JP2010062080A - Planar heating element - Google Patents

Planar heating element Download PDF

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JP2010062080A
JP2010062080A JP2008228507A JP2008228507A JP2010062080A JP 2010062080 A JP2010062080 A JP 2010062080A JP 2008228507 A JP2008228507 A JP 2008228507A JP 2008228507 A JP2008228507 A JP 2008228507A JP 2010062080 A JP2010062080 A JP 2010062080A
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heating element
plate
coating layer
heating
planar
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Masami Suzuki
正美 鈴木
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JSS CO Ltd
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JSS CO Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a planar heating element superior in thermal efficiency, reliability, and maintainability by a simple constitution. <P>SOLUTION: In the planar heating element 10 having the heating element 1 and a heating plate 2 to pinch the heating element 1 via a coating layer 3, the coating layer 3 is formed on respective faces of the heating plate opposed to the heating element out of thickness directions of the heating plate by silicon nitride or ceramic material containing alumina, and a groove part 4 to house a linear or a foil-like heating element 1 is formed in the coating layer 3. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、絶縁層を有する加熱板で発熱体を挟み込んだ面状発熱体に関する。   The present invention relates to a planar heating element in which a heating element is sandwiched between heating plates having an insulating layer.

従来、工業用製品の加工等に用いられる面状発熱体は、所謂マイカヒーターに代表されるように、線や箔状に成形された金属の発熱体をマイカ(雲母)板で挟み込み、加圧や接着等の加工工程を経て絶縁処理を施し、さらに、加熱板である金属板等を挟みこんで作製されている。マイカ板の代わりにシリコンゴムやフッ素樹脂シートを使用したものもある。この平面ヒーターは、主として加熱板である金属板等に挟まれ、面状発熱体として広く使用されている。   Conventionally, planar heating elements used for processing industrial products, etc., as represented by so-called mica heaters, sandwich a metal heating element formed into a wire or foil shape between mica (mica) plates and pressurize it. Insulation is performed through processing steps such as bonding and bonding, and a metal plate or the like that is a heating plate is sandwiched. Some use silicon rubber or fluororesin sheets instead of mica plates. This flat heater is sandwiched between metal plates, which are mainly heating plates, and is widely used as a planar heating element.

図3は、従来の面状発熱体の側断面図である。図4は、従来の面状発熱体の構成を示す側断面図である。従来の面状発熱体20は、金属等の発熱体21をマイカ板22で挟み込んだ平面ヒーター23と、この平面ヒーター23の両面を挟み込む加熱板24とから構成される。   FIG. 3 is a side sectional view of a conventional planar heating element. FIG. 4 is a side sectional view showing a configuration of a conventional planar heating element. The conventional planar heating element 20 includes a flat heater 23 in which a heating element 21 such as a metal is sandwiched between mica plates 22 and a heating plate 24 in which both surfaces of the flat heater 23 are sandwiched.

特許文献1では、金属発熱体素子に窒化アルミ等のセラミックスに無機接着剤を添加した結合剤を塗布して熱拡散層を形成し、これをマイカ等の無機絶縁体の間に重層し、加熱加圧して一体化した平面発熱体が開示されている。   In Patent Document 1, a heat diffusion layer is formed by applying a binder in which an inorganic adhesive is added to ceramics such as aluminum nitride to a metal heating element, and this is layered between inorganic insulators such as mica and heated. A flat heating element is disclosed which is pressed and integrated.

特開平6−283257号公報JP-A-6-283257

しかしながら、上記従来技術では、面状発熱体を連続使用する条件下において、発熱体を挟み込む絶縁体のうち、耐熱は樹脂やゴムでは150℃程度、マイカ板でも300℃程度が限度であるため、より高温での連続使用という要求に対応できなかった。また、上記従来技術のような構成では、発熱体が断線したときに交換等の修理のために、図2に示すような平面ヒーターを予備として常に用意する必要があった。また、特許文献1の技術では、無機接着剤にシリコンを使用しているため、シロキ酸が発生して接点不良等を起こすことがあった。   However, in the above prior art, among the insulators sandwiching the heating element under the condition of continuously using the planar heating element, the heat resistance is limited to about 150 ° C. for resin and rubber and about 300 ° C. for mica plate, The request for continuous use at higher temperatures could not be met. Further, in the configuration as in the above prior art, it is necessary to always prepare a flat heater as shown in FIG. 2 as a spare for repair such as replacement when the heating element is disconnected. Moreover, in the technique of patent document 1, since silicon is used for the inorganic adhesive, siloxane acid may be generated to cause a contact failure or the like.

上記問題点に鑑み、本発明は、簡易な構成で、熱効率、信頼性及び保守性に優れた面状発熱体を提供することを課題とする。   In view of the above problems, an object of the present invention is to provide a planar heating element having a simple configuration and excellent thermal efficiency, reliability, and maintainability.

上記課題を解決するために、本発明は以下のことを特徴とする。
請求項1に記載の発明は、発熱体と、絶縁層を介して該発熱体を介して挟み込む加熱板とを有する面状発熱体において、前記絶縁層が前記加熱板の厚み方向のうち前記発熱体に対向する該加熱板のそれぞれの面に形成され、かつ、該絶縁層に前記発熱体を収容するための溝部が形成されることを特徴とする。
In order to solve the above problems, the present invention is characterized by the following.
The invention according to claim 1 is a planar heating element having a heating element and a heating plate sandwiched through the heating element via an insulating layer, wherein the insulating layer is the heating element in the thickness direction of the heating plate. It is formed on each surface of the heating plate facing the body, and a groove for accommodating the heating element is formed in the insulating layer.

請求項2に記載の発明は、前記面状発熱体において、前記絶縁層が窒化珪素又はアルミナを含有するセラミックス材料を含むことを特徴とする。   According to a second aspect of the present invention, in the planar heating element, the insulating layer includes a ceramic material containing silicon nitride or alumina.

請求項3に記載の発明は、前記面状発熱体において、前記絶縁層が耐熱樹脂を含むことを特徴とする。   According to a third aspect of the present invention, in the planar heating element, the insulating layer includes a heat resistant resin.

本発明によれば、加熱板にセラミックス等の絶縁性を有するコーティング層を形成し、このコーティング層と発熱体とを分離した構成にすることにより、簡易な構成で、熱効率及び信頼性に優れた面状発熱体を提供する。   According to the present invention, a coating layer having insulating properties such as ceramics is formed on the heating plate, and the coating layer and the heating element are separated from each other, so that the thermal efficiency and reliability are excellent with a simple configuration. A planar heating element is provided.

さらに、発熱体が断線等で故障した場合は、従来のように絶縁層及び発熱体を交換することなく、発熱体のみを交換することができるので、保守が容易で保守コストを低くすることができる。   Furthermore, if the heating element breaks down due to disconnection or the like, it is possible to replace only the heating element without replacing the insulating layer and the heating element as in the prior art, so that maintenance is easy and the maintenance cost is reduced. it can.

さらに、絶縁層に溝部を設けることにより、製造工程における発熱体の位置決めが容易になる。   Furthermore, by providing the groove in the insulating layer, the heating element can be easily positioned in the manufacturing process.

以下に、本発明を実施するための最良の形態を図面に基づいて説明する。なお、以下の説明はこの発明の最良の形態の例であって、いわゆる当業者は特許請求の範囲内で、変更・修正をして他の実施形態をなすことは容易であり、以下の説明が特許請求の範囲を限定するものではない。   The best mode for carrying out the present invention will be described below with reference to the drawings. The following description is an example of the best mode of the present invention, and it is easy for a person skilled in the art to make other embodiments within the scope of the claims by making changes and modifications within the scope of the claims. However, this does not limit the scope of the claims.

図1は、本発明の一実施形態になる面状発熱体を示す側断面図である。図2は、面状発熱体の構成を示す側断面図である。面状発熱体10は、発熱体1と、発熱体1を両面から挟み込む加熱板2と、加熱板の厚み方向のうち発熱体1に対向する加熱板のそれぞれの面に成膜されたコーティング層3とを有する。   FIG. 1 is a side sectional view showing a planar heating element according to an embodiment of the present invention. FIG. 2 is a side sectional view showing the configuration of the planar heating element. The planar heating element 10 includes a heating element 1, a heating plate 2 that sandwiches the heating element 1 from both sides, and a coating layer formed on each surface of the heating plate that faces the heating element 1 in the thickness direction of the heating plate. 3.

発熱体1は、ニッケルクロム、鉄クロム等の抵抗率の高い耐熱性の金属発熱体を用い、所望の抵抗値を有する線状又は箔状の形状に形成される。   The heating element 1 is made of a heat-resistant metal heating element having a high resistivity such as nickel chrome or iron chrome, and is formed in a linear or foil shape having a desired resistance value.

加熱板2は、発熱体1で発せられた熱を被加熱物へと伝達できるものであれば特に制限されるものではないが、耐熱性があり、表面が平面形状であることが好ましい。   The heating plate 2 is not particularly limited as long as it can transfer the heat generated by the heating element 1 to the object to be heated, but is preferably heat resistant and has a flat surface.

具体的には、加熱板2は、アルミ板、ステンレス板、銅板等の金属板を用いる。低膨張ガラス板、結晶化ガラス板、アルミナ板、窒化珪素板等のセラミック板を用いてもよいが、セラミック板は、一般に、絶縁物であるので、絶縁材料を配置する必要はないという長所はあるが、伝熱性が金属板より劣り熱効率が劣る。   Specifically, the heating plate 2 uses a metal plate such as an aluminum plate, a stainless plate, or a copper plate. A ceramic plate such as a low expansion glass plate, a crystallized glass plate, an alumina plate, or a silicon nitride plate may be used. However, since the ceramic plate is generally an insulator, there is an advantage that it is not necessary to dispose an insulating material. However, heat conductivity is inferior to that of metal plates and thermal efficiency is inferior.

金属板は、伝熱性が良好ではあるが導電性があるので、使用にあたっては、発熱体1と加熱板2との間に、図2に示すコーティング層3なる絶縁層を形成する必要がある。従来は、図4に示す発熱体11とマイカ板22等の絶縁体を一体にした平面ヒーター23を用いていた。しかしながら、上述したように、マイカ板22等の絶縁体は熱効率や保守性が劣っていた。そこで、本発明では、加熱板2にコーティング層3を形成して、加熱板2と発熱体1との間の絶縁性を確保した。   Since the metal plate has good heat conductivity but is conductive, in use, it is necessary to form an insulating layer as the coating layer 3 shown in FIG. 2 between the heating element 1 and the heating plate 2. Conventionally, a flat heater 23 in which an insulator such as a heating element 11 and a mica plate 22 shown in FIG. 4 is integrated has been used. However, as described above, insulators such as the mica plate 22 are inferior in thermal efficiency and maintainability. Therefore, in the present invention, the coating layer 3 is formed on the heating plate 2 to ensure insulation between the heating plate 2 and the heating element 1.

コーティング層3は、加熱板2である金属板の厚み方向のうち発熱体1に対向する面に、セラミック材料を溶射して形成される。本実施の形態では、2枚の加熱板2が発熱体1を挟み込んでいる。従って、2枚の加熱板2の発熱体1に対向するそれぞれの面にコーティング層3が形成される。コーティング層3の溶射には、プラズマ溶射又はガス溶射が好適に用いられる。セラミック材料は、絶縁性を有し、高温で過酷な条件で使用される高温構造材料として、窒化珪素、アルミナ等が好適に用いられる。セラミックス材料の代わりに、耐熱樹脂を用いてもよい。耐熱樹脂でコーティング層3を形成する場合は、樹脂を加熱板2に吹き付けて焼成する。例えば、耐熱樹脂としてはテフロン(登録商標)がある。但し、耐熱樹脂は、コスト的にはセラミックス材料よりは優位にあるが、耐熱性においてセラミックス材料よりも劣るので、面状発熱体10の使用形態に応じて用いるようにする。即ち、面状発熱体10が高温仕様ならばセラミックス材料を用い、低温仕様なら耐熱樹脂を用いるようにすればよい。   The coating layer 3 is formed by spraying a ceramic material on the surface facing the heating element 1 in the thickness direction of the metal plate that is the heating plate 2. In the present embodiment, the two heating plates 2 sandwich the heating element 1. Accordingly, the coating layer 3 is formed on each surface of the two heating plates 2 facing the heating element 1. For spraying the coating layer 3, plasma spraying or gas spraying is preferably used. As the ceramic material, silicon nitride, alumina, or the like is suitably used as a high-temperature structural material that has insulating properties and is used under severe conditions at high temperatures. A heat resistant resin may be used instead of the ceramic material. When the coating layer 3 is formed of a heat resistant resin, the resin is sprayed on the heating plate 2 and baked. For example, there is Teflon (registered trademark) as a heat resistant resin. However, although the heat resistant resin is superior to the ceramic material in terms of cost, the heat resistant resin is inferior to the ceramic material in heat resistance. Therefore, the heat resistant resin is used according to the usage form of the planar heating element 10. That is, a ceramic material may be used if the planar heating element 10 has a high temperature specification, and a heat resistant resin may be used if the specification is low.

溶射以外には、他にPVD(Physical Vapor Deposition)、CVD(Chemical Vapor Deposition)及びゾル−ゲル法等を用いてもよい。   Besides thermal spraying, PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), sol-gel method, etc. may be used.

コーティング層3の厚さは、例えばセラミックス材料を用いた場合は、交流200ボルトという条件下おいて200μm程度あればよく、発熱体1と加熱板2との間の電気的な絶縁性が確保できればよい。耐熱樹脂を用いた場合は、セラミックス材料を用いた場合に比べ、コーティング層3を緻密にできるためより薄くできる。   For example, when a ceramic material is used, the thickness of the coating layer 3 may be about 200 μm under the condition of alternating current of 200 volts, as long as electrical insulation between the heating element 1 and the heating plate 2 can be secured. Good. When the heat-resistant resin is used, the coating layer 3 can be made denser and thinner than when a ceramic material is used.

次に、コーティング層3を有する加熱板2で発熱体1を挟み込むときに、発熱体1に応力や拘束力がかからないように発熱体1の形状に合わせて、コーティング層3に溝等の加工を施す必要がある。線状又は箔状のいずれにしても発熱体1は厚みを有するため、この厚みをコーティング層3内で収容するためである。   Next, when the heating element 1 is sandwiched between the heating plates 2 having the coating layer 3, a groove or the like is processed in the coating layer 3 in accordance with the shape of the heating element 1 so that stress and restraining force are not applied to the heating element 1. It is necessary to apply. This is because the heating element 1 has a thickness regardless of whether it is linear or foil, and this thickness is accommodated in the coating layer 3.

具体的には、以下のように処理を行って溝部4を形成する。
まず、加熱板2を機械加工時にエンドミル等の工具で発熱体形状に合わせた溝を形成する。加熱板2に形成する溝の寸法は、後にコーティング層3を形成することを考慮して、幅及び深さ共に大きめの寸法とする。この後、溝の形状を有する加熱板2に、上述の溶射等でセラミックス材料又は耐熱樹脂でコーティング層3を形成すると溝部4を有するコーティング層3が形成される。溝部4を有するコーティング層3は、2枚の加熱板2のうちいずれか一方の加熱板2に形成しても良いし、双方の加熱板2に形成しても良い。図2では一方の加熱板2のコーティング層3に溝部4を形成している。
Specifically, the groove 4 is formed by performing the following process.
First, a groove matching the shape of the heating element is formed with a tool such as an end mill during machining of the heating plate 2. Considering that the coating layer 3 will be formed later, the width and depth of the groove formed in the heating plate 2 are set to be larger dimensions. After that, when the coating layer 3 is formed on the heating plate 2 having the groove shape by the above-described thermal spraying or the like with a ceramic material or a heat resistant resin, the coating layer 3 having the groove portion 4 is formed. The coating layer 3 having the groove 4 may be formed on one of the two heating plates 2 or on both of the heating plates 2. In FIG. 2, the groove 4 is formed in the coating layer 3 of one heating plate 2.

発熱体1の形状に応じた溝部4を形成したコーティング層3を有する加熱板2で発熱体1を両面より挟み込み、ねじ等で止めることにより、本願発明の一実施形態になる面状発熱体10が作製される。   The heating element 1 having a coating layer 3 having a groove 4 corresponding to the shape of the heating element 1 is sandwiched from both sides with a heating plate 2 and is fastened with screws or the like, whereby a planar heating element 10 according to an embodiment of the present invention is formed. Is produced.

以上により、従来のマイカを用いた断熱材の積層を省略することができるため、発熱体1の熱を効率よく加熱板2に伝えることができる。このため、発熱体1の温度を従来のものより低く設定できるので発熱体1の寿命を長くすることができる。   As described above, since it is possible to omit the lamination of the conventional heat insulating material using mica, the heat of the heating element 1 can be efficiently transmitted to the heating plate 2. For this reason, since the temperature of the heating element 1 can be set lower than the conventional one, the life of the heating element 1 can be extended.

さらに、発熱体1が断線等により破損した場合は、発熱体1のみを交換すればよいため保守が容易になる。   Further, when the heating element 1 is damaged due to disconnection or the like, maintenance is facilitated because only the heating element 1 needs to be replaced.

さらに、絶縁層に溝部4を設けることにより、製造工程における発熱体の位置決めが容易になる。   Furthermore, by providing the groove 4 in the insulating layer, the heating element can be easily positioned in the manufacturing process.

さらに、セラミックス材料は1500℃程度の耐熱性を有するので、コーティング層3にセラミックス材料を用いた場合は、発熱体1が金属からなるときは絶縁破壊に対する耐性が従来のマイカに比べて増加する。   Furthermore, since the ceramic material has a heat resistance of about 1500 ° C., when the ceramic material is used for the coating layer 3, when the heating element 1 is made of a metal, the resistance to dielectric breakdown is increased as compared with the conventional mica.

本発明の一実施形態になる面状発熱体の構成を示す側断面図である。It is a sectional side view which shows the structure of the planar heating element which becomes one Embodiment of this invention. 本発明の一実施形態になる面状発熱体の側断面図である。It is a sectional side view of the planar heating element which becomes one Embodiment of this invention. 従来の面状発熱体の構成を示す側断面図である。It is a sectional side view which shows the structure of the conventional planar heating element. 従来の面状発熱体の側断面図である。It is a sectional side view of the conventional planar heating element.

符号の説明Explanation of symbols

1 発熱体
2 加熱板
3 コーティング層
4 溝部
10 面状発熱体
21 発熱体
22 マイカ
23 平面ヒーター
24 加熱板
20 面状発熱体
DESCRIPTION OF SYMBOLS 1 Heating body 2 Heating plate 3 Coating layer 4 Groove part 10 Planar heating element 21 Heating element 22 Mica 23 Flat heater 24 Heating plate 20 Planar heating element

Claims (3)

発熱体と、絶縁層を介して該発熱体を挟み込む加熱板とを有する面状発熱体において、
前記絶縁層は、前記加熱板の厚み方向のうち前記発熱体に対向する該加熱板のそれぞれの面に形成され、かつ、
該絶縁層に該発熱体を収容するための溝部が形成される
ことを特徴とする面状発熱体。
In a planar heating element having a heating element and a heating plate that sandwiches the heating element via an insulating layer,
The insulating layer is formed on each surface of the heating plate facing the heating element in the thickness direction of the heating plate, and
A planar heating element characterized in that a groove for accommodating the heating element is formed in the insulating layer.
請求項1に記載の面状発熱体において、
前記絶縁層は、窒化珪素又はアルミナを含有するセラミックス材料を含む
ことを特徴とする面状発熱体。
The planar heating element according to claim 1,
The planar heating element, wherein the insulating layer includes a ceramic material containing silicon nitride or alumina.
請求項1に記載の面状発熱体において、
前記絶縁層は、耐熱樹脂を含む
ことを特徴とする面状発熱体。
The planar heating element according to claim 1,
The insulating layer includes a heat resistant resin.
A planar heating element characterized by that.
JP2008228507A 2008-09-05 2008-09-05 Planar heating element Pending JP2010062080A (en)

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KR101601594B1 (en) * 2015-03-26 2016-03-08 이승순 Heating board and hot water heat exchanger system for using the same
JP2020194688A (en) * 2019-05-28 2020-12-03 Tpr株式会社 Planar heater, method for manufacturing planar heater, and heater unit
WO2023275954A1 (en) * 2021-06-28 2023-01-05 日本たばこ産業株式会社 Aerosol generation system
WO2023275955A1 (en) * 2021-06-28 2023-01-05 日本たばこ産業株式会社 Aerosol generation system

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JP2011222257A (en) * 2010-04-08 2011-11-04 Sumitomo Electric Ind Ltd Wafer heating heater unit and semiconductor manufacturing apparatus mounted with the same
KR101601594B1 (en) * 2015-03-26 2016-03-08 이승순 Heating board and hot water heat exchanger system for using the same
JP2020194688A (en) * 2019-05-28 2020-12-03 Tpr株式会社 Planar heater, method for manufacturing planar heater, and heater unit
WO2023275954A1 (en) * 2021-06-28 2023-01-05 日本たばこ産業株式会社 Aerosol generation system
WO2023275955A1 (en) * 2021-06-28 2023-01-05 日本たばこ産業株式会社 Aerosol generation system

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