JP2010054677A - Method and device for adjusting tilt of lens - Google Patents

Method and device for adjusting tilt of lens Download PDF

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JP2010054677A
JP2010054677A JP2008217936A JP2008217936A JP2010054677A JP 2010054677 A JP2010054677 A JP 2010054677A JP 2008217936 A JP2008217936 A JP 2008217936A JP 2008217936 A JP2008217936 A JP 2008217936A JP 2010054677 A JP2010054677 A JP 2010054677A
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lens
adjusted
tilt
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center
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Yukinobu Nakabayashi
幸信 中林
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Konica Minolta Opto Inc
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Konica Minolta Opto Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device for adjusting tilt of a lens so that the lens does not tilt relative to a lens frame. <P>SOLUTION: Illuminating light from a ring type light source 300 is radiated to a lens to be adjusted 23, an image of reflected light from an optical surface is received by a CCD, and a shifted amount of the image by eccentricity caused when the lens is titled is detected and converted into a tilt angle, then the tilt of the lens is corrected by using an actuator. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、光通信用レンズ、撮像系用レンズ及び光ディスク用レンズ等のレンズ傾き調整方法、及びレンズ傾き調整装置に関するものである。   The present invention relates to a lens tilt adjusting method and a lens tilt adjusting device such as an optical communication lens, an imaging system lens, and an optical disk lens.

光通信用レンズ等の光学素子のコンパクト化及び非球面レンズの多様化により、レンズを光学ユニットに組込む際に、厳密な位置決め調整精度が要求されている。特許文献１には、レンズ系を構成するレンズ間の偏心量を小さくするために、点光源からの光をレンズ系に透過させ、その点像の位置や形状を観察することで、レンズ間の偏心量を計測し、レンズ系の組立時に光軸調整を行うという方法と装置とが開示されている。
特開昭６０−１５００１６号公報 Due to the downsizing of optical elements such as optical communication lenses and the diversification of aspherical lenses, strict positioning adjustment accuracy is required when the lenses are incorporated into the optical unit. In Patent Document 1, in order to reduce the amount of decentration between lenses constituting a lens system, light from a point light source is transmitted through the lens system, and the position and shape of the point image are observed. A method and apparatus for measuring the amount of eccentricity and adjusting the optical axis when assembling a lens system are disclosed.
Japanese Patent Laid-Open No. 60-150016

しかし、特許文献１に開示されている技術を用いれば、レンズ系を構成するレンズ間の偏心量を少なく調整することはできるが、レンズを組込む鏡枠に対するレンズの傾斜角を調整することはできない。レンズは鏡枠ごと光学ユニットに組付調整される場合も多く、レンズが鏡枠に対して少なからず傾斜していると、光学ユニットの光軸に対してレンズが傾斜してしまい、所望の性能を有する光学ユニットを得ることができない。本発明は上記問題に鑑み、鏡枠に対してレンズが傾斜しないように調整できる調整方法及び調整装置を提供することを目的とするものである。   However, if the technique disclosed in Patent Document 1 is used, the amount of eccentricity between the lenses constituting the lens system can be adjusted to be small, but the tilt angle of the lens with respect to the lens frame in which the lens is incorporated cannot be adjusted. . The lens is often assembled and adjusted together with the lens frame in the optical unit. If the lens is tilted with respect to the lens frame, the lens tilts with respect to the optical axis of the optical unit, and the desired performance is achieved. It is not possible to obtain an optical unit having In view of the above problems, an object of the present invention is to provide an adjustment method and an adjustment device that can be adjusted so that a lens is not inclined with respect to a lens frame.

前述の目的は、下記に記載する発明により達成される。   The above object is achieved by the invention described below.

１．レンズと、該レンズを組込む鏡枠の基準平面とのなす傾きを調整するレンズ傾き調整方法であって、
発光面が円周状であるリング状光源からの照明光を、前記基準平面に照射し、前記基準平面からの第１の反射光を、結像系を通過させて、所定の位置に配置したセンサに受光させる工程と、
前記センサの出力から前記第１の反射光の重心位置を求める工程と、
前記鏡枠に前記レンズを組込んだ後、前記レンズの光学面からの第２の反射光を、前記結像系を通過させて、前記センサに受光させる工程と、
前記センサの出力から前記第２の反射光の重心位置を求める工程と、
前記第１の反射光の重心位置と前記第２の反射光の重心位置に基づいて前記レンズを傾斜させる工程と、
を含むことを特徴とするレンズ傾き調整方法。 1. A lens tilt adjustment method for adjusting a tilt between a lens and a reference plane of a lens frame in which the lens is incorporated,
Illumination light from a ring-shaped light source having a circumferential light emitting surface is irradiated to the reference plane, and the first reflected light from the reference plane is passed through the imaging system and arranged at a predetermined position. A step of causing the sensor to receive light;
Obtaining the position of the center of gravity of the first reflected light from the output of the sensor;
After incorporating the lens into the lens frame, passing the second reflected light from the optical surface of the lens through the imaging system and receiving the sensor;
Obtaining the position of the center of gravity of the second reflected light from the output of the sensor;
Tilting the lens based on the position of the center of gravity of the first reflected light and the position of the center of gravity of the second reflected light;
A method of adjusting the tilt of the lens.

２．レンズと、当該レンズを組込む鏡枠の基準平面とのなす傾きを調整するレンズ傾き調整装置であって、
発光面が円周状であるリング状光源からの照明光を投光する手段と、
前記リング状光源の内側に光軸を有する結像系と、
前記結像系によって結像された前記照明光を受光するセンサと、
前記センサの出力に基づいて、前記レンズを傾斜させる傾斜手段と、
を有することを特徴とするレンズ傾き調整装置。 2. A lens tilt adjusting device that adjusts a tilt between a lens and a reference plane of a lens frame in which the lens is incorporated,
Means for projecting illumination light from a ring-shaped light source having a circumferential light emitting surface;
An imaging system having an optical axis inside the ring-shaped light source;
A sensor for receiving the illumination light imaged by the imaging system;
Tilting means for tilting the lens based on the output of the sensor;
A lens tilt adjusting device comprising:

本発明によれば、鏡枠に対してレンズが傾斜しないように調整できる。これにより、鏡枠に組込まれたレンズを、光学ユニットへ組付調整する精度を向上でき、所望の性能を有する光学ユニットを提供することができる。   According to the present invention, the lens can be adjusted so as not to be inclined with respect to the lens frame. Thereby, the accuracy of assembling and adjusting the lens assembled in the lens frame to the optical unit can be improved, and an optical unit having desired performance can be provided.

本発明のレンズ傾き調整方法、及びそのレンズ傾き調整方法を実施するレンズ傾き調整装置の実施の形態を図面に基づいて説明するが、本発明は該実施の形態に限定されるものではない。   An embodiment of a lens tilt adjusting method and a lens tilt adjusting apparatus that performs the lens tilt adjusting method of the present invention will be described with reference to the drawings. However, the present invention is not limited to the embodiment.

最初に本発明に係るレンズ傾き調整装置５００の概略構成を図１に示し説明する。レンズ傾き調整装置５００は、リング状光源３００、光軸調整部１００、ＣＣＤ信号処理部７、画像処理部８、演算処理部９、表示部１０、駆動部１１、アクチュエータ１２、１３、紫外線露光装置１６などからなる。   First, a schematic configuration of a lens tilt adjusting apparatus 500 according to the present invention will be described with reference to FIG. The lens tilt adjustment device 500 includes a ring-shaped light source 300, an optical axis adjustment unit 100, a CCD signal processing unit 7, an image processing unit 8, an arithmetic processing unit 9, a display unit 10, a drive unit 11, actuators 12 and 13, and an ultraviolet exposure device. 16 or the like.

リング状光源３００は、発光面が円周状をなす光源である。図２（ａ）にリング状光源の光の照射面側から見た概略図を示す。照射面２１に点光源であるＬＥＤ（Ｌｉｇｈｔ ｅｍｉｔｔｅｄ Ｄｉｏｄｅ）を円周上に同一間隔で設けたタイプである。ＬＥＤの他に電球を用いてもよい。また、ＬＥＤ等のような点光源ではなく、ＥＬ（Ｅｌｅｃｔｒｏｎｉｃ Ｌｕｍｉｎｅｓｓｅｎｃｅ）発光体を円周状に連続に形成したタイプでもよい。   The ring-shaped light source 300 is a light source whose light emitting surface has a circumferential shape. FIG. 2A shows a schematic view seen from the light irradiation surface side of the ring-shaped light source. This is a type in which LEDs (Light Emitted Diodes), which are point light sources, are provided on the irradiation surface 21 at the same interval on the circumference. You may use a light bulb other than LED. Further, instead of a point light source such as an LED, a type in which EL (Electronic Luminescence) light emitters are continuously formed in a circumferential shape may be used.

同図（ｂ）にレンズを保持する光軸調整部１００を示す。光軸調整部１００は、中央にレンズを保持する凹状のスペースを備える。光軸調整部１００の材質としてはアルミなどの金属材料の他、テフロン（登録商標）などのプラスチック材料の採用が好ましい。特にテフロン（登録商標）はレンズ面を傷つけないのでより好ましい。図２（ｃ）に示すように、光軸調整部１００は、凹部にレンズの鏡枠２２と、その鏡枠に傾き調整する対象である被調整レンズ２３を組込む構造となっている。被調整レンズ２３の鏡枠２２は段差部２４に突き当てる状態で位置保持され、被調整レンズ２３は、底面２５に接触して位置保持される。段差部２４の底面２５からの高さは、各レンズのサイズに合わせて設定する。   FIG. 2B shows the optical axis adjustment unit 100 that holds the lens. The optical axis adjustment unit 100 includes a concave space that holds the lens in the center. As the material of the optical axis adjustment unit 100, it is preferable to use a metal material such as aluminum or a plastic material such as Teflon (registered trademark). In particular, Teflon (registered trademark) is more preferable because it does not damage the lens surface. As shown in FIG. 2C, the optical axis adjustment unit 100 has a structure in which a lens barrel 22 of a lens and a lens 23 to be adjusted that is an object of tilt adjustment are incorporated in the recess. The lens frame 22 of the lens 23 to be adjusted is held in a position where it abuts against the step portion 24, and the lens 23 to be adjusted is held in contact with the bottom surface 25. The height of the step portion 24 from the bottom surface 25 is set according to the size of each lens.

リング状光源３００からの光は、図１に示すように被調整レンズ２３を照射する。被調整レンズ２３のリング状光源３００側の面にはアクチュエータ１２、１３からプローブ１２１、１３１が伸ばされていて、被調整レンズ２３の表面に軽く接触している。   The light from the ring light source 300 irradiates the adjusted lens 23 as shown in FIG. Probes 121 and 131 are extended from the actuators 12 and 13 to the surface of the lens to be adjusted 23 on the ring-shaped light source 300 side, and lightly contact the surface of the lens to be adjusted 23.

演算処理部９が駆動部１１に指示し、例えばアクチュエータ１２を同図に示したＸＹＺ座標系におけるＹ方向のマイナス方向に移動させ、アクチュエータ１３をＹ方向のプラス方向に移動させることで、被調整レンズ２３は底面２５に接触するポイントを支持部として光軸調整部１００の凹部内で回転する構造となっている。なお、演算処理部９は、レンズ傾き調整装置５００の各部を統括的に制御する機能を有し、制御プログラムやデータ等を記憶するＲＯＭ、制御プログラムに従って演算等を実行するＣＰＵ、ＣＰＵがワークエリアとして利用するＲＡＭ、等から構成されている。   The arithmetic processing unit 9 instructs the drive unit 11 to move the actuator 12 in the negative direction of the Y direction in the XYZ coordinate system shown in the figure, and move the actuator 13 in the positive direction of the Y direction. The lens 23 has a structure that rotates in the concave portion of the optical axis adjustment unit 100 with a point contacting the bottom surface 25 as a support unit. The arithmetic processing unit 9 has a function of comprehensively controlling each part of the lens tilt adjusting device 500, a ROM that stores a control program, data, and the like, a CPU that executes arithmetic and the like according to the control program, and a CPU that has a work area. It is comprised from RAM etc. which are utilized as.

リング状光源３００からの光は被調整レンズ２３の光学面Ｓ１や、光学面Ｓ２で反射して結像レンズ１０１を通過して受光素子であるＣＣＤ（Ｃｈａｒｇｅ Ｃｏｕｐｌｅｄ Ｄｅｖｉｓｅ）１０２に入射する。結像レンズ１０１は、単レンズでもいいし、複数枚のレンズからなるレンズ系であってもよい。ＣＣＤ１０２の撮像面上では、被調整レンズ２３の光学面Ｓ１または光学面Ｓ２面で反射したリング状光源３００の像が写り込んでいる。リング状光源３００の像の形状は、ＣＣＤ１０２、結像レンズ１０１、リング状光源３００、被調整レンズ２３の位置関係、及び結像レンズ１０１の諸元設定に基づいて決定される。被調整レンズ２３の傾斜角を求めるに際し、使用者は傾斜角を求める対象として、光学面Ｓ１または光学面Ｓ２のどちらを選択してもよい。   Light from the ring-shaped light source 300 is reflected by the optical surface S1 of the lens 23 to be adjusted and the optical surface S2, passes through the imaging lens 101, and enters a CCD (Charge Coupled Device) 102 that is a light receiving element. The imaging lens 101 may be a single lens or a lens system including a plurality of lenses. On the imaging surface of the CCD 102, an image of the ring-shaped light source 300 reflected by the optical surface S1 or the optical surface S2 of the lens 23 to be adjusted is reflected. The shape of the image of the ring-shaped light source 300 is determined based on the positional relationship between the CCD 102, the imaging lens 101, the ring-shaped light source 300, the adjusted lens 23, and the specification settings of the imaging lens 101. When obtaining the inclination angle of the lens 23 to be adjusted, the user may select either the optical surface S1 or the optical surface S2 as an object for obtaining the inclination angle.

ＣＣＤ１０２からの出力信号は、ＣＣＤ信号処理部７へ送られ、ＣＣＤ信号処理部７は受光した像の光強度に相当するビデオ信号を発生させ、画像処理部８に送信する。画像処理部８においては、受信したビデオ信号を画像信号に変換する。なお、ＣＣＤ信号処理部７は、ＣＣＤ１０２内に設けても良いし、演算処理部９内に設けてもよい。画像信号はマイクロコンピューターから構成される演算処理部９に送信され、演算により、光強度の重心などを求める。   An output signal from the CCD 102 is sent to the CCD signal processing unit 7, which generates a video signal corresponding to the light intensity of the received image and transmits it to the image processing unit 8. The image processing unit 8 converts the received video signal into an image signal. The CCD signal processing unit 7 may be provided in the CCD 102 or may be provided in the arithmetic processing unit 9. The image signal is transmitted to an arithmetic processing unit 9 composed of a microcomputer, and the center of gravity of the light intensity is obtained by calculation.

重心を求める場合には、ＣＣＤ１０２のかわりにＰＳＤ（Ｐｏｓｉｔｉｏｎ Ｓｅｎｓｉｎｇ Ｄｅｔｅｃｔｏｒ）を用いても良い。その場合、画像処理部８のかわりにＰＳＤの出力信号を処理する信号処理部を用いる。   When obtaining the center of gravity, a PSD (Position Sensing Detector) may be used instead of the CCD 102. In this case, a signal processing unit that processes PSD output signals is used instead of the image processing unit 8.

演算処理部９は、得られたＣＣＤ１０２の出力信号に基づいて、後述の演算処理を施し被調整レンズ２３の傾斜角を算出し、傾斜角が許容値より大きいと、傾斜角が許容値内に収まるように駆動部１１にアクチュエータ１２、１３の移動を指示する。   The arithmetic processing unit 9 calculates the inclination angle of the lens 23 to be adjusted based on the obtained output signal of the CCD 102 and calculates the inclination angle of the lens 23 to be adjusted. If the inclination angle is larger than the allowable value, the inclination angle falls within the allowable value. The actuator 11 is instructed to move the actuators 12 and 13 so as to be within the range.

被調整レンズ２３の傾斜角が許容値より小さいと、傾斜角の調整は終了し、被調整レンズ２３と鏡枠２２とを固定する。   When the tilt angle of the lens 23 to be adjusted is smaller than the allowable value, the adjustment of the tilt angle is finished, and the lens 23 to be adjusted and the lens frame 22 are fixed.

被調整レンズ２３と鏡枠２２との固定は、図示しない紫外線硬化型接着剤塗布装置を用いて紫外線硬化型接着剤を鏡枠２２と被調整レンズ２３の間に肉盛り塗布した後に、紫外線露光装置１６から紫外線照射プローブ１７を通じて紫外線を照射させて紫外線硬化型接着剤を硬化させて行う。   The lens 23 to be adjusted and the lens frame 22 are fixed by applying an ultraviolet curing adhesive between the lens frame 22 and the lens to be adjusted 23 using an ultraviolet curing adhesive coating device (not shown), and then exposing the lens to the lens frame 22 with ultraviolet exposure. This is performed by irradiating ultraviolet rays from the device 16 through the ultraviolet irradiation probe 17 to cure the ultraviolet curable adhesive.

得られた画像や演算結果は表示部１０に表示する。なお、表示部１０には液晶ディスプレイやＣＲＴディスプレイを採用する。   The obtained image and calculation result are displayed on the display unit 10. The display unit 10 employs a liquid crystal display or a CRT display.

なお、紫外線照射プローブ１７は、レンズ傾き調整継続中には光軸調整部１００から離れて待避させている。レンズ傾き調整が完了すると、演算処理部９から与えられる信号による指示で図示しないアクチュエータにより光軸調整部１００の横に移動させる。   The ultraviolet irradiation probe 17 is moved away from the optical axis adjustment unit 100 while the lens tilt adjustment is continued. When the lens tilt adjustment is completed, it is moved to the side of the optical axis adjustment unit 100 by an actuator (not shown) according to an instruction by a signal given from the arithmetic processing unit 9.

次に被調整レンズ２３の傾斜角を検出する検出方法について詳細に説明する。本検出方法は、被調整レンズ２３が傾斜した際に生じる偏心の状態を求め、被調整レンズ２３の傾斜角を検出するものである。偏心と像の関係について図３を用いて説明する。   Next, a detection method for detecting the tilt angle of the lens 23 to be adjusted will be described in detail. In this detection method, the state of decentration that occurs when the adjusted lens 23 is tilted is obtained, and the tilt angle of the adjusted lens 23 is detected. The relationship between the eccentricity and the image will be described with reference to FIG.

物体３１から発した光はレンズ３２によって像３３として結像される。レンズ３２が光軸３５に直交する方向にある点線で示した位置３２ａに、偏心量ｚ１で偏心して移動すると、像３３は像３４へずれる。このとき、像３３の光強度の重心位置と、像３４の光強度の重心位置とずれ量は大まかにレンズ３２の偏心量ｚ１に対して像の倍率ｍを掛け合わせた値となる。従って、像の光強度の重心位置のずれ量を求めることができれば、レンズ３２の偏心量を逆算により求めることができる。なお、図３ではレンズ３２の透過光を用いて説明したが、同様に、レンズ３２の反射光の像の光強度の重心位置について、ずれ量を求めることができれば、レンズ３２の偏心量を求めることができることは言うまでもない。   Light emitted from the object 31 is formed as an image 33 by the lens 32. When the lens 32 moves to a position 32 a indicated by a dotted line in a direction orthogonal to the optical axis 35 with an eccentric amount z 1, the image 33 shifts to the image 34. At this time, the centroid position of the light intensity of the image 33 and the centroid position of the light intensity of the image 34 and the shift amount are roughly values obtained by multiplying the eccentric amount z1 of the lens 32 by the magnification m of the image. Therefore, if the amount of deviation of the center of gravity of the light intensity of the image can be obtained, the amount of eccentricity of the lens 32 can be obtained by back calculation. In FIG. 3, the light transmitted through the lens 32 has been described. Similarly, if the amount of deviation can be obtained for the position of the center of gravity of the image of the reflected light from the lens 32, the amount of eccentricity of the lens 32 is obtained. It goes without saying that it can be done.

一方、一般にレンズ３２の傾斜角とレンズ３２の偏心量とは所定の関係がある。レンズ３２の偏心量からレンズの傾斜角を求める方法について図４を用いて説明する。   On the other hand, in general, the inclination angle of the lens 32 and the amount of eccentricity of the lens 32 have a predetermined relationship. A method for obtaining the tilt angle of the lens from the amount of eccentricity of the lens 32 will be described with reference to FIG.

図４において、レンズ３２を、その一方の面Ｓ２の曲率中心Ｃ２を中心に回転させる様子を示す。Ｓ１面の曲率中心Ｃ１とＳ２面の曲率中心Ｃ２とは光軸３５上にある。Ｓ２面は略球面であるとすると、Ｓ２面の曲率中心を中心にレンズ３２を回転させると、Ｓ２面はＳ２面に沿って回転する。これに対し、レンズ３２のもう一方の光学面であるＳ１面の曲率中心Ｃ１はＳ２面の曲率中心と異なるので、レンズ３２の回転に伴って、曲率中心Ｃ１はずれ、ＣＣ１へ移動する。Ｓ１面は球面であるとすると、Ｓ１面が傾斜しても球面であることには変わりは無いので、Ｓ１面での反射光は、レンズ３２が横ずれした場合の挙動、すなわち偏心を生じた場合の挙動を示すこととなる。レンズ３２が光軸３５に対して偏心を生じると、像は横ずれを生じる。この様子を図５に示す。図５（ａ）、（ｂ）、（ｃ）において、図中上部にＣＣＤ１０２で得られた画像、図中下部に鏡枠２２に対してのレンズ３２の傾斜状況を示す。   FIG. 4 shows a state in which the lens 32 is rotated about the center of curvature C2 of one surface S2. The curvature center C1 of the S1 surface and the curvature center C2 of the S2 surface are on the optical axis 35. If the S2 surface is substantially spherical, when the lens 32 is rotated around the center of curvature of the S2 surface, the S2 surface rotates along the S2 surface. On the other hand, since the curvature center C1 of the S1 surface, which is the other optical surface of the lens 32, is different from the curvature center of the S2 surface, as the lens 32 rotates, the curvature center C1 shifts and moves to CC1. If the S1 surface is a spherical surface, the S1 surface is inclined even if the S1 surface is inclined. Therefore, the reflected light from the S1 surface has a behavior when the lens 32 is laterally displaced, that is, when eccentricity occurs. Will be shown. When the lens 32 is decentered with respect to the optical axis 35, the image is laterally shifted. This is shown in FIG. 5A, 5B, and 5C, an image obtained by the CCD 102 is shown in the upper part of the drawing, and the inclination state of the lens 32 with respect to the lens frame 22 is shown in the lower part of the drawing.

図５（ｂ）はレンズ３２が傾斜していない場合を示す。この時に、ＣＣＤ１０２で得られる画像には、ＣＣＤ視野３６に対してのリング状光源３００の像が現れる。この状態から図５（ａ）に示すようにＷ１の方向にレンズ３２を回転させると、偏心によりレンズ３２が横ずれを起こすので、リング状光源３００の像、すなわち、リング状光源３００の像の重心位置は、図中右にずれて観測される。次に、図５（ｃ）に示すように、Ｗ２の方向にレンズ３２を回転させると、偏心によりレンズ３２が逆方向に横ずれを起こすので、リング状光源３００の像、すなわち、リング状光源３００の像の重心位置は、図中左にずれて観測される。   FIG. 5B shows a case where the lens 32 is not inclined. At this time, an image of the ring-shaped light source 300 with respect to the CCD visual field 36 appears in the image obtained by the CCD 102. When the lens 32 is rotated in the direction of W1 from this state as shown in FIG. 5A, the lens 32 is laterally shifted due to the eccentricity, so that the center of gravity of the image of the ring light source 300, that is, the image of the ring light source 300 is obtained. The position is observed shifted to the right in the figure. Next, as shown in FIG. 5C, when the lens 32 is rotated in the direction of W2, the lens 32 is laterally shifted in the reverse direction due to the eccentricity, so that an image of the ring-shaped light source 300, that is, the ring-shaped light source 300 is obtained. The position of the center of gravity of the image is observed shifted to the left in the figure.

このように、レンズ３２が傾くと、光学面Ｓ１は偏心することとなり、その偏心の状態は、得られた画像から検出することができるので、検出した偏心の状態から、逆算してレンズ３２の傾斜角等を求めることができる。   As described above, when the lens 32 is tilted, the optical surface S1 is decentered, and the state of decentering can be detected from the obtained image. An inclination angle or the like can be obtained.

すなわち、ＣＣＤ１０２の画像から、リング状光源３００の像の重心位置のずれ方向を検出することで、レンズ３２の傾斜方向を検出でき、リング状光源３００の像の重心位置のずれ量を検出することで、レンズ３２の傾斜角を検出することができる。   That is, by detecting the shift direction of the center of gravity of the image of the ring-shaped light source 300 from the image of the CCD 102, the tilt direction of the lens 32 can be detected, and the shift amount of the center of gravity of the image of the ring-shaped light source 300 is detected. Thus, the tilt angle of the lens 32 can be detected.

次にレンズ傾き調整装置５００を用いて、本発明に係るレンズ傾き調整方法を実施するフローについて説明する。本フローは演算処理部９におけるプログラムからの指示で実行される。プログラムは演算処理部９における図示しないＲＯＭやＲＡＭに記憶されている。フローチャートを図６に示す。   Next, a flow for carrying out the lens tilt adjusting method according to the present invention using the lens tilt adjusting apparatus 500 will be described. This flow is executed by an instruction from a program in the arithmetic processing unit 9. The program is stored in a ROM or RAM (not shown) in the arithmetic processing unit 9. A flowchart is shown in FIG.

最初に、ステップＳ１０において、レンズ３２の光学面であるＳ１面からの反射光７４（第１の反射光７４とも称す）から、ＣＣＤ１０２上の基準を定める。そのために、図７（ａ）に示すように、鏡枠２２の鏡枠上面７１に基準ミラー７２を設置し、リング状光源３００からの第１の反射光７４を照射してＣＣＤ１０２で受光する。   First, in step S10, a reference on the CCD 102 is determined from the reflected light 74 (also referred to as first reflected light 74) from the S1 surface that is the optical surface of the lens 32. For this purpose, as shown in FIG. 7A, a reference mirror 72 is installed on the upper surface 71 of the lens frame 22, and the first reflected light 74 from the ring-shaped light source 300 is irradiated and received by the CCD 102.

第１の反射光７４は図７（ｂ）に示すように、結像レンズ１０１によってＣＣＤ１０２の撮像面上に結像される。ＣＣＤ１０２の撮像面上で結像された像Ｉ１とＣＣＤ視野３６の大きさの関係は、結像レンズ１０１、ＣＣＤ１０２及び基準面７３の位置関係と、結像レンズ１０１の倍率などの諸元によって決定される。ＣＣＤ１０２による像Ｉ１の解像度は、ＣＣＤ１０２の撮像面内の像Ｉ１の大きさに比例することから、第１の反射光７４の像Ｉ１を撮像面内に大きく捕らえるように結像レンズ１０１のパワーとＣＣＤ１０２等の位置を設定する。   The first reflected light 74 is imaged on the imaging surface of the CCD 102 by the imaging lens 101 as shown in FIG. The relationship between the size of the image I1 imaged on the imaging surface of the CCD 102 and the CCD visual field 36 is determined by the positional relationship between the imaging lens 101, the CCD 102 and the reference surface 73, and the specifications such as the magnification of the imaging lens 101. Is done. Since the resolution of the image I1 by the CCD 102 is proportional to the size of the image I1 in the imaging surface of the CCD 102, the power of the imaging lens 101 is set so that the image I1 of the first reflected light 74 is captured largely in the imaging surface. The position of the CCD 102 etc. is set.

ＣＣＤ１０２上では、図８に示すようにリング状光源３００の形状に相当する像Ｉ１が受光され、像Ｉ１の光強度の重心位置ｒ１を次のような方法で、演算処理部９のＣＰＵなどの制御手段を用いて求める。ＣＣＤ１０２は、同図に示したｘｙ座標系におけるｘ方向に６４０画素、ｙ方向に４８０画素を有するとする。位置（ｘ、ｙ）における画素の光強度の出力値をｐ（ｘ、ｙ）とし、ｒ１におけるｘ方向の光強度の重心位置をｒ１（ｘ）、ｙ方向の光強度の重心位置をｒ１（ｙ）とすると、各重心位置は次のように求められる。   On the CCD 102, as shown in FIG. 8, an image I1 corresponding to the shape of the ring-shaped light source 300 is received, and the center of gravity r1 of the light intensity of the image I1 is obtained by the following method using the CPU of the arithmetic processing unit 9 or the like. It calculates | requires using a control means. The CCD 102 has 640 pixels in the x direction and 480 pixels in the y direction in the xy coordinate system shown in FIG. The output value of the light intensity of the pixel at the position (x, y) is p (x, y), the centroid position of the light intensity in the x direction at r1 is r1 (x), and the centroid position of the light intensity in the y direction is r1 ( If y), the position of each center of gravity is obtained as follows.

ｒ１（ｘ）については、次式のように、各ｘ方向において、ｙが１から４８０までの全てのｐ（ｘ、ｙ）を足し合わせてｍｙ（ｘ）を得る。
ｍｙ（ｘ）＝ＳＵＭ（ｐ（ｘ、１）〜ｐ（ｘ、４８０））
次に、各ｍｙ（ｘ）を重みとしてｘ方向の重心座標ｒ１（ｘ）を求める。
ｒ１（ｘ）＝ＳＵＭ（ｍｙ（ｘ）×ｘ）／ＳＵＭ（ｍｙ（ｘ））
同様にｒ１（ｙ）については、最初に、次式のように、各ｙ方向において、ｘが１から６４０までの全てのｐ（ｘ、ｙ）を足し合わせてｍｘ（ｙ）を得る。
ｍｘ（ｙ）＝ＳＵＭ（ｐ（１、ｙ）〜ｐ（６４０、ｙ））
次に、各ｍｘ（ｙ）を重みとしてｙ方向の重心座標ｒ１（ｙ）を求める。
ｒ１（ｙ）＝ＳＵＭ（ｍｘ（ｙ）×ｙ）／ＳＵＭ（ｍｘ（ｙ））
２値画像を用いる場合、ｐ（ｘ、ｙ）は１または０の値となる。画素出力として８ビットの出力を用いると、ｐ（ｘ、ｙ）は０から２５５までの値を示すこととなる。なお、ＣＣＤ１０２の解像度を上げれば、ｒ１の検出精度も向上する。また、８ビットの出力よりも１６ビット、さらに３２ビットとビット数を上げることでも検出精度を向上させることができる。ＣＣＤ１０２の出力は環境温度によってバラつくため、時間平均をとるなどして検出値のバラツキを抑える。このような手法を用いて求めたｒ１は、演算処理部９に備えた図示しないＲＡＭ等に記憶させておく。 For r1 (x), as shown in the following equation, in each x direction, all p (x, y) from y 1 to 480 are added to obtain my (x).
my (x) = SUM (p (x, 1) to p (x, 480))
Next, the center-of-gravity coordinates r1 (x) in the x direction are obtained using each my (x) as a weight.
r1 (x) = SUM (my (x) × x) / SUM (my (x))
Similarly, for r1 (y), first, mx (y) is obtained by adding all p (x, y) from 1 to 640 in each y direction as shown in the following equation.
mx (y) = SUM (p (1, y) to p (640, y))
Next, the center-of-gravity coordinate r1 (y) in the y direction is obtained using each mx (y) as a weight.
r1 (y) = SUM (mx (y) × y) / SUM (mx (y))
When a binary image is used, p (x, y) has a value of 1 or 0. When an 8-bit output is used as the pixel output, p (x, y) indicates a value from 0 to 255. If the resolution of the CCD 102 is increased, the detection accuracy of r1 is also improved. The detection accuracy can also be improved by increasing the number of bits to 16 bits and 32 bits from the 8-bit output. Since the output of the CCD 102 varies depending on the environmental temperature, variations in detection values are suppressed by taking a time average. The r1 obtained using such a method is stored in a RAM (not shown) provided in the arithmetic processing unit 9.

次にステップＳ１１以降では、鏡枠２２に被調整レンズ２３を調整して接着し固定する工程に入る。ステップＳ１１においては、図９に示すように、被調整レンズ２３を鏡枠２２内に挿入してセットする。鏡枠２２の内側には予め図示しないディスペンサーを用いて紫外線硬化型接着剤を塗布しておいてもよいし、被調整レンズ２３を挿入後に被調整レンズ２３と鏡枠２２との接触部分に紫外線硬化型接着剤を図示しない冶具を用いて肉盛りして塗布してもよい。   In step S11 and subsequent steps, the process proceeds to a process of adjusting, adhering, and fixing the lens 23 to be adjusted to the lens frame 22. In step S11, as shown in FIG. 9, the lens 23 to be adjusted is inserted into the lens frame 22 and set. An ultraviolet curable adhesive may be applied to the inside of the lens frame 22 in advance using a dispenser (not shown), or ultraviolet light is applied to the contact portion between the lens to be adjusted 23 and the lens frame 22 after the lens to be adjusted 23 is inserted. You may build up and apply | coat a curable adhesive using the jig which is not shown in figure.

次に、ステップＳ１２においてレンズ３２からの反射光７５（第２の反射光７５とも称す）のＣＣＤ１０２の撮像面上での重心位置ｒ２を求める。   Next, in step S12, the gravity center position r2 of the reflected light 75 from the lens 32 (also referred to as the second reflected light 75) on the imaging surface of the CCD 102 is obtained.

ＣＣＤ１０２上では図１０に示すように円形の像（像Ｉ２と称す）が受光されるので、上記と同じ手法を用いて像Ｉ２の光強度の重心位置ｒ２を求める。   Since a circular image (referred to as an image I2) is received on the CCD 102 as shown in FIG. 10, the center of gravity position r2 of the light intensity of the image I2 is obtained using the same method as described above.

記憶しておいた像Ｉ１の重心位置ｒ１と像Ｉ２の重心位置ｒ２の画素上の距離を演算処理部が算出し、画素上の距離から第１の反射光７４の重心位置ｒ１と、第２の反射光７５の重心位置ｒ２の差、すなわち、重心位置ずれ量ｒ１２を求める。ｒ１２は次の式で求められる。
ｒ１２＝（（ｒ１（ｘ）−ｒ２（ｘ））２＋（ｒ１（ｙ）−ｒ２（ｙ））２）１／２
次にステップＳ１３において、得られた重心位置ずれ量ｒ１２から、レンズ偏心量を求める。まず、得られた重心位置ずれ量ｒ１２は画素換算の量であるので、１画素の大きさを考慮し、得られた重心位置ずれ量ｒ１２を実空間でのずれ量に変換する。実空間でのずれ量に変換した重心位置ずれ量ｒ１２は、レンズ偏心量に対して結像レンズ１０１の倍率分程大きくなっているので、レンズ偏心量は、実空間でのずれ量に変換した重心位置ずれ量ｒ１２を結像レンズ１０１の倍率で除するなどして得る。 The arithmetic processing unit calculates the distance on the pixel between the stored centroid position r1 of the image I1 and the centroid position r2 of the image I2, and calculates the centroid position r1 of the first reflected light 74 from the distance on the pixel and the second The difference between the centroid positions r2 of the reflected light 75, that is, the centroid position deviation r12 is obtained. r12 is obtained by the following equation.
r12 = ((r1 (x) −r2 (x)) 2 + (r1 (y) −r2 (y)) 2 ) 1/2
Next, in step S13, a lens decentering amount is obtained from the obtained center-of-gravity position shift amount r12. First, since the obtained center-of-gravity position shift amount r12 is a pixel-converted amount, the obtained center-of-gravity position shift amount r12 is converted into a shift amount in real space in consideration of the size of one pixel. Since the center-of-gravity position shift amount r12 converted into the shift amount in the real space is increased by the magnification of the imaging lens 101 with respect to the lens eccentric amount, the lens eccentricity is converted into the shift amount in the real space. It is obtained by dividing the center-of-gravity position shift amount r12 by the magnification of the imaging lens 101 or the like.

次に得られたレンズ偏心量から被調整レンズ２３の傾斜角を導き出す。レンズ偏心量から被調整レンズ２３の傾斜角を換算は、被調整レンズ２３の形状等の諸元から容易に行える。また、次のようにも導き出せる。最初に、予め被調整レンズ３２を一定の角度、アクチュエータ１２、１３を用いて実際に移動させる。次に、ＣＣＤ１０２上において形成されたｒ１とｒ２との画素間の画素間距離を求め、１画素相当のＣＣＤ１０２上の距離が実空間においてどれだけの距離に相当するかを算出する。   Next, the tilt angle of the adjusted lens 23 is derived from the obtained lens eccentricity. Conversion of the tilt angle of the lens 23 to be adjusted from the amount of lens decentration can be easily performed from various specifications such as the shape of the lens 23 to be adjusted. It can also be derived as follows. First, the lens 32 to be adjusted is actually moved in advance using the actuators 12 and 13 at a certain angle. Next, the inter-pixel distance between the pixels r1 and r2 formed on the CCD 102 is obtained, and the distance corresponding to one pixel on the CCD 102 is calculated in real space.

次にステップＳ１４において、被調整レンズ２３の傾斜角が許容値内の値であるどうかを演算処理部９が判断する。被調整レンズ２３の傾斜角が許容値内に収まっていれば、ステップＳ１６において、被調整レンズ２３に対し紫外線を照射させ、紫外線硬化型接着剤を硬化させる。この時、図９に示すように、光軸調整部１００から離れて待避させておいた紫外線露光装置１６を、図示しないアクチュエータを用いて光軸調整対象である被調整レンズ２３と鏡枠２２の横に移動させる。傾き調整後の状態で被調整レンズ２３を接着固定することが可能となる。所定時間経過後、紫外線露光装置１６の紫外線照射を止め、待避させて傾き調整と被調整レンズ２３の接着固定を終了する。   Next, in step S14, the arithmetic processing unit 9 determines whether or not the tilt angle of the lens 23 to be adjusted is a value within an allowable value. If the tilt angle of the lens 23 to be adjusted is within the allowable value, the UV light is irradiated to the lens 23 to be adjusted in step S16 to cure the UV curable adhesive. At this time, as shown in FIG. 9, the ultraviolet exposure device 16 that has been retracted away from the optical axis adjustment unit 100 is used to adjust the lens 23 and the lens frame 22 that are optical axis adjustment targets using an actuator (not shown). Move to the side. The lens 23 to be adjusted can be bonded and fixed in a state after the tilt adjustment. After a predetermined time has elapsed, the ultraviolet exposure of the ultraviolet exposure device 16 is stopped and retracted, and the tilt adjustment and the adhesion and fixing of the lens 23 to be adjusted are completed.

被調整レンズ２３の傾斜角が許容値内に収まっていなければ、再度傾き調整を行うためにステップＳ１５へ移って被調整レンズ２３を所定の角度を傾斜させて傾き調整を行う。なお、被調整レンズ２３を使用者が光軸調整部１００に初期設定した際には、被調整レンズ２３と鏡枠２２の鏡枠上面７１とは傾いている可能性が大きい。   If the tilt angle of the lens 23 to be adjusted is not within the allowable value, the process proceeds to step S15 to perform tilt adjustment again, and the tilt adjustment is performed by tilting the lens 23 to be adjusted by a predetermined angle. When the user initially sets the lens 23 to be adjusted to the optical axis adjustment unit 100, there is a high possibility that the lens 23 to be adjusted and the lens frame upper surface 71 of the lens frame 22 are inclined.

例えば図９に示すように、被調整レンズ２３が傾いている場合には、アクチュエータ１３を矢印９１の方向へ、アクチュエータ１２を矢印９２の方向へ移動させることで、被調整レンズ２３の傾斜角を小さくできる。以上のフローを繰り返して、被調整レンズ２３の傾斜角が許容値内に収まる実施する。   For example, as shown in FIG. 9, when the lens 23 to be adjusted is tilted, the tilt angle of the lens 23 to be adjusted is adjusted by moving the actuator 13 in the direction of the arrow 91 and the actuator 12 in the direction of the arrow 92. Can be small. The above flow is repeated, and the tilt angle of the lens 23 to be adjusted falls within an allowable value.

ところで、被調整レンズ２３を移動させるために動かしたアクチュエータ１２、１３の距離と、実際に被調整レンズ２３が動いた距離とが異なる場合がある。例えば、被調整レンズ２３を移動させるアクチュエータ１２、１３にバックラッシュやロストモーションを有している場合である。そのため、アクチュエータ１２、１３を一度駆動しただけでは、被調整レンズ２３の傾斜角が許容値内に収まらない場合がある。その場合はさらに同様の工程を繰り返して傾き調整を行う。なお、予めそのようなバックラッシュやロストモーションの量が判明している場合には、それらの量を考慮して被調整レンズ２３を移動させれば、１度のアクチュエータ１２、１３の駆動で許容値内に傾き調整できるので、バックラッシュやロストモーションの量を測定しておくことが望ましい。   By the way, the distance of the actuators 12 and 13 moved to move the adjusted lens 23 may be different from the distance actually moved by the adjusted lens 23. For example, this is a case where the actuators 12 and 13 that move the lens 23 to be adjusted have backlash or lost motion. For this reason, there is a case where the tilt angle of the lens 23 to be adjusted does not fall within the allowable value only by driving the actuators 12 and 13 once. In that case, the same process is repeated to adjust the tilt. If the amount of such backlash and lost motion is known in advance, it is acceptable to drive the actuators 12 and 13 once if the adjusted lens 23 is moved in consideration of these amounts. It is desirable to measure the amount of backlash and lost motion because the tilt can be adjusted within the value.

被調整レンズ２３を移動させるアクチュエータの種類としては、微調整と租調整とを併せ持つものが好適である。最初に所定の位置に速く移動させ、次に微調整することでレンズの精度よく位置決めする。アクチュエータはサーボモータ（図示せず）、パルスモータ（図示せず）、またはピエゾ素子などの動力で駆動する。   As the type of actuator that moves the lens 23 to be adjusted, one that has both fine adjustment and adjustment is suitable. First, the lens is moved quickly to a predetermined position, and then finely adjusted to position the lens with high accuracy. The actuator is driven by power such as a servo motor (not shown), a pulse motor (not shown), or a piezo element.

なお、像Ｉ１、像Ｉ２を表示部に表示させ、かつ、重心位置ｒ１、重心位置ｒ２を画像処理部８により算出させ、使用者が確認しながらアクチュエータ１２、１３を駆動して、紫外線露光装置１６を直接駆動するマニュアル操作も行うことができる。   In addition, the image I1 and the image I2 are displayed on the display unit, and the gravity center position r1 and the gravity center position r2 are calculated by the image processing unit 8, and the actuators 12 and 13 are driven while the user confirms the ultraviolet exposure apparatus. Manual operation for directly driving 16 can also be performed.

また、Ｓ２面はレンズの回転によって偏心しないものとして、被調整レンズ２３のＳ１面の反射光のみを検出して被調整レンズ２３の傾きの調整を行ったが、被調整レンズ２３の回転によりＳ２面も偏心する場合には、Ｓ２面の曲率中心のレンズ偏心量も合わせて測定し、Ｓ１面のレンズ偏心量からＳ２面のレンズ偏心量を差し引くことで、正確に被調整レンズ２３の傾斜角を検出でき、鏡枠２２に対する被調整レンズ２３の傾斜角をより精度よく補正して調整できる。   Further, it is assumed that the S2 surface is not decentered by the rotation of the lens, and only the reflected light of the S1 surface of the lens 23 to be adjusted is detected to adjust the tilt of the lens 23 to be adjusted. When the surface is also decentered, the lens eccentricity at the center of curvature of the S2 surface is also measured, and the lens eccentricity of the S2 surface is subtracted from the lens eccentricity of the S1 surface, so that the tilt angle of the adjusted lens 23 can be accurately determined. Can be detected, and the inclination angle of the lens 23 to be adjusted with respect to the lens frame 22 can be corrected and adjusted more accurately.

なおＳ１面は凹面を前提としたが、凸面でも同様にレンズ２３の傾斜角を調整することができる。凸面からの反射光をＣＣＤ１０２の撮像面上に結像させれば、レンズ偏心量と傾斜角は図３と図４を用いて説明した事情と同様であるからである。   Although the S1 surface is assumed to be a concave surface, the inclination angle of the lens 23 can be similarly adjusted even on a convex surface. This is because if the reflected light from the convex surface is imaged on the imaging surface of the CCD 102, the lens decentering amount and the inclination angle are the same as those described with reference to FIGS.

以上のように、鏡枠２２の基準面からの第１の反射光７４の像の光強度の重心位置ｒ１と、被調整レンズ２３の光学面からの第２の反射光７５の像の光強度の重心位置ｒ２とを合わせることで、鏡枠２２に対して被調整レンズ２３が傾斜しないように調整することができる。   As described above, the gravity center position r1 of the light intensity of the image of the first reflected light 74 from the reference surface of the lens frame 22 and the light intensity of the image of the second reflected light 75 from the optical surface of the lens 23 to be adjusted. By adjusting the center of gravity position r <b> 2, the lens 23 to be adjusted can be adjusted so as not to be inclined with respect to the lens frame 22.

本実施形態におけるレンズ傾き調整装置の概略構成図である。It is a schematic block diagram of the lens inclination adjustment apparatus in this embodiment. 本実施形態におけるリング状光源３００と光軸調整部の概略図である。It is the schematic of the ring-shaped light source 300 in this embodiment, and an optical axis adjustment part. レンズが軸ずれした際に、像が位置ずれすることを表す概念図である。It is a conceptual diagram showing that an image is displaced when the lens is off-axis. 本実施形態における被調整レンズ２３の傾斜と、曲率中心の横ずれを表す概念図である。It is a conceptual diagram showing the inclination of the to-be-adjusted lens 23 in this embodiment, and the lateral shift | offset | difference of the curvature center. 本実施形態における被調整レンズ２３の傾斜と、ＣＣＤ１０２上での像の関係を表す概念図である。It is a conceptual diagram showing the relationship between the inclination of the to-be-adjusted lens 23 in this embodiment, and the image on CCD102. 本実施形態におけるレンズ傾き調整方法のフローチャートである。It is a flowchart of the lens inclination adjustment method in this embodiment. 本実施形態におけるレンズ傾き調整過程の一部を示す概略図である。It is the schematic which shows a part of lens inclination adjustment process in this embodiment. 本実施形態におけるＣＣＤ１０２の撮像面上での像の概略図である。It is the schematic of the image on the imaging surface of CCD102 in this embodiment. 本実施形態におけるレンズ傾き調整過程の一部を示す概略図である。It is the schematic which shows a part of lens inclination adjustment process in this embodiment. 本実施形態におけるＣＣＤ１０２の撮像面上での像の概略図である。It is the schematic of the image on the imaging surface of CCD102 in this embodiment.

符号の説明Explanation of symbols

７ ＣＣＤ信号処理部
８ 画像処理部
１０ 表示部
１１ 駆動部
１２、１３ アクチュエータ
１６ 紫外線露光装置
１７ 紫外線照射プローブ
２１ 照射面
２２ 鏡枠
２３ 被調整レンズ
２４ 段差部
２５ 底面
３１ 物体
３２，１０１ レンズ
３３、３４ 像
３５ 光軸
３６ ＣＣＤ視野
７１ 鏡枠上面
７２ 基準ミラー
７３ 基準面
７４ 第１の反射光
７５ 第２の反射光
１００ 光軸調整部
１０２ ＣＣＤ
１２１、１３１ プローブ
３００ リング状光源
５００ 調整装置 7 CCD signal processing unit 8 Image processing unit 10 Display unit 11 Drive unit 12, 13 Actuator 16 Ultraviolet exposure device 17 Ultraviolet irradiation probe 21 Irradiation surface 22 Mirror frame 23 Lens to be adjusted 24 Stepped portion 25 Bottom surface 31 Object 32, 101 Lens 33, 34 Image 35 Optical axis 36 CCD field of view 71 Upper surface of mirror frame 72 Reference mirror 73 Reference surface 74 First reflected light 75 Second reflected light 100 Optical axis adjustment unit 102 CCD
121, 131 Probe 300 Ring-shaped light source 500 Adjustment device

Claims (2)

レンズと、該レンズを組込む鏡枠の基準平面とのなす傾きを調整するレンズ傾き調整方法であって、
発光面が円周状であるリング状光源からの照明光を、前記基準平面に照射し、前記基準平面からの第１の反射光を、結像系を通過させて、所定の位置に配置したセンサに受光させる工程と、
前記センサの出力から前記第１の反射光の重心位置を求める工程と、
前記鏡枠に前記レンズを組込んだ後、前記レンズの光学面からの第２の反射光を、前記結像系を通過させて、前記センサに受光させる工程と、
前記センサの出力から前記第２の反射光の重心位置を求める工程と、
前記第１の反射光の重心位置と前記第２の反射光の重心位置に基づいて前記レンズを傾斜させる工程と、
を含むことを特徴とするレンズ傾き調整方法。 A lens tilt adjustment method for adjusting a tilt between a lens and a reference plane of a lens frame in which the lens is incorporated,
Illumination light from a ring-shaped light source having a circumferential light emitting surface is irradiated onto the reference plane, and the first reflected light from the reference plane is passed through the imaging system and arranged at a predetermined position. A step of causing the sensor to receive light;
Obtaining the position of the center of gravity of the first reflected light from the output of the sensor;
After incorporating the lens into the lens frame, passing the second reflected light from the optical surface of the lens through the imaging system and receiving the sensor;
Obtaining the position of the center of gravity of the second reflected light from the output of the sensor;
Tilting the lens based on the position of the center of gravity of the first reflected light and the position of the center of gravity of the second reflected light;
A method of adjusting the tilt of the lens. レンズと、当該レンズを組込む鏡枠の基準平面とのなす傾きを調整するレンズ傾き調整装置であって、
発光面が円周状であるリング状光源からの照明光を投光する手段と、
前記リング状光源の内側に光軸を有する結像系と、
前記結像系によって結像された前記照明光を受光するセンサと、
前記センサの出力に基づいて、前記レンズを傾斜させる傾斜手段と、
を有することを特徴とするレンズ傾き調整装置。 A lens tilt adjusting device that adjusts a tilt between a lens and a reference plane of a lens frame in which the lens is incorporated,
Means for projecting illumination light from a ring-shaped light source having a circumferential light emitting surface;
An imaging system having an optical axis inside the ring-shaped light source;
A sensor for receiving the illumination light imaged by the imaging system;
Tilting means for tilting the lens based on the output of the sensor;
A lens tilt adjusting device comprising:
JP2008217936A 2008-08-27 2008-08-27 Method and device for adjusting tilt of lens Pending JP2010054677A (en)

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