JP2006126790A - Liquid crystal application device - Google Patents

Liquid crystal application device Download PDF

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JP2006126790A
JP2006126790A JP2005216018A JP2005216018A JP2006126790A JP 2006126790 A JP2006126790 A JP 2006126790A JP 2005216018 A JP2005216018 A JP 2005216018A JP 2005216018 A JP2005216018 A JP 2005216018A JP 2006126790 A JP2006126790 A JP 2006126790A
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liquid crystal
stage
substrate
camera
unit
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Sung-Jin Lee
成進 李
Koei Park
光榮 朴
▲サン▼佑 ▲ペ▼
Sanyu Pe
Shunko Ri
俊昊 李
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • G02F1/13415Drop filling process

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inkjet type liquid crystal application device with which application is uniformly and accurately controlled over an entire substrate while the liquid crystal is quickly applied. <P>SOLUTION: In relation to the device to apply the liquid crystal to the substrate in the LCD manufacturing process, the device has a stage 110 to support the substrate, a head portion 130 to apply the liquid crystal to the substrate on the stage while moving relative to the stage, and a driving portion 140 to make the stage and the head portion move relative to each other. The liquid crystal application device is characterized by including an image pickup unit 133 to pick up an image of the state of the liquid crystal applied with the head portion, and a control portion 150 to judge suitability of the liquid crystal application based on the image picked up with the image pickup unit and to control the driving portion so as to adjust the speed of the relative motion based on the judgement of the suitability. Thereby, the transfer speed of the liquid crystal on the liquid crystal application is adjusted, based on the judgement of the suitability of the liquid crystal application. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、LCD製造工程において、基板上に液晶を塗布する装置に係り、特に塗布される液晶の適否を判断して液晶塗布の移送速度を調節することができる液晶塗布装置に関する。   The present invention relates to an apparatus for applying a liquid crystal on a substrate in an LCD manufacturing process, and more particularly to a liquid crystal application apparatus that can determine the suitability of liquid crystal to be applied and adjust the transfer speed of the liquid crystal application.

一般に、LCD(Liquid Crystal Display)の組立は、図1に示すように、TFT(Thin Film Transistor)のような駆動回路が形成された下部基板10と、カラーフィルターが形成された上部基板20とを接合して完成する。この過程で、下部基板10上には液晶11を滴下し、上部基板20の枠組み部にはシーリング材21を塗布し、基板10、20の接合時にこれを固定して液晶の漏れを防止する。   In general, as shown in FIG. 1, an LCD (Liquid Crystal Display) is assembled by a lower substrate 10 on which a drive circuit such as a TFT (Thin Film Transistor) is formed and an upper substrate 20 on which a color filter is formed. Join and complete. In this process, the liquid crystal 11 is dropped on the lower substrate 10, and a sealing material 21 is applied to the frame portion of the upper substrate 20, and is fixed when the substrates 10 and 20 are joined to prevent liquid crystal leakage.

ここで、液晶の滴下は、液晶滴下装置によって行われてきた。つまり、図2に示すように下部基板10の上部に設置された液晶滴下装置30から一定の間隔で液晶11を滴状で滴下する。通常、液晶滴下装置30は固定されて一定の時間間隔で液晶11を滴下し、下部基板10が液晶滴下装置30の下方をX、Y方向に移送されながら液晶11が一定の間隔で配列されて滴下される。この場合、LCD基板の間の液晶層の厚さ調節は、液晶11の間隔を調節するか、又は液晶の1回の滴下量を調節することによって達成される。   Here, the dropping of the liquid crystal has been performed by a liquid crystal dropping device. That is, as shown in FIG. 2, the liquid crystal 11 is dropped in a drop shape from the liquid crystal dropping device 30 installed on the lower substrate 10 at a constant interval. Usually, the liquid crystal dropping device 30 is fixed and drops the liquid crystal 11 at a constant time interval, and the liquid crystal 11 is arranged at a constant interval while the lower substrate 10 is moved below the liquid crystal dropping device 30 in the X and Y directions. It is dripped. In this case, the adjustment of the thickness of the liquid crystal layer between the LCD substrates is achieved by adjusting the distance between the liquid crystals 11 or adjusting the amount of liquid crystal dropped once.

しかし、このような液晶滴下方式によれば、液晶11を液晶滴下装置30から毎回均一な量で滴下できないことによって、所望の厚さの液晶層を形成するのが困難であり、全体的な液晶の滴下量に過不足が発生して接合されたLCDに輝度上の問題が発生する場合があった。また、液晶を滴下した後、接合するまでの時間の間に液晶の周縁が蒸発して基板に染みが生じ、これによって接合された製品の不良発生率が高まるという問題があった。   However, according to such a liquid crystal dropping method, it is difficult to form a liquid crystal layer having a desired thickness because the liquid crystal 11 cannot be dropped from the liquid crystal dropping device 30 in a uniform amount every time. In some cases, the amount of dripping of the liquid crystal is excessive and insufficient, resulting in a luminance problem in the bonded LCD. In addition, there is a problem that the peripheral edge of the liquid crystal evaporates during the time until the liquid crystal is dropped after the liquid crystal is dropped and the substrate is stained, thereby increasing the defect occurrence rate of the bonded product.

このような問題を解決するために、特許文献1はインクジェット方式の液晶塗布方法を開示している。この方法によれば、図3に示すように、インクジェット装置40に具備された複数のノズルを通じて液晶が吐出される。つまり、インクジェット装置40の発振子(Resonator)41が一定の周波数の振動を発生させれば、発振子と連結された発振板42の振動によって、吐出部43から一定量の液晶44が基板10上に吐出される。これにより、液晶の塗布が速かに行われ、液晶が基板上に均等に分布するようにすることができるという長所がある。
米国特許出願公開第2002/167638号明細書
In order to solve such a problem, Patent Document 1 discloses an ink jet type liquid crystal coating method. According to this method, as shown in FIG. 3, the liquid crystal is discharged through the plurality of nozzles provided in the ink jet apparatus 40. In other words, if an oscillator (Resonator) 41 of the ink jet apparatus 40 generates a vibration having a constant frequency, a certain amount of liquid crystal 44 is discharged from the discharge portion 43 onto the substrate 10 by the vibration of the oscillation plate 42 connected to the oscillator. Discharged. Accordingly, there is an advantage that the liquid crystal is applied quickly and the liquid crystal can be evenly distributed on the substrate.
US Patent Application Publication No. 2002/167638

しかし、このようなインクジェット方式を利用する場合であっても、前記液晶滴下方式の場合と同様に基板に塗布される液晶量の制御が正確に行われず、液晶塗布量の過不足が発生するという問題があった。   However, even when using such an ink jet method, the amount of liquid crystal applied to the substrate is not accurately controlled as in the case of the liquid crystal dropping method, and the liquid crystal application amount is excessive or insufficient. There was a problem.

そこで、本発明の目的は、液晶の塗布が迅速でありながら、基板全体にかけて均一かつ正確な量で制御されるようにする、インクジェット方式の液晶塗布装置を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide an ink jet type liquid crystal coating apparatus capable of controlling liquid crystal coating in a uniform and accurate amount over the entire substrate while being rapidly applied.

前記目的を達成するために、本発明は、基板を支持するステージと、前記ステージと相対運動をしながら前記ステージ上の基板に液晶を塗布するヘッド部と、前記ステージと前記ヘッド部を相対運動させる駆動部とを含む液晶塗布装置において、前記ヘッド部によって塗布された液晶の状態を撮像する撮像装置と、前記撮像装置によって撮像されたイメージに基づいて前記塗布された液晶が適正であるか否かを判断し、前記適否の判断に基づいて前記相対運動の速度を調節するために前記駆動部を制御する制御部とを含むことを特徴とする液晶塗布装置を提供する。   In order to achieve the above object, the present invention provides a stage for supporting a substrate, a head part for applying liquid crystal to the substrate on the stage while moving relative to the stage, and a relative movement between the stage and the head part. In the liquid crystal coating apparatus including the driving unit, the imaging device that captures the state of the liquid crystal applied by the head unit, and whether or not the applied liquid crystal is appropriate based on the image captured by the imaging device And a control unit that controls the driving unit to adjust the speed of the relative motion based on the determination of suitability.

ここで、前記撮像装置は、前記ヘッド部に装着される第1カメラを含むことができる。   Here, the imaging device may include a first camera attached to the head unit.

また、前記撮像装置は、前記基板と平行に配置されて前記ステージにより支持され、テスト用液晶塗布が施されるパージプレート上に塗布される液晶の状態を撮像する第2カメラを含むこともできる。この時、前記ステージは、前記第2カメラと結合されて前記第2カメラが前記パージプレートに沿って往復移送できるようにする移送ガイドと、前記第2カメラの往復移送を駆動する駆動部とを含むこともできる。   The imaging device may include a second camera that is arranged in parallel with the substrate and supported by the stage, and that images the state of the liquid crystal applied on the purge plate on which the test liquid crystal application is performed. . At this time, the stage includes a transfer guide that is coupled to the second camera so that the second camera can reciprocate along the purge plate, and a drive unit that drives reciprocating transfer of the second camera. It can also be included.

以上、説明したように、本発明による液晶塗布装置によれば、液晶の塗布が迅速に行われるだけでなく、基板全体にかけて均一かつ正確な量で制御されるようにすることができる。   As described above, according to the liquid crystal coating apparatus according to the present invention, liquid crystal can be applied not only quickly but also in a uniform and accurate amount over the entire substrate.

以下、添付図面を参照して、本発明について詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

本発明による液晶塗布装置の一実施例は、図4に示すように、基板1及び各構成部を支持するステージ110と、ステージ110上でスライドするガイド部120と、ガイド部120に結合して移送されながら基板1に液晶を塗布するヘッド部130と、ガイド部120を駆動させる駆動部140(図6参照)と、前記各部の動作を制御する制御部150(図6参照)とで構成される。   As shown in FIG. 4, one embodiment of the liquid crystal coating apparatus according to the present invention is coupled to a stage 110 that supports the substrate 1 and each component, a guide unit 120 that slides on the stage 110, and a guide unit 120. A head unit 130 that applies liquid crystal to the substrate 1 while being transferred, a drive unit 140 (see FIG. 6) that drives the guide unit 120, and a control unit 150 (see FIG. 6) that controls the operation of each unit. The

ガイド部120は、ビーム形状のY軸ガイド121と、Y軸ガイド121の両端部下部に固定結合された2つのX軸ガイド122とを備えている。X軸ガイド122はステージ110の両端部にX方向に形成された移送レール111上でスライドする。ヘッド部130のヘッドプレート131はY軸ガイド121にスライド結合され、Y軸ガイド121上でY方向に移送される。   The guide unit 120 includes a beam-shaped Y-axis guide 121 and two X-axis guides 122 fixedly coupled to lower portions of both ends of the Y-axis guide 121. The X-axis guide 122 slides on the transfer rail 111 formed in the X direction at both ends of the stage 110. The head plate 131 of the head unit 130 is slidably coupled to the Y-axis guide 121 and transferred in the Y direction on the Y-axis guide 121.

ヘッド部130は、Y軸ガイド121にスライド結合されたヘッドプレート131と、ヘッドプレート131の下端部に一列に固定配置された複数のインクジェット方式のジェットヘッド132と、各ジェットヘッド132の上部に具備された第1カメラ133とを備えている。   The head unit 130 includes a head plate 131 slidably coupled to the Y-axis guide 121, a plurality of inkjet jet heads 132 fixedly arranged in a row at the lower end of the head plate 131, and an upper portion of each jet head 132. The first camera 133 is provided.

ジェットヘッド132は、図5に示すように、液晶貯蔵タンク134からポンプ135及び供給ライン136を通じて充填される。それぞれのジェットヘッド132には256個のノズル(図示せず)が一列に配置されており、ジェットヘッド132の各ノズルは制御部150によって個別的に制御されて作動する。   As shown in FIG. 5, the jet head 132 is filled from the liquid crystal storage tank 134 through the pump 135 and the supply line 136. Each jet head 132 has 256 nozzles (not shown) arranged in a row, and each nozzle of the jet head 132 is individually controlled by the control unit 150 to operate.

また、ヘッド部130にはジェットヘッド132の液晶塗布状態をリアルタイムで測定するための複数の第1カメラ133が取り付けられている。第1カメラ133は撮像対象のジェットヘッド132のノズルから基板1に吐出された液晶を撮像する。第1カメラ133によって撮像された液晶の映像は、制御部150に伝送され(図6参照)、制御部150では第1カメラ133から受信された映像に基づいてジェットヘッド132の各ノズルを通じた液晶の吐出有無を判断する。実際に液晶が吐出されないノズルの検出は基板1上においてライン形態で観察される。   A plurality of first cameras 133 for measuring the liquid crystal application state of the jet head 132 in real time are attached to the head unit 130. The first camera 133 images the liquid crystal discharged from the nozzle of the jet head 132 to be imaged onto the substrate 1. The liquid crystal image captured by the first camera 133 is transmitted to the control unit 150 (see FIG. 6), and the control unit 150 transmits the liquid crystal through each nozzle of the jet head 132 based on the image received from the first camera 133. Whether or not to discharge is determined. Detection of nozzles that do not actually discharge liquid crystal is observed on the substrate 1 in line form.

制御部150は、前記液晶が吐出されないライン個数を判断し、一応塗布が完了した後、前記塗布されないライン部分に対して再塗布を施すようにする。つまり、液晶が吐出されなかったノズルに隣接する他のノズルを作動させてヘッド部130を回送させる。もし一つのジェットヘッド132に具備された全てのノズルが作動しない場合には、基板1上において帯状で観察され、この場合にはY軸ガイド121を駆動して、隣接するジェットヘッド132をY方向に所定量移動させた後、前記帯部分に液晶を噴射するようにする。   The controller 150 determines the number of lines on which the liquid crystal is not ejected, and after the application is completed, the controller 150 reapplies the non-applied line portion. That is, the head unit 130 is rotated by operating other nozzles adjacent to the nozzles from which the liquid crystal was not discharged. If all the nozzles provided in one jet head 132 do not operate, a belt-like shape is observed on the substrate 1. In this case, the Y-axis guide 121 is driven to move the adjacent jet head 132 in the Y direction. After a predetermined amount of movement, liquid crystal is jetted onto the band portion.

第1カメラ133は、ジェットヘッド121の設置個数と同じく複数台設置することもできるが、ジェットヘッド121の一つにのみ設置して使用することができ、第1カメラ125の作動上の便宜及び視野角確保のために水平(Y方向)及び垂直方向(Z方向)へ移送されるようにすることができる。   A plurality of the first cameras 133 can be installed in the same number as the number of jet heads 121 installed, but can be used by installing only one of the jet heads 121. In order to secure a viewing angle, the image can be transferred in the horizontal direction (Y direction) and the vertical direction (Z direction).

一方、ステージ110には基板1の一側部にパージプレート112が位置している。パージプレート112は液晶の試験吐出のためのものであって、液晶を基板1に塗布する前または塗布後、基板の交替時に吐出量をテストすることができるようにする。   On the other hand, a purge plate 112 is positioned on one side of the substrate 1 on the stage 110. The purge plate 112 is for test discharge of liquid crystal, and enables the discharge amount to be tested before or after applying the liquid crystal to the substrate 1 when the substrate is changed.

また、ステージ110は、パージプレート112を撮像することができるように第2カメラ113を更に備えており、この第2カメラ113がパージプレート112に沿って移動しながら撮像することができるように、移送ガイド114及び駆動手段(図示せず)が設けられている。ここで、第2カメラ113は、パージプレート112にテスト塗布される液晶の過不足及び吐出有無を測定して、ノズル噴射量及びヘッド部130の移送速度を計算するのに使用される。つまり、第2カメラ113を通じてパージプレート112上にテスト塗布された液晶の映像が制御部150に伝送されれば(図6参照)、制御部150は前記伝送された映像を通じて液晶量を計算する。制御部150には多様な液晶の吐出形態に対応する液晶量がデータベースとして備えられていて、前記伝送された映像を前記データベースとマッチングさせる方法によって液晶量の測定が行われる。   The stage 110 further includes a second camera 113 so that the purge plate 112 can be imaged. The second camera 113 can image while moving along the purge plate 112. A transfer guide 114 and drive means (not shown) are provided. Here, the second camera 113 is used to calculate the nozzle ejection amount and the transfer speed of the head unit 130 by measuring the excess and deficiency of the liquid crystal applied to the purge plate 112 and the presence or absence of ejection. That is, if the image of the liquid crystal test-applied on the purge plate 112 is transmitted to the control unit 150 through the second camera 113 (see FIG. 6), the control unit 150 calculates the amount of liquid crystal through the transmitted image. The controller 150 is provided with a liquid crystal amount corresponding to various liquid crystal ejection modes as a database, and the liquid crystal amount is measured by a method of matching the transmitted image with the database.

制御部150は、前記測定された液晶量と基板1上に塗布する総液晶量とを比較して、総液晶吐出個数を計算する。そして、前記総液晶吐出個数を総ノズル数で割って単位ノズル当り液晶吐出個数を計算する。一方、ノズルの単位時間当り液晶吐出個数は固定されているので、前記液晶吐出個数によってノズルの液晶吐出時間が計算され、結果的にヘッド部130の移送速度が計算される。   The controller 150 compares the measured amount of liquid crystal with the total amount of liquid crystal applied on the substrate 1 to calculate the total number of liquid crystal discharged. Then, the total number of liquid crystal discharged is divided by the total number of nozzles to calculate the number of liquid crystal discharged per unit nozzle. On the other hand, since the number of liquid crystal discharged per unit time of the nozzle is fixed, the liquid crystal discharge time of the nozzle is calculated based on the number of liquid crystal discharged, and as a result, the transfer speed of the head unit 130 is calculated.

ステージ部110には、ジェットヘッド132の洗浄のために、洗浄容器115とワイパー116とを更に備える。洗浄容器115には溶剤が入れられており、ジェットヘッド132のノズルが詰まったりジェットヘッド132に異物がついた場合、これを洗浄して除去する役割を果たし、ワイパー116は洗浄されたジェットヘッド132をふく役割を果たす。ワイパー116によるワイピング(wiping)は、ヘッド部130がワイパー上で進退する過程で行われる。   The stage unit 110 further includes a cleaning container 115 and a wiper 116 for cleaning the jet head 132. The cleaning container 115 is filled with a solvent, and when the nozzle of the jet head 132 is clogged or foreign matter is attached to the jet head 132, it plays a role of cleaning and removing this, and the wiper 116 is cleaned. Play a role. Wiping by the wiper 116 is performed while the head unit 130 moves back and forth on the wiper.

以上のような構成を有する液晶塗布装置の作動過程を例示すれば、次の通りである。   An example of the operation process of the liquid crystal coating apparatus having the above configuration is as follows.

まず、準備段階として、ヘッド部130をパージプレート112上に位置するようにして液晶をテスト塗布し、第2カメラ113が移送ガイド114に沿って移送されながら液晶の映像を撮像する。制御部150は第2カメラ113から受信された液晶のイメージに基づいて吐出された液晶量を測定した後、対象となる基板1に塗布される総液晶塗布量対比ヘッド部130の移送速度を計算し、駆動部140の制御信号を生成する。   First, as a preparation stage, the liquid crystal is test-coated with the head unit 130 positioned on the purge plate 112, and the liquid crystal image is captured while the second camera 113 is transported along the transport guide 114. The control unit 150 measures the amount of liquid crystal ejected based on the liquid crystal image received from the second camera 113 and then calculates the transfer speed of the total liquid crystal application amount comparison head unit 130 applied to the target substrate 1. Then, a control signal for the driving unit 140 is generated.

対象となる基板1がステージ110にローディングされれば、駆動部140は前記制御部150の制御信号によって一定の速度でヘッド部130を移送させながら液晶を塗布する。液晶の塗布過程で第1カメラ133がリアルタイムで塗布状態を撮像し、これを制御部150に送信して未塗布部分を測定し、ヘッド部130の回送時に前記未塗布部分には再度液晶塗布が施される。   When the target substrate 1 is loaded on the stage 110, the driving unit 140 applies liquid crystal while moving the head unit 130 at a constant speed according to a control signal from the control unit 150. During the application process of the liquid crystal, the first camera 133 images the application state in real time, transmits this to the control unit 150 to measure the unapplied part, and the liquid crystal application is again applied to the unapplied part when the head unit 130 is forwarded. Applied.

一方、ヘッド部130は、ローディングされる基板1の大きさによって複数のジェットヘッド121のうちの一部または全部を作動させるようにすることができ、ローディングされる基板1が複数である場合にはジェットヘッド121を部分別に作動するようにすることもできる。   On the other hand, the head unit 130 can operate some or all of the plurality of jet heads 121 depending on the size of the substrate 1 to be loaded. The jet head 121 can be operated part by part.

前記開示された本発明の一実施例では、ステージ110が固定され、ヘッド部130がステージ110上部で往復移送される構成に基づいて説明したが、ヘッド部130が固定され、ステージ110がヘッド部130の下方で移送される構成とすることもでき、かかる実施形態も本発明の開示範囲に含まれる。   In the disclosed embodiment of the present invention, the stage 110 is fixed and the head unit 130 is reciprocally transferred at the top of the stage 110. However, the head unit 130 is fixed and the stage 110 is the head unit. It can also be set as the structure transferred below 130, and such embodiment is also contained in the indication range of the present invention.

また、前記開示された液晶塗布装置には、ジェットヘッド132及び第1カメラ133を複数設けているが、各々一つずつ設けた場合も本発明の開示範囲に含まれる。この場合、ヘッド部130による液晶塗布は、インクジェットプリンタの印刷方式のように、前後移送(X方向)と共に左右移送(Y方向)が並行する塗布が行なわれる。   Further, the liquid crystal coating apparatus disclosed above is provided with a plurality of jet heads 132 and first cameras 133, but the case where one each is provided is also included in the disclosure scope of the present invention. In this case, the liquid crystal application by the head unit 130 is performed such that the front and rear transfer (X direction) and the left and right transfer (Y direction) are performed in parallel as in the printing method of the ink jet printer.

従来の基板接合工程を説明するための概念図である。It is a conceptual diagram for demonstrating the conventional board | substrate joining process. 従来の液晶滴下装置を説明するための概念図である。It is a conceptual diagram for demonstrating the conventional liquid crystal dropping apparatus. 従来のインクジェット方式の液晶塗布装置を説明するための概念図である。It is a conceptual diagram for demonstrating the conventional liquid crystal coating device of the inkjet system. 本発明の一実施例を示す斜視図である。It is a perspective view which shows one Example of this invention. 図4の液晶供給ラインを説明するための概略図である。It is the schematic for demonstrating the liquid-crystal supply line of FIG. 図4の制御関係を示すブロック図である。It is a block diagram which shows the control relationship of FIG.

符号の説明Explanation of symbols

1 基板
10 下部基板
11 液晶
20 上部基板
21 シーリング材
30 液晶滴下装置
40 インクジェット装置
42 発振板
43 吐出部
110 ステージ
111 移送レール
112 パージプレート
113 第2カメラ
114 移送ガイド
115 洗浄槽
116 ワイパー
120 ガイド部
121 Y軸ガイド
122 X軸ガイド
130 ヘッド部
131 ヘッドプレート
132 ジェットヘッド
133 第1カメラ
134 液晶貯蔵タンク
135 ポンプ
136 供給ライン
140 駆動部
150 制御部
DESCRIPTION OF SYMBOLS 1 Substrate 10 Lower substrate 11 Liquid crystal 20 Upper substrate 21 Sealing material 30 Liquid crystal dropping device 40 Inkjet device 42 Oscillating plate 43 Discharge unit 110 Stage 111 Transfer rail 112 Purge plate 113 Second camera 114 Transfer guide 115 Cleaning tank 116 Wiper 120 Guide unit 121 Y-axis guide 122 X-axis guide 130 Head part 131 Head plate 132 Jet head 133 First camera 134 Liquid crystal storage tank 135 Pump 136 Supply line 140 Drive part 150 Control part

Claims (5)

基板を支持するステージと、前記ステージと相対運動をしながら前記ステージ部上の基板に液晶を塗布するヘッド部と、前記ステージと前記ヘッド部を相対運動させる駆動部とを含む液晶塗布装置において、
前記ヘッド部によって塗布された液晶の状態を撮像する撮像装置と;
前記撮像装置によって撮像されたイメージに基づいて前記塗布された液晶が適正であるか否かを判断し、前記適否の判断に基づいて前記相対運動の速度を調節するために前記駆動部を制御する制御部とを含むことを特徴とする液晶塗布装置。
In a liquid crystal coating apparatus comprising: a stage that supports a substrate; a head unit that applies liquid crystal to the substrate on the stage unit while relatively moving with the stage; and a drive unit that relatively moves the stage and the head unit.
An imaging device for imaging the state of the liquid crystal applied by the head unit;
Based on the image picked up by the image pickup device, it is determined whether or not the applied liquid crystal is appropriate, and the drive unit is controlled to adjust the speed of the relative movement based on the determination of suitability. A liquid crystal coating apparatus comprising: a control unit.
前記撮像装置は、前記ヘッド部に装着される第1カメラを含むことを特徴とする、請求項1に記載の液晶塗布装置。   The liquid crystal coating apparatus according to claim 1, wherein the imaging device includes a first camera mounted on the head unit. 前記基板と平行に配置されて前記ステージにより支持され、テスト用液晶塗布が施されるパージプレートを更に含むことを特徴とする、請求項1または2に記載の液晶塗布装置。   The liquid crystal coating apparatus according to claim 1, further comprising a purge plate that is arranged in parallel with the substrate and is supported by the stage and to which a test liquid crystal coating is applied. 前記撮像装置は、前記ステージに装着され、前記パージプレートに塗布される液晶の状態を撮像する第2カメラを含むことを特徴とする、請求項3に記載の液晶塗布装置。   The liquid crystal coating apparatus according to claim 3, wherein the imaging apparatus includes a second camera that is mounted on the stage and images a state of liquid crystal applied to the purge plate. 前記ステージは、前記第2カメラと結合されて前記第2カメラが前記パージプレートに沿って往復移送できるようにする移送ガイドと、前記第2カメラの往復移送を駆動する駆動部とを含むことを特徴とする、請求項4に記載の液晶塗布装置。
The stage includes a transfer guide coupled to the second camera to allow the second camera to reciprocate along the purge plate, and a driving unit that drives reciprocating transfer of the second camera. The liquid crystal coating apparatus according to claim 4, wherein the liquid crystal coating apparatus is characterized.
JP2005216018A 2004-10-29 2005-07-26 Liquid crystal application device Pending JP2006126790A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
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JP2009282019A (en) * 2008-04-17 2009-12-03 Naraenaotech Corp Composite system having function of inkjet printing and function of inspection, and inkjet printing apparatus having it

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KR100948626B1 (en) * 2008-07-15 2010-03-18 주식회사 나래나노텍 A High Speed Coating Apparatus and A High Speed Coating Method
KR101436459B1 (en) * 2010-07-08 2014-09-03 세메스 주식회사 Apparatus of discharging treating fluid
KR101464203B1 (en) * 2010-08-24 2014-11-25 세메스 주식회사 Cleaning unit, treating fluid discharging apparatus with the unit, and cleaning method
KR101394392B1 (en) * 2010-12-30 2014-05-14 세메스 주식회사 Liquid crystal inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009282019A (en) * 2008-04-17 2009-12-03 Naraenaotech Corp Composite system having function of inkjet printing and function of inspection, and inkjet printing apparatus having it

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