JP2010087428A - Method of manufacturing soi substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of eliminating a process of polishing a separation bond substrate in regenerating a separation bond substrate after a semiconductor film is separated therefrom to a regenerated bond substrate usable for manufacturing an SOI substrate. <P>SOLUTION: In a cycle including a manufacturing process of an SOI substrate and a regeneration processing process of a separation bond substrate, the SOI substrate is manufactured using a bond substrate where the thickness of a peripheral part of the substrate is smaller than that in a central part thereof due to edge roll-off or the like, and a separation bond substrate is regenerated to a regenerated bond substrate with a projecting part formed in a peripheral part of the substrate by polishing by a CMP method at a low polishing rate in a regeneration processing process. Since the height of the projecting part is smaller than that of the central part, the regenerated bond substrate can be used as a bond substrate again. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention relates to a method for manufacturing an SOI (Silicon on Insulator) substrate.

In recent years, an integrated circuit using an SOI (Silicon on Insulator) substrate in which a thin single crystal semiconductor layer is provided on an insulating surface instead of a bulk silicon wafer has been developed. By making use of the characteristics of the thin single crystal silicon film formed over the insulating film, the transistors in the integrated circuit can be completely separated from each other. Further, since the transistor can be a fully depleted type, a semiconductor integrated circuit with high added value such as high integration, high speed driving, and low power consumption can be realized.

One method for manufacturing an SOI substrate is a hydrogen ion implantation separation method. (For example, refer to Patent Document 1). A method for manufacturing an SOI substrate by a hydrogen ion implantation separation method is as follows. First, a silicon dioxide film is formed on the surface of a single crystal silicon wafer. Next, hydrogen ions are implanted into the single crystal silicon wafer to form an embrittled region at a predetermined depth in the single crystal silicon wafer. Then, the single crystal silicon wafer implanted with hydrogen ions is bonded to another single crystal silicon wafer through the silicon dioxide film. Thereafter, by performing heat treatment, the embrittled region becomes a cleavage plane, the single crystal silicon wafer into which hydrogen ions are implanted is separated into a thin film, and a single crystal silicon thin film is formed on the bonded single crystal silicon wafer. Can do.

Further, when an SOI substrate is manufactured by the hydrogen ion implantation separation method described above, a separation silicon wafer separated from the single crystal silicon thin film is obtained. By performing reprocessing on the peeled silicon wafer and repeatedly using it for manufacturing an SOI substrate, it is possible to reduce the cost and increase the efficiency of manufacturing the SOI substrate. For example, Patent Document 2 discloses a method for reclaiming a peeled silicon wafer by removing a chamfered portion formed around the peeled silicon wafer by mirror polishing.
Japanese Patent Application Laid-Open No. 2000-124092 Japanese Patent No. 39437882

As described above, when an SOI substrate is manufactured using the hydrogen ion implantation separation method, a bond substrate (single crystal semiconductor substrate) is bonded to a base substrate, and then the bond substrate is separated to form a thin film semiconductor over the glass substrate. A film is formed. However, in a bond substrate such as a commercially available single crystal silicon wafer, the thickness of the substrate is thinner than the central portion, which is called edge roll-off (ERO), by polishing the single crystal silicon wafer. Since the portion exists in the peripheral portion of the substrate, the peripheral portion of the bond substrate cannot be well bonded to the glass substrate.

As a result, a semiconductor layer to be bonded to the base substrate and a remaining portion where the insulating film remains are formed in the peripheral portion of the separation bond substrate separated from the thin semiconductor film on the base substrate. Further, the surface of the separation bond substrate is uneven due to separation from the semiconductor film, and lacks flatness.

Here, a chemical mechanical polishing method (CMP method) can be given as a method for removing the remaining portion around the bond substrate and unevenness on the surface and flattening. However, since the CMP method is a method of mechanically polishing the substrate surface, there is a problem that the polishing cost of the bond substrate becomes large in order to completely remove the remaining portion formed around the separation bond substrate. That is, the cost for removing the bond substrate in the recycling process increases, and the number of times that one bond substrate can be recycled is reduced, leading to an increase in cost. Further, in the CMP apparatus used for the polishing process, since the number of bond substrates that can be processed in one process is small, the processing time becomes long, and a large amount of consumables such as polishing cloth and slurry (abrasive material) is required.

In view of the above problems, the present invention is a method for reducing the polishing process of a separation bond substrate when the separation bond substrate after the semiconductor film is separated is regenerated into a reproduction bond substrate that can be used for manufacturing an SOI substrate. Is one of the issues.

The method for manufacturing an SOI substrate of the present invention includes an SOI substrate manufacturing process and a separation bond substrate regeneration process. An SOI substrate is manufactured using a bond substrate whose peripheral portion is thinner than the central portion by edge roll-off, etc., and a separation bond substrate is formed by a CMP method with a low polishing rate in the regeneration processing process, and a convex portion is formed on the peripheral portion of the substrate. It reproduces | regenerates to the formed reproduction | regeneration bond substrate. Since the height of the convex portion is lower than the central portion of the substrate, the recycled bond substrate can be used again as a bond substrate.

In one method for manufacturing an SOI substrate of the present invention, an insulating film is formed over a bond substrate whose peripheral portion is thinner than a central portion, and an embrittlement layer is formed by irradiating ions from the surface of the bond substrate. An SOI substrate is manufactured by bonding a bond substrate to a base substrate through an insulating film, and separating the bond substrate in the embrittlement layer into a semiconductor film bonded to the base substrate through the insulating film and a separation bond substrate And first polishing the separation bond substrate to produce a first recycled bond substrate having a convex portion formed in the peripheral portion, and the shape of the first recycled bond substrate is parallel to the central portion and the convex portion A distance D1 from the lower reference surface to the tip of the convex portion and a first reproduction processing step in which the distance D2 from the reference surface to the center portion satisfies a relationship of D1 ≦ D2. .

In one method for manufacturing an SOI substrate of the present invention, an insulating film is formed over a bond substrate whose peripheral portion is thinner than a central portion, and an embrittlement layer is formed by irradiating ions from the surface of the bond substrate. An SOI substrate is manufactured by bonding a bond substrate to a base substrate through an insulating film, and separating the bond substrate in the embrittlement layer into a semiconductor film bonded to the base substrate through the insulating film and a separation bond substrate And first polishing the separation bond substrate to produce a first recycled bond substrate having a convex portion formed in the peripheral portion, and the shape of the first recycled bond substrate is parallel to the central portion and the convex portion A first reproduction processing step in which a distance D1 from the reference surface located below to the tip of the convex portion and a distance D2 from the reference surface to the central portion satisfy a relationship of D1 ≦ D2; Using a bond substrate as a bond substrate, An SOI substrate manufacturing method in which an OI substrate manufacturing process and a first regeneration process are repeated, and each time the SOI substrate manufacturing process and the first regeneration process are repeated a plurality of times, instead of the first regeneration process, Wet etching is performed on the separation bond substrate with an etchant containing hydrofluoric acid, and second separation with a polishing rate higher than that of the first polishing is performed on the separation bond substrate, and the thickness of the peripheral portion is thinner than the central portion. A second regeneration process step for manufacturing a bond substrate is performed.

Note that in the method for manufacturing an SOI substrate of the present invention, it is preferable to perform wet etching using an etchant containing hydrofluoric acid on the separation bond substrate before the first polishing is performed on the separation bond substrate. Further, it is preferable to perform the first polishing after the second polishing. Further, it is preferable that the polishing allowance of the first polishing is 500 nm to 1000 nm. The polishing allowance for the second polishing is preferably 5 μm to 20 μm. Further, it is preferable to perform the second regeneration processing step instead of the first regeneration processing step every time the SOI substrate manufacturing step and the first regeneration processing step are repeated 10 to 30 times. The etchant containing hydrofluoric acid is preferably a mixed solution containing hydrofluoric acid, ammonium fluoride, and a surfactant. Further, as the polishing, it is preferable to use a chemical mechanical polishing method (CMP method: Chemical Mechanical Polishing).

The insulating film is preferably a single film or a stack of a plurality of films selected from a silicon oxide film, a silicon nitride film, a silicon oxynitride film, and a silicon nitride oxide film. The silicon oxide film is preferably formed by chemical vapor deposition using an organosilane gas or by thermal oxidation of a bond substrate. In addition, it is preferable to form a second insulating film in contact with the base substrate, and it is more preferable that the second insulating film be a silicon nitride film or a silicon nitride oxide film. The bond substrate is preferably a single crystal silicon substrate. The base substrate is preferably aluminosilicate glass, barium borosilicate glass, or aluminoborosilicate glass.

In this specification, “single crystal” refers to a crystal in which crystal planes and crystal axes are aligned, and atoms or molecules constituting the crystal are arranged in a spatially regular arrangement. Of course, single crystals are formed by regularly arranging them, but some include lattice defects that are partially disordered and those that have lattice distortions intentionally or unintentionally.

In this specification, the embrittlement layer is a layer that is weakened so that a semiconductor substrate is irradiated with an ion beam and has crystal defects due to ions. The semiconductor film can be separated from the semiconductor substrate by dividing the embrittled layer by, for example, generating a crack by heat treatment.

In this specification, the term “polishing allowance” refers to the thickness of a substrate that is reduced by polishing when the substrate such as a semiconductor substrate is flattened by polishing. When the polishing allowance is large, the thickness of the substrate reduced by polishing increases, and when the polishing allowance is small, the thickness of the substrate reduced by polishing decreases.

According to the present invention, when the separation bond substrate after the semiconductor film is separated is regenerated into a reproduction bond substrate that can be used for manufacturing an SOI substrate, the polishing process of the separation bond substrate can be reduced. Therefore, it is possible to reduce the consumption of the consumables associated with the removal of the bond substrate and the polishing process. This makes it possible to reduce the cost and increase the efficiency in the cycle of manufacturing the SOI substrate and regenerating the bond substrate.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention can be implemented in many different modes, and those skilled in the art can easily understand that the modes and details can be variously changed without departing from the spirit and scope of the present invention. Is done. Therefore, the present invention is not construed as being limited to the description of this embodiment mode. Note that in the drawings in this specification, the same portions or portions having similar functions are denoted by the same reference numerals, and description thereof may be omitted.

(Embodiment 1)
In the SOI substrate manufacturing method and the bond substrate recycling method according to the present embodiment, an SOI substrate is manufactured by bonding a semiconductor film separated from a semiconductor substrate, which is a bond substrate, to a base substrate. The separated separated bond substrate is subjected to a regeneration process, and a recycled bond substrate that can be reused as a bond substrate is manufactured. Hereinafter, with reference to FIGS. 1 to 5 and the SOI substrate manufacturing process diagram of FIG. 8, one of the SOI substrate manufacturing method and the bond substrate regeneration processing method according to this embodiment will be described.

First, a process of forming the embrittlement layer 104 on the bond substrate 100 and preparing for bonding to the base substrate 120 will be described. The following steps correspond to step A (bond substrate step) in FIG.

First, a bond substrate 100 as shown in FIG. 1A is prepared (corresponding to step A-1 in FIG. 8). As the bond substrate 100, a commercially available semiconductor substrate can be used. For example, a single crystal semiconductor substrate such as silicon or germanium or a polycrystalline semiconductor substrate can be used. In addition, a single crystal semiconductor substrate or a polycrystalline semiconductor substrate formed of a compound semiconductor such as gallium arsenide or indium phosphide can be used as the bond substrate 100. As a commercially available silicon substrate, a circular substrate having a diameter of 5 inches (125 mm), a diameter of 6 inches (150 mm), a diameter of 8 inches (200 mm), a diameter of 12 inches (300 mm), and a diameter of 16 inches (400 mm) is typical. is there. The shape is not limited to a circular shape, and a silicon substrate processed into a rectangular shape or the like can also be used. In the following description, a case where a rectangular single crystal silicon substrate is used as the bond substrate 100 is described.

Here, in the peripheral portion of the bond substrate 100, a chamfered portion for preventing chipping and cracking, and a central portion called edge roll-off (ERO) on the inner side of the substrate are provided. A region having a small thickness is formed. The edge roll-off region is formed by finish polishing using a CMP method when the bond substrate 100 is manufactured. In the CMP method, slurry (abrasive) enters between the bond substrate 100 and the polishing cloth, and comes out between the bond substrate 100 and the polishing cloth by centrifugal force, whereby the bond substrate 100 is polished. At this time, if the entry of the slurry is small, the polishing around the bond substrate 100 proceeds faster than the central portion, and the edge roll-off (Edge Roll Off: E) where the substrate is thin inside the chamfered portion of the peripheral portion of the bond substrate 100. R.O.) region is formed.

Next, as shown in FIG. 1B, after the surface of the bond substrate 100 is cleaned, an insulating film 102 is formed over the bond substrate 100 (corresponding to step A-2 in FIG. 8). The insulating film 102 may be a single insulating film or a stack of a plurality of insulating films. For example, in this embodiment, silicon oxide is used as the insulating film 102. As the film included in the insulating film 102, an insulating film containing silicon in its composition such as a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film can be used. Note that the surface of the bond substrate 100 is preferably cleaned using sulfuric acid / hydrogen peroxide (SPM), ammonia / hydrogen peroxide (APM), hydrochloric acid / hydrogen peroxide (HPM), dilute hydrofluoric acid (DHF), or the like.

Note that in this specification, the silicon oxynitride film has, as its composition, more oxygen atoms than nitrogen atoms, and Rutherford Backscattering Spectroscopy (RBS) and Hydrogen Forward Scattering (HFS). When measured using Scattering), the concentration ranges are 50 to 70 atomic% for oxygen, 0.5 to 15 atomic% for nitrogen, 25 to 35 atomic% for Si, and 0.1 to 10 atomic% for hydrogen. The thing contained in. In addition, the composition of the silicon nitride oxide film has a larger number of nitrogen atoms than oxygen atoms, and when measured using RBS and HFS, the concentration range is 5 to 30 atomic% and nitrogen is 20 to 55. The term “atom%” means that Si is contained in the range of 25 to 35 atom% and hydrogen is contained in the range of 10 to 30 atom%. However, when the total number of atoms constituting silicon oxynitride or silicon nitride oxide is 100 atomic%, the content ratio of nitrogen, oxygen, Si, and hydrogen is included in the above range.

When silicon oxide is used as the insulating film 102, the insulating film 102 uses a mixed gas such as silane and oxygen, TEOS (tetraethoxysilane) and oxygen, and vapor phase growth such as thermal CVD, plasma CVD, atmospheric pressure CVD, and bias ECRCVD. It can be formed by the method. In this case, the surface of the insulating film 102 may be densified by oxygen plasma treatment.

Alternatively, silicon oxide formed by a chemical vapor deposition method using an organosilane gas may be used as the insulating film 102. Examples of the organic silane gas include tetraethoxysilane (TEOS: chemical formula Si (OC ₂ H ₅ ) ₄ ), tetramethylsilane (TMS: chemical formula Si (CH ₃ ) ₄ ), tetramethylcyclotetrasiloxane (TMCTS), octamethylcyclotetra Use of silicon-containing compounds such as siloxane (OMCTS), hexamethyldisilazane (HMDS), triethoxysilane (SiH (OC ₂ H ₅ ) ₃ ), trisdimethylaminosilane (SiH (N (CH ₃ ) ₂ ) ₃ ) Can do.

Alternatively, the insulating film 102 can be formed using an oxide film obtained by oxidizing the bond substrate 100. Dry oxidation may be used for the thermal oxidation treatment for forming the oxide film, but a gas containing halogen may be added to the oxidizing atmosphere. As the gas containing halogen, one or plural kinds of gases selected from HCl, HF, NF ₃ , HBr, Cl ₂ , ClF, BCl ₃ , F ₂ , Br _{2, and the} like can be used. Note that in FIG. 1B, the insulating film 102 is formed only on one surface of the bond substrate 100; however, this embodiment is not limited thereto. In the case where the insulating film 102 is formed using an oxide film obtained by oxidizing the bond substrate 100, the insulating film 102 may be formed so as to cover the bond substrate 100.

For example, heat treatment is performed at a temperature of 700 ° C. or higher and 1100 ° C. or lower in an atmosphere containing HCl at 0.5 to 10% by volume (preferably 3% by volume) with respect to oxygen. For example, heat treatment may be performed at about 950 ° C. The treatment time may be 0.1 to 6 hours, preferably 2.5 to 3.5 hours. The thickness of the oxide film to be formed can be 15 nm to 1100 nm (preferably 50 nm to 150 nm), for example, 100 nm.

By thermal oxidation treatment in an atmosphere containing halogen, the oxide film can contain halogen. By including a halogen element in the oxide film at a concentration of 1 × 10 ¹⁷ atoms / cm ³ to 1 × 10 ²¹ atoms / cm ³ , heavy metals (eg, Fe, Cr, Ni, Mo, etc.) that are extrinsic impurities are contained. Since the oxide film is captured, contamination of a semiconductor film to be formed later can be prevented. In addition, since the defects on the surface of the bond substrate 100 are terminated by the halogen element included in the oxidation treatment, the density of localized states at the interface between the oxide film and the bond substrate 100 can be reduced.

In addition, by including halogen such as chlorine in the insulating film 102 by HCl oxidation or the like, impurities that adversely affect the bond substrate 100 (for example, movable ions such as Na) can be gettered. Specifically, by heat treatment performed after the insulating film 102 is formed, impurities contained in the bond substrate 100 are deposited on the insulating film 102 and are captured by reacting with halogen atoms (for example, chlorine atoms). Accordingly, the impurities collected in the insulating film 102 can be fixed and contamination of the bond substrate 100 can be prevented. In addition, the insulating film 102 can function as a film that fixes impurities such as Na contained in glass when the insulating film 102 is bonded to a glass substrate.

In the case where a substrate containing an impurity such as an alkali metal or an alkaline earth metal that decreases the reliability of a semiconductor device such as a glass substrate is used as the base substrate, the impurity diffuses from the base substrate to the semiconductor film of the SOI substrate. It is preferable that the insulating film 102 includes at least one film that can be prevented. Examples of such a film include a silicon nitride film and a silicon nitride oxide film. When the insulating film 102 includes such a film, the insulating film 102 can function as a barrier film.

In the case where silicon nitride is used as the insulating film 102, it can be formed by a vapor phase growth method such as plasma CVD using a mixed gas of silane and ammonia. In the case where silicon nitride oxide is used for the insulating film 102, the insulating film 102 can be formed by a vapor deposition method such as plasma CVD using a mixed gas of silane and ammonia or a mixed gas of silane and dinitrogen monoxide.

For example, when the insulating film 102 is formed as a barrier film having a single-layer structure, the insulating film 102 can be formed using a silicon nitride film or a silicon nitride oxide film with a thickness of 15 nm to 300 nm.

In the case where the insulating film 102 is a film having a two-layer structure that functions as a barrier film, the upper layer is formed using an insulating film having a high barrier function. The upper insulating film can be formed of, for example, a silicon nitride film or a silicon nitride oxide film having a thickness of 15 nm to 300 nm. These films have a high blocking effect for preventing the diffusion of impurities, but have a high internal stress. Therefore, it is preferable to select a film having an effect of relieving the stress of the upper insulating film as the lower insulating film in contact with the bond substrate 100. As an insulating film having an effect of relieving the stress of the upper insulating film, there are a silicon oxide film, a silicon oxynitride film, a thermal oxide film formed by thermally oxidizing the bond substrate 100, and the like. The thickness of the lower insulating film can be greater than or equal to 5 nm and less than or equal to 200 nm.

For example, in order for the insulating film 102 to function as a blocking film, a silicon oxide film and a silicon nitride film, a silicon oxynitride film and a silicon nitride film, a silicon oxide film and a silicon nitride oxide film, a silicon oxynitride film and a silicon nitride oxide film, and the like The insulating film 102 is preferably formed by a combination of the above.

Further, in the case where the insulating film 102 has a two-layer structure functioning as a barrier film, a film may be formed on a further layer so that the insulating film has a three-layer structure. In that case, since the uppermost insulating film serves as a bonding surface with the base substrate, it is preferable to have a smooth and highly hydrophilic surface. Therefore, the uppermost insulating film is preferably an insulating film formed by a chemical vapor reaction, and a silicon oxide film is preferable. When a silicon oxide film is formed as the uppermost insulating film by a plasma enhanced CVD method, it is preferable to use an organosilane gas and an oxygen (O ₂ ) gas as a source gas. By using organosilane as a source gas, a silicon oxide film having a smooth surface and a process temperature of 350 ° C. or lower can be formed. Further, it can be formed by a thermal CVD method using LTO (low temperature oxide) formed at a heating temperature of 500 ° C. or lower and 200 ° C. or higher. For the formation of LTO, monosilane (SiH ₄ ) or disilane (Si ₂ H ₆ ) or the like can be used as a silicon source gas, and dinitrogen monoxide (N ₂ O) or the like can be used as an oxygen source gas. The uppermost insulating film can have a thickness of 5 nm to 500 nm, more preferably 10 nm to 200 nm.

For example, when the uppermost insulating film is formed of a silicon oxide film using TEOS and O ₂ as a source gas, a TEOS flow rate of 15 sccm, an O ₂ flow rate of 750 sccm, a deposition pressure of 100 Pa, a deposition temperature of 300 ° C., An RF output of 300 W and a power supply frequency of 13.56 MHz may be used.

Note that an insulating film formed at a relatively low temperature such as a silicon oxide film formed using organosilane or a silicon nitride oxide film formed at a low temperature has many OH groups on the surface. The OH group forms a silanol group by hydrogen bonding with a water molecule, and bonds the base substrate and the insulating film at a low temperature. Finally, a siloxane bond that is a covalent bond is formed between the base substrate and the insulating film. Therefore, an insulating film such as a silicon oxide film formed using the above-described organosilane or an LTO film formed at a relatively low temperature does not have OH groups used in Smart Cut or the like, or is significantly less. It can be said that it is more suitable for bonding at a lower temperature than a thermal oxide film.

Next, as shown in FIG. 1C, the bond substrate 100 is irradiated with an ion beam made of ions accelerated by an electric field through the insulating film 102 as shown by an arrow. An embrittlement layer 104 having microvoids is formed in a region having a certain depth from the surface of the substrate (corresponding to step A-3 in FIG. 8). The depth of the region where the embrittlement layer 104 is formed can be adjusted by the acceleration energy of the ion beam and the incident angle of the ion beam. The acceleration energy can be adjusted by the acceleration voltage, the dose amount and the like. The embrittlement layer 104 is formed in a region having a depth substantially equal to the average penetration depth of ions. The thickness of the first semiconductor film 124 to be separated from the bond substrate 100 later is determined by the depth to which ions are added. The depth at which the embrittlement layer 104 is formed can be, for example, from 50 nm to 500 nm from the surface of the bond substrate 100, and the preferable depth range is from 50 nm to 200 nm, for example, about 100 nm. Note that in this embodiment mode, the ion irradiation is performed after the insulating film 102 is formed; however, the present invention is not limited to this, and the ion irradiation may be performed before the insulating film 102 is formed. However, when the thermal oxide film of the bond substrate 100 is used as the insulating film 102, the insulating film 102 is formed at a high temperature of 700 ° C. or higher. Therefore, the insulating film 102 needs to be formed before ion irradiation. .

In order to irradiate the bond substrate 100 with ions, it is desirable to perform the ion doping method without mass separation from the viewpoint of shortening the tact time.

The main components of the ion doping apparatus are a chamber in which an object to be processed is arranged, an ion source for generating desired ions, and an acceleration mechanism for accelerating and irradiating ions. The ion source includes a gas supply device that supplies a source gas for generating desired ions, an electrode for generating plasma by exciting the source gas, and the like. As an electrode for forming plasma, a filament-type electrode, an electrode for capacitively coupled high-frequency discharge, or the like is used. The acceleration mechanism includes an electrode such as an extraction electrode, an acceleration electrode, a deceleration electrode, and a ground electrode, and a power source for supplying power to these electrodes. The electrode constituting the acceleration mechanism is provided with a plurality of openings and slits, and ions generated by the ion source are accelerated through the openings and slits provided in the electrodes. Note that the configuration of the ion doping apparatus is not limited to that described above, and a mechanism according to need is provided.

When hydrogen _{(H 2)} is used as a source gas by exciting a hydrogen gas ^H _+, ^H 2 _+, it is possible to generate a _H ^{3 +.} The ratio of ion species generated from the source gas can be changed by adjusting the plasma excitation method, the pressure of the atmosphere in which the plasma is generated, the supply amount of the source gas, and the like. When performing ion irradiation by an ion doping method, an ion ^beam, H ^_+, H 2 _+, preferably _{the amount} ^of _H ^{3 +} to be included more than 70% of the total amount of _H ^{3 _+,} the proportion of _H ^{3 +} Is more preferably 80% or more. By setting the ratio of H ₃ ⁺ to 70% or more, the ratio of H ₂ ⁺ ions contained in the ion beam becomes relatively small, so that variation in the average penetration depth of hydrogen ions contained in the ion beam becomes small. Therefore, the ion addition efficiency is improved and the tact time can be shortened.

Further, H ₃ ⁺ has a larger mass than H ⁺ and H ₂ ⁺ . Therefore, in the ion beam, when the ratio of H ₃ ⁺ is large and when the ratio of H ⁺ and H ₂ ⁺ is large, the former case is more effective even when the acceleration voltage at the time of doping is the same. Hydrogen can be added to a shallow region of the bond substrate 100. In the former case, since the concentration distribution of hydrogen irradiated to the bond substrate 100 in the thickness direction is steep, the thickness of the embrittlement layer 104 can be reduced.

When ion irradiation is performed using hydrogen gas by an ion doping method, it is preferable that the acceleration voltage be 10 kV or more and 200 kV or less, and the dose amount be 1 × 10 ¹⁶ ions / cm ² or more and 6 × 10 ¹⁶ ions / cm ² or less. By performing ion irradiation in this manner, the embrittlement layer 104 has a depth of 50 to 500 nm, preferably less than or equal to 500 nm, preferably depending on the ion species and ratio thereof contained in the ion beam and the thickness of the insulating film 102. , 50 nm to 200 nm, for example, about 100 nm.

Next, the bond substrate 100 over which the insulating film 102 is formed is cleaned. This cleaning step can be performed by ultrasonic cleaning with pure water or two-fluid jet cleaning with pure water and nitrogen. The ultrasonic cleaning is preferably megahertz ultrasonic cleaning (megasonic cleaning). After the ultrasonic cleaning or the two-fluid jet cleaning, the bond substrate 100 may be cleaned with ozone water. By washing with ozone water, removal of organic substances and surface activation treatment for improving the hydrophilicity of the surface of the insulating film 102 can be performed.

The surface of the insulating film 102 can be activated by cleaning with ozone water, irradiation with an atomic beam or ion beam, plasma treatment, or radical treatment (corresponding to step A-4 in FIG. 8). When an atomic beam or an ion beam is used, an inert gas neutral atom beam or inert gas ion beam such as argon can be used.

Next, a process of preparing for bonding the base substrate 120 to the bond substrate 100 will be described. The following steps correspond to step B (base substrate step) in FIG.

First, the base substrate 120 is prepared (corresponding to step B-1 in FIG. 8). As the base substrate 120, a quartz substrate, a ceramic substrate, a sapphire substrate, and the like can be used in addition to various glass substrates used in the electronic industry such as aluminosilicate glass, barium borosilicate glass, and aluminoborosilicate glass. In addition, when an alkali-free glass substrate is used as the base substrate 120, contamination of the semiconductor device due to impurities can be suppressed.

Further, as the base substrate 120, it is preferable to use a mother glass substrate developed for manufacturing a liquid crystal panel. As the mother glass, for example, the third generation (550 mm × 650 mm), the 3.5th generation (600 mm × 720 mm), the fourth generation (680 mm × 880 mm or 730 mm × 920 mm), the fifth generation (1100 mm × 1300 mm), Substrates of sizes such as the sixth generation (1500 mm × 1850 mm), the seventh generation (1870 mm × 2200 mm), and the eighth generation (2200 mm × 2400 mm) are known. By manufacturing an SOI substrate using a large-area mother glass substrate as the base substrate 120, an increase in the area of the SOI substrate can be realized. If the area of the SOI substrate is increased, a large number of chips such as ICs and LSIs can be manufactured at a time, and the number of chips manufactured from one substrate increases, so the productivity is dramatically improved. Can be made.

It is preferable to clean the surface of the base substrate 120 in advance. Specifically, ultrasonic cleaning (megahertz ultrasonic cleaning) of the base substrate 120 using hydrochloric acid / hydrogen peroxide (HPM), sulfuric acid / hydrogen peroxide (SPM), ammonia / hydrogen peroxide (APM), dilute hydrofluoric acid (DHF), or the like. I do. For example, it is preferable to ultrasonically clean the surface of the base substrate 120 using hydrochloric acid / hydrogen peroxide. Alternatively, two-fluid jet cleaning or cleaning with ozone water may be performed. By performing such a cleaning process, the surface of the base substrate 120 can be planarized and the remaining abrasive particles can be removed.

In addition, as illustrated in FIG. 1D, an insulating film 122 is preferably formed over the base substrate 120 (corresponding to Step B-2 in FIG. 8). The base substrate 120 does not necessarily have the insulating film 122 formed on the surface thereof. However, by forming a silicon nitride film, a silicon nitride oxide film, an aluminum nitride film, an aluminum nitride oxide film, or the like functioning as a barrier film as the insulating film 122 on the surface of the base substrate 120, a bond can be formed from the base substrate 120. Impurities such as alkali metals and alkaline earth metals can be prevented from entering the substrate 100. The film thickness is 10 nm to 200 nm, preferably 50 nm to 100 nm. Note that the insulating film 106 is not necessarily formed on the surface of the base substrate 120.

Before the bonding, the surface of the insulating film 106 is washed. The surface of the insulating film 106 can be cleaned by cleaning with hydrochloric acid and hydrogen peroxide, megahertz ultrasonic cleaning, two-fluid jet cleaning, or cleaning with ozone water. Further, similarly to the insulating film 102, the surface of the insulating film 122 is preferably subjected to activation treatment and then bonded (corresponding to Step B-3 in FIG. 8).

Next, the bond substrate 100 and the base substrate 120 are bonded together, and the bond substrate 100 is an SOI substrate, and the first semiconductor film 124 bonded to the base substrate 120 is regenerated as a regenerated bond substrate in the regeneration process. A process of separating the first separation bond substrate 121 will be described. The following steps correspond to step C (bonding step) in FIG.

Next, as illustrated in FIG. 2A, the bond substrate 100 and the base substrate 120 are attached so that the insulating film 102 faces the base substrate 120 side (corresponding to Step C-1 in FIG. 8).

In the bonding, the insulating film 102 on the surface of the bond substrate 100 and the insulating film 122 on the surface of the base substrate 120 are in close contact with each other, and then 1 N / cm ^{2 to} 500 N / cm ² , preferably 1 N / cm at one location of the base substrate 120. A pressure of about ² to ²⁰ N / cm ² is applied. The insulating film 102 and the base substrate 120 start to be bonded from the portion where the pressure is applied to the base substrate 120, and the bond is spontaneously formed, and the base substrate 120 and the bond substrate 100 are bonded to the entire surface.

Here, the peripheral portion of the bond substrate 100 has a chamfered portion and an edge roll-off region, and is thinner than the central portion of the substrate. Accordingly, the insulating film 102 on the surface of the bond substrate 100 and the insulating film 122 on the surface of the base substrate 120 are not in contact with each other at the peripheral portion of the substrate, so that the bond substrate 100 and the base substrate 120 are not bonded together.

FIG. 3A shows an enlarged view of the bonding boundary portion 110 between the bond substrate 100 and the base substrate 120 in the peripheral portion of the bond substrate 100. The left side of FIG. 3A is the end side of the bond substrate 100, and the right side of FIG. 3A is the center side of the bond substrate 100. The bond substrate 100, the insulating film 102, and the embrittlement layer 104 are attached to the insulating film 122 over the base substrate 120 so as to be inclined with respect to the base substrate surface. However, since the inclination of the bond substrate 100 with respect to the base substrate surface in the edge roll-off region is gentle, the bonding boundary between the bond substrate 100 and the base substrate 120 is formed in the edge roll-off region.

Since bonding is performed using van der Waals force, a strong bond is formed even at room temperature. By applying pressure to the bond substrate 100 and the base substrate 120, a strong bond can be formed by hydrogen bonding. Note that since the above bonding can be performed at a low temperature, a variety of base substrates 120 can be used as described above.

After the bond substrate 100 is bonded to the base substrate 120, heat treatment is preferably performed to increase the bonding force at the bonding interface between the base substrate 120 and the insulating film 102 (corresponding to step C-2 in FIG. 8). ). This treatment temperature is a temperature at which cracks are not generated in the embrittlement layer 104, and the treatment can be performed in a temperature range of 200 ° C. to 450 ° C. In addition, the bonding force between the base substrate 120 and the insulating film 102 can be increased by bonding the bond substrate 100 to the base substrate 120 while heating in this temperature range. The heat treatment for increasing the bonding strength at the bonding interface is preferably performed continuously as it is in the apparatus or place where the bonding is performed. Alternatively, heat treatment for separating the bond substrate 100 with the embrittlement layer 104 as a boundary may be performed continuously from the heat treatment for increasing the bonding force at the bonding interface.

Note that, when the bond substrate 100 and the base substrate 120 are bonded to each other, if particles or the like adhere to the bonding surface, the attached portion is not bonded. In order to prevent particles from adhering to the bonding surface, the bonding of the bond substrate 100 and the base substrate 120 is preferably performed in an airtight treatment chamber. In addition, when the bond substrate 100 and the base substrate 120 are bonded to each other, the processing chamber may be in a reduced pressure state of about 5.0 × 10 ⁻³ Pa to clean the atmosphere of the bonding process.

Next, as shown in FIG. 2B, heat treatment is performed so that adjacent microvoids in the embrittlement layer 104 are combined to increase the volume of the microvoids. As a result, the bond substrate 100 is separated with an explosive reaction in the embrittlement layer 104, and the bond substrate 100 is separated into the first semiconductor film 124 and the first separation bond substrate 121 (step C in FIG. 8). -3). Since the insulating film 102 is bonded to the base substrate 120, the first semiconductor film 124 separated from the bond substrate 100 is fixed over the base substrate 120. The temperature of heat treatment for separating the first semiconductor film 124 from the bond substrate 100 is preferably a temperature that does not exceed the strain point of the base substrate 120. Note that a large number of crystal defects are formed on the surface of the first semiconductor film 124 and flatness is also impaired.

For this heat treatment, a rapid thermal annealing (RTA) device, a resistance heating furnace, or a microwave heating device can be used. As the RTA apparatus, a GRTA (Gas Rapid Thermal Anneal) apparatus or an LRTA (Lamp Rapid Thermal Anneal) apparatus can be used.

When a GRTA apparatus is used, the heating temperature can be 550 ° C. or higher and 650 ° C. or lower, and the treatment time can be 0.5 minutes or longer and 60 minutes or less. In the case of using a resistance heating device, the heating temperature can be 200 ° C. or more and 650 ° C. or less, and the treatment time can be 2 hours or more and 4 hours or less.

Further, the heat treatment may be performed using dielectric heating by high frequency such as microwaves. The heat treatment by dielectric heating can be performed by irradiating the bond substrate 100 with a high frequency of 300 MHz to 3 THz generated in the high frequency generator. Specifically, for example, by irradiating a microwave of 2.45 GHz at 900 W for 14 minutes, adjacent microvoids can be combined in the embrittled layer, and the bond substrate 100 can be finally separated.

Here, the separation surface 129 of the first separation bond substrate 121 from which the thin first semiconductor film 124 is separated has many crystal defects, and the flatness is greatly impaired. Further, the peripheral portion of the bond substrate 100 is not bonded to the base substrate 120 by a chamfered portion, an edge roll-off region, or the like. When the first semiconductor film 124 is separated from the bond substrate 100 in that state, a peripheral portion of the bond substrate 100 that is not bonded to the base substrate 120 remains in the bond substrate 100, and a peripheral portion of the first separation bond substrate 121. The first remaining portion 126 is formed. The first remaining portion 126 includes a remaining embrittlement layer 127, a remaining semiconductor layer 125, and a remaining insulating film 123 in this order from the first isolation bond substrate 121 side. The width of the first remaining portion is about 2 mm to 4 mm. Here, an enlarged view of the separation boundary portion 111 between the first separation bond substrate 121 and the base substrate 120 in FIG. 2B is shown in FIG. As shown in FIG. 3B, the first remaining portion 126 of the first separation bond substrate 121, the first semiconductor film 124, and the insulating film 122 are the bond substrate shown in FIG. 100 and the base substrate 120 are separated along the bonding boundary. As a result, the first semiconductor film 124 smaller in size than the bond substrate 100 is formed on the base substrate 120 by the amount of the first remaining portion 126.

Next, a process of planarizing the surface of the first semiconductor film 124 bonded to the base substrate 120 and restoring crystallinity will be described. The following steps correspond to step D (SOI substrate finishing step) in FIG.

As shown in FIG. 2C, the surface of the first semiconductor film 124 may be planarized by polishing (corresponding to step D-1 in FIG. 8). Although planarization is not always necessary, the characteristics of the interface between the semiconductor film and a gate insulating film to be formed later can be improved by performing planarization. Specifically, the polishing can be performed by chemical mechanical polishing (CMP) or liquid jet polishing. The thickness of the first semiconductor film 124 is reduced by the planarization.

Alternatively, the surface of the first semiconductor film 124 can be planarized by etching the surface of the first semiconductor film 124 instead of polishing. Etching includes, for example, reactive ion etching (RIE) method, ICP (Inductively Coupled Plasma) etching method, ECR (Electron Cyclotron Resonance) etching method, parallel plate type (capacitive coupling type) etching method, and magnetron plasma etching. Or a dry etching method such as a two-frequency plasma etching method or a helicon wave plasma etching method.

By the etching, the first semiconductor film 124 can be thinned to a thickness that is optimal for a semiconductor element to be formed later, and the surface of the first semiconductor film 124 can be planarized.

In addition, the first semiconductor film 124 that is in close contact with the base substrate 120 has crystal defects due to separation in the embrittlement layer 104 and formation of the embrittlement layer 104. Further, the flatness of the surface is impaired. In order to reduce crystal defects and improve flatness, the first semiconductor film 124 may be irradiated with laser light (corresponding to Step D-2 in FIG. 8).

Note that in the case where the surface of the first semiconductor film 124 is planarized by dry etching before the laser light irradiation, damage such as crystal defects occurs near the surface of the first semiconductor film 124 by dry etching. Sometimes. However, damage caused by dry etching can be repaired by the laser light irradiation.

In this laser light irradiation step, since the temperature rise of the base substrate 120 is suppressed, a substrate having low heat resistance such as a glass substrate can be used for the base substrate 120. The first semiconductor film 124 is preferably partially melted by laser light irradiation. When completely melted, the first semiconductor film 124 is recrystallized due to disordered nucleation in the first semiconductor film 124 in a liquid phase, and the crystallinity of the first semiconductor film 124 is lowered. Because. By partial melting, in the first semiconductor film 124, so-called vertical growth in which crystal growth proceeds from a solid phase portion that is not melted occurs. By recrystallization by vertical growth, crystal defects in the first semiconductor film 124 are reduced and crystallinity is recovered. Note that the first semiconductor film 124 being in a completely molten state means that the first semiconductor film 124 is melted up to the interface with the insulating film 102 and is in a liquid state. On the other hand, the first semiconductor film 124 being in a partially molten state means a state in which the upper layer is melted and in a liquid phase, and the lower layer is in a solid phase.

Next, after the laser light irradiation, the surface of the first semiconductor film 124 may be etched. In the case where the surface of the first semiconductor film 124 is etched after the laser light irradiation, the surface of the first semiconductor film 124 is not necessarily etched before the laser light irradiation. In the case where the surface of the first semiconductor film 124 is etched before the laser light irradiation, the surface of the first semiconductor film 124 is not necessarily etched after the laser light irradiation. In the present invention, etching may be performed both before and after laser light irradiation.

By the etching, the first semiconductor film 124 can be thinned to a thickness that is optimal for a semiconductor element to be formed later, and the surface of the first semiconductor film 124 can be planarized.

After the laser light irradiation, heat treatment of 500 ° C. to 700 ° C. is preferably performed on the first semiconductor film 124 (corresponding to Step D-3 in FIG. 8). By this heat treatment, defects of the first semiconductor film 124 that have not been recovered by laser light irradiation can be eliminated, and distortion of the first semiconductor film 124 can be reduced. For this heat treatment, a rapid thermal annealing (RTA) device, a resistance heating furnace, or a microwave heating device can be used. As the RTA apparatus, a GRTA (Gas Rapid Thermal Anneal) apparatus or an LRTA (Lamp Rapid Thermal Anneal) apparatus can be used. For example, when a resistance heating furnace is used, it may be heated at 600 ° C. for about 4 hours.

The SOI substrate manufactured as described above is processed into a semiconductor device in a process G (device process) described in Embodiment 3.

Next, a description will be given of a process in which the first separation bond substrate 121 is subjected to a polishing process with a low polishing rate, and a recycled bond substrate is manufactured while the shape of the first remaining portion 126 is left. The following steps correspond to step E (first regeneration processing step) in FIG.

First, the first separation bond substrate 121 is taken out. As shown in the enlarged view of the peripheral portion of the first isolation bond substrate 121 in FIG. 4A, a first remaining portion 126 is formed in the peripheral portion of the first isolation bond substrate 121. In the first remaining portion 126, a remaining embrittlement layer 127, a remaining semiconductor layer 125, and a remaining insulating film 123 are formed in this order from the semiconductor substrate side. Crystal defects are formed on the separation surface 129 of the first separation bond substrate 121, and flatness is impaired. By a polishing process with a low polishing rate, crystal defects on the separation surface 129 of the first separation bond substrate 121 are removed, flatness is improved, and the substrate can be used again as a bond substrate.

Next, as shown in FIG. 4B, it is preferable to remove the remaining insulating film 123 of the first remaining portion 126. (Corresponding to step E-1 in FIG. 8). The remaining insulating film 123 can be removed by performing a wet etching process with an etchant containing hydrofluoric acid. As the etchant containing hydrofluoric acid, it is desirable to use a mixed solution containing hydrofluoric acid, ammonium fluoride, and a surfactant (for example, product name: LAL500, manufactured by Stella Chemifa Corporation). This wet etching is preferably performed for 120 seconds to 1200 seconds, for example, about 600 seconds. Further, since the wet etching is performed by immersing the first separation bond substrate 121 in the solution in the treatment tank, the plurality of first separation bond substrates 121 can be collectively processed. By removing the remaining insulating film 123 by wet etching, the target to be polished in the next polishing step can be limited to only the semiconductor film, so that the time required for the polishing step can be shortened.

Next, as shown in FIG. 4C, the first separation bond substrate 121 is polished to form the first recycled bond substrate 132 having the protrusions 130 in the peripheral portion (step E- in FIG. 8). 5). As a polishing method, a chemical mechanical polishing (CMP method) is used. Here, the CMP method is a method of planarizing the surface by a combined chemical and mechanical action based on the surface of the workpiece. Generally, a polishing cloth is affixed on a polishing stage, and the polishing stage and the workpiece are rotated or swung while supplying slurry (abrasive) between the workpiece and the polishing cloth. In this method, the surface of the workpiece is polished by the chemical reaction between the slurry and the surface of the workpiece and the mechanical polishing of the polishing cloth and the workpiece.

Here, in order to completely remove the first remaining portion 126 and to completely flatten the substrate surface, it is necessary to perform polishing by a CMP method having a high polishing rate, and the polishing allowance is 10 μm or more. The cost per time increases. Therefore, in the present embodiment, polishing by the CMP method with a low polishing rate is performed, and the first regenerated bond substrate 132 having the protrusions 130 in the peripheral portion is manufactured. At this time, it is preferable to use a suede polishing cloth as the polishing cloth, and the particle diameter of the slurry is preferably 75 nm to 45 nm, for example, about 60 nm. By performing polishing with a low polishing rate on the first separation bond substrate 121 in this way, crystal defects on the surface of the substrate are removed, and the average surface roughness is about 0.2 nm to 0.5 nm with a polishing margin of about 500 nm to 1000 nm. Thus, the first regenerated bond substrate 132 that is planarized can be manufactured. The average surface roughness (Ra) is a three-dimensional extension of the centerline average roughness Ra defined in JISB0601: 2001 (ISO4287: 1997) so that it can be applied to the measurement surface.

At this time, the first remaining portion 126 formed of the remaining semiconductor layer 125 and the remaining embrittlement layer 127 is removed by polishing, but the polishing rate in this polishing step is low, and thus the first remaining portion 126 also has the separation surface 129. Is also polished with a similar polishing allowance. Therefore, the shape of the first remaining portion 126 remains on the first recycled bond substrate 132 as the convex portion 130.

Here, as shown in FIG. 4C, a reference surface 135 that is parallel to the center of the first recycled bond substrate 132 and located below the convex portion 130 is set. The distance to the tip is D1, and the distance from the reference surface 135 to the center is D2. By satisfying the relationship of D1 ≦ D2 by polishing by the CMP method having a low polishing rate and the edge roll-off region at the periphery of the bond substrate, even if the first recycled bond substrate 132 is used again as the bond substrate, the convex portion 130 is obtained. Does not hinder the bonding of the first regenerative bond substrate 132 and the base substrate, so that the first regenerative bond substrate 132 and the base substrate can be bonded together.

Through the above regeneration treatment process, crystal defects of the separation surface 129 of the first separation bond substrate 121 can be removed, and flatness can be improved. The first regenerated bond substrate 132 that can be sufficiently used as a bond substrate can be manufactured only by polishing with a low polishing rate by omitting polishing with a high polishing rate. In the polishing process using the CMP method, a polishing process with a low polishing rate is omitted and a polishing process with a low polishing rate is performed, so that a polishing cost necessary for planarizing the first separation bond substrate 121 can be reduced. . Therefore, since the machining allowance of the bond substrate in one regeneration processing step can be reduced, the number of times of repeatedly using one bond substrate can be increased, which can greatly contribute to the cost reduction in manufacturing the SOI substrate.

In addition, the CMP method can perform only a single-wafer process for processing substrates one by one. Accordingly, the ratio of the polishing process by the CMP method in the regeneration process is reduced, so that the efficiency of the regeneration process of the first separation bond substrate 121 can be increased. At the same time, consumption of consumables such as slurry and polishing cloth used in the CMP method can be reduced, and the cost can be reduced.

Through the above steps, an SOI substrate is manufactured from the bond substrate 100 through steps A to E shown in FIG. 8, and the first separation bond substrate 121 formed as a sub-assembly at the time of manufacturing the SOI substrate is replaced with the first recycled bond substrate 132. And can be used again as a bond substrate.

Note that the structure described in this embodiment can be combined with any of the structures described in the other embodiments as appropriate.

(Embodiment 2)
In the SOI substrate manufacturing method and the bond substrate recycling method according to the present embodiment, the bond substrate recycling method described in Embodiment 1 is used to perform the SOI substrate manufacturing process, the first regeneration processing process, and The SOI substrate is manufactured by repeating the cycle including the second regeneration processing step. Hereinafter, an SOI substrate manufacturing method and a bond substrate regeneration method according to this embodiment will be described with reference to FIGS.

First, Step A to Step E of FIG. 9 are performed in the same manner as in Embodiment Mode 1 to manufacture the first recycled bond substrate 132. A step of manufacturing an SOI substrate again using the first recycled bond substrate 132 as a bond substrate will be described.

According to the process A (bond substrate process) described in the first embodiment, an insulating film 134 is formed on the first regenerated bond substrate 132 (corresponding to the process A-2 in FIG. 9), and the first regenerated bond substrate. An embrittlement layer 136 is formed in a region at a certain depth from the surface of 132 (corresponding to step A-3 in FIG. 9), and the insulating film 134 on the surface of the first regenerated bond substrate 132 is cleaned and activated. (Corresponding to step A-4 in FIG. 9). The details of each step may be performed in the same manner as in the first embodiment.

However, unlike the bond substrate 100, the first regenerative bond substrate 132 has a convex portion 130 formed on the periphery of the substrate. Therefore, in forming the insulating film 134, the insulating film 134 is formed along the steps of the protrusion 130 as shown in the enlarged view of the periphery of the first recycled bond substrate 132 in FIG. Further, in the subsequent ion irradiation, as shown in FIG. 5B, since the ion beam is irradiated from above the insulating film 134 having a step, the formed embrittlement layer 136 is divided by the convex portion 130. It becomes such a shape.

Next, in accordance with the process B (base substrate process) described in Embodiment 1, the base substrate 138 is prepared (corresponding to the process B-1 in FIG. 9), and the insulating film 140 is formed over the base substrate 138 (FIG. 9 corresponding to step B-2 in FIG. 9), and cleaning and activation of the insulating film 140 on the surface of the base substrate 138 (corresponding to step B-3 in FIG. 9). The details of each step may be performed in the same manner as in the first embodiment.

Next, in accordance with the process C (bonding process) described in the first embodiment, the insulating film 134 on the surface of the first recycled bond substrate 132 and the insulating film 140 on the surface of the base substrate 138 are brought into close contact (process C in FIG. 9). -1), heat treatment for increasing the bonding force of the bonding interface is performed (corresponding to step C-2 in FIG. 9), and further heat treatment is performed, whereby the first recycled bond substrate 132 is changed to the second Separated into a semiconductor film 152 and a second separation bond substrate 142 (corresponding to step C-3 in FIG. 9). The details of each step may be performed in the same manner as in the first embodiment.

Here, an enlarged view of the peripheral portion of the first recycled bond substrate 132 in the step C-1 is as shown in FIG. As shown in FIG. 6A, the first regenerative bond substrate 132, the insulating film 134, and the embrittlement layer 136 are inclined with respect to the base substrate surface and bonded to the insulating film 140 over the base substrate 138. Yes. Since the inclination of the first regenerated bond substrate 132 with respect to the base substrate surface in the edge roll-off region inside the convex portion 130 is gentle, the bonding boundary between the first regenerated bond substrate 132 and the base substrate 138 is the edge roll-off region. Formed inside. Note that, unlike the bond substrate 100, the first regenerative bond substrate 132 has a convex portion 130 formed on the periphery of the substrate. Therefore, the insulating film 134 and the insulating film 140 are bonded to each other at the tip 137 of the convex portion 130, and the first recycled bond substrate 132 is separated by the embrittlement layer 136 on the bonded insulating film 134. An insulating film and a semiconductor film may be formed on the position corresponding to the tip 137 of the base substrate 138.

Further, an enlarged view of the periphery of the second separation bond substrate 142 in the step (C-3) is as shown in FIG. As shown in FIG. 6B, a second remaining portion 150 including a remaining insulating film 144, a remaining semiconductor layer 146, and a remaining embrittlement layer 148 is formed in the periphery of the second isolation bond substrate 142. . Compared with the first remaining portion 126 of the first separation bond substrate 121, the second remaining portion 150 of the second separation bond substrate 142 is increased in the number of new remaining portions 151 and spreads toward the flat side of the bond substrate central portion. ing. The width of the new remaining portion 151 is about 200 μm to 500 μm. Further, the second remaining portion 150 of the second isolation bond substrate 142, the second semiconductor film 152, and the insulating film 140 are the same as the first regenerated bond substrate 132 and the base substrate shown in FIG. Separated at 138 junction boundaries. As a result, a second semiconductor film 152 smaller in size than the first regenerative bond substrate 132 is formed on the base substrate 138 by the amount of the second remaining portion 150. Further, the second semiconductor film 152 is smaller than the first semiconductor film 124 by the amount of the new remaining portion 151.

Next, the surface of the second semiconductor film 152 of the SOI substrate in which the insulating film 140, the insulating film 134, and the second semiconductor film 152 are formed on the base substrate 138 according to the above-described process D (SOI substrate finishing process) is flat. And crystallinity recovery. The details of the process may be performed in the same manner as in the first embodiment.

The SOI substrate manufactured as described above is processed into a semiconductor device in a process G (device process) described in the third embodiment, as in the first embodiment.

Next, according to the above-mentioned process E (first regeneration process), the second separation bond substrate 142 is subjected to a regeneration process with a low polishing rate, and the second regeneration is performed while the shape of the second remaining portion 150 is left. As the bond substrate 154, the second separation bond substrate 142 is regenerated. The regenerated second regenerated bond substrate 154 is again used as a bond substrate in the process A (bond substrate process).

As described above, the SOI substrate can be efficiently manufactured by repeating the cycle including the SOI substrate manufacturing process in steps A to D and the first regeneration processing step in step E. However, when this cycle is repeated, the remaining part of the peripheral part of the separation bond substrate and the convex part of the peripheral part of the recycled bond substrate become large, and accordingly, the area of the semiconductor film formed on the SOI substrate becomes small, and In addition, the area in which a semiconductor device can be manufactured becomes narrow. For this reason, in order to remove the remaining portion instead of the first regeneration processing step every time the cycle including the SOI substrate manufacturing step of Step A to Step D and the first regeneration processing step of Step E is repeated a plurality of times. It is preferable to perform the second regeneration processing step. Note that the number of times the cycle of the SOI substrate manufacturing process and the first recycling process is repeated before the second regeneration process is performed may be set as appropriate depending on the area of the semiconductor film necessary for the semiconductor device to be manufactured. . For example, when a square single crystal silicon substrate having a diagonal size of 5 inches is used as the bond substrate, the width of the peripheral residual portion is preferably 1 cm or less, and the peripheral residual portion is removed once in 10 to 30 cycles. It is preferable to perform the second regeneration processing step.

Therefore, the cycle of the SOI substrate manufacturing process and the first processing process is repeated a plurality of times, and the second separation process is performed on the third separation bond substrate 160 in which the third remaining portion 168 becomes sufficiently large, and the third remaining process is performed. A process of removing the portion 168 and regenerating as a regenerated bond substrate will be described. The following steps correspond to step F (second regeneration processing step) in FIG.

First, the third separation bond substrate 160 is taken out. As shown in the enlarged view around the third remaining portion 168 of the third separation bond substrate 160 in FIG. 7A, the third remaining portion 168 is formed in the peripheral portion of the third separation bond substrate 160. Has been. In the third remaining portion 168, a remaining embrittlement layer 166, a remaining semiconductor layer 164, and a remaining insulating film 162 are formed in this order from the semiconductor substrate side. Crystal defects are formed on the separation surface 170 of the third separation bond substrate 160, and flatness is impaired.

Next, as shown in FIG. 7B, the remaining insulating film 162 of the third remaining portion 168 is removed. (Corresponding to step F-1 in FIG. 9). The remaining insulating film 162 can be removed by performing a wet etching process with an etchant containing hydrofluoric acid. As the etchant containing hydrofluoric acid, it is desirable to use a mixed solution containing hydrofluoric acid, ammonium fluoride, and a surfactant (for example, product name: LAL500, manufactured by Stella Chemifa Corporation). This wet etching is preferably performed for 120 seconds to 1200 seconds, for example, about 600 seconds. Further, since the wet etching is performed by immersing the third separation bond substrate 160 in a solution in the treatment tank, a plurality of third separation bond substrates 160 can be collectively processed. By removing the remaining insulating film 162 by wet etching, the polishing time by the CMP method performed in a later step can be shortened.

Next, it is preferable to reduce the level difference of the remaining semiconductor layer 164 of the third remaining portion 168 by wet etching (corresponding to Step F-2 in FIG. 9). The remaining semiconductor layer 164 can reduce a step difference by performing a wet etching process using an organic alkaline aqueous solution as an etchant. As the organic alkaline aqueous solution, an aqueous solution containing 0.2 to 5.0% of TMAH (Tetra Methyl Ammonium Hydroxide, tetramethylammonium hydroxide) (for example, trade name: NMD3 manufactured by Tokyo Ohka Kogyo Co., Ltd.) is preferably used. . The liquid temperature of the organic alkaline aqueous solution is preferably 40 ° C. to 70 ° C., and for example, the liquid temperature is preferably about 50 ° C. This wet etching is preferably performed for 30 seconds to 600 seconds, for example, about 60 seconds. However, when the wet etching time is too long, the unevenness of the surfaces of the third separation bond substrate 160 and the remaining semiconductor layer 164 becomes severe. Further, since the wet etching is performed by immersing the third separation bond substrate 160 in a solution in the treatment tank, a plurality of third separation bond substrates 160 can be collectively processed.

By this wet etching, the semiconductor layer having crystal defects formed on the separation surface 170 can also be removed. Further, the step due to the remaining semiconductor layer 164 can be reduced to about 10 nm to 70 nm. By removing crystal defects formed on the separation surface 170 and reducing the level difference of the remaining semiconductor layer 164, a polishing process by a CMP method performed in the next process can be shortened.

Next, as shown in FIG. 7C, the third separation bond substrate 160 is polished to form a third recycled bond substrate 172 (corresponding to Step F-3 in FIG. 9). As a polishing method, a CMP method is used. The CMP method is preferably performed in a stepwise manner, starting with primary polishing at a high polishing rate, and then finishing polishing at a low polishing rate. It is more preferable to add a secondary polishing with an intermediate polishing rate between the primary polishing and the final polishing. As the primary polishing, a polyurethane polishing cloth is preferably used as the polishing cloth, and the particle diameter of the slurry is preferably 180 nm to 120 nm, for example, about 150 nm. At this time, the polishing allowance is preferably about 5 μm to 20 μm. As the secondary polishing, it is preferable to use a suede polishing cloth as the polishing cloth, and the particle diameter of the slurry is preferably 120 nm to 75 nm, for example, about 90 nm. At this time, the polishing allowance is preferably about 2 μm to 10 μm. As the finish polishing, it is preferable to use a suede polishing cloth as the polishing cloth, and the particle diameter of the slurry is preferably 75 nm to 45 nm, for example, about 60 nm. At this time, the polishing allowance is preferably about 500 nm to 1000 nm. The total polishing allowance from primary polishing to finish polishing is preferably about 5 μm to 20 μm.

As described above, by polishing the third separation bond substrate 160, the third surface is flattened to an average surface roughness (Ra) of about 0.2 nm to 0.5 nm with a polishing allowance of about 5 μm to 20 μm. A recycled bond substrate 172 can be formed. At this time, the third remaining portion 168 including the remaining semiconductor layer 164 and the remaining embrittlement layer 166 is removed by polishing. By using polishing with a high polishing rate, polishing can be performed without leaving a trace of the remaining portion in the peripheral portion of the third recycled bond substrate 172. The third recycled bond substrate 172 also has an edge roll-off region formed by the CMP method in the peripheral portion, and the peripheral portion is thinner than the central portion. Therefore, the third recycled bond substrate 172 can be used again as the bond substrate in the step A. .

Through the above steps, the third separation bond substrate 160 is regenerated into the third regenerated bond substrate 172. The obtained third recycled bond substrate 172 can be reused as a bond substrate in the step A, and a cycle including an SOI substrate manufacturing step and a first regeneration processing step can be performed.

As shown in this embodiment mode, a cycle comprising the SOI substrate manufacturing process and the first regeneration processing process in which the convex portion derived from the remaining portion of the separation bond substrate is formed in the peripheral portion of the substrate is repeated a plurality of times to separate the bond. When the remaining portion of the substrate becomes large, a second regeneration processing step for removing the remaining portion is performed instead of the first regeneration processing step, thereby reducing the polishing process of the bond substrate and reducing the semiconductor film on the SOI substrate. The area can be maintained. Therefore, as compared with the case where the remaining portion around the substrate is removed every time the regeneration processing step is performed, it is possible to reduce the machining allowance of the bond substrate in one regeneration processing step, so that one bond substrate is repeatedly used. This can increase the number of times to be performed and can greatly contribute to the cost reduction of the SOI substrate manufacturing. In addition, the CMP method can perform only a single-wafer process for processing substrates one by one. Therefore, the efficiency of the regeneration process can be improved by reducing the polishing process by the CMP method in the regeneration process. At the same time, waste of consumables such as slurry and polishing cloth used in the CMP method can be suppressed, and costs can be reduced.

Note that the structure described in this embodiment can be combined with any of the structures described in the other embodiments as appropriate.

(Embodiment 3)
In this embodiment, a method for manufacturing a semiconductor device using the SOI substrate manufactured in the above embodiment will be described. Note that the process shown in this embodiment corresponds to the process F (device process) in FIGS.

First, a method for manufacturing an n-channel thin film transistor and a p-channel thin film transistor is described with reference to FIGS. Various semiconductor devices can be formed by combining a plurality of thin film transistors (TFTs).

The case where an SOI substrate manufactured by the method of Embodiment Mode 1 is used as an SOI substrate will be described. FIG. 10A is a cross-sectional view of the SOI substrate in FIG.

The first semiconductor film 124 is element-isolated by etching to form semiconductor films 251 and 252 as shown in FIG. The semiconductor film 251 constitutes an n-channel TFT, and the semiconductor film 252 constitutes a p-channel TFT.

As shown in FIG. 10C, an insulating film 254 is formed over the semiconductor films 251 and 252. Next, the gate electrode 255 is formed over the semiconductor film 251 with the insulating film 254 interposed therebetween, and the gate electrode 256 is formed over the semiconductor film 252.

Note that an impurity element serving as an acceptor such as boron, aluminum, or gallium, or an impurity serving as a donor such as phosphorus or arsenic is used to control the threshold voltage of the TFT before etching the first semiconductor film 124. It is preferable to add an element to the first semiconductor film 124. For example, an impurity element serving as an acceptor is added to a region where an n-channel TFT is formed, and an impurity element serving as a donor is added to a region where a p-channel TFT is formed.

Next, as illustrated in FIG. 10D, an n-type low concentration impurity region 257 is formed in the semiconductor film 251, and a p-type high concentration impurity region 259 is formed in the semiconductor film 252. Specifically, first, an n-type low concentration impurity region 257 is formed in the semiconductor film 251. Therefore, the semiconductor film 252 to be a p-channel TFT is masked with a resist, and an impurity element is added to the semiconductor film 251. Phosphorus or arsenic may be added as the impurity element. By adding an impurity element by an ion doping method or an ion implantation method, the gate electrode 255 serves as a mask, and an n-type low-concentration impurity region 257 is formed in the semiconductor film 251 in a self-aligning manner. A region overlapping with the gate electrode 255 of the semiconductor film 251 becomes a channel formation region 258.

Next, after removing the mask covering the semiconductor film 252, the semiconductor film 251 to be an n-channel TFT is covered with a resist mask. Next, an impurity element is added to the semiconductor film 252 by an ion doping method or an ion implantation method. Boron, aluminum, gallium, or the like can be added as the impurity element. In the impurity element addition step, the gate electrode 256 functions as a mask, and a p-type high concentration impurity region 259 is formed in the semiconductor film 252 in a self-aligning manner. The high concentration impurity region 259 functions as a source region or a drain region. A region overlapping with the gate electrode 256 of the semiconductor film 252 becomes a channel formation region 260. Although the method of forming the p-type high concentration impurity region 259 after forming the n-type low concentration impurity region 257 has been described here, the p-type high concentration impurity region 259 can be formed first.

Next, after removing the resist covering the semiconductor film 251, an insulating film having a single-layer structure or a stacked structure made of a nitrogen compound such as silicon nitride or an oxide such as silicon oxide is formed by a plasma CVD method or the like. By performing anisotropic etching of this insulating film in the vertical direction, sidewall insulating films 261 and 262 in contact with the side surfaces of the gate electrodes 255 and 256 are formed as shown in FIG. By this anisotropic etching, the insulating film 254 is also etched.

Next, as illustrated in FIG. 11B, the semiconductor film 252 is covered with a resist 265. In order to form a high concentration impurity region functioning as a source region or a drain region in the semiconductor film 251, an impurity element is added to the semiconductor film 251 with a high dose by an ion implantation method or an ion doping method. Using the gate electrode 255 and the sidewall insulating film 261 as a mask, an n-type high concentration impurity region 267 is formed. Next, heat treatment for activating the impurity element is performed.

After the heat treatment for activation, an insulating film 268 containing hydrogen is formed as illustrated in FIG. After the insulating film 268 is formed, heat treatment is performed at a temperature of 350 ° C. to 450 ° C. to diffuse hydrogen contained in the insulating film 268 into the semiconductor films 251 and 252. The insulating film 268 can be formed by depositing silicon nitride or silicon nitride oxide by a plasma CVD method with a process temperature of 350 ° C. or lower. By supplying hydrogen to the semiconductor films 251 and 252, defects that become trapping centers in the semiconductor films 251 and 252 and the interface with the insulating film 254 can be effectively compensated.

Thereafter, an interlayer insulating film 269 is formed. The interlayer insulating film 269 is an insulating film made of an inorganic material such as a silicon oxide film or a BPSG (Boron Phosphorus Silicon Glass) film, or a single-layer film or a laminated structure selected from organic resin films such as polyimide and acrylic. It can be formed of a film. After a contact hole is formed in the interlayer insulating film 269, a wiring 270 is formed as shown in FIG. For example, the wiring 270 can be formed of a conductive film having a three-layer structure in which a low-resistance metal film such as an aluminum film or an aluminum alloy film is sandwiched between barrier metal films. The barrier metal film can be formed of a metal film such as molybdenum, chromium, or titanium.

Through the above steps, a semiconductor device having an n-channel TFT and a p-channel TFT can be manufactured. In the manufacturing process of the SOI substrate used for the semiconductor device of this embodiment, the separation processing of the separation bond substrate is performed, and a plurality of semiconductor films are formed from one bond substrate. It is possible to improve the performance.

Although the manufacturing method of the TFT has been described with reference to FIGS. 10 and 11, a semiconductor device with high added value can be manufactured by forming various semiconductor elements such as a capacitor and a resistor in addition to the TFT. .

Note that the structure described in this embodiment can be combined with any of the structures described in the other embodiments as appropriate.

(Embodiment 4)
In this embodiment mode, specific modes of a semiconductor device manufactured by applying the present invention will be described with reference to FIGS.

First, a microprocessor will be described as an example of a semiconductor device. FIG. 12 is a block diagram illustrating a configuration example of the microprocessor 500.

The microprocessor 500 includes an arithmetic circuit 501 (also referred to as Arithmetic logic unit. ALU), an arithmetic circuit controller 502 (ALU Controller), an instruction analyzer 503 (Instruction Decoder), an interrupt controller 504 (Interrupt Controller), and a timing controller. 505 (Timing Controller), a register 506 (Register), a register controller 507 (Register Controller), a bus interface 508 (Bus I / F), a read-only memory 509, and a memory interface 510.

An instruction input to the microprocessor 500 via the bus interface 508 is input to the instruction analysis unit 503 and decoded, and then to the arithmetic circuit control unit 502, the interrupt control unit 504, the register control unit 507, and the timing control unit 505. Entered. The arithmetic circuit control unit 502, the interrupt control unit 504, the register control unit 507, and the timing control unit 505 perform various controls based on the decoded instruction.

The arithmetic circuit control unit 502 generates a signal for controlling the operation of the arithmetic circuit 501. The interrupt control unit 504 is a circuit that processes an interrupt request from an external input / output device or a peripheral circuit while the microprocessor 500 is executing a program. And processing an interrupt request. The register control unit 507 generates an address of the register 506 and reads and writes the register 506 in accordance with the state of the microprocessor 500. The timing control unit 505 generates a signal that controls the operation timing of the arithmetic circuit 501, the arithmetic circuit control unit 502, the instruction analysis unit 503, the interrupt control unit 504, and the register control unit 507. For example, the timing control unit 505 includes an internal clock generation unit that generates an internal clock signal CLK2 based on the reference clock signal CLK1. As shown in FIG. 12, the internal clock signal CLK2 is input to another circuit.

Next, an example of a semiconductor device having a function of performing transmission / reception of data without contact and an arithmetic function will be described. FIG. 13 is a block diagram illustrating a configuration example of such a semiconductor device. The semiconductor device illustrated in FIG. 13 can be referred to as a computer that operates by transmitting and receiving signals to and from an external device by wireless communication (hereinafter referred to as “RFCPU”).

As illustrated in FIG. 13, the RFCPU 511 includes an analog circuit unit 512 and a digital circuit unit 513. The analog circuit portion 512 includes a resonance circuit 514 having a resonance capacity, a rectifier circuit 515, a constant voltage circuit 516, a reset circuit 517, an oscillation circuit 518, a demodulation circuit 519, and a modulation circuit 520. The digital circuit unit 513 includes an RF interface 521, a control register 522, a clock controller 523, an interface 524, a central processing unit 525, a random access memory 526, and a read only memory 527.

The outline of the operation of the RFCPU 511 is as follows. A signal received by the antenna 528 generates an induced electromotive force by the resonance circuit 514. The induced electromotive force is charged in the capacitor unit 529 through the rectifier circuit 515. Capacitance portion 529 is preferably formed of a capacitor such as a ceramic capacitor or an electric double layer capacitor. The capacitor portion 529 does not need to be integrated on the substrate constituting the RFCPU 511, and can be incorporated into the RFCPU 511 as another component.

The reset circuit 517 generates a signal that resets and initializes the digital circuit portion 513. For example, a signal that rises after a rise in the power supply voltage is generated as a reset signal. The oscillation circuit 518 changes the frequency and duty ratio of the clock signal in accordance with the control signal generated by the constant voltage circuit 516. The demodulation circuit 519 is a circuit that demodulates the received signal, and the modulation circuit 520 is a circuit that modulates data to be transmitted.

For example, the demodulation circuit 519 is formed of a low-pass filter, and binarizes an amplitude modulation (ASK) reception signal based on the amplitude fluctuation. In addition, in order to transmit transmission data by changing the amplitude of an amplitude modulation (ASK) transmission signal, the modulation circuit 520 changes the amplitude of the communication signal by changing the resonance point of the resonance circuit 514.

The clock controller 523 generates a control signal for changing the frequency and duty ratio of the clock signal in accordance with the power supply voltage or the current consumption in the central processing unit 525. The power supply management circuit 530 monitors the power supply voltage.

A signal input from the antenna 528 to the RFCPU 511 is demodulated by the demodulation circuit 519 and then decomposed into a control command and data by the RF interface 521. The control command is stored in the control register 522. The control command includes reading of data stored in the read-only memory 527, writing of data to the random access memory 526, an arithmetic instruction to the central processing unit 525, and the like.

The central processing unit 525 accesses the read-only memory 527, the random access memory 526, and the control register 522 via the interface 524. The interface 524 has a function of generating an access signal for any of the read-only memory 527, the random access memory 526, and the control register 522 from the address requested by the central processing unit 525.

As a calculation method of the central processing unit 525, a method in which an OS (operating system) is stored in the read-only memory 527 and a program is read and executed together with activation can be employed. Further, it is also possible to adopt a method in which an arithmetic circuit is configured by a dedicated circuit and arithmetic processing is processed in hardware. In the system using both hardware and software, a system in which a part of arithmetic processing is performed by a dedicated arithmetic circuit and the remaining arithmetic operations are processed by the central processing unit 525 using a program can be applied.

In the manufacturing process of the SOI substrate used for the microprocessor and the RFCPU which is the semiconductor device of the present embodiment, the separation processing of the separation bond substrate is performed, and a plurality of semiconductor films are formed from one bond substrate. Thus, the manufacturing cost can be reduced and the productivity can be improved.

Note that the structure described in this embodiment can be combined with any of the structures described in the other embodiments as appropriate.

(Embodiment 5)
In this embodiment mode, a display device manufactured by applying the present invention will be described with reference to FIGS.

First, a liquid crystal display device will be described with reference to FIG. 14A is a plan view of a pixel of the liquid crystal display device, and FIG. 14B is a cross-sectional view of FIG. 14A taken along the line JK.

As shown in FIG. 14A, the pixel includes a single crystal semiconductor film 320, a scan line 322 intersecting with the single crystal semiconductor film 320, a signal line 323 intersecting with the scan line 322, a pixel electrode 324, and a pixel. An electrode 328 that electrically connects the electrode 324 and the single crystal semiconductor film 320 is provided. The single crystal semiconductor film 320 is a layer formed from a single crystal semiconductor film provided over the base substrate 120 and constitutes a TFT 325 of the pixel.

As the SOI substrate, the SOI substrate described in the above embodiment is used. As shown in FIG. 14B, a single crystal semiconductor film 320 is stacked over the base substrate 120 with the second insulating film 122 and the first insulating film 102 interposed therebetween. A single crystal semiconductor film 320 of the TFT 325 is a film formed by element isolation of a single crystal semiconductor film of an SOI substrate by etching. In the single crystal semiconductor film 320, a channel formation region 341 and an n-type high concentration impurity region 342 to which an impurity element is added are formed. The gate electrode of the TFT 325 is included in the scanning line 322, and one of the source electrode and the drain electrode is included in the signal line 323.

A signal line 323, a pixel electrode 324, and an electrode 328 are provided over the interlayer insulating film 327. A columnar spacer 329 is formed on the interlayer insulating film 327. An alignment film 330 is formed to cover the signal line 323, the pixel electrode 324, the electrode 328, and the columnar spacer 329. The counter substrate 332 is provided with a counter electrode 333 and an alignment film 334 that covers the counter electrode. The columnar spacer 329 is formed to maintain a gap between the base substrate 120 and the counter substrate 332. A liquid crystal layer 335 is formed in a gap formed by the columnar spacers 329. A connection portion between the signal line 323 and the electrode 328 and the high-concentration impurity region 342 has a step in the interlayer insulating film 327 due to the formation of the contact hole. Therefore, the alignment of the liquid crystal in the liquid crystal layer 335 is easily disturbed in the connection portion. For this reason, columnar spacers 329 are formed at the step portions to prevent disorder of the alignment of the liquid crystal.

Next, an electroluminescent display device (hereinafter referred to as an EL display device) will be described with reference to FIG. FIG. 15A is a plan view of a pixel of an EL display device, and FIG. 15B is a cross-sectional view of FIG. 15A taken along the line JK.

As shown in FIG. 15A, the pixel includes a selection transistor 401 made of TFT, a display control transistor 402, a scanning line 405, a signal line 406, a current supply line 407, and a pixel electrode 408. Each pixel is provided with a light-emitting element having a structure in which a layer (EL layer) formed including an electroluminescent material is sandwiched between a pair of electrodes. One electrode of the light emitting element is a pixel electrode 408. In the semiconductor film 403, a channel formation region, a source region, and a drain region of the selection transistor 401 are formed. In the semiconductor film 404, a channel formation region, a source region, and a drain region of the display control transistor 402 are formed. The semiconductor films 403 and 404 are layers formed from the single crystal semiconductor film 302 provided over the base substrate.

In the selection transistor 401, the gate electrode is included in the scanning line 405, one of the source electrode and the drain electrode is included in the signal line 406, and the other is formed as the electrode 410. In the display control transistor 402, the gate electrode 412 is electrically connected to the electrode 411, one of the source electrode and the drain electrode is formed as an electrode 413 electrically connected to the pixel electrode 408, and the other is supplied with current. Included in line 407.

The display control transistor 402 is a p-channel TFT. As shown in FIG. 15B, a channel formation region 451 and a p-type high concentration impurity region 452 are formed in the semiconductor film 404. Note that the SOI substrate manufactured in the embodiment is used as the SOI substrate.

An interlayer insulating film 427 is formed to cover the gate electrode 412 of the display control transistor 402. Over the interlayer insulating film 427, a signal line 406, a current supply line 407, electrodes 411, 413, and the like are formed. Further, a pixel electrode 408 that is electrically connected to the electrode 413 is formed over the interlayer insulating film 427. The peripheral portion of the pixel electrode 408 is surrounded by an insulating partition layer 428. An EL layer 429 is formed over the pixel electrode 408, and a counter electrode 430 is formed over the EL layer 429. A counter substrate 431 is provided as a reinforcing plate, and the counter substrate 431 is fixed to the base substrate 120 by a resin layer 432.

There are two methods for controlling the gradation of an EL display device: a current driving method in which the luminance of a light-emitting element is controlled by current, and a voltage driving method in which the luminance is controlled by voltage. When the difference in values is large, it is difficult to adopt, and for this purpose, a correction circuit for correcting variation in characteristics is required. Since an EL display is manufactured by a manufacturing method including an SOI substrate manufacturing process and a gettering process, characteristics of the selection transistor 401 and the display control transistor 402 are eliminated from pixel to pixel, so that a current driving method is employed. be able to.

In addition, in the manufacturing process of the SOI substrate used for the liquid crystal display device and the EL display device which is the semiconductor device of this embodiment, a separation processing process of the separation bond substrate is performed, and a plurality of semiconductor films are formed from one bond substrate. Since it is formed, the manufacturing cost can be reduced and the productivity can be improved.

Note that the structure described in this embodiment can be combined with any of the structures described in the other embodiments as appropriate.

(Embodiment 6)
In this embodiment, electronic devices manufactured by applying the present invention will be described with reference to FIGS.

Various electrical devices can be manufactured by using an SOI substrate. Electrical equipment includes televisions, video cameras, digital cameras, goggle-type displays (head-mounted displays), navigation systems, sound playback devices (car audio, audio components, etc.), computers, notebook computers, game machines, and personal digital assistants (Such as a mobile computer, a mobile phone, a portable game machine or an electronic book), an image playback device (specifically a DVD (digital versatile disc)) provided with a recording medium, and audio data stored in a recording medium such as a DVD, In addition, a device including a display device capable of displaying the stored image data is included, and examples thereof are shown in FIGS.

16A and 16B illustrate an example of a mobile phone to which the present invention is applied. FIG. 16A is a front view, FIG. 16B is a rear view, and FIG. It is a front view. The cellular phone 700 is composed of two housings 701 and 702. The cellular phone 700 is a so-called smartphone that has both functions of a cellular phone and a portable information terminal, has a built-in computer, and can perform various data processing in addition to voice calls.

A cellular phone 700 is composed of a housing 701 and a housing 702. The housing 701 includes a display portion 703, a speaker 704, a microphone 705, operation keys 706, a pointing device 707, a front camera lens 708, an external connection terminal jack 709, an earphone terminal 710, and the like. 711, an external memory slot 712, a rear camera 713, a light 714, and the like. The antenna is built in the housing 701.

In addition to the above structure, the cellular phone 700 may incorporate a non-contact IC chip, a small recording device, and the like.

The housings 701 and 702 that overlap each other (shown in FIG. 16A) can be slid, and are expanded as illustrated in FIG. 16C. The display portion 703 can incorporate a display panel or a display device to which the display device manufacturing method described in this embodiment is applied. Since the display portion 703 and the front camera lens 708 are provided on the same surface, they can be used as a videophone. Further, by using the display portion 703 as a viewfinder, still images and moving images can be taken with the rear camera 713 and the light 714.

By using the speaker 704 and the microphone 705, the mobile phone 700 can be used as an audio recording device (recording device) or an audio reproducing device. In addition, operation keys 706 can be used to perform incoming / outgoing calls, simple information input operations such as e-mail, scroll operation of a screen displayed on the display unit, cursor movement operation for selecting information displayed on the display unit, and the like. Is possible.

In addition, it is convenient to use the keyboard 711 when there is a lot of information to be handled, such as creation of a document or use as a portable information terminal. Furthermore, by sliding the overlapping housings 701 and 702 (FIG. 16A), they can be developed as shown in FIG. When used as a portable information terminal, the mouse can be operated smoothly by using the keyboard 711 and the pointing device 707. The external connection terminal jack 709 can be connected to an AC adapter and various cables such as a USB cable, and charging and data communication with a personal computer or the like are possible. In addition, a large amount of data can be stored and moved by inserting a recording medium into the external memory slot 712.

The rear surface of the housing 702 (FIG. 16B) is provided with a rear camera 713 and a light 714, and a still image and a moving image can be taken using the display portion 703 as a viewfinder.

Further, in addition to the above functional configuration, an infrared communication function, a USB port, a TV one-segment reception function, a non-contact IC chip, an earphone jack, or the like may be provided.

FIG. 17A illustrates a display device, which includes a housing 801, a support base 802, a display portion 803, a speaker portion 804, a video input terminal 805, and the like. The display device includes all information display devices such as a personal computer, a TV broadcast reception, and an advertisement display.

FIG. 17B illustrates a computer, which includes a housing 812, a display portion 813, a keyboard 814, an external connection port 815, a mouse 816, and the like.

FIG. 17C illustrates a video camera, which includes a display portion 822, an external connection port 824, a remote control receiving portion 825, an image receiving portion 826, operation keys 829, and the like.

In the various electronic devices described in this embodiment mode, a manufacturing process of an SOI substrate is performed, and a separation bond substrate regeneration process is performed to form a plurality of semiconductor films from a single bond substrate. Can be reduced and productivity can be improved.

Note that the structure described in this embodiment can be combined with any of the structures described in the other embodiments as appropriate.

In this example, an SOI substrate was manufactured using a bond substrate made of single crystal silicon, and the isolated single crystal silicon substrate formed as a by-product was regenerated according to a regeneration process including a CMP method with a low polishing rate. An SOI substrate was produced again using the recycled single crystal silicon substrate.

In this example, a rectangular single crystal silicon substrate having a 5 inch square was used as the bond substrate. First, a single crystal silicon substrate was thermally oxidized in an HCl atmosphere to form a thermal oxide film with a thickness of 100 nm. At this time, thermal oxidation was performed at a temperature of 950 ° C. for 3 hours in an atmosphere containing HCl at a rate of 3% by volume with respect to oxygen.

Next, the single crystal silicon substrate was irradiated with hydrogen from the surface of the thermal oxide film using an ion doping apparatus. In this example, an embrittlement layer was formed on the single crystal silicon substrate by ionizing and irradiating hydrogen. Ion doping was performed with an acceleration voltage of 40 kV and a dose of 2.0 × 10 ¹⁶ ions / cm ² . Thereby, an embrittlement layer was formed at a depth of about 210 nm from the surface of the thermal oxide film.

Next, the single crystal silicon substrate was bonded to a glass substrate through a thermal oxide film. Thereafter, heat treatment is performed at 200 ° C. for 120 minutes, and further, heat treatment is performed at 600 ° C. for 120 minutes, so that the single crystal silicon substrate is changed into a thin single crystal silicon layer and the remaining single crystal silicon substrate in the embrittlement layer. separated. Thereby, a first SOI substrate in which a single crystal silicon film is formed on a glass substrate via a thermal oxide film, and a first portion having a peripheral residual portion including a residual insulating film and a residual single crystal silicon layer in the peripheral portion. An isolated single crystal silicon substrate was produced.

Next, wet etching treatment was performed on the first separated single crystal silicon substrate using a mixed solution containing hydrofluoric acid, ammonium fluoride, and a surfactant (product name: LAL500, manufactured by Stella Chemifa Corporation) as an etchant. At this time, the liquid temperature was 20 ° C. and the etching time was 600 seconds.

Next, the first separated single crystal silicon substrate was polished by a CMP method with a low polishing rate. At this time, as the polishing cloth, a suede polishing cloth (IC1400 manufactured by Nitta Haas Co., Ltd.) was used. As a chemical solution for supplying slurry, a slurry liquid (NP8020 manufactured by Nitta Haas Co., Ltd., particle size 60 nm, diluted 20 times) Was used. Other CMP conditions were as follows. The slurry flow rate was 100 ml / min, the polishing pressure was 0.01 MPa, the spindle rotation speed was 20 rpm, the table rotation speed was 20 rpm, and the processing time was 3.4 minutes. In this way, a convex portion similar to the shape of the remaining peripheral portion was formed in the peripheral portion of the regenerated single crystal silicon substrate thus regenerated.

A thermal oxide film is again formed on the regenerated single crystal silicon substrate thus regenerated, irradiated with ions, bonded to the glass substrate, and heat-treated to form a single crystal silicon film on the glass substrate. A second separated single crystal silicon substrate having the second SOI substrate thus formed and a remaining portion including a remaining insulating film and a remaining single crystal silicon layer in a peripheral portion was manufactured.

Further, a similar regeneration process was performed on the second separated single crystal silicon substrate to produce a second recycled single crystal silicon substrate. Then, as described above, a thermal oxide film is again formed on the second regenerated single crystal silicon substrate, irradiated with ions, bonded to the glass substrate, and subjected to heat treatment, so that the single crystal silicon film is formed on the glass substrate. A third separated single crystal silicon substrate having a formed third SOI substrate and a remaining portion including a remaining insulating film and a remaining single crystal silicon layer in a peripheral portion was manufactured.

FIG. 18A is a top view photograph of the second separated single crystal silicon substrate. On the surface of the second separated single crystal silicon substrate, a single crystal silicon layer 1002 appears instead of the thermal oxide film covering the recycled bond substrate. Therefore, the thermal oxide film formed on the recycled bond substrate and the single crystal silicon layer on the embrittlement layer are separated cleanly with the embrittlement layer as a boundary, and bonded to the glass substrate to form a second SOI substrate. It is inferred that

Further, four second SOI substrates are manufactured under the same conditions, and a particle inspection machine (manufactured by Hitachi Electronics Engineering Co., Ltd., glass substrate surface inspection apparatus GI) is used for a defect region in the single crystal silicon film on the second SOI substrate. -4600). The particle inspection device irradiates a sample substrate with a laser beam having an output of 30 mW and a wavelength of 780 nm, and counts the number of defective regions by detecting scattered light reflected by unevenness and transmitted light that has passed through the defective region with a light receiver. be able to. By operating the laser beam in the X-axis direction and operating the sample substrate together with the table in the Y-axis direction, a single crystal silicon film was scanned 107 mm square to detect a defect region of the single crystal silicon film. The number of detections per 107 mm square of each second SOI substrate was 66, 148, 77, and 95, and the average number of detections was 96.5. This is a value comparable to a SOI substrate in which a single crystal silicon layer is formed on a glass substrate using a commercially available single crystal silicon substrate. However, the dust inspection machine used in the present embodiment detects and detects the single crystal silicon defect region as a severe recess. For this reason, since surface irregularities, dust and scratches are also detected, it is necessary to evaluate and compare them as qualitative numerical values.

Next, the peripheral portion 1000 of the second separated single crystal silicon substrate will be examined. FIG. 18B is an enlarged photograph of the peripheral portion 1000 in FIG. As shown in FIG. 18B, a single crystal silicon layer 1002, a thermal oxide film 1004, a single crystal silicon layer 1006, and a thermal oxide film 1008 are formed in this order from the center side on the periphery of the isolated single crystal silicon substrate. Has been. Here, the single crystal silicon layer 1002 is a separation surface from the single crystal silicon film over the second SOI substrate, and the thermal oxide film 1004 and the thermal oxide film 1008 are formed when the second SOI substrate is manufactured. This is a portion that is not bonded to the substrate and remains as a peripheral remaining portion on the second separated single crystal silicon substrate.

The single crystal silicon layer 1006 seen between the thermal oxide film 1004 and the thermal oxide film 1008 which is the peripheral remaining portion is formed so as to surround the single crystal silicon layer 1002 not only on the peripheral portion 1000 but on the entire SOI substrate. . This is because a thermal oxide insulating film located on the single crystal silicon layer 1006 in the remaining peripheral portion is bonded to a glass substrate when the second SOI substrate is manufactured, and the single crystal silicon layer 1006 is a recycled single crystal silicon substrate. This is presumed to have been separated as a separation surface.

Here, FIG. 19 shows the result of the step measurement performed on the line segment C1-C2 in FIG. In FIG. 19, the vertical axis represents the step, and the horizontal axis represents the length along the line segment C1-C2. The unit is μm on both the vertical and horizontal axes. 19, the first region 1012 is a single crystal silicon layer 1002, the second region 1014 is a thermal oxide film 1004, the third region 1016 is a single crystal silicon layer 1006, and the fourth region 1018 is a thermal oxide film 1008. It corresponds. There are three steps having a height of about 210 nm on the boundary between the first region 1012, the second region 1014, the third region 1016, and the region 1008. Since the height of this step is exactly the same as the depth from the surface of the thermal oxide film to the embrittlement layer, the single crystal silicon film and the thermal oxide film on the embrittlement layer corresponding to the third region 1016 are Like the region 1012, it is presumed that it was bonded to the second SOI substrate. Therefore, the shape of the peripheral portion of the recycled single crystal silicon substrate is presumed to be a shape in which the right end of the second region 1014 and the left end of the fourth region 1018 are connected by a step shape of the third region 1016.

Further, the remaining peripheral portion is defined as a fifth region 1020 and a sixth region 1022 with the lowest step of the second region 1014 as a boundary. The sixth region 1022 corresponds to a convex portion on the periphery of the regenerated single crystal silicon substrate where the shape of the remaining portion on the periphery of the first separated single crystal silicon substrate remains after the reprocessing step. The fifth region 1020 is a new remaining portion that is formed while the first separated single crystal silicon substrate becomes the second separated single crystal silicon substrate. The width of the fifth region 1020 was about 280 μm. Therefore, each time the reprocessing process is performed once, the single crystal silicon layer on the SOI substrate has a shape that shrinks by the width of the new remaining portion from the outermost edge to the inside, and the width of the peripheral remaining portion of the separated single crystal silicon substrate is new. It will increase by the width of the remaining part.

In addition, the third separated single crystal silicon substrate was almost the same as the second separated single crystal silicon substrate. The peripheral remaining portion of the third isolated single crystal silicon substrate also has a shape in which a new residual portion is added to the peripheral residual portion of the second isolated single crystal silicon substrate described above.

As described above, an SOI substrate is manufactured using the single crystal silicon substrate, and the separated single crystal silicon substrate formed as a by-product is regenerated according to a regeneration process including a CMP method with a low polishing rate, and the obtained regenerated single crystal silicon substrate is obtained. It was shown that an SOI substrate can be fabricated again using At this time, since the regeneration process step is performed by a CMP method with a low polishing rate, a convex portion is formed in the peripheral portion of the recycled single crystal silicon substrate, but it was shown that it can be used for manufacturing an SOI substrate without any problem.

4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing an SOI substrate of the present invention. 4A and 4B illustrate an example of a manufacturing process of an SOI substrate of the present invention. 4A and 4B illustrate an example of a manufacturing process of an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing a semiconductor device using an SOI substrate of the present invention. 4A and 4B illustrate an example of a method for manufacturing a semiconductor device using an SOI substrate of the present invention. FIG. 11 illustrates an example of a semiconductor device using an SOI substrate of the present invention. FIG. 11 illustrates an example of a semiconductor device using an SOI substrate of the present invention. FIG. 11 illustrates an example of a display device using an SOI substrate of the present invention. FIG. 11 illustrates an example of a display device using an SOI substrate of the present invention. FIG. 13 illustrates an electronic device using an SOI substrate of the present invention. FIG. 13 illustrates an electronic device using an SOI substrate of the present invention. The photograph of the separation surface of the isolation bond board | substrate of the SOI substrate of this invention. The level | step difference measurement result of the peripheral part of the isolation | separation bond board | substrate of the SOI substrate of this invention.

Explanation of symbols

100 Bond substrate 102 Insulating film 104 Embrittlement layer 106 Insulating film 110 Junction boundary 111 Separation boundary 120 Base substrate 121 First isolation bond substrate 122 Insulating film 123 Residual insulating film 124 First semiconductor film 125 Residual semiconductor layer 126 1 Remaining portion 127 Residual embrittlement layer 129 Separation surface 130 Protruding portion 132 First recycled bond substrate 134 Insulating film 135 Reference surface 136 Embrittlement layer 137 Tip 138 Base substrate 140 Insulating film 142 Second separation bond substrate 144 Residual insulation Film 146 Residual semiconductor layer 148 Residual embrittlement layer 150 Second residual portion 151 New residual portion 152 Second semiconductor film 154 Second recycled bond substrate 160 Third separation bond substrate 162 Residual insulating film 164 Residual semiconductor layer 166 Residual Embrittlement layer 168 Third remaining portion 170 Separation surface 172 Third recycled bond substrate 251 Conductor film 252 Semiconductor film 254 Insulating film 255 Gate electrode 256 Gate electrode 257 Low concentration impurity region 258 Channel forming region 259 High concentration impurity region 260 Channel forming region 261 Side wall insulating film 265 Resist 267 High concentration impurity region 268 Insulating film 269 Interlayer insulation Film 270 Wiring 302 Single crystal semiconductor film 320 Single crystal semiconductor film 322 Scan line 323 Signal line 324 Pixel electrode 325 TFT
327 Interlayer insulating film 328 Electrode 329 Columnar spacer 330 Alignment film 332 Counter substrate 333 Counter electrode 334 Alignment film 335 Liquid crystal layer 341 Channel formation region 342 High-concentration impurity region 401 Selection transistor 402 Display control transistor 403 Semiconductor film 404 Semiconductor film 405 Scanning Line 406 Signal line 407 Current supply line 408 Pixel electrode 410 Electrode 411 Electrode 412 Gate electrode 413 Electrode 427 Interlayer insulating film 428 Partition layer 429 EL layer 430 Counter electrode 431 Counter substrate 432 Resin layer 451 Channel formation region 452 High concentration impurity region 500 Micro Processor 501 Arithmetic circuit 502 Arithmetic circuit control unit 503 Instruction analysis unit 504 Control unit 505 Timing control unit 506 Register 507 Register control unit 508 Bus interface 509 Dedicated memory 510 Memory Interface 511 RFCPU
512 Analog circuit unit 513 Digital circuit unit 514 Resonant circuit 515 Rectifier circuit 516 Constant voltage circuit 517 Reset circuit 518 Oscillator circuit 519 Demodulator circuit 520 Modulator circuit 521 RF interface 522 Control register 523 Clock controller 524 Interface 525 Central processing unit 526 Random access memory 527 Dedicated memory 528 Antenna 529 Capacitance unit 530 Power management circuit 700 Mobile phone 701 Case 702 Case 703 Display unit 704 Speaker 705 Microphone 706 Operation key 707 Pointing device 708 Front camera lens 709 External connection terminal jack 710 Earphone terminal 711 Keyboard 712 External Memory slot 713 Back camera 714 Light 801 Case 802 Support base 803 Display unit 80 4 Speaker unit 805 Video input terminal 812 Case 813 Display unit 814 Keyboard 815 External connection port 816 Mouse 822 Display unit 824 External connection port 825 Remote control reception unit 826 Image reception unit 829 Operation key

Claims (16)

Form an insulating film on the bond substrate where the peripheral part is thinner than the central part,
Forming an embrittled layer by irradiating ions from the surface of the bond substrate;
The bond substrate is bonded to the base substrate through the insulating film,
An SOI substrate manufacturing step of separating the bond substrate in the embrittlement layer into a semiconductor film bonded to the base substrate through the insulating film and a separation bond substrate;
Performing a first polishing on the separation bond substrate;
Producing a first regenerative bond substrate having a convex portion formed in the periphery,
The shape of the first recycled bond substrate is such that a distance D1 from a reference surface parallel to the central portion and below the convex portion to the tip of the convex portion, and a distance D2 from the reference surface to the central portion, A first regeneration processing step satisfying a relationship of D1 ≦ D2,
A method for manufacturing an SOI substrate, comprising: In claim 1,
A method for manufacturing an SOI substrate, comprising performing wet etching with an etchant containing hydrofluoric acid on the separation bond substrate before performing the first polishing on the separation bond substrate. Form an insulating film on the bond substrate where the peripheral part is thinner than the central part,
Forming an embrittled layer by irradiating ions from the surface of the bond substrate;
The bond substrate is bonded to the base substrate through the insulating film,
An SOI substrate manufacturing step of separating the bond substrate in the embrittlement layer into a semiconductor film bonded to the base substrate through the insulating film and a separation bond substrate;
Performing a first polishing on the separation bond substrate;
Producing a first regenerative bond substrate having a convex portion formed in the periphery,
The shape of the first recycled bond substrate is such that a distance D1 from a reference surface parallel to the central portion and below the convex portion to the tip of the convex portion, and a distance D2 from the reference surface to the central portion, A first regeneration processing step satisfying a relationship of D1 ≦ D2,
Including
A method for manufacturing an SOI substrate in which the first reproduction bond substrate is used as the bond substrate and the SOI substrate production step and the first reproduction treatment step are repeated.
Each time the SOI substrate manufacturing process and the first regeneration process are repeated a plurality of times, instead of the first regeneration process,
Perform wet etching with an etchant containing hydrofluoric acid on the separation bond substrate,
The separation bond substrate is subjected to a second polishing having a higher polishing rate than the first polishing,
A method for manufacturing an SOI substrate, comprising performing a second regeneration processing step of fabricating a second recycled bond substrate having a peripheral portion thinner than a central portion. In claim 3,
A method for manufacturing an SOI substrate, wherein the first polishing is performed after the second polishing. In claim 3 or claim 4,
A method for manufacturing an SOI substrate, wherein a polishing allowance of the second polishing is 5 μm to 20 μm. In any one of Claim 3 thru | or 5,
An SOI substrate characterized in that the second regeneration processing step is performed instead of the first regeneration processing step every time the SOI substrate manufacturing step and the first regeneration processing step are repeated 10 to 30 times. Manufacturing method. In any one of Claims 1 thru | or 6,
A method for manufacturing an SOI substrate, wherein a polishing allowance of the first polishing is 500 nm to 1000 nm. In any one of Claims 1 thru | or 7,
A method for manufacturing an SOI substrate, wherein a chemical mechanical polishing (CMP method) is used as the polishing. In any one of Claims 2 thru | or 8,
The method for manufacturing an SOI substrate, wherein the etchant containing hydrofluoric acid is a mixed solution containing hydrofluoric acid, ammonium fluoride, and a surfactant. In any one of Claims 1 thru | or 9,
The method for manufacturing an SOI substrate, wherein the insulating film is a single film selected from a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a silicon nitride oxide film, or a stack of a plurality of films. In any one of Claims 1 thru | or 9,
The method for manufacturing an SOI substrate, wherein the insulating film is the silicon oxide film and is formed by a chemical vapor deposition method using an organosilane gas. In any one of Claims 1 thru | or 9,
The method for manufacturing an SOI substrate, wherein the insulating film is the silicon oxide film, and is formed by thermally oxidizing the bond substrate. In any one of Claims 1 to 12,
A method for manufacturing an SOI substrate, wherein a second insulating film is formed on and in contact with the base substrate. In claim 13,
The method for manufacturing an SOI substrate, wherein the second insulating film is a silicon nitride film or a silicon nitride oxide film. In any one of Claims 1 thru | or 14,
The method for manufacturing an SOI substrate, wherein the bond substrate is a single crystal silicon substrate. In any one of Claims 1 to 15,
The method for manufacturing an SOI substrate, wherein the base substrate is aluminosilicate glass, barium borosilicate glass, or aluminoborosilicate glass.