JP2010168234A - Apparatus for manufacturing optical fiber preform - Google Patents
Apparatus for manufacturing optical fiber preform Download PDFInfo
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- JP2010168234A JP2010168234A JP2009010603A JP2009010603A JP2010168234A JP 2010168234 A JP2010168234 A JP 2010168234A JP 2009010603 A JP2009010603 A JP 2009010603A JP 2009010603 A JP2009010603 A JP 2009010603A JP 2010168234 A JP2010168234 A JP 2010168234A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
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Abstract
Description
本発明は、光ファイバ多孔質母材を脱水、焼結する光ファイバ母材の製造装置に関するものである。 The present invention relates to an optical fiber preform manufacturing apparatus for dehydrating and sintering an optical fiber porous preform.
光ファイバ母材は、ＶＡＤ法、あるいはＯＶＤ法等により製造された光ファイバ多孔質母材を炉心管と円筒状発熱体を有する加熱炉の上端から挿入し、円筒状発熱体で加熱して、脱水、焼結することにより製造される。 An optical fiber preform is inserted from the upper end of a furnace having a furnace core tube and a cylindrical heating element, and heated with a cylindrical heating element, by using an optical fiber porous preform manufactured by the VAD method or OVD method. Manufactured by dehydration and sintering.
円筒状発熱体１０としては、図６（ａ）に示すように、円筒部１２と前記円筒部１２の片端の開口部の対向する２ヶ所に備えられた電流の入出力端子１１，１１を有し、この電流の入出力端子１１、１１を電極に接続するとともに、この電流の入出力端子１１、１１で支持されるものが一般的に用いられている。円筒部１２には、上端から下方に向かうスリット１２ａと下端から上方に向かうスリット１２ｂとが周方向に交互に設けられている。これにより、円筒状発熱体１０の円筒部１２には、蛇行状に連結した通電路１２ｃが形成されている。 As shown in FIG. 6A, the cylindrical heating element 10 has current input / output terminals 11 and 11 provided at two opposing positions of the cylindrical portion 12 and the opening at one end of the cylindrical portion 12. The current input / output terminals 11 and 11 are generally connected to the electrodes and supported by the current input / output terminals 11 and 11. The cylindrical portion 12 is provided with slits 12a extending downward from the upper end and slits 12b extending upward from the lower end alternately in the circumferential direction. Thereby, the cylindrical part 12 of the cylindrical heating element 10 is formed with a current path 12c connected in a meandering manner.
近年、光ファイバの需要増加に伴い、光ファイバ多孔質母材の大型化と長尺化が進み、これを脱水焼結するための大型の加熱炉が必要になってきている。これにともない、円筒状発熱体として内径が太く、また、長さも長いものが用いられるようになっており、円筒状発熱体の変形の問題が顕在化しつつある。より具体的には、熱が加わることで図６（ｂ）に示すように円筒状発熱体が変形し、円筒状発熱体と円筒状発熱体の周りに配置されるカーボン等からなる部品とが接触し、絶縁破壊を引き起こす問題が生じている。 In recent years, with the increase in demand for optical fibers, the enlargement and lengthening of optical fiber porous preforms have progressed, and a large heating furnace for dehydrating and sintering them has become necessary. Accordingly, a cylindrical heating element having a large inner diameter and a long length is used, and the problem of deformation of the cylindrical heating element is becoming apparent. More specifically, when the heat is applied, the cylindrical heating element is deformed as shown in FIG. 6B, and the cylindrical heating element and the parts made of carbon or the like disposed around the cylindrical heating element are provided. There is a problem of contact and causing dielectric breakdown.
このような円筒状発熱体の変形を抑える方法として、特開平４−１６０７８８号公報には、ヒータスリット内にＣＶＤ法により電気的絶縁材を充填することが示されている。また、特開平９−２３５１７８号公報にはヒータスリット内に抵抗発熱体を充填することが示されている。 As a method for suppressing such deformation of the cylindrical heating element, Japanese Patent Laid-Open No. 4-160788 discloses filling an electrical insulating material into the heater slit by the CVD method. Japanese Laid-Open Patent Publication No. 9-235178 discloses filling a resistance heating element in a heater slit.
しかしながら、特許文献１および特許文献２に記載の方法は、円筒状発熱体の作製が非常に困難であるうえ、作製に費用がかかる問題がある。 However, the methods described in Patent Document 1 and Patent Document 2 have a problem that it is very difficult to manufacture a cylindrical heating element and that the manufacturing is expensive.
本発明は、上記の問題を解決するためになされたものであり、円筒状発熱体の変形を容易かつ安価に抑えた光ファイバ母材の製造装置を提供することを目的とする。 The present invention has been made to solve the above problems, and an object of the present invention is to provide an optical fiber preform manufacturing apparatus that can easily and inexpensively suppress deformation of a cylindrical heating element.
上述した課題を解決し、目的を達成するために、本発明に係る光ファイバ母材の製造装置は、炉心管内に光ファイバ多孔質母材を挿入して、前記炉心管の周囲に設置した円筒状発熱体で前記光ファイバ多孔質母材を加熱し、脱水、焼結する光ファイバ母材の製造装置であって、前記円筒状発熱体は、円筒部と前記円筒部の一端に電流の入出力端子を有し、前記円筒部の他端には、絶縁部材が備えられていることを特徴とする。 In order to solve the above-described problems and achieve the object, an apparatus for manufacturing an optical fiber preform according to the present invention is a cylinder installed around a core tube by inserting an optical fiber porous preform into the core tube. An optical fiber preform manufacturing apparatus that heats, dehydrates, and sinters the porous optical fiber preform with a cylindrical heating element, wherein the cylindrical heating element has a current applied to a cylindrical portion and one end of the cylindrical portion. An output terminal is provided, and an insulating member is provided at the other end of the cylindrical portion.
また、本発明に係る光ファイバ母材の製造装置は、上記の発明において、前記絶縁部材が石英またはセラミックスからなることを特徴とする。 The optical fiber preform manufacturing apparatus according to the present invention is characterized in that, in the above invention, the insulating member is made of quartz or ceramics.
また、本発明に係る光ファイバ母材の製造装置は、上記の発明において、前記円筒状発熱体の内径をＤ、前記円筒状発熱体の長さをＬとしたとき、Ｌ／Ｄが５以上であることを特徴とする。 In the optical fiber preform manufacturing apparatus according to the present invention, in the above invention, when the inner diameter of the cylindrical heating element is D and the length of the cylindrical heating element is L, L / D is 5 or more. It is characterized by being.
本発明によれば、円筒状発熱体の変形を容易かつ安価に抑えた光ファイバ母材の製造装置を実現できるという効果を奏する。 According to the present invention, it is possible to realize an optical fiber preform manufacturing apparatus that can easily and inexpensively suppress deformation of a cylindrical heating element.
以下に、図面を参照して本発明に係る光ファイバ母材の製造装置の実施の形態を詳細に説明する。なお、この実施の形態によりこの発明が限定されるものではない。 Embodiments of an optical fiber preform manufacturing apparatus according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.
（実施の形態１） 図１に、本発明の実施の形態に係る光ファイバ母材の製造装置１の断面概略図を示す。図１に示す光ファイバ母材の製造装置１は、光ファイバ多孔質母材を脱水、焼結する加熱炉であり、炉体２の中心部を貫通していて内部に光ファイバ多孔質母材３を収容する石英ガラス等よりなる炉心管４と、炉体２内で炉心管４の周囲に配置されて該炉心管４内の光ファイバ多孔質母材３を加熱するカーボンヒータ等の円筒状発熱体１０と、炉心管４と円筒状発熱体１０との間で炉心管４の外周を包囲するように配置されたカーボン等からなるマッフル管５と、このマッフル管５の外側で炉体２の内壁に沿って配置されたカーボン等からな断熱材６とを主体として構成されている。図１に示す光ファイバ母材の製造装置１においては円筒状発熱体１０が２個縦列に配置されている例を示しているが、円筒状発熱体１０の数はこれに限定されない。 Embodiment 1 FIG. 1 is a schematic cross-sectional view of an optical fiber preform manufacturing apparatus 1 according to an embodiment of the present invention. An optical fiber preform manufacturing apparatus 1 shown in FIG. 1 is a heating furnace that dehydrates and sinters an optical fiber porous preform, penetrates through the center of the furnace body 2 and has an optical fiber porous preform inside. A cylindrical tube 4 made of quartz glass or the like for housing 3 and a carbon heater or the like disposed around the core tube 4 in the furnace body 2 to heat the optical fiber porous preform 3 in the core tube 4 A heating element 10, a muffle tube 5 made of carbon or the like disposed so as to surround the outer periphery of the reactor core tube 4 between the reactor core tube 4 and the cylindrical heating element 10, and the furnace body 2 outside the muffle tube 5. The heat insulating material 6 made of carbon or the like disposed along the inner wall is mainly used. In the optical fiber preform manufacturing apparatus 1 shown in FIG. 1, an example in which two cylindrical heating elements 10 are arranged in a column is shown, but the number of cylindrical heating elements 10 is not limited to this.
炉心管４の下端には処理ガス導入口７が設けられ、炉心管４内にＨｅガスやＣｌ２ガス等が供給されるようになっている。炉心管４の上部には、炉心管４内の排気ガスを排出する排気口８が設けられている。炉体２内には、ＡｒガスやＮ２ガス等の不活性ガスが供給されるようになっている。 A processing gas introduction port 7 is provided at the lower end of the core tube 4 so that He gas, Cl 2 gas or the like is supplied into the core tube 4. An exhaust port 8 for exhausting exhaust gas in the furnace core tube 4 is provided in the upper part of the core tube 4. In the furnace body 2, an inert gas such as Ar gas or N 2 gas is supplied.
光ファイバ多孔質母材３の脱水、焼結は、このような光ファイバ母材の製造装置１を用い、円筒状発熱体１０に対して光ファイバ多孔質母材３を相対的に上下方向に動かすことにより行われる。 The optical fiber porous preform 3 is dehydrated and sintered by using the optical fiber preform manufacturing apparatus 1 such that the optical fiber porous preform 3 is relatively vertically moved with respect to the cylindrical heating element 10. It is done by moving.
円筒状発熱体１０としては、図６に示す従来のものと同様の形状のものが用いられ、上端開口部の円の中心を挟んで対向する２ヶ所に設けられた電流の入出力端子１１、１１と、上端から下方に向かうスリット１２ａと下端から上方に向かうスリット１２ｂとが周方向に交互に設けられた円筒部１２からなる。これにより、円筒部１２には、蛇行状に連結した通電路１２ｃが形成されている。 As the cylindrical heating element 10, one having the same shape as the conventional one shown in FIG. 6 is used, and current input / output terminals 11 provided at two locations facing each other across the center of the circle of the upper end opening, 11 and a cylindrical portion 12 in which slits 12a extending downward from the upper end and slits 12b extending upward from the lower end are alternately provided in the circumferential direction. Thereby, the cylindrical part 12 is formed with a conducting path 12c connected in a meandering manner.
円筒状発熱体１０は、上端に形成された電流の入出力端子１１、１１を電極に接続するとともに電流の入出力端子１１、１１で支持されており、円筒状発熱体１０の下端部には、電流の入出力端子１１、１１と対向する位置に絶縁部材９ａ、９ａが配置されている。 The cylindrical heating element 10 connects current input / output terminals 11, 11 formed at the upper end to electrodes and is supported by the current input / output terminals 11, 11. The insulating members 9a and 9a are arranged at positions facing the current input / output terminals 11 and 11, respectively.
図２に絶縁部材９ａが配置されている状態を詳細に示す。絶縁部材９ａは図３に示すように四角柱の一面に突起部を有する形状をしており、この突起部２１を下端から上方に向かうスリット１２ｂに入れ、絶縁部材９ａを円筒状発熱体１０と断熱材６の間に配置することで円筒状発熱体１０が変形して外側に移動する（内径が大きくなる）ことを防止している。その結果、円筒状発熱体１０の変形を抑制できる。 FIG. 2 shows the state in which the insulating member 9a is arranged in detail. As shown in FIG. 3, the insulating member 9 a has a shape having a protrusion on one surface of the quadrangular prism. The protrusion 21 is inserted into the slit 12 b upward from the lower end, and the insulating member 9 a is connected to the cylindrical heating element 10. Arranging between the heat insulating materials 6 prevents the cylindrical heating element 10 from being deformed and moving outward (inner diameter is increased). As a result, deformation of the cylindrical heating element 10 can be suppressed.
絶縁部材９ａの材質としては、電気を通さず、かつ、１４５０℃程度の高温に耐えられる材質を選択する必要があり、たとえば石英、セラミックス等を用いることができる。なお、耐熱の観点から、セラミックスの中でも窒化珪素Ｓｉ３Ｎ４は特に好適に用いられる。 As a material for the insulating member 9a, it is necessary to select a material that does not conduct electricity and can withstand a high temperature of about 1450 ° C. For example, quartz, ceramics, or the like can be used. From the viewpoint of heat resistance, silicon nitride Si 3 N 4 is particularly preferably used among ceramics.
本発明の実施の形態に係る光ファイバ母材の製造装置によれば、円筒状発熱体１０の電流の入出力端子１１、１１が備えられていない端部が、内径が大きくなる方向に変形することが抑制され、これにより、円筒状発熱体１０の変形を容易かつ安価に抑制することができる。円筒状発熱体１０の変形は、円筒状発熱体の内径をＤ、長さをＬとしたとき、Ｌ／Ｄが大きくなるほど発生しやすい。したがって、本発明は、Ｌ／Ｄが１．５以上の場合に特に効果的である。また、本発明の実施の形態に係る光ファイバ母材の製造装置を用いれば、Ｌ／Ｄが大きい場合においても円筒状発熱体の変形を抑制できるので、たとえば、これまで長さの短い円筒状発熱体１０を３個縦列に配置して加熱していたものと同様の加熱を、長さの長い円筒状発熱体１０を２個使用することで実現できる。これにより円筒状発熱体１０や電極の数を減らすことができ、設備を簡素化することができる。 According to the optical fiber preform manufacturing apparatus according to the embodiment of the present invention, the end of the cylindrical heating element 10 where the current input / output terminals 11 and 11 are not provided is deformed in a direction in which the inner diameter increases. Thus, deformation of the cylindrical heating element 10 can be easily and inexpensively suppressed. The deformation of the cylindrical heating element 10 is more likely to occur as L / D increases, where D is the inner diameter of the cylindrical heating element and L is the length. Therefore, the present invention is particularly effective when L / D is 1.5 or more. Moreover, since the deformation | transformation of a cylindrical heating element can be suppressed even if L / D is large if the manufacturing apparatus of the optical fiber preform which concerns on embodiment of this invention is large, for example, a cylindrical shape with a short length until now Heating similar to that in which three heating elements 10 are arranged and heated can be realized by using two cylindrical heating elements 10 having a long length. Thereby, the number of cylindrical heating elements 10 and electrodes can be reduced, and equipment can be simplified.
（実施の形態２） つぎに、本発明の実施の形態２について説明する。本発明の実施の形態２に係る光ファイバ母材の製造装置は、絶縁部材９ｂとして図４に示す形状のものを用いた以外は、実施の形態１と同様である。 (Embodiment 2) Next, Embodiment 2 of the present invention will be described. The optical fiber preform manufacturing apparatus according to Embodiment 2 of the present invention is the same as that of Embodiment 1 except that the insulating member 9b having the shape shown in FIG. 4 is used.
絶縁部材９ｂは断面が略直角三角形の半円状であり、内周に垂直面３１、外周に傾斜面３２、底面には溝３３を有する。図５に絶縁部材９ｂが配置されている状態を詳細に示す。円筒状発熱体１０の下端部に２つの絶縁部材９ｂを円形になるように、かつ、三角形の頂点が上になるように配置する。このとき、垂直面３３は円筒状発熱体１０の内側に配置されるマッフル管５に沿うように配置される。また、溝３３に絶縁部材９ｂの下に配置する円筒状発熱体１０の上端部を挿入するとともに、傾斜面３２を絶縁部材９ｂの上に配置される円筒状発熱体１０の下端部と接触させる。これにより、円筒状発熱体１０の下端部が変形して内側に移動する（内径が小さくなる）ことを防止することができ、その結果、円筒状発熱体１０の変形を抑制できる。なお、一番下の円筒状発熱体１０の下端部に配置する絶縁部材９ｂは、溝３３を省略してもよい。 The insulating member 9b has a semicircular shape with a substantially right-angled cross section, and has a vertical surface 31 on the inner periphery, an inclined surface 32 on the outer periphery, and a groove 33 on the bottom surface. FIG. 5 shows the state where the insulating member 9b is arranged in detail. Two insulating members 9b are arranged at the lower end of the cylindrical heating element 10 so as to be circular and the apex of the triangle is on the top. At this time, the vertical surface 33 is disposed along the muffle tube 5 disposed inside the cylindrical heating element 10. Moreover, while inserting the upper end part of the cylindrical heating element 10 arrange | positioned under the insulating member 9b in the groove | channel 33, the inclined surface 32 is made to contact the lower end part of the cylindrical heating element 10 arrange | positioned on the insulating member 9b. . Thereby, it can prevent that the lower end part of the cylindrical heating element 10 deform | transforms and moves inside (an inside diameter becomes small), As a result, a deformation | transformation of the cylindrical heating element 10 can be suppressed. Note that the groove 33 may be omitted from the insulating member 9b disposed at the lower end of the lowermost cylindrical heating element 10.
本発明の実施の形態２に係る光ファイバ母材の製造装置によれば、円筒状発熱体１０の電流の入出力端子１１、１１が備えられていない端部が、内径が小さくなる方向に変形することが抑制され、これにより、円筒状発熱体１０の変形を容易かつ安価に抑制することができる。 According to the optical fiber preform manufacturing apparatus according to the second embodiment of the present invention, the end of the cylindrical heating element 10 that is not provided with the current input / output terminals 11 and 11 is deformed in a direction in which the inner diameter decreases. Thus, deformation of the cylindrical heating element 10 can be easily and inexpensively suppressed.
本発明にかかわる絶縁部材は実施の形態１および実施の形態２に示した形状に限定されない。円筒状発熱体１０の支持されていない側の端部に配置することができ、かつ、円筒状発熱体１０の支持されていない側の端部の変形を抑えることができればよい。 The insulating member according to the present invention is not limited to the shape shown in the first and second embodiments. It is only necessary that the cylindrical heating element 10 can be disposed at the end of the unsupported side and the deformation of the end of the cylindrical heating element 10 on the unsupported side can be suppressed.
また、実施の形態１および実施の形態２では、電流の入出力端子１１、１１が上端になるように円筒状発熱体１０を配置しているが、電流の入出力端子１１、１１が下端になるように配置してもよい。この場合は、絶縁部材９を円筒状発熱体１０の上端に配置するとより円筒状発熱体１０の変形を抑制できる。 In the first and second embodiments, the cylindrical heating element 10 is arranged so that the current input / output terminals 11 and 11 are at the upper end, but the current input / output terminals 11 and 11 are at the lower end. You may arrange so that it may become. In this case, if the insulating member 9 is disposed at the upper end of the cylindrical heating element 10, the deformation of the cylindrical heating element 10 can be further suppressed.
以下、本発明を実施例により詳細に説明する。（実施例１） 本発明の実施の形態２に係る光ファイバ母材の製造装置を用いて、ＯＶＤ法で製造した光ファイバ多孔質母材を脱水、焼結した。なお、円筒状発熱体１０は、内径Ｄが３５０ｍｍ、長さＬが６００ｍｍ、通電路１２ｃの厚さｔが１０ｍｍのものを用いた。１２ヶ月使用した後、加熱炉を解体したところ、絶縁破壊を起こした形跡はなく、断熱
材やマッフル管の損傷はほとんどなかった。
Hereinafter, the present invention will be described in detail with reference to examples. (Example 1) The optical fiber porous preform manufactured by the OVD method was dehydrated and sintered using the optical fiber preform manufacturing apparatus according to Embodiment 2 of the present invention. The cylindrical heating element 10 was used having an inner diameter D of 350 mm, a length L of 600 mm, and a current passage 12c having a thickness t of 10 mm. When the heating furnace was disassembled after 12 months of use, there was no evidence of dielectric breakdown, and there was little damage to the insulation or muffle tube.
（実施例２） 本発明の実施の形態２に係る光ファイバ母材の製造装置を用いて、ＯＶＤ法で製造した光ファイバ多孔質母材を脱水、焼結した。なお、円筒状発熱体１０は、内径Ｄが４００ｍｍ、長さＬが７００ｍｍ、通電路１２ｃの厚さｔが１０ｍｍのものを用いた。１２ヶ月使用した後、加熱炉を解体したところ、絶縁破壊を起こした形跡はなく、断熱材やマッフル管の損傷はほとんどなかった。 (Example 2) Using the optical fiber preform manufacturing apparatus according to Embodiment 2 of the present invention, an optical fiber porous preform manufactured by the OVD method was dehydrated and sintered. The cylindrical heating element 10 used had an inner diameter D of 400 mm, a length L of 700 mm, and a current passage 12c having a thickness t of 10 mm. After 12 months of use, the furnace was dismantled, and there was no evidence of dielectric breakdown, and there was little damage to the insulation or muffle tube.
（比較例１） 絶縁部材を設置しない以外は実施例１と同様の光ファイバ母材の製造装置を用いて、ＯＶＤ法で製造した光ファイバ多孔質母材を脱水、焼結した。しかし、１本も脱水、焼結できずに絶縁破壊を起こした。 (Comparative Example 1) An optical fiber porous preform manufactured by the OVD method was dehydrated and sintered using the same optical fiber preform manufacturing apparatus as in Example 1 except that no insulating member was installed. However, none of them could be dehydrated or sintered, causing dielectric breakdown.
１ 光ファイバ母材製造装置
２ 炉体
３ 光ファイバ多孔質母材
４ 炉心管
５ マッフル管
６ 断熱材
９、９ａ、９ｂ 絶縁部材
１０ 円筒状発熱体
１１ 電流の入出力端子
１２ 円筒部
1 Optical fiber preform manufacturing equipment
2 Furnace
3 Optical fiber porous matrix
4 Core tube
5 Muffle tube
6 Insulation
9, 9a, 9b Insulating member
10 Cylindrical heating element
11 Current input / output terminals
12 Cylindrical part
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| WO2013002028A1 (en) * | 2011-06-29 | 2013-01-03 | 住友電気工業株式会社 | Furnace for glass base material |
| WO2022139043A1 (en) * | 2020-12-24 | 2022-06-30 | 대한광통신 주식회사 | Carbon heater suppressing occurrence of electric arc between same and adjacent conductor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2013002028A1 (en) * | 2011-06-29 | 2013-01-03 | 住友電気工業株式会社 | Furnace for glass base material |
| JP2013010660A (en) * | 2011-06-29 | 2013-01-17 | Sumitomo Electric Ind Ltd | Heating furnace for glass preform |
| CN103648995A (en) * | 2011-06-29 | 2014-03-19 | 住友电气工业株式会社 | Furnace for glass base material |
| KR20140036268A (en) * | 2011-06-29 | 2014-03-25 | 스미토모 덴키 고교 가부시키가이샤 | Furnace for glass base material |
| EP2727888A1 (en) * | 2011-06-29 | 2014-05-07 | Sumitomo Electric Industries, Ltd. | Furnace for glass base material |
| EP2727888A4 (en) * | 2011-06-29 | 2015-03-18 | Sumitomo Electric Industries | Furnace for glass base material |
| US9120694B2 (en) | 2011-06-29 | 2015-09-01 | Sumitomo Electric Industries, Ltd. | Glass preform heating furnace |
| CN103648995B (en) * | 2011-06-29 | 2016-11-16 | 住友电气工业株式会社 | Base glass material heating furnace |
| CN107032597A (en) * | 2011-06-29 | 2017-08-11 | 住友电气工业株式会社 | Base glass material heating furnace |
| KR101974671B1 (en) | 2011-06-29 | 2019-05-02 | 스미토모 덴키 고교 가부시키가이샤 | Furnace for glass base material |
| CN107032597B (en) * | 2011-06-29 | 2020-03-24 | 住友电气工业株式会社 | Heating furnace for glass base material |
| WO2022139043A1 (en) * | 2020-12-24 | 2022-06-30 | 대한광통신 주식회사 | Carbon heater suppressing occurrence of electric arc between same and adjacent conductor |
| KR20220091935A (en) * | 2020-12-24 | 2022-07-01 | 대한광통신 주식회사 | Carbon heater refraining arching between adjacent conductive member |
| KR102553481B1 (en) | 2020-12-24 | 2023-07-10 | 대한광통신(주) | Carbon heater refraining arching between adjacent conductive member |
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