JP2010052758A - Lid sealing structure for airtight container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lid sealing structure for an airtight container for easily mounting a lid on the container without spoiling the sealing characteristic of the structure even if the lid is mounted on the container somewhat imperfectly. <P>SOLUTION: This seal structure, provided with an elastic seal member 14 to be mounted between a container body and a lid, is recedingly formed with an engagement groove 13B for fitting the seal member 14 either on the opening end 12B of the container body or on the outer peripheral part 13A of the lid mutually facing in the mounting/dismounting direction of the lid in closing the lid. The seal member 14 to be fitted in the groove 13B is provided with a body 14A which is fitted in the groove 13B and whose front in the fitting direction is tapered and a tongue piece 14B extended from the back side in the fitting direction of the body 14A and is curved toward the outer peripheral side of the opening. A pair of facing groove side walls 13Ba, 13Bb structuring the groove 13B is provided with a rotary contacting part 14Aa held able to rotate and swing at the back in the fitting direction of the body 14A. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a lid sealing structure for an airtight container provided in an airtight container for transporting a semiconductor wafer or the like.

  2. Description of the Related Art Conventionally, a sealed container lid sealing structure provided in a sealed container for transporting a semiconductor wafer or the like is known (see, for example, Patent Document 1).

  In FIG. 6A, reference numeral 1 is a sealed container for housing a semiconductor wafer, reference numeral 2 is a container body of the sealed container 1, and reference numeral 3 is a lid of the sealed container 1.

  Around the opening 2 </ b> A of the container body 2, an opening end 2 </ b> B having a substantially cross-sectional shape that accepts the outer peripheral portion 3 </ b> A of the lid 3 is formed.

  As shown in FIG. 6B, the opening end 2B has a facing surface portion 2C, and when the opening 2A is closed by the lid 3, the facing surface 2C and the outer peripheral portion 3A of the lid 3 Are close to each other in the attaching / detaching direction of the lid 3.

  A fitting groove 3B is formed in an annular shape on the facing surface portion 2C side of the outer peripheral portion 3A, and a seal member 4 is fitted and mounted in the fitting groove 3B.

  The seal member 4 is formed of elastic rubber or the like, and has an annular shape as a whole as shown in FIG.

  As shown in FIG. 6B, the seal member 4 includes a main body portion 4A that is inserted into the fitting groove 3B and a lip portion 4B that extends from the rear side in the insertion direction of the main body portion 4A.

  The main body portion 4A of the seal member 4 has a substantially isosceles trapezoidal shape when viewed in the cross-section in the extending direction (AA cross section in FIG. 6A), and the lip portion 4B faces the outer peripheral side of the opening 2A. Is curved.

  The cross-sectional outer shape of the main body portion 4A substantially matches the inner cross-sectional shape of the fitting groove 3B, and when the main body portion 4A is fitted into the fitting groove 3B, the main body portion 4A and the fitting groove 3B. Is almost in a close contact state.

  The lip portion 4B has an upper lip portion 4Ba that is in contact with the lower end surface 3Bc of the outer peripheral portion 3A, and a lower lip portion 4Bb that is in contact with the opposing surface portion 2C of the opening end portion 2B. 3 extends in two directions on both sides of the attaching / detaching direction.

And in the lid part sealing structure of the closed container of this conventional example, when the lid body 3 is attached to the container body 2 with the sealing member 4 attached to the fitting groove 3B, the upper lip part 4Ba abuts on the lower end surface 3Bc, The lower lip portion 4Bb is pressed forward by the facing surface portion 2C in the insertion direction, and the gap between the container body 2 and the lid body 3 is sealed by the seal member 4.
JP 2007-62804 A

  By the way, in the lid seal structure of the sealed container of the conventional example, as shown in FIG. 7A, the main body 4A of the seal member 4 is not sufficiently fitted to the proper mounting position in the fitting groove 3B, and the seal When the attachment of the member 4 to the lid 3 is incomplete, as shown in FIG. 7B, when the lid 3 is attached to the open end 2B of the container body 2, the lip 4B is attached to the body. Since the lower lip portion 4Bb of the lip portion 4B is pressed forward in the insertion direction by the facing surface portion 2C, the seal member 4 is inclined, and the main body portion 4A is fitted into the fitting groove 3B. Is caught on the groove side walls 3Ba, 3Bb.

  Accordingly, when the lid 3 is mounted on the container body 2, even if the lower lip 4Bb of the lip 4B is pressed forward in the insertion direction by the facing surface 2C, the main body 4A of the seal member 4 reaches the proper mounting position. It will not be inserted.

  As described above, when the fitting of the main body portion 4A into the fitting groove 3B is incomplete, the lip portion 4B protrudes more than necessary from the mounting direction of the lid body 3 to the rear side in the fitting direction. When attached to the open end 2B of the main body 2, the tip of the lip 4B bends more than necessary, and as the lid 3 is repeatedly attached and detached, the tip of the lip 4B is bent and a sealing member is attached. There was a problem that the sealing performance of No. 4 was impaired.

  Accordingly, the present invention provides a lid sealing structure for a hermetic container that is easy to attach to a hermetic container and that does not impair the sealing performance even if the hermeticity of the hermetic container is somewhat incomplete. Is an issue.

  In order to achieve the above object, the invention described in claim 1 is a container main body of an airtight container for storing a semiconductor wafer and the like, and a lid that is detachable from the container main body and closes the opening of the container main body. A lid sealing structure for a sealed container provided with an elastic seal member interposed therebetween, wherein the lids are opposed to each other in the attaching / detaching direction of the lid when the lid is closed, A fitting groove for fitting the seal member is recessed in either one of the outer peripheral part and the opening end of the container body, the seal member is fitted into the fitting groove, and the front side in the fitting direction is A pair of opposing members that have a tapered main body part and a tongue piece part that extends from the rear side in the insertion direction of the main body part and is curved on the outer peripheral side of the opening, and constitutes the fitting groove Rotating slidable contact portion that is rotatably and slidably held on the groove side wall Serial is characterized in lid seal structure of the sealed container is provided in the insertion direction rear portion of the main body portion.

  According to a second aspect of the present invention, there is provided an abutting portion that abuts the groove side wall at the upper portion of the rotating sliding contact portion to stop the rotation of the seal member and seals the inside of the fitting groove. It is characterized by the lid part sealing structure of the airtight container of Claim 1 currently formed.

  According to the first aspect of the present invention configured as described above, when the seal member is inserted into the fitting groove, the rotation sliding contact portion of the seal member is rotatable and slidable on the pair of groove side walls. In this state, when the tip of the tongue piece is pressed in the insertion direction, the main body of the seal member slides while rotating inside the fitting groove, and the initial insertion of the seal member Even if it is made in a state of being slightly inclined, the seal member is smoothly inserted to the proper mounting position without being caught by the groove side wall.

  Therefore, even if the cover member is closed in a state where the seal member is not sufficiently inserted, the seal member is pushed into the fitting groove by the pressing force of the opposed surface portion of the opening end portion that presses the tongue piece portion, and the seal member protrudes. The end is inserted until it abuts against the inner wall of the fitting groove.

  Thereby, like the sealing member of a prior art example, the problem that a tongue piece part protrudes from the mounting direction of a cover body more than needed, a bend, and a sealing performance is impaired can be eliminated.

  In addition, since the tongue piece is bent at the outer peripheral side of the opening, when the external air pressure becomes higher than the air pressure inside the sealed container, the tongue piece is further formed on the opposing surface portion at the contact portion with the opening end. It is pressed and the inflow of outside air is prevented.

  And, since the abutting end portion of the main body portion of the seal member is tapered, it is easy to insert when the main body portion is inserted into the fitting groove, and the abutting end portion is inserted in the fitting groove. Even after repeated opening and closing operations with the lid, the sealing member returns to its original state after releasing the pressure, and is difficult to bend, resulting in a long-term operation. The sealing performance is not impaired during use.

  According to a second aspect of the present invention, there is provided an abutting portion that abuts the groove side wall on the opening side of the upper portion of the rotating sliding contact portion to stop the rotation of the seal member and seal the inside of the fitting groove. Therefore, when the lid is closed, the seal member rotates inside the fitting groove, and the abutting portion abuts against the groove side wall of the fitting groove to seal the inside of the fitting groove. Excellent in properties.

  Next, this invention is demonstrated based on an Example.

<Constitution>
In FIG. 1A, reference numeral 11 is a sealed container for housing a semiconductor wafer, reference numeral 12 is a container body of the sealed container 11 mainly formed of polypropylene resin or polycarbonate resin, and reference numeral 13 is mainly formed of polycarbonate resin. It is a lid of the sealed container 11.

  As shown in FIG. 1B, an opening end 12 </ b> B having a substantially cross-sectional shape is formed around the opening 12 </ b> A of the container body 12 to receive the outer peripheral portion 13 </ b> A of the lid 13.

  The opening end portion 12B is formed with a facing surface portion 12C, and when the opening 12A is closed by the lid body 13, the facing surface portion 12C and the outer peripheral portion 13A of the lid body 13 are close to each other in the attaching / detaching direction of the lid body 13. And come to face each other.

  A fitting groove 13B is formed in an annular shape on the opposed surface portion 12C side of the outer peripheral portion 13A, and a seal member 14 is fitted and mounted in the fitting groove 13B.

  As shown in FIG. 1 (a), the sealed container 11 of the present embodiment is formed on both sides of the dial part 15A, the pair of hook parts 15B, and the open end part 12B of the container main body 12, respectively. Two sets of locking mechanisms 15 having the fitting holes 15C and 15C are provided.

  When the dial portion 15A is rotated, the end portions of the flange portions 15B and 15B extending from both sides of the dial portion 15A project from both sides of the lid body 13 in conjunction with the rotation of the dial portion 15A, and the fitting holes of the container body 12 It fits in 15C and 15C, respectively.

  At this time, the outer peripheral portion 13A of the lid body 13 is opposed to the opening end portion 12B by pressing the constituent walls of the fitting holes 15C and 15C rearward in the mounting direction of the lid body 13 by the tip portions of the flange portions 15B and 15B. It is configured to be pressed toward the surface portion 12C.

  Therefore, when the sealing member 14 is mounted in the fitting groove 13B of the lid 13 and the opening 12A of the container body 12 is closed by the lid 13 and locked by the lock mechanism 15, the tongue piece 14B of the sealing member 14 is The gap between the container body 12 and the lid body 13 is sealed by being pressed forward in the insertion direction by the facing surface portion 12C formed at the opening end portion 12B.

  The seal member 14 according to the present embodiment is formed of elastic rubber, thermoplastic elastomer (TPE), etc., and has a Shore A hardness of about 60 to 70, and FIG. As shown in FIG. 3, the whole has an annular shape.

  As shown in FIG. 2B, the seal member 14 is configured by a main body portion 14A that is fitted into the fitting groove 13B of the lid body 13 and a tongue piece portion 14B that extends from the rear side in the fitting direction of the main body portion 14A. ing.

  The main body portion 14A of the seal member 14 has a tapered shape on the front side in the insertion direction as a whole when viewed in a cross-section in the extending direction (C-C cross section in FIG. 2A), and the tongue piece portion 14B has an opening 12A. A curve is formed toward the outer peripheral side.

  The main body portion 14A of the seal member 14 includes a rotation sliding contact portion 14Aa formed on the rear side in the insertion direction, an abutting end portion 14Ab formed on the front side in the insertion direction, and an opening at the base end portion of the abutting end portion 14Ab. The contact portion 14Ac is formed on the 12A side.

  Convex shapes that are in contact with the pair of opposed groove side walls 13Ba and 13Bb and that are slidably contacted with the groove side walls 13Ba and 13Bb, on both sides of the rotation slidable contact part 14Aa. The sliding contact surfaces S1, S2 are formed.

  Since these slidable contact surfaces S1 and S2 are formed on a virtual circumferential line C centered on the point O of the seal member 14 shown in FIG. 2B, the rotational slidable contact portion 14Aa is fitted. It can be smoothly rotated around the point O inside the joint groove 13B.

  Accordingly, the rotational sliding contact portion 14Aa is rotatably and slidably held by the pair of groove side walls 13Ba and 13Bb.

  As shown in FIG. 3 (b) or FIG. 4 (b), when the seal member 14 is properly attached to the fitting groove 13B, the end wall of the abutting end portion 14Ab forms the fitting groove 13B. It comes into contact with 13Bc.

  When the tip of the tongue piece 14B is pressed forward into the insertion, the seal member 14 is moved into the fitting groove 13B, and the tip of the tongue piece 14B is directed toward the outer periphery of the opening 12A (FIG. 3B). ) In a counterclockwise direction), and rotates around the rotating sliding contact portion 14Aa.

  At this time, the contact portion 14Ac contacts the groove side wall 13Ba on the opening 12A side, restricts the amount of rotation of the main body portion 14A of the seal member 14, and is pressed against the groove side wall 13Ba. The gas flow is sealed.

  Further, the tongue piece 14B is configured by a tongue piece 14Ba and a thick portion 14Bb formed on the opening 12A side of the base portion of the tongue piece 14Ba, and the thick piece 14Bb has a rear end portion in the insertion direction. A pushing surface 14Bc is formed.

  When the lid 13 is mounted on the container main body 12 with the seal member 14 mounted in the fitting groove 13B, the tongue piece 14B comes into contact with the facing surface portion 12C and is pressed by the facing surface portion 12C in the fitting direction. A gap between the main body 12 and the lid body 13 is sealed by a seal member 14.

  As shown in FIG. 3B or FIG. 4B, in the lid sealing structure of the hermetic container of this embodiment, the opening 12A of the container body 12 is covered with the lid 13 and locked by the lock mechanism 15. When this is done, the tip of the tongue piece 14B of the seal member 14 is just in contact with the corner 12D of the opening end 12B.

<Function and effect>
As shown in FIG. 3A, when the seal member 14 is inserted into the fitting groove 13B, the rotation sliding contact portion 14Aa of the seal member 14 is rotatably and slidably held on the pair of groove side walls 13Ba and 13Bb. Therefore, as shown in FIG. 3B, when the tip of the tongue piece 14B is pressed in the insertion direction in this state, the main body 14A of the seal member 14 rotates around the inside of the fitting groove 13B. Even if the seal member 14 slides while moving and the initial insertion of the seal member 14 is slightly inclined, the seal member 14 is smoothly inserted to the normal mounting position without being caught by the groove side walls 13Ba and 13Bb.

  Therefore, as shown in FIG. 4A, even if the lid 13 is closed with the seal member 14 inserted insufficiently, the seal member 14 is opposed to the opening end 12B that presses the tongue piece 14B. It is pushed into the fitting groove 13B by the pressing force of 12C and is inserted until the abutting end portion 14Ab of the seal member 14 abuts against the inner wall 13Bc of the fitting groove 13B.

  Thereby, like the sealing member of a prior art example, the problem that the tongue piece part 14B protrudes from the mounting direction of the cover body 13 more than necessary, a bend and a seal | sticker property is impaired can be eliminated.

  In addition, since the tongue piece portion 14B is bent at the outer peripheral side of the opening 12A, when the external air pressure becomes higher than the air pressure inside the sealed container 11, the tongue piece portion 14B is brought into contact with the opening end portion 12B. Is further pressed by the facing surface portion 12C, and inflow of outside air is prevented.

  The main body portion 14A of the seal member 14 is tapered at the abutting end portion 14Ab. Therefore, the main body portion 14A is easily inserted when the main body portion 14A is inserted into the fitting groove 13B, and the abutting end portion 14Ab is fitted. Since it has an appropriate elasticity in the direction of insertion into the joint groove 13B, the sealing member 14 is restored to its original state after releasing the pressure by the elasticity of the abutting end portion 14Ab even by repeated opening and closing operations by the lid body 13. It is difficult to bend back and bend, and the sealing performance is not impaired even when used for a long time.

  In addition, since the contact portion 14Ac is formed on the opening 12A side of the upper portion of the rotational sliding contact portion 14Aa of the main body portion 14A, the seal member 14 rotates when the lid body 13 is closed, and the contact portion 14Ac is fitted. Since it abuts on the groove side wall 13Ba of the joint groove 13B and seals the inside of the fitting groove 13B, the sealing performance is excellent.

  Furthermore, since the thick portion 14Bb is formed on the inner side of the base end portion of the tongue piece 14Ba, the elasticity of the tongue piece portion 14B is adjusted by adjusting the thickness of the thick portion 14Bb. be able to.

  Moreover, since the pushing surface 14Bc is formed at the rear end portion in the insertion direction of the thick portion 14Bb, the sealing member 14 can be easily pushed in when the sealing member 14 is mounted on the lid body 13.

[Modification 1]
Next, the lid seal structure of the hermetic container of Modification 1 will be described with reference to FIG.

  In addition, about the code | symbol of drawing, the same code | symbol is attached | subjected to the same or equivalent part as the cover part seal structure of the airtight container of an Example.

  In FIG. 5A, reference numeral 14 has the same configuration as in the embodiment.

  However, as shown to Fig.5 (a), the point by which latching convex part 13Aa is formed in groove side wall 13Ba differs in this modification.

  The locking projection 13Aa is formed to bulge toward the opening 12A of the fitting groove 13B. When the seal member 14 is fitted, the locking projection 13Aa abuts against the abutting end portion 14Ab to restrict the rotation of the seal member 14 and When the mounting of the member 14 is completed, the sealing member 14 is brought into contact with the abutting end portion 14Ab to improve the sealing performance of the sealing member 14.

  The locking protrusion 13Aa may be retrofitted or formed integrally with the lid body 13.

  Since the other configurations and operational effects of the lid container sealing structure of the hermetic container of Modification 1 are the same as the configurations and operational effects of the respective portions of the seal member 14 according to the embodiment, the description thereof is omitted.

[Modification 2]
Next, the lid sealing structure of the hermetic container of Modification 2 will be described with reference to FIG.

  In addition, about the code | symbol of drawing, the same code | symbol is attached | subjected to the same or equivalent part as the cover part seal structure of the airtight container of an Example.

  In FIG. 5B, reference numeral 14 denotes a seal member according to the second modification.

  The contact portion 14Ac provided in the seal member 14 according to the embodiment is not provided in the seal member 14 according to this modification, and in this modification, a locking protrusion 13Aa is formed on the groove side wall 13Ba. ing.

  The locking projection 13Aa is formed to bulge toward the opening 12A of the fitting groove 13B. When the seal member 14 is fitted, the locking projection 13Aa abuts against the abutting end portion 14Ab to restrict the rotation of the seal member 14 and When the mounting of the member 14 is completed, the sealing member 14 is brought into contact with the abutting end portion 14Ab to improve the sealing performance of the sealing member 14.

  The locking protrusion 13Aa may be retrofitted or formed integrally with the lid body 13.

  Further, the seal member 14 of the present modification has a shape in which the tip end portion of the abutting end portion 14Ab is bifurcated in a cross-sectional view. In the present modification, the bifurcated shape causes the seal member 14 to extend in the extending direction side. This increases the flexibility of the abutting end portion 14Ab against the pressing from the direction.

  Thus, by increasing the flexibility of the abutting end portion 14Ab, the sealing performance of the sealing member 14 when the mounting of the sealing member 14 is completed is improved.

  Since the other configurations and functions and effects of the lid container sealing structure for the hermetic container of Modification 2 are the same as the configurations and functions and effects of the respective portions of the seal member 14 according to the embodiment, the description thereof is omitted.

  As mentioned above, although the Example of embodiment of this invention has been explained in full detail with reference to drawings, the concrete structure is not limited to this embodiment, and the design change of the grade which does not deviate from the summary of this invention Are included in the present invention.

  In addition, although the airtight container 11 which concerns on a present Example was a thing of the type by which the cover body 13 is fitted inside the opening edge part 12A of the container main body 12, even if fitting of a cover body is internal fitting, it is outside. Either can be used.

It is a figure which shows the airtight container which concerns on the cover part sealing structure of the airtight container of an Example, A figure (a) is a perspective view of the airtight container in the state with which the cover body was mounted | worn with the container main body, FIG. A perspective view and FIG. (C) are sectional drawings of the BB cross section of FIG. (A). It is a figure which shows the sealing member which concerns on the cover part sealing structure of the airtight container of a present Example, A figure (a) is a perspective view of the whole, A figure (b) is CC sectional drawing of a figure (a). It is an enlarged view of D section of Drawing 1 (b), Drawing (a) is a non-pressing state, and Drawing (b) is a figure of a pressing state. It is an enlarged view of D section of Drawing 1 (b), Drawing (a) is a non-pressing state, and Drawing (b) is a figure of a pressing state. FIG. 4 shows a case where the initial insertion of the seal member is insufficient. FIGS. 4A and 4B are cross-sectional views of the lid sealing structure of the hermetic container of Modification 1 and Modification 2, respectively. It is a figure which shows the cover part sealing structure of the airtight container which concerns on a prior art example, A figure (a) is an exploded perspective view of the container main body of a airtight container, a sealing member, and a cover body, FIG. It is sectional drawing of the AA cross section of the figure (a) of the mounted state. It is a figure which shows the problem of the cover part sealing structure of the airtight container which concerns on a prior art example, A of FIG. 6 (a) of the state which attached the cover part to the airtight container in the state in which the initial fitting of the sealing member is inadequate. It is sectional drawing of -A cross section, Comprising: A figure (a) is a non-pressing state, A figure (b) is a figure of a pressing state.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Sealed container 12 Container main body 12A Opening 12B Open end part 13 Cover body 13A Outer peripheral part 13B Fitting groove 13Ba, 13Bb Groove side wall 14 Seal member 14A Main body part 14Aa Rotating sliding contact part 14B Tongue piece part 14Ac Contact part

Claims (2)

A lid for a sealed container having an elastic seal member interposed between a container body of a sealed container for storing a semiconductor wafer and the like and a lid body that is detachably attached to the container body and closes an opening of the container body Part sealing structure,
Fitting for fitting the seal member into either one of the outer peripheral portion of the lid body and the open end of the container body that are opposed to each other in the attaching / detaching direction of the lid body when the lid body is closed. The groove is recessed,
The seal member is inserted into the fitting groove, and a main body having a tapered shape on the front side in the insertion direction, and a tongue extending from the rear side in the insertion direction of the main body and curved on the outer peripheral side of the opening One part, and
A rotating sliding contact portion that is rotatably and slidably held on a pair of opposed groove side walls that constitute the fitting groove is provided at a rear portion in the insertion direction of the main body portion. Sealing structure of the lid of the sealed container.   2. An abutting portion that abuts the groove side wall to stop the rotation of the seal member and seals the inside of the fitting groove is formed at the upper portion of the rotating sliding contact portion. The lid part sealing structure of the airtight container as described in 2.

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