JP2010115650A - Method of correcting discharge pattern data - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To correct a discharge pattern data so that an observer hardly recognizes the drawing unevenness on a work as the whole. <P>SOLUTION: The discharge pattern data are corrected by calculating the imparting quantity of a functional liquid to be imparted to a plurality of virtual divided parts formed by dividing a drawing zone on the work matrix-like by drawing processing to make matrix data expressing the imparting quantity of the functional liquid to the plurality of the virtual divided parts respectively in multiple gradation, n-value-processing (n≥2) the matrix data to form n-value processed matrix data and performing at least one of: the decrease of the quantity of the functional liquid imparted to each virtual divided part where each n-value processed data of the n-value processed matrix data expresses "large" side of the imparted quantity of the functional liquid; and the increase of the quantity of the functional liquid imparted to each virtual divided part where each n-value processed data of the n-value processed matrix data expresses "small" side of the imparted quantity of the functional liquid. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to ejection pattern data correction for correcting ejection pattern data for performing drawing processing for selectively ejecting functional droplets from a plurality of nozzles of a functional droplet ejection head typified by an ink jet head to a workpiece. The present invention relates to a method, a discharge pattern data correction device, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  Conventionally, ink (functional liquid) is ejected from an ink ejection nozzle (nozzle) of an inkjet head (functional liquid droplet ejection head) to a color filter (work) in which a plurality of rows of colored portions are arranged, based on ejection pattern data. A droplet discharge device that performs a drawing process is known. Since the ink discharge amount is not uniform between the plurality of ink discharge nozzles, the color density of the colored portions in each row is detected and uniformed based on the color density in order to make the ink discharge amount uniform among the plurality of rows of colored portions. Thus, it is considered to correct the ink discharge density (discharge pattern data) for the colored portions of each column (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 10-315510

  However, in such a discharge pattern data correction method, since the ink discharge density differs between the colored portions of the plurality of rows, even if the ink discharge amount between the colored portions of the plurality of rows is equalized, the drawing is performed instead. It was a cause of unevenness. That is, since the colored portions having different ink discharge densities from the other colored portions are arranged in a row, when the color filter is observed as a whole, the colored portions in the row are recognized as stripe unevenness. It was.

  The present invention relates to a discharge pattern data correction method, a discharge pattern data correction device, a droplet discharge device, and an electro-optical device capable of correcting discharge pattern data so that an observer does not easily recognize drawing unevenness as a whole workpiece. It is an object to provide a method, an electro-optical device, and an electronic apparatus.

  The ejection pattern data correction method of the present invention selectively ejects functional liquid droplets from a plurality of nozzles of the functional liquid droplet ejection head based on the ejection pattern data while moving the functional liquid droplet ejection head relative to the workpiece. A discharge pattern data correction method for correcting discharge pattern data in order to eliminate unevenness of drawing during a landing drawing process, wherein the drawing process is performed on a plurality of virtual divided parts in which the drawing area on the work is divided into a matrix. A calculation step of calculating the amount of functional liquid applied by each of the above, a data generation step of generating matrix data expressing the amount of functional liquid applied to a plurality of virtual divided portions, respectively, and a matrix data n-value A gradation processing step for generating n-valued matrix data, and each n-valued data of the n-valued matrix data is a functional liquid. A decrease in the amount of functional liquid applied to each virtual divided portion representing the amount “large” side, and a function liquid corresponding to each virtual divided portion where each n-valued data of the n-valued matrix data represents the functional liquid applied amount “small” side And a data correction step of correcting the ejection pattern data so that at least one of the increase in the applied amount is performed.

  The ejection pattern data correction apparatus of the present invention selectively selects functional droplets from a plurality of nozzles of the functional droplet ejection head based on the ejection pattern data while moving the functional droplet ejection head relative to the workpiece. A discharge pattern data correction device for correcting discharge pattern data in order to eliminate drawing unevenness during a drawing process for discharging and landing on a substrate, wherein the storage means for storing the discharge pattern data and the drawing area on the workpiece are arranged in a matrix A calculation unit that calculates the amount of functional liquid applied to each of the plurality of divided virtual divided portions by drawing processing, and matrix data that expresses the amount of functional liquid applied to the plurality of virtual divided portions, respectively, in multiple gradations are generated. Data generation means, gradation processing means for generating n-valued matrix data by converting the matrix data into n-values, Decrease in the functional fluid application amount for each virtual divided portion in which each n-valued data of the valued matrix data represents the functional fluid application amount “large” side, and each n-valued data of the n-valued matrix data indicates the functional fluid application amount Data correction means for correcting the ejection pattern data is provided so that at least one of the increase in the amount of functional liquid applied to each virtual divided portion representing the “small” side is performed.

  According to these configurations, the matrix data based on the amount of functional liquid applied to each virtual divided portion is subjected to n-value processing, so that the corrected ejection pattern data appropriately increases the amount of functional liquid applied to each virtual divided portion and / Or to reduce. For example, when the functional liquid application amount is expressed in 10 stages from “0” (functional liquid application amount: large) to “9” (functional liquid application amount: small), matrix data is created and binarization processing is performed. In a region where the amount of functional liquid applied is large, the binarized data of some virtual divided portions is “0”. Then, in order to reduce the amount of functional liquid applied to the virtual divided portion, the amount of functional liquid applied is reduced as a whole area where the amount of applied functional liquid is large, and uneven drawing is eliminated as the entire work. For this reason, it is possible to correct the ejection pattern data so that the observer hardly recognizes the drawing unevenness as the entire work.

  In the above example, the binarization process has been described, but the gradation process need not be limited to binarization. Further, it is preferable to set the number of gradations of the n-valued matrix data based on the adjustable number of functional liquid discharge amounts per shot. For example, if the discharge amount of the functional liquid per shot can be divided into large, medium, and small, it is set to ternary or quaternary by adding the case of not discharging further.

  In the ejection pattern data correction method described above, it is preferable to generate n-valued matrix data by an n-valued process using any one of a threshold method, a systematic dither method, and an error diffusion method in the gradation processing step.

  According to this configuration, the matrix data can be appropriately converted into n-values by general and easy data processing. Note that it is more preferable to use the error diffusion method, and according to this, the apparent gradation can be improved as the area becomes rough, so that the drawing unevenness can be made more difficult to recognize.

  In these cases, prior to the calculation step, the method further includes a discharge amount measurement step of measuring a functional liquid discharge amount per unit shot discharged from a nozzle group including one or more nozzles corresponding to each virtual division site, In the calculating step, it is preferable to calculate the functional liquid application amount based on the measurement result of the functional liquid discharge amount and the discharge pattern data.

According to this configuration, matrix data can be generated without performing drawing processing by ejecting functional liquid droplets from the functional liquid droplet ejection head and measuring the functional liquid ejection amount. For this reason, the drawing process can be appropriately performed from the first work.
In addition, the functional liquid discharge amount is to measure the weight of functional droplets, measure the flying speed of functional droplets, measure the size of functional droplets during flight, measure the landing diameter of functional droplets that have landed, etc. It is preferable to measure.

  In these cases, prior to the calculation step, the method further includes an optical density measurement step for measuring the optical density at each virtual divided portion of the film forming unit by the functional liquid formed on the workpiece by the drawing process. It is preferable to calculate the functional liquid application amount based on the measurement result of the concentration.

According to this configuration, the functional liquid application amount is calculated based on the measurement result of the optical density of the film forming part formed on the workpiece. For this reason, matrix data can be accurately generated based on the actual drawing result.
Note that the optical density of the film forming unit is preferably measured by performing transmittance measurement, absorbance measurement, reflectance measurement, and the like.

  Further, in these cases, prior to the calculation step, the method further includes a film thickness measurement step for measuring the film thickness at each virtual divided portion of the film forming portion by the functional liquid formed on the workpiece by the drawing process. It is preferable to calculate the functional liquid application amount based on the measurement result of the thickness.

According to this configuration, the functional liquid application amount is calculated based on the measurement result of the film thickness of the film forming part formed on the workpiece. Based on the actual drawing result, the matrix data can be accurately generated.
In addition, as a measurement of the film thickness of a film-forming part, it is preferable to measure by a light interference method, a stylus method, etc.

  In these cases, the data correction step may correct the ejection pattern data so that the functional liquid application amount increases or decreases by increasing or decreasing the number of shots from each nozzle and / or increasing or decreasing the functional liquid discharge amount per shot. preferable.

  According to this configuration, it is possible to increase / decrease the amount of functional liquid applied to each virtual divided portion by simple control of increasing / decreasing the number of shots from each nozzle or increasing / decreasing the amount of functional liquid discharged per shot.

  The liquid droplet ejection apparatus according to the present invention includes a functional liquid droplet ejection head, moving means for moving the functional liquid droplet ejection head relative to the workpiece, and ejection pattern data corrected by the above-described ejection pattern data correction method. And a head control means for controlling each nozzle of the functional liquid droplet ejection head.

  According to this configuration, the drawing process is performed using the ejection pattern data corrected so that the observer cannot easily recognize the drawing unevenness as the entire work. For this reason, it is possible to provide a work in which the observer hardly recognizes the drawing unevenness.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed by a functional liquid on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film-forming portion made of a functional liquid is formed on a workpiece.

  According to these configurations, a high-quality electro-optical device can be manufactured by using the droplet discharge device that can perform the drawing process so that the observer can hardly recognize the drawing unevenness as the entire work. . As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

1 is a schematic plan view of a droplet discharge device according to an embodiment of the present invention. It is an external perspective view of a functional liquid droplet ejection head mounted on the liquid droplet ejection apparatus. It is the block diagram explaining the control system of the droplet discharge apparatus. It is a flowchart which shows the correction process of discharge pattern data. It is the figure which represented typically the drawing result by the ejection pattern data before correction | amendment. It is a figure which shows an example of multi-tone matrix data. It is a figure which shows an example of binarization matrix data. FIG. 6 is a diagram schematically illustrating a drawing result based on corrected ejection pattern data. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

  Hereinafter, an embodiment of a droplet discharge apparatus that performs a drawing process based on discharge pattern data corrected by a discharge pattern data correction method according to the present invention will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a production line for flat panel displays, and a color filter or an organic EL device for a liquid crystal display device by a printing technique (inkjet method) using a functional droplet discharge head which is an inkjet head. A light emitting element or the like to be each pixel is formed.

  As shown in FIG. 1, the droplet discharge device 1 is mounted on a machine base 2, a drawing device 3 that is widely mounted on the entire area of the machine base 2, and has a functional liquid droplet discharge head 17. And a maintenance device 4 attached to the drawing device 3. The maintenance device 4 performs maintenance processing (function maintenance / recovery) of the functional liquid droplet ejection head 17 and discharges a functional liquid onto the substrate W by the drawing device 3. The drawing operation to be performed is performed. Further, the liquid droplet ejection apparatus 1 is provided with an operation panel 5 for inputting various data, a controller 6 (see FIG. 3) for overall control of each part, and the like.

  The drawing apparatus 3 includes an XY moving mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, a carriage 14 that is movably attached to the Y-axis table 13, and a hanging structure on the carriage 14. And a head unit 15. The head unit 15 is equipped with a functional liquid droplet ejection head 17. On the other hand, the substrate W is mounted on the X-axis table 12 by a pair of substrate recognition cameras 18 (see FIG. 3) facing the end of the X-axis table 12. In the present embodiment, the single functional liquid droplet ejection head 17 is mounted, but the number thereof is arbitrary.

  The X-axis table 12 is directly supported on the machine base 2 and includes a motor-driven X-axis slider 21 that constitutes a drive system in the X-axis direction, a suction table 23, a substrate θ-axis table 24, and the like. It has a set table 22 movably mounted on the slider 21 and an X-axis linear scale 25 (see FIG. 3) for detecting the position of the set table 22 every moment.

  The Y-axis table 13 is supported by left and right support columns 27 erected on the machine base 2 and extends so as to straddle the X-axis table 12 and the maintenance device 4, and the carriage 14 is movably mounted thereon. The motor-driven Y-axis slider 26 that constitutes the drive system in the Y-axis direction, and the Y-axis linear scale 28 (see FIG. 3) for detecting the momentary movement position of the carriage 14 are provided.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 between the drawing area 91 positioned immediately above the X-axis table 12 and the maintenance area 92 positioned directly above the maintenance device 4. Move as appropriate. In other words, the Y-axis table 13 is used when performing the drawing operation on the substrate W introduced into the X-axis table 12, when the head unit 15 faces the drawing area 91 and the maintenance process of the functional liquid droplet ejection head 17 is performed. Causes the head unit 15 to face the maintenance area 92.

  The carriage 14 also has a head θ-axis table 31 that rotates the head unit 15 that is suspended in a horizontal direction by a motor drive by a minute amount in the horizontal plane (θ rotation), and a motor drive of the head unit 15 in the Z-axis direction (vertical direction). And a head Z-axis table 32 (see FIG. 3) to be moved slightly.

  As shown in FIG. 2, the functional liquid droplet ejection head 17 ejects a functional liquid by an ink jet method, and includes a functional liquid introduction unit 41 having two connection needles 42 and a side of the functional liquid introduction unit 41. Two head substrates 43 that are continuous with each other, and a head main body 44 that is connected to the lower side (upper side in the figure) of the functional liquid introduction portion 41 and in which an in-head flow path filled with the functional liquid is formed. . The connection needle 42 is connected to a functional liquid pack (not shown) via a liquid supply tube, and supplies the functional liquid to the in-head flow path of the functional liquid droplet ejection head 17.

The head main body 44 includes a pump unit 51 composed of a piezoelectric element or the like, and a nozzle plate 52 having a nozzle surface 53 in which two nozzle rows 54 are formed in parallel to each other.
Each nozzle row 54 is configured by arranging a plurality of nozzles 55 (for example, 180) at an equal pitch.

  Each nozzle row 54 is configured by arranging a plurality of (for example, 180) nozzles 55 at an equal pitch (for example, 141 μm). Both nozzle rows 54 are shifted from each other by a half pitch (70 μm) in the nozzle row direction. That is, the nozzle pitch by the two nozzle rows 54 is 70 μm.

  The head substrate 43 is provided with two series of connectors 56, and each connector 56 is connected to a head driver 111 (see FIG. 7) to be described later by a flexible flat cable. Then, a drive waveform is applied from the controller 6 to each pump unit 51 via the head driver 111, and functional droplets are ejected from each nozzle 55.

  The functional liquid discharge amount from each nozzle 55 can be adjusted to, for example, three levels of large, medium, and small by controlling the applied voltage value of the drive waveform. Note that due to the structure of the flow path in the head and the like, the ejection amount of the functional liquid from each nozzle 55 is not uniform among the plurality of nozzles 55 even if a drive waveform having the same voltage value is applied. Yes.

  The maintenance device 4 includes a suction unit 61 and a wiping unit 62 arranged on the drawing area 91 side in the Y-axis direction with respect to the suction unit 61 in the maintenance area 92. The suction unit 61 performs a suction process for sucking the functional liquid from the nozzle 55 of the functional liquid droplet ejection head 17, and the wiping unit 62 performs a wiping process for wiping the nozzle surface 53 of the functional liquid droplet ejection head 17 with the wiping sheet 81. Do.

  Next, with reference to FIG. 3, the control system of the entire droplet discharge device 1 will be described. The control system of the droplet discharge apparatus 1 basically includes an input unit 101 having an operation panel 5, an image recognition unit 102 having a substrate recognition camera 18 and recognizing an image of a substrate W, an X-axis linear scale 25, and the like. A movement detecting unit 103 having a Y-axis linear scale 28 for detecting the position of the set table 22 and the carriage 14 every moment, and a driving unit 104 having various drivers for driving the functional liquid droplet ejection head 17, the XY moving mechanism 11, and the like. And a control unit 105 (controller 6) that comprehensively controls the droplet discharge device 1 including these units.

  The drive unit 104 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 17 and a motor driver 112 that controls the respective motors of the XY moving mechanism 11. The head driver 111 generates and applies a predetermined drive waveform in accordance with an instruction from the control unit 105 and controls the ejection of the functional liquid droplet ejection head 17 (details will be described later). The motor driver 112 includes an X-axis motor driver 113, a Y-axis motor driver 114, a substrate θ-axis motor driver 115, a head θ-axis motor driver 116, and a head Z-axis motor driver 117, which are instructed by the control unit 105. Accordingly, the drive motors of the X axis table 12, the Y axis table 13, the substrate θ axis table 24, the head θ axis table 31, and the head Z axis table 32 are driven and controlled.

  The control unit 105 includes a CPU 121, a ROM 122, a RAM 123, and a P-CON 124, which are connected to each other via a bus 125. The ROM 122 has a control program area for storing a control program to be processed by the CPU 121, and a control data area for storing control data for performing drawing processing and image recognition.

  In addition to various register groups, the RAM 123 is a drawing data area for storing ejection pattern data for drawing processing, an image data area for temporarily storing image data, and correction data for correcting the position of the substrate W and each carriage 14. Is used as various work areas for control processing.

  The P-CON 124 is configured and incorporated with a logic circuit that complements the functions of the CPU 121 and handles interface signals with peripheral circuits. For this reason, the P-CON 124 fetches image data, various commands from the input unit 101 as they are or processes them into the bus 125, and interlocks with the CPU 121 to output data and control signals output from the CPU 121 and the like to the bus 125. Is output to the drive unit 104 as it is or after being processed.

  The CPU 121 inputs various detection signals, various commands, various data, etc. via the P-CON 124 according to the control program in the ROM 122, processes various data, etc. in the RAM 123, and then drives via the P-CON 124. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 104 and the like.

  For example, the control unit 105 controls the driving of the functional liquid droplet ejection head 17 based on the ejection pattern data so that the functional liquid droplets are selectively ejected from each nozzle 55. That is, first, ejection pattern data is sequentially extracted in correspondence with the position of the substrate W and the position of the head unit 15 detected by the X-axis linear scale 25 and the Y-axis linear scale 28. The ejected discharge pattern data is converted into a drive signal (drive waveform) for the functional liquid droplet ejection head 17 and then sent to the functional liquid droplet ejection head 17. Based on the drive signal, the pump unit 51 of the functional liquid droplet ejection head 17 is driven so that the functional liquid droplets are selectively ejected from the nozzles 55.

  The droplet discharge device 1 configured as described above appropriately performs maintenance processing on the functional droplet discharge head 17 by the maintenance device 4 and performs a drawing operation on the substrate W by the drawing device 3. That is, the drawing apparatus 3 moves the substrate W forward in the X-axis direction by the X-axis table 12 while being controlled by the controller 6, and drives the functional liquid droplet ejection head 17 in synchronism with the substrate W. A main scan is performed on. Then, after the head unit 15 is sub-scanned in the Y-axis direction by the Y-axis table 13, the substrate W is moved back in the X-axis direction, and the functional liquid droplet ejection head 17 is driven in synchronization therewith, and again. Perform main scanning. By repeating the main scanning accompanying the reciprocating motion of the substrate W and the sub-scanning of the head unit 15 a plurality of times, ejection (drawing) of functional liquid droplets is performed from end to end of the substrate W (drawing area Wd). .

  Next, with reference to FIGS. 4 to 8, the ejection pattern data correction process executed in the droplet ejection apparatus 1 will be described in detail. FIG. 5 is a diagram schematically showing a drawing result based on the ejection pattern data before correction. The drawing is darkly drawn in the upper and lower end regions of the drawing region Wd of the substrate W. As described above, since the functional liquid discharge amounts of the plurality of nozzles 55 of the functional liquid droplet ejection head 17 are not uniform, even if the functional liquid droplets are ejected from each nozzle 55 based on the ejection pattern data before correction, As shown in the figure, uneven drawing occurs. Therefore, the following ejection pattern data is corrected.

  In addition, the code | symbol P of a figure is the some virtual division site | part which divided the drawing area Wd of the board | substrate W in the matrix form set by the control part 105, and each virtual division site | part P is the functional liquid which landed on the board | substrate W. It is set to a size that approximately matches the landing diameter of the droplet. However, the setting of each virtual divided portion P is arbitrary, and for example, each pixel region 507a (see FIG. 10), which will be described later, formed on the substrate W may be set as each virtual divided portion P.

  First, although not shown in the figure, the discharge amount measuring device provided separately from the droplet discharge device 1 measures the functional liquid discharge amount per unit shot discharged from each nozzle 55 of the functional droplet discharge head 17 ( S11 of FIG. The discharge amount measuring device is equipped with a functional liquid droplet ejection head 17 for measurement, an ejection device for controlling the ejection of the functional liquid droplet ejection head 17, and the functional liquid droplet ejection head 17 to be ejected onto a receiving container. A weight measuring device that measures the weight of the functional droplet, and a calculation device that calculates the measurement result of the weight measuring device and calculates the functional liquid discharge amount per unit shot discharged from each nozzle 55. It is a thing. The measurement result of the functional liquid discharge amount obtained by this discharge amount measuring device is input through the operation panel 5 of the droplet discharge device 1.

  When each pixel region 507a is set to each virtual divided portion P, in the measurement of the functional liquid discharge amount, discharge is performed from a nozzle group including a plurality of nozzles 55 corresponding to each virtual divided portion P (each pixel region 507a). The amount of functional liquid discharged per unit shot is measured. That is, the functional liquid discharge amount of each nozzle 55 may be measured by weight, and the functional liquid discharge amount of each nozzle group may be calculated from the measurement result, or the functional liquid discharge amount may be measured by weight for each nozzle group.

  In the present embodiment, a measurement discharge amount measuring device is used separately from the droplet discharge device 1, but a weight measuring device may be provided in the droplet discharge device 1. In addition to measuring the weight of functional droplets, we image the functional droplets in flight (from being ejected from the nozzle 55 to landing on the workpiece) to measure the flying speed and size of the functional droplets, The functional liquid discharge amount may be measured by measuring the landing diameter of the functional liquid droplets that have landed on the inspection workpiece that has been surface-treated so as to make a predetermined contact angle.

  Subsequently, the control unit 105 performs a plurality of virtual divided portions P on the basis of the measurement result of the functional liquid discharge amount and the discharge pattern data before correction (the number of functional droplet shots for each virtual divided portion P). Then, the amount of functional liquid applied (applied) by the drawing process based on the ejection pattern data before correction is calculated (S12). Here, the functional liquid application amount is relatively “large” in the upper and lower end regions.

  Subsequently, the control unit 105 generates matrix data in which the functional liquid application amounts for the plurality of virtual divided portions P are expressed in multiple gradations (S13, see FIG. 6). Here, the functional liquid application amount is expressed in 10 levels from “0” (functional liquid application amount: large) to “9” (functional liquid application amount: small).

  Next, the control unit 105 binarizes the multi-tone matrix data to generate binarized matrix data (S14, see FIG. 7). Here, binarization (pseudo gradation processing) is performed by an error diffusion method using, for example, Floyd & Steinberg as a delay & attenuation filter. As a result, in the drawing area W, the binarized data of some of the virtual divided portions P is “0” in the areas on the upper and lower ends that are drawn darkly. In addition to the error diffusion method, a threshold method or a systematic dither method may be used as general and easy data processing. However, by using the error diffusion method, the apparent gradation can be improved as the area becomes rougher, so that the drawing unevenness can be made more difficult to recognize.

  Finally, the control unit 105 is configured so that the binarized data of the binarized matrix data is “0”, that is, the functional liquid application amount for each virtual divided portion P representing the functional liquid application amount “large” decreases. The ejection pattern data stored in the RAM 123 is corrected (S15). In other words, the ejection pattern data is corrected so that the functional liquid droplets from the nozzles 55 are not ejected at each virtual division site P for which the binarized data is “0”. As a result, the functional liquid application amount is reduced as a whole area on both the upper and lower ends where the functional liquid application amount is large, and the drawing unevenness is eliminated as the entire substrate W (drawing area Wd). In order to prevent missing dots, correction may be made so that small droplets having a smaller liquid volume than normal functional droplets are ejected instead of non-ejection. That is, a drive signal having a small applied voltage value may be generated.

  Based on the discharge pattern data corrected in this manner, the drawing process is performed by the droplet discharge device 1, so that each virtual divided portion P in which the binarized data is “0” is thinned out. Functional droplets can be ejected and landed on each of the other virtual divided portions P. Therefore, it is possible to provide the substrate W in which the observer hardly recognizes the drawing unevenness as a whole (see FIG. 8).

  Although the binarization process has been described in the above example, the gradation process need not be limited to binarization. For example, a quaternization process (functional liquid application amount large: “0” to functional liquid application amount small “3”) is performed, and the functional liquid application amount for each virtual divided portion P representing the functional liquid application amount “large” side is A small droplet was ejected from each nozzle 55 to each virtual divided portion P for which the quaternarization data was “1” so that the quaternization data was “0” so as to decrease in stages. Data correction may be performed on each virtual division site P so that the functional liquid droplets from each nozzle 55 are not ejected. Further, when the functional liquid discharge amount per shot can be divided into large, medium and small, the quaternary data may correspond to the functional liquid discharge amount per shot. That is, a large droplet is ejected when the quaternization data is “3”, a medium droplet is ejected when “2”, a small droplet is ejected when “1”, and “0”. In this case, data correction is performed so that no ejection occurs.

  Further, as described above, when each pixel region 507a is set to each virtual divided portion P, the number of shots for each virtual divided portion P whose binarized data is “0” is reduced. . For example, when the ejection pattern data before correction is for ejecting 50 functional droplets in total of 10 shots from 5 nozzles 55 to the virtual divided portion P, it is expressed as 1 nozzle 55. The correction is made so that a total of 49 shots are discharged.

  The ejection pattern data may be corrected such that each binarized data of the binarized matrix data increases the functional liquid application amount for each virtual divided portion P representing the functional liquid application amount “small”. The ejection pattern data may be corrected so that both the increase and decrease of the functional liquid application amount are performed.

  For example, contrary to the above example, when the functional liquid application amount is relatively “small” in the upper and lower end regions, “0” is set to “0” as the functional liquid application amount “ If the functional liquid application amount is expressed by using “small” and “9” as the functional liquid application amount “large”, the same multi-tone matrix data as described above can be obtained. Then, the binarization process is performed in the same manner, and the amount of functional liquid applied to each virtual divided portion P in which each binarized data of the binarized matrix data is “0” is increased (the liquid is larger than the normal functional liquid droplets). The ejection pattern data is corrected so that a large amount of large droplets is ejected. As a result, the functional liquid application amount is increased as the entire region on both the upper and lower ends where the functional liquid application amount is small, and the drawing unevenness is eliminated as the entire substrate W.

  Further, in the present embodiment, the functional liquid application amount is calculated based on the measurement result of the functional liquid discharge amount. However, a film formation portion (for example, colored layers 508R and 508G described later) formed by the functional liquid formed on the substrate W is used. 508B, see FIG. 10), the functional liquid application amount may be calculated based on the measurement result of the optical density or the film thickness in each virtual divided portion P.

  That is, a drawing process is performed on the substrate W in advance by the droplet discharge device 1 based on the discharge pattern data before correction, and a film forming unit is formed on the substrate W. After the drawing process, the substrate W is unloaded from the droplet discharge device 1, and the optical density or film thickness is measured by an optical density measuring device or film thickness measuring device (not shown). Then, based on the measurement result, the functional liquid application amount is calculated. Thereafter, in the same manner as described above, the ejection pattern data is corrected, and the next drawing process is performed.

  By doing in this way, multi-gradation matrix data can be accurately generated based on the actual drawing result. However, by measuring the functional liquid discharge amount as in this embodiment, multi-tone matrix data can be generated without performing the drawing process, and the drawing process is appropriately performed from the first work. be able to.

  In addition, as an optical density measuring apparatus, what was comprised by the transmittance | permeability measuring device, the light absorbency measuring device, or the reflectance measuring device can be used, for example. Moreover, as a film thickness measuring apparatus, for example, an optical interference type or a stylus type can be used. Of course, the droplet discharge device 1 may be provided with an optical density measuring device or a film thickness measuring device.

  As described above, according to the discharge pattern correction processing of the present embodiment, the corrected discharge pattern data is obtained by binarizing the multi-tone matrix data based on the amount of functional liquid applied to each virtual divided portion P. The amount of functional liquid applied to each virtual division site P is appropriately increased and / or decreased. For this reason, it is possible to correct the ejection pattern data so that the observer does not easily recognize the drawing unevenness as the entire substrate W.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing the manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 10B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 10C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 11 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 14 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 15, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 22 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed, the polar solvent contained in the first composition is evaporated, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 21, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 22, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 24 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 11 ... XY transfer mechanism 17 ... Functional droplet discharge head 55 ... Nozzle 105 ... Control part 111 ... Head driver P ... Virtual division | segmentation site | part W ... Substrate Wd ... Drawing area

Claims (11)

In the drawing process in which the functional droplet is selectively ejected and landed from the plurality of nozzles of the functional droplet ejection head according to the ejection pattern data while the functional droplet ejection head is moved relative to the work, the drawing unevenness A discharge pattern data correction method for correcting the discharge pattern data in order to eliminate the problem,
A calculation step of calculating a functional liquid application amount to be applied by the drawing process for a plurality of virtual division parts obtained by dividing the drawing area on the work in a matrix,
A data generation step of generating matrix data representing multi-tones of functional liquid application amounts for the plurality of virtual divided portions;
A gradation processing step of generating n-valued matrix data by converting the matrix data into n-values (n ≧ 2);
Each n-valued data of the n-valued matrix data reduces the functional liquid application amount for each virtual divided portion representing the functional liquid application amount “large” side, and each n-value conversion of the n-valued matrix data A data correction step of correcting the ejection pattern data so that at least one of the increase in the functional liquid application amount for each of the virtual divided portions representing the functional liquid application amount “small” side is performed;
An ejection pattern data correction method comprising:   The n-valued matrix data is generated in the gradation processing step by n-valued processing using any one of a threshold method, a systematic dither method, and an error diffusion method. Discharge pattern data correction method. Prior to the calculating step, the method further comprises a discharge amount measuring step of measuring a functional liquid discharge amount per unit shot discharged from a nozzle group including one or more nozzles corresponding to the virtual divided portions,
3. The ejection pattern data correction method according to claim 1, wherein, in the calculation step, the functional liquid application amount is calculated based on a measurement result of the functional liquid ejection amount and the ejection pattern data. . Prior to the calculating step, further comprising an optical density measuring step of measuring an optical density at each virtual divided portion of the film forming portion by the functional liquid formed on the workpiece by the drawing process,
3. The ejection pattern data correction method according to claim 1, wherein, in the calculation step, the functional liquid application amount is calculated based on a measurement result of the optical density. Prior to the calculating step, further comprising a film thickness measuring step of measuring a film thickness in each of the virtual divided portions of the film forming portion by the functional liquid formed on the workpiece by the drawing process,
The ejection pattern data correction method according to claim 1, wherein, in the calculation step, the functional liquid application amount is calculated based on a measurement result of the film thickness.   In the data correction step, the ejection pattern data is corrected so that the functional liquid application amount is increased or decreased by increasing or decreasing the number of shots from each nozzle and / or increasing or decreasing the functional liquid discharge amount per shot. 6. The ejection pattern data correcting method according to claim 1, wherein the ejection pattern data is corrected. In the drawing process in which the functional droplet is selectively ejected and landed from the plurality of nozzles of the functional droplet ejection head according to the ejection pattern data while the functional droplet ejection head is moved relative to the work, the drawing unevenness A discharge pattern data correction apparatus for correcting the discharge pattern data to eliminate the problem,
Storage means for storing the ejection pattern data;
A calculation means for calculating a functional liquid application amount to be applied by the drawing process for a plurality of virtual divided portions obtained by dividing the drawing area on the work in a matrix,
Data generating means for generating matrix data representing the multi-tone representation of the amount of functional liquid applied to the plurality of virtual divided portions;
Gradation processing means for generating n-valued matrix data by converting the matrix data into n-values (n ≧ 2);
Each n-valued data of the n-valued matrix data reduces the functional liquid application amount for each virtual divided portion representing the functional liquid application amount “large” side, and each n-value conversion of the n-valued matrix data Data correction means for correcting the ejection pattern data so that at least one of the increase in the functional liquid application amount for each of the virtual divided portions representing the functional liquid application amount “small” side is performed;
An ejection pattern data correction apparatus comprising: The functional liquid droplet ejection head;
Moving means for moving the functional liquid droplet ejection head relative to the workpiece;
Head control means for controlling each nozzle of the functional liquid droplet ejection head based on the ejection pattern data corrected by the ejection pattern data correction method according to claim 1;
A droplet discharge apparatus comprising:   9. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 8 is used to form a film-forming portion with a functional liquid on the workpiece.   An electro-optical device using the droplet discharge device according to claim 8, wherein a film forming portion made of a functional liquid is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 9 or the electro-optical device according to claim 10.

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