JP2010071935A - Work temperature adjusting device and corrosion resistance testing apparatus equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a work temperature adjusting device capable of precisely and physically controlling the temperature distribution of a work, and to provide a corrosion resistance testing apparatus equipped with the same. <P>SOLUTION: The work temperature adjusting device is equipped with: an internal heater 49 for indirectly heating a sheet work W; a work holder 2 to which the work W is set; a plurality of heat transfer heating projections 54, constituted so as to be freely separated from and brought into contact with the heat transfer contact surface 50 of the work holder 2 and absorbing heat from a heating device 53 to transfer the same to the work holder 2; and a separating and contacting mechanism 61 for individually separating a plurality of the heat transfer heating projections 54 from the work holder 2 and bringing them into contact with it. A plurality of the heat transfer heating projections 54 are distributed in the region as a whole of the heat transfer contact surface. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a workpiece temperature adjusting device that heats or cools a workpiece, and a corrosion resistance test apparatus including the workpiece temperature adjusting device.

2. Description of the Related Art Conventionally, as a lamp annealing apparatus to which this kind of work temperature adjusting apparatus is applied, an apparatus that performs an annealing process on a wafer (work) under high temperature and high pressure is known (see Patent Document 1). The lamp annealing apparatus is provided with a processing chamber for accommodating wafers, a lamp unit disposed above the wafer and for heating each of the divided zones of the wafer, and disposed below the wafer, and the temperature of the wafer in each zone. And a control unit that controls them comprehensively.
In this lamp annealing apparatus, a wafer is heated by a lamp unit, and the temperature is measured by a thermometer and fed back to the lamp unit. Thereby, the temperature in each zone of the wafer is individually controlled.
JP 2001-156010 A

  However, such a high-pressure annealing apparatus has a problem that the control system becomes complicated because the lamp section for each zone is individually controlled based on the measurement result of the thermometer. In addition, since the lamp unit heats the wafer by radiant heat, the temperature response of the wafer to the lamp unit is poor, and there is a limit to the zoning of the lamp unit, so that the temperature distribution of the wafer can be controlled accurately. There was a problem that I could not.

  An object of the present invention is to provide a workpiece temperature adjusting device capable of accurately and physically controlling the workpiece temperature distribution and a corrosion resistance test device including the workpiece temperature adjusting device.

  The workpiece temperature adjusting device of the present invention is configured to be configured to be able to be detachably connected to a heating means for indirectly heating a plate-like workpiece, a workpiece holder on which the workpiece is set, and a heat transfer contact surface of the workpiece holder. A plurality of heat transfer heating projections that absorb heat from the workpiece holder and transfer heat to the work holder, and separation / contact means for individually separating and contacting the plurality of heat transfer heating projections with respect to the work holder. It is distributed over the entire area of the thermal contact surface.

  According to this configuration, the plurality of heat transfer heating protrusions heated by the heating means and distributed over the entire area of the heat transfer contact surface of the workpiece are separated from and brought into contact with the heat transfer contact surface of the workpiece by the separation and contact means. The workpiece can be heated locally and to a desired temperature. In this case, since the separation / contact means has a structure in which the plurality of heat transfer heating protrusions are individually separated / contacted, the heating means may collectively heat the plurality of heat transfer heating protrusions to a certain temperature. The workpiece can be locally heated with high accuracy, or the whole can be heated with high accuracy uniformly. Therefore, the temperature distribution of the workpiece can be accurately and physically controlled, and the temperature distribution of the workpiece can be freely controlled.

  In this case, the separation / contact means is configured to be capable of adjusting the heat transfer heat amount to the work holder by each heat transfer heating protrusion by adjusting the separation dimension of each heat transfer heating protrusion with respect to the heat transfer contact surface. Is preferred.

  According to this structure, not only the heat conduction heating of each heat transfer heating projection to the workpiece is controlled by the separation operation of the separation means (corresponding to ON-OFF), but also depending on the separation distance from each heat transfer heating projection. The temperature of the workpiece can also be controlled by heat radiation heating. Therefore, the temperature distribution of the workpiece can be freely controlled with high accuracy.

  In this case, the separating / connecting means has a plurality of motors corresponding to the respective heat transfer heating projections and a plurality of separation / contact mechanisms for converting the power of each motor into a separation contact operation and transmitting the converted power to each heat transfer heating projection. It is preferable that

  According to this configuration, it is possible to control the separation operation and the separation position of the heat transfer heating projection with a simple mechanism.

  In this case, it is preferable to further include temperature detection means for detecting the temperature distribution in the plane of the workpiece, and control means for controlling the driving of the separation / contact means based on the detection result of the temperature detection means.

  According to this configuration, since the temperature detecting means and the separating / connecting means are linked through the control means, the temperature distribution of the workpiece can be obtained with high accuracy by feeding back the detection result of the temperature detecting means to the separating / connecting means. Can be controlled.

  In this case, it is preferable that the temperature detection means is constituted by a non-contact temperature sensor array.

  According to this configuration, the temperature distribution of the workpiece can be easily grasped without damaging the workpiece, and the temperature distribution of the workpiece can be adjusted with higher accuracy.

  In this case, a cooling means for indirectly cooling the work, and a plurality of heat transfer cooling protrusions configured to be detachable from the work holder, which absorbs heat from the work holder and transfers heat to the cooling means, and a plurality of heat transfer cooling protrusions for the work holder. It is preferable that the heat transfer cooling protrusions are further provided separately from each other, and the plurality of heat transfer cooling protrusions are distributed over the entire heat transfer contact surface.

  According to this configuration, when the workpiece is locally cooled, the cooling protrusion corresponding to the location where the temperature is desired to be lowered is brought into contact with the heat transfer contact surface of the workpiece holder by the separating / contacting means. In other words, the work can be locally cooled by a part of the cooling projections coming into contact with the work holder. Moreover, the workpiece | work can be cooled entirely by making all the cooling protrusions contact | abut simultaneously with the heat-transfer contact surface of a workpiece | work holder. Therefore, the temperature distribution of the workpiece can be freely controlled with high accuracy.

  In this case, the heating / cooling means for indirectly heating or cooling the plate-like work, the work holder on which the work is set, and the heat transfer contact surface of the work holder are configured to be detachable from each other. A plurality of heat transfer protrusions for transferring heat between the workpiece holder and the work holder, and a connecting / disconnecting means for individually connecting / disconnecting the plurality of heat transfer protrusions to the work holder. Distributed over the entire thermal contact surface, the heating / cooling means includes a coil that contacts the plurality of heat transfer protrusions, and a chiller unit that selectively supplies a heating medium and a refrigerant to the coil. preferable.

  According to this configuration, since the heat transfer protrusion and the coil also serve as a heating means and a cooling means for the workpiece, the temperature distribution of the workpiece can be freely controlled, and the heating / cooling means can be downsized. it can.

  The corrosion resistance test apparatus of the present invention comprises the above-described work temperature adjusting device that maintains a uniform temperature distribution in the plane of the work, and a container main body and a container lid that opens and closes the container main body, and the work temperature adjusting device is accommodated therein. A pressure vessel and an external heating means attached to the outer surface of the vessel body for heating the inside of the pressure vessel, introducing the test chemical into the pressure vessel and heating and pressurizing the test chemical to a saturated vapor pressure state, Is subjected to an accelerated test for corrosion resistance of a workpiece by exposing the test piece to an atmosphere of a test chemical solution.

  According to this configuration, when an accelerated test for corrosion resistance of a workpiece is performed, the workpiece can be heated with high accuracy so that the temperature of the workpiece becomes uniform. Therefore, the heating and pressurizing conditions for the entire workpiece can be made constant, and the reliability of the workpiece in the accelerated corrosion resistance test can be significantly improved.

  Hereinafter, a workpiece temperature adjusting device and a workpiece corrosion resistance testing device including the workpiece temperature adjusting device according to a first embodiment of the present invention will be described with reference to the accompanying drawings. This corrosion resistance test device performs a corrosion resistance test on a perforated workpiece with a coating applied to the surface. The liquid that comes into contact with the workpiece when it is incorporated into the device is used as the test chemical solution. The accelerated test is performed by exposing the workpiece to a saturated chemical vapor atmosphere by heating the workpiece for a certain period of time. Here, the work and the structure around the work will be described first.

  As shown in FIG. 1, the workpiece W is a metal square plate having a plurality of small holes, metal-plated, and a plurality of the test chemical solutions are placed on the workpiece holder 2. Together with the impregnated non-woven fabric 3 (see FIG. 2), the anti-corrosion test apparatus 1 is introduced. The corrosion resistance test using a test chemical solution mainly tests the resistance against peeling and cracking of the metal plating. The work holder 2 is formed in a lattice frame shape with high thermal conductivity aluminum or the like, and each work W is supported by a support protrusion 5 projecting inwardly in each frame. Is held in. That is, the plurality of workpieces W are set in a matrix from the upper surface of the workpiece holder 2.

  As shown in FIG. 2, the corrosion resistance test apparatus 1 includes a pressure vessel 11 including a container body 21 and a container lid 22 that opens and closes the container body 21, and an outer peripheral surface of the container body 21. An external heater 12 for heating, a heat insulating material (not shown) for covering the outside of the external heater 12, and a lid opening / closing mechanism 13 for opening and closing the container lid 22 are provided. The corrosion resistance test apparatus 1 is housed in the pressure vessel 11 and controls a work temperature adjusting device 18 that adjusts the temperature of the work W, and a control device that controls the external heater 12, the lid opening / closing mechanism 13, and the work temperature adjusting device 18. Control means) 15. As will be described in detail later, in the corrosion resistance test apparatus 1, the inside of the pressure vessel 11 is heated by the external heater 12, and fine adjustment is performed by the work temperature adjustment device 18 so that the entire work W has a uniform heating temperature, thereby accelerating. A test is to be conducted.

  The pressure vessel 11 is a legally small pressure vessel. A ring-shaped seal member 23 is interposed between the vessel main body 21 and the vessel lid 22, and is provided on the upper portion of the vessel main body 21. Thus, the container lid 22 that closes the container body 21 is firmly closed. The container body 21 is formed in a substantially cylindrical shape with a bottom using a thick metal material, and the upper part is formed in a flange shape. And the above-mentioned lock metal fitting is built in this flange-shaped upper part. The lower part of the container main body 21 with the container lid 22 attached is a container chamber 24 into which the workpiece W accommodated in the work holder 2 is put. Further, the atmosphere release device 16 having a valve for releasing pressure communicates with the container chamber 24. The container lid 22 is inserted deeply into the container main body 21, and the sealing member 23 is mounted in the middle of the insertion sealing portion 25.

  The container lid 22 is formed of a thick metal material, and a lid body 31 that covers the opening end of the container body 21 and a sealing lid portion that is deeply inserted into the insertion sealing portion 25 of the container body 21 from the opening end. 32. The lid main body 31 is formed in a flange shape corresponding to the flange-shaped upper portion of the container main body 21 and is in close contact with the upper surface of the container main body 21 like a flange joint when closed. The sealing lid portion 32 has an outer peripheral surface formed in a complementary shape to the fitting sealing portion 25, and a temperature detection device 35 that detects a temperature distribution in the plane of the workpiece W on the flat bottom surface. And a holder set portion 33 for detachably mounting the work holder 2. Although not shown in detail, the holder setting portion 33 has a pair of locking claws, for example, and is configured to be able to set the work holder 2 horizontally. When the container lid 22 is closed, the outer peripheral surface of the sealing lid portion 32 comes into close contact with the sealing member 23, whereby the inside of the container body 21 is hermetically sealed and the work holder 2 is placed in the container chamber of the container body 21. 24.

  The lid opening / closing mechanism 13 includes an elevating mechanism 20 such as a link or a lead screw connected to the upper end of the container lid 22, and a motor 19 that drives the elevating mechanism 20. When opening the container lid 22, the control device 15 drives the air release device 16 described above to lower the pressure inside the container chamber 24 to atmospheric pressure, and then drives the motor 19 to raise the container lid 22, and the container body 21. Is released. Further, the container body 21 is closed in the reverse procedure. The rising end position of the container lid 22 by the lid opening / closing mechanism 13 is a position immediately above the container body 21 in which the work W mounted on the container lid 22 is sufficiently pulled up from the opening end of the container body 21. In this state, the workpiece W is attached to and detached from the container lid 22.

  The external heater 12 includes an upper heater 41, a lower heater 42, and a bottom heater 43 configured by a mantle heater or a rubber heater, and heats the entire pressure vessel 11. In this case, a control table regarding the test temperature and the test time including the temperature rise at the start of the test and the temperature drop at the end of the test is prepared in the control device 15. The heater 12 is controlled. Thereby, when the container chamber 24 is heated to a predetermined temperature, the test chemical liquid soaked in the nonwoven fabric 3 becomes a saturated vapor pressure state and changes to a chemical liquid atmosphere. Then, the chemical atmosphere reacts with the heated workpiece W.

  As shown in FIG. 3, the workpiece temperature adjusting device 18 includes the workpiece holder 2 on which a plurality of workpieces W are set, an internal heater (heating means) 49 that indirectly heats the workpiece W, and the workpiece holder 2. A plurality of heat transfer heating protrusions 54 that are configured to be detachable from the heat transfer contact surface 50 and absorb heat from the internal heater 49 and transfer heat to the work holder 2, and a plurality of heat transfer heating protrusions 54 to the work holder 2 are individually provided. And a separation / contact mechanism (separation / contact means) 61 for making contact and separation. In this case, the plurality of heat transfer heating protrusions 54 come into contact with the work holder 2 from below, and the heat transfer contact surface 50 of the work holder 2 is the lower surface of the work holder 2 formed in a lattice frame shape. It is configured.

  The internal heater 49 is installed at the bottom of the container body 21 by the heating support member 55 so as to be positioned immediately below the work holder 2 during the corrosion resistance test. It consists of a heating wire heater. In this case, the portion corresponding to each frame member is formed wider than that of the work holder 2, and the work holder 2 has a plurality of through holes 56 that support the plurality of heat transfer heating projections 54 so as to be movable up and down. It is formed so as to be dispersed, that is, distributed substantially uniformly over the entire heat transfer contact surface 50 (see FIG. 3A).

  Each of the heat transfer heating protrusions 54 is formed in a straight rod shape with the upper end surface 57 formed flat, and a contact position that contacts the heat transfer contact surface 50 of the work holder 2 so as to push up, and a heat transfer contact. It is configured to be slidable in the vertical direction between a retreat position that retreats downward from the surface 50. Each heat transfer heating projection 54 is made of a metal material having a high thermal conductivity, and the through hole 56 of the internal heater 49 that guides the slide of each heat transfer heating projection 54 is also made of a metal material having a high thermal conductivity. It is formed of a sleeve. Moreover, each heat-transfer heating protrusion 54 is configured to be detachable from the internal heater 49 and can be replaced with one having a different area of the upper end surface 57. Specifically, even if the temperature of the internal heater 49 is constant, by increasing the contact area, the temperature increase rate of the work W can be increased, while by reducing the contact area, the work W The temperature increase rate can be lowered.

  The separation / contact mechanism 61 includes a small lift motor 62 corresponding to each heat transfer heating protrusion 54, and a power transmission mechanism 63 that converts the forward / reverse rotational power of the small lift motor 62 into the lift movement of the heat transfer heating protrusion 54. (See FIG. 3B). When the small elevating motor 62 rotates in the forward direction, the heat transfer heating projection 54 rises through the power transmission mechanism 63, and when it rotates in the reverse direction, the heat transfer heating projection 54 moves down through the power transmission mechanism 63. In this case, the small lift motor 62 is formed of a stepping motor or a DC motor with an encoder. In addition to the position where the heat transfer heating projection 54 abuts the heat transfer contact surface 50 of the work holder 2, the heat transfer contact surface. The heat transfer heating protrusion 54 heat dissipation gap (separation dimension) with respect to 50 can be adjusted continuously or over a plurality of stages.

  That is, each of the heat transfer heating protrusions 54 abuts on the heat transfer contact surface 50 of the work holder 2 and directly heats the work holder 2 to raise the temperature of the work holder 2. By facing the heat dissipation gap, the heat transfer mode can be adjusted as appropriate when the work holder 2 is heated by heat dissipation. In the former heat transfer mode, the temperature increase rate of the workpiece W can be adjusted to be high, and in the latter heat transfer mode, the temperature increase rate of the workpiece W can be adjusted to be low.

  The temperature detection device 35 includes a detection unit 64 (see FIG. 2) configured with a temperature sensor array that detects the amount of infrared rays radiated from the workpiece W, an apparatus main body (not shown) with a display that displays measurement results, It is composed of The apparatus main body visualizes the amount of infrared rays radiated depending on the temperature of the workpiece W as a temperature change of the workpiece W, and the measured amount of infrared rays is displayed in a color-coded manner as a thermography on the display. In addition, the temperature detection device 35 is linked to the separation / contact mechanism 61 via the control device 15, and the detection signal of the detection unit 64 is sequentially input to the control device 15. The plurality of separation / contact mechanisms 61 are controlled so that the temperature distribution of the workpiece W is uniform while considering the control table. Thereby, while being able to grasp | ascertain easily the temperature condition in each site | part of the workpiece | work W, the temperature distribution of the workpiece | work W can be adjusted accurately.

  As described above, according to the first embodiment, the plurality of heat transfer heating protrusions 54 uniformly heated by the internal heater 49 are brought into contact with the heat transfer contact surface 50 of the work holder 2 individually or the heat dissipation gap. Therefore, the temperature of the workpiece can be locally increased freely through the work holder 2. Therefore, the workpiece W can be uniformly heated to a desired temperature.

  Next, the corrosion resistance test apparatus 1 according to the first modification will be described with reference to FIG. In addition to the corrosion resistance test apparatus 1 of the first embodiment, the corrosion resistance test apparatus 1 according to the first modification includes a cooling element (cooling means) 71 that indirectly heats the workpiece W and the heat transfer contact surface 50 of the workpiece holder 2. And a plurality of heat transfer cooling protrusions 72 that absorb heat from the work holder 2 and transfer heat to the cooling element 71, and a plurality of heat transfer cooling protrusions 72 that are individually connected to and separated from the work holder 2. And a contact mechanism (separation means) 61 (see FIG. 4B).

  The cooling element 71 is fixed to the bottom surface of the container main body 21 by a cooling support member 74 so as to be positioned immediately above the internal heater 49, and is composed of a Peltier element or the like. Further, in the cooling element 71, a plurality of cooling through holes 74 that support the heat transfer cooling protrusions 72 to be movable up and down and a plurality of heating through holes 75 that support the heat transfer heating protrusions 54 to move up and down are dispersed. That is, they are formed so as to be distributed substantially uniformly over the entire heat transfer contact surface 50 (see FIG. 4A). The heat transfer cooling protrusion 72 has the same structure as the heat transfer heating protrusion 54, and the separation / contact mechanism 61 is the same as in the first embodiment (the description is omitted). The cooling element 71 and the internal heater 49 may be arranged upside down.

  As described above, according to the first modified example, in addition to being able to uniformly heat the workpiece W, a plurality of transmissions that are uniformly cooled by the cooling element 71 with respect to the heat transfer contact surface 50 of the workpiece holder 2. Since the heat cooling protrusions 72 are brought into contact with each other or the temperature is lowered with a heat radiation gap, the temperature of the work can be lowered freely locally through the work holder 2. Therefore, the workpiece W can be uniformly adjusted to a desired temperature.

  Next, the corrosion resistance test apparatus 1 according to the second embodiment will be described with reference to FIG. The corrosion resistance test apparatus 1 is different from the first embodiment and the first modification in the structure of the workpiece temperature adjusting device 18. That is, the workpiece holder 2 on which the workpiece W is set, the heating / cooling device (heating / cooling means) 100 that indirectly heats or cools the workpiece W, and the heat transfer contact surface 50 of the workpiece holder 2 can be attached to and detached from each other. And a plurality of heat transfer protrusions 82 for transferring heat between the heating / cooling device 100 and the work holder 2, and a separation / contact mechanism for individually separating the plurality of heat transfer protrusions 82 from the work holder 2. (Separation means) 61.

  The heating / cooling device 100 includes a heat dissipation / heat absorption block 84 having a built-in coil 85 that contacts a plurality of heat transfer protrusions 82, and a chiller unit 95 that selectively supplies a heating medium and a refrigerant to the coil 85. ing. The heat radiation / heat absorption block 84 is installed at the bottom of the container body 21 by the support member 87 so as to be positioned immediately below the work holder 2 during the corrosion resistance test, and is formed in a lattice frame shape following the work holder 2. ing. The work holder 2 is formed so that a plurality of heat transfer through-holes 86 that support the plurality of heat transfer protrusions 82 to be movable up and down are dispersed, that is, distributed substantially uniformly over the entire heat transfer contact surface 50. (See FIG. 5A). The chiller unit 95 is disposed outside the container main body 21 and supplies a heat medium or a refrigerant to the coil 85 in the container main body 21 via the forward flow path 91 and the return flow path 92. That is, heat conduction is performed between the heat transfer protrusions 82 via the coil 85.

  The chiller unit 95 returns the unit main body 93, the forward flow path 91 for supplying the heat medium or refrigerant of the unit main body 93 to the heat dissipation / heat absorption block 84, and the heat medium or refrigerant from the heat dissipation / heat absorption block 84 to the unit main body 93. And a return flow path 92. The forward flow path 91 is branched at its unit main body 93 side into a heat medium forward flow path 91a for supplying a heat medium and a refrigerant forward flow path 91b for supplying a refrigerant. Moreover, the return flow path 92 has the unit main body 93 side branched into a heat medium return flow path 92a for returning the heat medium and a refrigerant return flow path 92b for returning the refrigerant. Further, the heat medium forward flow path 91a, the refrigerant forward flow path 91b, the heat medium return flow path 92a, and the refrigerant return flow path 92b are provided with open / close valves 94, respectively, which are switched by heating or cooling. ing. Specifically, when supplying the heat medium, the open / close valve 94 provided in the heat medium forward flow path 91a and the heat medium return flow path 92a is set to “open”, and the refrigerant forward flow path 91b and the refrigerant return flow path are set. By opening and closing the open / close valve 94 provided in 92 b, the heat medium is supplied to the heat dissipation / heat absorption block 84. Further, the refrigerant is supplied to the heat dissipation / heat absorption block 84 by reversely operating the on-off valves 94.

  Then, the work W can be heated uniformly by contacting the heat transfer protrusions 82 with the work holder 2 or facing the heat transfer gap with the heat medium supplied to the heat dissipation / heat absorption block 84. ing. Similarly, the work W can be uniformly cooled by contacting the heat transfer protrusion 82 with the work holder 2 or facing the work holder 2 with the heat dissipation gap in a state where the refrigerant is supplied to the heat dissipation / heat absorption block 84. ing.

  As described above, according to the second embodiment, since the work W can be heated and cooled by the heat transfer protrusions 82 and the coil 85, the temperature distribution of the work W can be freely controlled and the heating can be performed. -The cooling means can be reduced in size.

  According to the above configuration, the heat of the internal heater 49 is heated by the heat transfer heating protrusions 54 (heat transfer protrusions) by bringing the heat transfer protrusions 54 (heat transfer protrusions 82) corresponding to the portions to be heated into contact with the work holder 2. Heat is transferred to the workpiece W via the projection 82) and the workpiece holder 2. Therefore, the workpiece W can be locally heated and heated so that the temperature of the workpiece W becomes uniform. Moreover, the heat of the workpiece | work W and the heat-transfer cooling protrusion 72 (heat-transfer protrusion 82) are made to contact | abut the heat-transfer cooling protrusion 72 (heat-transfer protrusion 82) corresponding to the location to cool to the work holder 2. ), The workpiece W is cooled by being transferred to the cooling element 71 (heat radiation / heat absorption block 84). Therefore, the workpiece | work W can be cooled locally and it can cool so that the temperature of the workpiece | work W may become uniform.

  The corrosion resistance test apparatus 1 according to the present invention can be applied to a film forming apparatus, an etching apparatus, an ashing apparatus, or the like as long as it is necessary to make the temperature of the workpiece W uniform. In addition, when the test temperature is not excessively high or when the reaction system does not require airtightness, the container main body 21 and the container lid 22 may not be airtightly joined.

It is (a) top view (b) sectional drawing of the workpiece holder which mounted the workpiece | work. It is sectional drawing of the corrosion resistance test apparatus which concerns on 1st Embodiment. It is sectional drawing of a workpiece | work temperature adjustment apparatus. It is sectional drawing of the corrosion resistance test apparatus which concerns on a 1st modification. It is sectional drawing of the corrosion resistance test apparatus which concerns on 2nd Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Corrosion resistance test apparatus 2 ... Work holder 11 ... Pressure vessel 12 ... External heater 15 ... Control apparatus 35 ... Temperature detection apparatus 50 ... Heat-transfer contact surface 54 ... Heat-transfer heating protrusion 61 ... Separation mechanism 62 ... Small raising / lowering motor 72 ... Heat transfer cooling protrusion 82 ... Heat transfer protrusion 85 ... Coil 95 ... Chiller unit 98 ... Cooling device 100 ... Heating / cooling device W ... Workpiece

Claims (8)

Heating means for indirectly heating the plate-shaped workpiece;
A work holder on which the work is set;
A plurality of heat transfer heating protrusions configured to be detachable from the heat transfer contact surface of the work holder, receiving heat from the heating means and transferring heat to the work holder;
Separating means for individually separating and contacting the plurality of heat transfer heating protrusions with respect to the work holder,
The work temperature adjusting device, wherein the plurality of heat transfer heating protrusions are distributed over the entire heat transfer contact surface.   The separation / contact means is configured to be capable of adjusting a heat transfer heat amount to the work holder by each heat transfer heating protrusion by adjusting a separation dimension of each heat transfer heating protrusion with respect to the heat transfer contact surface. The workpiece temperature adjusting device according to claim 1, wherein: The separation means includes a plurality of motors corresponding to the heat transfer heating protrusions,
The workpiece temperature adjusting device according to claim 2, further comprising: a plurality of separation / contact mechanisms that convert the power of each motor into the separation / contact operation and transmit the power to the heat transfer heating protrusions. . Temperature detecting means for detecting a temperature distribution in the plane of the workpiece;
4. The workpiece temperature adjusting device according to claim 1, further comprising a control unit that controls driving of the separation / contact unit based on a detection result of the temperature detection unit.   The work temperature adjusting device according to claim 4, wherein the temperature detecting unit is configured by a non-contact temperature sensor array. Cooling means for indirectly cooling the workpiece;
A plurality of heat transfer cooling protrusions configured to be detachable from the work holder, absorbing heat from the work holder and transferring heat to the cooling means;
Separating means for separating and contacting the plurality of heat transfer cooling protrusions individually with respect to the work holder;
6. The workpiece temperature adjusting device according to claim 1, wherein the plurality of heat transfer cooling protrusions are distributed over the entire area of the heat transfer contact surface. A heating / cooling means for indirectly heating or cooling a plate-like workpiece;
A work holder on which the work is set;
A plurality of heat transfer protrusions configured to be detachable from the heat transfer contact surface of the work holder, and performing heat transfer between the heating / cooling means and the work holder;
Separating means for individually separating and contacting the plurality of heat transfer protrusions with respect to the work holder,
The plurality of heat transfer protrusions are distributed throughout the heat transfer contact surface,
The heating / cooling means includes a coil that contacts the plurality of heat transfer protrusions, and a chiller unit that selectively supplies a heating medium and a refrigerant to the coil. . The workpiece temperature adjusting device according to any one of 1 to 6, which maintains a uniform temperature distribution in the plane of the workpiece;
A pressure vessel containing a container main body and a container lid for opening and closing the container main body, and containing the workpiece temperature adjusting device therein;
An external heating means attached to the outer surface of the container body for heating the inside of the pressure vessel;
With
The test chemical solution is introduced into the pressure vessel, and the test chemical solution is heated and pressurized to a saturated vapor pressure state, and the workpiece is exposed to the atmosphere of the test chemical solution to perform an accelerated corrosion resistance test of the workpiece. Corrosion resistance test equipment.

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