JP2009095740A5 - - Google Patents

Claims (10)

Moving the substrate placed on the stage in the main scanning direction, ejecting the functional liquid from the nozzles of the droplet discharge head and a droplet, the droplet discharge amount adjustment method of a pattern formation apparatus that forms a pattern on the substrate In
Wherein the stage and parallel, provided the ejection receiving medium that move independently in the main scanning direction and the stage,
Wherein while passing directly below the ejection receiving medium the liquid droplet ejection head, by ejecting droplets from the nozzles of the droplet discharge head, landed the droplets from each nozzle in the ejection receiving medium,
Drying the droplets that have landed on the target medium,
The residue of the droplets of each nozzle that has landed and dried on the medium to be ejected is imaged with an imaging device,
Based on the image data of the residue of the droplets of each nozzle imaged by the imaging device, the landing diameter of the droplets of each nozzle is measured,
Based on the measured landing diameter of the residue of the droplets of each nozzle, determine the discharge weight of the droplets of each nozzle,
Based on the determined droplet discharge weight of each nozzle, the driving force of the drive element of each nozzle is adjusted so that the droplet discharge weight of each nozzle becomes a predetermined value. droplet discharge amount adjusting how to characterized by driving the driving elements of the respective nozzles in adjusted driving force. The droplet ejection rate adjustment method according to claim 1,
The solution based on the impact diameter of the residue drops seeking landing area of the residues, the droplet discharge amount adjusting how to and obtains the discharge weight of the liquid droplets from the determined landing area was. The droplet ejection rate adjustment method according to claim 1,
It obtains the volume of the residue on the basis of the impact diameter of residues of the droplet, the droplet discharge amount adjusting how to and obtains the discharge weight of the liquid droplets from the determined volume. The droplet ejection rate adjustment method according to any one of claims 1 to 3,
Wherein each nozzle prior SL to the ejection medium, the liquid droplet ejection rate adjustment method you characterized by ejecting a drop of liquid droplets. The droplet ejection rate adjustment method according to any one of claims 1 to 3,
Wherein each nozzle prior SL to the ejection medium, the liquid droplet ejection rate adjustment method you characterized by discharging a plurality of droplets. The droplet ejection rate adjustment method according to claim 4 or 5,
The ejection weight of the droplets ejected from each nozzle of each droplet ejection head is determined for each nozzle, and the driving force of the driving element is determined for each nozzle of each droplet ejection head based on the determined ejection weight. droplet discharge amount adjusting how to characterized in that adjusted. The droplet ejection rate adjustment method according to claim 4 or 5,
An average value of the discharge weight of the droplets discharged from all nozzles of each droplet discharge head is obtained for each droplet discharge head, and each of the droplet discharge heads is determined based on the obtained average value of the discharge weight. droplet discharge amount adjusting how to characterized in that to adjust the driving force of the driving element of the nozzle. The droplet ejection rate adjustment method according to any one of claims 1 to 7,
Driving force of the driving element, the droplet discharge amount adjusting how to characterized in that it is adjusted immediately prior to forming the pattern on the substrate. In the droplet discharge amount adjustment method according to any one of claims 1 to 8,
The ejection receiving medium is a liquid droplet discharge amount adjusting how to being a glass substrate. With reciprocally moves in the main scanning direction, a stage for mounting the substrate,
And the liquid droplet ejection head,
Ejecting droplets from a nozzle by driving controls each driving element of the liquid drop ejecting head, and a control means for drawing a pattern,
While moving the stage in the main scanning direction, on the substrate, in a pattern forming apparatus for drawing a predetermined pattern on the basis of the drawing image data,
A discharge medium that is arranged in parallel with the stage and moves in the main scanning direction independently of the stage ;
Before SL by heating the ejection receiving medium, a heating means for drying the ejected onto the ejection receiving medium droplet,
An imaging device that images the residue of the droplets discharged to the discharge medium and dried by the heating unit;
A weight calculating unit that performs image processing on an image captured by the imaging device and calculates a discharge weight of the droplet;
Based on the discharge weight of the droplets calculated by the weight calculation means, the driving force of each driving element is calculated so that the discharge weight of the droplets discharged from each nozzle becomes a predetermined value, Driving force calculating means for outputting the calculated driving force to the control means;
A pattern forming apparatus comprising: