JP2010153933A5 - - Google Patents

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Publication number
JP2010153933A5
JP2010153933A5 JP2010087346A JP2010087346A JP2010153933A5 JP 2010153933 A5 JP2010153933 A5 JP 2010153933A5 JP 2010087346 A JP2010087346 A JP 2010087346A JP 2010087346 A JP2010087346 A JP 2010087346A JP 2010153933 A5 JP2010153933 A5 JP 2010153933A5
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JP
Japan
Prior art keywords
optical system
projection optical
ultraviolet light
light
exposure apparatus
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Application number
JP2010087346A
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English (en)
Japanese (ja)
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JP2010153933A (ja
JP4985812B2 (ja
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Priority to JP2010087346A priority Critical patent/JP4985812B2/ja
Priority claimed from JP2010087346A external-priority patent/JP4985812B2/ja
Publication of JP2010153933A publication Critical patent/JP2010153933A/ja
Publication of JP2010153933A5 publication Critical patent/JP2010153933A5/ja
Application granted granted Critical
Publication of JP4985812B2 publication Critical patent/JP4985812B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2010087346A 2010-04-05 2010-04-05 露光装置及びデバイス製造方法 Expired - Fee Related JP4985812B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010087346A JP4985812B2 (ja) 2010-04-05 2010-04-05 露光装置及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010087346A JP4985812B2 (ja) 2010-04-05 2010-04-05 露光装置及びデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003344940A Division JP4513299B2 (ja) 2003-10-02 2003-10-02 露光装置、露光方法、及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2010153933A JP2010153933A (ja) 2010-07-08
JP2010153933A5 true JP2010153933A5 (https=) 2011-08-04
JP4985812B2 JP4985812B2 (ja) 2012-07-25

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ID=42572557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010087346A Expired - Fee Related JP4985812B2 (ja) 2010-04-05 2010-04-05 露光装置及びデバイス製造方法

Country Status (1)

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JP (1) JP4985812B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020162337A (ja) * 2019-03-27 2020-10-01 株式会社カネカ 検査装置および検査方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06124873A (ja) * 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
JP2753930B2 (ja) * 1992-11-27 1998-05-20 キヤノン株式会社 液浸式投影露光装置
JP3747566B2 (ja) * 1997-04-23 2006-02-22 株式会社ニコン 液浸型露光装置
JPH11176727A (ja) * 1997-12-11 1999-07-02 Nikon Corp 投影露光装置

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