JP2010169307A - Method and device for controlling air supply quantity - Google Patents

Method and device for controlling air supply quantity Download PDF

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JP2010169307A
JP2010169307A JP2009011804A JP2009011804A JP2010169307A JP 2010169307 A JP2010169307 A JP 2010169307A JP 2009011804 A JP2009011804 A JP 2009011804A JP 2009011804 A JP2009011804 A JP 2009011804A JP 2010169307 A JP2010169307 A JP 2010169307A
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air
air supply
pressure
supply
air volume
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Yukitada Murae
行忠 村江
Tamio Iwamura
多美勇 岩村
Hiroyuki Nagai
裕之 永井
Koji Nagano
耕司 長野
Shigeru Kuriki
茂 栗木
Takeo Koide
剛男 小出
Masamichi Kakinuma
正道 柿沼
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Toda Corp
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Toda Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem wherein a conventional method of controlling air supply quantity in an air-conditioning target room requires time for damper control and thus, prompt response is difficult, in regard to a method of controlling air supply quantity in an air-conditioning target room such as a clean room. <P>SOLUTION: In the method of controlling the air supply quantity to keep the air supply quantity constant in the air-conditioning target room 3, dynamic pressure within an air supply duct 5 is measured in an air supply flow passage 4 between an air supply fan 2 for outside air etc. and the air-conditioning target room 3, and based on the pressure deviation, the air supply quantity is kept constant via a control device 8 by a pressure control damper 7. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、クリーンルーム等の空調対象室に対する給気風量の制御方法と制御装置に関するものである。   The present invention relates to a method and a control device for controlling the amount of air supplied to an air-conditioning target room such as a clean room.

従来、空調対象室としてのクリーンルームにおいては、高度な清浄度を実現するために、一定風量を給気する定風量装置(CAV:Constant Air Volume)が用いられ、従来の定風量装置は、熱線式風速センサーや風車式風速センサーなどにより測定された給気ダクトの風速をもとに、比例積分(PID)制御や間欠作動によりダンパ開度を調節して、風量(風速)が設定値となるように制御するものである(特許文献1参照)。また、外気等の流速が一定値以下では開の位置にあって、一定値を越えるとコイルバネの付勢力に抗してダンパが自動的に閉方向に閉じるようにしているものが知られている(特許文献2参照)。
特開平09−119669号公報 特開平09−287768号公報
Conventionally, in a clean room as an air-conditioned room, a constant air volume device (CAV: Constant Air Volume) that supplies a constant air volume is used in order to achieve a high degree of cleanliness. Based on the wind speed of the air supply duct measured by the wind speed sensor or wind turbine type wind speed sensor, the damper opening is adjusted by proportional integral (PID) control or intermittent operation so that the air volume (wind speed) becomes the set value. (Refer to Patent Document 1). Further, it is known that when the flow rate of outside air or the like is below a certain value, it is in the open position, and when the certain value is exceeded, the damper is automatically closed in the closing direction against the biasing force of the coil spring. (See Patent Document 2).
JP 09-119669 A JP 09-287768 A

しかし、図3乃至図4に示すような、従来のクリーンルームにおける給気風量の制御方法では、制御理論上、風速の測定とダンパ作動を繰り返して動作するため、ダンパが適正開度となるまでに長い時間を要し、例えば、起動時や夜間の省エネルギーモードで風量を変化させようとした場合は、待ち時間が特に長くなる。また、外風圧の影響などの外乱による風量変化に追従できないため、風量の安定性に欠け、これらにより、クリーンルームの要求性能である、室圧の確保が困難となる。更に、前記定風量装置に用いられる風速センサーは、通電(熱線式)部品若しくは機械的可動(風車式)部品であるので、経年の劣化が問題となるとともに、ダクト内に位置するので点検時には送風の停止と分解が必要になり、手間が掛かるものである。
本発明に係る給気風量の制御方法と制御装置は、このような課題を解決するために提案されたものである。
However, in the conventional control method of the supply air volume in the clean room as shown in FIG. 3 to FIG. 4, the control theory repeats the measurement of the wind speed and the damper operation, so that the damper reaches an appropriate opening degree. When a long time is required, for example, when the air volume is changed in the energy saving mode at the time of startup or at night, the waiting time becomes particularly long. Further, since it cannot follow the change in the air volume due to disturbance such as the influence of the external wind pressure, the air volume is not stable, and it is difficult to secure the room pressure, which is the required performance of the clean room. Furthermore, since the wind speed sensor used in the constant air volume device is a current-carrying (hot wire type) part or a mechanically movable (windmill type) part, it causes deterioration over time and is located in the duct. It is necessary to stop and disassemble the device, which takes time.
The supply air volume control method and control device according to the present invention have been proposed in order to solve such problems.

本発明に係る給気風量の制御方法の上記課題を解決して目的を達成するための要旨は、空調対象室に給気風量を一定に保つ給気風量の制御方法において、給気用ファンと前記空調対象室との間の給気流路において給気ダクト内の動圧を測定してその圧力偏差によって制御装置を介して圧力制御ダンパにより給気風量を一定に保つようにしたことである。   SUMMARY OF THE INVENTION An object of the present invention for solving the above-described problems of a method for controlling an air supply amount according to the present invention is to provide a method for controlling an air supply amount in an air-conditioning target room. The dynamic pressure in the air supply duct is measured in the air supply passage between the air-conditioning target chamber, and the supply air volume is kept constant by the pressure control damper via the control device based on the pressure deviation.

前記給気ダクトの動圧は、ピトー管によって測定することが好ましいものである。   The dynamic pressure of the air supply duct is preferably measured by a Pitot tube.

本発明に係る給気風量の制御装置の要旨は、給気用ファンと空調対象室との間の給気流路において、給気ダクト内の動圧を測定する動圧測定装置と、給気ダクト内の風量を制御する圧力制御ダンパと、前記動圧測定装置と前記圧力制御ダンパに接続され給気ダクト内の動圧の圧力偏差により前記圧力制御ダンパを駆動させて給気風量を一定に制御する制御装置とからなることである。更に、前記動圧測定装置は、ピトー管であることである。   The gist of the supply air volume control device according to the present invention is to provide a dynamic pressure measuring device for measuring the dynamic pressure in the supply air duct in the supply air flow path between the supply air fan and the air conditioning target chamber, and the supply air duct. A pressure control damper for controlling the air volume in the interior, and connected to the dynamic pressure measuring device and the pressure control damper to drive the pressure control damper according to the pressure deviation of the dynamic pressure in the air supply duct to control the air supply air volume at a constant level. And a control device that performs. Furthermore, the dynamic pressure measuring device is a Pitot tube.

本発明の給気風量の制御方法とその制御装置によれば、給気ダクト内の動圧を一定に制御することが短周期で可能となる。従来例に比べて1/3〜1/4程度の時間に短縮される。また、空調対象室の風量が短周期で一定に保たれて風量の安定化及び空調対象室の清浄度と室圧の確保が容易となる。給気ファンの起動時から設定風量に達する時間や、風量変更に伴う待ち時間が大幅に短縮され、運転管理性が向上するとともに、短時間(例えば、昼休み中において)であっても風量を減じて省エネルギーを図ることができる。   According to the air supply air volume control method and the control apparatus therefor according to the present invention, the dynamic pressure in the air supply duct can be controlled to be constant in a short cycle. Compared to the conventional example, the time is reduced to about 1/3 to 1/4. Further, the air volume in the air-conditioning target room is kept constant in a short cycle, so that it is easy to stabilize the air volume and to ensure the cleanliness and the room pressure of the air-conditioning target room. The time to reach the set air volume from the start of the air supply fan and the waiting time due to the air volume change are greatly shortened. Can save energy.

本発明に係るクリーンルーム等の空調対象室における給気風量の制御装置1は、図1(A)に示すように、外気若しくは循環気などの給気用ファン2と前記空調対象室3との間の給気流路4において、給気ダクト5内の動圧を測定する動圧測定装置6と、給気ダクト5内の風量を制御する圧力制御ダンパ7と、前記動圧測定装置6と前記圧力制御ダンパ7に接続され給気ダクト5内の動圧の圧力偏差により前記圧力制御ダンパ7を駆動させて給気風量を一定に制御する制御装置8とからなる。この制御装置1により、空調対象室3およびファンの上流側の条件変化に関係なく、一定の送風を行うものである。   As shown in FIG. 1 (A), the control device 1 for the supply air volume in an air-conditioning target room such as a clean room according to the present invention is provided between an air supply fan 2 such as outside air or circulating air and the air-conditioning target room 3. , A dynamic pressure measuring device 6 for measuring the dynamic pressure in the air supply duct 5, a pressure control damper 7 for controlling the air volume in the air supply duct 5, the dynamic pressure measuring device 6 and the pressure A control device 8 is connected to the control damper 7 and drives the pressure control damper 7 according to the pressure deviation of the dynamic pressure in the air supply duct 5 to control the air supply air volume uniformly. This control device 1 performs constant air blowing regardless of the condition change on the upstream side of the air-conditioning target chamber 3 and the fan.

前記動圧測定装置6は、図1(B)に示すように、ピトー管である。このようなピトー管であれば、通電する必要もなく、また、機械的な可動部分がないので、メンテナンスが不要で、維持管理性が向上するものである。このピトー管は、通常、風速5m/s以上におけるダクト内の風速を測定する。給気ダクト5内の概略の風量は、風量=最大風速×管路断面積×0.9となる。また、風速は、V=√(2(Pt−Ps)/γ)(m/s)であり、Pt:全圧(総圧)、Ps:静圧、γ:流体の密度(kg/m)である。 The dynamic pressure measuring device 6 is a Pitot tube as shown in FIG. With such a Pitot tube, it is not necessary to energize, and since there are no mechanical movable parts, maintenance is not required and maintenance is improved. This Pitot tube usually measures the wind speed in the duct at a wind speed of 5 m / s or higher. The approximate air volume in the air supply duct 5 is air volume = maximum wind speed × pipe cross-sectional area × 0.9. The wind speed is V = √ (2 (Pt−Ps) / γ) (m / s), Pt: total pressure (total pressure), Ps: static pressure, γ: fluid density (kg / m 3). ).

前記制御装置8は、予め、制御プログラムにおいて、前記給気ダクト5内の所定風量の場合の動圧を数値設定しておき、それに前記動圧測定装置6からの動圧の数値データ(アナログからデジタルに変換した数値データ)と比較し、その前記設定動圧と測定動圧との差を圧力偏差として、この圧力偏差の数値を基にして前記圧力制御ダンパ7を連続的に制御する。この圧力制御ダンパ7の制御モータを高速に駆動させて、風量が一定となるようにするものである。   The control device 8 sets in advance a numerical value for the dynamic pressure in the case of a predetermined air volume in the air supply duct 5 in the control program, and numerical data on the dynamic pressure from the dynamic pressure measuring device 6 (from analog) The difference between the set dynamic pressure and the measured dynamic pressure is used as a pressure deviation, and the pressure control damper 7 is continuously controlled based on the value of the pressure deviation. The control motor of the pressure control damper 7 is driven at a high speed so that the air volume becomes constant.

以上のように構成される給気風量の制御装置1によって、本発明に係る給気風量の制御方法について説明する。図1(A)に示すように、外気等の給気用ファン2と前記空調対象室3との間の給気流路4において給気ダクト5内の動圧をピトー管6で測定する。   The method for controlling the supply air volume according to the present invention will be described using the supply air volume control device 1 configured as described above. As shown in FIG. 1A, the dynamic pressure in the air supply duct 5 is measured by a Pitot tube 6 in the air supply passage 4 between the air supply fan 2 such as outside air and the air-conditioning target chamber 3.

前記ピトー管6で測定された動圧と、設定動圧とから圧力偏差を制御装置8の制御プログラムにおいて求める。そして、例えば、前記測定動圧が高く圧力偏差がプラスの場合は、前記圧力制御ダンパ7の制御モータを駆動させて閉じる方向に動かす。また、逆に、前記測定動圧が低く圧力偏差がマイナスの場合には、前記圧力制御ダンパ7を開く方向に動かす。   From the dynamic pressure measured by the Pitot tube 6 and the set dynamic pressure, a pressure deviation is obtained in the control program of the control device 8. For example, when the measured dynamic pressure is high and the pressure deviation is positive, the control motor of the pressure control damper 7 is driven and moved in the closing direction. Conversely, when the measured dynamic pressure is low and the pressure deviation is negative, the pressure control damper 7 is moved in the opening direction.

上記給気風量の制御方法によるクリーンルームに対する給気風量の変化につき、従来例と比較した実験例を図2(A),(B)に示す。図2(A)に示す実験1のように、給気ファン停止状態から起動した場合(給気ファンはインバータにより緩やかに起動させる)であり、従来方式では設定風量(620m/h)で安定するまでに600秒以上要するに対し、本発明の制御方法では200秒程度で安定する。また、図2(B)に示す実験2のように、給気風量を620m/hから320m/hに減じ、更に620m/hに戻すように変更した場合には、従来方式では320m/hに達するのに約300秒、620m/hに復帰するのに更に300秒以上要するのに対して、本発明の制御方法ではそれぞれ100秒程度で風量変更を実現している。 2A and 2B show an experimental example in comparison with the conventional example regarding the change in the air supply air volume for the clean room by the above air supply air volume control method. As in Experiment 1 shown in FIG. 2A, this is a case where the air supply fan is started from a stopped state (the air supply fan is slowly started by an inverter), and the conventional method is stable at a set air volume (620 m 3 / h). While it takes 600 seconds or more to do so, the control method of the present invention stabilizes in about 200 seconds. Also, as in the Experiment 2 shown in FIG. 2 (B), subtracting the supply air flow rate from 620 m 3 / h to 320m 3 / h, when modified as further back to 620 m 3 / h is in the conventional manner 320m While it takes about 300 seconds to reach 3 / h and 300 seconds or more to return to 620 m 3 / h, the control method of the present invention realizes air volume change in about 100 seconds.

このように、その圧力偏差によって制御装置8を介して圧力制御ダンパ7により高速に制御して、設定動圧になる。これにより、給気ダクト5における給気風量を、空調対象室3室圧等の変化にかかわらず、一定に保つようにするものである。前記ピトー管6は、通電部分や可動部分が無いので、従来に比較してメンテナンスが容易である。   In this way, the pressure deviation is controlled at high speed by the pressure control damper 7 via the control device 8 by the pressure deviation, and the set dynamic pressure is obtained. Thereby, the air supply air volume in the air supply duct 5 is kept constant regardless of changes in the air-conditioning target room 3 chamber pressure or the like. Since the Pitot tube 6 does not have an energized part or a movable part, it is easier to maintain than the conventional one.

本発明に係る給気風量の制御装置の使用状態を示す説明図(A)と、ピトー管の説明用断面図(B)とである。It is explanatory drawing (A) which shows the use condition of the control apparatus of the supply air volume which concerns on this invention, and sectional drawing (B) for description of a Pitot tube. 本発明の給気風量の制御方法と、従来例における制御方法との比較を示すもので、起動時の説明図(A)と、風量変更時の説明図(B)とである。The comparison of the control method of the supply air volume of this invention and the control method in a prior art example is shown, It is explanatory drawing (A) at the time of starting, and explanatory drawing (B) at the time of air volume change. 従来例に係るクリーンルームにおける給気風量の制御装置と制御方法を示す説明図である。It is explanatory drawing which shows the control apparatus and control method of the supply air volume in the clean room which concerns on a prior art example. 従来例に係るクリーンルームにおける給気風量の制御装置の一部拡大して示す説明図である。It is explanatory drawing which expands and shows a part of control apparatus of the supply air volume in the clean room which concerns on a prior art example.

1 給気風量の制御装置、
2 給気用ファン、
3 空調対象室、
4 給気流路、
5 給気ダクト、
6 動圧測定装置(ピトー管)、
7 圧力制御ダンパ、
8 制御装置。
1 Control device for supply air volume,
2 Air supply fan,
3 rooms subject to air conditioning
4 Air supply flow path,
5 Air supply duct,
6 Dynamic pressure measuring device (Pitot tube),
7 Pressure control damper,
8 Control device.

Claims (4)

空調対象室に給気風量を一定に保つ給気風量の制御方法において、
給気用ファンと前記空調対象室との間の給気流路において給気ダクト内の動圧を測定してその圧力偏差によって制御装置を介して圧力制御ダンパにより給気風量を一定に保つようにしたこと、
を特徴とする給気風量の制御方法。
In the control method of the supply air volume that keeps the supply air volume constant in the air-conditioned room,
The dynamic pressure in the air supply duct is measured in the air supply flow path between the air supply fan and the air-conditioning target chamber, and the air supply air volume is kept constant by the pressure control damper via the control device according to the pressure deviation. What
A method of controlling the air supply air volume characterized by the above.
給気ダクトの動圧は、ピトー管によって測定すること、
を特徴とする請求項1に記載の給気風量の制御方法。
The dynamic pressure of the air supply duct should be measured with a Pitot tube,
The method of controlling an air supply amount according to claim 1.
給気用ファンと空調対象室との間の給気流路において、給気ダクト内の動圧を測定する動圧測定装置と、給気ダクト内の風量を制御する圧力制御ダンパと、前記動圧測定装置と前記圧力制御ダンパに接続され給気ダクト内の動圧の圧力偏差により前記圧力制御ダンパを駆動させて給気風量を一定に制御する制御装置とからなること、
を特徴とする給気風量の制御装置。
A dynamic pressure measuring device for measuring a dynamic pressure in the supply duct in a supply flow path between the supply fan and the air-conditioning target chamber, a pressure control damper for controlling an air volume in the supply duct, and the dynamic pressure A control device connected to the pressure control damper and connected to the pressure control damper to drive the pressure control damper according to the pressure deviation of the dynamic pressure in the air supply duct to control the air supply air volume at a constant level;
A control device for the supply air volume characterized by
動圧測定装置は、ピトー管であること、
を特徴とする請求項3に記載の給気風量の制御装置。
The dynamic pressure measuring device is a Pitot tube,
The control apparatus of the supply air volume of Claim 3 characterized by these.
JP2009011804A 2009-01-22 2009-01-22 Method and device for controlling air supply quantity Pending JP2010169307A (en)

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Publication number Priority date Publication date Assignee Title
CN112303785A (en) * 2019-08-02 2021-02-02 上海海立(集团)股份有限公司 Static pressure air dividing box, fresh air system and operation control method thereof

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JPH0565011B2 (en) * 1985-07-26 1993-09-16 Gold Star Cable Co Ltd
JPH0545375Y2 (en) * 1989-01-24 1993-11-19
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112303785A (en) * 2019-08-02 2021-02-02 上海海立(集团)股份有限公司 Static pressure air dividing box, fresh air system and operation control method thereof

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