JP2010078604A - 薄膜型センシング部材を利用した化学センサ - Google Patents
薄膜型センシング部材を利用した化学センサ Download PDFInfo
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- JP2010078604A JP2010078604A JP2009221178A JP2009221178A JP2010078604A JP 2010078604 A JP2010078604 A JP 2010078604A JP 2009221178 A JP2009221178 A JP 2009221178A JP 2009221178 A JP2009221178 A JP 2009221178A JP 2010078604 A JP2010078604 A JP 2010078604A
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- 239000000126 substance Substances 0.000 title claims abstract description 66
- 239000010409 thin film Substances 0.000 title abstract description 5
- 150000001875 compounds Chemical class 0.000 claims abstract description 20
- 239000002070 nanowire Substances 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 15
- 229920001940 conductive polymer Polymers 0.000 claims description 12
- 229920000642 polymer Polymers 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 239000002041 carbon nanotube Substances 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 229910021389 graphene Inorganic materials 0.000 claims description 4
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 3
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000002086 nanomaterial Substances 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 7
- 239000012855 volatile organic compound Substances 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000010931 gold Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 3
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000012491 analyte Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 201000010099 disease Diseases 0.000 description 2
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 206010006187 Breast cancer Diseases 0.000 description 1
- 208000026310 Breast neoplasm Diseases 0.000 description 1
- 206010058467 Lung neoplasm malignant Diseases 0.000 description 1
- 229920001054 Poly(ethylene‐co‐vinyl acetate) Polymers 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 201000005202 lung cancer Diseases 0.000 description 1
- 208000020816 lung neoplasm Diseases 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002805 poly(2,2'-bithiophene-5,5'-diyl) polymer Polymers 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- -1 tetrabutylammonium tetrafluoroborate Chemical group 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
- G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
- Y10S977/957—Of chemical property or presence
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- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
【解決手段】第1電極及び第2電極間の薄膜型センシング部材を具備し、センシングしようとする化合物がセンシング部材に吸着しつつ発生する電気的性質の変化を測定する化学センサである。該薄膜型センシング部材は、化学センサの面積が広く、化学センサの感度が向上する。第2電極はナノ構造体であって、センシング部材の表面を露出させることができる構造である。第2電極は、10nm〜10μm幅を有し、第1電極及び第2電極間のギャップは、10nm〜1μmであることを特徴とする。
【選択図】図1
Description
110,210,310,410,610 基板
120,320,620 第1ナノワイヤ
122,322,422,542 第1電極パッド
130,330,430 センサ部材
140,340,640 第2ナノワイヤ
142,342,442 第2電極パッド
150 電流計
200 化学センサアレイ
220 パターン分析システム
420 第1電極
440,540 第2電極
542 第2電極パッド
630 伝導性ポリマー層
G 間隙
Claims (13)
- 基板上に形成された第1電極と、
前記基板上で前記第1電極を覆うセンシング部材と、
前記センシング部材上で、前記センシング部材の表面を露出させる構造の第2電極とを具備し、
センシングしようとする化合物が前記センシング部材に吸着しつつ発生する電気的性質の変化を測定する化学センサ。 - 前記第2電極は、10nm〜10μm幅を有することを特徴とする請求項1に記載の化学センサ。
- 前記第1電極及び前記第2電極間のギャップは、10nm〜1μmであることを特徴とする請求項1に記載の化学センサ。
- 前記第1電極は、複数のナノワイヤを具備し、
前記第2電極は、複数のナノワイヤを具備したことを特徴とする請求項1に記載の化学センサ。 - 前記第1電極及び前記第2電極は、交差するように形成されたことを特徴とする請求項4に記載の化学センサ。
- 前記第1電極及び前記第2電極は、互いに平行に並んで形成されたことを特徴とする請求項4に記載の化学センサ。
- 前記第1電極は、平板電極であることを特徴とする請求項1に記載の化学センサ。
- 前記第2電極は、複数のナノワイヤを具備したことを特徴とする請求項7に記載の化学センサ。
- 前記第2電極は、コイル状電極であることを特徴とする請求項7に記載の化学センサ。
- 前記センシング部材は、金属酸化物、伝導性ポリマー、絶縁性ポリマーのうち、選択された一つによって形成されたことを特徴とする請求項1に記載の化学センサ。
- 前記金属酸化物は、SnO2、TiO2、ZnO、WO3、Fe2O3のうち、選択された一つによって形成されたことを特徴とする請求項10に記載の化学センサ。
- 前記ポリマーは、炭素ナノチューブ、グラフェン、ナノワイヤのうち、少なくともいずれか一つが含浸されたことを特徴とする請求項10に記載の化学センサ。
- 基板上にアレイ状に配列された複数の請求項1に記載の化学センサを具備し、前記複数の化学センサの前記センシング部材は、互いに異なる化合物を検出する化学センサアレイ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2008-0094741 | 2008-09-26 | ||
KR1020080094741A KR20100035380A (ko) | 2008-09-26 | 2008-09-26 | 박막형 센싱부재를 이용한 화학 센서 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010078604A true JP2010078604A (ja) | 2010-04-08 |
JP5424794B2 JP5424794B2 (ja) | 2014-02-26 |
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009221178A Active JP5424794B2 (ja) | 2008-09-26 | 2009-09-25 | 薄膜型センシング部材を利用した化学センサ |
Country Status (4)
Country | Link |
---|---|
US (2) | US7955562B2 (ja) |
JP (1) | JP5424794B2 (ja) |
KR (1) | KR20100035380A (ja) |
CN (1) | CN101685077B (ja) |
Cited By (5)
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JP2011169634A (ja) * | 2010-02-16 | 2011-09-01 | Fuji Electric Co Ltd | 薄膜ガスセンサ |
WO2015064639A1 (ja) * | 2013-10-31 | 2015-05-07 | 学校法人加計学園 | ガスセンサ及びガスセンサアレイ |
JP2018189480A (ja) * | 2017-05-02 | 2018-11-29 | 凸版印刷株式会社 | 化学センシング電極、化学センシング装置、及び化学センシング電極の製造方法 |
JP2021032746A (ja) * | 2019-08-26 | 2021-03-01 | 国立大学法人東京工業大学 | ナノギャップ電極を有するガスセンサ及びその製造方法 |
US11156576B2 (en) | 2015-06-30 | 2021-10-26 | Fujitsu Limited | Gas sensor and method of using the same |
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CN101929958A (zh) * | 2010-07-05 | 2010-12-29 | 吉林大学 | 一种高灵敏度的光增感型气体传感器及其制备方法 |
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KR101459307B1 (ko) * | 2010-12-24 | 2014-11-07 | 그래핀스퀘어 주식회사 | 그래핀을 이용한 압력 및 위치 동시감지 터치센서 |
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2008
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2009
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- 2009-09-25 CN CN200910174231.3A patent/CN101685077B/zh active Active
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2011
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JPS5766347A (en) * | 1980-10-09 | 1982-04-22 | Hitachi Ltd | Detector for mixture gas |
JPH0727731A (ja) * | 1993-07-14 | 1995-01-31 | Oki Electric Ind Co Ltd | 匂いセンサ及び匂いセンサユニット |
JPH10506186A (ja) * | 1994-09-16 | 1998-06-16 | フラウホーファー−ゲゼルシャフト.トゥー.フォールデルング.ダー.アンゲヴァンドテン.フォルシェング.エー.ファウ | 化学的検出器 |
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JP2011169634A (ja) * | 2010-02-16 | 2011-09-01 | Fuji Electric Co Ltd | 薄膜ガスセンサ |
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JP2021032746A (ja) * | 2019-08-26 | 2021-03-01 | 国立大学法人東京工業大学 | ナノギャップ電極を有するガスセンサ及びその製造方法 |
JP7385859B2 (ja) | 2019-08-26 | 2023-11-24 | 国立大学法人東京工業大学 | ナノギャップ電極を有するガスセンサ及びその製造方法 |
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US20110210751A1 (en) | 2011-09-01 |
CN101685077A (zh) | 2010-03-31 |
JP5424794B2 (ja) | 2014-02-26 |
CN101685077B (zh) | 2014-06-25 |
US7955562B2 (en) | 2011-06-07 |
US20100079130A1 (en) | 2010-04-01 |
KR20100035380A (ko) | 2010-04-05 |
US8480959B2 (en) | 2013-07-09 |
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