JP2010107413A - Shape-measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a shape-measuring device, having a structure in which a work having a through-hole can be mounted in a short time, in such a manner that the through-hole is parallel to the direction of a predetermined axis. <P>SOLUTION: This shape measuring device includes a rotating table 13a, that is formed in such a manner that a work 12 having a through-hole 12a can be mounted and can be rotated about an X axis and a Y axis; a light source 13b that radiates a light, from one side of the through-hole 12a in parallel to a Z axis, a CCD camera 18a, that is disposed at the other side of the through-hole 12a, receives the light from the light source 13b, passing through the through-hole 12a and measures a luminance based on the received light; and a control section 35 that controls the rotational angle of the work 12 rotated by the rotating table 13a, on the basis of the luminance measured by the CCD camera 18a. The control section 35 allows the CCD camera 18a, to make the luminance for each rotation of the work 12 by a predetermined angle measured, by using the rotary table 13a and sets a rotational angle of the rotating table 13a to an angle by which the luminance becomes maximum. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a shape measuring apparatus that measures the shape of a workpiece.

  In the contact-type shape measuring apparatus, a contact-type probe used for shape measurement has a bar-like stylus extending vertically downward and a contact provided at the lower end of the stylus. At the time of measurement, the stylus is scanned in the XYZ axis directions while maintaining its posture so that the contact is positioned in the vicinity of the work (object to be measured). The shape measuring device collects position information on the contact of the contact with the workpiece, and obtains the shape of the workpiece based on the position information.

  Since the contact type probe has the configuration as described above, when measuring the shape of the inner surface of the hole of the work, it is necessary that the work be placed so that the hole is parallel to the axis of the stylus. is there.

  Patent Document 1 discloses a method for leveling a workpiece. In the method described in Patent Document 1, the roundness of a workpiece is measured with a contact probe, and the workpiece is leveled based on the roundness. Here, for example, it is assumed that the workpiece has a through hole extending in a direction perpendicular to the horizontal plane. In such a case, simultaneously with the leveling by the above method, the through hole of the workpiece can be made parallel to the axis of the stylus.

JP 2001-201341 A

  However, in the method described in Patent Document 1, it is necessary to accurately measure the roundness, and much time is required for leveling the workpiece. In the method described in Patent Document 1, the workpiece to be measured is limited to a columnar shape in which the through hole is provided perpendicular to the horizontal plane.

  A method of measuring the mouth of the through hole with a contact probe without measuring the roundness and making the through hole parallel to the axis of the stylus is also conceivable, but the process takes a lot of time.

  The present invention has been made in view of such problems, and is configured so that a workpiece having a through hole can be placed in a short time so that the through hole is parallel to a predetermined axial direction. It aims at providing a measuring device.

  In order to achieve the above object, a shape measuring apparatus according to the present invention includes a stylus extending in parallel to a first axis and a contact provided at a tip of the stylus, and is used for contact between the contact and the workpiece. A shape measuring device for measuring the shape of the workpiece based on the rotary table configured to be capable of placing the workpiece having a through-hole and rotatable about an axis orthogonal to the first axis; and A light source that emits light in parallel to the first axis from one side of the through-hole, and light received from the light source that is disposed on the other side of the through-hole and passes through the through-hole. A light receiving unit that measures the brightness based on the light source, and a control unit that controls the rotation angle of the turntable based on the brightness measured by the light receiving unit. Each time it is rotated, The brightness is measured, the luminance and sets the rotation angle of the turntable to the angle the maximum by.

  With the above configuration, by setting the rotation angle of the turntable to an angle at which the luminance is maximized, the work can be arranged so that the through hole is parallel to the first axis direction.

  The turntable is configured to be rotatable around a second axis and a third axis that are orthogonal to the first axis, and the control unit is configured to move the workpiece around the second axis by the turntable. Each time the angle is rotated, the brightness is measured by the light receiving unit, the rotation angle around the second axis of the turntable is set to an angle at which the brightness is maximized, and then the work is moved by the turntable. It is good also as a structure which measures the said brightness | luminance by the said light-receiving part, and sets the rotation angle around the said 3rd axis | shaft of the said turntable to the angle where the said brightness | luminance becomes the maximum whenever it rotates around a 3rd axis | shaft by the predetermined angle. .

  Further, the turntable is configured to be rotatable around a second axis and a third axis orthogonal to the first axis, and the control unit is a second unit that represents a rotation angle around the second axis. In order to draw a spiral trajectory on a rotation angle plane that is represented by an angle axis and a third angle axis that is represented to be orthogonal to the second angle axis and that represents a rotation angle around the third axis, Each time the workpiece is rotated around the second axis and the third axis by a predetermined angle by the turntable, the brightness is measured by the light receiving unit, and the brightness of the turntable is set to an angle at which the brightness is maximized. It is good also as a structure which sets the rotation angle around 1 axis | shaft and the said 2nd axis | shaft.

  ADVANTAGE OF THE INVENTION According to this invention, the shape measuring apparatus comprised so that mounting of the workpiece | work which has a through-hole in a short time so that the through-hole might become parallel to a predetermined-axis direction can be provided.

  Hereinafter, preferred embodiments of a shape measuring apparatus according to the present invention will be described with reference to the accompanying drawings.

[First Embodiment]
(Configuration of the shape measuring apparatus according to the first embodiment)
FIG. 1 is a perspective view showing the overall configuration of a shape measuring apparatus (three-dimensional measuring apparatus) according to the present embodiment. This shape measuring apparatus includes a non-contact type measuring machine main body 1, a computer system 2 that drives and controls the measuring machine main body 1 and executes necessary data processing, and a printer 3 that prints out measurement results. Has been.

  The measuring machine main body 1 is configured as follows. In other words, a measurement table 13 is mounted on the gantry 11, and this measurement table 13 is driven in the Y-axis direction by a Y-axis drive mechanism (not shown). Support arms 14 and 15 extending upward are fixed to the center of both side edges of the gantry 11, and an X-axis guide 16 is fixed so as to connect both upper ends of the support arms 14 and 15. An imaging unit 17 is supported on the X-axis guide 16. The imaging unit 17 is driven along the X-axis guide 16 by an X-axis drive mechanism (not shown). A CCD camera 18 a is attached to the lower end of the imaging unit 17 so as to face the measurement table 13. In addition to the illumination device and the focusing mechanism (not shown), the imaging unit 17 includes a Z-axis drive mechanism that moves the position of the CCD camera 18a in the Z-axis (first axis) direction, and the CCD camera 18a at the shooting position. A position sensor 19 for detecting the position in the Z direction is incorporated.

  Further, a contact type probe unit 18 b is provided below the imaging unit 17. FIG. 2 is a schematic enlarged view of the vicinity of a rotary table 13a described later. As shown in FIG. 2, the contact probe unit 18b has a rod-like stylus 18ba extending in parallel with the Z-axis direction, and a contact 18bb provided at the lower end of the stylus 18ba. The contact type probe unit 18b is configured to be able to move the stylus 18ba and the contact 18bb in the X axis-Y axis-Z axis. The contact-type probe unit 18b acquires the position information when the contact 18bb contacts the workpiece 12.

  As shown in FIG. 2, the measurement table 13 includes a light source 13 b that irradiates light upward in parallel with the Z-axis direction. For example, the measurement table 13 is a transparent or translucent housing that transmits light, and the light source 13 b is provided inside the table 13.

  As shown in FIG. 2, the workpiece 12 is attached to a rotary table 13 a placed on the stage 13. The workpiece 12 has a cylindrical shape and has a through hole 12a at the center thereof.

  The turntable 13a is configured such that the work 12 can be attached to the upper surface thereof. The turntable 13a is configured to be rotatable around the X axis and the Y axis that are orthogonal to the Z axis. That is, the rotary table 13a is configured to rotate the work 12 attached to the upper surface thereof and to be inclined with respect to the XY plane. The operation of the rotary table 13a is performed according to the control of a CPU (control unit) 35 described later. The rotary table 13a is configured to be transparent or translucent, for example, and configured to transmit light from the light source 13b.

  As shown in FIG. 2, the light transmitted through the rotary table 13 a is irradiated onto the CCD camera 18 a through the through hole 12 a of the workpiece 12. The CCD camera 18a includes an optical system 18aa and a light receiving element 18ab that receives light via the optical system 18aa.

  As shown in FIG. 1, the computer system 2 includes a computer main body 21, a keyboard 22, a joystick box (hereinafter referred to as J / S) 23, a mouse 24, and a CRT 25. The computer main body 21 is configured as shown in FIG. 3, for example. That is, the image information of the workpiece 12 input from the CCD camera 18 a is stored in the image memory 32 via the interface (hereinafter referred to as I / F) 31.

  The CAD data of the workpiece 12 created by a CAD system (not shown) is input to the CPU (control unit) 35 via the I / F 33 when, for example, offline teaching using CAD data is executed. The image information is stored in the image memory 32. The image information stored in the image memory 32 is displayed on the CRT 25 via the display control unit 36.

  On the other hand, code information and position information input from the keyboard 22, J / S 23, and mouse 24 are input to the CPU 35 via the I / F 34. The CPU 35 performs the measurement execution process, the through-hole vertical according to various control programs such as a macro program stored in the ROM 37 and a measurement execution program stored in the RAM 40 via the I / F 39 from the HDD 38 and a through-hole vertical extraction execution program. Execute the dispensing process.

  Here, the vertical alignment process of the through hole means a process of arranging the work 12 so that the through hole 12a of the work 12 is parallel to the Z axis (vertical direction).

  The CPU 35 controls the measuring instrument main body 1 (the imaging unit 17 and the contact probe unit 18b) via the I / F 41 according to the measurement execution process. The CPU 35 controls the rotary table 13a via the I / F 42 in accordance with the through hole vertical alignment process. The CPU 35 controls the rotation angle of the turntable 13a based on the luminance measured by the imaging unit 17 (CCD camera 18a). The CPU 35 causes the imaging unit 17 (CCD camera 18a) to measure the luminance each time the work 12 is rotated by a predetermined angle by the rotary table 13a, and sets the rotation angle of the rotary table 13a to an angle at which the luminance becomes maximum.

  The HDD 38 is a recording medium that stores various control programs such as CAD data, a measurement execution program, and a through hole vertical extraction execution program. The RAM 40 stores various programs and provides a work area for various processes. The CPU 35 executes various processes according to various control programs stored in the HDD 38.

(Vertical exit processing of the through hole of the shape measuring apparatus according to the first embodiment)
Next, with reference to FIG. 4 to FIG. 7, a description will be given of vertical through-hole processing by the shape measuring device (three-dimensional measuring device). FIG. 4 is a flowchart showing a process of vertically extending the through hole. FIG. 5 is a diagram illustrating a rotation angle around the X axis and a rotation angle around the Y axis of the turntable 13a according to the vertical alignment processing of the through hole. 6 and 7 are diagrams showing scanning times around the X-axis and around the Y-axis and the corresponding luminances related to the through-hole vertical alignment processing. It is assumed that the rotation angle around the X axis and the Y axis of the turntable 13a is set to the origin (0 °, 0 °) before the through hole vertical alignment processing is executed.

  First, as shown in FIG. 5, the control unit 35 rotates the rotation angle of the rotary table 13a around the X axis by the initial angle −θ1 (step S101). Subsequently, the control unit 35 rotates the rotation angle of the rotary table 13a around the X axis by + φ1 (step S102). Next, the control unit 35 receives the light transmitted through the through hole 12a of the workpiece 12 by the imaging unit 17 (CCD camera 18a), and transmits luminance information Dxk (k = 1 to n) based on the received light to the HDD 38. (Step S103). Subsequently, the control unit 35 determines whether or not the rotation of the rotary table 13a around the X axis over a predetermined range has been completed (step S104). For example, as shown in FIG. 5, if the rotation angle around the X axis is the final angle + θ1, the control unit 35 determines that the rotation around the X axis over a predetermined range has been completed.

  In step S104, when it is determined that the rotation of the rotary table 13a around the X axis over the predetermined range is not completed (step S104, N), the control unit 35 repeatedly executes the processing from step S102 again. On the other hand, when the control unit 35 determines that the rotation of the turntable 13a around the X axis over the predetermined range has been completed (step S104, Y), the control unit 35 determines the rotation angle around the X axis of the turntable 13a that has received the maximum luminance. The X-axis luminance maximum angle Xrot1 shown is specified (step S105). For example, the luminance information Dxk (k = 1 to n) with respect to the scanning time around the X axis of the rotary table 13a has one peak over the rotation angles −θ1 to + θ1 around the X axis as shown in FIG. It becomes a shape. The rotation angle around the X-axis at the peak is the X-axis luminance maximum angle Xrot1.

  Subsequently, as shown in FIG. 5, the control unit 35 sets the rotation angle around the X axis of the rotary table 13a to the X axis luminance maximum angle Xrot1 (step S106).

  Subsequent to step S106, the control unit 35 rotates the rotation angle around the Y axis of the turntable 13a by the initial angle −θ2 as shown in FIG. 5 (step S107). Subsequently, the control unit 35 rotates the rotation angle around the Y axis of the turntable 13a by + φ2 (step S108). Next, the control unit 35 causes the imaging unit 17 (CCD camera 18a) to receive the light transmitted through the through hole 12a of the workpiece 12, and the luminance information Dyk (k = 1 to n) based on the received light is stored in the HDD 38. (Step S109). Subsequently, the control unit 35 determines whether or not the rotation of the turntable 13a around the Y axis over a predetermined range has been completed (step S110). For example, as shown in FIG. 5, if the rotation angle around the Y axis of the turntable 13a is the final angle + θ2, the control unit 35 determines that the rotation around the Y axis over a predetermined range has been completed.

  In step S109, when it is determined that the rotation of the rotary table 13a around the Y axis over the predetermined range is not completed (step S110, N), the control unit 35 repeatedly executes the processing from step S108 again. On the other hand, if the control unit 35 determines that the rotation of the rotary table 13a around the Y axis has been completed (step S110, Y), the Y axis luminance indicating the rotation angle around the Y axis of the rotary table 13a that has received the maximum luminance. The maximum angle Yrot is specified (step S111). For example, the luminance information Dyk (k = 1 to n) with respect to the scanning time around the Y axis has a shape having one peak over the rotation angles −θ2 to + θ2 around the Y axis, as shown in FIG. The rotation angle around the Y-axis at the peak is the Y-axis luminance maximum angle Yrot1.

  Subsequently, as shown in FIG. 5, the control unit 35 sets the rotation angle around the Y-axis of the turntable 13a to the Y-axis luminance maximum angle Yrot1 (step S112). The through-hole 12a of the workpiece 12 is parallel to the Z-axis at the X-axis brightness maximum angle Xrot1 and the Y-axis brightness maximum angle Yrot1 set in Step S106 and Step S112. With the above, the control unit 35 ends the through hole vertical extraction process by the shape measuring apparatus of the first embodiment.

  To summarize the above steps S101 to S112, the control unit 35 causes the imaging unit 17 (CCD camera 18a) to measure the luminance each time the work 12 is rotated about the X axis by a predetermined angle by the rotary table 13a. The rotation angle around the X axis of the turntable 13a is set to the maximum angle Xrot1. After that, the control unit 35 causes the imaging unit 17 (CCD camera 18a) to measure the luminance each time the workpiece 12 is rotated around the Y axis by a predetermined angle by the rotary table 13a, and rotates to the angle Yrot1 at which the luminance is maximized. The rotation angle around the Y axis of the table 13a is set.

  After the through-hole vertical alignment process is completed, the control unit 35 measures the shape of the inner diameter of the through-hole 12a of the workpiece 12 using the contact probe unit 18b.

(Effects of the shape measuring apparatus according to the first embodiment)
Next, the effect of the shape measuring apparatus according to the first embodiment will be described. The shape measuring apparatus according to the first embodiment can make the through hole 12a of the work 12 parallel to the Z axis based on the luminance information of the light transmitted through the through hole 12a of the work 12. Therefore, since the shape measuring apparatus according to the first embodiment does not need to use the contact probe unit 18b for the vertical exit processing of the through hole, the processing can be executed in a short time. Moreover, the workpiece | work 12 should just have a through-hole, and the shape measuring apparatus which concerns on 1st Embodiment can perform the vertical extraction process of a through-hole corresponding to the workpiece | work of various shapes. Furthermore, since the shape measuring apparatus according to the first embodiment does not need to use the contact type probe unit 18b in the vertical exit processing of the through hole, there is no possibility that the contact type probe unit 18b and the workpiece 12 are damaged.

  In the first embodiment described above, the rotation angle around the X axis of the rotary table 13a is set to the angle Xrot1 at which the measured brightness is maximized each time the work 12 is rotated around the X axis by a predetermined angle. The rotation angle around the Y axis of the rotary table 13a is set to the angle Yrot1 at which the measured brightness is maximized each time the is rotated about the Y axis by a predetermined angle. The angle at which the measured brightness is maximized every time it is rotated is specified, and the surrounding angle including the specified angle is measured again every time it is rotated around the X axis by a predetermined angle, and the measured brightness is maximized. The rotation angle around the X axis is set as the angle, and then the angle at which the measured brightness is maximized every time the work 12 is rotated around the Y axis by a predetermined angle is specified. As the luminance was measured for each of rotating by a predetermined angle about re Y axis for peripheral angle, measured luminance may be set a rotation angle around the Y axis to an angle of maximum including. That is, the measurement around the X axis (steps S102 to S105) is performed a plurality of times while narrowing the angle range, and the rotation angle around the X axis is set to the angle at which the maximum luminance was obtained when the measurement was last performed. The measurement (steps S108 to S111) may be performed a plurality of times while narrowing the angle range, and the rotation angle around the Y axis may be set to the angle at which the maximum luminance was obtained when the last measurement was performed. If comprised in this way, the through-hole 12a of the workpiece | work 12 can be made parallel to a Z-axis with still higher precision. Note that only one of the measurement around the X axis and the measurement around the Y axis may be executed a plurality of times.

  In the first embodiment described above, both the X axis and the Y axis are measured. However, only one of them may be measured. Even in the case of such a configuration, depending on the type of the workpiece 12, vertical projection can be performed with sufficient accuracy.

[Second Embodiment]
(Vertical exit processing of the through hole of the shape measuring apparatus according to the second embodiment)
Next, with reference to FIG. 8 to FIG. 10, a description will be given of the vertical exit processing of the through hole of the shape measuring apparatus according to the second embodiment. FIG. 8 is a flowchart showing the vertical exit processing of the through hole of the shape measuring apparatus according to the second embodiment. FIG. 9 is a diagram illustrating a rotation angle around the X axis and a rotation angle around the Y axis of the turntable 13a according to the vertical alignment processing of the through hole. FIG. 10 is a diagram showing scanning times around the X axis and Y axis of the rotary table 13a related to the vertical alignment processing of the through holes, and the luminance corresponding thereto. It is assumed that the rotation angle around the X axis and the Y axis of the turntable 13a is set to the origin (0 °, 0 °) before the through hole vertical alignment processing is executed.

  In the shape measuring apparatus according to the second embodiment, the configuration is the same as that of the first embodiment, and the vertical exit processing of the through hole is different from the processing of the first embodiment. In the second embodiment, the description of the same configuration and processing as those in the first embodiment is omitted.

  First, as shown in FIG. 9, the control unit 35 rotates the rotation angle around the X axis of the rotary table 13a by the initial angle + θ31 (step S201).

  Next, the control unit 35 rotates the rotation angle around the X axis and the rotation angle around the Y axis of the rotary table 13a by a predetermined angle so as to draw a spiral locus on the rotation angle plane as shown in FIG. (Step S202). Here, the rotation angle plane is an X angle axis representing the rotation angle around the X axis of the turntable 13a and a Y angle axis representing the rotation angle around the Y axis and representing the rotation angle around the X angle axis. Indicates the surface to be constructed.

  Subsequently, the control unit 35 receives the light transmitted through the through hole 12a of the workpiece 12 by the imaging unit 17 (CCD camera 18a), and transmits the luminance information Dxyk (k = 1 to n) based on the received light to the HDD 38. To store. Next, the control unit 35 determines whether or not the rotation of the rotary table 13a around the X axis and the Y axis is completed over a predetermined range (step S204). For example, in step S204, as shown in FIG. 9, when the rotation angle around the X axis of the rotary table 13a is + θ32 and the rotation angle around the Y axis is 0 °, the control unit 35 turns around the X axis, And it is determined that the rotation around the Y axis is completed.

  Here, when the control unit 35 determines that the rotation around the X axis and the Y axis of the turntable 13a over the predetermined range is not completed (step S204, N), the process from step S202 is repeated again. . On the other hand, when the control unit 35 determines that the rotation about the X axis and the Y axis of the turntable 13a over the predetermined range is completed (step S204, Y), the X axis of the turntable 13a receiving the maximum luminance is received. The biaxial maximum luminance angles (Xrot2, Yrot2) indicating the rotation angles around and around the Y axis are specified (step S205). For example, the luminance information Dxyk (k = 1 to n) with respect to the scanning time around the X axis and around the Y axis is, as shown in FIG. 10, rotation angles (+ θ31, 0) to (+ θ32, around the X axis and Y axis). 0) over a plurality of peaks. The rotation angles around the X-axis and the Y-axis having the maximum luminance, which is one of the peaks, are the two-axis luminance maximum angles (Xrot2, Yrot2).

  Subsequently, as shown in FIG. 9, the control unit 35 sets the rotation angles around the X axis and the Y axis to the maximum biaxial luminance angles (Xrot2, Yrot2) (step S206). The through hole 12a of the workpiece 12 is parallel to the Z axis at the maximum biaxial luminance angle (Xrot2, Yrot2) set in step S206. Thus, the control unit 35 ends the through hole vertical extraction process by the shape measuring apparatus of the second embodiment.

  To summarize the above steps S201 to S206, the control unit 35 rotates the work 12 about the X axis and the Y axis by a predetermined angle by the rotation table 13a so as to draw a spiral locus on the rotation angle plane. Then, the luminance is measured by the imaging unit 17 (CCD camera 18a), and the rotation angles around the X axis and the Y axis of the rotary table 13a are set to angles (Xrot2, Yrot2) at which the luminance is maximized.

  After the through-hole vertical alignment process is completed, the control unit 35 measures the shape of the inner diameter of the through-hole 12a of the workpiece 12 using the contact probe unit 18b.

(Effects of the shape measuring apparatus according to the second embodiment)
Next, the effect of the shape measuring apparatus according to the second embodiment will be described. The shape measuring apparatus according to the second embodiment can make the through hole 12a of the work 12 parallel to the Z axis based on the luminance of the light transmitted through the through hole 12a of the work 12, as in the first embodiment. . Furthermore, the shape measuring apparatus according to the second embodiment rotates the rotation angle around the X axis and the rotation angle around the Y axis to a predetermined angle so as to draw a spiral trajectory on the rotation angle plane. The maximum luminance angle (Xrot2, Yrot2) is obtained. Therefore, the shape measuring apparatus according to the second embodiment can execute the vertical exit processing of the through hole with higher accuracy than the first embodiment.

[Third Embodiment]
Next, with reference to FIG. 11, a description will be given of the vertical exit processing of the through hole of the shape measuring apparatus according to the third embodiment. In the shape measuring apparatus according to the third embodiment, the configuration is the same as in the first and second embodiments, and the vertical exit processing of the through hole is different from the processing in the first and second embodiments. Note that in the third embodiment, a description of the same configurations and processes as those in the first and second embodiments is omitted.

  In 3rd Embodiment, as shown in FIG. 11, the control part 35 performs the process (step S101-step S112) based on 1st Embodiment, after performing the process (step S201-step S206) which concerns on 2nd Embodiment. ).

(Effects of the shape measuring apparatus according to the third embodiment)
In the shape measuring apparatus according to the third embodiment, the control unit 35 executes the processes of the first embodiment and the second embodiment. Therefore, the shape measuring apparatus according to the third embodiment can perform the vertical exit processing of the through hole with higher accuracy than in the first and second embodiments.

[Other embodiments]
As described above, the embodiment has been described using the shape measuring apparatus as an example. However, the present invention is not limited to the above embodiment, and various modifications, additions, substitutions, and the like are possible without departing from the spirit of the invention. It is. For example, the workpiece 12 in the present embodiment is not limited to a cylindrical shape. For example, as shown in FIG. 12, it can be applied to a work 12b having a cap shape and having a through hole 12c. In this case, an optical fiber 13c is used instead of the light source 13b. That is, the tip of the optical fiber 13c may be disposed inside the cap-shaped workpiece 12b so that the light from the tip of the optical fiber 13c is irradiated to the imaging unit 17 (CCD camera 18a).

It is a perspective view which shows the structure of the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a schematic enlarged view of the vicinity of the turntable 13a shown in FIG. It is a block diagram which shows the structure of the computer main body 21 in the image measuring device which concerns on 1st Embodiment of this invention. It is a flowchart which shows the vertical extraction process of the through-hole of the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows the rotation angle around the X-axis of the rotary table 13a and the rotation angle around the Y-axis in the vertical alignment process of the through hole of the shape measuring apparatus according to the first embodiment of the present invention. It is a figure which shows the brightness | luminance in the scanning time around the X-axis of the turntable 13a which concerns on the vertical extraction process of the through-hole of the shape measuring apparatus which concerns on 1st Embodiment of this invention, and the scanning time. It is a figure which shows the brightness | luminance in the scanning time around the Y-axis of the turntable 13a which concerns on the vertical extraction process of the through-hole of the shape measuring apparatus which concerns on 1st Embodiment of this invention, and the scanning time. It is a flowchart which shows the vertical extraction process of the through-hole of the shape measuring apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows the rotation angle of the surroundings of the X-axis of the rotary table 13a in the vertical alignment process of the through-hole of the shape measuring apparatus which concerns on 2nd Embodiment of this invention, and the rotation angle of the Y-axis periphery. It is a figure which shows the brightness | luminance in the scanning time of the surroundings of the X-axis of the rotary table 13a which concerns on the vertical extraction process of the through-hole of the shape measuring apparatus which concerns on 2nd Embodiment of this invention, the circumference of the Y-axis, and those scanning times. It is a figure which shows the rotation angle around the X-axis, and the rotation angle around the Y-axis of the rotary table 13a which concerns on the vertical alignment process of the through-hole of the shape measuring apparatus which concerns on 3rd Embodiment of this invention. It is a schematic enlarged view of the vicinity of the turntable 13a which concerns on other embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Measuring machine main body, 2 ... Computer system, 3 ... Printer, 11 ... Mount, 12 ... Workpiece, 13 ... Measurement table, 13a ... Rotary table, 14, 15 ... Support arm, 16 ... X-axis guide, 17 ... Imaging unit 18a ... CCD camera, 18b ... contact type probe unit, 19 ... position sensor, 21 ... computer body, 22 ... keyboard, 23 ... joystick box, 24 ... mouse, 25 ... CRT, 31, 33, 34, 39, 41, 42 ... I / F, 32 ... Image memory, 35 ... CPU (control unit), 36 ... Display control unit, 37 ... ROM, 38 ... HDD, 40 ... RAM.

Claims (3)

A shape measuring apparatus comprising a stylus extending in parallel with a first axis and a contact provided at a tip of the stylus, and measuring a shape of the workpiece based on contact between the contact and the workpiece,
A turntable configured to be capable of placing the workpiece having a through-hole and rotatable about an axis orthogonal to the first axis;
A light source that emits light in parallel to the first axis from one side of the through hole;
A light receiving portion that is disposed on the other side of the through hole and receives light from the light source that has passed through the through hole and measures luminance based on the received light;
A control unit for controlling the rotation angle of the turntable based on the luminance measured by the light receiving unit,
The controller is
Each time the work is rotated by a predetermined angle by the turntable, the brightness is measured by the light receiving unit, and the rotation angle of the turntable is set to an angle at which the brightness is maximized. . The turntable is
It is configured to be rotatable around a second axis orthogonal to the first axis and around a third axis,
The controller is
Each time the work is rotated around the second axis by a predetermined angle by the turntable, the brightness is measured by the light receiving unit, and the turntable is rotated around the second axis to an angle at which the brightness becomes maximum. After setting the angle, every time the work is rotated around the third axis by the predetermined angle by the rotary table, the luminance is measured by the light receiving unit, and the luminance of the rotary table is set to an angle at which the luminance becomes maximum. The shape measuring apparatus according to claim 1, wherein a rotation angle around the third axis is set. The turntable is
It is configured to be rotatable around a second axis orthogonal to the first axis and around a third axis,
The controller is
A rotation angle plane constituted by a second angle axis representing a rotation angle around the second axis and a third angle axis representing the rotation angle around the third axis and perpendicular to the second angle axis. Each time the work is rotated around the second axis and around the third axis by a predetermined angle so as to draw a spiral trajectory, the luminance is measured by the light receiving unit, and the luminance The shape measuring apparatus according to claim 1, wherein the rotation angle of the turntable around the first axis and the second axis is set to an angle that maximizes the rotation table.

Images