JP2010164108A - Diaphragm type actuator, multiple layer diaphragm type actuator, and air spring structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a diaphragm type actuator having required strength without separately requiring a sensor for detecting vibration. <P>SOLUTION: The diaphragm type actuator 10 has an actuator piezoelectric element 20 bonded on one surface of a flat spring 22, and has a sensor piezoelectric element 24 bonded on another surface. The actuator piezoelectric element 20 is formed out of piezoelectric ceramic, covers one surface of the flat spring 22, and is bonded on the flat spring 22 by adhesive. The sensor piezoelectric element 24 has a same structure. Lead wire 32 taking out voltage generated by the sensor piezoelectric element 24 correspondingly to its deformation quantity is attached to a side surface of the sensor piezoelectric element 24, and another end of the lead wire 32 is connected to a control means 26 outputting control signal deforming the actuator piezoelectric element 20. Lead wire 30 applying voltage is attached to a side surface of the actuator piezoelectric element 20, and another end of the lead wire 30 is connected to a voltage generation means 28. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a membrane actuator, a multilayer membrane actuator, and an air spring structure.

A film-type piezoelectric element that is soft and resistant to impact has been developed (Non-Patent Document 1).
That is, as shown in FIG. 9A, in the film-type piezoelectric element 12 of Non-Patent Document 1, a polyimide film 16 on which electrodes are printed is bonded to both sides of a fibrous piezoelectric ceramic 14 with an epoxy resin 18. It is a configuration. Thereby, the film-type piezoelectric element 12 that is soft and resistant to impact was realized.

  Then, as shown in FIG. 9B, the membrane-type piezoelectric element 12 is incorporated in the bottom of the shoe 80 and used as an active cushion that absorbs an impact during walking.

  However, the membrane-type piezoelectric element 12 is configured such that the impact applied to the shoe 80 is directly absorbed by the folded membrane-type piezoelectric element 12 itself, supporting heavy objects such as a building frame and reducing the impact. Does not have such strength. In addition, an acceleration sensor for measuring the impact force is required separately, and a compact device configuration cannot be achieved.

The University of Electro-Communications Department of Cognitive Function Engineering Robotics Laboratory

  In view of the above facts, an object of the present invention is to provide a membrane actuator that has the required strength and does not require a separate sensor for detecting vibration.

  The membrane actuator according to the invention of claim 1 is joined to a planar core member and one side of the core member, deforms together with the core member, and generates a voltage corresponding to its own strain amount. A film-type piezoelectric element for a sensor; and a film-type piezoelectric element for an actuator which is bonded to the other surface of the core member and deforms based on an applied voltage to deform the core member. .

  According to the invention of claim 1, the piezoelectric element for sensor is deformed together with the core member, and generates a voltage corresponding to its own amount of strain to act as a sensor. Further, the piezoelectric element for actuator is deformed based on the applied voltage, and functions as an actuator to deform the core member.

  As a result, when the membrane actuator is joined to the surface where vibration is desired to be suppressed, the piezoelectric element for sensor generates a voltage corresponding to the amount of deformation caused by the vibration of the joined surface, and the vibration can be detected. Then, the actuator piezoelectric element deforms the membrane actuator based on the applied voltage, applies a force to the bonded surfaces, and suppresses vibration of the bonded surfaces.

Moreover, the strength of the membrane actuator can be increased by using the core member.
As a result, it is possible to provide a membrane actuator that has the required strength and does not require a separate sensor for detecting vibration.

  According to a second aspect of the present invention, in the membrane actuator according to the first aspect, a control means for outputting a control signal for deforming the actuator piezoelectric element based on an output from the sensor piezoelectric element; Voltage generating means for generating the applied voltage based on a control signal.

According to the second aspect of the invention, the control means outputs a control signal for deforming the actuator piezoelectric element to the voltage generating means. The voltage generating means generates an applied voltage based on the control signal and outputs the applied voltage to the actuator piezoelectric element. The piezoelectric element for actuator is deformed according to the applied voltage and applies a force to the core member.
As a result, the membrane actuator acts to suppress the vibration of the joined surfaces without requiring a separate sensor for detecting the vibration.

  According to a third aspect of the present invention, in the membrane actuator according to the first or second aspect, the piezoelectric element for sensor and the piezoelectric element for the actuator are formed on both sides of a rectangular piezoelectric ceramic fiber formed into a sheet shape. It is a film-type piezoelectric element to which a film printing electrode is bonded, and the core member is a leaf spring.

  As a result, the piezoelectric element can be made thin, and the film actuator can be made thin. In addition, by using a leaf spring as the core member, the membrane type actuator becomes an actuator that has strength and is soft and resistant to impact.

  According to a fourth aspect of the present invention, there is provided a multilayer film type actuator, comprising: a film type sensor piezoelectric element that generates a voltage corresponding to its own strain amount; And a film-type actuator piezoelectric element that deforms based on the above.

  According to the fourth aspect of the present invention, the piezoelectric element for sensor generates a voltage corresponding to its own amount of strain and acts as a sensor. The stacked piezoelectric element for actuator is deformed based on the applied voltage and functions as an actuator.

  As a result, when the multilayer film type actuator is joined to the surface where vibration is to be suppressed, a voltage corresponding to the amount of deformation caused by the vibration of the surface to which the piezoelectric element for sensor is joined is generated. Then, the actuator piezoelectric element made into a multi-layer deforms the multi-layer film type actuator based on the applied voltage, causes the combined force to act on the joined surface, and suppresses vibration of the joined surface. .

  As a result, it is possible to provide a high-power multilayer film type actuator that does not require a separate sensor for detecting vibration.

  According to a fifth aspect of the present invention, in the multilayer film type actuator according to the fourth aspect, a plurality of the sensor piezoelectric elements are arranged, and the actuator piezoelectric elements are disposed on both surfaces of the plurality of sensor piezoelectric elements. It is characterized by being laminated.

According to the fifth aspect of the present invention, a plurality of sensor piezoelectric elements are arranged in a planar shape. Thereby, sensing is possible according to the position of the plurality of sensor piezoelectric elements.
In addition, a plurality of actuator piezoelectric elements are stacked on both surfaces of a plurality of sensor piezoelectric elements. Thereby, the piezoelectric element for actuator functions as a high output actuator.

  A sixth aspect of the present invention is the multilayer film actuator according to the fourth or fifth aspect, wherein a control signal for deforming the actuator piezoelectric element is output based on an output from the sensor piezoelectric element. And a voltage generating means for generating the applied voltage based on the control signal.

According to the sixth aspect of the present invention, the control means outputs a control signal for deforming the actuator piezoelectric element to the voltage generating means. The voltage generating means generates an applied voltage based on the control signal and outputs the applied voltage to the actuator piezoelectric element. The piezoelectric element for actuator is deformed according to the applied voltage and exerts a force.
As a result, the multilayer film type actuator acts to suppress the vibration of the bonded surfaces without requiring a separate sensor for detecting vibration.

  A seventh aspect of the present invention is the multilayer film actuator according to any one of the fourth to sixth aspects, wherein the piezoelectric element for sensor and the piezoelectric element for actuator are rectangular piezoelectric elements formed into a sheet shape. It is a piezoelectric element in which polyimide film printed electrodes are bonded to both sides of a ceramic fiber.

  As a result, the piezoelectric element can be made thin, and stacking is facilitated. Further, even in a laminated state, the multilayer film type actuator can be made into a film type.

  The invention according to claim 8 is an air spring structure, wherein the membrane actuator according to any one of claims 1 to 3 or the multilayer membrane actuator according to any one of claims 4 to 7. However, it is characterized in that it is joined to the outer peripheral surface of the air spring that supports the mounting table of the equipment.

  According to the eighth aspect of the present invention, the membrane actuator or the multilayer membrane actuator is joined to the outer peripheral surface of the air spring that supports the mounting table of the equipment. Further, the sensor piezoelectric element detects the vibration of the outer peripheral surface, and a force is applied to the outer peripheral surface in a direction in which the actuator piezoelectric element cancels the vibration, thereby changing the support stiffness of the air spring.

  Thus, the vibration of the mounting table based on the operation of the mounted devices can be provided without separately providing a sensor for detecting the vibration of the mounting table and a sensor for detecting the vibration of the floor on the floor. Can be detected. Also, based on the detected vibration, the support stiffness of the air spring is changed by the piezoelectric element for the actuator, so that the vibration of the mounting table can be suppressed and the propagation of vibration from the floor surface to the mounting table supported by the air spring Can be adjusted.

  Since the present invention is configured as described above, it is possible to provide a membrane actuator that has the required strength and does not require a separate sensor for detecting vibration.

It is a figure which shows the basic composition of the membrane type actuator which concerns on the 1st Embodiment of this invention. It is a figure which shows the basic composition of the piezoelectric element for actuators concerning the 1st Embodiment of this invention. It is a figure which shows the basic composition of the multilayer film type actuator which concerns on the 2nd Embodiment of this invention. It is a figure which shows the basic composition of a beam structure which joined the film | membrane type actuator which concerns on the 3rd Embodiment of this invention to the beam. It is a figure which shows the basic composition of the building member which joined the membrane type actuator which concerns on the 4th Embodiment of this invention to the wall material. It is a figure which shows the basic composition of the speaker which joined the diaphragm type actuator which concerns on the 5th Embodiment of this invention to the diaphragm. It is a figure which shows the basic composition of the speaker which joined the diaphragm type actuator which concerns on the 5th Embodiment of this invention to the diaphragm. It is a figure which shows the basic composition of the air spring structure which joined the film | membrane type actuator which concerns on the 6th Embodiment of this invention to the outer peripheral surface of the air spring. It is a figure which shows the basic structure and application example of the film-type piezoelectric element of a prior art example.

(First embodiment)
As shown in FIG. 1, in the membrane actuator 10 according to the first embodiment, an actuator piezoelectric element 20 is bonded to one side of a leaf spring 22, and a sensor piezoelectric element 24 is bonded to the other side. Has been.

  The leaf spring 22 is made of spring steel into a flat shape, and its area, thickness, and elasticity are determined according to the application, and acts as a core member of the membrane actuator 10.

  The actuator piezoelectric element 20 is formed into a film shape with a piezoelectric ceramic described later, and has an area covering one surface of the leaf spring 22. The piezoelectric element for actuator 20 and the leaf spring 22 are joined with an adhesive such as epoxy resin.

  Similarly, the sensor piezoelectric element 24 is formed in a film shape from a piezoelectric ceramic, which will be described later, and is bonded to one surface of the leaf spring 22 on the side to which the actuator piezoelectric element 20 is not bonded by an adhesive such as epoxy resin. .

  A lead wire 32 for taking out a voltage generated by the sensor piezoelectric element 24 corresponding to its own strain amount is attached to the side surface of the sensor piezoelectric element 24, and the other end of the lead wire 32 is connected to the actuator piezoelectric element. It is connected to a control means 26 that outputs a control signal for deforming the element 20.

  Further, a lead wire 30 for applying a voltage to the actuator piezoelectric element 20 is attached to a side surface of the actuator piezoelectric element 20, and the other end of the lead wire 30 is connected to a voltage generating means 28 for generating an applied voltage. Yes. The control means 26 and the voltage generation means 28 are connected by a lead wire 27.

  Here, the piezoelectric element for actuator 20 has the same configuration as the film-type piezoelectric element 12 described with reference to FIG. That is, as shown in FIG. 2A, a polyimide film 16 having electrodes printed thereon is bonded to both sides of a fibrous piezoelectric ceramic 14 formed into a film by an epoxy resin 18 (not shown). is there. The polyimide film 16 is sized to cover the piezoelectric ceramic 14, and lead wires 30 are connected to the electrodes.

Thus, the piezoelectric ceramic 14 is formed into a film shape, and the polyimide film 16 is bonded to both surfaces, whereby the piezoelectric element can be made thin.
Further, as shown in FIG. 2B, when a voltage is applied to both side surfaces of the piezoelectric ceramic 14 via the lead wire 30, distortion according to the applied voltage value is generated, and the piezoelectric element 20 for actuator is generated. Can be deformed in the direction of the arrow W1 or W2.

  Further, the sensor piezoelectric element 24 has the same structure as the actuator piezoelectric element 20. In the sensor piezoelectric element 24, as shown in FIG. 2B, when the sensor piezoelectric element 24 is deformed in the direction of the arrow W1 or W2, a voltage corresponding to the amount of strain is generated on both side surfaces of the piezoelectric ceramic 14. . This voltage can be taken out from the lead wire 32 connected to the polyimide film 16 as a sensor output.

  Further, by using the leaf spring 22 as the core member, the membrane actuator 10 can be a piezoelectric element that has the required strength and is soft and resistant to impact.

  As a result, as shown in FIG. 1, for example, when the membrane actuator 10 is deformed by receiving a force in the direction of the arrow W1, the sensor piezoelectric element 24 generates a voltage corresponding to the amount of strain and causes the control means 26 to Output. The control unit 26 generates a control signal for deforming the actuator piezoelectric element 20 based on the input voltage information, and outputs the control signal to the voltage generation unit 28. The voltage generation means 28 generates an applied voltage based on the control signal and applies it to the actuator piezoelectric element 20. The actuator piezoelectric element 20 is deformed according to the applied voltage to apply a force to the leaf spring 22 and suppress the distortion of the sensor piezoelectric element 24 joined to the leaf spring 22.

  As described above, the membrane actuator 10 does not require a separate sensor for detecting vibration, and can secure the required strength by using the leaf spring 22 as the core member.

(Second Embodiment)
As shown in FIG. 3, the multilayer film type actuator 62 according to the second embodiment has a plurality of sensor piezoelectric elements 24 arranged on the same plane. Further, a plurality of actuator piezoelectric elements 20 are stacked in the vertical direction on both surfaces of the sensor piezoelectric element 24.

  Here, the piezoelectric element for sensor 24 and the piezoelectric element for actuator 20 have the same configurations as those described in the first embodiment. That is, the sensor piezoelectric element 24 generates a voltage corresponding to its own strain and acts as a sensor. The piezoelectric element for actuator 20 is deformed based on the applied voltage and functions as an actuator.

  Further, the sensor piezoelectric element 24 and the actuator piezoelectric element 20 and the actuator piezoelectric elements 20 are joined together by an adhesive such as an epoxy resin.

  Note that the configuration and operation of the control means 26 and the voltage generation means 28 are the same as those in the first embodiment, and illustration and description thereof are omitted.

As described above, by arranging a plurality of sensor piezoelectric elements 24 on the same plane, independent sensing can be performed for each position of the sensor piezoelectric element 24 by each sensor piezoelectric element 24.
Furthermore, since a plurality of piezoelectric elements 20 for actuators are laminated, it functions as a high output actuator.

(Third embodiment)
As shown in FIGS. 4A and 4B, in the beam structure 33 according to the third embodiment, the membrane actuator 10 is joined to a beam 34 spanned between columns 36.

  A plurality of membrane type actuators 10 are joined to the upper surface of the lower flange 34F of the beam 34 and the lower surface of the upper flange 34F to the flanges 34F on both sides of the web 34W. Further, the lead wire 32 of each membrane actuator 10 is connected to the control means 26, the lead wire 30 is connected to the voltage generation means 28, and the control means 26 and the voltage generation means 28 are connected by the lead wire 27.

  Thereby, when the beam 34 vibrates, the sensor piezoelectric element 24 vibrates integrally with the flange 34F, deforms according to the vibration of the joint surface, and generates a voltage corresponding to the amount of strain. The control means 26 generates a control signal for deforming the actuator piezoelectric element 20 in accordance with the voltage value input from the sensor piezoelectric element 24 and outputs the control signal to the voltage generating means 28. The voltage generation means 28 generates an applied voltage for deforming the actuator piezoelectric element 20 in accordance with the control signal, and applies it to the actuator piezoelectric element 20. The piezoelectric element for actuator 20 is deformed according to the applied voltage, and the generated force is applied to the flange 34F to suppress the vibration of the beam 34.

  Thus, the vibration of the beam 34 can be detected and suppressed by the membrane actuator 10 without separately providing a sensor for detecting the vibration of the beam 34 in the beam 34. In FIG. 4B, the control block of the membrane actuator 10 is illustrated as one block on the upper surface of the lower flange 34F, but may be arbitrarily determined according to the vibration state of the beam 34.

  This embodiment is effective when, for example, the equipment 64 arranged in a building is in operation and it is difficult to stop the operation of the equipment for vibration countermeasures.

  In other words, methods generally used for vibration countermeasures include additional installation work of a vibration control device (not shown) for reducing vibration of the beam 34, and between the beams 34 provided above and below. In addition, there is an additional installation work of the auxiliary pillar 66 for suppressing vibration, but it is necessary to stop the operation of the devices, and it cannot be adopted.

On the other hand, in the present embodiment, it is only necessary to join the membrane actuator 10 to the upper surface of the lower flange 34F of the beam 34 and the lower surface of the upper flange 34F. is there.
In addition, although the above description demonstrated using the membrane-type actuator 10, it is not limited to this, You may use the multilayer film-type actuator 62. FIG.

(Fourth embodiment)
As shown in FIG. 5, in the building member 37 according to the fourth embodiment, the membrane actuator 10 is joined to the wall material 38.

  A plurality of membrane-type actuators 10 are joined to a surface that vibrates greatly in the vicinity of the center of the wall member 38. The lead wire 32 of each membrane actuator 10 is connected to the control means 26, the lead wire 30 is connected to the voltage generation means 28, and the control means 26 and the voltage generation means 28 are connected to each other through the lead wire 27. .

  As a result, when the wall member 38 vibrates, the sensor piezoelectric element 24 vibrates integrally with the wall member 38, deforms according to the vibration of the joint surface, and generates a voltage corresponding to the amount of strain. The control means 26 outputs a control signal for deforming the actuator piezoelectric element 20 to the voltage generation means 28 based on the input vibration information. The voltage generation means 28 generates a voltage based on the control signal and applies the voltage to the actuator piezoelectric element 20. The actuator piezoelectric element 20 applies a force to the wall member 38 in a direction to cancel the vibration.

  Thus, the membrane actuator 10 can detect and suppress the vibration of the wall material 38 without separately providing a sensor for detecting the vibration of the wall material 38 on the wall material 38.

  Further, even when the vibration of the wall material 38 is small, the wall actuator 38 can be vibrated actively by the membrane actuator 10, and the wall material 38 can be provided with a function of blocking speech or the like propagating from the adjacent room.

In addition, although the above demonstrated using the wall material 38 as an example of a building member, it is not restricted to the wall material 38, Other building members, such as a ceiling material and a flooring, may be sufficient.
In the fourth embodiment, the film type actuator 10 has been described. However, the present invention is not limited to this, and a multilayer film type actuator 62 may be used.

(Fifth embodiment)
As shown in FIG. 6, in the speaker 40 according to the fifth embodiment, the membrane actuator 10 is joined to the diaphragm 42 of the speaker 40.

  A plurality of membrane actuators 10 are joined to the vibration surface near the center of the vibration plate 42. Further, the lead wire 32 of each membrane actuator 10 is connected to the control means 29, the lead wire 30 is connected to the voltage generating means 28, and the control means 29 and the voltage generating means 28 are connected by the lead wire 27. The control unit 29 is connected to a sound source output unit 48 that outputs a sound source to be reproduced by the speaker 40.

  With this configuration, the control unit 29 converts the sound output from the sound source output unit 48 into a control signal for reproduction by the diaphragm 42 and outputs the control signal to the voltage generation unit 28.

  The voltage generating means 28 generates an applied voltage to the actuator piezoelectric element 20 and applies it to the actuator piezoelectric element 20. The actuator piezoelectric element 20 causes the diaphragm 42 to vibrate directly to function as the speaker 40.

  In addition, since the sensor piezoelectric element 24 detects the vibration of the vibration plate 42, the vibration plate 42 can be vibrated while checking the vibration state of the vibration plate 42.

  Further, since a mechanism for generating an electromagnetic force to vibrate the diaphragm, which is used in a general speaker, is unnecessary, the size and shape of the speaker 40 can be freely set.

As a result, for example, as shown in FIG. 7, the diaphragm of the speaker 44 can be used as the wall material 46, and the wall material 46 can be directly vibrated by the membrane actuator 10 and used as the speaker 44.
Thereby, the installation place of the speaker 44 becomes unnecessary on a floor surface.
In the fifth embodiment, the film type actuator 10 has been described. However, the present invention is not limited to this, and a multilayer film type actuator 62 may be used.

(Sixth embodiment)
As shown in FIGS. 8A and 8B, the air spring structure 50 according to the sixth embodiment is provided with a lower mounting base 54 on the floor 58 and on the lower mounting base 54. The air spring 52 is placed.

  The air spring 52 is a support member that softly supports the mounting table 60 of equipment (not shown), and the membrane actuator 10 is joined to the outer peripheral surface 52 </ b> S of the air spring 52.

  An upper mounting base 56 is attached on the air spring 52, and the upper mounting base 56 supports the lower surface of the mounting table 60.

  A plurality of membrane actuators 10 are joined to the outer peripheral surface 52S of the air spring 52, and the lead wires 32 of each membrane actuator 10 are connected to the control means 26. The lead wire 30 is connected to the voltage generating means 28, and the control means 26 and the voltage generating means 28 are connected by a lead wire 27.

  As a result, as shown in FIG. 8B, the air spring 52 normally supports the mounting table 60 softly, and even if the floor surface 58 vibrates, the air spring 52 absorbs the vibration, and the mounting table 60 Is not propagated to.

On the other hand, as shown in FIG. 8A, when the mounting table 60 vibrates due to the operation of the mounted equipment, the sensor piezoelectric element 24 (not shown) detects the vibration of the mounting table 60. Then, the control means 26 generates a control signal in a direction that cancels the amount of distortion based on the detected vibration, and applies it to the voltage generation means 28. The voltage generator 28 outputs the voltage generated in the actuator piezoelectric element 20.
Thereby, expansion and contraction of the outer peripheral surface 52S of the air spring 52 is suppressed, and the rigidity of the air spring 52 is increased. As a result, the mounting table 60 is instructed to be hard, and the vibration of the mounting table 60 is suppressed.

  As described above, even if a sensor for detecting the vibration of the mounting table 60 is provided on the mounting table 60 and a sensor for detecting the vibration of the floor surface 58 is not provided on the floor 58, the film actuator 10 can be used to mount the sensor. It is possible to detect and suppress the vibration of the mounting table 60 based on the operation of the placed devices. Further, when the equipment is not in operation, it can be softly supported to suppress the propagation of vibration from the floor surface 58 to the mounting table 60.

  In the sixth embodiment, the film type actuator 10 has been described. However, the present invention is not limited to this, and a multilayer film type actuator 62 may be used.

DESCRIPTION OF SYMBOLS 10 Membrane type actuator 12 Membrane type piezoelectric element 14 Piezoelectric ceramic 16 Polyimide film 18 Epoxy resin 20 Piezoelectric element for actuator 22 Leaf spring (core member)
24 Sensor Piezoelectric Element 26 Control Unit 28 Voltage Generation Unit 33 Beam Structure 34 Beam 37 Building Member 38 Wall Material 40 Speaker 42 Diaphragm 50 Air Spring Structure 62 Multilayer Film Type Actuator

Claims (8)

A planar core member;
A film-type sensor piezoelectric element that is bonded to one side of the core member, deforms together with the core member, and generates a voltage corresponding to its own strain;
A membrane-type actuator piezoelectric element that is bonded to the other surface of the core member, deforms based on an applied voltage, and deforms the core member;
A membrane type actuator. Control means for outputting a control signal for deforming the actuator piezoelectric element based on an output from the sensor piezoelectric element;
Voltage generating means for generating the applied voltage based on the control signal;
The membrane actuator according to claim 1, comprising:   2. The piezoelectric element for sensor and the piezoelectric element for actuator are piezoelectric elements in which polyimide film printed electrodes are bonded to both surfaces of a rectangular piezoelectric ceramic fiber formed into a sheet shape, and the core member is a leaf spring. Or the membrane type actuator of 2. A film-type sensor piezoelectric element that generates a voltage corresponding to its own strain;
A film-type actuator piezoelectric element that is bonded to both surfaces of the sensor piezoelectric element and deforms based on an applied voltage;
A multilayer film type actuator. A plurality of the piezoelectric elements for sensors are arranged,
The multilayer film type actuator according to claim 4, wherein the actuator piezoelectric elements are laminated on both surfaces of the plurality of sensor piezoelectric elements. Control means for outputting a control signal for deforming the actuator piezoelectric element based on an output from the sensor piezoelectric element;
Voltage generating means for generating the applied voltage based on the control signal;
The multilayer film type actuator according to claim 4 or 5, wherein:   The piezoelectric element for a sensor and the piezoelectric element for an actuator are piezoelectric elements in which polyimide film print electrodes are bonded to both surfaces of a rectangular piezoelectric ceramic fiber formed in a sheet shape. Multi-layer type actuator.   The outer periphery of the air spring which the membrane type actuator of any one of Claims 1-3 or the multilayer film type actuator of any one of Claims 4-7 supports the mounting base of apparatuses. Air spring structure joined to the surface.

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