JP2010145941A - Nd filter and light quantity control diaphragm using nd filter - Google Patents

Nd filter and light quantity control diaphragm using nd filter Download PDF

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JP2010145941A
JP2010145941A JP2008325814A JP2008325814A JP2010145941A JP 2010145941 A JP2010145941 A JP 2010145941A JP 2008325814 A JP2008325814 A JP 2008325814A JP 2008325814 A JP2008325814 A JP 2008325814A JP 2010145941 A JP2010145941 A JP 2010145941A
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filter
light
diaphragm
aperture
opening
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JP5325563B2 (en
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Kazuo Suzuki
一雄 鈴木
Michio Yanagi
道男 柳
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Canon Electronics Inc
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Canon Electronics Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To suppress decrease of light quantity passing through an opening due to a ND (neutral density) filter to the minimum when a diaphragm is opened while reducing an element for size increase in an imaging optical system and influence of warpage of the ND filter. <P>SOLUTION: The ND filter 26 attached to one of diaphragm blades 22, 23, comprises a filter part 26a for controlling transmitted light quantity and a filter part 26b which has light transmittance higher than that of the filter part 26a and about equal to that of a substrate. The filter part 26a is provided in a part of the filter part 26b and is formed to a triangle shape from one end part of the filter part 26b toward a facing another end part. When the diaphragm blades 22, 23 operate to make a diameter of a diaphragm aperture 29 smaller than the inside diameter of an opening 30 provided in a bottom board, the diameter of the diaphragm aperture 29 becomes a substantial diaphragm aperture diameter. When the diaphragm diameter becomes smaller than a prescribed value as shown in (c), the diaphragm aperture 29 is covered with the filter part 26a, and image degradation due to light diffraction produced by decrease in the diaphragm diameter is prevented. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、デジタルビデオやデジタルスチルカメラ等の光学機器に使用されるNDフィルタ及び該NDフィルタを用いた光量絞り装置に関するものである。   The present invention relates to an ND filter used in an optical apparatus such as a digital video or a digital still camera, and a light amount reduction device using the ND filter.

デジタルスチルカメラ、デジタルビデオ等の撮像光学系には、絞り羽根で形成される開口径を変化させて光量を調整する光量絞り装置が使用されている。   In an imaging optical system such as a digital still camera and a digital video, a light amount diaphragm device that adjusts a light amount by changing an aperture diameter formed by a diaphragm blade is used.

図10はビデオカメラやデジタルスチルカメラなどの撮像光学系の構成図である。光軸に沿って、前方からレンズ1、光量絞り装置2、レンズ3、4、5、ローパスフィルタ6、固体撮像素子7が配列されている。光量絞り装置2は絞り羽根8、9及び絞り地板10から成り、絞り羽根8には光量調整用のNDフィルタ(Neutral Density)11が接着されている。   FIG. 10 is a configuration diagram of an imaging optical system such as a video camera or a digital still camera. A lens 1, a light amount diaphragm device 2, lenses 3, 4, 5, a low-pass filter 6, and a solid-state image sensor 7 are arranged from the front along the optical axis. The light quantity diaphragm device 2 includes diaphragm blades 8 and 9 and a diaphragm base plate 10, and an ND filter (Neutral Density) 11 for light quantity adjustment is bonded to the diaphragm blade 8.

図11は従来の光量絞り装置2の構成を示している。光量絞り装置2は2枚の絞り羽根8、9が反対向きに直線駆動されることによって絞り開口12の開口径を変更可能とするものである。この動作により、絞り開口12を通過する光量を調整することができる。   FIG. 11 shows a configuration of a conventional light quantity diaphragm device 2. The light quantity diaphragm device 2 enables the aperture diameter of the diaphragm aperture 12 to be changed by linearly driving two diaphragm blades 8 and 9 in opposite directions. With this operation, the amount of light passing through the aperture opening 12 can be adjusted.

絞り羽根8には、NDフィルタ11が一体的に接着固定されており、絞り開口12の一部がこのNDフィルタ11により覆われている。紙面と直交方向に絞り開口の中心Oを通る直線が光軸となる。開口部13は絞り地板10に設けられ、その内径は不変であるので、図11(a)に示すように絞り開口12の開口径が開口部13の内径よりも大きくなっても、実質的な絞り開口径としては開口部13の径が最大となる。また、図11(b)に示すように絞り開口12の開口径が開口部13の内径よりも小さい場合には、絞り開口12の径が実質的な絞り開口径となる。   An ND filter 11 is integrally bonded and fixed to the diaphragm blade 8, and a part of the diaphragm opening 12 is covered with the ND filter 11. A straight line passing through the center O of the aperture opening in the direction orthogonal to the paper surface is the optical axis. Since the aperture 13 is provided in the diaphragm base plate 10 and its inner diameter is unchanged, even if the aperture diameter of the diaphragm aperture 12 is larger than the inner diameter of the aperture 13 as shown in FIG. As the aperture diameter, the diameter of the opening 13 is maximized. Further, as shown in FIG. 11B, when the aperture diameter of the aperture 12 is smaller than the inner diameter of the aperture 13, the diameter of the aperture 12 becomes a substantial aperture diameter.

絞り開口径が小さくなると、絞り開口12を通過する光の回折現象が発生し易くなる。この小絞り側での回折による悪影響を除去するために、NDフィルタ11を絞り羽根8に取り付け、図11(c)に示すように絞り開口径の縮小と同時に光の透過率を低下させる。これにより、より広い輝度範囲内でも問題となる絞り開口径よりも小さい開口径に、実用的には殆ど至らないようにすることが行われている。   When the aperture diameter is reduced, a diffraction phenomenon of light passing through the aperture opening 12 is likely to occur. In order to remove the adverse effect of diffraction on the small aperture side, the ND filter 11 is attached to the aperture blade 8 and the light transmittance is decreased simultaneously with the reduction of the aperture diameter as shown in FIG. Thus, practically no aperture diameter smaller than the aperture diameter of the stop, which is a problem even in a wider luminance range, is achieved.

NDフィルタ11の種類としては、全面均一濃度タイプの他に、特許文献1に開示される複数の濃度領域から成る多濃度NDフィルタや、特許文献2に開示されるグラデーションNDフィルタなどが知られている。   As types of the ND filter 11, in addition to the uniform density type on the entire surface, a multi-density ND filter composed of a plurality of density regions disclosed in Patent Document 1, a gradation ND filter disclosed in Patent Document 2, and the like are known. Yes.

特開2004−117718号公報JP 2004-117718 A 特開2005−326687号公報JP 2005-326687 A

前述した光量絞り装置2において、室内での撮影など撮影対象物が暗い場合には、絞りを開放にしても光量が不足気味となり、撮影した画像の画質が低下してしまう傾向にある。   In the light quantity diaphragm device 2 described above, when an object to be photographed is dark, such as indoor shooting, the light quantity tends to be insufficient even when the diaphragm is opened, and the image quality of the photographed image tends to deteriorate.

このため、絞り開放時にはNDフィルタ11を絞り開口部13から完全に退避させて、開口部13を通過する光量をより多くすることが好ましい。しかし、NDフィルタ11を絞り開口部13から完全に退避させるには、NDフィルタ11を取り付けた絞り羽根8の開閉ストロークを大きくする必要がある。   For this reason, it is preferable that the ND filter 11 is completely retracted from the aperture opening 13 when the aperture is opened to increase the amount of light passing through the aperture 13. However, in order to completely retract the ND filter 11 from the aperture opening 13, it is necessary to increase the opening / closing stroke of the aperture blade 8 to which the ND filter 11 is attached.

図12(a)は絞り開放時にNDフィルタ11の一部が開口12内に残っている状態を示しているが、NDフィルタ11を絞り開口部13から完全に退避させようとすると、図12(b)のように距離XだけNDフィルタ11を図面右方向に後退させる必要がある。このためには、NDフィルタ11が接着された絞り羽根8を後退させることになるが、その場合に絞り羽根9は絞り羽根8と相対的に反対方向に移動する。その結果、絞り羽根8の移動距離の増加分Yのためのスペースが光量絞り装置2として必要になり、結果として絞り装置の大型化につながる。   FIG. 12A shows a state in which a part of the ND filter 11 remains in the opening 12 when the diaphragm is opened. However, if the ND filter 11 is completely retracted from the diaphragm opening 13, FIG. As shown in b), the ND filter 11 needs to be retracted to the right in the drawing by the distance X. For this purpose, the diaphragm blade 8 to which the ND filter 11 is bonded is moved backward. In this case, the diaphragm blade 9 moves in a direction opposite to the diaphragm blade 8. As a result, a space for the increase Y of the moving distance of the diaphragm blades 8 is required for the light quantity diaphragm device 2, which results in an increase in the size of the diaphragm device.

また、従来のNDフィルタ11には、図13に示すようにNDフィルタ11の開口12側の先端が円弧状にしている例もある。しかし、樹脂基材上に無機硬質膜を形成して作製したNDフィルタ11では、湿度や温度変化による反りが生じ易く、開口部13に突出した形状ではその影響を受け易く、対向する絞り羽根9と干渉する虞れがある。そのため、NDフィルタ11と対向する絞り羽根9との間に十分な間隔を設けるなどの対策が必要となり、その結果、絞り装置が厚くなったり、生産工程が複雑になったりするなどの弊害がある。   In addition, as shown in FIG. 13, the conventional ND filter 11 includes an example in which the tip of the ND filter 11 on the opening 12 side has an arc shape. However, the ND filter 11 produced by forming an inorganic hard film on a resin base material is likely to be warped due to changes in humidity and temperature, and the shape protruding from the opening portion 13 is easily affected by this. There is a risk of interference. For this reason, it is necessary to take measures such as providing a sufficient distance between the ND filter 11 and the diaphragm blade 9 facing the ND filter 11. As a result, the diaphragm device becomes thick and the production process becomes complicated. .

本発明の目的は、撮像光学系が大型化する要素とNDフィルタの反りの影響を減少しながら、絞り開放時のNDフィルタによる開口部の通過光量の減少を最小限に抑制したNDフィルタ及び該NDフィルタを用いた光量絞り装置を提供することにある。   An object of the present invention is to provide an ND filter that minimizes the reduction in the amount of light passing through the opening due to the ND filter when the diaphragm is opened while reducing the influence of the warping of the ND filter and the elements that increase the size of the imaging optical system. An object of the present invention is to provide a light quantity stop device using an ND filter.

上記目的を達成するための本発明に係るNDフィルタは、透過する光量を減衰する第1の光減衰部と、該第1の光減衰部よりも透過する光量が多い第2の光減衰部を有するNDフィルタであって、前記第1の光減衰部は前記第2の光減衰部の一部に一端部から対向する他端部に向けて凸となる領域を形成したことを特徴とする。   In order to achieve the above object, an ND filter according to the present invention includes a first light attenuator that attenuates the amount of transmitted light and a second light attenuator that transmits more light than the first light attenuator. In the ND filter, the first light attenuating part is formed in a part of the second light attenuating part so as to have a region that protrudes from one end to the other opposite end.

また、本発明に係るNDフィルタを用いた光量絞り装置は、光を通過させる開口部と、該開口部を通過する光量を調節する絞り羽根と、該絞り羽根が形成する絞り開口を通過する光を減衰するNDフィルタを用いた光量絞り装置であって、前記NDフィルタは透過する光量を減衰する第1の光減衰部と、該第1の光減衰部よりも透過する光量が多い第2の光減衰部を有し、前記第1の光減衰部は、前記第2の光減衰部の一部に一端部から対向する他端部に向かって凸となる領域を形成したことを特徴とする。   In addition, the light quantity diaphragm device using the ND filter according to the present invention includes an aperture that allows light to pass through, a diaphragm blade that adjusts the amount of light that passes through the aperture, and light that passes through a diaphragm aperture formed by the diaphragm blade. The ND filter uses a first light attenuating unit for attenuating the amount of transmitted light, and a second amount of light transmitted through the first light attenuating unit is larger than that of the first light attenuating unit. It has a light attenuating part, and the 1st light attenuating part formed the field which became convex toward the other end which counters from a part of the 2nd light attenuating part. .

本発明に係るNDフィルタ及び該NDフィルタを用いた光量絞り装置によれば、NDフィルタの濃度と最小絞り径の大きさを変更することなく、大型化とNDフィルタの反りを抑えながら、絞り開放時の撮影光量を増加し、画質を改善することができる。   According to the ND filter and the light quantity diaphragm device using the ND filter according to the present invention, the aperture is opened while suppressing the enlargement and the warpage of the ND filter without changing the density of the ND filter and the size of the minimum diaphragm diameter. It is possible to improve the image quality by increasing the amount of photographing at the time.

本発明を図1〜図9に図示の実施例に基づいて詳細に説明する。   The present invention will be described in detail based on the embodiment shown in FIGS.

図1は本実施例1によるNDフィルタを用いた光量絞り装置の構成図である。図1(a)において、光量絞り装置20は絞り羽根22、23と、回転軸24を中心に回動し、絞り羽根22、23を駆動する駆動アーム25とにより構成され、絞り羽根22にはNDフィルタ26が接着剤27により固定されている。   FIG. 1 is a configuration diagram of a light quantity diaphragm device using an ND filter according to the first embodiment. In FIG. 1A, the light quantity diaphragm device 20 is composed of diaphragm blades 22 and 23 and a drive arm 25 that rotates about a rotation shaft 24 and drives the diaphragm blades 22 and 23. The ND filter 26 is fixed with an adhesive 27.

NDフィルタ26は図1(a)のように透過光量を調節する第1の光減衰部であるフィルタ部26aと、光透過率が第1の光減衰部よりも高く基板の光透過率とほぼ等しい第2の光減衰部のフィルタ部26bとから成っている。フィルタ部26aはフィルタ部26bの一部に設けられ、フィルタ部26bの一端部から対向する他端部に向けて三角形状に形成されている。NDフィルタ26に用いられる基板の光透過率は通常では80%以上であり、フィルタ部26bの光透過率は80%程度である。   As shown in FIG. 1A, the ND filter 26 has a filter unit 26a that is a first light attenuating unit that adjusts the amount of transmitted light, and has a light transmittance higher than that of the first light attenuating unit and almost equal to the light transmittance of the substrate. And a second light attenuating filter 26b. The filter part 26a is provided in a part of the filter part 26b, and is formed in a triangular shape from one end part of the filter part 26b toward the other opposite end part. The light transmittance of the substrate used for the ND filter 26 is normally 80% or more, and the light transmittance of the filter portion 26b is about 80%.

絞り開口中心Oを通り、NDフィルタ26の動作方向に延長した線をNDフィルタ26の中心線Cとすると、フィルタ部26aのフィルタ部26bに対する境界線は、三角形の2つの斜辺部とされ、中心線Cの近傍が三角形の頂点となっている。   Assuming that the line extending through the aperture opening center O and extending in the operation direction of the ND filter 26 is the center line C of the ND filter 26, the boundary line of the filter unit 26a to the filter unit 26b is the two oblique sides of the triangle. The vicinity of the line C is the apex of the triangle.

絞り羽根22、23には直線状のガイド孔22a、22b、23a、23bが設けられている。これらのガイド孔22a、22b、23a、23bは絞り地板に形成されているガイドピンに案内され、絞り羽根22、23は相互に中心線Cと平行に直線的に移動するようになっている。   The aperture blades 22 and 23 are provided with linear guide holes 22a, 22b, 23a and 23b. These guide holes 22a, 22b, 23a, and 23b are guided by guide pins formed on the diaphragm base plate, and the diaphragm blades 22 and 23 move linearly in parallel with the center line C.

駆動アーム25は図示しない駆動モータから回転軸24に伝達された回転運動により回動する。また、絞り羽根22、23には長孔22c、23c、駆動アーム25には駆動ピン28a、28bが設けられており、駆動ピン28aが長孔22cに、駆動ピン28bが長孔23cにそれぞれ嵌合している。   The drive arm 25 is rotated by the rotational motion transmitted to the rotary shaft 24 from a drive motor (not shown). The aperture blades 22 and 23 are provided with long holes 22c and 23c, and the drive arm 25 is provided with drive pins 28a and 28b. The drive pin 28a is fitted into the long hole 22c, and the drive pin 28b is fitted into the long hole 23c. Match.

駆動アーム25が図1(b)に示すように回転運動をすることで、駆動ピン28a、28bが絞り羽根22、23を互いに反対向きに移動させ、絞り羽根22、23で形成される絞り開口29の開口径の大きさが変化する。   When the drive arm 25 rotates as shown in FIG. 1 (b), the drive pins 28a and 28b move the diaphragm blades 22 and 23 in opposite directions, and the diaphragm aperture formed by the diaphragm blades 22 and 23. The size of the opening diameter of 29 changes.

この動作により、絞り開口29を通過する光量を調整することができ、紙面と直交方向に絞り開口の中心Oを通る直線が光軸となる。絞り地板に設けられた円形の開口部30の内径は不変であるので、絞り開口29の開口径が開口部30の内径よりも大きくなっても、実質的な絞り開口径としては開口部30の径が最大となる。   With this operation, the amount of light passing through the aperture opening 29 can be adjusted, and a straight line passing through the center O of the aperture opening in the direction orthogonal to the paper surface becomes the optical axis. Since the inner diameter of the circular opening 30 provided in the diaphragm base plate does not change, even if the aperture diameter of the diaphragm opening 29 is larger than the inner diameter of the opening 30, the substantial diaphragm opening diameter is The diameter becomes the maximum.

また、絞り開口29の開口径が開口部30の内径より小さい場合には、絞り開口29の径が実質的な絞り開口径となる。そして、図1(c)に示すように絞り径が所定値よりも小さくなると、絞り開口29はNDフィルタ26のフィルタ部26aにより覆われ、絞り径が小さくなることで発生する光の回折による画像劣化が防止される。   Further, when the aperture diameter of the aperture opening 29 is smaller than the inner diameter of the opening portion 30, the diameter of the aperture opening 29 becomes a substantial aperture aperture diameter. When the aperture diameter becomes smaller than a predetermined value as shown in FIG. 1C, the aperture opening 29 is covered with the filter portion 26a of the ND filter 26, and an image due to diffraction of light generated when the aperture diameter becomes smaller. Deterioration is prevented.

図2(a)はNDフィルタ26を用いた光量絞り装置20、図2(b)は従来のNDフィルタ11を用いた絞り装置を示している。光量絞り装置20を小型化するために、絞り羽根22、23の作動ストロークを減少すると、絞り羽根22、23が開口部30を全開させても、図2(b)に示す従来形の矩形状のNDフィルタ11の一部が開口部30内に露出する。斜線部は絞り開放状態で、開口部30を覆うNDフィルタ11のフィルタ部を表している。   2A shows a light amount diaphragm 20 using the ND filter 26, and FIG. 2B shows a conventional diaphragm apparatus using the ND filter 11. As shown in FIG. If the operation stroke of the diaphragm blades 22 and 23 is reduced in order to reduce the size of the light quantity diaphragm device 20, even if the diaphragm blades 22 and 23 fully open the opening 30, the conventional rectangular shape shown in FIG. A part of the ND filter 11 is exposed in the opening 30. The hatched portion represents the filter portion of the ND filter 11 that covers the opening 30 in the fully open state.

本実施例のような図2(a)に示す形状とすることで、従来形のNDフィルタ11と比べて、NDフィルタ26のフィルタ部26aが絞り開放状態で開口部30を覆う面積が小さくなっていることが分かる。一方、NDフィルタ26において、図2(c)に示すように絞り径を従来形と同じ最小絞り径に絞り込んだ場合でも、絞り開口部30の全域をフィルタ部26aで覆うことができる。   By adopting the shape shown in FIG. 2A as in this embodiment, the area covering the opening 30 when the filter portion 26a of the ND filter 26 is open is smaller than that of the conventional ND filter 11. I understand that On the other hand, in the ND filter 26, even when the aperture diameter is reduced to the same minimum aperture diameter as the conventional type as shown in FIG. 2C, the entire area of the aperture opening 30 can be covered with the filter portion 26a.

ここで、絞り開口29の形状は、図2(c)に示すように絞り羽根22、23の開口29の内縁部22d、22e、23d、23eにより決まる。従って、NDフィルタ26のフィルタ部26aは開放方向側は絞り羽根22の内縁部22d、22eよりも開放方向側に、またフィルタ部26aの絞り方向側は絞り羽根23の内縁部23d、23eで形成される内縁部形状に近い形状とすることが望ましい。更に、最小絞り開口径を完全に覆うことができる形状に形成することが更に好ましい。   Here, the shape of the aperture opening 29 is determined by the inner edge portions 22d, 22e, 23d, and 23e of the apertures 29 of the aperture blades 22 and 23 as shown in FIG. Accordingly, the filter portion 26a of the ND filter 26 is formed on the opening direction side on the opening direction side with respect to the inner edge portions 22d and 22e of the diaphragm blade 22 and on the diaphragm direction side of the filter portion 26a with the inner edge portions 23d and 23e of the diaphragm blade 23. It is desirable to make the shape close to the inner edge shape. Furthermore, it is more preferable to form in a shape that can completely cover the minimum aperture diameter.

ただし、絞り方向側フィルタ部形状と内縁部形状は完全に同形状でなくともよく、図3(a)、(b)に示すようにNDフィルタ26のフィルタ部26aにおいて、開口中心線Cの近傍が、その外側よりも絞り方向側に円弧状の凸形状になっている。或いは、図3(c)に示すように絞り方向側に凸形状の矩形状としても本発明の効果が得られる。   However, the shape of the filter portion on the aperture direction side and the shape of the inner edge portion do not have to be completely the same shape, and in the filter portion 26a of the ND filter 26 as shown in FIGS. However, it has an arcuate convex shape on the aperture direction side from the outside. Alternatively, as shown in FIG. 3C, the effect of the present invention can be obtained even when the rectangular shape is convex toward the aperture direction.

また、フィルタ部26aは光透過率が高く面積の広いフィルタ部26bにより、絞り羽根22の内縁部22d、22eに広く支えられて固定されている。このため、絞り開口部30側にフィルタ部26aが単独で凸形状に露出するよりも、湿度や温度変化による反りの影響を減少することができる。そのため、光量絞り装置20及びその周辺の部材との干渉を減らすことができ、結果として装置の小型化、薄型化が達成できる。   The filter part 26a is supported and fixed widely by the inner edge parts 22d and 22e of the aperture blade 22 by a filter part 26b having a high light transmittance and a large area. For this reason, the influence of the curvature by humidity or a temperature change can be reduced rather than the filter part 26a being independently exposed in convex shape by the aperture opening 30 side. Therefore, interference with the light quantity diaphragm 20 and its peripheral members can be reduced, and as a result, the apparatus can be reduced in size and thickness.

NDフィルタ26の材料としては、図4に示すように透明基板31上にND膜32を形成したものが一般的に使われている。NDフィルタ26に用いられる透明基板31として、材質は特に限定されないが、透明性及び機械的強度を有するものが好ましく、フィルム状のPET(ポリエチレンテレフタレート)が主に用いられる。その他にも、PEN(ポリエチレンナフタレート)、ポリカーボネート、ポリイミド系樹脂、ノルボルネン系樹脂、ポリスチレン、ポリ塩化ビニル、ポリアリレート、ポリスルホン、ポリエーテルスルホン、ポリエーテルイミド、アクリル系樹脂等が用いられる。また、透明基板31の厚さとしては、NDフィルタ26としての剛性を保ちながら、小型軽量化という観点から可能な限り薄いことが望ましい。具体的には、厚さは300μm以下とすることが好ましく、より好ましくは50〜100μmである。   As a material of the ND filter 26, a material in which an ND film 32 is formed on a transparent substrate 31 as shown in FIG. 4 is generally used. The material of the transparent substrate 31 used in the ND filter 26 is not particularly limited, but a material having transparency and mechanical strength is preferable, and film-like PET (polyethylene terephthalate) is mainly used. In addition, PEN (polyethylene naphthalate), polycarbonate, polyimide resin, norbornene resin, polystyrene, polyvinyl chloride, polyarylate, polysulfone, polyethersulfone, polyetherimide, acrylic resin, and the like are used. Further, the thickness of the transparent substrate 31 is desirably as thin as possible from the viewpoint of reduction in size and weight while maintaining the rigidity as the ND filter 26. Specifically, the thickness is preferably 300 μm or less, more preferably 50 to 100 μm.

透明基板31の上に形成されるND膜32としては真空蒸着、スパッタ、イオンプレーティング、インクジェット、印刷など任意の成膜手段により光量透過率を調整するための光吸収層や反射防止層を形成する。図4は真空蒸着でND膜を形成したNDフィルタ26の構成の一例を示した概略構成図である。第1層〜第8層目までは酸化アルミニウム(Al23)と酸化チタン(TiOx)の交互層、最表層はフッ化マグネシウム(MgF2)から成る反射防止層で構成されているが、層数や材質は特に限定されるものではない。 As the ND film 32 formed on the transparent substrate 31, a light absorption layer and an antireflection layer for adjusting the light transmittance are formed by any film forming means such as vacuum deposition, sputtering, ion plating, ink jet, and printing. To do. FIG. 4 is a schematic configuration diagram showing an example of the configuration of the ND filter 26 in which an ND film is formed by vacuum deposition. The first to eighth layers are composed of alternating layers of aluminum oxide (Al 2 O 3 ) and titanium oxide (TiOx), and the outermost layer is composed of an antireflection layer made of magnesium fluoride (MgF 2 ). The number of layers and the material are not particularly limited.

図5はNDフィルタを製造する真空蒸着装置の概略図である。蒸着チャンバ41内には回転ドーム42が備えられ、この回転ドーム42にNDフィルタ26の基板31が保持された蒸着治具43がセットされる。成膜中に、回転ドーム42は基板温度と蒸着膜の膜厚を均一化するために回転軸44を中心に回転している。また、蒸着源45aには酸化アルミニウム、蒸着源45bには酸化チタン、蒸着源45cにはフッ化マグネシウムのように、ND膜32を構成する各層の材料が準備されている。   FIG. 5 is a schematic view of a vacuum deposition apparatus for manufacturing an ND filter. A rotation dome 42 is provided in the vapor deposition chamber 41, and a vapor deposition jig 43 holding the substrate 31 of the ND filter 26 is set on the rotary dome 42. During film formation, the rotating dome 42 rotates around the rotation shaft 44 in order to make the substrate temperature and the film thickness of the deposited film uniform. Further, materials for each layer constituting the ND film 32 are prepared, such as aluminum oxide for the vapor deposition source 45a, titanium oxide for the vapor deposition source 45b, and magnesium fluoride for the vapor deposition source 45c.

蒸着工程が始まると、蒸着チャンバ41内は真空状態に保持され、蒸着治具43は所定の温度に加熱される。そして、圧力と温度が所定の値に達するとND膜32の第1層目として蒸着源45aを加熱し、蒸着材料を蒸発させて蒸着治具43にセットされた基板31上に、蒸着膜を所定の厚みに形成する。以後、必要に応じて蒸着源45を切換えて多層膜を形成していく。   When the vapor deposition process starts, the inside of the vapor deposition chamber 41 is maintained in a vacuum state, and the vapor deposition jig 43 is heated to a predetermined temperature. When the pressure and temperature reach predetermined values, the vapor deposition source 45a is heated as the first layer of the ND film 32, the vapor deposition material is evaporated, and the vapor deposition film is formed on the substrate 31 set in the vapor deposition jig 43. A predetermined thickness is formed. Thereafter, the deposition source 45 is switched as necessary to form a multilayer film.

透明基板31は図6(a)に示すように蒸着治具43にセットされ、基板31の上には図6(b)に示すようにNDフィルタ26のフィルタ部26aの形状に開口部が形成された蒸着マスク46が保持される。この状態で、前述した蒸着工程を経ることによって、透明基板31上には図6(c)に示すようにND膜32がフィルタ部26aの形状に形成される。以上の手順でND膜の形成が終了すると、図6(d)に示すように、NDフィルタ形状に切断してNDフィルタ26を得ることができる。   The transparent substrate 31 is set in a vapor deposition jig 43 as shown in FIG. 6A, and an opening is formed on the substrate 31 in the shape of the filter portion 26a of the ND filter 26 as shown in FIG. 6B. The deposited vapor deposition mask 46 is held. In this state, the ND film 32 is formed on the transparent substrate 31 in the shape of the filter portion 26a as shown in FIG. When the formation of the ND film is completed by the above procedure, the ND filter 26 can be obtained by cutting into an ND filter shape as shown in FIG.

図7は実施例2のNDフィルタ及び光量絞り装置を示している。本実施例2のNDフィルタ26は、第1の光減衰部である高濃度部のフィルタ部26aと第2の光減衰部である低濃度部のフィルタ部26cの2種類の濃度領域を有している。   FIG. 7 shows an ND filter and a light quantity stop device according to the second embodiment. The ND filter 26 according to the second embodiment has two types of density regions, that is, a high density part filter part 26a that is a first light attenuation part and a low density part filter part 26c that is a second light attenuation part. ing.

NDフィルタ26は濃度が濃い方が、より透過光を減衰させることができるため、その分だけ絞り最小絞り開口径を大きくでき、小絞りによる回折の影響を少なくできる。しかし、一方では開口29内にフィルタ部26a、26cがある部分とない部分とが存在する場合に、その濃度差からシェーディングと呼ばれる光量むらが発生する虞れがある。   The darker the ND filter 26, the more the transmitted light can be attenuated, so that the minimum aperture diameter of the stop can be increased by that amount, and the influence of diffraction by the small stop can be reduced. However, on the other hand, when there are portions where the filter portions 26a and 26c are present in the opening 29 and portions where the filter portions 26a and 26c are not present, there is a possibility that unevenness in the amount of light called shading may occur due to the density difference.

そこで本実施例2においては、NDフィルタ26に小絞り状態で使用するフィルタ部26aとそれよりも濃度の薄いフィルタ部26cを設け、急激な濃度差をなくしている。そして、フィルタ部26aは実施例1と同様に、NDフィルタ26の中心線Cの近傍がその外側よりも絞り方向側に凸形状になっている。本実施例2のNDフィルタ26は、実施例1と同様に、フィルタ部26aの部分にND膜32を形成し、続いて基板31を裏返して裏面全面に別のND膜32を形成することで得られる。   Therefore, in the second embodiment, the ND filter 26 is provided with a filter portion 26a used in a small-aperture state and a filter portion 26c having a lighter density than that, thereby eliminating an abrupt density difference. As in the first embodiment, the filter portion 26a has a convex shape in the vicinity of the center line C of the ND filter 26 on the diaphragm direction side of the outside thereof. In the ND filter 26 of the second embodiment, as in the first embodiment, the ND film 32 is formed on the filter portion 26a, and then the substrate 31 is turned over to form another ND film 32 on the entire back surface. can get.

本実施例2においても、フィルタ部26aはより光透過率が高く面積の広いフィルタ部26cの一部に形成されており、フィルタ部26cは絞り羽根22の内縁部22d、22eに広く支えられて固定されている。このため、実施例1と同様に反りの影響を減少することができる。   Also in the second embodiment, the filter portion 26a is formed in a part of the filter portion 26c having a higher light transmittance and a larger area, and the filter portion 26c is widely supported by the inner edge portions 22d and 22e of the aperture blade 22. It is fixed. For this reason, it is possible to reduce the influence of warping as in the first embodiment.

図8は実施例3のNDフィルタ及び光量絞り装置を示している。本実施例3のNDフィルタ26は、第1の光減衰部である高濃度部であるフィルタ部26aと、第2の光減衰部である複数の光透過率を持ち、濃度が段階的に変化する濃度変化を有するフィルタ部26dとから成る。このため、更に濃度差による光量むらの防止効果が高くなり、フィルタ部26aの濃度をより濃くできる。その結果として、最小絞り径を大きくすることができ、小絞りによる光の回折の影響を少なくすることができる。   FIG. 8 shows an ND filter and a light quantity stop device according to the third embodiment. The ND filter 26 of the third embodiment has a filter part 26a that is a high-density part that is a first light attenuating part and a plurality of light transmittances that are second light-attenuating parts, and the density changes stepwise. And a filter unit 26d having a density change. For this reason, the effect of preventing unevenness in the amount of light due to the density difference is further increased, and the density of the filter portion 26a can be further increased. As a result, the minimum aperture diameter can be increased and the influence of light diffraction by the small aperture can be reduced.

本実施例3におけるNDフィルタ26は、フィルタ部26aは実施例1と同様にNDフィルタ26の中心線Cの近傍がその外側よりも絞り方向側に凸形状になっている。フィルタ部26aから段階的に濃度が変わるフィルタ部26dにおいても、フィルタ部26aの凸形状に倣うように濃度分布を持っている。   In the ND filter 26 according to the third embodiment, the filter portion 26a has a convex shape in the vicinity of the center line C of the ND filter 26 on the diaphragm direction side from the outside thereof as in the first embodiment. The filter unit 26d whose density gradually changes from the filter unit 26a also has a density distribution so as to follow the convex shape of the filter unit 26a.

また、実施例3の変形例として、フィルタ部26dの濃度を連続的に変化させたグラデーション濃度変化部とすることができる。かくすることで、更に濃度差による光量むらを防止する効果が高くなり、高品位な画像を得ることができる。   Further, as a modification of the third embodiment, a gradation density changing unit in which the density of the filter unit 26d is continuously changed can be used. In this way, the effect of preventing unevenness in the amount of light due to the density difference is further enhanced, and a high-quality image can be obtained.

本実施例3においても、フィルタ部26dが絞り羽根22の内縁部22d、22eに広く支えられて固定されており、このため先の実施例と同様に反りの影響を減らすことができる。   Also in the third embodiment, the filter portion 26d is widely supported and fixed to the inner edge portions 22d and 22e of the diaphragm blade 22, and therefore, the influence of warpage can be reduced as in the previous embodiment.

このような連続的に濃度が変化するフィルタ部26dを有するNDフィルタ26は、図9(a)に示すように蒸着治具43上の透明基板31からフレーム47により間隔を空けて、図9(b)に示す蒸着マスク46をセットして成膜することで得られる。基板31上には、図9(c)に示すようにフィルタ部26aとフィルタ部26dが形成され、これを図9(d)に示すように切断するとNDフィルタ26が得られる。   As shown in FIG. 9A, the ND filter 26 having the filter portion 26d whose concentration continuously changes is spaced from the transparent substrate 31 on the vapor deposition jig 43 by the frame 47, as shown in FIG. It is obtained by setting the vapor deposition mask 46 shown in b) to form a film. On the substrate 31, a filter part 26a and a filter part 26d are formed as shown in FIG. 9C, and the ND filter 26 is obtained by cutting the filter part 26d as shown in FIG. 9D.

実施例1のNDフィルタを取り付けた光量絞り装置の構成図である。It is a block diagram of the light quantity aperture device to which the ND filter of Example 1 was attached. 光量絞り装置と従来の光量絞り装置を比較した構成図である。It is the block diagram which compared the light quantity diaphragm device and the conventional light quantity diaphragm apparatus. 実施例1の光量絞り装置の形状例の構成図である。It is a block diagram of the example of a shape of the light quantity aperture apparatus of Example 1. FIG. NDフィルタの構成模式図である。It is a block diagram of an ND filter. 真空蒸着装置の構成図である。It is a block diagram of a vacuum evaporation system. NDフィルタの作製方法を説明図である。It is explanatory drawing about the preparation methods of ND filter. 実施例2の光量絞り装置の構成図である。It is a block diagram of the light quantity diaphragming apparatus of Example 2. 実施例3の光量絞り装置の構成図である。It is a block diagram of the light quantity diaphragming apparatus of Example 3. 実施例3のNDフィルタの作製方法を説明図である。FIG. 10 is an explanatory diagram illustrating a method for producing an ND filter according to Example 3. NDフィルタ及び光量絞り装置を使用する撮像光学系の概略図である。It is the schematic of the imaging optical system which uses an ND filter and a light quantity aperture device. 従来の光量絞り装置の構成図である。It is a block diagram of the conventional light quantity aperture apparatus. 従来のNDフィルタの光減衰部を開口部から完全に退避させた状態の光量絞り装置の構成図である。It is a block diagram of the light quantity diaphragm | throttle device of the state which retracted | removed the light attenuation part of the conventional ND filter completely from the opening part. 従来の他の形状のNDフィルタを取り付けた光量絞り装置の構成図である。It is a block diagram of the light quantity aperture apparatus which attached the ND filter of the other conventional shape.

符号の説明Explanation of symbols

22、23 絞り羽根
26 NDフィルタ
26a〜26d フィルタ部
29 開口
30 開口部
31 透明基板
32 ND膜
22, 23 Diaphragm blade 26 ND filter 26a-26d Filter part 29 Opening 30 Opening part 31 Transparent substrate 32 ND film

Claims (6)

透過する光量を減衰する第1の光減衰部と、該第1の光減衰部よりも透過する光量が多い第2の光減衰部を有するNDフィルタであって、前記第1の光減衰部は前記第2の光減衰部の一部に一端部から対向する他端部に向けて凸となる領域を形成したことを特徴とするNDフィルタ。   An ND filter having a first light attenuator that attenuates the amount of light transmitted therethrough and a second light attenuator that transmits a larger amount of light than the first light attenuator, wherein the first light attenuator is An ND filter, wherein a region that protrudes from one end portion to the other end portion that faces the part of the second light attenuating portion is formed. 前記第2の光減衰部は光透過率が80%以上であることを特徴とする請求項1に記載のNDフィルタ。   The ND filter according to claim 1, wherein the second light attenuator has a light transmittance of 80% or more. 前記第1の光減衰部は光透過率が連続的に変化することを特徴とする請求項1又は2に記載のNDフィルタ。   3. The ND filter according to claim 1, wherein the first light attenuating unit continuously changes in light transmittance. 前記第1の光減衰部は異なる光透過率を有する複数の領域から成ることを特徴とする請求項1又は2に記載のNDフィルタ。   3. The ND filter according to claim 1, wherein the first light attenuating unit includes a plurality of regions having different light transmittances. 光を通過させる開口部と、該開口部を通過する光量を調節する絞り羽根と、該絞り羽根が形成する絞り開口を通過する光を減衰するNDフィルタを用いた光量絞り装置であって、前記NDフィルタは透過する光量を減衰する第1の光減衰部と、該第1の光減衰部よりも透過する光量が多い第2の光減衰部を有し、前記第1の光減衰部は、前記第2の光減衰部の一部に一端部から対向する他端部に向かって凸となる領域を形成したことを特徴とするNDフィルタを用いた光量絞り装置。   A light quantity diaphragm device using an opening for transmitting light, a diaphragm blade for adjusting the amount of light passing through the opening, and an ND filter for attenuating light passing through a diaphragm opening formed by the diaphragm blade, The ND filter includes a first light attenuating unit that attenuates the amount of light transmitted therethrough and a second light attenuating unit that transmits a larger amount of light than the first light attenuating unit. A light quantity stop device using an ND filter, characterized in that a part of the second light attenuating part is formed with a region that protrudes from one end to the other opposite end. 前記絞り羽根が前記開口部を全開と成したとき、前記第1の光減衰部の少なくとも一部が前記開口部に露出していることを特徴とする請求項5に記載のNDフィルタを用いた光量絞り装置。   6. The ND filter according to claim 5, wherein at least a part of the first light attenuating portion is exposed to the opening when the aperture blade is configured to fully open the opening. Light quantity diaphragm device.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2399809A1 (en) 2010-06-28 2011-12-28 Kawasaki Jukogyo Kabushiki Kaisha Vehicle lamp arrangement
WO2012005217A1 (en) * 2010-07-07 2012-01-12 住友電気工業株式会社 Substrate, substrate production method, nd filter, and optical characteristic measurement device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0335531U (en) * 1989-08-16 1991-04-08
JPH0616947U (en) * 1992-08-14 1994-03-04 リズム時計工業株式会社 Iris diaphragm device
JP2008065227A (en) * 2006-09-11 2008-03-21 Canon Electronics Inc Nd filter

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0335531U (en) * 1989-08-16 1991-04-08
JPH0616947U (en) * 1992-08-14 1994-03-04 リズム時計工業株式会社 Iris diaphragm device
JP2008065227A (en) * 2006-09-11 2008-03-21 Canon Electronics Inc Nd filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2399809A1 (en) 2010-06-28 2011-12-28 Kawasaki Jukogyo Kabushiki Kaisha Vehicle lamp arrangement
WO2012005217A1 (en) * 2010-07-07 2012-01-12 住友電気工業株式会社 Substrate, substrate production method, nd filter, and optical characteristic measurement device

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