JP2010171254A - Electronic device package structure, and electronic circuit module using the same - Google Patents

Electronic device package structure, and electronic circuit module using the same Download PDF

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JP2010171254A
JP2010171254A JP2009013144A JP2009013144A JP2010171254A JP 2010171254 A JP2010171254 A JP 2010171254A JP 2009013144 A JP2009013144 A JP 2009013144A JP 2009013144 A JP2009013144 A JP 2009013144A JP 2010171254 A JP2010171254 A JP 2010171254A
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electronic circuit
dielectric
electronic
package structure
device package
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JP4942776B2 (en
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Keiko Ueno
恵子 上之
Kaoru Uchiyama
内山  薫
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Hitachi Astemo Ltd
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Hitachi Automotive Systems Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15192Resurf arrangement of the internal vias
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/162Disposition
    • H01L2924/16251Connecting to an item not being a semiconductor or solid-state body, e.g. cap-to-substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic device package structure downsizable and incorporated in an actuator of a motor, an injector or the like that particularly easily generates large electrical noise, and to provide an electronic circuit module using the same. <P>SOLUTION: A base board 1 including an electronic circuit part 21A with electronic components 10, 11 each comprising a semiconductor element and the like mounted thereon is formed of a dielectric material; and a dielectric lamination part with a sheet-like dielectric material 2 and a conductor 4 laminated therein is arranged in a bushel-like form in an outer peripheral part of the base board 1 to surround the electronic circuit part 21A to remove or cut off noise emitted to the outside from the electronic circuit part 21A and/or intruding into the electronic circuit part 21A from the outside. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、ベースとなる基板の面上に半導体素子等からなる電子部品が実装される電子デバイスパッケージ構造びそれが用いられた電子回路モジュールに係り、特に、自動車等の高いノイズ環境で使用するのに好適な電子回路モジュールに関する。   The present invention relates to an electronic device package structure in which an electronic component made of a semiconductor element or the like is mounted on the surface of a base substrate, and an electronic circuit module using the electronic device package structure, and is used particularly in a high noise environment such as an automobile. The present invention relates to a suitable electronic circuit module.

電子回路(電子部品)を実装する回路モジュールにおいて、従来技術では、半導体素子やノイズを防止(低減)するためのコンデンサ、抵抗などの電子部品は回路基板に直接実装している。あるいは、半導体素子やノイズ除去コンデンサ、抵抗などの電子部品をインターポーザ基板に実装した後に樹脂等による封止によってパッケージングし、そのパッケージを回路基板に実装している(下記特許文献1、2等を参照)。   In a circuit module for mounting an electronic circuit (electronic component), in the conventional technique, electronic components such as a semiconductor element and a capacitor and a resistor for preventing (reducing) noise are directly mounted on a circuit board. Alternatively, after mounting electronic components such as a semiconductor element, a noise removing capacitor, and a resistor on an interposer substrate, they are packaged by sealing with a resin or the like, and the package is mounted on a circuit substrate (see Patent Documents 1 and 2 below) reference).

特開2001−168266号公報JP 2001-168266 A 特開2002−184894号公報JP 2002-184894 A

しかし、従来技術では、電子回路(電子部品)の電磁波等による電気的ノイズの影響を防止するコンデンサは個別に設置しているため、回路モジュール自体の小型化に難があり、特にモータやインジェクタ(燃料噴射弁)等のアクチュエータへの電子回路の内蔵を困難としていた。   However, in the prior art, capacitors that prevent the influence of electrical noise due to electromagnetic waves of electronic circuits (electronic components) are individually installed, so it is difficult to reduce the size of the circuit module itself, and in particular, motors and injectors ( It has been difficult to incorporate an electronic circuit into an actuator such as a fuel injection valve.

本発明は、上記事情に鑑みてなされたもので、その目的とするところは、小型化を図ることができて、特に、大きな電気的ノイズを発生しやすいモータやインジェクタ等のアクチュエータへの内蔵を可能とする電子デバイスパッケージ構造及びそれが用いられた電子回路モジュールを提供することにある。   The present invention has been made in view of the above circumstances, and an object of the present invention is to be able to reduce the size, and in particular, to be incorporated in an actuator such as a motor or an injector that easily generates a large electric noise. It is an object to provide an electronic device package structure and an electronic circuit module using the electronic device package structure.

上記目的を達成すべく、本発明に係る電子デバイスパッケージ構造の一つは、基本的には、半導体素子等からなる電子部品が実装される電子回路部を有するベース基板が誘電体で形成され、前記電子回路部から外部へ及び/又は外部から前記電子回路部へ侵入するノイズを除去ないし遮断すべく、前記ベース基板の外周部に、シート状の誘電体と導体とが積層されてなる誘電体積層部が前記電子回路部を包囲するように枡形状に設けられていることを特徴としている。   In order to achieve the above object, one of the electronic device package structures according to the present invention basically includes a base substrate having an electronic circuit part on which an electronic component made of a semiconductor element or the like is mounted, and is formed of a dielectric. A dielectric in which a sheet-like dielectric and a conductor are laminated on the outer periphery of the base substrate in order to remove or block noise that enters the electronic circuit part from the outside and / or from the outside to the electronic circuit part. The laminated portion is provided in a bowl shape so as to surround the electronic circuit portion.

本発明に係る電子デバイスパッケージ構造の他の一つは、半導体素子等からなる電子部品が実装される電子回路部を有するベース基板が誘電体で形成され、前記ベース基板における前記電子回路部の周囲に、シート状の誘電体と導体とが積層されてなる誘電体積層部が複数個所定の態様で設けられるとともに、前記複数個の誘電体積層部のうちの少なくとも一つの誘電体積層部に隣接して、該誘電体積層部を構成する誘電体とは異なる特性の誘電体で構成される誘電体積層部が配在されていることを特徴としている。   According to another aspect of the electronic device package structure of the present invention, a base substrate having an electronic circuit portion on which an electronic component made of a semiconductor element or the like is mounted is formed of a dielectric, and the periphery of the electronic circuit portion in the base substrate In addition, a plurality of dielectric laminated portions in which sheet-like dielectrics and conductors are laminated are provided in a predetermined manner, and adjacent to at least one dielectric laminated portion of the plurality of dielectric laminated portions. In addition, a dielectric laminate part composed of a dielectric having a characteristic different from that of the dielectric constituting the dielectric laminate part is arranged.

この場合、前記特性が異なる複数の誘電体は、好ましくは、その容量又は誘電率が異なるようにされる。   In this case, the plurality of dielectrics having different characteristics preferably have different capacities or dielectric constants.

前記特性が異なる複数の誘電体は、好ましくは、同一材質の紛粒体を焼成したものであり、その粒径の違いにより前記特性が異なるようにされる。   The plurality of dielectrics having different characteristics are preferably obtained by firing powders of the same material, and the characteristics are made different depending on the particle size.

さらに好ましい態様では、前記特性が異なる複数の誘電体は、材質は同一であるが粒径の異なる紛粒体をグリーンシート状に形成し、それらを所定寸法形状に打ち抜いて同じ特性のもの同士が隣り合わないように互い違いに配列するとともに、同じ特性のもの同士を積層した後、一体的に焼結したものとされる。   In a further preferred aspect, the plurality of dielectrics having different characteristics are formed of green particles of powders having the same material but different particle sizes, and having the same characteristics by punching them into a predetermined size shape. They are arranged in a staggered manner so as not to be adjacent to each other, and are laminated together after being laminated with the same characteristics.

前記誘電体の材料は、好ましくは、チタン酸バリウムとされる。   The dielectric material is preferably barium titanate.

他の好ましい態様では、前記誘電体積層部は、同じ特性の誘電体と導体とが交互に積層され、nを整数として、前記導体のn層とn+2層とが、それらの間に配在されている前記誘電体に設けられたビアホールに充填された導体で接続される。   In another preferred aspect, the dielectric laminated portion is formed by alternately laminating dielectrics and conductors having the same characteristics, and n and n + 2 layers of the conductor are arranged between them, where n is an integer. Are connected by a conductor filled in a via hole provided in the dielectric.

一方、本発明に係る電子回路モジュールは、上記した電子デバイスパッケージ構造が採用されたもので、前記ベース基板の電子回路部に半導体素子等からなる電子部品が実装されるとともに、前記誘電体積層部における最外層が導体で形成され、該最外層の導体は、前記電子回路部に接続されるとともに、外部に接続するために設けられた電極端子部に接続されていることを特徴としている。   On the other hand, an electronic circuit module according to the present invention adopts the electronic device package structure described above, and an electronic component made of a semiconductor element or the like is mounted on the electronic circuit portion of the base substrate, and the dielectric laminate portion. The outermost layer is formed of a conductor, and the outermost layer conductor is connected to the electronic circuit portion and to an electrode terminal portion provided for connection to the outside.

電子回路モジュールの好ましい態様では、一部ないし全部が導体で形成されたキャップにより封止される。   In a preferred aspect of the electronic circuit module, a part or all of the electronic circuit module is sealed with a cap formed of a conductor.

前記電子部品は、好ましくは、導電性接着材により前記ベース基板に接着される。   The electronic component is preferably bonded to the base substrate with a conductive adhesive.

前記電子部品は、好ましくは、金属バンプにより前記基板の面上に形成された導体に接続される。   The electronic component is preferably connected to a conductor formed on the surface of the substrate by a metal bump.

電子回路モジュールの他の好ましい態様では、モータを制御する駆動回路として構成されて、該モータに内蔵可能とされる。   In another preferred aspect of the electronic circuit module, the electronic circuit module is configured as a drive circuit for controlling the motor and can be built in the motor.

電子回路モジュールの別の好ましい態様では、車載用エンジンのインジェクタを制御する駆動回路として構成されて、該インジェクタに内蔵可能とされる。   In another preferable aspect of the electronic circuit module, the electronic circuit module is configured as a drive circuit for controlling the injector of the vehicle-mounted engine and can be built in the injector.

本発明に係る電子デバイスパッケージ構造が採用された電子回路モジュールでは、電子回路部を有するベース基板が誘電体で形成され、このベース基板の外周部に、シート状の誘電体と導体とが積層されてなる誘電体積層部が前記電子回路部を包囲するように枡形状に設けられている(好ましくは特性の異なる複数種の誘電体積層部が例えば互い違いに配設される)ことから、電子回路部の入り口で誘電体積層部により電気的ノイズが吸収除去ないし遮断され、そのため、電子回路部分を安定して動作させることができる。   In an electronic circuit module employing the electronic device package structure according to the present invention, a base substrate having an electronic circuit portion is formed of a dielectric, and a sheet-like dielectric and a conductor are laminated on the outer periphery of the base substrate. The dielectric laminate portion is provided in a bowl shape so as to surround the electronic circuit portion (preferably a plurality of types of dielectric laminate portions having different characteristics are disposed alternately, for example). Electrical noise is absorbed or removed by the dielectric laminated portion at the entrance of the portion, so that the electronic circuit portion can be stably operated.

特に、自動車におけるモータやインジェクタ(燃料噴射弁)などのアクチュエータでは、アクチュエータの動作時の電磁波がノイズとなって電子回路(電子部品)を誤動作させるが、本発明によれば、ノイズは電子回路部の入り口の誘電体積層部により吸収されるため、アクチュエータへの内蔵搭載も容易となる。同時に、モジュール内の電子回路部から外部に放出されるノイズも除去できる。   In particular, in actuators such as motors and injectors (fuel injection valves) in automobiles, electromagnetic waves during operation of the actuators become noise and cause electronic circuits (electronic parts) to malfunction, but according to the present invention, noise is an electronic circuit unit. Since it is absorbed by the dielectric laminated portion at the entrance, it can be easily built in the actuator. At the same time, noise emitted to the outside from the electronic circuit section in the module can be removed.

また、電子回路を構成する各電子部品に個別にコンデンサを設置する必要がなく、さらに複数種の半導体部品を実装することにより回路基板が不要な回路モジュールができ、大幅な小型化が可能となる。   In addition, it is not necessary to install capacitors individually for each electronic component that makes up the electronic circuit, and by mounting multiple types of semiconductor components, a circuit module that does not require a circuit board can be created, and a significant reduction in size can be achieved. .

さらに本発明によれば、誘電体で形成したモジュール(パッケージ)の中に電子回路部(電子部品)を実装するため、従来のように実装する電子部品ごとに個別にコンデンサを設置する等、コンデンサの配置を考える必要がなく設計の自由度が高くなる。   Furthermore, according to the present invention, in order to mount an electronic circuit part (electronic component) in a module (package) formed of a dielectric, a capacitor is individually installed for each electronic component to be mounted as in the past. There is no need to consider the arrangement of the design, and the degree of freedom in design increases.

本発明に係る電子デバイスパッケージ構造の一実施例の概略構成を示す側面図(図2のX−X’矢視断面図)。The side view which shows schematic structure of one Example of the electronic device package structure which concerns on this invention (X-X 'arrow sectional drawing of FIG. 2). 図1に示されるノイズ除去用コンデンサの概略構成を示す平面図FIG. 1 is a plan view showing a schematic configuration of the noise removing capacitor shown in FIG. 図1のY−Y’矢視断面図。FIG. 2 is a cross-sectional view taken along arrow Y-Y ′ in FIG. 1. 本発明に係る電子回路モジュールの一例を示す断面図。Sectional drawing which shows an example of the electronic circuit module which concerns on this invention. モータの駆動回路図。The drive circuit diagram of a motor. 本発明に係る電子回路モジュールの一例を内蔵したモータの断面図。Sectional drawing of the motor which incorporated an example of the electronic circuit module which concerns on this invention. 図6に示されるモータの要部詳細図。FIG. 7 is a detail view of a main part of the motor shown in FIG. 6. 従来のインジェクタ駆動回路図。The conventional injector drive circuit diagram. ドライバ内蔵インジェクタの駆動回路図。The drive circuit diagram of the injector with a built-in driver. 本発明の電子回路モジュールの他の例を内蔵したインジェクタの断面図。Sectional drawing of the injector which incorporated the other example of the electronic circuit module of this invention. 図10に示されるインジェクタに内蔵する駆動回路モジュールの外観概念図。FIG. 11 is an external conceptual diagram of a drive circuit module built in the injector shown in FIG. 10. 図10に示されるインジェクタの要部詳細図。FIG. 11 is a detail view of a main part of the injector shown in FIG. 10.

以下、本発明の電子デバイスパッケージ構造の実施の形態を図面を参照しながら説明する。   Embodiments of the electronic device package structure of the present invention will be described below with reference to the drawings.

図1、図2、図3は、本発明に係る電子デバイスパッケージ構造の一実施例の概略構成を示し、図1はその側面図(図2のX−X’矢視断面図)、図2はその平面図、図3は図1のY−Y’矢視断面図である。   1, 2, and 3 show a schematic configuration of an embodiment of an electronic device package structure according to the present invention. FIG. 1 is a side view thereof (sectional view taken along the line XX ′ in FIG. 2), FIG. Is a plan view thereof, and FIG. 3 is a cross-sectional view taken along arrow YY ′ of FIG.

図1〜図3において、ベース基板1は、誘電体材料からなっている。基板1には回路の基準電位となる導体6が電子回路配線(図示されていない)と共に同一面に形成されている。   1 to 3, the base substrate 1 is made of a dielectric material. On the substrate 1, a conductor 6 serving as a circuit reference potential is formed on the same surface together with electronic circuit wiring (not shown).

誘電体2、3は、それぞれの誘電率(ε1、ε2)は異なり、導体層4及び5と重ね合わせて積層されている(誘電体積層部2、3、あるいは誘電体積層部16と称することがある)。   The dielectrics 2 and 3 have different dielectric constants (ε1, ε2), and are laminated so as to overlap with the conductor layers 4 and 5 (referred to as dielectric laminates 2, 3 or dielectric laminates 16). Is).

更に、導体層4と5、及び6とは、図3に示すように誘電体層2の内部に設けられ、導体を充填したビアホール7によって隔層毎に互い違いに接続されている。更に、導体層4は、図3に示すように、外部と接続するためにパッケージ(モジュール)の側面に配設された導体8に接続されている。   Further, the conductor layers 4, 5 and 6 are provided inside the dielectric layer 2 as shown in FIG. 3, and are alternately connected to each other by via holes 7 filled with a conductor. Further, as shown in FIG. 3, the conductor layer 4 is connected to a conductor 8 disposed on a side surface of the package (module) for connection to the outside.

次に、前記誘電体積層部2、3を含むパッケージ構造を製造する工程を説明する。   Next, a process for manufacturing a package structure including the dielectric laminates 2 and 3 will be described.

まず、誘電体である基板1をグリーンシート状で導体6を印刷にて形成した状態としておく。基板1の材料としてはコンデンサに多用される酸化チタン、あるいはチタン酸バリウムを所要の誘電率に合わせて選択する。誘電体層3は誘電体層2に相当する部分を打ち抜いた誘電率ε1の材料で基板1と同様にグリーンシート状態で形成しておく。誘電体層2(ε2)は誘電体層3と反対に図2の斜線部分を残した形に打ち抜き、基板1、誘電体層3と同様、グリーンシート状態で導体5、あるいは導体4を印刷するとともにビアホールにより接続が必要な誘電体2の層には導体を充填したビアホール7を設けておく。   First, the substrate 1 as a dielectric is in a green sheet shape and the conductor 6 is formed by printing. As the material of the substrate 1, titanium oxide or barium titanate frequently used for capacitors is selected according to a required dielectric constant. The dielectric layer 3 is made of a material having a dielectric constant ε1 obtained by punching out a portion corresponding to the dielectric layer 2 and is formed in a green sheet state like the substrate 1. The dielectric layer 2 (ε2) is punched out in a shape leaving the hatched portion in FIG. 2 opposite to the dielectric layer 3, and the conductor 5 or the conductor 4 is printed in the green sheet state similarly to the substrate 1 and the dielectric layer 3. In addition, a via hole 7 filled with a conductor is provided in a layer of the dielectric 2 that needs to be connected by a via hole.

次にこれらの各層を積層する。即ち、基板1を最下層に誘電体3、誘電体2の層を積層し、表面に導体4が形成された層を最後(最上段)に積層し、加圧プレスの後、1300℃以上の高温で焼成する。その後、側面に導体4と電気的に接続するように導体8を塗布し再度導体8を900℃程度の温度で焼成する。   Next, each of these layers is laminated. That is, the substrate 1 is laminated with the dielectric 3 and dielectric 2 layers on the lowermost layer, and the layer with the conductor 4 formed on the surface is laminated on the last (uppermost layer). Bake at high temperature. Thereafter, the conductor 8 is applied on the side surface so as to be electrically connected to the conductor 4, and the conductor 8 is fired again at a temperature of about 900 ° C.

その結果、半導体素子等からなる電子部品10、11が実装される電子回路部を有する基板1を備え、この基板1の外周に、誘電体積層部16が設けられた枡状の電子デバイスパッケージ構造(電子回路モジュール)を得ることができる。   As a result, a bowl-shaped electronic device package structure including a substrate 1 having an electronic circuit portion on which electronic components 10 and 11 made of semiconductor elements or the like are mounted, and a dielectric laminate portion 16 provided on the outer periphery of the substrate 1. (Electronic circuit module) can be obtained.

ここで、誘電体層3と誘電体層2とに望まれる誘電率は異なる。即ち、コンデンサを形成する誘電体層2には高誘電率(ε2)の性能(特性)が、また、誘電体層3には回路のクロストーク低減のため低誘電率(ε1)の性能(特性)が望まれる。しかし、前述したように製法はグリーンシートの焼成のため、焼成中の焼成温度過程における挙動、代表的には収縮特性が揃わないと焼成後に割れてしまう問題がある。本発明では、これを解決するため、誘電体層3と誘電体層2とは同じ材料(材質)、例えばチタン酸バリウムで形成し、グリーンシートを形成するときの粉黛状態での粒径を変えた。チタン酸バリウムには粒径により誘電率が大きく(1〜10倍)変化する特徴がある。このようにすることにより焼成中の焼結特性を揃えて、誘電率の異なる層を形成することを実現した。   Here, the dielectric constants desired for the dielectric layer 3 and the dielectric layer 2 are different. That is, the dielectric layer 2 forming the capacitor has a high dielectric constant (ε2) performance (characteristic), and the dielectric layer 3 has a low dielectric constant (ε1) performance (characteristic) to reduce circuit crosstalk. ) Is desired. However, as described above, since the green sheet is fired as described above, there is a problem of cracking after firing if the behavior in the firing temperature process during firing, typically shrinkage characteristics, is not achieved. In the present invention, in order to solve this, the dielectric layer 3 and the dielectric layer 2 are formed of the same material (material), for example, barium titanate, and the particle size in the powdery state when the green sheet is formed is changed. It was. Barium titanate is characterized by a large change in dielectric constant (1 to 10 times) depending on the particle size. By doing so, it was possible to form layers having different dielectric constants with uniform sintering characteristics during firing.

本実施例によれば、基板1の外周部に誘電体積層部からなるコンデンサを有し、内部に電子回路を形成できる極めて小型の電子デバイスパッケージ(モジュール)を提供することができる。   According to the present embodiment, it is possible to provide an extremely small electronic device package (module) having a capacitor formed of a dielectric laminated portion on the outer peripheral portion of the substrate 1 and capable of forming an electronic circuit therein.

図4は、上記した如くの電子デバイスパッケージ構造が採用された電子回路モジュール(モータ駆動回路モジュール)21を示す。本例の電子回路モジュール21は、基本的には、半導体素子等からなる電子部品10、11が実装される電子回路部21Aを有するベース基板1が誘電体で形成され、該基板1の面上における前記電子回路部21Aの周囲に、誘電体2、3及び導体4が所定の態様で配列された誘電体積層部が設けられている。   FIG. 4 shows an electronic circuit module (motor drive circuit module) 21 in which the electronic device package structure as described above is adopted. In the electronic circuit module 21 of this example, basically, a base substrate 1 having an electronic circuit portion 21A on which electronic components 10 and 11 made of a semiconductor element or the like are mounted is formed of a dielectric, and on the surface of the substrate 1 A dielectric laminated portion in which the dielectrics 2, 3 and the conductors 4 are arranged in a predetermined manner is provided around the electronic circuit portion 21A.

このモジュール21には、図5に示されるモータを制御する駆動回路(モータドライバー)が実装されている。   The module 21 is mounted with a drive circuit (motor driver) that controls the motor shown in FIG.

図4に示される電子部品11は、図5に示されるトランジスタT1〜T4(17〜20)で、電子部品10は図5に示されるドライバーICである。誘電体層2(ε2)と導体層5等で形成された誘電体積層部16はコンデンサを示す。   The electronic component 11 shown in FIG. 4 is the transistors T1 to T4 (17 to 20) shown in FIG. 5, and the electronic component 10 is the driver IC shown in FIG. A dielectric laminated portion 16 formed of the dielectric layer 2 (ε2) and the conductor layer 5 or the like indicates a capacitor.

電子部品11(トランジスタT1〜T4)は、基板1の基準電圧導体6に導電性接着材12で固定されている。その表面電極(図示していない)からはワイヤ14がワイヤボンディングにより導体層4に接続され外部へ接続する電極8へ電気的に継いでいる。   The electronic component 11 (transistors T <b> 1 to T <b> 4) is fixed to the reference voltage conductor 6 of the substrate 1 with a conductive adhesive 12. A wire 14 is electrically connected from the surface electrode (not shown) to the electrode 8 connected to the conductor layer 4 by wire bonding and connected to the outside.

電子部品10(ドライバーIC)は、金属バンプ(例えばはんだ)13により基板1の電子回路形成導体に接続されている。さらに、外部から進入する塵埃、水分を防止するため、プラスチック成形品であるキャップ9が備えられている。該キャップ9の内側にはめっきにより金属層15が形成されており、その金属層15は電気的に基準電位(図4右側の導体層8を介して)に接続されている。   The electronic component 10 (driver IC) is connected to the electronic circuit forming conductor of the substrate 1 by metal bumps (for example, solder) 13. Furthermore, a cap 9 that is a plastic molded product is provided to prevent dust and moisture entering from the outside. A metal layer 15 is formed inside the cap 9 by plating, and the metal layer 15 is electrically connected to a reference potential (via the conductor layer 8 on the right side of FIG. 4).

図5に示される回路の動作を説明する。   The operation of the circuit shown in FIG. 5 will be described.

マイコンを中心とした制御回路は様々な指令とセンサの情報信号に従いモータ22の回転動作に対する信号をドライバーIC10に出力する。ドライバーICはその指示にしたがいモータを動作させるための信号をトランジスタT1〜T4に出力する。その結果、例えば、トランジスタT1とT4をON操作することによりモータ22は右へ回転、T2、T3をONさせると左方向へと回転を制御する。   A control circuit centered on the microcomputer outputs a signal for the rotational operation of the motor 22 to the driver IC 10 in accordance with various commands and information signals from the sensors. The driver IC outputs a signal for operating the motor to the transistors T1 to T4 according to the instruction. As a result, for example, when the transistors T1 and T4 are turned on, the motor 22 rotates to the right, and when T2 and T3 are turned on, the rotation is controlled to the left.

この構成によればモータ駆動回路(モータドライバー)に進入する電気ノイズをコンデンサ16(誘電体層2、導体層5)で除去できるので動作の安定したモータ駆動回路(回路モジュール)を提供することが出来る。   According to this configuration, since the electric noise entering the motor drive circuit (motor driver) can be removed by the capacitor 16 (dielectric layer 2, conductor layer 5), it is possible to provide a motor drive circuit (circuit module) with stable operation. I can do it.

図6、図7は、図5に示される如くのモータ駆動回路(回路モジュール)21をモータ22に内蔵した状態を示す。このモータ22は、自動車のパワーウインドウや、座席シートを操作するパワーシート、シートベルトを巻き取るパワーシートベルトの類のものである。これらのモータは動作機能上、自動車の車室内に装着する必用があり、モータから発生する電気ノイズ、特にモータ〜制御回路間の配線から放出されるノイズは音響機器や最近普及拡大中のナビゲーションに代表される情報機器の誤動作を招くので低減が望まれている。   6 and 7 show a state in which the motor drive circuit (circuit module) 21 as shown in FIG. The motor 22 is a power window of an automobile, a power seat that operates a seat, and a power seat belt that winds up the seat belt. These motors must be installed in the interior of an automobile because of their operating functions. Electrical noise generated from the motor, especially noise emitted from the wiring between the motor and the control circuit, can be used for audio equipment and navigation that has recently become widespread. Reduction is desired because it causes a malfunction of a representative information device.

図6において、モータ22は、ロータ26、マグネット(永久磁石)MG、コンミテータ25、ブラシ24、回路基板23等を備えている。回路基板23は、図7に示される如くに、図4、5に示されるモータ駆動回路(回路モジュール)21が搭載されている。回路基板23上には配線層が形成されており、図6のコネクタC部を介して外部、マイコン、電源VBに接続されている。また、内部はコンミテータ25のM+M−端子に接続されている。   In FIG. 6, the motor 22 includes a rotor 26, a magnet (permanent magnet) MG, a commutator 25, a brush 24, a circuit board 23, and the like. As shown in FIG. 7, the circuit board 23 is mounted with a motor drive circuit (circuit module) 21 shown in FIGS. A wiring layer is formed on the circuit board 23 and connected to the outside, the microcomputer, and the power source VB via the connector C portion of FIG. Further, the inside is connected to the M + M− terminal of the commutator 25.

この実施例によれば、モータと制御回路である駆動回路(回路モジュール)21との間の電気ノイズ(放射ノイズ)はモータ本体の金属でシールドされ、モータと制御回路21との間の配線も無くなるため、電気ノイズの放射・放出のないモータ内蔵回路モジュールを提供することができる。   According to this embodiment, electrical noise (radiated noise) between the motor and the drive circuit (circuit module) 21 which is a control circuit is shielded by the metal of the motor body, and the wiring between the motor and the control circuit 21 is also Therefore, it is possible to provide a motor built-in circuit module that does not emit or emit electrical noise.

次に、上記した電子デバイスパッケージ構造を自動車の燃料噴射弁であるインジェクタのドライバーに適用した例について説明する。   Next, an example in which the electronic device package structure described above is applied to a driver of an injector that is a fuel injection valve of an automobile will be described.

インジェクタ70は、図10に示すように、燃料ポンプ(図示していない)により加圧された燃料をインジェクタ入り口33へ送り、外部から通電されたコイル32の電磁力で弁体34を開き噴射ホール35から燃料をエンジンの吸気ポート又は燃焼室内に噴射するものである。   As shown in FIG. 10, the injector 70 sends fuel pressurized by a fuel pump (not shown) to the injector inlet 33, opens the valve body 34 by the electromagnetic force of the coil 32 energized from the outside, and opens the injection hole. From 35, fuel is injected into the intake port or combustion chamber of the engine.

このインジェクタ70の一般的な制御における電気的接続は、図8に示すように、多くの指令情報とセンサ情報を入力とするECU(エレクトリック コントロール ユニット)に内蔵されたトランジスタTに接続されている。この接続ではECUとインジェクタ間の接続が長い配線となるため、その配線から電気ノイズが外部に放射され、モータと同じ不具合の発生要因となっていた。   As shown in FIG. 8, the electrical connection in the general control of the injector 70 is connected to a transistor T built in an ECU (electric control unit) that receives a lot of command information and sensor information. In this connection, since the connection between the ECU and the injector is a long wiring, electrical noise is radiated from the wiring to the outside, which causes the same problem as the motor.

本例では、図9に示すように、ECUの一部、即ちインジェクタを駆動する回路27を前記した如くのパッケージ内に収納し、図10に示されるインジェクタ内のコネクタ部に内蔵した。   In this example, as shown in FIG. 9, a part of the ECU, that is, the circuit 27 for driving the injector is housed in the package as described above and incorporated in the connector portion in the injector shown in FIG.

図11、図12を用いてその内容を説明する。   The contents will be described with reference to FIGS.

電子回路モジュール27は、図9に示した回路を内部に実装しており、符号28、29、A、B、Cは、特性の異なる誘電体の側面に設けた電極である。   The electronic circuit module 27 has the circuit shown in FIG. 9 mounted therein, and reference numerals 28, 29, A, B, and C are electrodes provided on the side surfaces of dielectrics having different characteristics.

図12において、回路モジュール27の電極28、29はインジェクタ70のコイル端子31、30にそれぞれ接触端子によって接続されている。また、3つの電極A,B、Cは同様に接触端子A,B、C(41、42、43)によって外部端子に接続されている。   In FIG. 12, the electrodes 28 and 29 of the circuit module 27 are connected to the coil terminals 31 and 30 of the injector 70 by contact terminals, respectively. The three electrodes A, B, and C are similarly connected to external terminals by contact terminals A, B, and C (41, 42, and 43).

このような構成にすることにより、駆動回路(回路モジュール)27に配設されたコンデンサ16により電気ノイズが除去されるため回路動作の安定した、かつ電気ノイズの放出のない電子回路モジュールを提供できる。   By adopting such a configuration, the electric noise is removed by the capacitor 16 disposed in the drive circuit (circuit module) 27, so that it is possible to provide an electronic circuit module having stable circuit operation and no electric noise emission. .

1 基板(誘電体)
2 誘電率ε1の誘電体
3 誘電率ε2の誘電体
4 導体層
5 導体層
6 導体層
7 導体を充填したビアホール
8 導体
9 キャップ
10 半導体素子
11 半導体素子
12 導電性接着剤
13 金属バンプ
14 金属ワイヤ
15 めっきによる金属膜
16 ノイズ除去用コンデンサ
21 モータ駆動回路(電子回路モジュール)
21A 電子回路部(モータに内蔵されるモータ駆動回路)
22 モータ
23 回路基板
24 ブラシ
25 コンミテータ
26 ロータ
27 インジェクタ駆動回路(電子回路モジュール)
28 電極
29 電極
30 コイル端子
31 コイル端子
32 コイル
33 インジェクタ入り口
34 噴射弁
35 噴射ホール
36 インジェクタと駆動回路のコネクタ部(外部ソケット)
37 インジェクタと駆動回路のコネクタ部(インジェクタ側ソケット)
70 インジェクタ
1 Substrate (dielectric)
2 Dielectric with dielectric constant ε1 3 Dielectric with dielectric constant ε2 4 Conductor layer 5 Conductor layer 6 Conductor layer 7 Conductor filled via hole 8 Conductor 9 Cap 10 Semiconductor element 11 Semiconductor element 12 Conductive adhesive 13 Metal bump 14 Metal wire 15 Metal film by plating 16 Noise removing capacitor 21 Motor drive circuit (electronic circuit module)
21A electronic circuit (motor drive circuit built in the motor)
22 Motor 23 Circuit board 24 Brush 25 Commutator 26 Rotor 27 Injector drive circuit (electronic circuit module)
28 Electrode 29 Electrode 30 Coil terminal 31 Coil terminal 32 Coil 33 Injector inlet 34 Injection valve 35 Injection hole 36 Connector of injector and drive circuit (external socket)
37 Connector of injector and drive circuit (Injector side socket)
70 injector

Claims (13)

半導体素子等からなる電子部品が実装される電子回路部を有するベース基板が誘電体で形成され、前記電子回路部から外部へ及び/又は外部から前記電子回路部へ侵入するノイズを除去ないし遮断すべく、前記ベース基板の外周部に、シート状の誘電体と導体とが積層されてなる誘電体積層部が前記電子回路部を包囲するように枡形状に設けられていることを特徴とする電子デバイスパッケージ構造。   A base substrate having an electronic circuit part on which an electronic component made of a semiconductor element or the like is mounted is formed of a dielectric, and removes or blocks noise intruding from the electronic circuit part to the outside and / or from the outside to the electronic circuit part. Therefore, an electronic device is characterized in that a dielectric laminated portion formed by laminating a sheet-like dielectric and a conductor is provided on the outer periphery of the base substrate so as to surround the electronic circuit portion. Device package structure. 半導体素子等からなる電子部品が実装される電子回路部を有するベース基板が誘電体で形成され、前記ベース基板における前記電子回路部の周囲に、シート状の誘電体と導体とが積層されてなる誘電体積層部が複数個所定の態様で設けられるとともに、前記複数個の誘電体積層部のうちの少なくとも一つの誘電体積層部に隣接して、該誘電体積層部を構成する誘電体とは異なる特性の誘電体で構成される誘電体積層部が配在されていることを特徴とする電子デバイスパッケージ構造。   A base substrate having an electronic circuit portion on which electronic components made of semiconductor elements or the like are mounted is formed of a dielectric, and a sheet-like dielectric and a conductor are laminated around the electronic circuit portion of the base substrate. A plurality of dielectric laminate portions are provided in a predetermined manner, and a dielectric constituting the dielectric laminate portion is adjacent to at least one dielectric laminate portion of the plurality of dielectric laminate portions. An electronic device package structure characterized in that a dielectric laminated portion composed of dielectrics having different characteristics is disposed. 前記特性が異なる複数の誘電体は、その容量又は誘電率が異なっていることを特徴とする請求項2に記載の電子デバイスパッケージ構造。   The electronic device package structure according to claim 2, wherein the plurality of dielectrics having different characteristics have different capacities or dielectric constants. 前記特性が異なる複数の誘電体は、同一材質の紛粒体を焼成したものであり、その粒径の違いにより前記特性が異なるようにされていることを特徴とする請求項2に記載の電子デバイスパッケージ構造。   3. The electron according to claim 2, wherein the plurality of dielectrics having different characteristics are obtained by firing powders of the same material, and the characteristics are made different depending on a difference in particle diameter. Device package structure. 前記特性が異なる複数の誘電体は、材質は同一であるが粒径の異なる紛粒体をグリーンシート状に形成し、それらを所定寸法形状に打ち抜いて同じ特性のもの同士が隣り合わないように互い違いに配列するとともに、同じ特性のもの同士を積層した後、一体的に焼結したものであることを特徴とする請求項2に記載の電子デバイスパッケージ構造。   The plurality of dielectrics having different properties are formed of green sheets of powders having the same material but different particle sizes so that the same properties are not adjacent to each other by punching them into predetermined dimensions. 3. The electronic device package structure according to claim 2, wherein the electronic device package structure is one that is alternately arranged and that is integrally sintered after being laminated with the same characteristics. 前記誘電体の材料は、チタン酸バリウムであることを特徴とする請求項2に記載の電子デバイスパッケージ構造。   3. The electronic device package structure according to claim 2, wherein the dielectric material is barium titanate. 前記誘電体積層部は、同じ特性の誘電体と導体とが交互に積層され、nを整数として、前記導体のn層とn+2層とが、それらの間に配在されている前記誘電体に設けられたビアホールに充填された導体で接続されていることを特徴とする請求項2に記載の電子デバイスパッケージ構造。   The dielectric laminate portion is formed by alternately laminating dielectrics and conductors having the same characteristics, and n is an integer, and n layers and n + 2 layers of the conductors are arranged between them. 3. The electronic device package structure according to claim 2, wherein the electronic device package structure is connected by a conductor filled in the provided via hole. 請求項1から7のいずれか一項に記載の電子デバイスパッケージ構造が採用された電子回路モジュールであって、前記ベース基板の電子回路部に半導体素子等からなる電子部品が実装されるとともに、前記誘電体積層部における最外層が導体で形成され、該最外層の導体は、前記電子回路部に接続されるとともに、外部に接続するために設けられた電極端子部に接続されていることを特徴とする電子回路モジュール。   An electronic circuit module employing the electronic device package structure according to any one of claims 1 to 7, wherein an electronic component made of a semiconductor element or the like is mounted on an electronic circuit portion of the base substrate, The outermost layer in the dielectric laminated portion is formed of a conductor, and the outermost layer conductor is connected to the electronic circuit portion and to an electrode terminal portion provided for connection to the outside. Electronic circuit module. 一部ないし全部が導体で形成されたキャップにより封止されていることを特徴とする請求項8に記載の電子回路モジュール。   9. The electronic circuit module according to claim 8, wherein a part or all of the electronic circuit module is sealed with a cap formed of a conductor. 前記電子部品は、導電性接着材により前記ベース基板に接着されていることを特徴とする請求項8に記載の電子回路モジュール。   The electronic circuit module according to claim 8, wherein the electronic component is bonded to the base substrate with a conductive adhesive. 前記電子部品は、金属バンプにより前記基板の面上に形成された導体に接続されていることを接続されていることを特徴とする請求項8に記載の電子回路モジュール。   9. The electronic circuit module according to claim 8, wherein the electronic component is connected to a conductor formed on a surface of the substrate by a metal bump. モータを制御する駆動回路として構成されて、該モータに内蔵可能とされていることを特徴とする請求項8に記載の電子回路モジュール。   9. The electronic circuit module according to claim 8, wherein the electronic circuit module is configured as a drive circuit for controlling the motor and can be built in the motor. 車載用エンジンのインジェクタを制御する駆動回路として構成されて、該インジェクタに内蔵可能とされていることを特徴とする請求項8に記載の電子回路モジュール。   9. The electronic circuit module according to claim 8, wherein the electronic circuit module is configured as a drive circuit that controls an injector of an in-vehicle engine and can be built in the injector.
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JP5851666B1 (en) * 2014-08-22 2016-02-03 三菱電機株式会社 Power converter

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JP5851666B1 (en) * 2014-08-22 2016-02-03 三菱電機株式会社 Power converter

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