JP2010064775A - Pellicle packing structure - Google Patents
Pellicle packing structure Download PDFInfo
- Publication number
- JP2010064775A JP2010064775A JP2008234045A JP2008234045A JP2010064775A JP 2010064775 A JP2010064775 A JP 2010064775A JP 2008234045 A JP2008234045 A JP 2008234045A JP 2008234045 A JP2008234045 A JP 2008234045A JP 2010064775 A JP2010064775 A JP 2010064775A
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- storage container
- packing
- height
- packing structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012856 packing Methods 0.000 title claims abstract description 78
- 238000003860 storage Methods 0.000 claims description 89
- 238000004806 packaging method and process Methods 0.000 claims description 52
- 229920006254 polymer film Polymers 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 4
- 239000000428 dust Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 26
- 210000000078 claw Anatomy 0.000 description 14
- 239000000853 adhesive Substances 0.000 description 13
- 230000001070 adhesive effect Effects 0.000 description 13
- -1 styrene ethylene butylene styrene Chemical class 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000000123 paper Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000006260 foam Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229910000737 Duralumin Inorganic materials 0.000 description 2
- 239000004831 Hot glue Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007765 extrusion coating Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 1
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- NRJXUPLBIUZXLW-UHFFFAOYSA-N ethene;prop-1-ene;styrene Chemical compound C=C.CC=C.C=CC1=CC=CC=C1.C=CC1=CC=CC=C1 NRJXUPLBIUZXLW-UHFFFAOYSA-N 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920013716 polyethylene resin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Abstract
Description
本発明は、ペリクルを収納したペリクル収納容器を梱包箱に収納したペリクル梱包構造体に関するものであり、特に1辺の長さが１ｍを越える大型ペリクルのペリクル梱包構造体に関する。 The present invention relates to a pellicle packing structure in which a pellicle storage container storing a pellicle is stored in a packing box, and more particularly to a pellicle packing structure for a large pellicle having a length of one side exceeding 1 m.
本発明はペリクル梱包構造体に関する技術であるが、先ず、収納すべきペリクルについて説明する。
従来、シリコンウエハへの半導体回路パターン形成、及び液晶パネル等の製造に於いては、一般にペリクルと呼ばれる防塵手段を用いて、フォトマスクやレティクル（以下「マスク等」という。）への異物の付着を防止することが行われている。
ペリクルはマスク等の形状に合わせた形状を有する厚さ数ミリ程度の枠体の上縁面に、厚さ１０μｍ以下の透明な高分子膜（以下、「ペリクル膜」という）を展張して接着し、かつ該枠体の下縁面に粘着材を塗着したものである。通常ペリクルは、マスク等に装着される前は、該ペリクルの粘着材からなる粘着材層上に所定の接着力で保護フィルムを粘着させた形態で扱われるが、以下では保護フィルムの有無を区別せずに両方ともペリクルと呼ぶ。前記粘着材は、ペリクルをマスク等に固着するためのものであり、また、保護フィルムは該粘着材がその用に供するまで該粘着材の接着力を維持するために、粘着材層の表面を保護するものである。
The present invention relates to a pellicle packaging structure. First, a pellicle to be stored will be described.
Conventionally, in the formation of a semiconductor circuit pattern on a silicon wafer and the manufacture of a liquid crystal panel or the like, foreign matter adheres to a photomask or a reticle (hereinafter referred to as “mask or the like”) using a dustproof means generally called a pellicle. It has been done to prevent.
The pellicle has a shape that matches the shape of the mask, etc., and is bonded by spreading a transparent polymer film (hereinafter referred to as “pellicle film”) having a thickness of 10 μm or less on the upper edge surface of a frame of about several millimeters in thickness. In addition, an adhesive material is applied to the lower edge surface of the frame. Normally, before the pellicle is mounted on a mask or the like, it is handled in a form in which a protective film is adhered to the adhesive layer made of the adhesive material of the pellicle with a predetermined adhesive force. Both are called pellicles. The pressure-sensitive adhesive material is for fixing the pellicle to a mask or the like, and the protective film is used to maintain the adhesive force of the pressure-sensitive adhesive material until the pressure-sensitive adhesive material is used for that purpose. It is something to protect.
一般的には、ペリクルを製造するメーカーと最終的にペリクルをマスク等に貼付するマスク等のメーカー（以下「マスク製造者」ともいう。）とが地理的に離れている場合が多く、ペリクルメーカーからマスク製造者への運搬作業が必須となっている。その為、ペリクルの運搬作業では、ペリクル膜等に異物が付着するのを防ぎ、或いは該ペリクルが損傷するのを防ぐために、該ペリクルをトレイと蓋とからなる収納容器に収納し、梱包箱に収納して運搬するのが一般的である（例えば、特許文献１参照）。そして、開梱時には、人が慎重に梱包箱から収納容器を取り出していた。
ところが、最近液晶パネル製造用に使用するペリクルにおいては、市場のニーズからペリクル自体が大型化されてきており、一辺が１ｍを越えたペリクルもでてきている。このため、ペリクルを収納した収納容器自体のハンドリングに対して、これまでの人力によるところから、機械により取り出そうという要求がでてきた。具体的な例をあげれば、フォークリフトを用いて梱包箱からペリクル収納容器を取り出すことが検討されてきている。
しかしながら、従来の収納容器の底面は平坦であり、梱包箱に収納された状態ではフォークリフトの爪を入れ込むスペースが確保できない。また、梱包箱底面の内側面の４隅に収納容器を衝撃から守るための緩衝材を配置して、梱包箱が衝撃を受けた場合であっても収容容器がその衝撃を直接受けないようにした場合であっても、緩衝材による隙間ではフォークリフトの爪を入れ込むスペースが十分確保できない場合もある。さらには、収納容器を防塵用の袋で覆って密閉している場合には、スペースがあったとしても該袋がたるむことによって、フォークリフトの爪を入れるスペースが益々確保しづらくなっている。
本発明は、ペリクル用の収納容器を発塵の心配なく、且つ、機械により、容易に梱包箱に収納、または取り出しを行うためのペリクル梱包構造体を提供することを目的とする。
However, recently, in the pellicle used for manufacturing the liquid crystal panel, the pellicle itself has been increased in size due to market needs, and a pellicle having a side exceeding 1 m has also appeared. For this reason, the handling of the storage container itself that stores the pellicle has been requested to be taken out by a machine because of the human power. As a specific example, it has been studied to take out a pellicle storage container from a packing box using a forklift.
However, the bottom surface of the conventional storage container is flat, and a space for inserting the forklift claw cannot be secured when the storage container is stored in the packing box. In addition, cushioning materials for protecting the storage container from impacts are arranged at the four corners of the inner surface of the bottom of the packaging box so that even if the packaging box is impacted, the storage container does not receive the impact directly. Even in such a case, there may be a case where a sufficient space for inserting the pawl of the forklift cannot be secured by the gap formed by the cushioning material. Furthermore, when the storage container is covered and sealed with a dust-proof bag, even if there is a space, the bag is loosened, so that it is more difficult to secure a space for inserting a forklift claw.
SUMMARY OF THE INVENTION An object of the present invention is to provide a pellicle packaging structure for easily storing or taking out a pellicle storage container from a packing box without worrying about dust generation.
本発明者らは、上記課題を解決するために検討した結果、収納容器底面の外側面に脚部を設けるとともに、梱包箱底面の内側面に凸部を設けることで機械的取り出しに必要なスペースを確保するとともに、防塵用の袋で該収納容器を覆っている場合においても、たるんだ該袋が上記スペースに入ることを防ぐことができることを見出し本発明をなすに至った。
すなわち、本発明は、以下のペリクル梱包構造体、およびその製造方法である。
As a result of investigations to solve the above problems, the present inventors have provided a leg portion on the outer side surface of the bottom surface of the storage container, and provided a convex portion on the inner side surface of the bottom surface of the packaging box, thereby providing a space necessary for mechanical removal. In addition, the present inventors have found that the bag can be prevented from entering the space even when the storage container is covered with a dust-proof bag.
That is, the present invention is the following pellicle packaging structure and manufacturing method thereof.
１．ペリクル、該ペリクルを内部に収納した略直方体の形状を有する収納容器、及び該収納容器を内部に収納した略直方体の形状を有する梱包箱からなるペリクル梱包構造体であって、収納容器が収納容器底面の外側面において間隔をあけて配置された複数の脚部を有し、梱包箱が該収納容器底面の下に位置する梱包箱底面の内側面において単数または間隔をあけて配置された複数の凸部を有し、該凸部と該脚部とが互いに接触しない配置であって、該凸部の高さが該脚部の高さより小さいペリクル梱包構造体。
２．ペリクル、該ペリクルを内部に収納した略直方体の形状を有する収納容器、及び該収納容器を内部に収納した略直方体の形状を有する梱包箱からなるペリクル梱包構造体であって、収納容器が収納容器底面の外側面において間隔をあけて配置された複数の脚部を有し、梱包箱が該収納容器底面の下に位置する梱包箱底面の内側面において単数または間隔をあけて配置された複数の凸部を有するとともに該収納容器の各脚部の下に位置する梱包箱底面の内側面において緩衝部を有し、該凸部と該脚部とが互いに接触しない配置であって、該凸部の高さが該脚部の高さと該緩衝部の高さとの和より小さいペリクル梱包構造体。
1. A pellicle packing structure comprising a pellicle, a storage container having a substantially rectangular parallelepiped shape storing the pellicle therein, and a packing box having a substantially rectangular parallelepiped shape storing the storage container therein, the storage container being a storage container A plurality of leg portions arranged at intervals on the outer side surface of the bottom surface, and a plurality of the packaging boxes arranged at a distance or on the inner side surface of the bottom surface of the packaging box located below the bottom surface of the storage container A pellicle packing structure having a convex portion, wherein the convex portion and the leg portion are not in contact with each other, and the height of the convex portion is smaller than the height of the leg portion.
2. A pellicle packing structure comprising a pellicle, a storage container having a substantially rectangular parallelepiped shape storing the pellicle therein, and a packing box having a substantially rectangular parallelepiped shape storing the storage container therein, the storage container being a storage container A plurality of leg portions arranged at intervals on the outer side surface of the bottom surface, and a plurality of the packaging boxes arranged at a distance or on the inner side surface of the bottom surface of the packaging box located below the bottom surface of the storage container The convex portion has a buffer portion on the inner surface of the bottom surface of the packaging box located under each leg portion of the storage container, and the convex portion and the leg portion are not in contact with each other, and the convex portion The pellicle packing structure is smaller than the sum of the height of the leg portion and the height of the buffer portion.
３．脚部が、収納容器底面の４隅上、または対向する２辺上に配置されている上記１または２のいずれかに記載のペリクル梱包構造体。
４．凸部が、収納容器の対向する２辺と略平行に配置された3組の直方体の形状を有する上記１〜３のいずれかに記載のペリクル梱包構造体。
５．収納容器が、高分子フィルム製の袋で密閉されるように覆われている状態で梱包箱に収納されている上記１〜４のいずれかに記載のペリクル梱包構造体。
６．ペリクルを底面の外側面に脚部を有するトレイと蓋からなる収納容器に収納する工程、該収納容器を高分子フィルム製の袋に入れて密閉する工程、袋に入れた該収納容器を底面の内側面に凸部を有する梱包箱に収納する工程からなる上記５に記載のペリクル梱包構造体の製造方法。
3. 3. The pellicle packing structure according to any one of the above 1 or 2, wherein the leg portions are arranged on the four corners of the bottom surface of the storage container or on two opposite sides.
4). 4. The pellicle packaging structure according to any one of the above items 1 to 3, wherein the convex portion has three sets of rectangular parallelepiped shapes arranged substantially parallel to two opposing sides of the storage container.
5). 5. The pellicle packing structure according to any one of the above 1 to 4, wherein the storage container is stored in a packing box in a state of being covered so as to be sealed with a polymer film bag.
6). A step of storing the pellicle in a storage container including a tray having a leg on the outer surface of the bottom surface and a lid; a step of sealing the storage container in a bag made of a polymer film; and 6. The method for producing a pellicle packing structure according to 5 above, comprising a step of storing in a packing box having a convex portion on the inner surface.
本発明のペリクル梱包構造体は、ペリクル用の収納容器を発塵の心配なく、且つ、機械により、容易に梱包箱に収納、または取り出しを行うことを可能とする。 The pellicle packaging structure according to the present invention enables a pellicle storage container to be easily stored in or taken out of a packaging box by a machine without worrying about dust generation.
まず、添付の図面を参照して、本発明のペリクル梱包構造体の具体的な実施態様を説明する。
図１は、従来のペリクル梱包構造体の縦断面説明図であり、ペリクルがトレイと蓋からなる収納容器に収納され、該収納容器が高分子フィルム製の防塵袋で密閉された状態で、梱包箱に収納された状態が表されている。
該梱包構造体の開梱にあたっては、まず梱包箱上面をはずし、緩衝材（図示せず）を除去した後、梱包箱側面をはずす。しかしながら、図１のペリクル梱包構造体では、収納容器底面と梱包箱底面の間のスペースがないために、フォークリフトの爪部を入れることは困難である。
図１のペリクル梱包構造体において、梱包箱底面の内側面の４隅に緩衝材を入れることによって収納容器底面と梱包箱底面の間にスペースを設けることも考えられる。しかしながら、フォークリフトの爪部を入れるのに十分なスペースを設けたとしても、該スペースに防塵袋がたれ下がるためフォークリフトの爪を入れることは困難である。
First, a specific embodiment of the pellicle packaging structure of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a longitudinal cross-sectional explanatory view of a conventional pellicle packing structure, in which the pellicle is stored in a storage container composed of a tray and a lid, and the storage container is sealed with a polymer film dustproof bag. The state stored in the box is shown.
In unpacking the packaging structure, first, the top surface of the packaging box is removed, the cushioning material (not shown) is removed, and then the side surface of the packaging box is removed. However, in the pellicle packing structure shown in FIG. 1, there is no space between the bottom surface of the storage container and the bottom surface of the packing box, so that it is difficult to insert the claw portion of the forklift.
In the pellicle packing structure of FIG. 1, it is also conceivable to provide a space between the bottom surface of the storage container and the bottom surface of the packing box by putting cushioning materials in the four corners of the inner side surface of the bottom surface of the packing box. However, even if a sufficient space is provided for inserting the claw portion of the forklift, it is difficult to insert the claw of the forklift because the dustproof bag hangs down in the space.
図２は、本発明の第一の態様のペリクル梱包構造体の縦断面説明図であり、ペリクルがトレイと蓋からなる収納容器に収納され、該収納容器が高分子フィルム製の防塵袋で密閉された状態で、梱包箱に収納された状態が表されている。
ここで、上記収納容器は、収納容器底面の外側面に間隔をあけて配置された複数の脚部を有する。該脚部は、バランス上の理由で収納容器の４辺上に配置されていることが好ましく、フオークリフトの爪部を入れる部分を確保するために収納容器底面の４隅、または対向する２辺上に配置されていることがより好ましい。脚部の高さは、１０〜３０ｃｍが好ましい。高さが１０ｃｍ以上であればフォークリフトの爪部を入れる部分を確保しやすく、３０ｃｍ以内であれば無駄な空間の増加を防ぐことができる。
FIG. 2 is a longitudinal sectional view of the pellicle packaging structure according to the first aspect of the present invention, in which the pellicle is stored in a storage container including a tray and a lid, and the storage container is hermetically sealed with a polymer film dustproof bag. In this state, the state stored in the packing box is shown.
Here, the storage container has a plurality of legs arranged at intervals on the outer surface of the bottom surface of the storage container. The leg portions are preferably arranged on the four sides of the storage container for balance reasons, and the four corners of the bottom surface of the storage container or two opposite sides to secure a portion for inserting the claw portion of the forklift. More preferably, it is arranged above. The height of the leg is preferably 10 to 30 cm. If the height is 10 cm or more, it is easy to secure a portion for inserting the claw portion of the forklift, and if it is within 30 cm, an increase in useless space can be prevented.
上記梱包箱は、該収納容器底面の下に位置する梱包箱底面の内側面において単数または間隔をあけて配置された複数の凸部を有する。該凸部は、梱包箱底面の内側面に直接設けてもよく、該凸部を設けた段ボール紙等の板状部材を梱包箱底面の内側面に接するように配置することで設けてもよい。梱包箱の製造のしやすさからは、後者の方法がより好ましい。梱包箱の凸部は、収納容器の脚部と互いに接触しない配置であることが好ましい。該凸部の高さが該脚部の高さより小さいものであり、１〜１０ｃｍ小さいことが好ましい。該凸部の高さは５〜２９ｃｍが好ましい。該脚部の高さと該凸部の高さの差が１０ｃｍ以下であれば防塵袋の垂れ下がり防止に効果があり、１ｃｍ以上であれば衝撃を受けた時にペリクル膜が収納容器に接触する可能性を少なくすることができる。
該梱包構造体の開梱にあたっては、まず梱包箱上面をはずし、緩衝材（図示せず）を除去した後、梱包箱側面をはずす。図２のペリクル梱包構造体では、収納容器底面と梱包箱底面の間に凸部により区切られた脚部によるスペースがあるために、該スペースに防塵袋がたれ下がることなくフォークリフトの爪を入れることが可能である。
The packaging box has a plurality of convex portions arranged at a single interval or on the inner surface of the bottom surface of the packaging box located below the bottom surface of the storage container. The convex portion may be provided directly on the inner surface of the bottom surface of the packaging box, or may be provided by arranging a plate-like member such as corrugated paper provided with the convex portion so as to contact the inner surface of the bottom surface of the packaging box. . The latter method is more preferable in terms of ease of manufacturing the packaging box. It is preferable that the convex portions of the packaging box are arranged so as not to contact each other with the leg portions of the storage container. The height of the convex portion is smaller than the height of the leg portion, and is preferably 1 to 10 cm smaller. The height of the convex portion is preferably 5 to 29 cm. If the difference between the height of the leg portion and the height of the convex portion is 10 cm or less, it is effective for preventing the dust bag from drooping. If it is 1 cm or more, the pellicle membrane may come into contact with the storage container when subjected to an impact. Can be reduced.
In unpacking the packaging structure, first, the top surface of the packaging box is removed, the cushioning material (not shown) is removed, and then the side surface of the packaging box is removed. In the pellicle packing structure of FIG. 2, since there is a space by the leg section separated by the convex portion between the bottom surface of the storage container and the bottom surface of the packaging box, the nail of the forklift can be put in the space without the dustproof bag hanging down. Is possible.
図３は、本発明の第二の態様のペリクル梱包構造体の縦断面説明図であり、ペリクルがトレイと蓋からなる収納容器に収納され、該収納容器が高分子フィルム製の防塵袋で密閉された状態で、梱包箱に収納された状態が表されている。
該収納容器については、脚部の高さを後述する緩衝部の高さとの合計で、２０〜６０ｃｍとすることが好ましいことを除いて、本発明の第一の態様のペリクル梱包構造体と同じであるので説明を省略する。なお、脚部と緩衝部の高さの合計は、静置状態のペリクルを含む収納容器の荷重により緩衝部が変形した状態で測定するものとする。
FIG. 3 is a longitudinal sectional view of the pellicle packing structure according to the second aspect of the present invention, in which the pellicle is stored in a storage container including a tray and a lid, and the storage container is sealed with a dust-proof bag made of a polymer film. In this state, the state stored in the packing box is shown.
The storage container is the same as the pellicle packing structure according to the first aspect of the present invention except that the height of the leg portion is preferably 20 to 60 cm in total with the height of the buffer portion described later. Therefore, explanation is omitted. In addition, the sum total of the height of a leg part and a buffer part shall be measured in the state which the buffer part deform | transformed with the load of the storage container containing the pellicle in a stationary state.
上記梱包箱は、該収納容器底面の下に位置する梱包箱底面の内側面において単数または間隔をあけて配置された複数の凸部を有するとともに、該収納容器の各脚部の下に位置する梱包箱底面の内側面において緩衝部を有する。該凸部については、本発明の第一の態様のペリクル梱包構造体と同じであるので説明を省略する。該緩衝部は、梱包箱底面の内側面において、収納容器の脚部が接する箇所に配置されていることが好ましく、運搬時に脚部を通して収納容器にかかる衝撃を吸収するものである。緩衝部の高さは脚部の高さとの合計で、２０〜６０ｃｍが好ましい。合計が２０ｃｍ以上であればフォークリフトの爪部を入れる部分を確保しやすく、６０ｃｍ以内であれば無駄な空間の増加を防ぐことができる。該緩衝部は、梱包箱底面の内側面に直接設けてもよく、前記凸部を設けた段ボール紙等の板状部材に設けて梱包箱底面の内側面に接するように配置してもよい。梱包箱の凸部は、収納容器の脚部と互いに接触しない配置であることが好ましい。該凸部の高さが該脚部の高さと緩衝部の高さの和より小さいものであり、１〜１０ｃｍ小さいことが好ましい。該凸部の高さは１０〜５９ｃｍが好ましい。該脚部の高さと緩衝部の高さの和から該凸部の高さを引いた値が１０ｃｍ以下であれば防塵袋の垂れ下がり防止に効果があり、１ｃｍ以上であれば衝撃を受けた時にペリクル膜が収納容器に接触する可能性を少なくすることができる。 The packaging box has a plurality of convex portions arranged at intervals or at intervals on the inner surface of the bottom surface of the packaging box located below the bottom surface of the storage container, and is positioned below each leg portion of the storage container. A buffer portion is provided on the inner surface of the bottom of the packaging box. About this convex part, since it is the same as the pellicle packing structure of the 1st aspect of this invention, description is abbreviate | omitted. The buffer portion is preferably disposed on the inner surface of the bottom surface of the packaging box at a location where the leg portion of the storage container contacts, and absorbs an impact applied to the storage container through the leg portion during transportation. The height of the buffer portion is preferably 20 to 60 cm in total with the height of the leg portion. If the total is 20 cm or more, it is easy to secure a portion for inserting the claw portion of the forklift. The buffer portion may be provided directly on the inner surface of the bottom surface of the packaging box, or may be disposed on a plate-like member such as corrugated paper provided with the convex portions so as to be in contact with the inner surface of the bottom surface of the packaging box. It is preferable that the convex portions of the packaging box are arranged so as not to contact each other with the leg portions of the storage container. The height of the convex portion is smaller than the sum of the height of the leg portion and the height of the buffer portion, and is preferably 1 to 10 cm smaller. The height of the convex portion is preferably 10 to 59 cm. When the value obtained by subtracting the height of the convex portion from the sum of the height of the leg portion and the height of the buffer portion is 10 cm or less, it is effective in preventing the dustproof bag from drooping. The possibility that the pellicle film contacts the storage container can be reduced.
図４は、本発明の第三の態様のペリクル梱包構造体の縦断面説明図であり、ペリクルがトレイと蓋からなる収納容器に収納され、該収納容器が高分子フィルム製の防塵袋で密閉された状態で、梱包箱に収納された状態が表されている。本態様においては、第二の態様と同様に緩衝部を有するが、該緩衝部が脚部の内側において凸状にのびており、凸部の機能をあわせて有するものである。 FIG. 4 is a longitudinal sectional view of the pellicle packaging structure according to the third aspect of the present invention, in which the pellicle is stored in a storage container including a tray and a lid, and the storage container is hermetically sealed with a polymer film dustproof bag. In this state, the state stored in the packing box is shown. In this embodiment, the buffer portion is provided in the same manner as in the second embodiment, but the buffer portion extends in a convex shape inside the leg portion, and has the function of the protrusion portion.
次に、本発明のペリクル梱包構造体の製造方法を説明する。
本発明のペリクル梱包構造体の製造方法は、ペリクルを底面の外側面に脚部を有するトレイと蓋からなる収納容器に収納する工程、該収納容器を高分子フィルム製の袋に入れて密閉する工程、及び袋に入れた該収納容器を底面の内側面に凸部を有する梱包箱に収納する工程からなる。
Next, the manufacturing method of the pellicle packing structure of the present invention will be described.
In the method for manufacturing a pellicle packing structure according to the present invention, the step of storing the pellicle in a storage container comprising a tray having a leg portion on the outer surface of the bottom surface and a lid, and sealing the container in a polymer film bag And a step of storing the storage container in a bag in a packing box having a convex portion on the inner side surface of the bottom surface.
図２〜図４において、ペリクルは、ペリクル膜の面積が１００００ｃｍ２以上の大型ペリクルであることが好ましい。本発明は、ペリクル膜の面積が大きければ大きいほど顕著な効果があらわれ、特に１５０００ｃｍ２以上であるとより顕著な効果が現れる。大型ペリクル膜の面積の上限は５００００ｃｍ２であり、これ以上になると収納容器を水平に保持した状態でトラック輸送することが困難になる。
ペリクルは、枠体と、枠体の上縁面に接着されたペリクル膜と、枠体の下縁面に塗着された粘着材層と、粘着材層を保護するために粘着材層に粘着された保護フィルムとからなる。ここでペリクル膜は枠体の上縁面に接着剤層を介して接着されている。なお、ペリクル膜の面積は、枠体の外形面積に相当する。
In Figures 2-4, the pellicle is preferably the area of the pellicle film is 10000 cm 2 or more large pellicle. In the present invention, the larger the area of the pellicle film, the more remarkable the effect. In particular, when the area is 15000 cm 2 or more, the more remarkable effect appears. The upper limit of the area of the large pellicle membrane is 50000 cm 2 , and if it exceeds this, it becomes difficult to transport the truck while holding the storage container horizontally.
The pellicle sticks to the frame, the pellicle film bonded to the upper edge of the frame, the adhesive layer applied to the lower edge of the frame, and the adhesive layer to protect the adhesive layer And a protective film. Here, the pellicle film is bonded to the upper edge surface of the frame through an adhesive layer. Note that the area of the pellicle film corresponds to the outer area of the frame.
ペリクル膜の材質は、ニトロセルロース、セルロース誘導体、またはフッ素ポリマーなどの従来一般的に用いられているものを使用することができる。また、枠体の材質については、アルミニウムやその合金、例えばジュラルミン、或いは、鉄や鉄系合金、例えばステンレスといったペリクルに用いられる物が使用できる。これらの中で大型化による枠体の自重の増加を考慮すれば、軽量で、かつ、剛性を有するものを用いることが好ましく、例えば、アルミニウムやその合金が好ましい。
接着剤としては、紫外線硬化型接着剤、フッ素樹脂系接着剤などの従来一般的に用いられているものを使用することができる。また、粘着材としては、公知のものを用いることが可能である。一般的には、粘着材として、スチレンエチレンブチレンスチレン系、スチレンエチレンプロピレンスチレン系、もしくはオレフィン系等のホットメルト粘着材、シリコーン系粘着材、アクリル系粘着材、または発泡フィルム等の基材からなる両面粘着テープを用いることが可能である。ホットメルト粘着材に関しては、通常のシリンジ等を用いる押出し塗布によって枠体に配置することができる。さらに、押出し塗布後、熱、圧力をかけながら平面板のような成型盤でプレス等を行っても良い。
As the material of the pellicle membrane, a conventionally commonly used material such as nitrocellulose, a cellulose derivative, or a fluoropolymer can be used. As the material of the frame, aluminum or an alloy thereof such as duralumin, or iron or an iron-based alloy such as stainless steel may be used. Among these, considering the increase in the weight of the frame body due to the increase in size, it is preferable to use a lightweight and rigid material, for example, aluminum or an alloy thereof.
As the adhesive, conventionally used ones such as an ultraviolet curable adhesive and a fluororesin adhesive can be used. Moreover, a well-known thing can be used as an adhesive material. Generally, the adhesive is made of a base material such as a hot-melt adhesive such as styrene ethylene butylene styrene, styrene ethylene propylene styrene, or olefin, a silicone adhesive, an acrylic adhesive, or a foam film. Double-sided adhesive tape can be used. The hot melt adhesive material can be placed on the frame by extrusion coating using a normal syringe or the like. Further, after extrusion coating, pressing or the like may be performed with a molding machine such as a flat plate while applying heat and pressure.
保護フィルムの材質としては、好ましくは、ポリエチレンテレフタレート樹脂、ポリエチレン樹脂等が使用される。また、保護フィルムの厚みとしては、好ましくは３０μｍ〜５００μｍのものが使用される。
第一の工程においては、上述したペリクルを底面の外側面に脚部を有するトレイと蓋からなる収納容器に収納する。蓋とトレイとの嵌合面は全周にわたり、テープでシールするか、または、トレイと蓋とのコーナー部にクリップを取り付けることで固定してもよい。
収納容器の材質は、ポリエチレンテレフタレート樹脂や、アクリロニトリルブタジエンスチレン樹脂、アクリル樹脂、ポリカーボネート樹脂、ポリ塩化ビニル樹脂等の樹脂が使用できる。また、帯電防止タイプの樹脂を用いてもよい。さらに、アルミニウムやその合金、例えばジュラルミン、または鉄やその合金、例えばステンレス等のペリクル収納容器に用いられているものであれば金属材料も使用できる。これら金属材料を用いた収納容器の場合は、塗装等の表面処理されたものであってもかまわない。特に、アウトガスの発生量が少ないものを使用することが好ましい。
As a material for the protective film, polyethylene terephthalate resin, polyethylene resin, or the like is preferably used. Moreover, as a thickness of a protective film, the thing of 30 micrometers-500 micrometers is used preferably.
In the first step, the above-described pellicle is stored in a storage container including a tray having a leg portion on the outer surface of the bottom surface and a lid. The fitting surface between the lid and the tray may be sealed with tape over the entire circumference, or may be fixed by attaching a clip to a corner portion between the tray and the lid.
As the material of the storage container, a resin such as polyethylene terephthalate resin, acrylonitrile butadiene styrene resin, acrylic resin, polycarbonate resin, or polyvinyl chloride resin can be used. Further, an antistatic type resin may be used. Further, a metal material may be used as long as it is used for a pellicle storage container such as aluminum or an alloy thereof such as duralumin, or iron or an alloy thereof such as stainless steel. In the case of a storage container using these metal materials, it may be a surface-treated one such as paint. In particular, it is preferable to use one that generates a small amount of outgas.
また、脚部の材質は、プラスチックや金属が使用できる。また、脚部がプラスチックや金属からなる上部とクッション性を有する材料からなる下部との二部からなるものであってもよい。脚部の材質がトレイと同じ材質であれば、トレイと一体成形することが可能である。一方、脚部の材質がトレイと異なる材質であれば、後加工でネジや接着材によってトレイ底面部に取り付ける。 Moreover, the material of a leg part can use a plastic and a metal. Moreover, a leg part may consist of two parts, the upper part which consists of a plastics or a metal, and the lower part which consists of a material which has cushioning properties. If the material of the leg part is the same as that of the tray, it can be formed integrally with the tray. On the other hand, if the material of the leg portion is different from that of the tray, it is attached to the bottom surface portion of the tray by screws or an adhesive in post-processing.
第二の工程においては、ペリクルを収納した収納容器を高分子フィルム製の袋に入れて密閉する。高分子フィルム製の袋としては、ポリエチレン・ポリプロピレン・ポリエステル・塩化ビニール等のフィルムからなる透明または半透明の袋が好ましい。密閉方法は単に縛るだけでも良いが、異物の混入を防止するために粘着テープ等で固定するか、ヒートシールすることが好ましい。 In the second step, the storage container storing the pellicle is put in a polymer film bag and sealed. The polymer film bag is preferably a transparent or translucent bag made of polyethylene, polypropylene, polyester, vinyl chloride or the like. The sealing method may be simply tied, but it is preferably fixed with an adhesive tape or the like or heat-sealed in order to prevent foreign matter from entering.
第三の工程においては、袋に入れた収納容器を底面の内側面に凸部を有する梱包箱に収納する。梱包箱としては、紙製段ボール箱またはプラスチック製箱が好適に使用できる。リサイクル使用する場合は、プラスチック製箱がより好ましい。
また、凸部の材質は、紙や発泡体・弾性体等のプラスチックが使用できる。特にポリスチレンやポリウレタン等の発泡体が好ましい。これらの凸部は接着剤によって梱包箱底面に直接、または前記板状部材に取り付けることができる。
凸部の好ましい形状及び配置としては、図５に示したように、収納容器の対向する２辺と略平行に配置された3組の直方体の形状を有する凸部があげられる。この場合フォークリフトの爪部の幅及び間隔を、これらの凸部と凸部との間に爪が入るようにあわせることで、フォークリフトによる運搬作業を容易に行うことが可能となる。また、図６に示したように、収納容器の対向する２辺と略平行に配置された９組の直方体の形状を有する凸部があげられる。この場合は、フォークリフトの爪部の幅及び間隔を、これらの凸部と凸部との間に爪が入るようにあわせることで、二方向からのフォークリフトによる運搬作業を容易に行うことが可能となる。
In a 3rd process, the storage container put into the bag is accommodated in the packaging box which has a convex part on the inner surface of a bottom face. As the packaging box, a paper cardboard box or a plastic box can be suitably used. For recycling, a plastic box is more preferable.
The material of the convex portion can be paper, plastic such as foam or elastic body. Particularly preferred are foams such as polystyrene and polyurethane. These convex portions can be attached directly to the bottom surface of the packaging box by an adhesive or to the plate-like member.
As a preferable shape and arrangement of the convex portions, as shown in FIG. 5, convex portions having three sets of rectangular parallelepiped shapes arranged substantially parallel to two opposing sides of the storage container can be mentioned. In this case, the forklift can be easily transported by adjusting the width and interval of the claw portions of the forklift so that the claw can be inserted between the convex portions. Moreover, as shown in FIG. 6, the convex part which has the shape of nine sets of rectangular parallelepipeds arrange | positioned substantially in parallel with 2 sides which a storage container opposes is mention | raise | lifted. In this case, by adjusting the width and interval of the claw parts of the forklift so that the claw can be inserted between the convex parts, it is possible to easily carry the work by forklift from two directions. Become.
また、緩衝部の材質は、ゴム等の弾性体やポリスチレンやポリウレタン等の発泡体が使用できる。緩衝部は接着材によってトレイ底面部に取り付けることができる。
なお、梱包箱への収納にあたっては、梱包箱と袋で密閉した収納容器のすきまにクッション材等をつめてもかまない。また、ペリクル梱包構造体の運送にあたっては、ペリクル梱包構造体の外側に梱包用のテープや紐等をかけて縛って固定してもよいし、ペリクル梱包構造体を運送用のパレットの上に載せた上で、該パレットごと固定した構造体としてもよい。
As the material of the buffer portion, an elastic body such as rubber or a foamed body such as polystyrene or polyurethane can be used. The buffer portion can be attached to the bottom of the tray with an adhesive.
In storing in the packing box, a cushion material or the like may be packed in the gap between the packing box and the storage container sealed with the bag. Further, when transporting the pellicle packing structure, the pellicle packing structure may be secured by tying a packing tape or string on the outside of the pellicle packing structure, or the pellicle packing structure is mounted on a transport pallet. In addition, a structure in which the pallet is fixed may be used.
本発明を実施例に基づいて説明する。 The present invention will be described based on examples.
＜実施例１＞
外形寸法が１７０ｃｍ×１６０ｃｍの矩形で、幅１２ｍｍのアルミニウム合金製の枠体の、上縁面にセルロースからなるペリクル膜を接着し、下縁面に粘着材を塗布したペリクルを準備した。
トレイと蓋からなり蓋を閉めた時の外寸が幅１８０ｃｍ奥行き１７０ｃｍ高さ１８ｃｍの略直方体の形状を有し、底面の外側面の４隅には、幅９ｃｍ奥行き１５ｃｍ高さ１５ｃｍの超高分子ポリエチレンからなる脚部がネジ止めによって固定された収納容器を準備し、上記ペリクルをトレイに固定した上で蓋をしめて収納した。
<Example 1>
A pellicle was prepared in which a pellicle film made of cellulose was bonded to the upper edge surface of an aluminum alloy frame body having an outer dimension of 170 cm × 160 cm and a width of 12 mm, and an adhesive was applied to the lower edge surface.
It has a substantially rectangular parallelepiped shape with a width of 180 cm, a depth of 170 cm, and a height of 18 cm. The outer dimensions of the bottom surface are 9 cm wide, 15 cm deep, 15 cm high and 15 cm high. A storage container in which legs made of molecular polyethylene were fixed by screwing was prepared, and the pellicle was fixed to the tray, and then the lid was closed and stored.
次に、厚さ１５０μｍのポリエチレンフィルムからなる縦３００ｃｍ横２３０ｃｍの袋に上記収納容器を入れて余った部分を折り返して開口部を粘着テープで固定して密閉した。
幅２１０ｃｍ奥行き２００ｃｍ高さ７０ｃｍの紙製段ボール箱からなる梱包箱を用意した。該箱は梱包箱底面、梱包箱側面、梱包箱上面の３つに分かれた構造を有する。図５の形状の凸部（幅２０ｃｍ奥行き１７０ｃｍ高さ３０ｃｍの直方体が４０ｃｍの間隔をおいて３つ配置）と緩衝部（幅１５ｃｍ奥行き２０ｃｍ高さ２０ｃｍの直方体が４つ）を有する段ボール紙製の板状部材（厚み５ｍｍ）を用意して、梱包箱底面の上に重ねた。該板状部材の上に袋で密閉した上記収納容器を積載し、該梱包箱底面の上に梱包箱側面をのせ、該梱包箱側面の上に梱包箱上面をのせて、ペリクル梱包構造体とした。
上記ペリクル梱包構造体を、以下のように開梱した。まず梱包箱上面を除去した。次に梱包箱側面をはずして、フォークリフトの爪（爪の幅２０ｃｍ、長さ２１０ｃｍ、間隔４０ｃｍ）を、収納容器底面と、梱包箱底面（板状部材）と３つの凸部によって形成されたスペースに入れて持ち上げることで容易に取り出すことができた。
Next, the storage container was put in a bag having a length of 300 cm and a width of 230 cm made of a polyethylene film having a thickness of 150 μm, the remaining portion was folded back, and the opening was fixed with an adhesive tape and sealed.
A packing box made of a paper cardboard box having a width of 210 cm, a depth of 200 cm, and a height of 70 cm was prepared. The box has a structure that is divided into three parts: a packing box bottom face, a packing box side face, and a packing box top face. 5 made of corrugated paper having convex portions (three rectangular parallelepipeds with a width of 20 cm, a depth of 170 cm and a height of 30 cm arranged at a distance of 40 cm) and a buffering portion (four rectangular solids with a width of 15 cm, a depth of 20 cm and a height of 20 cm) A plate-like member (thickness 5 mm) was prepared and stacked on the bottom of the packaging box. The storage container sealed with a bag is loaded on the plate-like member, the side of the packaging box is placed on the bottom of the packaging box, the top of the packaging box is placed on the side of the packaging box, and the pellicle packaging structure and did.
The pellicle packing structure was unpacked as follows. First, the upper surface of the packaging box was removed. Next, the side of the packaging box is removed, and the forklift claw (claw width 20 cm, length 210 cm, spacing 40 cm), the space formed by the bottom surface of the storage container, the bottom surface of the packaging box (plate-like member), and three convex portions It could be easily removed by lifting it in the box.
本発明のペリクル梱包構造体は、ペリクル、特に大型ペリクルの梱包・運搬の分野において、好適に利用できる。 The pellicle packing structure of the present invention can be suitably used in the field of packing and transporting a pellicle, particularly a large pellicle.
１ ペリクル膜
２ 枠体
３ ペリクル
４ 蓋
５ トレイ
６ 収納容器
７ 袋
８ 梱包箱上面
９ 梱包箱側面
１０ 梱包箱底面
１１ 脚部
１２ 凸部
１３ 緩衝部
１４ 板状部材
DESCRIPTION OF SYMBOLS 1 Pellicle film 2 Frame body 3 Pellicle 4 Lid 5 Tray 6 Storage container 7 Bag 8 Packing box upper surface 9 Packing box side surface 10 Packing box bottom face 11 Leg part 12 Convex part 13 Buffer part 14 Plate-shaped member
Claims (6)
収納容器が収納容器底面の外側面において間隔をあけて配置された複数の脚部を有し、梱包箱が該収納容器底面の下に位置する梱包箱底面の内側面において単数または間隔をあけて配置された複数の凸部を有し、該凸部と該脚部とが互いに接触しない配置であって、該凸部の高さが該脚部の高さより小さいペリクル梱包構造体。 A pellicle packing structure comprising a pellicle, a storage container having a substantially rectangular parallelepiped shape storing the pellicle therein, and a packing box having a substantially rectangular parallelepiped shape storing the storage container therein,
The storage container has a plurality of legs arranged at intervals on the outer surface of the storage container bottom surface, and the packing box is single or spaced on the inner surface of the bottom surface of the packaging box located below the bottom surface of the storage container. A pellicle packing structure having a plurality of arranged convex portions, wherein the convex portions and the leg portions are not in contact with each other, and the height of the convex portions is smaller than the height of the leg portions.
収納容器が収納容器底面の外側面において間隔をあけて配置された複数の脚部を有し、梱包箱が該収納容器底面の下に位置する梱包箱底面の内側面において単数または間隔をあけて配置された複数の凸部を有するとともに該収納容器の各脚部の下に位置する梱包箱底面の内側面において緩衝部を有し、該凸部と該脚部とが互いに接触しない配置であって、該凸部の高さが該脚部の高さと該緩衝部の高さとの和より小さいペリクル梱包構造体。 A pellicle packing structure comprising a pellicle, a storage container having a substantially rectangular parallelepiped shape storing the pellicle therein, and a packing box having a substantially rectangular parallelepiped shape storing the storage container therein,
The storage container has a plurality of legs arranged at intervals on the outer surface of the storage container bottom surface, and the packing box is single or spaced on the inner surface of the bottom surface of the packaging box located below the bottom surface of the storage container. The arrangement has a plurality of convex portions and a buffer portion on the inner surface of the bottom surface of the packaging box located below each leg portion of the storage container, and the convex portions and the leg portions do not contact each other. A pellicle packing structure in which the height of the convex portion is smaller than the sum of the height of the leg portion and the height of the buffer portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008234045A JP5209423B2 (en) | 2008-09-11 | 2008-09-11 | Pellicle packing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008234045A JP5209423B2 (en) | 2008-09-11 | 2008-09-11 | Pellicle packing structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010064775A true JP2010064775A (en) | 2010-03-25 |
| JP5209423B2 JP5209423B2 (en) | 2013-06-12 |
Family
ID=42190710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008234045A Active JP5209423B2 (en) | 2008-09-11 | 2008-09-11 | Pellicle packing structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5209423B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010217775A (en) * | 2009-03-18 | 2010-09-30 | Asahi Kasei E-Materials Corp | Pellicle housing container |
| JP2011240946A (en) * | 2010-05-17 | 2011-12-01 | Shin-Etsu Chemical Co Ltd | Airtight enclosing method for bag containing pellicle |
| KR20120089188A (en) * | 2011-02-01 | 2012-08-09 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Pellicle packing box |
| WO2013168782A1 (en) * | 2012-05-11 | 2013-11-14 | 株式会社ニコン | Substrate case, substrate conveyance case, case cover, substrate conveyance system, and method for conveying substrate |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01149646U (en) * | 1988-04-06 | 1989-10-17 | ||
| JPH07302833A (en) * | 1994-05-09 | 1995-11-14 | Hitachi Cable Ltd | Carrier for wafer |
| JP2008100733A (en) * | 2006-10-19 | 2008-05-01 | Shin Etsu Chem Co Ltd | Shock absorber for pellicle packing and packing method |
-
2008
- 2008-09-11 JP JP2008234045A patent/JP5209423B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01149646U (en) * | 1988-04-06 | 1989-10-17 | ||
| JPH07302833A (en) * | 1994-05-09 | 1995-11-14 | Hitachi Cable Ltd | Carrier for wafer |
| JP2008100733A (en) * | 2006-10-19 | 2008-05-01 | Shin Etsu Chem Co Ltd | Shock absorber for pellicle packing and packing method |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010217775A (en) * | 2009-03-18 | 2010-09-30 | Asahi Kasei E-Materials Corp | Pellicle housing container |
| JP2011240946A (en) * | 2010-05-17 | 2011-12-01 | Shin-Etsu Chemical Co Ltd | Airtight enclosing method for bag containing pellicle |
| TWI498257B (en) * | 2010-05-17 | 2015-09-01 | Shinetsu Chemical Co | A method for hermetically closing an air-tight bag for pellicle |
| KR20120089188A (en) * | 2011-02-01 | 2012-08-09 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Pellicle packing box |
| JP2012158370A (en) * | 2011-02-01 | 2012-08-23 | Shin-Etsu Chemical Co Ltd | Pellicle packing box |
| CN102673890A (en) * | 2011-02-01 | 2012-09-19 | 信越化学工业株式会社 | Package box for dustproof thin film component |
| KR101910850B1 (en) * | 2011-02-01 | 2018-10-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Pellicle packing box |
| WO2013168782A1 (en) * | 2012-05-11 | 2013-11-14 | 株式会社ニコン | Substrate case, substrate conveyance case, case cover, substrate conveyance system, and method for conveying substrate |
| JPWO2013168782A1 (en) * | 2012-05-11 | 2016-01-07 | 株式会社ニコン | Substrate case, substrate carrying case, case cover, substrate carrying system, and substrate carrying method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5209423B2 (en) | 2013-06-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6899229B2 (en) | Packaging container with integrated sheet for retention of packaged article | |
| KR101910850B1 (en) | Pellicle packing box | |
| JP2006273333A (en) | Tray for packing | |
| JP2008100733A (en) | Shock absorber for pellicle packing and packing method | |
| JP5209423B2 (en) | Pellicle packing structure | |
| JP2010132331A (en) | Packaging box for semiconductor housing container | |
| US10035638B1 (en) | Retention package with article-loading aperture and method of making and using the same | |
| JP2003034363A (en) | Packaging method | |
| JP5534897B2 (en) | Small precision instrument return box and small precision instrument package | |
| JP5693836B2 (en) | Packing body for pellicle storage case and packing method for pellicle storage case | |
| JP2010064780A (en) | Packing body of pellicle storing container | |
| JP2010036945A (en) | Paper material for transportation | |
| TWM570297U (en) | Panel transportation container | |
| JP4442748B2 (en) | How to pack a large pellicle | |
| JP2005041503A (en) | Cushioning body for use in transporting semiconductor wafer | |
| JP5856260B2 (en) | Package of pellicle storage case | |
| JP2003246357A (en) | Member transporting sheet and member transporting method using the sheet | |
| JPH1059353A (en) | Packaging box | |
| JP5869821B2 (en) | Returnable box using cushioning material using elastic film | |
| JP5826989B2 (en) | Package of pellicle storage case | |
| JP2007084121A (en) | Loading base and sheet-like material packaging structure | |
| JPH08310560A (en) | Packaging structure of ceramic sheet | |
| KR20060027332A (en) | Non-contact protective packaging for surface-sensitive articles | |
| JP3139142U (en) | Conner cushioning material for packing | |
| JP2022028958A (en) | Cushioning material for pellicle and packaging body |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110902 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121226 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130205 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130221 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160301 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5209423 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |