JP2010069688A - Liquid jetting head and liquid jetting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid jetting head and a liquid jetting apparatus which can improve reliability. <P>SOLUTION: The liquid jetting head includes a flow channel forming substrate 10 in which individual flow channels including pressure generation chambers 12 which communicate with nozzle openings 21 for jetting a liquid are provided, and a reservoir forming substrate 30 which is stacked on the flow channel forming substrate 10 and includes a reservoir part 32 formed therein to communicate with the individual flow channels. The reservoir part 32 includes a penetrating-through part 33 which penetrates the reservoir forming substrate 30 in the thickness direction, and a recessed part 34 opened to a surface of the opposite side to the flow channel forming substrate 10 and formed opposed to a region where the individual flow channels are provided. A columnar pressing part 36 is erected along the thickness direction of the reservoir forming substrate 30 on the bottom surface of the recessed part 34. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid such as ink.

  A typical example of a liquid ejecting head that ejects liquid is an ink jet recording head that ejects ink. As such an ink jet recording head, for example, a reservoir provided with a flow path forming substrate including an individual flow path including a pressure generating chamber communicating with a nozzle for ejecting liquid, and a reservoir communicating with the individual flow path What joined the formation board | substrate via the adhesive agent is known.

  Here, as a prior art for realizing the downsizing of such an ink jet recording head, a part of the reservoir is formed on the side opposite to the flow path forming substrate and the penetrating portion that penetrates the reservoir forming substrate in the thickness direction. There has been proposed one constituted by a concave portion that is open on the surface and is opposed to a region provided with an individual flow path (see, for example, Patent Document 1). That is, in Patent Document 1, a reduction in size is realized by providing a part of the reservoir and the individual flow path so as to overlap in the stacking direction of the reservoir formation substrate and the flow path formation substrate.

JP 2007-301736 A

  By the way, generally, the reservoir forming substrate and the flow path forming substrate are joined by pressing with a jig for sandwiching both of them, but such a jig has a reservoir and an individual flow opening toward the outside of each substrate. Avoid direct contact with the road. That is, Patent Document 1 discloses that a part of a reservoir that is not in direct contact with a jig that sandwiches and joins a reservoir forming substrate and a flow path forming substrate and an individual flow path are joined directions of the flow path forming substrate and the reservoir forming substrate. It is the structure provided by overlapping. In such a configuration, when the reservoir forming substrate and the flow path forming substrate are sandwiched and joined by a jig, a part of the reservoir between the reservoir forming substrate and the flow path forming substrate and an area facing the individual flow path Is not pressed sufficiently, there is a possibility that poor bonding occurs in the region. Since the part of the reservoir between the reservoir forming substrate and the flow path forming substrate and the area facing the individual flow path are areas related to the flow path through which the ink flows, if the bonding failure occurs in the area, the ink There is a possibility that the discharge characteristics may be adversely affected, and naturally, the reliability of the product may be lowered.

  In addition, the ink jet recording head as described above is sealed with a compliance substrate having a thin film-like flexible portion capable of bending and deforming the opening of the reservoir in order to absorb pressure fluctuation in the flow path including the reservoir. Is known. However, in such a configuration, since the flexible portion is deformed very frequently, if the bonded state of the compliance substrate is not so good, the bonded state of the compliance substrate may be further deteriorated during use. there were. Such a deterioration of the joining state also leads to a decrease in the reliability of the product.

  Such a problem exists not only in an ink jet recording head that ejects ink but also in a liquid ejecting head that ejects liquid other than ink.

  SUMMARY An advantage of some aspects of the invention is that it provides a liquid ejecting head and a liquid ejecting apparatus capable of improving reliability.

An aspect of the present invention that solves the above problems includes a flow path forming substrate provided with an individual flow path including a pressure generation chamber that communicates with a nozzle opening that ejects liquid, and the individual flow paths that are stacked on the flow path forming substrate. A reservoir forming substrate provided with a reservoir portion communicating with the path, and the reservoir portion is formed on a surface opposite to the flow path forming substrate and a through portion that penetrates the reservoir forming substrate in a thickness direction. And a recessed portion provided opposite to the region where the individual flow path is provided, and a columnar pressing portion is erected along the thickness direction of the reservoir forming substrate on the bottom surface of the recessed portion. The liquid ejecting head is characterized by the above.
In such an aspect, the pressing portion sufficiently applies a pressing force to the area corresponding to the individual flow path between the reservoir forming substrate and the flow path forming substrate, so that the bonding failure in the area can be reliably ensured. Can be prevented. When the reservoir forming substrate and the flow path forming substrate are bonded together by pressing, the pressing portion comes into contact with a jig or the like that sandwiches and joins the reservoir forming substrate and the flow path forming substrate. This is because a pressing force can be directly applied to a region corresponding to the individual flow path between the substrate and the substrate. Further, the bonding of the region corresponding to the individual flow path between the reservoir forming substrate and the flow path forming substrate is satisfactorily performed, so that the bonding failure is eliminated and the reliability can be improved.

  Here, it is preferable that the pressing portion is provided at a position facing a joint portion of the reservoir forming substrate on the flow path forming substrate side. Accordingly, when the reservoir forming substrate and the flow path forming substrate are pressed and bonded to each other by the pressing portion, a sufficient pressing force is applied to the bonding portion on the flow path forming substrate side of the reservoir forming substrate. As a result, it is possible to more reliably prevent the bonding failure in the region corresponding to the individual flow path between the reservoir forming substrate and the flow path forming substrate.

  Moreover, it is preferable that the said press part is provided in the boundary part with the said penetration part of the said recessed part. According to this, sufficient pressing force is applied to the region corresponding to the edge of the recess by the pressing portion and the outer peripheral portion of the recess on the surface of the reservoir forming substrate opposite to the flow path forming substrate. As a result, it is possible to more reliably prevent the bonding failure in the region corresponding to the individual flow path between the reservoir forming substrate and the flow path forming substrate.

  Moreover, it is preferable that the said press part is integrally formed with the said reservoir | reserver formation board | substrate. According to this, it is not necessary to form a pressing part with a new member, and manufacturing cost can be reduced. Further, since it is formed integrally with the reservoir forming substrate, good strength is maintained, and the reliability of the product can be further improved.

  In addition, a compliance substrate having a flexible part that can be deformed to seal the opening of the reservoir is bonded to a surface of the reservoir forming substrate opposite to the flow path forming substrate, and the compliance substrate is It is preferable that a beam-shaped crosspiece extending from the outer frame portion of the compliance substrate to a position facing the pressing portion is provided. According to this, the joining strength of the compliance substrate can be improved by the crosspiece, and the reliability of the product can be further improved.

  Another aspect of the invention is a liquid ejecting apparatus including the liquid ejecting head according to the aspect. In such an aspect, a liquid ejecting apparatus with improved reliability can be realized.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is an exploded perspective view illustrating a schematic configuration of an ink jet recording head which is an example of a liquid ejecting head according to Embodiment 1 of the invention. 2 is a plan view of FIG. 1, and FIG. 3 is a cross-sectional view taken along line AA ′ of FIG.

  As shown in the drawing, an ink jet recording head I according to the present embodiment includes a flow path forming substrate 10 on which a flow path for ink is formed, and a nozzle plate 20 joined to the other surface side of the flow path forming substrate 10. And a reservoir forming substrate 30 bonded to one surface side of the flow path forming substrate 10.

  The flow path forming substrate 10 is made of a silicon single crystal substrate having a (110) crystal plane orientation, and an elastic film 50 made of an oxide film is formed on one surface thereof. The flow path forming substrate 10 is provided with pressure generation chambers 12 partitioned by a plurality of partition walls 11 in the width direction (short direction) by anisotropic etching from the other surface side.

  The flow path forming substrate 10 is provided with an ink supply path 13 and a communication path 14 which are partitioned by a partition wall 11 and communicate with each pressure generation chamber 12 on one end side in the longitudinal direction of the pressure generation chamber 12. A communication portion 15 that communicates with each communication path 14 is provided outside the communication path 14. The communication portion 15 communicates with a reservoir portion 32 of the reservoir forming substrate 30 described later, and constitutes a part of the reservoir 100 that becomes a common ink chamber (liquid chamber) of each pressure generating chamber 12.

  Here, the ink supply path 13 is formed to have a narrower cross-sectional area than the pressure generation chamber 12, and the flow path resistance of the ink flowing into the pressure generation chamber 12 from the communication portion 15 is kept constant. . For example, the ink supply path 13 is formed with a width smaller than the width of the pressure generation chamber 12 by narrowing the flow path on the pressure generation chamber 12 side between the reservoir 100 and each pressure generation chamber 12 in the width direction. . In this embodiment, the ink supply path is formed by narrowing the width of the flow path from one side. However, the ink supply path may be formed by narrowing the width of the flow path from both sides. Further, the ink supply path may be formed by narrowing from the thickness direction instead of narrowing the width of the flow path. Each communication passage 14 is formed by extending the partition walls 11 on both sides in the width direction of the pressure generating chamber 12 toward the communication portion 15 to partition the space between the ink supply path 13 and the communication portion 15. Yes.

  In this embodiment, a silicon single crystal substrate is used as a material for the flow path forming substrate 10, but of course, the material is not limited to this, and for example, glass ceramics, stainless steel, or the like may be used.

  Nozzle plate in which nozzle openings 21 communicating with the vicinity of the end of each pressure generating chamber 12 on the side opposite to the ink supply path 13 are formed on the opening surface side of the flow path forming substrate 10 provided as described above. 20 is fixed by an adhesive, a heat welding film or the like. The nozzle plate 20 is made of, for example, glass ceramics, a silicon single crystal substrate, stainless steel, or the like.

On the other hand, as described above, the elastic film 50 made of silicon dioxide is formed on the side opposite to the opening surface of the flow path forming substrate 10, and the elastic film 50 is made of zirconium oxide (ZrO ₂ ) or the like. An insulator film 55 is laminated.

  On the insulator film 55, for example, a lower electrode film 60 made of platinum (Pt), iridium (Ir) or the like, and a piezoelectric layer made of lead zirconate titanate (PZT) which is an example of a piezoelectric material. 70 and an upper electrode film 80 made of platinum (Pt), iridium (Ir), or the like, for example, are laminated to form a piezoelectric element 300. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric layer 70, and the upper electrode film 80.

  In general, one electrode of the piezoelectric element 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In the present embodiment, the lower electrode film 60 is continuously provided over a region facing the plurality of pressure generation chambers 12, so that the upper electrode film 80 and the piezoelectric layer 70 are formed as a common electrode for the plurality of piezoelectric elements 300. The upper electrode film 80 is used as an individual electrode of each piezoelectric element 300 by cutting each piezoelectric element 300.

  The piezoelectric element 300 and a vibration plate that is displaced by driving the piezoelectric element 300 are collectively referred to as an actuator. In the example described above, the elastic film 50, the insulator film 55, and the lower electrode film 60 function as a diaphragm.

  In addition, each upper electrode film 80 that is an individual electrode of the piezoelectric element 300 is connected to a lead electrode 90 made of, for example, gold (Au) or the like that extends to the insulator film 55. Although not shown, the lead electrode 90 is electrically connected to the drive circuit via a connection wiring made of a conductive wire such as a bonding wire.

  On the flow path forming substrate 10 on which the piezoelectric element 300 is formed, a piezoelectric element holding portion 31 that holds the piezoelectric element 300 and a part of the reservoir 100 that is a common ink chamber of each pressure generating chamber 12 are configured. A reservoir forming substrate 30 provided with a reservoir portion 32 is bonded through an adhesive 35.

  The piezoelectric element holding portion 31 is formed by removing a part of the reservoir forming substrate 30 facing the piezoelectric element 300 on the flow path forming substrate 10 side in the thickness direction, and does not hinder the movement of the piezoelectric element 300. The size of. In addition, the piezoelectric element holding part 31 may be sealed or may not be sealed. Further, the piezoelectric element holding portion 31 may be provided independently for each piezoelectric element 300 or may be provided continuously over a plurality of piezoelectric elements 300. In the present embodiment, the piezoelectric element holding portion 31 is continuously provided across the plurality of piezoelectric elements 300.

  In addition, the reservoir portion 32 includes a penetrating portion 33 that penetrates the reservoir forming substrate 30 in the thickness direction, and an individual flow path (the pressure generation chamber 12, the ink supply path 13) on the side opposite to the opening surface of the flow path forming substrate 10. , And a recess 34 provided opposite to the region provided with the communication path 14). Here, the “region where the individual flow path is provided” refers to a region including the individual flow path itself and the partition walls 11 that partition the individual flow path. Further, the recess 34 is opened on the opposite side of the flow path forming substrate 10 in the reservoir forming substrate 30. In this embodiment, the penetration part 33 and the recessed part 34 are continuing, and the reservoir | reserver part 32 is provided continuously along the transversal direction (width direction) of an individual flow path. The penetrating portion 33 is provided at a position facing the communication portion 15 described above, and a part of the elastic film 50 and the insulator film 55 between them is removed and communicated with the communication portion 15. The concave portion 34 is provided at a certain depth from the boundary portion with the penetrating portion 33 to the end portion on the pressure generating chamber 12 side. The reservoir portion 32 and the communication portion 15 constitute a reservoir 100.

  In the concave portion 34 of the reservoir portion 32 configured in this manner, a columnar pressing portion 36 erected along the thickness direction of the reservoir forming substrate 30 from the bottom surface of the concave portion 34 has a short direction ( A plurality of them are provided along the width direction. In this embodiment, the pressing portion 36 is a boundary portion between the concave portion 34 and the penetrating portion 33, and is provided at a position facing the partition wall 37 that separates the penetrating portion 33 of the reservoir 100 and the piezoelectric element holding portion 31. It has been. Here, as shown in the figure, the partition wall 37 is coated with an adhesive 35 on the surface on the flow path forming substrate 10 side, and an insulator which is a member disposed on the flow path forming substrate 10 side in the reservoir forming substrate 30. It is in direct contact with the membrane 55. In other words, the partition wall 37 is a joint portion of the reservoir forming substrate 30 on the flow path forming substrate 10 side. That is, the pressing portion 36 of the present embodiment is provided at a position that is a boundary portion between the concave portion 34 and the penetrating portion 33 and that faces the joint portion of the reservoir forming substrate 30 on the flow path forming substrate 10 side in the concave portion 34. ing. Further, in this embodiment, the pressing portion 36 is formed integrally with the reservoir forming substrate 30, and the size of the pressing portion 36 is when pressing the reservoir forming substrate 30 and the flow path forming substrate 10 together. It is provided with a strength that does not break and does not hinder the flow of ink in the reservoir 100. With this configuration, the periphery of the recess 34 is covered with the pressing portion 36 and the outer portion of the recess 34 on the surface of the reservoir forming substrate 30 opposite to the flow path forming substrate 10. .

  The pressing portion 36 configured as described above is used for a jig or the like that sandwiches the reservoir forming substrate 30 and the flow path forming substrate 10 when the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and joined to each other. Direct contact. Therefore, in the present embodiment, when the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and joined to each other, the individual flow between the reservoir forming substrate 30 and the flow path forming substrate 10 is caused by the pressing portion 36. A pressing force is directly applied to the region corresponding to the path (in this embodiment, the region corresponding to the individual flow path in the reservoir forming substrate 30, the insulator film 55, the elastic film 50, and the flow path forming substrate 10). be able to. Therefore, it is possible to reliably prevent a bonding failure in the region. In addition, since the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10 is well bonded as described above, it is possible to maintain good ink ejection characteristics, and poor bonding. By improving the reliability, the reliability can be improved.

  Further, the pressing portion 36 is provided at a position in the concave portion 34 that faces a joint portion of the reservoir forming substrate 30 on the flow path forming substrate 10 side (in this embodiment, a surface of the partition wall 37 on the flow path forming substrate 10 side). ing. In such a configuration, when the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and joined to each other, the flow path forming substrate 10 in the reservoir forming substrate 30 facing the recess 34 to which the adhesive 35 is applied. A pressing force is directly applied to the joint portion on the side. As a result, it is possible to more reliably prevent the bonding failure in the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10. Further, the pressing portion 36 is specifically provided at a position facing the partition wall 37. Therefore, in this embodiment, when the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and joined together, the partition wall 37 can be firmly joined, and the ink stored in the reservoir 100 holds the piezoelectric element. Inflow into the portion 31 can also be reliably prevented.

  The pressing portion 36 is provided at a boundary portion between the recessed portion 34 and the penetrating portion 33. In such a configuration, when the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and joined to each other, the pressing portion 36 and the concave portion on the surface of the reservoir forming substrate 30 opposite to the flow path forming substrate 10 are provided. The area corresponding to the edge of the recess 34 is directly pressed by the outer peripheral portion 34. That is, the recess 34 has a peripheral portion thereof in a plan view, a pressing portion 36 that protrudes from the recess 34 and a surface of the reservoir forming substrate 30 adjacent to the recess 34 opposite to the flow path forming substrate 10. When the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and bonded to each other, a pressing force is directly applied to the region corresponding to the edge of the recess 34. As a result, it is possible to more reliably prevent the bonding failure in the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10.

  Here, the reservoir 100 is not limited to the above-described configuration. For example, the communication portion 15 of the flow path forming substrate 10 may be divided into a plurality for each pressure generation chamber 12 and only the reservoir portion 32 may be used as the reservoir. Further, only the pressure generation chamber 12 is provided in the flow path forming substrate 10, and the reservoir 100 and the member (for example, the elastic film 50, the insulator film 55, etc.) interposed between the flow path forming substrate 10 and the reservoir forming substrate 30 are provided. An ink supply path 13 that communicates with each pressure generation chamber 12 may be provided.

  As such a reservoir forming substrate 30, it is preferable to use a material substantially the same as the coefficient of thermal expansion of the flow path forming substrate 10, for example, glass, a ceramic material, or the like. In this embodiment, the silicon single crystal substrate made of the same material as the flow path forming substrate 10 is used.

  A compliance substrate 40 composed of a sealing film 41 and a fixing plate 42 is bonded to the surface of the reservoir forming substrate 30 opposite to the flow path forming substrate 10. Here, the sealing film 41 is made of a material having low rigidity and flexibility (for example, a polyphenylene sulfide (PPS) film having a thickness of 6 μm). The sealing film 41 seals one surface of the reservoir portion 32. It has been stopped.

  The fixing plate 42 is formed of a hard material such as metal (for example, stainless steel (SUS) having a thickness of 30 μm). Since the region of the fixing plate 42 facing the reservoir 100 is an opening 43 that is completely removed in the thickness direction, one surface of the reservoir 100 is sealed only with a flexible sealing film 41. Has been. That is, the portion of the sealing film 41 facing the opening 43 is a flexible portion that is bent and deformed by pressure fluctuations in the flow path including the reservoir 100 and absorbs pressure fluctuations in the reservoir 100. The flexible portion has a size that can sufficiently absorb the pressure fluctuation in the reservoir 100.

  In the ink jet recording head I of this embodiment, the ink is taken in from the ink introduction port 44 connected to the external ink supply means (not shown), and the interior is filled with the ink from the reservoir 100 to the nozzle opening 21, and then driven. In accordance with a recording signal from the circuit, a voltage is applied between each of the lower electrode film 60 and the upper electrode film 80 corresponding to the pressure generating chamber 12, and the elastic film 50, the insulator film 55, the lower electrode film 60, and the piezoelectric body. By bending and deforming the layer 70, the pressure in each pressure generation chamber 12 is increased, and ink droplets are ejected from the nozzle openings 21.

  As described above, in the ink jet recording head I of the present embodiment, the pressing portion 36 sufficiently applies a pressing force to the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10. As a result, it is possible to reliably prevent a bonding failure in the region. The region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10 is well bonded, so that good ink ejection characteristics can be maintained and bonding defects are eliminated. Thus, the reliability can be improved. Further, since the reservoir 32 and the individual flow path are provided so as to overlap each other in the stacking direction of the reservoir forming substrate 30 and the flow path forming substrate 10, it is possible to realize miniaturization. That is, according to the present embodiment, it is possible to realize an ink jet recording head that is miniaturized, has good liquid ejection characteristics, and has improved reliability.

  In the present embodiment, the pressing portion 36 is provided in the concave portion 34 at a position facing the bonding portion of the reservoir forming substrate 30 on the flow path forming substrate 10 side. As a result, when the reservoir forming substrate 30 and the flow path forming substrate 10 are pressed and bonded to each other, the flow path forming substrate 10 in the reservoir forming substrate 30 is joined to the reservoir forming substrate 30 on the flow path forming substrate 10 side. Since a sufficient pressing force is applied to the portion that directly contacts the member disposed on the side, the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10 is joined. Defects can be prevented more reliably. Further, specifically, the pressing portion 36 is provided at a position facing the partition wall 37 that separates the penetrating portion 33 of the reservoir 100 and the piezoelectric element holding portion 31 in the concave portion 34. When the path forming substrate 10 is pressed and bonded to each other, the partition wall 37 is firmly bonded to reliably prevent the ink stored in the reservoir 100 from flowing into the piezoelectric element holding portion 31. Can do.

  In the present embodiment, the pressing portion 36 is provided at a boundary portion between the recessed portion 34 and the penetrating portion 33. Thus, the region corresponding to the edge of the recess 34 is sufficiently pressed by the pressing portion 36 and the outer peripheral portion of the recess 34 on the surface of the reservoir forming substrate 30 opposite to the flow path forming substrate 10. As a result, it is possible to more reliably prevent the bonding failure in the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10.

  In the present embodiment, the pressing portion 36 is formed integrally with the reservoir forming substrate 30. According to this, it is not necessary to manufacture the press part 36 with a new member, and manufacturing cost can be reduced. Further, since it is formed integrally with the reservoir forming substrate 30, good strength is maintained, and the reliability of the product can be further improved.

(Embodiment 2)
4 is a plan view of an ink jet recording head according to Embodiment 2 of the present invention, and FIG. 5 is a cross-sectional view taken along the line BB ′ of FIG. In addition, the same code | symbol is attached | subjected to the member same as Embodiment 1, and the overlapping description is abbreviate | omitted.

  As shown in the drawing, in the ink jet recording head II of the present embodiment, a beam-shaped crosspiece 45 is integrally provided on the compliance substrate 40A, specifically, on a fixing plate 42A constituting a part of the compliance substrate 40A. ing. That is, the crosspiece 45 constitutes a part of the fixed plate 42A.

  The crosspiece 45 has a beam shape that extends along the longitudinal direction of the individual flow path from the outer frame portion of the fixing plate 42A to a position facing the pressing portion 36 on the fixing plate 42A that constitutes a part of the compliance substrate 40A. And a plurality of the flow paths are provided along the parallel direction of the individual flow paths. Further, the crosspiece 45 is joined to the pressing portion 36 via the sealing film 41. In the present embodiment, in the portion facing the opening 43 of the sealing film 41, the portion other than the portion facing the crosspiece 45 is a flexible portion.

  In the ink jet recording head II of this embodiment configured as described above, the sealing film 41 is sandwiched between the pressing portion 36 and the crosspiece 45, so that the bonding strength of the sealing film 41 is improved, and the crosspiece 45 is further pressed. Since it is joined to the portion 36, the joining strength of the fixing plate 42A is also improved. According to the present embodiment configured as described above, the bonding strength of the compliance substrate 40A to the reservoir forming substrate 30 can be significantly improved, and the reliability of the product can be further improved.

(Other embodiments)
As mentioned above, although embodiment of this invention was described, the structure of this invention is not limited to what was mentioned above.

  For example, in the above-described embodiment, the pressing portion 36 is provided at a position facing the bonding portion of the reservoir forming substrate 30 with the flow path forming substrate 10 in the concave portion 34 and at a boundary portion with the penetrating portion 33 in the concave portion 34. However, the position of the pressing portion 36 is not limited to this, and may be formed in the concave portion 34. When the reservoir forming substrate 30 and the flow path forming substrate 10 are joined, the region corresponding to the individual flow path between the reservoir forming substrate 30 and the flow path forming substrate 10 can be firmly pressed and joined. Because.

  In the above-described embodiment, the pressing portion 36 is formed integrally with the reservoir forming substrate 30, but the pressing portion 36 may be formed of a member separate from the reservoir forming substrate 30. For example, a columnar member may be joined to the reservoir forming substrate 30 to form the pressing portion 36.

  In the above-described embodiment, the concave portion 34 is provided at a certain depth. However, for example, the concave portion 34 may have a shape that gradually becomes shallower as the distance from the boundary portion with the penetrating portion 33 increases. In any case, the shape of the recess 34 is not particularly limited.

  Alternatively, the individual flow paths may be formed after laminating the flow path forming substrate 10 before forming the individual flow paths and the reservoir forming substrate 30 in which the reservoir portion 32 is formed. Even in this case, by providing the pressing portion 36, it is possible to reliably prevent the occurrence of poor bonding by firmly pressing the bonding surfaces of both substrates.

  In the above-described embodiment, the ink jet recording head including the thin film type piezoelectric element 300 is exemplified as the pressure generating unit that applies the pressure to the pressure generating chamber 12, but the pressure generating unit is not limited thereto. is not. For example, a thick film type piezoelectric element formed by a method such as attaching a green sheet, or a longitudinal vibration type piezoelectric element in which piezoelectric materials and electrode forming materials are alternately stacked to expand and contract in the axial direction. Also good. In addition, the pressure generator means a diaphragm and an electrode arranged with a predetermined gap, and a so-called electrostatic actuator that controls the vibration of the diaphragm with electrostatic force, or a heating element in the pressure generation chamber to generate heat. It may be of a type in which droplets are ejected from the nozzle openings 21 by bubbles generated by the heat generated by the element.

  The ink jet recording head described above constitutes a part of a recording head unit including an ink flow path communicating with an ink cartridge or the like, and is mounted on the ink jet recording apparatus. FIG. 6 is a schematic view showing an example of the ink jet recording apparatus.

  As shown in FIG. 6, in the recording head units 1A and 1B having the ink jet recording head, cartridges 2A and 2B constituting ink supply means are detachably provided, and a carriage 3 on which the recording head units 1A and 1B are mounted. Is provided on a carriage shaft 5 attached to the apparatus body 4 so as to be movable in the axial direction. For example, the recording head units 1A and 1B are configured to eject a black ink composition and a color ink composition, respectively. Then, the driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted is moved along the carriage shaft 5. The On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage 3. The platen 8 can be rotated by a driving force of a paper feed motor (not shown), and a recording sheet S that is a recording medium such as paper fed by a paper feed roller is wound around the platen 8 and conveyed. It has become so.

  In the above-described embodiments, the ink jet recording head has been described as an example of the liquid ejecting head. However, the present invention is widely applied to all liquid ejecting heads, and ejects liquid other than ink. Of course, it can also be applied to the head. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

1 is an exploded perspective view of an ink jet recording head according to Embodiment 1 of the present invention. FIG. 2 is a plan view of the ink jet recording head according to the first embodiment of the invention. 1 is a cross-sectional view of an ink jet recording head according to Embodiment 1 of the present invention. FIG. 6 is a plan view of an ink jet recording head according to a second embodiment of the invention. Sectional drawing of the inkjet recording head which concerns on Embodiment 2 of this invention. 1 is a schematic diagram of an ink jet recording apparatus according to an embodiment of the present invention.

Explanation of symbols

I, II Inkjet recording head, 10 flow path forming substrate, 11 partition wall, 12 pressure generating chamber, 13 ink supply path, 14 communicating path, 15 communicating portion, 20 nozzle plate, 21 nozzle opening, 30 reservoir forming substrate, 31 piezoelectric Element holding part, 32 reservoir part, 33 penetrating part, 34 recessed part, 35 adhesive, 36 pressing part, 37 partition, 40, 40A compliance substrate, 41 sealing film, 42, 42A fixing plate, 43 opening part, 44 ink introduction Mouth, 45 Cross, 50 Elastic film, 55 Insulator film, 60 Lower electrode film, 70 Piezoelectric layer, 80 Upper electrode film, 90 Lead electrode, 100 Reservoir, 300 Piezoelectric element

Claims (6)

A flow path forming substrate provided with an individual flow path including a pressure generation chamber communicating with a nozzle opening for ejecting liquid, and a reservoir provided with a reservoir portion stacked on the flow path forming substrate and communicating with the individual flow path A forming substrate,
The reservoir portion is provided opposite to a through portion that penetrates the reservoir forming substrate in a thickness direction and a region that is open on a surface opposite to the flow channel forming substrate and the individual flow channel is provided. With a recess,
A liquid ejecting head, wherein a columnar pressing portion is erected on a bottom surface of the concave portion along a thickness direction of the reservoir forming substrate. The liquid ejecting head according to claim 1,
The liquid ejecting head according to claim 1, wherein the pressing portion is provided at a position facing a joint portion of the reservoir forming substrate on the flow path forming substrate side. The liquid ejecting head according to claim 1 or 2,
The liquid ejecting head, wherein the pressing portion is provided at a boundary portion between the concave portion and the penetrating portion. The liquid jet head according to any one of claims 1 to 3,
The liquid ejecting head, wherein the pressing portion is formed integrally with the reservoir forming substrate. In the liquid jet head according to any one of claims 1 to 4,
A compliance substrate having a flexible part capable of bending deformation that seals the opening of the reservoir is bonded to a surface of the reservoir forming substrate opposite to the flow path forming substrate.
The liquid jet head according to claim 1, wherein the compliance substrate includes a beam-shaped beam extending from an outer frame portion of the compliance substrate to a position facing the pressing portion.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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