JP2010051924A5 - - Google Patents
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- JP2010051924A5 JP2010051924A5 JP2008222083A JP2008222083A JP2010051924A5 JP 2010051924 A5 JP2010051924 A5 JP 2010051924A5 JP 2008222083 A JP2008222083 A JP 2008222083A JP 2008222083 A JP2008222083 A JP 2008222083A JP 2010051924 A5 JP2010051924 A5 JP 2010051924A5
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- imaging
- droplets
- droplet
- nozzle
- solution
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Claims (6)
前記ノズルから溶液を液滴として吐出させる駆動手段と、
撮像手段を備え、当該撮像手段が撮像した前記ノズルから吐出された飛翔中の液滴の画像に基づいて前記ノズルから吐出された前記液滴の量を測定する測定装置と、を有し、前記ノズルから前記液滴を吐出させて基板に塗布する溶液の塗布装置において、
前記撮像手段の撮像光学系中に、前記液滴の吐出方向に沿う縦方向の倍率よりも該縦方向に直交する横方向の倍率を大きくする変倍レンズを備えることを特徴とする溶液の塗布装置。 An application head with a nozzle ;
Driving means for ejecting droplets of a solution from the nozzle,
A measuring device that includes an imaging unit , and that measures the amount of the droplets ejected from the nozzles based on an image of droplets in flight ejected from the nozzles imaged by the imaging unit , In a solution application apparatus for discharging the droplets from a nozzle and applying the droplets to a substrate ,
During the imaging optical system of the imaging means, the coating of the solution, characterized in that it comprises a variable power lens to increase the lateral magnification perpendicular to said longitudinal direction than the longitudinal direction of the magnification along the ejection direction of the droplet apparatus.
前記検査手段が求めた前記液滴の面積に基づいて前記駆動手段を制御し、前記ノズルからの吐出量を制御する制御手段をさらに有することを特徴とする請求項１に記載の溶液の塗布装置。 The measuring apparatus includes an inspection unit that obtains an area of the droplet based on an image of the droplet captured by the imaging unit,
Controlling said drive means based on the area of the droplets the inspection means is determined, a solution of a coating apparatus according to claim 1, characterized by further comprising control means for controlling the discharge amount from the nozzle .
前記ノズルから吐出された飛翔中の前記液滴を撮像手段により撮像する撮像工程と、
前記撮像手段が撮像した前記液滴の画像に基づいて前記ノズルから吐出された前記液滴の量を測定する測定工程と、を有し、
前記撮像工程においては、前記液滴の吐出方向に沿う縦方向の倍率よりも該縦方向に直交する横方向の倍率が大きくなるように撮像することを特徴とする溶液の塗布方法。 From a nozzle of the coating head The solution was ejected as droplets in the coating method of the solution applied onto the substrate,
An imaging step of imaging by the imaging means the droplets in flight discharged from the nozzle,
Anda step of measuring the amount of the droplets discharged from the nozzle based on the image of the droplet in which the imaging means has captured,
In the imaging step, imaging is performed so that the lateral magnification orthogonal to the vertical direction is larger than the vertical magnification along the droplet discharge direction.
前記測定工程にて求めた前記液滴の面積に基づいて前記ノズルからの吐出量を制御する制御工程をさらに有することを特徴とする請求項４に記載の溶液の塗布方法。 In the measurement step, the area of the droplet is determined as the amount of the droplet based on the image of the droplet imaged by the imaging unit,
5. The solution coating method according to claim 4, further comprising a control step of controlling a discharge amount from the nozzle based on the area of the droplet obtained in the measurement step .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008222083A JP5268502B2 (en) | 2008-08-29 | 2008-08-29 | Solution coating apparatus and coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008222083A JP5268502B2 (en) | 2008-08-29 | 2008-08-29 | Solution coating apparatus and coating method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010051924A JP2010051924A (en) | 2010-03-11 |
| JP2010051924A5 true JP2010051924A5 (en) | 2011-10-20 |
| JP5268502B2 JP5268502B2 (en) | 2013-08-21 |
Family
ID=42068415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008222083A Active JP5268502B2 (en) | 2008-08-29 | 2008-08-29 | Solution coating apparatus and coating method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5268502B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114964066B (en) * | 2022-08-02 | 2022-11-25 | 深圳市海清视讯科技有限公司 | Measuring device and screening system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04203912A (en) * | 1990-11-29 | 1992-07-24 | Matsushita Electric Ind Co Ltd | Inputting apparatus of three-dimensional image |
| JP4659345B2 (en) * | 2003-07-25 | 2011-03-30 | 芝浦メカトロニクス株式会社 | Coating apparatus and coating method |
-
2008
- 2008-08-29 JP JP2008222083A patent/JP5268502B2/en active Active
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