JP2010085899A - Method and apparatus for manufacturing liquid crystal apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture a liquid crystal apparatus for displaying an image at high contract in an ODF method e.g. <P>SOLUTION: One substrate is rotated around a rotation axis passing a center point (C) of the substrate surface of one substrate out of an upper substrate (220) and a lower substrate (210) so as to correct a mutual deviation between respective rubbing axes of a first orientation film (216) and a second orientation film (222) based on the optical characteristics of a partial structure (1a) detected by an optical characteristic detection device (740). The substrate is rotated by a rotation device (750) provided with a rotary mechanism for rotating one of the upper substrate (220) and the lower substrate (210). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a technical field of a liquid crystal device manufacturing method for manufacturing a liquid crystal device using, for example, an ODF (One Drop Filling) method, and a liquid crystal device manufacturing apparatus capable of executing such a liquid crystal device manufacturing method. .

  In this type of liquid crystal device manufacturing method, liquid crystal is dropped on a large first substrate having an alignment film formed on a substrate on which transistors and pixel electrodes are formed, and then the first substrate and the first substrate are bonded to each other through an adhesive. A liquid crystal drop bonding method (ODF method) is used in which a large-sized second substrate disposed so as to face the substrate is bonded under vacuum to form a bonded substrate having a size larger than the liquid crystal device to be manufactured. There is a case. According to the ODF method, after bonding a pair of large substrates through an adhesive, the bonded substrates are separated into a plurality of portions (multiple chamfering), and a plurality of liquid crystal devices having a size smaller than the large substrate are obtained. It is possible to manufacture in parallel (for example, refer to Patent Document 1).

  In manufacturing a liquid crystal device, the alignment films provided on each of the pair of substrates that sandwich the liquid crystal layer are rubbed along a predetermined direction. Each rubbing direction of the alignment film provided on each of the pair of substrates, in other words, the rubbing axis is set so that each rubbing axis forms a predetermined angle according to the alignment mode of the liquid crystal such as the twist mode or the vertical mode. Has been.

JP 2003-233053 A

  However, even if the alignment film provided on each of the pair of substrates sandwiching the liquid crystal layer is rubbed along a predetermined direction, it is not always rubbed in the predetermined direction, and the rubbing axis is shifted from the target direction. May be set. In addition, even when the rubbing axis is set in a predetermined direction according to the alignment mode of the liquid crystal for each of the alignment films formed on each of the pair of substrates, When the angle formed by the rubbing axes of these alignment films deviates from the angle that should be formed by the respective rubbing axes of the alignment films depending on the alignment mode of the liquid crystal due to insufficient bonding accuracy of There is also. Such an angle shift between the rubbing axes is a cause of reducing the contrast of an image displayed by the liquid crystal device.

  Therefore, the present invention has been made in view of the above problems and the like. For example, a liquid crystal device manufacturing method capable of manufacturing a liquid crystal device capable of displaying an image with high contrast and a method of manufacturing such a liquid crystal device are executed. It is an object of the present invention to provide an apparatus for manufacturing a liquid crystal device.

  In order to solve the above problems, a method for manufacturing a liquid crystal device according to the present invention includes a first substrate and a plurality of panel formation regions on a lower substrate having a first alignment film formed on the first substrate. A first step of applying an adhesive in a frame shape, a second step of dropping liquid crystal in a vacuum in each of the plurality of panel formation regions after the first step, a second substrate, and the second A third step of disposing an upper substrate having a second alignment film formed on one surface side of the substrate on the lower substrate such that the second alignment film faces the lower substrate; A fourth structure that specifies an optical characteristic of a partial structure that is a portion occupying the panel formation region in a laminated structure including a liquid crystal layer sandwiched between the side substrate, the upper substrate, and the lower substrate and the upper substrate; And the first orientation based on the identified optical properties And the one substrate with a rotation axis passing through a center point of the substrate surface of one of the upper substrate and the lower substrate so as to correct the mutual displacement between the rubbing axes of the second alignment film. And a fifth step of rotating.

  According to the method for manufacturing a liquid crystal device according to the present invention, in the first step, the first substrate is a large substrate having a large liquid crystal device finally formed. The “panel forming region” is a region where a panel-like liquid crystal device manufactured through a series of steps including the second to fifth steps is formed. The first alignment film is an organic film made of an organic material such as polyimide, and is rubbed so that a rubbing axis corresponding to the alignment mode of the liquid crystal is formed.

  In the second step, for example, the inside of the chamber capable of maintaining airtightness is maintained in a vacuum state, and the liquid crystal is dropped in the chamber.

  In the third step, the second substrate is also a large substrate having a large liquid crystal device finally formed, like the first substrate. Similar to the first alignment film, the second alignment film is an organic film made of an organic material such as polyimide, and is rubbed so that a rubbing axis corresponding to the alignment mode of the liquid crystal is formed. Here, the adhesive is in an uncured state at the stage where the upper substrate is disposed on the lower substrate. Therefore, the upper substrate and the lower substrate are not completely fixed to each other by the adhesive in a state where the liquid crystal layer is sandwiched between the upper substrate and the lower substrate in each of the plurality of panel formation regions.

  In the fourth step, a partial structure that is a portion that occupies the panel forming region in the laminated structure including the liquid crystal layer sandwiched between the lower substrate and the upper substrate, and the lower substrate and the upper substrate. Identify optical properties. More specifically, in the laminated structure, the optical characteristics such as the light transmittance of the partial structure can be measured because the upper substrate and the lower substrate are not completely fixed to each other via an adhesive. It is. The partial structure is a portion to be one of a plurality of liquid crystal devices manufactured in parallel by finally separating the laminated structure from each other for each of a plurality of panel formation regions. In the fourth step, for example, polarizing plates are arranged on both sides of the laminated structure, and inspection light such as laser light is incident on the partial structure from the one polarizing plate through the one polarizing plate. The transmitted light transmitted through the partial structure is detected through the other polarizing plate. In addition, when detecting the transmitted light transmitted through the partial structure, each of the two polarizing plates arranged on both sides of the laminated structure is rotated so that the extinction ratio of the partial structure is the highest. The rotation angle of the polarizing plate when it becomes higher is specified. According to the rotation angle specified in this way, the angle formed by the rubbing axes of the first alignment film and the second alignment film is an angle formed by the rubbing axes, and is set according to the alignment mode. It is possible to specify a deviation angle indicating how much the ideal angle is deviated.

  In the fifth step, one of the upper substrate and the lower substrate is corrected based on the specified optical characteristics so as to correct a displacement between the rubbing axes of the first alignment film and the second alignment film. The one substrate is rotated about a rotation axis passing through the center point of the substrate surface of the substrate. Here, “the misalignment between the rubbing axes” means an angle formed by the rubbing axes of the first alignment film and the second alignment film is an angle formed by the rubbing axes, and is ideally determined by the alignment mode. This is a deviation angle indicating how much the angle deviates from a certain angle.

  Thereafter, the upper substrate and the lower substrate are fixed to each other by curing the adhesive, and then the plurality of liquid crystal devices are manufactured in parallel by separating the plurality of partial structures from each other.

  Therefore, according to the method for manufacturing a liquid crystal device according to the present invention, the angle formed by the rubbing axes of the first alignment film and the second alignment film is corrected to an ideal angle set according to the alignment mode of the liquid crystal. For example, it is possible to increase the contrast when a liquid crystal device manufactured using the ODF method displays an image.

  In order to solve the above-described problems, the liquid crystal device manufacturing apparatus according to the present invention includes a first substrate and a plurality of panel formation regions on a lower substrate having a first alignment film formed on the first substrate. A coating means for applying an adhesive in a frame shape, a dropping means for dropping liquid crystal in a vacuum in each of the plurality of panel forming regions after the first step, a second substrate, and a second substrate Arrangement means for disposing an upper substrate having a second alignment film formed on one surface side on the lower substrate such that the second alignment film faces the lower substrate, the lower substrate, and A specifying means for specifying optical characteristics of the upper structure, and a partial structure that is a portion occupying the panel formation region of the laminated structure including the liquid crystal layer sandwiched between the lower substrate and the upper substrate; Based on the specified optical characteristics, the first orientation And the one substrate with a rotation axis passing through a center point of the substrate surface of one of the upper substrate and the lower substrate so as to correct the mutual displacement between the rubbing axes of the second alignment film. Rotating means for rotating the.

  According to the apparatus for manufacturing a liquid crystal device according to the present invention, a plurality of liquid crystal devices capable of displaying images with high contrast can be manufactured in parallel as in the above-described method for manufacturing a liquid crystal device.

  Such an operation and other advantages of the present invention will become apparent from the embodiments described below.

  Hereinafter, embodiments of a liquid crystal device manufacturing method and a liquid crystal device manufacturing device according to the present invention will be described with reference to the drawings.

<1: Liquid crystal device>
The configuration of the liquid crystal device according to the present embodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is a plan view of the liquid crystal device according to the present embodiment as viewed from the counter substrate side, and FIG. 2 is a cross-sectional view taken along the line II-II ′ of FIG. FIG. 3 is a circuit diagram showing a circuit configuration in the image display area 10a of the liquid crystal device according to the present embodiment.

  1 and 2, the liquid crystal device 1 includes a TFT array substrate 10, a counter substrate 20, a seal portion 52, and a plurality of terminals 102.

  In the liquid crystal device 1, the planar shapes are each rectangular, and the TFT array substrate 10 and the counter substrate 20 that overlap each other are arranged to face each other. A liquid crystal layer 50 made of liquid crystal is sealed between the TFT array substrate 10 and the counter substrate 20. The TFT array substrate 10 and the counter substrate 20 are bonded to each other by a seal portion 52 provided in a seal region that is a part of a region located around the image display region 10a. The liquid crystal layer 50 is configured such that when the liquid crystal panel 1 is driven, the contrast of the image and the light transmittance in the liquid crystal device 1 are variable according to the image signal.

  The TFT array substrate 10 includes various elements such as pixel switching TFTs and wirings formed on a transparent substrate body such as a glass substrate. Each of the TFT array substrate 10 and the counter substrate 20 corresponds to the size of the liquid crystal device 1 to be formed after the pair of large substrates are bonded to each other by the seal portion 52 and then the bonded substrate including the pair of large substrates is formed. It is formed by separating each substrate portion. An alignment film is formed on the surface of the TFT array substrate 10 and the counter substrate 20 facing the liquid crystal layer 50, and the alignment state of the liquid crystal in each pixel portion is controlled in accordance with an image signal.

  The seal portion 52 is formed in a frame shape so as to surround the image display region 10a on the TFT array substrate 10 when seen in a plan view. The seal portion 52 is formed by curing an adhesive applied on the TFT array substrate 10 to bond the two substrates together when the liquid crystal device 1 is manufactured. For example, the seal portion 52 is made of a polymer material such as an epoxy resin. It is configured. In the seal portion 52, a gap material such as glass fiber or glass beads for setting the distance between the TFT array substrate 10 and the counter substrate 20 (inter-substrate gap) to a predetermined value may be dispersed.

  In FIG. 1, in the manufacturing process of the liquid crystal device 1, the seal portion 52 cures the applied adhesive after applying the adhesive by, for example, printing or writing with a single stroke (that is, an application method using a dispenser). It is formed by letting. More specifically, for example, before the plurality of liquid crystal devices 1 are separated from each other, that is, before the pair of large substrates bonded to each other is separated for each liquid crystal device 1, For example, it is formed by drawing an adhesive in a frame shape for each region corresponding to a substrate portion to be each liquid crystal device 1 in one large substrate of a pair of large substrates.

  After the liquid crystal is dropped on the region surrounded by the uncured seal portion 52 formed in the frame shape, that is, the region that becomes the image display region 10a after the liquid crystal panel 1 is completed, the liquid crystal is interposed between the pair of large substrates. The pair of large substrates are bonded to each other through an uncured seal portion 52 so that the seal portion 52 is sealed, the seal portion 52 is cured by heat treatment, and each of the plurality of substrate portions to be the liquid crystal device 1 is provided. The liquid crystal is sealed. That is, the liquid crystal device 1 is manufactured by applying a liquid crystal dropping and bonding method (ODF method) as described later. The liquid crystal device 1 is formed by separating (breaking) a pair of large substrates bonded to each other after the liquid crystal is sealed.

  A light-shielding frame light-shielding film 53 that defines the frame area of the image display region 10a is provided on the counter substrate 20 side in parallel with the inside of the seal region where the seal portion 52 is disposed. However, a part or all of the frame light shielding film 53 may be formed on the counter substrate 20 so as to be arranged on the upper layer side of the electrode, or may be formed as a built-in light shielding film on the TFT array substrate 10 side. Also good.

  The plurality of terminals 102 are formed so as not to overlap the seal portion 52 in a region extending along one side of the four sides defining the substrate surface of the TFT array substrate 10 and extending outside the image display region 10a. The pixel portion constituting the image display area 10a and an external circuit such as an FPC (Flexible Printed Circuit) or an IC mounted on the FPC are electrically connected to each other.

  The liquid crystal device 1 is a data line driving circuit which is formed in a region located outside the seal region where the seal portion 52 is arranged, in a region located around the image display region 10a, and supplies an image signal to the pixel portion. 101 and a scanning line driving circuit 102 that is formed in a region inside the seal portion 52 and supplies a scanning signal for switching control of the operation of each pixel portion. However, the data line drive circuit 101 may be formed in a region located inside the seal region where the seal portion 52 is disposed, and a part of the data line drive circuit 101 is a seal region where the seal portion 52 is disposed. May be formed. Further, the scanning line driving circuit 102 may be similarly formed in a region located outside the seal region, or a part thereof may be formed in the seal region.

  In FIG. 2, an alignment film 16 is formed on the TFT array substrate 10 on the pixel electrode 9a after the pixel switching TFT (Thin Film Transistor), the scanning line, the data line and the like are formed. Yes. On the other hand, although the detailed configuration is omitted, in the liquid crystal device 1, the counter electrode 21 formed on the counter substrate 20 is disposed so as to face the pixel electrode 9a, and above (on the lower side in the drawing). An alignment film 22 is formed. The angle formed by the rubbing axes of the alignment films 16 and 22 is an angle that should be set according to the alignment mode of the liquid crystal molecules contained in the liquid crystal layer 50 by the method of manufacturing a liquid crystal device according to the present embodiment described later. Is set to

  As the TFT array substrate 10 and the counter substrate 20, various substrates such as a glass substrate, quartz, a plastic substrate, or a silicon substrate can be used. In addition, the area | region which comprises the image display area 10a and permeate | transmits light in each of the some pixel part arranged in the matrix form is called what is called a black matrix formed in the image display area 10a at the grid | lattice form. It is defined by the light shielding film 23.

  Next, a circuit configuration in the image display region 10a of the liquid crystal panel 1 will be described with reference to FIG.

  In FIG. 3, each of a plurality of pixel portions 72 formed in a matrix that forms the image display area 10a of the liquid crystal device 1 includes a pixel electrode 9a, a TFT 30, and a liquid crystal element 50a. The TFT 30 is electrically connected to the pixel electrode 9a, performs switching control of the pixel electrode 9a during operation of the liquid crystal panel 1, and drives the liquid crystal element 50a according to the control. The data line 6a to which the image signal is supplied is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn to be written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. May be.

  The scanning line 3a is electrically connected to the gate of the TFT 30, and the liquid crystal panel 1 sequentially scans the scanning signal G1, G2,..., Gm to the scanning line 3a in this order at a predetermined timing. It is comprised so that it may apply. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and the image signal S1, S2,... Supplied from the data line 6a is closed by closing the switch of the TFT 30 serving as a switching element for a certain period. Sn is written at a predetermined timing. Image signals S1, S2,..., Sn written to the liquid crystal via the pixel electrode 9a are held for a certain period with the counter electrode formed on the counter substrate.

  The liquid crystal contained in the liquid crystal layer 50 modulates light and enables gradation display by changing the orientation and order of the molecular assembly depending on the applied voltage level. In the normally white mode, the transmittance for incident light and reflected light is reduced according to the voltage applied in units of each pixel unit. In the normally black mode, the transmittance is applied in units of each pixel unit. The transmittance for incident light and reflected light is increased according to the voltage, and light having a contrast corresponding to the image signal is emitted from the liquid crystal panel 1 as a whole. The storage capacitor 70 is added in parallel with the liquid crystal element formed between the pixel electrode 9a and the counter electrode 21 in order to prevent the image signal from leaking.

<2: Manufacturing apparatus for liquid crystal device>
Next, a configuration of a liquid crystal device manufacturing apparatus capable of executing a liquid crystal device manufacturing method described later will be described with reference to FIG. FIG. 4 is a block diagram showing the main configuration of the liquid crystal device manufacturing apparatus according to this embodiment.

  In FIG. 4, a manufacturing apparatus 700 includes a coating apparatus 710 and a liquid crystal dropping apparatus 720 which are examples of the “coating means”, “dropping means”, “positioning means”, “specifying means”, and “rotating means” of the present invention. , A conveyance device 730, an optical property detection device 740, a rotation device 750, and a control device 760 for controlling the operations of these devices. The operation of these devices will be described in detail together with a method for manufacturing a liquid crystal device described later.

<3: Manufacturing method of liquid crystal device>
Next, a method for manufacturing the liquid crystal device according to the present embodiment will be described with reference to FIGS. 5 to 7 are process plan views (parts 1, 2, and 3) showing some processes of the method of manufacturing the liquid crystal device according to the present embodiment. 8 is a cross-sectional view taken along the line VIII-VIII ′ of FIG. 9 is a cross-sectional view taken along the line IX-IX ′ of FIG. 10 is a cross-sectional view taken along the line XX ′ of FIG. FIG. 11 is a schematic process diagram schematically showing a part of the process of the manufacturing method of the liquid crystal device according to the present embodiment. FIG. 12 is a process plan view (part 4) illustrating a part of the process of the method for manufacturing the liquid crystal device according to the present embodiment. Note that the first substrate 210a, the lower substrate 210, the second substrate 220a, the upper substrate 220, and the laminated structure 230 are actually rectangular, but in FIGS. 5 to 7 and FIG. It is drawn as a drawing extracted from a part of an actual substrate.

  As shown in FIGS. 5 and 8, each of the plurality of panel formation regions R on the lower substrate 210 having the first substrate 210a and the first alignment film 216 formed on the first substrate 210a has a frame shape. Adhesive 52a is applied. In the drawing, separation lines 250X and 250Y extending in the X direction and the Y direction and intersecting each other define a panel forming region R according to the intersection, and separate the plurality of liquid crystal devices 1 from each other in a later process. At this time, the liquid crystal devices 1 are separated from each other by these separation lines. The first alignment film 216 is an organic film made of an organic material such as polyimide, and is rubbed so that a rubbing axis corresponding to the alignment mode of the liquid crystal in the finally manufactured liquid crystal device 1 is formed. ing. The adhesive 52a is an uncured seal portion 52. The adhesive 52a is applied in a vacuum by a coating device 710.

  Next, as shown in FIGS. 6 and 9, liquid crystal is dropped into each of the plurality of panel formation regions R in vacuum to form a liquid crystal layer 50. The liquid crystal is dropped by the liquid crystal dropping device 720 having a chamber capable of maintaining airtightness. More specifically, the liquid crystal dropping device 720 maintains the inside of the chamber in a vacuum state with the lower substrate 210 being transferred to the chamber, and each of the inner regions of the adhesive material 52a applied in a frame shape. Drop liquid crystal.

  Next, as shown in FIGS. 7 and 10, an upper substrate 220 having a large second substrate 220a and a second alignment film 222 formed on one surface side of the second substrate 220a is formed into a second alignment film. The laminated structure 230 is formed by disposing on the lower substrate 210 such that 222 faces the lower substrate 210. Similarly to the first substrate 210, the second substrate 220 is also a large substrate larger than the size of the liquid crystal device 1 to be finally formed. Similar to the first alignment film 216, the second alignment film 222 is an organic film made of an organic material such as polyimide, and is rubbed so that a rubbing axis corresponding to the alignment mode of the liquid crystal is formed. Yes. Here, when the upper substrate 220 is disposed on the lower substrate 210, the adhesive 52a is in an uncured state. Therefore, the upper substrate 220 and the lower substrate 210 are completely fixed to each other by the adhesive 52a in a state where the liquid crystal layer 50 is sandwiched between the upper substrate 220 and the lower substrate 210 in each of the plurality of panel formation regions R. Not.

  When the upper substrate 220 is disposed on the lower substrate 210, the transfer device 730 transfers the upper substrate 220 onto the lower substrate 210 placed on the stage, and aligns these substrates with each other. After that, the upper substrate 220 is disposed on the lower substrate 210. In addition, a portion of the laminated structure 230 that occupies the panel formation region R is a partial structure 1 a that finally becomes the liquid crystal device 1.

  Next, as shown in FIG. 11, the panel formation region R is occupied in the laminated structure 230 including the lower substrate 210 and the upper substrate 220 and the liquid crystal layer 50 sandwiched between the lower substrate 210 and the upper substrate 220. The optical characteristics of the partial structure 1a which is a part are specified.

  More specifically, the optical property detection device 740 includes the polarizing plates 250 and 260 disposed on both sides of the laminated structure 230, and the light source 500 disposed on the one polarizing plate 250 side from the one light source 500. Inspection light L1 such as a laser beam is incident on the partial structure 1a through the polarizing plate 250, and the transmitted light L2 transmitted through the partial structure 1a is detected by the photodetector 600 through the other polarizing plate 260. Here, in the laminated structure 230, since the upper substrate 220 and the lower substrate 210 are not completely fixed to each other via the adhesive 52a, the optical characteristics such as the light transmittance of the partial structure 1a are as follows. It can be measured.

  When detecting the transmitted light L2 that has passed through the partial structure 1a, the optical property detection device 740 rotates each of the two polarizing plates 250 and 260 disposed on both sides of the laminated structure 230. The rotation angles of the polarizing plates 250 and 260 when the extinction ratio of the partial structure 1a is the highest are specified. According to the rotation angle specified in this way, the angle formed by the rubbing axes of the first alignment film 216 and the second alignment film 222 is an angle formed by the rubbing axes, and is set according to the alignment mode. It is possible to specify a deviation angle that indicates how much is deviated from the ideal angle.

  Next, as shown in FIG. 12, based on the optical characteristics of the partial structure 1a detected by the optical characteristic detector 740, the displacement between the rubbing axes of the first alignment film 216 and the second alignment film 222 is shifted. In order to correct, one of the upper substrate 220 and the lower substrate 210 is rotated about a rotation axis passing through the center point C of the substrate surface of one of the substrates. Such a rotation operation is executed by a rotation device 750 having a rotation mechanism capable of rotating one of the upper substrate 220 and the lower substrate 210. At this time, the rotation device 750 performs a rotation operation based on the optical property data fed back from the optical property detection device 740.

  Here, with reference to FIG. 13, the angles formed by the rubbing axes of the alignment film 216 and the alignment film 222 before and after correcting the misalignment angle will be described. FIG. 13 is a conceptual diagram conceptually showing angles formed by the rubbing axes of the alignment film 216 and the alignment film 222 before and after correcting the misalignment angle. In the present embodiment, 180 ° is given as an example of an ideal design value of an angle formed by the rubbing axes of the alignment films 216 and 222.

  As shown in FIG. 13 (a), if the upper substrate 220 is simply disposed on the lower substrate 210, the alignment accuracy between these substrates is not sufficient, or each of the alignment films 216 and 222 is performed. Due to the deviation in the rubbing direction of the rubbing process, the angle formed by the rubbing axis A1 of the alignment film 216 and the rubbing axis A2 of the alignment film 222 is shifted from 180 ° by an angle θ.

  As shown in FIG. 13B, the angle of the angle formed by the rubbing axes A1 and A2 by rotating one of the upper substrate 220 and the lower substrate 210 based on the optical characteristics of the partial structure 1a. θ can be corrected, and the angle formed by the rubbing axes A1 and A2 can be corrected to 180 °.

  Therefore, according to the manufacturing method of the liquid crystal device according to the present embodiment, after correcting the misalignment angle, the upper substrate 220 and the lower substrate 210 are fixed to each other by curing the adhesive 52a, so that a plurality of partial structures are obtained. The angle formed by the two rubbing axes of the liquid crystal device 1 formed by separating 1a from each other can be corrected to an ideal angle set in accordance with the alignment mode of the liquid crystal. It is possible to increase the contrast when a liquid crystal device manufactured using the method displays an image.

It is the top view which showed the structure of the liquid crystal device which concerns on this embodiment. It is II-II 'sectional drawing of FIG. FIG. 4 is a circuit diagram illustrating a circuit configuration in an image display region of the liquid crystal device according to the present embodiment. It is the block diagram which showed the main structures of the manufacturing apparatus of the liquid crystal device which concerns on this embodiment. It is process top view (the 1) which showed a part of process of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is process top view (the 2) showing a part of process of the manufacturing method of the liquid crystal device concerning this embodiment. It is process top view (the 3) which showed a part of process of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is VIII-VIII 'sectional drawing of FIG. It is IX-IX 'sectional drawing of FIG. It is XX 'sectional drawing of FIG. It is the typical process figure showing typically a part of process of the manufacturing method of the liquid crystal device concerning this embodiment. It is process top view (the 4) which showed a part of process of the manufacturing method of the liquid crystal device which concerns on this embodiment. It is the conceptual diagram which showed notionally the angle which each rubbing axis | shaft of two alignment films in before and after each correct | amends a shift | offset | difference angle | corner mutually.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Liquid crystal device, 1a ... Partial structure, 10 ... TFT array substrate, 20 ... Counter substrate, 50 ... Liquid crystal layer, 210 ... Lower substrate, 220 ... Upper side Substrate, 230 ... laminated structure, 700 ... manufacturing apparatus, 710 ... coating apparatus, 720 ... liquid crystal dropping apparatus, 730 ... transport apparatus, 740 ... optical property detection apparatus, 750 ..Rotating devices

Claims (2)

A first step of applying an adhesive in a frame shape to each of the plurality of panel formation regions on the first substrate and the lower substrate having the first alignment film formed on the first substrate;
A second step of dropping a liquid crystal in a vacuum in each of the plurality of panel formation regions after the first step;
An upper substrate having a second substrate and a second alignment film formed on one surface side of the second substrate is disposed on the lower substrate so that the second alignment film faces the lower substrate. A third step to perform,
The optical characteristics of the partial structure that is a portion occupying the panel forming region in the laminated structure including the liquid crystal layer sandwiched between the lower substrate and the upper substrate and the lower substrate and the upper substrate are specified. A fourth step;
The substrate surface of one of the upper substrate and the lower substrate so as to correct the mutual displacement between the rubbing axes of the first alignment film and the second alignment film based on the specified optical characteristics. And a fifth step of rotating the one substrate about a rotation axis passing through the center point of the liquid crystal device. A coating means for applying an adhesive in a frame shape to each of the plurality of panel formation regions on the first substrate and the lower substrate having the first alignment film formed on the first substrate;
Dropping means for dropping a liquid crystal in a vacuum in each of the plurality of panel formation regions after the first step;
An upper substrate having a second substrate and a second alignment film formed on one surface side of the second substrate is disposed on the lower substrate so that the second alignment film faces the lower substrate. An arrangement means to
The optical characteristics of the partial structure that is a portion occupying the panel forming region in the laminated structure including the liquid crystal layer sandwiched between the lower substrate and the upper substrate and the lower substrate and the upper substrate are specified. Specific means,
The substrate surface of one of the upper substrate and the lower substrate so as to correct the mutual displacement between the rubbing axes of the first alignment film and the second alignment film based on the specified optical characteristics. And a rotating means for rotating the one substrate about a rotation axis passing through the center point of the liquid crystal device.

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