JP2010133983A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010133983A5 JP2010133983A5 JP2010057525A JP2010057525A JP2010133983A5 JP 2010133983 A5 JP2010133983 A5 JP 2010133983A5 JP 2010057525 A JP2010057525 A JP 2010057525A JP 2010057525 A JP2010057525 A JP 2010057525A JP 2010133983 A5 JP2010133983 A5 JP 2010133983A5
- Authority
- JP
- Japan
- Prior art keywords
- ray
- ray detector
- imaging
- detector
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims 17
- 238000003384 imaging method Methods 0.000 claims 16
- 238000001514 detection method Methods 0.000 claims 6
- 230000000875 corresponding Effects 0.000 claims 2
- 230000004044 response Effects 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000001678 irradiating Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Claims (8)
Ｘ線源と、
前記複数の検出面で撮像するためのＸ線検出器と、
前記複数の検出面に対応する各位置に前記Ｘ線検出器を移動するための検出器駆動手段と、
前記Ｘ線検査装置の動作を制御するための制御手段とを備え、
前記制御手段は、
各前記位置のうちの第１の位置に移動された前記Ｘ線検出器に、予め設定された撮像時間撮像させる画像取得制御手段と、
前記Ｘ線検出器が撮像している間、前記検査対象領域を透過するＸ線が前記Ｘ線検出器に入射するように、前記Ｘ線源にＸ線を照射させるＸ線源制御手段とを含み、
前記検出器駆動手段は、前記Ｘ線検出器による撮像の後に、各前記位置のうちの第２の位置に前記Ｘ線検出器を移動させる移動制御手段を含む、Ｘ線検査装置。 By receiving the X rays transmitted through the inspection target region of Target product at a plurality of detection surfaces, an X-ray examination apparatus for performing reconstruction processing of an image of the inspection area,
An X-ray source;
An X-ray detector for imaging on the plurality of detection surfaces;
Detector driving means for moving the X-ray detector to each position corresponding to the plurality of detection surfaces;
Control means for controlling the operation of the X-ray inspection apparatus,
The control means includes
The X-ray detector is moved to the first position of each of said positions, an image acquisition control means for imaging a preset imaging time,
While the X-ray detector is captured, so that the X-rays transmitted through the inspection target region are incident on the X-ray detector, and X-ray source control unit Ru is irradiated with X-rays to the X-ray source Including
The X-ray inspection apparatus , wherein the detector driving means includes movement control means for moving the X-ray detector to a second position among the positions after imaging by the X-ray detector .
前記第２のＸ線検出器の撮像後に前記第１のＸ線検出器が撮像している間、前記検出器駆動手段は、前記第２のＸ線検出器を次の撮像位置に移動させる、請求項１または２に記載のＸ線検査装置。 The X-ray detector includes a first X-ray detector and a second X-ray detector,
While the first X-ray detector is imaging after the second X-ray detector is imaged, the detector driving means moves the second X-ray detector to the next imaging position. The X-ray inspection apparatus according to claim 1 or 2.
前記制御手段は、
前記第２のＸ線検出器が前記次の撮像位置に移動されることに応答して、前記第１のＸ線検出器による撮像から得られたデータを、前記メモリに転送するための転送制御手段をさらに含む、請求項３に記載のＸ線検査装置。 The X-ray inspection apparatus further includes a memory,
The control means includes
Transfer control for transferring data obtained from imaging by the first X-ray detector to the memory in response to the second X-ray detector being moved to the next imaging position. The X-ray inspection apparatus according to claim 3, further comprising means.
Ｘ線を照射するステップと、
Ｘ線検出器が、前記複数の検出面で撮像するステップと、
前記複数の検出面に対応する各位置に前記Ｘ線検出器を移動するステップとを備え、
前記撮像するステップは、各前記位置のうちの第１の位置に移動された前記Ｘ線検出器が、予め定められた時間撮像するステップを含み、
前記照射するステップは、前記Ｘ線検出器が撮像している間、前記検査対象領域を透過するＸ線が前記Ｘ線検出器に入射するように前記Ｘ線源にＸ線を照射させるステップを含み、
前記移動するステップは、前記Ｘ線検出器による前記撮像後に、各前記位置のうちの第２の位置に前記Ｘ線検出器を移動するステップを含む、Ｘ線検査方法。 An X-ray inspection method for executing an image reconstruction process on an inspection target region by receiving X-rays emitted from an X-ray source and transmitted through the inspection target region of an object by a plurality of detection surfaces. And
Irradiating with X-rays;
An X-ray detector imaging with the plurality of detection surfaces;
Moving the X-ray detector to each position corresponding to the plurality of detection surfaces,
The step of imaging includes a step in which the X-ray detector moved to a first position among the positions captures a predetermined time,
The step of irradiation, while the X-ray detector is captured, a step of X-rays transmitted through the inspection target region is irradiated with X-rays to the X-ray source to be incident on the X-ray detector Including
Step, after the imaging by the X-ray detector, comprising a second step of moving the X-ray detector to the position of each of said positions, X-ray inspection method of the mobile.
前記移動するステップは、前記第２のＸ線検出器による撮像後に前記第１のＸ線検出器が撮像している間、前記第２のＸ線検出器を次の撮像位置に移動するステップを含む、請求項６に記載のＸ線検査方法。 The X-ray detector includes a first X-ray detector and a second X-ray detector,
The moving step includes a step of moving the second X-ray detector to the next imaging position while the first X-ray detector is imaging after imaging by the second X-ray detector. The X-ray inspection method according to claim 6, further comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010057525A JP5115574B2 (en) | 2010-03-15 | 2010-03-15 | X-ray inspection apparatus and X-ray inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010057525A JP5115574B2 (en) | 2010-03-15 | 2010-03-15 | X-ray inspection apparatus and X-ray inspection method |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007337572A Division JP5167810B2 (en) | 2007-12-27 | 2007-12-27 | X-ray inspection equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010133983A JP2010133983A (en) | 2010-06-17 |
| JP2010133983A5 true JP2010133983A5 (en) | 2012-10-11 |
| JP5115574B2 JP5115574B2 (en) | 2013-01-09 |
Family
ID=42345362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010057525A Active JP5115574B2 (en) | 2010-03-15 | 2010-03-15 | X-ray inspection apparatus and X-ray inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5115574B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024009572A1 (en) * | 2022-07-07 | 2024-01-11 | 富士フイルム株式会社 | Information processing device, information processing method, and information processing program |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11133200A (en) * | 1997-10-30 | 1999-05-21 | Nippon Telegr & Teleph Corp <Ntt> | X-ray scanning microscopic method and microscope |
| JPH11326242A (en) * | 1998-05-18 | 1999-11-26 | Matsushita Electric Ind Co Ltd | X-ray inspection device |
| JP2000046760A (en) * | 1998-05-29 | 2000-02-18 | Shimadzu Corp | X-ray tomographic surface inspection apparatus |
| JP2006162335A (en) * | 2004-12-03 | 2006-06-22 | Nagoya Electric Works Co Ltd | X-ray inspection device, x-ray inspection method and x-ray inspection program |
-
2010
- 2010-03-15 JP JP2010057525A patent/JP5115574B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2009254428A5 (en) | ||
| WO2011013164A1 (en) | Radiographic apparatus | |
| JP2008253555A5 (en) | ||
| JP2016538932A5 (en) | ||
| JP2012110472A5 (en) | ||
| US10219756B2 (en) | Radiography device, radiography method, and radiography program | |
| JP2005287773A5 (en) | ||
| JP2016533789A5 (en) | ||
| MX2016005047A (en) | X-ray system, in particular a tomosynthesis system and a method for acquiring an image of an object. | |
| JP2013220218A5 (en) | ||
| JP2006170876A (en) | Ct apparatus | |
| JP2013176468A (en) | Information processor and information processing method | |
| JP2011083499A5 (en) | ||
| KR102405926B1 (en) | HIGH-RESOLUTION COMPUTED TOMOGRAPHY USING EDGE-ON DETECTORS WITH TEMPORALLY OFFSET DEPTH-SEGMENTS | |
| JP5526062B2 (en) | Radiation imaging apparatus and defective pixel position information acquisition method | |
| JP2009156788A5 (en) | X-ray inspection device | |
| JP2012231905A5 (en) | ||
| RU2014123679A (en) | PREPARING IMAGES USING A C-TYPE FRAME WITH AN INCREASED ANGLE ANGLE GATEWAY | |
| JP2010133983A5 (en) | ||
| JP5049836B2 (en) | Radiography method | |
| JP2010133982A5 (en) | ||
| JP6058409B2 (en) | X-ray CT apparatus and program thereof | |
| JP2016036374A5 (en) | ||
| WO2013039032A1 (en) | X-ray examination device, x-ray examination device control method, program for controlling x-ray examination device, and storage medium for storing program | |
| WO2018002281A2 (en) | A cabinet x-ray system for imaging a specimen and associated method |