JP2010084229A - Substrate holder holding apparatus and substrate holder storing chamber - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate holder holding apparatus of a small size with a simple structure. <P>SOLUTION: The substrate holder holding apparatus includes: first and second holding mechanisms which are stored in a chamber and are each structured so as to be capable of holding a plurality of the substrate holders 8 along a column; a driving means for a column direction, which moves the first holding mechanism in the column direction relatively with respect to the second holding mechanism; a transferring mechanism 30 which transfers the substrate holder between the first and second holding mechanisms; and an interlocking mechanism which changes the position of the substrate holder 8 in the column direction in the first or second holding mechanism by making the transferring mechanism 30 interlocked with the driving means for the column direction. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

Patent Document 1 discloses a substrate holder replacement system using a substrate holder storage chamber as a countermeasure against a substrate holder deposited film generated in an inline-type substrate processing apparatus.
The substrate holder storage chamber of Patent Document 1 includes a plurality of transport rails with transport rollers arranged radially, and a transport rail rotation mechanism that rotationally drives the transport rail around the radiation center, on each transport rail. A substrate holder can be mounted. This is a system in which the substrate holder in the storage chamber is carried out (collected) to the in-line type substrate processing apparatus by rotating and transporting the transport rail to a carry-in / out port (one place) provided in the storage chamber.

JP 2005-120212 A

However, there are the following problems or problems.
(1) Miniaturization of the substrate holder storage chamber As described above, since the rotation method is adopted for the substrate holder storage in the conventional technology, the radial arrangement of the transport rails is necessary. The arrangement radius of the conveyance rail is determined by the number of built-in rails and the interval between the rails. When the number of built-in conveyance rails increases, the arrangement radius increases because it is necessary to arrange the conveyance rails away from the radiation center. Further, as a feature of the radiation arrangement, the interval between the transport rails near the center is increased toward the outer circumference depending on the radiation angle, so that a wasteful space is generated in the outer circumference. Due to these problems, it is difficult to reduce the size of the substrate holder storage chamber.

(2) Simplification of the structure In the prior art, all the conveyance rails in the radial arrangement require a conveyance roller to the in-line type substrate processing apparatus, and there is a problem that the number of parts for conveyance is large and the price is high. At the same time, conveyance adjustment is necessary for all the conveyance rails, and it took a long time for adjustment work.

(3) Improvement of heating efficiency In the prior art, since the storage substrate holders are arranged in a radial manner, it is difficult to arrange a heater for heating that covers the entire substrate holder because the arrangement range of the substrate holders is large. Therefore, it was necessary to fix heating heaters at two places on the ceiling, and to rotate the substrate holder with a rotating mechanism in order to ensure temperature distribution during heating. In the conventional method, the amount of heat input per substrate holder is small, and it takes time for degassing heating including temperature increase.

  According to one embodiment of the present invention, in a substrate holder holding device, a table mechanism that can hold a plurality of substrate holders and is movable in an arrangement direction, and an upper and lower for separating the substrate holder from the table mechanism. And a mechanism that moves the position of the substrate holder in the table mechanism by interlocking the table mechanism and the vertical mechanism.

According to the present invention, the radial arrangement can be arranged in parallel, which is useful for simplification of the apparatus configuration and space saving.
According to the present invention, the chamber size can be reduced, and the heating efficiency can be improved.

FIG. 1 is a plan view showing a schematic configuration of the inline-type substrate processing apparatus of the present embodiment. FIG. 2 is a perspective view of the substrate holder holding device A. FIG. FIG. 3 is a perspective view of the substrate holder holding device A. FIG. FIG. 4A shows the substrate holder 8 and the transport mechanism 20. FIG. 4B is a diagram showing the substrate holder 8 and the transfer mechanism 30. FIG. 5 is a perspective view of the substrate holder holding device A. FIG. FIG. 6 is a perspective view of the substrate holder holding device A. FIG. FIG. 7A is a plan view showing the arrangement of the heating mechanism (heater 4 in this embodiment) in the substrate holder storage chamber 18. FIG. 7B is a side view of the heating mechanism. FIG. 8 is a flow chart of carrying out the substrate holder from the substrate holder storage chamber 18 to the adjacent chamber. FIG. 9 is another view of the substrate holder carry-out flow from the substrate holder storage chamber 18 to the adjacent chamber. FIG. 10 is a flow chart of carrying the substrate holder from the adjacent chamber to the substrate holder storage chamber 18. FIG. 11 is a flow chart for carrying out the substrate holder according to another embodiment of the present invention.

[Description of configuration of substrate processing apparatus]
FIG. 1 is a plan view showing a schematic configuration of the inline-type substrate processing apparatus of the present embodiment. Such an inline-type substrate processing apparatus is used, for example, as a magnetic disk manufacturing apparatus. In the substrate processing apparatus of this embodiment, a plurality of vacuum chambers 13 are connected and arranged in an endless manner (in the figure, a square loop). Each vacuum chamber 13 is a vacuum container that is evacuated by a dedicated or dual-purpose exhaust system. A partition valve (gate valve) 14 is disposed at the boundary of each vacuum chamber 13, and each vacuum chamber 13 is connected in an airtight state. The substrate is transported while being held by the substrate holder 8 in the substrate processing apparatus. In the plurality of connected vacuum chambers 13, a moving path is provided, and a magnet type transport mechanism (described later) for moving the substrate holder 8 along the moving path is provided. Of the plurality of vacuum chambers 13 of the substrate processing apparatus, two vacuum chambers 13 arranged on one side of the square collect the substrate from the substrate supply chamber 15 for mounting the substrate on the substrate holder 8 and the substrate holder 8. A substrate discharge chamber 16 is provided. Further, the square corner portion is a direction changing chamber 17 having a direction changing mechanism for changing the direction of transport of the substrate holder 8 by 90 degrees. A substrate holder storage chamber 18 is connected to one of the direction change chambers 17 via a gate valve 14.

  The substrate holder storage chamber 18 includes a substrate holder holding device A that holds a plurality of substrate holders 8, and a transfer mechanism 20 that transfers the substrate holder 8 between the adjacent direction changing chamber 17 and the substrate holder holding device A. A transfer mechanism 30 (see FIG. 4) for transferring the substrate holder 8 between the substrate holder holding device A and the transport mechanism 20, and a heating mechanism (see FIG. 7) for heating the substrate holder 8. Have. In the present embodiment, the substrate holder holding device A is provided with a plurality of (for example, two rows) substrate holders 8 in parallel, so that more substrate holders 8 can be accommodated. In the substrate holder storage chamber 18, a new or regenerated / cleaned product of the substrate holder 8 is stored, and the substrate holder 8 on which the film collected from the substrate processing apparatus is deposited for replacement is stored. It becomes possible to replace the substrate holder 8 without stopping.

FIG. 2 is a perspective view of the substrate holder holding device A.
The substrate holder holding device A includes a movable table (corresponding to the first holding mechanism and the column direction driving means) 5 that holds the substrate holder 8 in parallel, and all of the substrate holders 8 that are held on the movable table 5. A separation mechanism (corresponding to a second holding mechanism) 7 composed of units 7A and 7B that separate from the movable table 5 at a time, and a controller (corresponding to an interlocking mechanism) 6 that controls these operations are provided. Specifically, the movable table 5 includes a table body 51 that can hold a plurality of substrate holders 8 and a drive mechanism 52 that drives the table body 51. The table main body 51 is provided with a plurality of grooves 51a that fit into the bottom of the substrate holder 8 at equal intervals, and can hold the plurality of substrate holders 8 in a state of being arranged in the thickness direction of the substrate holder. The drive mechanism 52 moves the table body 51 back and forth in the horizontal direction. In the present embodiment, the actuator of the drive mechanism 52 is configured by a ball screw. The table body 51 includes a nut coupled to the coupling portion 52 a, and the nut is screwed to a screw shaft extending in the front-rear direction of the table 51. The screw shaft is rotated by the rotation of the motor under the control of the controller 6. The rotation of the screw shaft moves the nut back and forth, and the table 51 coupled to the nut is moved back and forth. The actuator of the drive mechanism 52 is not limited to a ball screw, and may be a cylinder such as an air cylinder or a hydraulic cylinder, or a magnet actuator that is linearly moved through magnetic coupling as in the case of the transport mechanism 20 described later.

In addition, the separation mechanism 7 includes units 7A and 7B arranged on the left and right sides of the movable table 5 in the present embodiment. The unit 7A includes a holding portion 71A that can hold the bottom portion of the substrate holder 8, and a driving portion 72A that drives the holding portion 71A in the vertical direction.
The holding portion 71A includes a horizontal portion 711a extending in the column direction of the substrate holder 8, and a plurality of partition members 712a extending in the vertical direction from the horizontal portion 711a and arranged at predetermined intervals along the column direction of the substrate holder 8. Have. One substrate holder 8 is held in one section partitioned by the partition member 712a. Accordingly, the arrangement interval of the sections is the same as the interval of the grooves 51a of the movable table 5, and the holding unit 71A can hold all of the plurality of substrate holders 8 held on the movable table 5 at the same time. Has been. Further, in this embodiment, the number of sections formed in the holding portion 71A of the separation mechanism 7 is smaller by the number of times of conveyance by the conveyance mechanism 20 (for example, one than the number of grooves of the movable table 5). It is set to more than the number.

The drive unit 72A that moves the holding unit 71A of the separation mechanism 7 up and down includes a linear actuator such as a hydraulic cylinder. Although not shown, the linear actuator is disposed outside the substrate holder storage chamber 18 and only the drive shaft is disposed in the chamber. The other unit 7B has the same configuration as 7A.
When the substrate holder 8 is held on the movable table 5, the separation mechanism 7 that lifts all the substrate holders on the table 5 upward at once and separates them from the table, as shown in FIG. When the substrate holder is separated from the movable table 5, the substrate holder 8 is separated from the movable table 5 by being driven upward as shown in FIG. 3 so that the units 7 A and 7 B are lifted from both the left and right sides. . Further, the substrate holder 8 is transferred to the movable table 5 when it is lowered from the upper position to the retracted position.

  In this embodiment, the controller 6 includes a general computer, and outputs commands to the movable table 5, the separation mechanism 7, a transport mechanism 20 and a transfer mechanism 30, which will be described later, based on the programs. Realize coordinated operation. The controller 6 is provided in common to the plurality of substrate holder holding devices A arranged in the substrate holder storage chamber 18 and controls each of them.

  4A and 4B show the substrate holder 8, the transport mechanism 20, and the transfer mechanism 30. FIG. 4A is a diagram of the substrate holder 8 and the transport mechanism 20 as viewed from the front direction, and FIG. 4B is a diagram of the substrate holder 8, the transport mechanism 20 and the transfer mechanism 30 as viewed from the side of the substrate.

  In the present embodiment, the substrate holder 8 can process one or a plurality of (two in the figure) substrates 81 (the mounting state is indicated by a broken line) on both surfaces in the vacuum chamber 13. Hold. As shown in FIG. 4A, the substrate holder 8 supports the substrate from the side surface by a plurality of support claws 83, thereby enabling a film forming process or the like on the entire surface. A magnet 82 extending along a direction parallel to the substrate surface is provided at the bottom of the substrate holder 8, and is magnetically coupled to the transport mechanism 20 to extend along the direction (lateral direction) in which the magnet 82 extends. The substrate holder is transported.

  The transport mechanism 20 is a mechanism that further transports the taken-out substrate holder after the substrate holder in the front row of the table 5 is taken out from the movable table 5 by the transfer mechanism 30 (FIG. 4B). The transport mechanism 20 includes a transport magnet 23, a drive source 21 that generates a rotational driving force such as a motor, and a rotation direction conversion mechanism 22 that converts the rotation of the drive source 21 into a rotation around the axis of the transport magnet 23. . The transport magnet 23 is a member that extends in the moving direction of the substrate holder, and has N-pole and S-pole magnets arranged in a spiral shape, and is rotated along the axis to follow the axis. The substrate holder 8 placed on the transfer magnet 23 and magnetically coupled by the transfer mechanism in FIG. 4 can be transferred in the horizontal direction. In the present embodiment, the transport mechanism 20 for transporting the substrate holder taken out from the table 5 is located near the substrate holder holding device A arranged in parallel in the substrate holder storage chamber 18 and by a plurality of substrate holder holding devices A. It is provided to be shared. The controller 6 outputs a drive signal to the drive source 21 to control the transport direction, transport timing, transport speed, and the like. Although not shown, in the present embodiment, the drive source 21 is provided outside the substrate holder storage chamber 18, and the drive shaft is inserted into the chamber in a state surrounded by a bellows (not shown). In the application of the present invention, the transport mechanism is not limited to the magnetic coupling.

  4B is provided in front of the transport magnet 23, and includes a transport roller 31, a transport base 32, a drive shaft 33, and a drive device 34 for vertical driving such as a cylinder. Composed. As shown in FIG. 4B, the transport roller 31 is engaged with the protruding portion 84 of the substrate holder 8 so as to be fitted on the bottom surface side thereof, and is directed to the movable table side. It is provided along the conveyance direction. The transport roller 31 is rotatable so as to guide the substrate holder 8 along the transport direction. The driving device 34 drives the transport roller 31 up and down based on a command from the controller 6, and engages or disengages the transport roller 31 with the substrate holder 8 to transfer the substrate holder 8 to the movable table 5. Realize operation.

  Specifically, by raising the transport roller 31 from the standby position shown in FIG. 5 to the position shown in FIG. 6, the protrusion 84 of the substrate holder 8 is engaged with the transport roller 31, and the substrate holder 8 is moved to the movable table. Remove from 5 upward. 4B, the substrate holder 8 is transferred from the movable table 5 to the transfer position by lowering the magnet 82 of the substrate holder 8 to the transfer position where it is magnetically coupled to the transfer magnet 23. The substrate holder at the transfer position is then transferred laterally by the transfer mechanism of FIG. 4A. By the reverse operation, transfer from the transfer position to the movable table 5 is also possible.

7A and 7B show the arrangement of the heating mechanism (heater 4 in this embodiment) in the substrate holder storage chamber 18. 7A is a plan view and FIG. 7B is a side view.
The heater 4 can heat the substrate holder 8 to perform degassing and the like, and is disposed above the substrate holder 8. This position is a position that does not come into contact when the substrate holder 8 is disposed upward by the separation mechanism 7. As the heater 4, for example, a lamp heater that can heat the substrate holder 8 by radiant heat or a sheathed heater that heats the substrate holder 8 through gas heating can be used. When heating, if the substrate holder 8 is raised by the separation mechanism 7 and brought closer to the heater 4, a higher heating effect can be obtained.
The substrate holder 8 can be heated by introducing a high-temperature gas instead of or in combination with the heater 4. With respect to the chamber pressure state during heating, heating in a pressurized state, air, or vacuum state is possible.

[Operation of substrate holder transport]
Next, operations of the substrate holder holding device A, the transport mechanism 20 and the transfer mechanism 30 configured as described above will be described.
FIG. 8 shows a flow for carrying the substrate holder 8 out of the substrate holder storage chamber 18. The above-described series of operations, the movable table 5, the separation mechanism 7, the transport mechanism 20, and the transfer mechanism 30 are controlled by the programmed controller 6. In order to make the drawing easier to understand, in FIG. 8, the separation mechanism 7 is shown only in a portion necessary for explanation.

  8-11, the table 5 moves in the front-rear direction (left-right direction in the drawing), the separation mechanism 7 moves in the up-down direction, and the transfer mechanism 30 moves in the up-down direction and the front-rear direction. Note that it moves and the transport magnet 23 is in a fixed position (although it rotates). Therefore, the positional relationship of the relative movement of these mechanisms can be viewed with the transport magnet 23 as a reference.

The first half (a) to (f) of FIG. 8 is an operation of transferring one substrate holder 8 from the movable table 5 to the transfer positions H0 and W0 and carrying it out.
(A) shows the state in which the substrate holder 8 is accommodated in the movable table 5. In this state, the movable table 5 is operated to advance toward the transport magnet 23 ((b)). In this embodiment, the movement pitch at this time is set to be the same as the arrangement interval p of the substrate holders 8 in the movable table 5. Accordingly, the positional relationship between the movable table 5 and the transport magnet 23 is set so that the front-most substrate holder 8 is positioned just above the transport magnet 23 when moved by this pitch.

  Next, the transfer mechanism 30 is moved upward, the transport roller 31 is raised, the substrate holder 8 is taken out from the movable table 5 ((c)), and the movable table 5 is retracted from this state ((d )). Thereafter, the transfer mechanism is moved downward and the transport roller 31 is lowered to transfer the substrate holder 8 to the transport positions H0 and W0 ((e)). Thereafter, the transfer magnet 23 is driven to rotate, the substrate holder 8 is transferred in the lateral direction, and is transferred out of the storage chamber 18 ((f)). As a result, one empty space is formed in the front row groove of the movable table 5, that is, the arrangement space at the end portion on the side of the transfer magnet 23.

The latter half (g) to (k) of FIG. 8 is an operation of moving the substrate holder 8 to the empty space of the movable table 5.
The transfer mechanism 30 is moved upward and returned from the transfer position to the standby position ((g)), and the movable table 5 is advanced toward the transport magnet 23 by the arrangement interval p as described above ((h)). . Then, the separation mechanism 7 is operated, and all the substrate holders 8 held on the movable table 5 are lifted upward and separated from the movable table 5 ((i)). In the state of being separated, the movable table 5 is retracted by the arrangement interval p ((j)), and then the separation mechanism 7 is lowered and the substrate holder 8 is moved to the movable table 5. As a result, the substrate holder 8 is disposed on the movable table 5 in a state of filling the vacant space and packing the substrate holder 8 on the transport magnet 23 side ((k)).

Thereafter, by repeating (a) to (k), it is possible to sequentially carry out all the substrate holders 8 arranged on the movable table 5 from the storage chamber.
As described above, according to the transport method of the present invention, it is possible to store the substrate holders 8 in parallel rather than radially. Further, by using a plurality of transfer rails as one movable table 5, the substrate holders on the movable table can be stored at a small interval, and the chamber size can be reduced. At the same time, the cost can be reduced by reducing the number of conveying parts, and the time for adjusting the conveying roller position can be greatly reduced.

  Further, since the arrangement area of the substrate holder 8 is reduced, it is possible to arrange the degassing heater 4 that covers all the holders. At the same time, the amount of heat input per holder increases and the time required for temperature rise can be shortened. Further, the temperature raising time can be shortened by bringing the substrate holder 8 and the heater 4 close to each other by the separation mechanism of the substrate holder 8 and the movable table 5.

[Modification]
In the present embodiment, the moving pitch of the movable table 5 is always set to the arrangement interval p of the substrate holder 8. However, when the substrate holder 8 is transferred between the movable table 5 and the transfer position, it is separated. The movement pitch may be changed when the arrangement of the substrate holder 8 is changed in the movable table 5 using the mechanism 7. That is, when changing the arrangement within the movable table 5, it is necessary to set the movement pitch in units of arrangement interval p. However, when transferring to the conveyance position, the movable table 5 is moved to the position of the conveyance rail 23. It is necessary.

  Moreover, it is not restricted to the said sequence. For example, FIG. 9 shows another operation example when the arrangement of the substrate holder 8 is changed in the movable table 5. In the example of FIG. 9, the substrate holder 8 is separated (h ′) by the separation mechanism 7 before driving the movable table 5 from the state (g ′) corresponding to (g) of FIG. The movable table 5 is driven in the direction opposite to the transfer position (i ′), and the substrate holder 8 is moved to the movable table 5 (j ′). FIG. 9 (k ′) corresponds to the state of FIG. 8 (k). In this case, as compared with the operation example of FIG. 8, a space for driving in the opposite direction is required, but interference with the transport magnet 23 can be avoided.

  Moreover, since the driving direction of the movable table 5 can be changed according to the timing of using the separation mechanism 7 and the timing of moving the movable table 5 as in the example of FIG. 9, the substrate holder 8 can be changed by changing the timing. Even in the case of carrying into the movable table 5 instead of carrying out, it is possible to align the driving direction with that at the time of carrying out.

  FIG. 10 shows an operation example at the time of loading to which this is applied. FIG. 10A shows a state where the substrate holder 8 is transported to the front row groove of the table 5 by the transport position of the transport mechanism 20. When carrying in, unlike the carrying out, the separation mechanism 7 is operated before the movable table 5 is driven to separate the substrate holder 8 ((b)), so that it can be moved to the conveyance magnet 23 side (front). The substrate holder that has been driven to the front row by driving the equation table 5 can be transferred to the second row ((c), (d), (e)). The substrate holder is transported from the transport mechanism 20 to the front row of the table, and the substrate holder is sequentially sent backward by the separation mechanism 7. Thus, the substrate holder can be carried into all the grooves of the table 5. Thereby, the space which the movable table 5 moves can be suppressed to the minimum. Of course, the same timing adjustment may be used to drive in the opposite direction to the transfer magnet side 23 at the time of carry-in and transfer, or it may be driven in the opposite direction at the time of carry-in and carry-out without adjusting the timing. It may be.

  Moreover, although the case where the substrate holder 8 is placed vertically has been described, for example, the present invention can also be applied to the case where the substrate holders 8 are stacked in the vertical direction (in this case, the column direction is the vertical direction). Moreover, in the said embodiment, although the board | substrate holder 8 is laminated | stacked on the board thickness direction of a board | substrate, you may laminate | stack on the side surface direction (in-plane direction) of a board | substrate.

  In the above-described embodiment, the movable table 5 is advanced and retracted by one arrangement interval p. However, the present invention is not limited to this. For example, the movable table 5 may be shifted by two arrangement intervals p or more. For example, when the transport mechanism 20 transports two pieces at a time, two empty spaces are formed, so that the substrate holder 8 is transported at intervals of p so as to be able to pack them at a time ( In this example, it may be advanced and retracted by two arrangement intervals p). Of course, one arrangement interval p may be repeated twice.

  In the above-described embodiment, the separation function from the holding mechanism and the driving in the column direction are performed separately for each holding mechanism, but one holding mechanism may perform both. For example, the movable table 5 is also driven in the vertical direction, the holding member 71A of the separation mechanism 7 is fixed below the movable table 5, and the substrate holder 8 is moved to the separation mechanism 7 by lowering the movable table 5. After the movable table 5 moves forward or changes, the holding member 71 </ b> A may be raised to move to the movable table 5 again. In this case, for example, a vertical drive device such as a cylinder is further provided below the drive mechanism 52 of the movable table 5, and the drive mechanism 52 is moved together.

In the above embodiment, only one holding mechanism (movable table 5) is driven in the row direction. However, the second holding mechanism is also provided with a driving mechanism, and the first and second holding mechanisms are provided. Both may be configured to alternately advance and retract in the column direction.
The substrate holder storage chamber is used for vacuum storage and degassing of the substrate holder 8. However, the present invention is not limited to this, and a substrate is mounted for the purpose of waiting for degassing of the substrate or introduction into the adjacent chamber. You may use as a device which stores substrate holder 8 in the state where it got.

  Moreover, in the said embodiment, it is set as the structure which changes the row direction position of the board | substrate holder 8 in the movable table 5 by moving the movable table 5, but as shown to Fig.11 (a), a movable table is used. By moving 5, the arrangement of the substrate holders 8 in the separation mechanism 7 in the row direction may be changed. This operation can be realized only by changing the operation sequence as shown in FIG. FIG. 11 shows a sequence example when the substrate holder 8 is unloaded at the side of the transfer magnet 23. In this case, it is preferable that the maximum holdable number (the number of grooves 51a) of the movable table 5 is smaller than the maximum holdable number in the separation mechanism 7 (smaller by the number of one transfer by the transfer mechanism 20). Further, since the length in the column direction of the movable table driven in the column direction can be shortened, further space saving can be achieved.

Transport mechanism 20
Drive source 21
Rotation direction conversion mechanism 22
Transport magnet 23
Transfer mechanism 30
Conveyance roller 31
Conveyance base 32
Drive shaft 33
Drive device 34
Heater 4
Movable table 5
Table body 51
Groove 51a
Drive mechanism 52
Nut 52a
Guide 52b
Controller 6
Separation mechanism 7
Unit 7A, 7B
Holding part 71A
Horizontal part 711a
Partition member 712a
Drive unit 72A
Substrate holder 8
Substrate 81
Magnet 82
Support nails 83
Protrusion 84

Claims (1)

A table main body capable of holding a plurality of substrate holders side by side, and a movable table provided with a first drive mechanism for moving the table main body back and forth in the arrangement direction of the substrate holders;
A holding member capable of holding the substrate holder;
A separation mechanism for moving the table main body relative to the holding member and transferring a substrate holder between the table main body and the holding member;
The table main body is moved from the holding member to the table main body by the separation mechanism after the table main body is moved in the arrangement direction while the substrate holder is held by the holding member. An interlocking mechanism that moves the position of the substrate holder in the
A substrate holder storage chamber, wherein a plurality of substrate holder holding devices are arranged in parallel.

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