JP2010120103A - Vacuum generation system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make effective utilization of compressed air used for operating a vacuum generator. <P>SOLUTION: In a vacuum generation system 1, a vacuum generator 28 is installed in the rear stage of a vacuum generator 13 operated by the compressed air discharged from a compressor 11, and a tank 22 is installed between the vacuum generator 13 and the vacuum generator 28. The compressed air discharged from the vacuum generator 13 is accumulated in the tank 22. The vacuum generator 28 operates by using the compressed air accumulated in the tank 22. The compressor 11 is connected to the tank 22 through a passage 24 without using the vacuum generator 13. The compressed air is therefore supplied from the compressor 11 directly to the tank 22, so that the vacuum generator 28 is operated even during a period when the vacuum generator 13 is stopped. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a vacuum generation system that generates a vacuum using compressed air.

  Generally, the vacuum generator includes an inflow port, a nozzle, a diffuser, an exhaust port, and a vacuum port. The vacuum generator having such a configuration allows compressed air discharged from an air pressure source to flow into an inflow port, and the compressed air flowing in from the inflow port is squeezed with a nozzle to increase the flow rate, and the compressed air with an increased flow rate. Is discharged from the discharge port through the diffuser, and the pressure of the vacuum port is reduced by the high-speed flow of the compressed air, thereby generating a vacuum in the vacuum port.

  A vacuum generator is a device that connects a suction pad to a vacuum port and generates a suction force on the suction pad by generating a vacuum on the vacuum port, and grips and transports workpieces such as glass, wafers, and substrates. Has been applied.

  By the way, the compressed air discharged from the discharge port of the vacuum generator is normally released to the atmosphere. However, although this compressed air was used to operate the vacuum generator, it still has a lot of energy. Therefore, simply releasing this compressed air to the atmosphere is a waste of energy.

  Especially in factories that transport workpieces such as glass, wafers and substrates, multiple vacuum generators are often used, and the compressed air discharged from these vacuum generators is simply released to the atmosphere. A great deal of energy is wasted, which is not preferable.

  The present invention has been made in view of the above-described problems, for example, and an object of the present invention is to provide a vacuum generation system capable of effectively using compressed air.

  In order to solve the above problems, a first vacuum generation system according to the present invention flows in from an air pressure source, a first inflow port through which compressed air discharged from the air pressure source flows, and the first inflow port. A first vacuum generation having a first discharge port for discharging compressed air and a first vacuum port for generating a vacuum by the compressed air flowing from the first inflow port and discharged from the first discharge port , A first suction pad connected to the first vacuum port, a first tank for storing compressed air discharged from a discharge port of the first vacuum generator, and the first tank A second inflow port through which compressed air discharged from the second inflow port, a second exhaust port through which the compressed air is discharged through the second inflow port, and the second inflow port through the second inflow port. Excretion And it includes a second vacuum generator having a second vacuum port for generating a vacuum, and said second second suction pad that is connected to the vacuum port of the compressed air discharged from the port.

  In the above-described vacuum generation system of the present invention, it is desirable to provide a path for supplying the compressed air discharged from the air pressure source to the first tank without going through the first vacuum generator.

  In the above-described vacuum generation system of the present invention, it is preferable that a second tank for storing the compressed air discharged from the first tank is provided. In this case, the compressed air discharged from the first tank and accumulated in the second tank is caused to flow into the second inflow port.

  In the above-described vacuum generation system of the present invention, the compressed air discharged from the first tank is increased in the middle of the path for supplying the compressed air discharged from the first tank to the second tank. A pressure intensifier that pressurizes may be provided.

  In this case, the compressed air discharged from the first tank may be increased 10 to 20 times by the pressure intensifier.

  In the above-described vacuum generation system of the present invention, a third tank provided between the second vacuum port and the second suction pad, the third tank, and the second suction pad. And a switching valve that switches connection / disconnection between the third tank and the second suction pad.

  According to the present invention described above, the compressed air used for operating the first vacuum generator can be reused to operate the second vacuum generator, and the compressed air can be effectively used. it can.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 shows a first embodiment of the vacuum generation system of the present invention. In the vacuum generation system 1 in FIG. 1, the compressor 11 discharges compressed air.

  The switching valve 12 is a two-port two-position switching valve, and is provided between the compressor 11 and the vacuum generator 13 to switch connection / disconnection between the compressor 11 and the vacuum generator 13.

  The vacuum generator 13 is provided between the switching valve 12 and the tank 22 and generates a vacuum using the compressed air discharged from the compressor 11. The vacuum generator 13 includes an ejector 14 for generating a vacuum, a 2-port 2-position switching valve 15 for generating a vacuum, a 2-port 2-position switching valve 16 for breaking a vacuum, and a throttle for adjusting the flow rate of compressed air at the time of vacuum breaking. A valve 17 is provided. The ejector 14 is provided between the switching valve 12 and the tank 22. In addition, the ejector 14 flows into the inflow port 14A through which the compressed air discharged from the compressor 11 flows in, the discharge port 14B through which the compressed air flows in from the inflow port 14A, and the inflow port 14A flows into the discharge port 14B. A vacuum port 14C for generating a vacuum by compressed air is provided. A switching valve 15 for generating vacuum is provided between the switching valve 12 and the ejector 14. The vacuum breaking switching valve 16 is provided between the switching valve 12 and the connection point A. The connection point A is located in the middle of the path 19 between the vacuum port 14C of the ejector 14 and the suction pad 18. The throttle valve 17 is provided between the switching valve 16 and the connection point A.

  The suction pad 18 is connected to the tip of the path 19 connected to the vacuum port 14C of the ejector 14. The suction pad 18 generates a suction force by the vacuum generated in the vacuum port 14 </ b> C and grips the workpiece 20.

  The switching valve 21 is a 2-port 2-position switching valve provided between the vacuum port 14 </ b> C of the ejector 14 and the connection point A, and switches connection / disconnection between the vacuum port 14 </ b> C and the suction pad 18.

  The tank 22 is connected between the vacuum generator 13 and the vacuum generator 28, and accumulates compressed air discharged from the discharge port 14 </ b> B of the ejector 14 in the vacuum generator 13. The tank 22 includes a pressure sensor that detects the internal pressure, and includes a valve that discharges the internal compressed air to the atmosphere when the internal pressure becomes excessive.

  The check valve 23 is provided between the vacuum generator 13 and the tank 22 and prevents compressed air from flowing from the tank 22 to the vacuum generator 13.

  The path 24 connects between the compressor 11 and the tank 22, and supplies the compressed air discharged from the compressor 11 to the tank 22 without going through the vacuum generator 13.

  The regulator 25 is provided in the middle of the path 24, depressurizes the compressed air supplied from the compressor 11 to the tank 22 via the path 24, and reduces the pressure of the compressed air flowing into the tank 22 via the path 24 to a predetermined pressure ( Hereinafter, it is referred to as “replenishment air pressure”).

  The switching valve 26 is a 2-port 2-position switching valve, is provided in the middle of the path 24, and is disposed between the regulator 25 and the tank 22. The switching valve 26 switches connection / disconnection between the compressor 11 and the tank 22 via the path 24.

  The switching valve 27 is a 2-port 2-position switching valve and is provided between the tank 22 and the vacuum generator 28 and switches connection / disconnection between the tank 22 and the vacuum generator 28.

  The vacuum generator 28 is provided on the outflow side of the switching valve 27 and generates a vacuum using compressed air discharged from the tank 22. The vacuum generator 28 includes an ejector 29 for generating a vacuum, a 2-port 2-position switching valve 30 for generating a vacuum, a 2-port 2-position switching valve 31 for breaking a vacuum, and a throttle for adjusting a flow rate of compressed air at the time of the vacuum breaking. A valve 32 is provided. The ejector 29 is provided on the outflow side of the switching valve 27. In addition, the ejector 29 flows into the inflow port 29A through which the compressed air discharged from the tank 22 flows in, the discharge port 29B through which the compressed air flows in from the inflow port 29A, and the inflow port 29A flows into the discharge port 29B. A vacuum port 29C for generating a vacuum by compressed air is provided. The switching valve 30 for generating vacuum is provided between the switching valve 27 and the inflow port 29 </ b> A of the ejector 29. The vacuum break switching valve 31 is provided between the switching valve 27 and the connection point B. The connection point B is located in the middle of a path 35 between the vacuum port 29C of the ejector 29 and the suction pad 34. The throttle valve 32 is provided between the switching valve 31 and the connection point B. A silencer 33 is connected to the vacuum port 29C of the ejector 29.

  The suction pad 34 is connected to the tip of a path 35 connected to the vacuum port 29C of the ejector 29. The suction pad 34 generates a suction force by the vacuum generated in the vacuum port 29 </ b> C and grips the workpiece 36.

  The switching valve 37 is a two-port two-position switching valve provided between the vacuum port 29C of the ejector 29 and the connection point B, and switches connection / disconnection between the vacuum port 29C and the suction pad 34.

  In the vacuum generation system 1 having such a configuration, the switching valve 15 is switched to a position where the switching valve 12 and the inflow port 14A of the ejector 14 are connected, and the switching valve 16 is connected to the switching valve 12 and the connection point A. The switching valve 12 is switched to a position where the compressor 11 and the inflow port 14A of the ejector 14 are connected to drive the compressor 11, and the switching valve 21 is switched to the vacuum port 14C of the ejector 14. And a position where the suction pad 18 is connected. Thereby, the vacuum generator 13 operates. That is, the compressed air discharged from the compressor 11 flows into the inflow port 14A of the ejector 14 and is discharged from the discharge port 14B. Thereby, a vacuum is generated in the vacuum port 14 </ b> C, a suction force is generated in the suction pad 18, and the workpiece 20 can be gripped.

  Further, the compressed air discharged from the discharge port 14 </ b> C of the ejector 14 flows into the tank 22 through the check valve 23 and is accumulated in the tank 22.

  On the other hand, by switching the switching valve 26 to a position where the compressor 11 and the tank 22 are connected via the path 24, the compressed air discharged from the compressor 11 flows into the tank 22 via the path 24 and enters the tank 22. Accumulated. The pressure of the compressed air is reduced by the regulator 25 and adjusted to the supplementary air pressure.

  The compressed air discharged from the vacuum generator 13 or the compressed air supplied from the compressor 11 via the path 24 is accumulated in the tank 22, whereby the pressure in the tank 22 increases. Then, after the pressure in the tank 22 reaches a predetermined pressure (hereinafter referred to as “set pressure in the tank”), the switching valve 30 is connected to the switching port 27 and the inflow port 29A of the ejector 29. The switching valve 31 is switched to a position where the switching valve 27 and the connection point B are shut off, the switching valve 27 is switched to a position where the tank 22 and the inflow port 29A of the ejector 29 are connected, and the switching valve 37 is Then, the position is switched to a position where the vacuum port 29C of the ejector 29 and the suction pad 34 are connected. Thereby, the vacuum generator 28 operates. That is, the compressed air discharged from the tank 22 flows into the inflow port 29A of the ejector 29 and is discharged from the discharge port 29B. As a result, a vacuum is generated in the vacuum port 29 </ b> C, and a suction force is generated in the suction pad 34, so that the workpiece 36 can be gripped. The compressed air discharged from the discharge port 29B is released to the atmosphere via the silencer 33.

  In the vacuum generator 13, when the workpiece 20 gripped by the suction pad 18 is separated from the suction pad 18, the switching valve 16 is switched to a position where the switching valve 12 and the connection point A are connected. Thereby, the compressed air discharged from the compressor 11 is supplied to the path 19, the vacuum is broken, the suction force of the suction pad 18 is lost, and the workpiece 20 is separated from the suction pad 18. In the vacuum generator 28, when the workpiece 36 held by the suction pad 34 is separated from the suction pad 34, the switching valve 31 is switched to a position where the switching valve 27 and the connection point B are connected. Thereby, the compressed air discharged from the tank 22 is supplied to the path 35, the vacuum is broken, the suction force of the suction pad 34 is lost, and the workpiece 36 is separated from the suction pad 34.

  In the vacuum generation system 1, the pressure of the compressed air discharged from the compressor 11 is, for example, 0.5 MPa. The operating pressure of the ejector 14 is 0.5 MPa, for example. The pressure of the compressed air discharged from the vacuum generator 13 and flowing into the tank 22 is, for example, 0.02 MPa. The pressure (replenishment air pressure) of the compressed air flowing into the tank via the path 24 is 0.2 MPa, for example. The tank internal set pressure of the tank 22 is, for example, 0.2 MPa. The volume of the tank 22 is 24 L (liter), for example. The operating pressure of the ejector 29 is 0.2 MPa, for example.

  According to the vacuum generation system 1, the compressed air used for operating the vacuum generator 13 can be reused to operate the vacuum generator 28, and the compressed air can be effectively used.

  Further, the compressed air used for operating the vacuum generator 13 is accumulated in the tank 22, and the vacuum generator 28 is operated using the compressed air discharged from the tank 22, thereby operating the vacuum generator 28. It can be stabilized. That is, by storing the compressed air in the tank 22 until the predetermined pressure in the tank is reached, the pressure of the compressed air necessary for operating the vacuum generator 28, that is, the ejector 29, can be reliably ensured. Specifically, even when the pressure of the compressed air discharged from the vacuum generator 13 is small or when the operation of the vacuum generator 13 is stopped, the compressed air is accumulated in the tank 22 so that the inside of the tank A predetermined pressure can be ensured, and the pressure of compressed air necessary to operate the ejector 29 can be obtained. In addition, the pulsation of the compressed air discharged from the vacuum generator 13 can be removed by the tank 22.

  Further, by supplying the compressed air discharged from the compressor 11 through the path 24 to the tank 22 without going through the vacuum generator 13, even when the pressure of the compressed air discharged from the vacuum generator 13 is small or the vacuum is generated. Even when the vessel 13 stops operating, the compressed air can be reliably accumulated in the tank 22. Thereby, the operation of the vacuum generator 13 and the operation of the vacuum generator 28 can be made independent. For example, the operation timing of the vacuum generator 13 and the operation timing of the vacuum generator 28 can be made different from each other.

(Second Embodiment)
FIG. 2 shows a second embodiment of the vacuum generation system of the present invention. In the vacuum generation system 2 in FIG. 2, the same components as those in the vacuum generation system 1 in FIG.

  In the vacuum generation system 2 in FIG. 2, one end of the branch path 41 is connected to a connection point C located between the vacuum generation device 13 and the vacuum generation device 28 (specifically, between the check valve 23 and the switching valve 27). And the other end of the branch path 41 is connected to the tank 42. The tank 42 has the same configuration as the tank 22 in FIG. Also with the vacuum generation system 2 having such a configuration, it is possible to obtain the same effects as the vacuum generation system 1 in FIG.

(Third embodiment)
FIG. 3 shows a third embodiment of the vacuum generation system of the present invention. In the vacuum generation system 3 in FIG. 3, the same components as those in the vacuum generation system 1 in FIG.

  In the vacuum generation system 3 in FIG. 3, in the subsequent vacuum generation device 28, a tank 45 is provided in the middle of the path 35 between the vacuum port 29 </ b> C of the ejector 29 and the switching valve 37, and the vacuum port 29 </ b> C is provided. A check valve 46 is provided between the tank 45 and the tank 45.

  In the vacuum generation system 3 having such a configuration, the switching valve 27 and 30 connect the tank 22 and the ejector 29, and the switching valve 31 blocks the switching valve 27 and the connection point B. Compressed air discharged from the tank 22 is supplied to the ejector 29 in a state where the tank 45 and the suction pad 34 are blocked by 37. This compressed air flows in from the inflow port 29A of the ejector 29 and is discharged from the discharge port 29B, whereby a vacuum is generated in the vacuum port 29C, and the energy of this vacuum is accumulated in the tank 45. After the negative pressure in the tank 45 becomes larger than a predetermined negative pressure (hereinafter referred to as “in-tank set negative pressure”), the switching valve 37 is connected to the tank 45 and the suction pad 34. Switch to. As a result, a suction force is generated on the suction pad 34 and the workpiece 36 can be gripped.

  According to the vacuum generation system 3, by accumulating vacuum energy in the tank 45, it is possible to generate a stable suction force on the suction pad 34, and to reliably hold the workpiece 36. .

(Fourth embodiment)
FIG. 4 shows a fourth embodiment of the vacuum generation system of the present invention. In the vacuum generation system 4 in FIG. 4, the same components as those in the vacuum generation system 1 in FIG.

  In the vacuum generation system 4 in FIG. 4, a tank 51 that accumulates compressed air discharged from the tank 22 is provided between the tank 22 and the vacuum generator 28. Further, a 2-port 2-position switching valve 52 for switching connection / disconnection between the tank 22 and the tank 51 is provided between the tank 22 and the tank 51. Furthermore, a check valve 53 is provided between the switching valve 52 and the tank 51 to prevent the compressed air from flowing from the tank 51 toward the tank 22.

  In the vacuum generation system 4 having such a configuration, the switching valve 52 is placed at a position where the tank 22 and the tank 51 are connected with the switching valve 27 blocking the tank 51 and the vacuum generator 28. Switch. Thereby, the compressed air discharged from the tank 22 flows into the tank 51, and this compressed air is accumulated in the tank 51. After the pressure in the tank 51 exceeds a predetermined pressure (hereinafter referred to as “in-tank set pressure”) due to the inflow of compressed air, the switching valve is switched to a position where the tank 51 and the vacuum generator 28 are connected. Thereby, the compressed air discharged from the tank 51 is supplied to the vacuum generator 28, and the vacuum generator 28 can be operated by this compressed air.

  In the vacuum generation system 4, the pressure of the compressed air discharged from the compressor 11 is, for example, 0.5 MPa. The operating pressure of the ejector 14 is 0.5 MPa, for example. The pressure of the compressed air discharged from the vacuum generator 13 and flowing into the tank 22 is, for example, 0.02 MPa. The pressure (replenishment air pressure) of the compressed air flowing into the tank via the path 24 is 0.2 MPa, for example. The tank internal set pressure of the tank 22 is, for example, 0.2 MPa. The volume of the tank 22 is 24L, for example. The tank internal set pressure of the tank 51 is, for example, 0.2 MPa. The volume of the tank 51 is 5 L, for example. The operating pressure of the ejector 29 is 0.2 MPa, for example.

  According to the vacuum generation system 4, the compressed air necessary for operating the subsequent vacuum generator 28 can be reliably secured in the tank 51. That is, during the period in which the compressed air is sufficiently accumulated in the tank 22, a part of the compressed air in the tank 22 can be transferred to the tank 51, and sufficient compressed air can be stored in the tank 51. Thereby, the vacuum generator 28 can be operated only by the compressed air in the tank 51 regardless of the operating state of the vacuum generator 13 and the accumulated state of the compressed air in the tank 22. Therefore, the independence of the vacuum generator 28 with respect to the vacuum generator 13 and the tank 22 can be enhanced.

  Further, when the compressed air accumulated in the tank 22 is also used for an actuator (not shown) other than the vacuum generator 28, the tank 22 is used prior to the use of the compressed air by the other actuator. A portion of the compressed air accumulated in the tank can be secured in the tank 51 in advance, and the vacuum generator 28 can be operated regardless of the amount of compressed air used by other actuators.

(Fifth embodiment)
FIG. 5 shows a fifth embodiment of the vacuum generation system of the present invention. In the vacuum generation system 5 in FIG. 5, the same components as those in the vacuum generation system 1 in FIG. 1 or the vacuum generation system 4 in FIG.

  In the vacuum generation system 5 in FIG. 5, a pressure booster 55 is provided between the tank 22 and the tank 51 (specifically, between the switching valve 52 and the check valve 53). The booster 55 is, for example, a booster valve. The compressed air discharged from the tank 22 is increased in pressure by the pressure intensifier 55, flows into the tank 51, and is accumulated in the tank 51.

  In the vacuum generation system 5, the pressure of the compressed air discharged from the compressor 11 is, for example, 0.5 MPa. The operating pressure of the ejector 14 is 0.5 MPa, for example. The pressure of the compressed air discharged from the vacuum generator 13 and flowing into the tank 22 is, for example, 0.02 MPa. The pressure of the compressed air that flows into the tank via the path 24 (replenishment air pressure) is, for example, 0.1 MPa. The tank internal set pressure of the tank 22 is, for example, 0.1 MPa. The volume of the tank 22 is 24L, for example. The tank internal set pressure of the tank 51 is, for example, 0.4 MPa. The volume of the tank 51 is 5 L, for example. The pressure increase ratio of the pressure booster 55 is, for example, 1: 4. The operating pressure of the ejector 29 is 0.4 MPa, for example.

  According to the vacuum generation system 5, the compressed air discharged from the tank 22 is increased by the pressure intensifier 55. Thereby, even if the pressure of the compressed air accumulated in the tank 22 is lower than the operating pressure of the vacuum generator 28 at the subsequent stage, compressed air that satisfies the operating pressure of the vacuum generator 28 can be created. Further, by accumulating the compressed air increased in pressure by the pressure intensifier 55 in the tank 51, the operation of the vacuum generator 28 can be stabilized. Further, if a pressure increaser having a larger pressure increase ratio is used as the pressure increaser 55, a vacuum generator having a higher operating pressure can be used as the subsequent vacuum generator 28.

(Sixth embodiment)
FIG. 6 shows a sixth embodiment of the vacuum generation system of the present invention. In the vacuum generation system 6 in FIG. 6, the same components as those in the vacuum generation system 1 in FIG. 1 or the vacuum generation system 5 in FIG.

  The vacuum generation system 6 in FIG. 6 does not include any of the path 24, the regulator 25, and the switching valve 26 that are provided in the vacuum generation system 5 shown in FIG.

  In the vacuum generation system 6, the pressure of the compressed air discharged from the compressor 11 is 0.5 MPa, for example. The operating pressure of the ejector 14 is 0.5 MPa, for example. The pressure of the compressed air discharged from the vacuum generator 13 and flowing into the tank 22 is, for example, 0.02 MPa. The tank internal set pressure of the tank 22 is, for example, 0.02 MPa. The volume of the tank 22 is 24L, for example. The tank internal set pressure of the tank 51 is, for example, 0.12 MPa. The volume of the tank 51 is 5 L, for example. The pressure increase ratio of the pressure booster 55 is, for example, 1: 6. The operating pressure of the ejector 29 is, for example, 0.12 MPa.

  According to the vacuum generation system 6, the compressed air accumulated in the tank 22 is increased by the pressure intensifier 55, so that compressed air having a pressure that satisfies the operating pressure of the subsequent vacuum generator 28 can be generated. As described above, if the compressed air accumulated in the tank 22 can be increased by the pressure intensifier 55 to obtain compressed air having a pressure sufficient to operate the vacuum generator 28, the inside of the tank 22 can be obtained. The pressure of the compressed air accumulated in can be low. Accordingly, the compressed air supplied from the vacuum generator 13 is sufficient as the compressed air supplied to the tank 22. That is, the compressed air may not be supplied from the compressor 11 to the tank 22 without passing through the vacuum generator 13. Therefore, the vacuum generation system 6 can eliminate the path 24, the regulator 25, and the switching valve 26 provided in the vacuum generation system 5 shown in FIG. Therefore, the vacuum generation system 6 can reduce the number of parts as compared with the vacuum generation system 5 and can reduce the manufacturing cost.

(Seventh embodiment)
FIG. 7 shows a seventh embodiment of the vacuum generation system of the present invention. In the vacuum generation system 7 in FIG. 7, the same components as those in the vacuum generation system 1 in FIG. 1 or the vacuum generation system 6 in FIG.

  In the vacuum generation system 7 in FIG. 7, a pressure increaser 56 having a pressure increase ratio of 1:10 to 1:20 is provided instead of the pressure increaser 55 in the vacuum generation system 6 in FIG. 6.

  In the vacuum generation system 7, the pressure of the compressed air discharged from the compressor 11 is, for example, 0.5 MPa. The operating pressure of the ejector 14 is 0.5 MPa, for example. The pressure of the compressed air discharged from the vacuum generator 13 and flowing into the tank 22 is, for example, 0.02 MPa. The tank internal set pressure of the tank 22 is, for example, 0.02 MPa. The volume of the tank 22 is 24L, for example. The tank internal set pressure of the tank 51 is, for example, 0.2 to 0.4 MPa. The volume of the tank 51 is 5 L, for example. The operating pressure of the ejector 29 is, for example, 0.2 to 0.4 MPa.

  In the vacuum generation system 7, a pressure booster 56 having a pressure increase ratio of 1:10 to 1:20 is provided, and the compressed air discharged from the tank 22 is increased 10 to 20 times by the pressure booster 56. As a result, even if the pressure of the compressed air discharged from the former vacuum generator 13 is low, this pressure is greatly increased by the amplifier 56, and the latter vacuum generator 28 having a relatively high operating pressure is operated. Can do.

  In the vacuum generation system 1, 2, 3, 4, 5, 6, or 7, a plurality of vacuum generators may be provided in parallel between the compressor 11 and the tank 22. In the vacuum generation system 1, 3, 4, 5, 6, or 7, a plurality of vacuum generators may be provided in parallel behind the tank 22. In the vacuum generation system 2, a plurality of vacuum generators may be provided in parallel after the connection point C. Further, in the vacuum generation system 4, 5, 6, or 7, a plurality of vacuum generators may be provided in parallel behind the tank 51. Further, in the vacuum generation system 1, 2, 3, 4, 5, 6 or 7, another vacuum generator may be connected to the subsequent stage of the vacuum generator 28.

  Further, the present invention can be appropriately changed without departing from the gist or idea of the invention which can be read from the claims and the entire specification, and a vacuum generation system accompanied by such a change is also included in the technical idea of the invention. included.

1 is a circuit diagram showing a first embodiment of a vacuum generation system of the present invention. It is a circuit diagram which shows 2nd Embodiment of the vacuum generation system of this invention. It is a circuit diagram which shows 3rd Embodiment of the vacuum generation system of this invention. It is a circuit diagram which shows 4th Embodiment of the vacuum generation system of this invention. It is a circuit diagram which shows 5th Embodiment of the vacuum generation system of this invention. It is a circuit diagram which shows 6th Embodiment of the vacuum generation system of this invention. It is a circuit diagram which shows 7th Embodiment of the vacuum generation system of this invention.

Explanation of symbols

1, 2, 3, 4, 5, 6, 7 Vacuum generation system 11 Compressor 13 Vacuum generator (first vacuum generator)
14 Ejector 14A Inflow port (first inflow port)
14B discharge port (first discharge port)
14C vacuum port (first vacuum port)
18 Suction pad (first suction pad)
22, 42 tank (first tank)
24 path 28 vacuum generator (second vacuum generator)
29 Ejector 29A Inflow port (second inflow port)
29B Discharge port (second discharge port)
29C Vacuum port (second vacuum port)
34 Suction pad (second suction pad)
37 Switching valve 45 Tank (third tank)
51 tank (second tank)
55, 56 Booster

Claims (6)

A pneumatic source;
A first inflow port through which compressed air discharged from the air pressure source flows in, a first exhaust port through which compressed air flows in from the first inflow port, and an inflow through the first inflow port; A first vacuum generator having a first vacuum port for generating a vacuum with compressed air discharged from the first discharge port;
A first suction pad connected to the first vacuum port;
A first tank for storing the compressed air discharged from the discharge port of the first vacuum generator;
A second inflow port through which compressed air discharged from the first tank flows in, a second exhaust port through which the compressed air is discharged from the second inflow port, and an inflow from the second inflow port A second vacuum generator having a second vacuum port for generating a vacuum by compressed air discharged from the second discharge port;
A vacuum generation system comprising: a second suction pad connected to the second vacuum port.   The vacuum generation system according to claim 1, further comprising a path for supplying the compressed air discharged from the air pressure source to the first tank without passing through the first vacuum generator. A second tank for storing the compressed air discharged from the first tank;
3. The vacuum generation system according to claim 1, wherein compressed air discharged from the first tank and accumulated in the second tank flows into the second inflow port. 4.   The pressure booster for increasing the pressure of the compressed air discharged from the first tank is provided in the middle of a path for supplying the compressed air discharged from the first tank to the second tank. 4. The vacuum generation system according to 3.   5. The vacuum generation system according to claim 4, wherein the pressure intensifier increases the pressure of the compressed air discharged from the first tank by 10 to 20 times. A third tank provided between the second vacuum port and the second suction pad;
And a switching valve provided between the third tank and the second suction pad and configured to switch connection / disconnection between the third tank and the second suction pad. The vacuum generation system according to claim 1.

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