is formed like this and is arranged inside one yoke member 5 formed in a frame shape. Alternatively, the movable chip 11 may be configured by arranging a plurality of movable plates 3 in the extending direction of the torsion bar 2 as shown in FIG. In this case, a pair of the static magnetic field generating means 4 is disposed with the opposite magnetic poles facing each other with the movable chip 11 in the direction perpendicular to the axis of the torsion bar 2.

  With this configuration, according to the second embodiment, in addition to the effects of the first embodiment, the movable chip 11 can be integrally formed by a micromachining technique, which facilitates manufacture. In this case, since only one pair of the required static magnetic field generating means 4 is required, the number of components is reduced, and the cost of the array-type planar electromagnetic actuator can be reduced.

  In the case of the configuration shown in FIG. 3, a plurality of movable plates 3 can be arranged close to each other, so that a dense electromagnetic array-type planar electromagnetic actuator for an optical switch can be provided. In this case, however, the middle movable plate 3 shown in FIG. 3 is distant from the static magnetic field generating means 4 in the same manner as in FIG. 2A, so that the static plate acting on the drive coil laid on the movable plate 3 is increased. Although the magnetic field strength decreases and the rotation angle of the movable plate 3 decreases, the rotation angle of each movable plate 3 can be matched by adjusting the drive current or the number of turns of the drive coil. On the other hand, in the case of the configuration shown in FIG. 4, the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 is the same for each movable plate 3 as in FIG. A uniform static magnetic field can be applied to the necessary portion, and the rotation angles of the movable plates 3 can be made substantially the same.

Next, a third embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals, and here, different parts from the first embodiment will be described.
In the third embodiment shown in FIG. 5, the movable chip 11 is arranged in the axial direction of the torsion bar 2, with two movable plates 3 pivotally supported on one fixed part 1 by a torsion bar 2. The movable chip 11 is sandwiched between the static magnetic field generating means 4 in the direction perpendicular to the axis of the torsion bar 2 and arranged in three rows to constitute a matrix-shaped optical switch.

  With this configuration, the third embodiment can be downsized compared to the configuration of FIG. 21B in which the one-dimensional scanning actuators of FIG. 20A are individually arranged in a matrix. In addition, it is possible to provide an inexpensive matrix array planar type electromagnetic actuator with a reduced number of parts. Further, the same static magnetic field can be applied to each movable plate 3 of the plurality of movable chips 11 arranged in the same manner as in FIG. 1, and variation in the rotation angle of each movable plate 3 can be suppressed. In this case as well, as in FIG. 2A, the movable chips 11 may be arranged in close contact with each other, and a pair of static magnetic field generating means 4 may be disposed at both ends of the movable chips 11 between them. Good.

Next, a fourth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 3 are denoted by the same reference numerals, and different parts from the second embodiment will be described here.
In the fourth embodiment shown in FIG. 6, the movable chip 11 is arranged in a row in which three movable plates 3 pivotally supported by the torsion bar 2 are close to each other in a direction perpendicular to the axis of the torsion bar 2. In addition to being arranged and arranged in two rows in a direction parallel to the axis of the torsion bar 2, each movable plate 3 is formed in a frame shape as a one-chip configuration pivotally supported by one fixed portion 1. It is arranged inside the yoke member 5. Then, a pair of static magnetic field generating means 4 are arranged opposite to each other on the outside of the fixed portion 1 in the direction perpendicular to the axis of the torsion bar 2 with the movable chip 11 therebetween. In this case, the pair of static magnetic field generating means 4 may be arranged so as to straddle the plurality of movable plates 3 in the row direction.

  With this configuration, the fourth embodiment can further reduce the cost of the planar electromagnetic actuator in the form of a matrix array in addition to the effects of the second embodiment. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

Next, a fifth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 1 are denoted by the same reference numerals, and here, different parts from the first embodiment will be described.
In the fifth embodiment shown in FIG. 7, the movable chip 11 is composed of an inner movable plate 6 and a frame-shaped outer movable plate 7 provided outside the inner movable plate 6. The inner movable plate 6 is pivotally supported by the outer movable plate 7 so as to be rotatable by the inner torsion bar 9, and the outer movable plate 7 is pivoted by the fixed portion 1 by the outer torsion bar 8 perpendicular to the axis of the inner torsion bar 9. The movable tip 11 is arranged in a line in a direction perpendicular to the axis of the inner torsion bar 9. The inner movable plate 6 and the outer movable plate 7 are provided with drive coils (not shown) along the peripheral edge thereof. The static magnetic field generating means 4 and 10 are arranged outside the fixed portion 1 in the direction perpendicular to the axis of each torsion bar with the movable tip 11 in between and opposite magnetic poles. In this case, since the distances from the static magnetic field generating means 4 and 10 to the opposite side portions of the inner and outer movable plates 6 and 7 are equal for the inner and outer movable plates 6 and 7, a uniform static magnetic field acts on the drive coil. Can be made.

  As a result, the static magnetic field generating means 10 applies a static magnetic field to the current in the drive coil portion in the vicinity of the opposite side of the inner movable plate 6 parallel to the axis of the inner torsion bar 9, and the inner movable by the interaction between the current and the static magnetic field. The plate 6 is rotated, and the static magnetic field generating means 4 applies a static magnetic field to the current in the drive coil portion near the opposite side of the outer movable plate 7 parallel to the axis of the outer torsion bar 8. The outer movable plate 7 is rotated by the action, and the optical path of the incident light is switched in the two-dimensional direction by the reflection mirror 12.

  Here, of the static magnetic field generating means 4 and 10, the static magnetic field generating means 4 may be provided individually corresponding to each movable chip 11 as shown in FIG. 7A, as shown in FIG. Thus, it is good also as an elongate shape which straddles the three movable chips 11. Similarly to FIG. 2, three movable chips 11 may be disposed in close contact, and a pair of static magnetic field generating means 10 may be provided at both ends of the three movable chips 11.

  With this configuration, according to the fifth embodiment, the planar electromagnetic actuator for an optical switch that switches the optical path in the two-dimensional direction can be provided, and the two-dimensional light of FIG. Provided is an array-type planar electromagnetic actuator that can be reduced in size compared with the case of FIG. 22 (a) in which scanning planar electromagnetic actuators are individually arranged in a line, and that the number of parts is reduced and inexpensive. Can do.

  The movable chips 11 may be disposed in close contact with each other, and the static magnetic field generating means 10 may be disposed outside the fixed portions 1 at both ends.

Next, a sixth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 7 are denoted by the same reference numerals, and different parts from the fifth embodiment will be described here.
In the sixth embodiment shown in FIG. 8, the movable chip 11 is arranged with three movable plates 3 including an inner movable plate 6 and an outer movable plate 7 aligned in the extending direction of the outer torsion bar 8. The plate 3 has a one-chip configuration in which the outer torsion bar 8 is pivotally supported by one fixed portion 1 and is integrally formed by a micromachining technique in the same manner as the movable chip 11 shown in FIG. For example, three movable plates 3 may be arranged in the extending direction of the inner torsion bar 9 as shown in FIG. Then, the static magnetic field generating means 4 and 10 are arranged outside the fixed portion 1 in the direction perpendicular to the axis of each torsion bar with the movable chip 11 in between and opposite magnetic poles facing each other.

  Here, in the configuration shown in FIG. 8, the distance from the static magnetic field generating means 4 to the opposite side portion of each outer movable plate 7 is equal for each outer movable plate 7, as in the fifth embodiment of FIG. 7. Although a uniform static magnetic field can be applied to the drive coil laid on the outer movable plate 7, the middle inner movable plate 6 shown in FIG. 8 has a distance from the static magnetic field generating means 10 to the other inner movable plate 6. Therefore, the static magnetic field acting on the drive coil laid on the inner movable plate 6 is weakened. On the other hand, in the configuration shown in FIG. 9, the relationship is the reverse of the configuration in FIG. 8, and a uniform static magnetic field acts on the drive coil of each inner movable plate 6, but the middle outer movable plate 7 shown in FIG. 9. The static magnetic field acting on the drive coil is weakened. Therefore, with respect to the middle inner movable plate 6 shown in FIG. 8 or the middle outer movable plate 7 shown in FIG. 9 where the acting static magnetic field becomes weak, the other movable plates are adjusted by adjusting the drive current or the number of turns of the drive coil. It is necessary to match the rotation angle of.

  With this configuration, according to the sixth embodiment, the movable chip 11 can be integrally formed by the micromachining technique in the same manner as the second embodiment, and the array shape switches the optical path in the two-dimensional direction. The planar electromagnetic actuator for optical switch can be easily manufactured. Further, the number of static magnetic field generating means used can be reduced as compared with the fifth embodiment, and the cost of the arrayed planar electromagnetic actuator can be reduced. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

Next, a seventh embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 7 are denoted by the same reference numerals, and different parts from the fifth embodiment will be described here.
In the seventh embodiment shown in FIG. 10, three two-dimensional scanning movable tips 11 including a movable plate 3 that rotates about two axes are arranged in the extending direction of the outer torsion bar 8 and the extending direction of the inner torsion bar 9. Are arranged side by side. Then, the static magnetic field generating means 4 and 10 are arranged at both ends of the movable chip 11 in the direction orthogonal to the axis of each torsion bar with the movable chip 11 interposed therebetween. 10A shows the static magnetic field generating means 4 among the static magnetic field generating means 4 and 10 arranged outside the plurality of movable chips 11 arranged in alignment. In FIG. 5B, the static magnetic field generating means 4 is formed by elongated static magnetic field generating means straddling the three movable chips 11. In the seventh embodiment as well, a plurality of movable chips 11 are arranged in close contact with each other by eliminating the static magnetic field generating means 4 and 10 disposed between the movable chips 11 as shown in FIG. A static magnetic field may be applied to a necessary portion of the movable plate 3 by a pair of static magnetic field generating means 4 and 10 from two directions orthogonal to each torsion bar with the chip 11 therebetween. Further, as shown in FIG. 8, three movable chips 11 arranged in the extending direction of the outer torsion bar 8 may be integrally formed, and arranged in the extending direction of the inner torsion bar 9 as shown in FIG. The two movable chips 11 may be integrally formed.

  With this configuration, according to the seventh embodiment, the planar electromagnetic actuator for two-dimensional scanning shown in FIG. 20B is reduced in size compared to the case of FIG. In addition, an inexpensive matrix array planar electromagnetic actuator can be provided with a reduced number of parts.

Next, an eighth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 7 are denoted by the same reference numerals, and different parts from the fifth embodiment will be described here.
In the eighth embodiment shown in FIG. 11, the movable tip 11 is arranged in such a manner that three movable plates 3 that rotate below two axes are aligned in the extending direction of the outer torsion bar 8, and the inner torsion bar In this example, two movable plates 3 are arranged in the extending direction 9 and each movable plate 3 is pivotally supported by one fixed portion 1 to form a one-chip configuration having a matrix structure. In this case, the static magnetic field generating means 4 and 10 are arranged to face each other with the movable chip 11 therebetween in the direction perpendicular to the axis of each torsion bar.

  With this configuration, according to the eighth embodiment, similarly to the fourth embodiment of FIG. 6, the movable chip 11 in which a plurality of movable plates 3 for two-dimensional scanning are arranged in a matrix is formed by micromachining. It can be formed integrally by technology, facilitating manufacture, reducing the number of parts, and further reducing the cost of the planar electromagnetic actuator in the form of a matrix array. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

Next, a ninth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 3 are denoted by the same reference numerals, and different parts from the second embodiment will be described here.
In the ninth embodiment shown in FIG. 12, a circular movable plate 3 pivotally supported by a torsion bar 2 on one fixed portion 1 is provided between a pair of static magnetic field generating means 4 to generate the static magnetic field. The normal line P on the magnetic pole surface 4a of the means 4 and the axis line O of the torsion bar 2 are inclined so as to cross each other at an angle θ and close to each other in a direction perpendicular to the opposing direction of the static magnetic field generating means 4. For example, the movable chip 11 of one chip is arranged and arranged in three rows and one row, and is arranged inside one yoke member 5 formed in a frame shape. In this case, the pair of static magnetic field generating means 4 may be arranged so as to straddle the plurality of movable plates 3 aligned in a line. And the said movable chip | tip 11 integrally forms the fixing | fixed part 1, the torsion bar 2, and the movable plate 3 using a micromachining technique. The tilt angle θ with respect to the normal line P of the magnetic pole surface 4a of the torsion bar 2 is arbitrary. For example, when it is desired to lengthen the torsion bar 2 while maintaining the arrangement state of the movable plates 3 and the distance from the static magnetic field generating means 4 to the movable plate 3, it can be realized by setting the inclination angle θ to around 45 degrees. . Conversely, when the torsion bar 2 is shortened but it is desired to increase the magnetic force acting on the drive coil, the inclination angle θ may be set to about 90 degrees.

  Further, the joint surface portion 1a of the fixed portion 1 with the torsion bar 2 is formed in a substantially symmetrical shape with the axis O of the torsion bar 2 interposed therebetween. Thereby, the length from the movable plate 3 of the torsion bar 2 to the fixed part 1 is made equal in any side part of the torsion bar 2 so that the torsional stress is generated substantially uniformly in the torsion bar 2. Yes.

  Further, the side surface portion 1 b facing the static magnetic field generating means 4 of the fixed portion 1 is formed in parallel with the arrangement direction of the movable plates 3. As a result, the static magnetic field generating means 4 can be disposed close to the movable plate 3 to increase the static magnetic field strength acting on the movable plate 3 and improve the driving efficiency.

  As shown in FIG. 13, a movable tip 11 is configured by pivotally supporting a fixed portion 1 formed with a movable plate 3 by a torsion bar 2 so that the movable tip 11 can be rotated. The movable chip 11 is tilted so that the normal line on the magnetic pole surface 4a of the static magnetic field generating means 4 and the axis of the torsion bar 2 cross each other obliquely between the static magnetic field generating means 4 and the static magnetic field generating means 4. A plurality of lines may be arranged in a direction orthogonal to the facing direction. Further, as shown in FIG. 14, a movable chip 11 is configured by pivotally supporting a movable plate 3 with a torsion bar 2 in a diagonal direction of a rectangular fixed portion 1 formed individually, and the movable chip 11 is configured. 11 may be arranged in a row in close contact with each other in the direction perpendicular to the opposing direction of the static magnetic field generating means 4 between the static magnetic field generating means 4 arranged opposite to each other.

  With such a configuration, the static magnetic field generating means 4 applies a static magnetic field to the opposite side of the movable plate 3 parallel to the axis of the torsion bar 2, and the current in the drive coil portion near the opposite side and the axis of the torsion bar 2. The movable plate 3 is rotated by the interaction with the static magnetic field component orthogonal to, and the optical path of the incident light is switched in the one-dimensional direction by the reflection mirror 12.

  With this configuration, according to the ninth embodiment, in addition to the effects of the second embodiment, the movable plate 3 is made to have a normal to the magnetic pole surface 4a of the static magnetic field generating means 4 facing each other and the torsion. By arranging and arranging so that the axes of the bars 2 obliquely intersect each other, the distance from the static magnetic field generating means 4 to the opposite side of each movable plate 3 can be made substantially equal for each movable plate 3. The substantially uniform static magnetic field can be made to act on the required part of 3. Thereby, the dispersion | variation in the rotation angle of each movable plate 3 can be suppressed.

  Furthermore, if the movable plate 3 has a circular shape, the adjacent movable plates 3 can be arranged close to each other, and the array type planar electromagnetic actuator can be further reduced in size.

  It is also possible to arrange the plurality of movable plates 3 so as to be aligned in the direction opposite to the static magnetic field generating means 4. In this case, for the middle movable plate 3 whose distance from the static magnetic field generating means 4 is far, the acting static magnetic field strength is weakened. It is necessary to adjust the drive current of the movable plate 3 or the number of turns of the drive coil.

  Further, the individually formed movable chips 11 may be arranged in alignment with the opposing direction of the static magnetic field generating means 4, and the static magnetic field generating means 4 may be arranged between the movable chips 11 as in FIG. . In this case, the static magnetic field strength acting on each movable plate 3 is uniform.

Next, a description will be given of a tenth embodiment of the planar electromagnetic actuator according to the present invention. Note that the same elements as those in FIG. 12 are denoted by the same reference numerals, and here, different parts from the ninth embodiment will be described.
In the tenth embodiment shown in FIG. 15, the movable chip 11 is pivotally supported by one torsion bar 2 so that the movable plate 3 that is pivotally supported by the torsion bar 2 is arranged in a matrix. It is arranged inside one yoke member 5 formed in a frame shape as a one-chip configuration. Then, as in the ninth embodiment, the torsion bar 2 is tilted so that the normal line on the magnetic pole surface 4a of the static magnetic field generating means 4 and the torsion bar 2 cross each other obliquely, and the movable plate 3 is moved to the static magnetic field generating means 4. Are arranged in a staggered manner in two rows in a direction perpendicular to the opposing direction. In this case, the pair of static magnetic field generating means 4 may be arranged so as to straddle the plurality of movable plates 3 aligned in a line.

  With this configuration, according to the tenth embodiment, in addition to the effects of the ninth embodiment, the cost of the matrix type planar electromagnetic actuator can be reduced. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

  Note that the arrangement of the movable plates 3 is not limited to the two-row staggered arrangement described above, and may be a three or more-row staggered arrangement. In this case, for the movable plate 3 that is far from the static magnetic field generating means 4 and has a weak static magnetic field that acts on the drive coil, the drive current or drive coil of each drive coil depends on the strength of the acting static magnetic field. The variation in the rotation angle can be suppressed by changing the number of turns and the length of the necessary portion of the drive coil.

Next, an eleventh embodiment of a planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 12 are denoted by the same reference numerals, and here, different parts from the ninth embodiment will be described.
In the eleventh embodiment shown in FIG. 16, the movable plate 3 includes a circular inner movable plate 6 and a circular frame-shaped outer movable plate 7, and the inner movable plate 6 rotates on the outer movable plate 7 by the inner torsion bar 9. The outer movable plate 7 is supported by the fixed portion 1 so as to be pivotable by an outer torsion bar 8 orthogonal to the axis of the inner torsion bar 9. Then, a plurality of movable plates 3 are arranged in close proximity to one fixed portion 1 to form a movable chip 11, and the movable chip 11 is disposed inside one yoke member 5 formed in a frame shape. Yes. In this case, the pair of static magnetic field generating means 4 may be arranged so as to straddle the plurality of movable plates 3 aligned in a line.

  With such a configuration, a pair of static magnetic field generating means 4 applies a static magnetic field to the opposite side of the movable plate 3 parallel to the axis of the inner torsion bar 9 and the opposite side of the outer movable plate 7 parallel to the axis of the outer torsion bar 8. The inner movable plate 6 acts by the interaction between the current of the drive coil portion in the vicinity of each opposite side, the static magnetic field component orthogonal to the axis of the inner torsion bar 9 and the static magnetic field component orthogonal to the axis of the outer torsion bar 8. And the outer movable plate 7 are rotated, and the optical path of the incident light is switched in the two-dimensional direction by the reflection mirror 12.

  In FIG. 16, the movable plate 3 is shown in a circular shape. However, the shape is not limited to this, and for example, the movable plate 3 may have a rectangular shape as shown in FIG. 17 or any other shape.

  Further, as shown in FIG. 18, a static magnetic field is generated by individually forming a movable chip 11 configured by pivotally supporting the movable plate 3 on the fixed portion 1 and arranging the movable chips 11 so as to face each other. The outer and inner torsion bars 8 and 9 are inclined so that the normal line on the magnetic pole surface 4a of the static magnetic field generating means 4 and the outer and inner torsion bars 8 and 9 cross each other obliquely between the means 4 and the static magnetic field. A plurality of them may be arranged in a direction orthogonal to the facing direction of the generating means 4.

  With this configuration, according to the eleventh embodiment, in addition to the effects of the ninth embodiment, an array-like planar electromagnetic actuator for an optical switch that switches an optical path in a two-dimensional direction can be provided.

Next, a twelfth embodiment of the planar electromagnetic actuator according to the present invention will be described. Note that the same elements as those in FIG. 16 are denoted by the same reference numerals, and here, different parts from the eleventh embodiment will be described.
In the twelfth embodiment shown in FIG. 19, the movable plate 11 is arranged in a matrix form with the movable plate 3 rotating around the axes of the two torsion bars, and a plurality of the movable plates 3 are integrated as in the eleventh embodiment. The one-chip configuration is arranged inside one yoke member 5 formed in a frame shape. The movable tip 11 is inclined by tilting the outer and inner torsion bars 8 and 9 so that the normal line on the magnetic pole surface 4a of the static magnetic field generating means 4 and the outer and inner torsion bars 8 and 9 cross each other obliquely. They are arranged in a staggered manner in two rows in a direction perpendicular to the opposing direction of the magnetic field generating means 4. In this case, the pair of static magnetic field generating means 4 may be arranged so as to straddle the plurality of movable plates 3 aligned in a line.

  By adopting such a configuration, the twelfth embodiment can reduce the cost of the matrix array planar electromagnetic actuator that switches the optical path in a two-dimensional direction in addition to the effects of the eleventh embodiment. Furthermore, a planar electromagnetic actuator for an optical switch having a small and dense structure can be provided.

  As described in the tenth embodiment, the arrangement of the movable plates 3 may be a staggered arrangement of three or more rows. Also in this case, since the distance from the static magnetic field generating means 4 is large, the driving current of each driving coil or the driving current of each driving coil or the like depending on the strength of the acting static magnetic field is applied to the movable plate 3 having a weak static magnetic field acting on the driving coil. The variation in the rotation angle can be suppressed by changing the number of turns of the drive coil or the length of the necessary part of the drive coil.

  The planar electromagnetic actuator of the present invention is not limited to an optical switch, and can be applied to any one as long as a plurality of movable plates 3 are arranged in an array. Moreover, the shape of the movable plate 3 is not limited to a square shape or a circular shape, and may be any shape. Further, the number of movable plates 3 is not limited to that shown in each drawing, and any number may be used as long as it is plural.

DESCRIPTION OF SYMBOLS 1 ... Fixed part 1a ... Joining surface part 1b ... Side surface part 2 ... Torsion bar 3 ... Movable plate 4, 10 ... Static magnetic field generating means 4a ... Magnetic pole surface 5 ... York member 6 ... Inner movable plate 7 ... Outer movable plate 8 ... Outer torsion Bar 9 ... Inside torsion bar

Claims (10)

Inside one yoke member formed in a frame shape,
A plurality of movable plates that are pivotally supported by the fixed portions so as to be rotatable by a torsion bar, and are arranged at least in a line with at least the fixed portions interposed therebetween,
A drive coil laid along the peripheral edge of each movable plate;
A static magnetic field is applied to the drive coil portion of the plurality of movable plates in the vicinity of the opposite side parallel to the axis of the torsion bar, with the opposite magnetic poles facing each other with the plurality of movable plates in between. A pair of static magnetic field generating means acting on
A planar electromagnetic actuator characterized by comprising:   2. The planar according to claim 1, wherein a plurality of movable plates aligned in the row are arranged so that a normal line of a magnetic pole surface of the static magnetic field generating means and an axis of the torsion bar are orthogonal to each other. Type electromagnetic actuator.   A plurality of movable plates arranged in a row are arranged so that a normal line of the magnetic pole surface of the static magnetic field generating means and an axis of the torsion bar intersect diagonally, and the pair of pairs are arranged so as to straddle the plurality of movable plates. 2. The planar electromagnetic actuator according to claim 1, wherein a static magnetic field generating means is arranged.   The plurality of movable plates arranged in a row are arranged in a plurality of rows in a direction orthogonal to the opposing direction of the static magnetic field generation device, and the pair of static magnetic field generation devices are arranged to straddle the plurality of movable plates in the row direction. The planar electromagnetic actuator according to claim 2, wherein the planar electromagnetic actuator is arranged.   4. The planar electromagnetic actuator according to claim 3, wherein the plurality of movable plates arranged in a row are arranged in a plurality of rows in a direction opposite to the static magnetic field generating means.   6. The planar electromagnetic actuator according to claim 1, wherein each of the movable plates is configured to be pivotally supported by a torsion bar on a frame-shaped fixed portion formed individually.   The planar electromagnetic actuator according to any one of claims 1 to 5, wherein the plurality of movable plates are integrally formed by pivotally supporting a single fixed portion with a torsion bar.   4. The planar electromagnetic actuator according to claim 3, wherein a side surface portion of the fixed portion facing the static magnetic field generating means is formed in a shape parallel to the arrangement direction of the movable plates.   The movable plate comprises an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is pivotally supported on the fixed portion by an outer torsion bar, An inner movable plate is rotatably supported on the outer movable plate by an inner torsion bar orthogonal to the axis of the outer torsion bar, and a plurality of movable plates are interposed in a direction orthogonal to the axis of the outer torsion bar. 3. The pair of static magnetic field generating means is disposed, and another static magnetic field generating means is disposed with the movable plate interposed in a direction perpendicular to the axis of the inner torsion bar. Planar type electromagnetic actuator.   The movable plate comprises an inner movable plate and a frame-shaped outer movable plate provided outside the inner movable plate, and the outer movable plate is pivotally supported on the fixed portion by an outer torsion bar, An inner movable plate is rotatably supported by an inner torsion bar perpendicular to the axis of the outer torsion bar on the outer movable plate, and a plurality of the movable plates in a direction obliquely intersecting the axis of each torsion bar 4. The planar electromagnetic actuator according to claim 3, wherein the pair of static magnetic field generating means are arranged with a gap therebetween.

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