JP2010149017A5 - - Google Patents
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- JP2010149017A5 JP2010149017A5 JP2008327956A JP2008327956A JP2010149017A5 JP 2010149017 A5 JP2010149017 A5 JP 2010149017A5 JP 2008327956 A JP2008327956 A JP 2008327956A JP 2008327956 A JP2008327956 A JP 2008327956A JP 2010149017 A5 JP2010149017 A5 JP 2010149017A5
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例えば、超音波振動を用いて対象物の溶着を行う超音波溶着は、共振体である工具ホーンを、縦振動、横振動、たわみ振動及び捻じり振動から選択されるいずれか一つの振動によって行う、いわゆる単一振動モードによって行われることが多い。特に、縦振動を用いた超音波溶着は、精密な溶着が可能であり、制御も容易なので広く用いられている（特許文献１、２参照）。
他方、超音波溶着においては、単一振動モードよりも二つ以上の振動を複合させた複合振動モードの方が、複雑な振動軌道を描くことができるため、対象物の溶着部が一様となり、高い溶着強度を得られることが示唆されている（非特許文献１、２参照）。
For example, ultrasonic welding in which an object is welded using ultrasonic vibration is performed by any one vibration selected from longitudinal vibration, lateral vibration, flexural vibration, and torsional vibration of a tool horn that is a resonator. The so-called single vibration mode is often used. In particular, ultrasonic welding using longitudinal vibration is widely used because precise welding is possible and control is easy (see Patent Documents 1 and 2) .
On the other hand, in ultrasonic welding, the composite vibration mode that combines two or more vibrations can draw a more complex vibration trajectory than the single vibration mode. It is suggested that high welding strength can be obtained (see Non-Patent Documents 1 and 2).
〔５〕本発明においては、前記たわみ振動発生手段としてのスリット状の脆弱部の形成角度αが、前記縦振動の印加方向からの開き角度で４０〜５０°であるのが好ましい。このようにすれば、たわみ振動発生手段としてのスリット状の脆弱部の形成角度が適切であるために、効率よくたわみ振動を発生させることができる。〔６〕本発明においては、前記たわみ振動発生手段としての脆弱部を、前記面内複合共振体を貫通するスリット状の貫通孔とするのが好ましい。〔７〕本発明においては、前記たわみ振動発生手段としての脆弱部を、前記面内複合共振体の一部の肉厚を薄くしたスリット状の有底穴とするのが好ましい。 [5] In the present invention, the formation angle α of the slit-like fragile portion as the flexural vibration generating means is preferably 40 to 50 ° as an opening angle from the longitudinal vibration application direction. In this way, since the formation angle of the slit-like weak part as the flexural vibration generating means is appropriate, the flexural vibration can be generated efficiently. [6] In the present invention, it is preferable that the fragile portion as the flexural vibration generating means is a slit-like through-hole penetrating the in-plane composite resonator. [7] In the present invention, it is preferable that the weakened portion as the flexural vibration generating means is a slit-shaped bottomed hole in which a part of the in-plane composite resonator is thinned.
〔８〕本発明においては、前記第２の周波数の超音波振動の節とは異なる他の節となる位置に、前記たわみ振動発生手段で発生させた前記たわみ振動を打ち消すためのたわみ振動打消し手段を設けるのが好ましい。このようにすれば、たわみ振動発生手段で発生させたたわみ振動を当該たわみ振動打消し手段によって打ち消すことができる。従って、本発明に係る面内複合共振体の一端側を、超音波振動を発振する振動子と接続して固定するとともに、当該一端側の対辺となる他端側でも固定手段によって固定することができるようになる。 [ 8 ] In the present invention, the flexural vibration cancellation for canceling the flexural vibration generated by the flexural vibration generating means at a position that is another node different from the ultrasonic vibration node of the second frequency. Preferably means are provided. In this way, the flexural vibration generated by the flexural vibration generating means can be canceled by the flexural vibration canceling means. Accordingly, one end side of the in-plane composite resonator according to the present invention is connected and fixed to a vibrator that oscillates ultrasonic vibration, and the other end side opposite to the one end side can be fixed by a fixing means. become able to.
〔９〕本発明においては、前記たわみ振動打消し手段が、脆弱部であるのが好ましく、〔１０〕前記たわみ振動打消し手段としての脆弱部が、前記縦振動が印加される方向に対して垂直となる方向に２つ以上並べて設けられた脆弱部であるのが好ましい。このようにすれば、たわみ振動打消し手段が脆弱部であり、好ましくは、たわみ振動打消し手段としての脆弱部を２つ以上設けているので、たわみ振動を確実に打ち消すことができる。 [ 9 ] In the present invention, the flexural vibration canceling means is preferably a fragile part, and [ 10 ] the fragile part as the flexural vibration canceling means is in a direction in which the longitudinal vibration is applied. It is preferable that two or more weak portions are provided side by side in a vertical direction. In this way, the flexural vibration canceling means is a fragile portion, and preferably two or more fragile portions as the flexural vibration canceling means are provided, so that the flexural vibration can be reliably canceled.
〔１１〕本発明においては、前記たわみ振動発生手段として形成角度αであるスリット状の脆弱部が形成され、前記たわみ振動打消し手段としてのスリット状の脆弱部の形成角度βが、前記形成角度αとの関係で、前記縦振動の印加方向からの開き角度でβ＝１８０−α、又はβ＝αの条件を満たすのが好ましい。このようにすれば、たわみ振動打消し手段としての脆弱部の形成角度が適切であるために、効率よくたわみ振動を打ち消すことができる。 In [11] the present invention, slit-like fragile portions are formed angle α as the bending vibration generating means is formed, forming an angle of the slit-shaped fragile portion as the bending vibration canceling means β is the angle formed In relation to α, it is preferable to satisfy the condition of β = 180−α or β = α in terms of the opening angle from the application direction of the longitudinal vibration. In this way, since the formation angle of the fragile portion as the bending vibration canceling means is appropriate, the bending vibration can be canceled efficiently.
〔１２〕本発明においては、前記たわみ振動打消し手段としての脆弱部を、前記面内複合共振体を貫通するスリット状の貫通孔とするのが好ましい。〔１３〕本発明においては、前記たわみ振動打消し手段としての脆弱部を、前記面内複合共振体の一部の肉厚を薄くしたスリット状の有底穴とするのが好ましい。〔１４〕本発明においては、前記第２の周波数の超音波振動は、前記第１の周波数の０．５ｎ倍であり、ｎは２よりも大きい数であるのが好ましい。このようにすれば、第１の周波数の超音波振動と第２の周波数の超音波振動との関係がより適切であり、これらの周波数が離れているので、これらを加算して発振しても周波数が一致したりせず、より確実に縦振動とたわみ振動を発生させることができる。 [12] In the present invention, it is preferable that the fragile portion as the flexural vibration canceling means is a slit-shaped through-hole penetrating the in-plane composite resonator. [13] In the present invention, it is preferable that the fragile portion as the flexural vibration canceling means is a slit-shaped bottomed hole in which a part of the in-plane composite resonator is thinned. [ 14 ] In the present invention, the ultrasonic vibration of the second frequency is 0.5n times the first frequency, and n is preferably a number larger than two . Thus, ultrasonic vibration of the first frequency and a relationship is more suitable to the ultrasonic vibration of the second frequency, because these frequencies are away oscillates by adding these However, the frequency does not match, and longitudinal vibration and flexural vibration can be generated more reliably.
〔１５〕本発明に係る面内複合共振装置は、縦振動とたわみ振動を複合した面内共振を行う共振部を有する面内複合共振体を用いた面内複合共振装置であって、第１の周波数の超音波振動を発振させるための第１の電圧信号を出力する第１の発振器と、前記第１の周波数とは異なる周波数を有する第２の周波数の超音波振動を発振させるための第２の電圧信号を出力する第２の発振器と、前記第１の発振器から入力された第１の電圧信号と、前記第２の発振器から入力された第２の電圧信号とを加算し、加算された電圧信号を得る加算器と、前記加算器で加算した電圧信号により超音波振動を発振する振動子と、前記振動子と接続された前記〔１〕から〔１４〕のうちのいずれか１つに記載の面内複合共振体と、を備えたことを特徴としている。 [ 15 ] An in-plane composite resonator according to the present invention is an in-plane composite resonator using an in-plane composite resonator having a resonance part that performs in-plane resonance by combining longitudinal vibration and flexural vibration. A first oscillator that outputs a first voltage signal for oscillating ultrasonic vibration of a second frequency, and a first oscillator for oscillating second frequency ultrasonic vibration having a frequency different from the first frequency. A second oscillator that outputs a voltage signal of 2; a first voltage signal that is input from the first oscillator; and a second voltage signal that is input from the second oscillator. An adder for obtaining a voltage signal, a vibrator for oscillating ultrasonic vibrations by the voltage signal added by the adder, and any one of [1] to [ 14 ] connected to the vibrator And an in-plane composite resonator according to claim 1. Yes.
このように、第１の発振器と、第２の発振器と、加算器と、振動子と、を備えているので、第１の周波数の超音波振動を発振させるための第１の電圧信号と、第２の周波数の超音波振動を発振させるための第２の電圧信号とを出力し、これらを加算した超音波振動を発振することができる。そして、前記〔１〕から〔１４〕のうちのいずれか１つに記載の面内複合共振体を備えているので、発振された超音波振動によって励振され、当該面内複合共振体を縦振動すると、当該面内複合共振体に設けられたたわみ振動発生手段によって、縦振動の超音波成分のうちの第２の周波数の超音波振動からたわみ振動を発生させることができる。これにより、本発明に係る面内複合共振装置は、面内複合共振体の共振部に第１の周波数の超音波による縦振動と、第２の周波数の超音波によるたわみ振動とが複合した複雑な振動軌跡で面内共振を発生させることができる。 Thus, since the first oscillator, the second oscillator, the adder, and the vibrator are provided, the first voltage signal for oscillating the ultrasonic vibration of the first frequency, The second voltage signal for oscillating the ultrasonic vibration of the second frequency can be output, and the ultrasonic vibration obtained by adding them can be oscillated. Since the in-plane composite resonator according to any one of [1] to [ 14 ] is provided, the in-plane composite resonator is longitudinally vibrated by being excited by the oscillated ultrasonic vibration. Then, the flexural vibration can be generated from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration by the flexural vibration generating means provided in the in-plane composite resonator. As a result, the in-plane composite resonance device according to the present invention is a complex in which longitudinal vibration caused by ultrasonic waves of the first frequency and flexural vibration caused by ultrasonic waves of the second frequency are combined in the resonance part of the in-plane composite resonator. In-plane resonance can be generated with a simple vibration trajectory.
〔１６〕本発明に係る面内複合共振方法は、前記〔１５〕に記載の面内複合共振装置を用いて縦振動とたわみ振動を複合した面内共振を発生させる面内複合共振方法であって、第１の発振器が第１の周波数の超音波振動を発振させるための第１の電圧信号を出力するとともに、第２の発振器が前記第１の周波数とは異なる周波数を有する第２の周波数の超音波振動を発振させるための第２の電圧信号を出力する電圧信号出力工程と、前記第１の発振器から入力された第１の電圧信号と、前記第２の発振器から入力された第２の電圧信号とを加算器によって加算し、加算された電圧信号を得る電圧信号加算工程と、前記加算器で加算された電圧信号により、縦振動する超音波振動を振動子によって発振させる超音波振動発振工程と、前記振動子と接続された前記〔１〕から〔１４〕のうちのいずれか１つに記載の面内複合共振体を、発振された前記超音波振動によって励振して縦振動させるとともに、当該面内複合共振体に設けられたたわみ振動発生手段によって前記縦振動から前記たわみ振動を発生させて、前記縦振動と前記たわみ振動とを複合した面内共振を発生させる面内複合共振発生工程とを含むことを特徴としている。 [ 16 ] The in-plane composite resonance method according to the present invention is an in-plane composite resonance method that generates in-plane resonance in which longitudinal vibration and flexural vibration are combined using the in-plane composite resonance apparatus according to [ 15 ]. The first oscillator outputs a first voltage signal for oscillating the ultrasonic vibration of the first frequency, and the second oscillator has a second frequency having a frequency different from the first frequency. A voltage signal output step of outputting a second voltage signal for oscillating the ultrasonic vibration of the first voltage signal, a first voltage signal input from the first oscillator, and a second voltage input from the second oscillator. The voltage signal adding step of adding the voltage signals of the two by an adder and obtaining the added voltage signal, and the ultrasonic vibration for causing the vibrator to oscillate longitudinally oscillating ultrasonic vibration by the voltage signal added by the adder Oscillation process and said vibration The in-plane composite resonator according to any one of [1] to [ 14 ] connected to a child is excited by the oscillated ultrasonic vibration to longitudinally vibrate, and the in-plane composite An in-plane composite resonance generating step of generating an in-plane resonance in which the longitudinal vibration and the flexural vibration are combined by generating the flexural vibration from the longitudinal vibration by a flexural vibration generating means provided in a resonator. It is characterized by.
このように、電圧信号出力工程で、第１の周波数の超音波振動を発振させるための第１の電圧信号と第２の周波数の超音波振動を発振させるための第２の電圧信号とを出力させ、電圧信号加算工程で、第１の電圧信号と第２の電圧信号とを加算し、超音波振動発振工程で、前記加算した電圧信号による超音波振動を発振させることができる。そして、面内複合共振発生工程によって、発振した超音波振動で前記〔１〕から〔１４〕のうちのいずれか１つに記載の面内複合共振体を縦振動させ、当該面内複合共振体に設けたたわみ振動発生手段により、縦振動の超音波成分のうちの第２の周波数の超音波振動からたわみ振動を発生させることができる。これにより、本発明に係る面内複合共振方法は、面内複合共振体の共振部に第１の周波数の超音波による縦振動と、第２の周波数の超音波によるたわみ振動とが複合した複雑な振動軌跡で面内共振を行わせることができる。 Thus, in the voltage signal output step, the first voltage signal for oscillating the ultrasonic vibration of the first frequency and the second voltage signal for oscillating the ultrasonic vibration of the second frequency are output. In the voltage signal adding step, the first voltage signal and the second voltage signal are added, and in the ultrasonic vibration oscillating step, ultrasonic vibration by the added voltage signal can be oscillated. Then, by the in-plane composite resonance generating step, the in-plane composite resonator according to any one of [1] to [ 14 ] is longitudinally vibrated by the oscillated ultrasonic vibration, and the in-plane composite resonator is The flexural vibration generating means provided in the can generate the flexural vibration from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration. As a result, the in-plane composite resonance method according to the present invention is a complex in which longitudinal vibration by ultrasonic waves of the first frequency and flexural vibration by ultrasonic waves of the second frequency are combined in the resonance part of the in-plane composite resonator. In-plane resonance can be performed with a simple vibration locus.
本発明に係る面内複合共振体１は、縦振動とたわみ振動を複合した面内共振を行う共振部２を有する。
本発明に係る面内複合共振体１は、当該面内複合共振体１の共振周波数となる第１の周波数（つまり、１波長）の超音波振動と、この第１の周波数とは異なる周波数を有する第２の周波数の超音波振動とを加算してなる超音波振動によって励振されて縦振動するとともに、図１に示すように、たわみ振動発生手段３を設けているため、当該面内複合共振体１の周面に、縦振動の超音波成分のうちの第２の周波数の超音波振動からたわみ振動を発生させ、前記した縦振動と、発生させたたわみ振動とを複合した複雑な振動軌跡の面内共振を、いわゆる長方形（角棒）の面内複合共振体１の上面及び下面中に発生させることができる。なお、面内複合共振体の周面において、縦振動とたわみ振動とが複合した複雑な振動軌跡で面内共振する部分が共振部２となる。なお、面内複合共振体の縦振動とたわみ振動による経時的な動きと共振部２の位置関係を図１４と図１５に示した。
The in-plane composite resonator 1 according to the present invention includes a resonance unit 2 that performs in-plane resonance that combines longitudinal vibration and flexural vibration.
The in-plane composite resonator 1 according to the present invention has a first frequency (that is, one wavelength) ultrasonic vibration that is a resonance frequency of the in-plane composite resonator 1 and a frequency different from the first frequency. The ultrasonic vibration generated by adding the ultrasonic vibration having the second frequency is longitudinally vibrated and the flexural vibration generating means 3 is provided as shown in FIG. A complex vibration locus in which a flexural vibration is generated from the ultrasonic vibration of the second frequency of the ultrasonic components of the longitudinal vibration on the peripheral surface of the body 1 and the above-described longitudinal vibration and the generated flexural vibration are combined. Can be generated in the upper and lower surfaces of a so-called rectangular (square bar) in-plane composite resonator 1. Note that a portion that resonates in a plane with a complex vibration locus in which longitudinal vibration and flexural vibration are combined on the peripheral surface of the in-plane composite resonator is the resonance portion 2. Note that FIGS. 14 and 15 show the temporal movement of the in-plane composite resonator due to longitudinal vibration and flexural vibration and the positional relationship of the resonance part 2.
なお、前記では、第１の周波数の超音波振動と第２の周波数の超音波振動との周波数比が１：１．５である場合を例示して説明したので、第２の周波数の超音波振動の腹となる位置が、たわみ振動発生手段３とたわみ振動打消し手段４の中間に位置するように設定したが、第１の周波数の超音波振動と第２の周波数の超音波振動との周波数比が１：１．５でない場合、例えば、１：２や１：２．５などの場合はこの限りでない。周波数比によっては、たわみ振動発生手段３とたわみ振動打消し手段４の中間に位置するものが、第２の周波数の超音波振動の節となる場合もある。 In the above description, the case where the frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is 1 : 1.5 is described as an example. The position of the vibration antinode is set so as to be located between the flexural vibration generating means 3 and the flexural vibration canceling means 4, but the first frequency ultrasonic vibration and the second frequency ultrasonic vibration This is not the case when the frequency ratio is not 1 : 1.5, for example, 1: 2 or 1: 2.5. Depending on the frequency ratio, what is positioned between the flexural vibration generating means 3 and the flexural vibration canceling means 4 may be a node of ultrasonic vibration of the second frequency.
以上に加えて、有限要素解析ソフト（ANSYS Mechanical ver. 11）を用いて、前記作製した面内複合共振体の縦振動及びたわみ振動する様子を解析した。図１４（ａ）〜（ｄ）は順に、作製した面内複合共振体が縦振動する様子を経時的に示した図である。図１５（ａ）〜（ｄ）は順に、作製した面内複合共振体がたわみ振動する様子を経時的に示した図である。図１４及び図１５は、縦振動とたわみ振動とを個別に解析したものであるが、実際には、図１４（ａ）〜（ｄ）に示す縦振動と、図１５（ａ）〜（ｄ）に示すたわみ振動とが複合された、非常に複雑な振動が生じている。
なお、上記図１４と図１５では、たわみ振動発生手段３及びたわみ振動打消し手段４としてのそれぞれの脆弱部の形成角度が、図１と逆向きとなっている図で示したが、このように開き角度を図１と逆向きにとっても効果は同じである。
In addition to the above, using the finite element analysis software (ANSYS Mechanical ver. 11), the state of longitudinal vibration and flexural vibration of the fabricated in-plane composite resonator was analyzed. FIGS. 14A to 14D are views sequentially showing how the produced in-plane composite resonator is longitudinally oscillated in order. FIGS. 15A to 15D are views sequentially showing how the produced in-plane composite resonator is flexibly vibrated. 14 and 15 show the analysis of the longitudinal vibration and the flexural vibration individually, but actually, the longitudinal vibration shown in FIGS. 14 (a) to (d) and FIGS. 15 (a) to (d). A very complicated vibration is generated in combination with the flexural vibration shown in FIG.
In FIGS. 14 and 15, the formation angles of the respective weak portions as the flexural vibration generating means 3 and the flexural vibration canceling means 4 are shown in the opposite directions as in FIG. Even if the opening angle is opposite to that shown in FIG. 1, the effect is the same.
Claims (16)
当該面内複合共振体は、当該面内複合共振体の共振周波数となる第１の周波数の超音波振動と、前記第１の周波数とは異なる周波数を有する第２の周波数の超音波振動と、を加算してなる超音波振動によって励振されて縦振動するとともに、
当該面内複合共振体の周面に、当該縦振動の超音波成分のうちの前記第２の周波数の超音波振動から前記たわみ振動を発生させるためのたわみ振動発生手段を設けた
ことを特徴とする面内複合共振体。 An in-plane composite resonator having a resonance part that performs in-plane resonance that combines longitudinal vibration and flexural vibration,
The in-plane composite resonator includes a first frequency ultrasonic vibration that is a resonance frequency of the in-plane composite resonator, a second frequency ultrasonic vibration having a frequency different from the first frequency, and As it is excited by ultrasonic vibration that adds
Bending vibration generating means for generating the bending vibration from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration is provided on the peripheral surface of the in-plane composite resonator. In-plane composite resonator.
前記たわみ振動打消し手段としてのスリット状の脆弱部の形成角度βが、前記形成角度αとの関係で、前記縦振動の印加方向からの開き角度でβ＝１８０−α、又はβ＝αの条件を満たすことを特徴とする請求項９又は請求項１０に記載の面内複合共振体。 A slit-like fragile portion having a forming angle α is formed as the flexural vibration generating means,
The formation angle β of the slit-like fragile portion as the bending vibration canceling means is β = 180−α or β = α in terms of the opening angle from the application direction of the longitudinal vibration in relation to the formation angle α. The in-plane composite resonator according to claim 9 or 10 , wherein the condition is satisfied.
第１の周波数の超音波振動を発振させるための第１の電圧信号を出力する第１の発振器と、
前記第１の周波数とは異なる周波数を有する第２の周波数の超音波振動を発振させるための第２の電圧信号を出力する第２の発振器と、
前記第１の発振器から入力された第１の電圧信号と、前記第２の発振器から入力された第２の電圧信号とを加算し、加算された電圧信号を得る加算器と、
前記加算器で加算した電圧信号により超音波振動を発振する振動子と、
前記振動子と接続された請求項１から請求項１４のうちのいずれか１項に記載の面内複合共振体と、
を備えたことを特徴とする面内複合共振装置。 An in-plane composite resonance apparatus using an in-plane composite resonator having a resonance part that performs in-plane resonance that combines longitudinal vibration and flexural vibration,
A first oscillator that outputs a first voltage signal for oscillating ultrasonic vibration of a first frequency;
A second oscillator that outputs a second voltage signal for oscillating ultrasonic vibration of a second frequency having a frequency different from the first frequency;
An adder that adds the first voltage signal input from the first oscillator and the second voltage signal input from the second oscillator to obtain an added voltage signal;
A vibrator that oscillates ultrasonic vibrations by the voltage signal added by the adder;
The in-plane composite resonator according to any one of claims 1 to 14 connected to the vibrator,
An in-plane composite resonance device comprising:
第１の発振器が第１の周波数の超音波振動を発振させるための第１の電圧信号を出力するとともに、第２の発振器が前記第１の周波数とは異なる周波数を有する第２の周波数の超音波振動を発振させるための第２の電圧信号を出力する電圧信号出力工程と、
前記第１の発振器から入力された第１の電圧信号と、前記第２の発振器から入力された第２の電圧信号とを加算器によって加算し、加算された電圧信号を得る電圧信号加算工程と、
前記加算器で加算された電圧信号により、縦振動する超音波振動を振動子によって発振させる超音波振動発振工程と、
前記振動子と接続された請求項１から請求項１４のうちのいずれか１項に記載の面内複合共振体を、発振された前記超音波振動によって励振して縦振動させるとともに、当該面内複合共振体に設けられたたわみ振動発生手段によって前記縦振動から前記たわみ振動を発生させて、前記縦振動と前記たわみ振動とを複合した面内共振を発生させる面内複合共振発生工程と、
を含むことを特徴とする面内複合共振方法。 An in-plane composite resonance method for generating in-plane resonance by combining longitudinal vibration and flexural vibration using the in-plane composite resonance apparatus according to claim 15 ,
The first oscillator outputs a first voltage signal for oscillating ultrasonic vibrations having a first frequency, and the second oscillator has a second frequency exceeding the first frequency. A voltage signal output step of outputting a second voltage signal for oscillating the sonic vibration;
A voltage signal adding step of adding a first voltage signal input from the first oscillator and a second voltage signal input from the second oscillator by an adder to obtain an added voltage signal; ,
An ultrasonic vibration oscillating step of causing a vibrator to oscillate longitudinally oscillating ultrasonic vibration by the voltage signal added by the adder;
The in-plane composite resonator according to any one of claims 1 to 14 connected to the vibrator is excited by the oscillated ultrasonic vibration to longitudinally vibrate, and the in-plane An in-plane composite resonance generating step of generating an in-plane resonance in which the longitudinal vibration and the flexural vibration are combined by generating the flexural vibration from the longitudinal vibration by a flexural vibration generating means provided in a composite resonator;
An in-plane composite resonance method comprising:
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