JP2010074977A - Method of resin molding coreless linear motor armature, coreless linear motor armature, coreless linear motor, and table feed apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of resin molding a coreless linear motor armature, a coreless linear motor armature, a coreless linear motor, and a table feed apparatus, which reduce an increase in the temperature of an armature coil unit while securing the insulation distance between a coil of the armature coil unit and a mount to which the coil is mounted, and ensure moldability to provide a quality resin mold for the armature. <P>SOLUTION: According to the coreless linear motor armature, a gap between a recession 8a of the armature mount 8 and an upper side 11 of a coil group of the armature coil unit 7 is filled with a first resin mold 20, and a second resin mold 21 having heat conductivity smaller than that of the first resin mold 20 is applied to cover the under surface of the recession 8a of the armature mount 8 and the periphery of the armature coil unit 7. Hence the armature mount 8 and the armature coil unit 7 are integrally molded. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is used in the fields of semiconductor manufacturing equipment and machine tools for constant speed feed and table feed equipment for high precision positioning that require thrust ripple and low heat generation, and for driving the linear motion mechanism. And a coreless linear motor armature, a coreless linear motor, and a table feeding device.

Conventionally used in the fields of semiconductor manufacturing equipment and machine tools for table feed devices for constant speed feed and high precision positioning that require thrust ripple and low heat generation, and suitable for driving the linear motion mechanism Examples of such coreless linear motors include those disclosed in Patent Document 1 and Patent Document 2. FIG. 4 is an overall perspective view of a general coreless linear motor that is disclosed in Patent Document 1 and Patent Document 2 and is common to the prior art and the present invention to be described later, and shows only a stator and a mover. is there.
FIG. 5 is a front sectional view of the coreless linear motor viewed from the moving direction of the mover showing the first prior art, and corresponds to a sectional view taken along the line AA of FIG.
In FIG. 5, 1 is a coreless linear motor, 2 is a stator, 3 is a permanent magnet, 4 is a back yoke, 5 is a yoke support, 6 is a mover, 7 is an armature winding, 8 is an armature mount, 9 is a coil, 10 is a winding fixing plate, 11 is an upper side of the coil, 12 is a lower side of the coil, 13 is a lead wire, and 14 is a resin mold.
The stator 2 in the coreless linear motor 1 has different polarities alternately along the two back yokes 4 arranged on the left and right sides and the moving direction (perpendicular to the paper surface) of the mover of the back yoke 4. And the permanent magnet 3 arranged so that the polarities on the side facing the two back yokes 4 are different from each other, and the yoke support for fixing and supporting one end of the two back yokes 4 It is comprised from the stand 5.
Further, the mover 6 is disposed inside the two back yokes 4 via the permanent magnet 3 and a magnetic gap, and has an armature winding 7 composed of a plurality of coils 9, and the armature winding. A coil fixing plate 10 made of non-magnetic metal or resin and an armature winding 7 fixed to the winding fixing plate 10 are fixed to the left and right coils 9 constituting the coil 7 and the mover The armature mounting base 8 has a concave cross section for mounting on the armature. Since the armature mounting base 8 is mounted on a table or the like that becomes a load, the armature mounting base 8 is made of a metal member such as aluminum that ensures strength.
Here, the coil upper side 11 corresponding to the upper side of the coil is inserted into the recess 8 a of the armature mounting base 8. Further, the coil 9 is connected at the coil lower side 12 corresponding to the lower side of the coil, and is connected to the lead wire 13 at the tip. A space for connecting the coils 9 and a space for the lead wires 13 are provided in the vicinity of the lower side of the coil corresponding to the lower side of the coil. Further, the inside of the coil 9 and the concave inside of the armature winding 7 and the armature mounting base 8 are covered with a resin mold 14, and the armature winding 7 and the armature mounting base 8 are integrated to constitute the mover 6. ing.
The stator 2 and the mover 6 configured as described above are movable in the advancing direction by a support mechanism such as a linear guide (not shown). In this case, a space for connecting between the coils 9 and the lead wire 13 is provided in the coil lower side 12, so the coil upper side 11, which is the main heat dissipation path, and the recess 8 a of the armature mounting base 8 are provided. The interval can be made close, and the heat generated in the coil 9 can easily escape to the armature mount 8. As a result, the temperature rise of the coil 9 can be reduced.

Next, the resin mold method of the armature which comprises the needle | mover of the conventional coreless linear motor is demonstrated using FIG. 3, FIG.
6 is a front sectional view showing a state in which the armature winding and the armature mounting base of the linear motor shown in the first prior art are installed in the molding die, and FIG. 7 is a side view of FIG. Thus, the portion (gate, resin overflow port, armature winding) excluding the armature mounting base is seen through.
6 and 7, 15 is a molding die, 15a is an upper die, 15b is a lower die, 16 is a gate, and 17 is a resin overflow port.
The armature winding 7 is fixed to the concave portion 8a of the armature mounting base 8 by a technique such as adhesion and attached to the lower mold 15b constituting the molding die 15. Next, an upper mold 15a that also constitutes the molding die 15 is attached and clamped, and is installed in a casting apparatus (not shown). After heating the molding die 15 with the heater of the casting device, a defoamed resin mold 14 (not shown) is poured from the gate 16. The resin mold 14 poured from the gate 16 finally reaches the overflow port 17 while covering the gaps between the coils 9 and the coils and the recess 8 a of the armature mounting base 8. Thereafter, the resin mold 14 is cured by heating for a predetermined time, and then the mold 6 is removed from the mold to obtain the resin-molded movable element 6.

FIG. 8 is a front sectional view of the coreless linear motor as viewed from the moving direction of the mover showing the second prior art, and corresponds to a sectional view taken along the line AA of FIG. Since the structure of the stator is the same as that of the first prior art described above, description thereof is omitted.
The mover 6 includes a printed circuit board 18 with a patterned connection, an armature winding 7 in which coils 9 are arranged on the left and right sides of the printed circuit board 18, and an armature mounting base 8 having a concave cross section for fixing the armature winding 7. Has been. Here, the printed circuit board 18 has a function equivalent to that of the winding fixing plate described in the first prior art. A coil upper side 11 corresponding to the upper side of the coil is inserted into the recess 8 a of the armature mount 8. The concave portions of the armature winding 7 and the armature mounting base 8 are covered with a resin mold 14, and the armature winding 7 and the armature mounting base 8 are integrated to constitute the mover 6. In this case, since the printed circuit board 18 in which the connection is patterned is used, there is no need for a space for the connection and the lead wire 13, and therefore the coil upper side 11 and the recess 8a of the armature mounting base 8 can be brought close to each other. Heat generated in the coil 9 is easily escaped to the armature mount 8. As a result, the temperature rise of the coil 9 can be reduced.
FIG. 9 is a side view showing the state in which the armature winding and the armature mounting base of the linear motor shown in the second prior art are installed in the molding die, and the portion excluding the armature mounting base (gate, resin overflow port) , Armature winding).
In FIG. 9, 15 is a molding die, 16 is a gate, and 17 is a resin overflow port. Since the resin mold method of the mover 6 is the same as the previous example, it is omitted.
Patent No. 3870413 Japanese Patent No. 3550678

However, the prior art has the following problems.
(1) To further reduce the coil temperature of the armature winding, there is a method of reducing the distance between the upper side of the coil, which is the main heat dissipation path, and the armature mounting base, but there is a limit to ensuring insulation.
(2) There is also a method of increasing the thermal conductivity of the resin mold. The moldability deteriorates and it becomes difficult to reliably fill the resin mold into a narrow gap such as a recess of the armature mount. Therefore, the limit of the thermal conductivity of the resin mold is around 1 W / mK.
(3) The armature winding to be resin-molded is long and requires thin-wall casting, and there are narrow and complex spaces such as coil gaps and armature mounting recesses. It is difficult to fill every corner.
The present invention has been made in view of such problems, and reduces an increase in the temperature of the armature winding while ensuring an insulation distance between the armature winding coil and the armature mounting base to which the coil is attached. A coreless linear motor armature resin molding method, a coreless linear motor armature, a coreless linear motor, and a table feeding device are provided that can ensure moldability and obtain a high-quality armature resin mold. It is intended.

In order to solve the above problems, the present invention is configured as follows.
The invention according to claim 1 is provided with a winding fixing plate, an armature winding in which a plurality of coil groups are arranged along a longitudinal direction of the winding fixing plate, and the armature winding. A coreless linear motor armature resin molding method comprising: an armature mounting base that supports a winding fixing plate; and a winding fixing plate on which the armature winding is disposed is a recess of the armature mounting base. Inserted into the first resin mold in the gap between the recess of the armature mounting base and the upper side of the coil group of the armature winding, and then cured, and into the recess of the armature mounting base The armature winding fixed by a first resin mold and the winding fixing plate are set in a molding die, and the lower surface of the recess of the armature mounting base set in the molding die and the armature Smaller than the thermal conductivity of the first resin mold so as to cover the periphery of the winding There was filled with the second resin mold is characterized in that integrally molded with said armature winding and the armature mount.
According to a second aspect of the present invention, there is provided a winding fixing plate, an armature winding in which a plurality of coil groups are disposed along a longitudinal direction of the winding fixing plate, and the armature winding. In the resin molding method of the coreless linear motor armature comprising the armature mounting base that supports the winding fixing plate provided, the first resin mold is filled in the recess of the armature mounting base, A winding fixing plate on which the armature winding is disposed is inserted into the recess of the armature mount, and a gap between the recess of the armature mount and the upper side of the coil group of the armature winding is The armature winding and the winding fixing plate, which are hardened so as to be covered with one resin mold and fixed by the first resin mold in the recess of the armature mounting base, are set in a molding die, A lower surface in a recess of the armature mounting base set in the molding die; A second resin mold having a thermal conductivity lower than that of the first resin mold is filled so as to cover the periphery of the armature winding, and the armature mounting base and the armature winding are integrally formed. It is characterized by that.
The invention according to claim 3 is the resin molding method of the coreless linear motor armature according to claim 1 or 2, wherein the thermal conductivity λ1 of the first resin mold is 2 W / mK <λ1 ≦ 5 W / The thermal conductivity λ2 of the second resin mold is 0.2 W / mK ≦ λ2 ≦ 2 W / mK.
According to a fourth aspect of the present invention, there is provided a winding fixing plate, an armature winding in which a plurality of coil groups are arranged along the longitudinal direction of the winding fixing plate, and the armature winding. A coreless linear motor armature comprising an armature mounting base that supports the winding fixing plate provided, wherein the winding fixing plate on which the armature winding is disposed is in a recess of the armature mounting base. A first resin mold is filled in a gap between the concave portion of the armature mounting base and the upper side of the coil group of the armature winding, and the lower surface of the concave portion of the armature mounting base and the electric machine A second resin mold smaller than the thermal conductivity of the first resin mold is filled so as to cover the periphery of the child winding, and the armature mounting base and the armature winding are integrally formed. It is characterized by that.
According to a fifth aspect of the present invention, in the coreless linear motor armature according to the fourth aspect, the thermal conductivity λ1 of the first resin mold is 2 W / mK <λ1 ≦ 5 W / mK, The heat conductivity λ2 of the resin mold 2 is 0.2 W / mK ≦ λ2 ≦ 2 W / mK.
According to a sixth aspect of the present invention, there is provided a plurality of armatures according to the fourth or fifth aspect, and a plurality of plates having opposite polarities alternately arranged on the armature and the plate-like back yoke through magnetic gaps. Each of the armature and the field magnet as a stator and the other as a mover, and the field and the armature travel relatively. The coreless linear motor is made as described above.
The invention as set forth in claim 7 is characterized in that a table feeding device using the coreless linear motor as set forth in claim 6 as a drive source of the linear motion mechanism is provided.

According to the first aspect of the present invention, the first heat conductivity higher than that of the second resin mold described later is provided between the coil of the armature winding, which is the main heat dissipation path, and the recess of the armature mounting base. A resin mold (hereinafter referred to as “resin mold A”) can be reliably filled, and the coil temperature can be reduced. Furthermore, in the molding with the second resin mold (hereinafter referred to as the resin mold B) having a lower thermal conductivity than the first resin mold described above, the portion other than the concave portion of the armature mounting base may be resin molded. Since the shape of the space to be filled is also simplified, molding with the resin mold B is facilitated, and a high-quality armature resin mold can be obtained.
According to the invention described in claim 2, even when the gap between the concave portion of the armature mounting base and the upper side of the coil of the armature winding is narrow, it is difficult to fill the resin mold A. be able to.
According to the invention described in claim 3, the thermal conductivity λ1 of the resin mold A is 2 W / mK <λ1 ≦ 5 W / mK, and the thermal conductivity λ2 of the resin mold B is 0.2 W / mK ≦ λ2. Since ≦ 2 W / mK, the temperature rise of the armature winding can be reduced and the moldability can be secured.
According to the invention of claim 4, the thermal conductivity of the resin mold A filled between the coil, which is the main heat dissipation path of the heat generated in the coil, and the recess of the armature mounting base is Since it is higher than the thermal conductivity of the resin mold B filled so as to cover the lower surface of the recess of the child mount and the periphery of the armature winding, the coil is secured while ensuring an insulation distance between the coil and the armature mount. Since the thermal resistance between the armature mount and the armature mount becomes small, the temperature rise of the armature winding can be reduced.
Further, according to the invention described in claim 5, the thermal conductivity λ1 of the resin mold A is 2 W / mK <λ1 ≦ 5 W / mK, and the thermal conductivity λ2 of the resin mold B is 0.2 W / mK ≦ λ2. Since ≦ 2 W / mK, compared to the thermal resistance between the coil periphery related to the thermal conductivity of the resin mold B and the outside air, between the coil related to the thermal conductivity of the resin mold A and the armature mounting base Since the thermal resistance of the heat dissipation path is reduced, the temperature rise of the armature winding can be reduced and the moldability can be secured.
Further, according to the invention described in claim 6, it is possible to provide a coreless linear motor in which the armature having the effects described in claims 4 and 5 and a field are combined.
According to the invention described in claim 7, it is possible to provide a table feeding device having the effect of the coreless linear motor described in claim 6.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a front sectional view of a coreless linear motor showing a first embodiment of the present invention, and corresponds to a sectional view taken along line AA of FIG. FIG. 2 is a front sectional view of an armature winding and an armature mount that are resin-molded with a resin mold A according to a coreless linear motor according to a first embodiment of the present invention, and FIG. 3 is a second embodiment of the present invention. It is a front sectional view of a molding die of a coreless linear motor showing. It should be noted that the description of the same constituent elements as those of the prior art is omitted, and only different points will be described.
In the coreless linear motor armature shown in FIG. 1, the armature winding in which the printed circuit board 18 on which the wiring constituting the winding fixing plate is patterned and a plurality of coil groups are arranged along the longitudinal direction of the printed circuit board 18 7, the armature mounting base 8 that supports the printed circuit board 18 on which the armature winding 7 is disposed, and the armature winding 7 in which the coils 9 are disposed on the left and right sides of the printed circuit board 18. The coil upper side 11 corresponding to the upper side of the coil 9 of the winding 7 is inserted into the concave portion 8a of the armature mounting base 8, and the armature winding 7 and the armature mounting base 8 are integrated by a resin mold so that the mover 6 is integrated. The configuration is the same as in the second prior art.
The present invention differs from the first and second prior arts in that a resin mold A20 is filled in the gap between the recess 8a of the armature mount 8 and the upper side 11 of the coil group of the armature winding 7, A resin mold B21 smaller than the thermal conductivity of the resin mold A20 is filled so as to cover the lower surface of the recess 8a of the mounting base 8 and the periphery of the armature winding 7, and the armature mounting base 8, the armature winding 7, Is integrally formed.
Further, the thermal conductivity λ1 of the resin mold A20 is 2 W / mK <λ1 ≦ 5 W / mK, and the thermal conductivity λ2 of the resin mold B21 is 0.2 W / mK ≦ λ2 ≦ 2 W / mK. Yes. Resin mold A20 is made of ceramic powder such as Al ₂ O ₃ , SiO ₂ , AlN, Si ₃ N ₄ , TiO ₂ , and MgO in terms of fluidity, thermal conductivity, insulation, heat resistance, mechanical strength, and the like. An epoxy-type liquid casting resin to which is added is preferable. The thermal conductivity is preferably 2 W / mK to 5 W / mK considering the balance between thermal conductivity and fluidity.
Thereby, since the thermal resistance between the coil 9 which is the main heat dissipation path of the heat generation of the coil and the armature mount 8 is reduced, the temperature rise of the coil 9 can be reduced. Similarly to the resin mold A20, the resin mold B21 is an epoxy type liquid casting resin to which ceramic powder such as Al ₂ O ₃ , SiO ₂ , AlN, Si ₃ N ₄ , TiO ₂ , MgO is added, or unsaturated. Polyester molding materials can also be used. The thermal conductivity is preferably 0.2 W / mK to 2 W / mK considering the balance between thermal conductivity and fluidity.
Next, the resin mold method of the armature which comprises a needle | mover is demonstrated using FIG. 2, FIG.
In FIG. 2, 7 is an armature winding, 8 is an armature mounting base, 18 is a printed circuit board, 11 is a coil upper side, and 12 is a coil lower side. Reference numeral 20 denotes a resin mold A. With the concave portion 8a of the armature mounting base 8 facing upward, the armature winding 7 is attached to the concave portion 8a of the armature mounting base 8 by a technique such as adhesion, and the coil upper side 11 and the concave portion 8a of the armature mounting base 8 are attached. The resin mold A20 defoamed is poured into the gap. The injection amount of the resin mold A20 is preferably up to the lower surface of the armature mounting base 8, and after injection, the resin mold A20 may be defoamed again as necessary. Thereafter, the resin mold A20 is cured at a predetermined temperature. This is attached to the lower mold 15b of the molding die 15 shown in FIG. Next, the upper mold 15a is attached and the mold is clamped, and is installed in a casting apparatus (not shown). After heating the molding die 15 with the heater of the casting apparatus, a defoamed resin mold B21 (not shown) is poured from the gate 16. The resin mold B21 poured from the gate 16 finally reaches the overflow port 17 while covering the gaps between the coils 9 and between the coils. After that, the resin mold B21 is cured by heating for a predetermined time, and then the mold 6 is removed and the movable element 6 molded by resin with two types of resin molds is obtained. By adopting such a method, the resin mold A20 having high thermal conductivity can be surely filled between the coil upper side 11 which is the main heat radiation path and the recess 8a of the armature mounting base 8, and the coil temperature is reduced. it can. Furthermore, in the molding with the resin mold B21, the portion other than the recess 8a of the armature mounting base 8 may be molded with the resin, and the shape of the space to be filled is simplified, so the molding with the resin mold B21 is easy. Thus, a high-quality resin mold movable element is obtained.

Next, a second embodiment will be described.
Since the configurations of the stator 2 and the mover 6 according to the second embodiment are the same as those of the first embodiment, the description thereof will be omitted, and a resin molding method of the armature constituting the mover will be described with reference to FIGS. I will explain.
The second embodiment differs from the first embodiment in that a resin mold A20 is injected into the recess 8a of the armature mount 8 with the recess 8a of the armature mount 8 facing upward, Install winding 7. The armature mount 8 and the armature winding 7 are fixed using a jig (not shown), and the resin mold A20 is defoamed again as necessary. Thereafter, the resin mold A20 is cured at a predetermined temperature. This is attached to the lower mold 15b of the molding die 15 shown in FIG. Next, the upper mold 15a is attached and the mold is clamped, and is installed in a casting apparatus (not shown). After heating the molding die 15 with the heater of the casting apparatus, a defoamed resin mold B21 (not shown) is poured from the gate 16 in FIG. The resin mold B21 poured from the gate 16 finally reaches the overflow port 17 while covering the gaps between the coils 9 and between the coils. After that, the resin mold B21 is cured by heating for a predetermined time, and then the mold 6 is removed and the movable element 6 molded by resin with two types of resin molds is obtained. By adopting such a resin molding method, even when the gap between the recess 8a of the armature mounting base 8 and the coil upper side 11 of the armature winding 7 is narrow and it is difficult to fill the resin mold A20, the resin mold A20 is surely attached. Can be filled.

1 is a front sectional view of a coreless linear motor showing a first embodiment of the present invention, and corresponds to a sectional view taken along line AA of FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front sectional view of an armature winding and an armature mounting base that are resin-molded with a resin mold A according to a coreless linear motor according to a first embodiment of the present invention. It is a front sectional view of a molding die of a coreless linear motor showing a second embodiment of the present invention. FIG. 4 is an overall perspective view of a general coreless linear motor common to the prior art and the present invention to be described later, and shows only the stator and the mover. FIG. 5 is a front sectional view of the coreless linear motor viewed from the moving direction of the mover showing the first prior art, and corresponds to a sectional view taken along the line AA of FIG. FIG. 6 is a front sectional view showing a state in which the armature winding and the armature mounting base of the linear motor shown in the first prior art are installed in a molding die. FIG. 7 is a side view of FIG. 6 viewed from the direction of arrow A, and is a perspective view of the portion excluding the armature mounting base. FIG. 8 is a front sectional view of the coreless linear motor as viewed from the moving direction of the mover showing the second prior art, and corresponds to a sectional view taken along the line AA of FIG. FIG. 9 is a side view showing a state in which the armature winding and the armature mounting base of the linear motor shown in the second prior art are installed in a molding die, and a portion excluding the armature mounting base is seen through. .

Explanation of symbols

1 Coreless Linear Motor 2 Stator 3 Permanent Magnet 4 Back Yoke 5 Yoke Support Base 6 Movable Element 7 Armature Winding 8 Armature Mounting Base 8a Recess 9 Coil 10 Winding Fixing Plate 11 Coil Upper Side 12 Coil Lower Side 13 Lead Wire 14 Resin Mold 15 Mold 15a Upper die 15b Lower die 16 Gate 17 Overflow port 18 Printed circuit board (winding fixing plate)
20 Resin mold A
21 Resin mold B

Claims (7)

Winding fixing plate,
An armature winding in which a plurality of coil groups are disposed along the longitudinal direction of the winding fixing plate;
An armature mounting base that supports a winding fixing plate in which the armature winding is disposed;
In a resin molding method of a coreless linear motor armature comprising:
Inserting the winding fixing plate on which the armature winding is disposed in the recess of the armature mounting base,
After filling the first resin mold in the gap between the concave portion of the armature mounting base and the upper side of the coil group of the armature winding, it is cured,
The armature winding and the winding fixing plate formed by being fixed by the first resin mold in the recess of the armature mounting base are set in a molding die,
Filling a second resin mold smaller than the thermal conductivity of the first resin mold so as to cover the lower surface of the recess of the armature mounting base set in the molding die and the periphery of the armature winding; A resin molding method for a coreless linear motor armature, wherein the armature mounting base and the armature winding are integrally formed. Winding fixing plate,
An armature winding in which a plurality of coil groups are disposed along the longitudinal direction of the winding fixing plate;
An armature mounting base that supports a winding fixing plate in which the armature winding is disposed;
In a resin molding method of a coreless linear motor armature comprising:
Fill the first resin mold in the recess of the armature mounting base,
The winding fixing plate on which the armature winding is disposed is inserted into the recess of the armature mount, and the gap between the recess of the armature mount and the upper side of the coil group of the armature winding is Cure to cover with the first resin mold,
The armature winding and the winding fixing plate formed by being fixed by the first resin mold in the recess of the armature mounting base are set in a molding die,
Filling a second resin mold smaller than the thermal conductivity of the first resin mold so as to cover the lower surface of the recess of the armature mounting base set in the molding die and the periphery of the armature winding; A resin molding method for a coreless linear motor armature, wherein the armature mounting base and the armature winding are integrally formed. The thermal conductivity λ1 of the first resin mold is 2 W / mK <λ1 ≦ 5 W / mK,
3. The resin molding method for a coreless linear motor armature according to claim 1, wherein the second resin mold has a thermal conductivity λ <b> 2 of 0.2 W / mK ≦ λ <b> 2 ≦ 2 W / mK. 4. Winding fixing plate,
An armature winding in which a plurality of coil groups are disposed along the longitudinal direction of the winding fixing plate;
An armature mounting base that supports a winding fixing plate in which the armature winding is disposed;
In a coreless linear motor armature comprising:
The winding fixing plate on which the armature winding is disposed is inserted into a recess of the armature mounting base,
Filling the first resin mold in the gap between the recess of the armature mounting base and the upper side of the coil group of the armature winding;
A second resin mold smaller than the thermal conductivity of the first resin mold is filled so as to cover the lower surface of the recess of the armature mount and the periphery of the armature winding;
A coreless linear motor armature, wherein the armature mounting base and the armature winding are integrally formed. The thermal conductivity λ1 of the first resin mold is 2 W / mK <λ1 ≦ 5 W / mK,
5. The coreless linear motor armature according to claim 4, wherein the second resin mold has a thermal conductivity λ2 of 0.2 W / mK ≦ λ2 ≦ 2 W / mK.   6. The field element according to claim 4, wherein the armature is arranged opposite to the armature via a magnetic gap, and a plurality of permanent magnets having different polarities are arranged next to each other on a flat back yoke. A coreless linear motor, wherein either one of the armature and the field is used as a stator and the other is used as a mover, so that the field and the armature travel relatively. .   6. A table feeding apparatus, wherein the coreless linear motor according to claim 5 is used as a drive source for a linear motion mechanism.

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