JP2010046663A - Pattern forming device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern forming device capable of preventing a droplet ejection head and a substrate from being damaged by a foreign matter. <P>SOLUTION: A foreign matter sticking to a CF substrate W is detected by a first foreign-matter detection sensor 81 and a second foreign-matter detection sensor 82. The first foreign-matter detection sensor 81 projects first detection light L1 onto a first light-receiver 81B from a first light-projector 81A while the second foreign-matter detection sensor 82 projects second detection light L2 onto a second light-receiver 82B from a second light-projector 82A. That is, a pair of foreign-matter detection sensors 81, 82 each projecting detection light in the mutually opposite directions are disposed. Further, a third foreign-matter detection sensor 83 for detecting foreign matter present on a substrate stage 14, an inspection table 72 of an inspection unit 70, a flushing-droplet recovery table 73, and a fourth foreign-matter detection sensor 84 for detecting foreign matter present on an upper face of a weight measuring unit 74 are provided. Thus, the foreign matter can be detected prior to moving the substrate stage 14 and the inspection unit 70 to a position directly underneath the droplet ejection head, and hence the droplet ejection head and the substrate W can be prevented from being damaged. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a pattern forming apparatus.

In general, as an apparatus for forming a desired pattern on a substrate using a functional liquid, an ink jet apparatus that discharges the functional liquid as droplets, that is, a droplet discharge apparatus is known. The droplet discharge device includes a substrate placed on a stage and a droplet discharge head that discharges functional liquid as droplets.
A pattern is formed by disposing functional liquid droplets ejected from the droplet ejection head at arbitrary locations on the substrate while relatively moving relative to each other in dimension.

The droplet discharge head is supplied with functional liquid from a separate tank or the like, and temporarily stores the supplied functional liquid in an ink chamber (cavity) provided therein. Then, the functional liquid stored in the ink chamber is ejected as droplets from a plurality of nozzle holes formed in a nozzle plate provided to face the stage.

In recent years, a multi-carriage type droplet discharge device is known in which a plurality of droplet discharge heads are mounted on a single carriage and a plurality of carriages are mounted. Such a droplet discharge device is used for manufacturing a large screen color filter, and improves the drawing speed by discharging droplets simultaneously from a plurality of carriages.

By the way, when the droplet discharge device forms a pattern on the substrate, the platen gap which is the distance between the nozzle plate of the droplet discharge head and the substrate is as small as 0.3 mm, for example. Therefore, various problems occur when foreign substances such as dust adhere to the substrate. For example, if foreign matter adheres to the upper surface of the substrate placed on the stage, the foreign matter comes into contact with the droplet discharge head, which may damage the substrate or the droplet discharge head. In addition, if foreign matter adheres to the lower surface of the substrate, the substrate in the vicinity thereof is raised with respect to the stage, the substrate and the droplet discharge head come into contact with each other, and the substrate is damaged. .

As a method for solving these problems, a light projecting unit and a light receiving unit are provided, the detection light emitted from the light projecting unit along the upper surface of the substrate is received by the light receiving unit through the substrate, There has been proposed a foreign matter detection device that detects foreign matter attached to a substrate based on the amount of light received by the light receiving unit (for example, Patent Document 1).

JP 2007-85960 A

However, in the method of Patent Document 1, for example, when the substrate is a large glass substrate used for manufacturing the above-described large screen color filter, the detection light emitted from the light projecting unit approaches the light receiving unit. As it spreads. And since detection light will diffuse, the detection precision of the foreign material located in the area | region near a light-receiving part will fall in a glass substrate. Therefore, even a foreign object of the same size that is originally detected cannot be detected as a foreign object depending on its position (distance from the light projecting unit). That is, when the substrate is passed directly under the droplet discharge head, the droplet discharge head, the substrate, and the like may be damaged even though no foreign matter is detected.

In addition, a droplet discharge device that is moved and arranged immediately below the droplet discharge head and provided with an inspection unit that inspects the droplet discharged from the droplet discharge head has been put into practical use. When the inspection unit is moved directly below the droplet discharge head, the droplet discharge head may be damaged by foreign matter (such as a tool) left by the operator during maintenance of the inspection unit.

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a pattern forming apparatus that prevents the droplet discharge head and the substrate from being damaged by foreign matter.

The pattern forming apparatus of the present invention transports a substrate placed on a transport table in a main scanning direction, and each nozzle of a droplet discharge head provided on a carriage arranged in parallel in a sub-scanning direction orthogonal to the main scanning direction. A pattern forming apparatus that ejects functional liquid as droplets to form a pattern on the substrate, wherein the first detection light is emitted along the upper surface of the substrate across the transport path of the transport table A first light projecting unit and a first light receiving unit configured to receive the first detection light;
Based on the amount of light received by the light receiving unit, the first foreign matter detection sensor that detects foreign matter attached to the substrate and the second detection light is emitted along the upper surface of the substrate across the transport path of the transport table. And a second light receiving portion for receiving the second detection light, and detecting a foreign matter attached to the substrate based on the amount of light received by the second light receiving portion. And a first light projecting unit and a second light projecting unit provided on opposite sides of the transport path.

According to the pattern forming apparatus of the present invention, for example, when the substrate is large, the first detection light of the first foreign matter detection sensor diffuses and the foreign matter detection accuracy decreases, that is, the first of the substrate. By providing a second foreign matter detection sensor with the detection light having a direction opposite to the foreign matter attached to the region near the light receiving unit, the second foreign matter detection sensor can detect the foreign matter with high accuracy. That is, the first and second foreign matter detection sensors cooperate to detect foreign matter with high accuracy in the entire area of the substrate. As a result, for example, by stopping the transport operation of the transport table when foreign matter is detected, it is possible to prevent damage to the droplet discharge head and damage to the substrate due to foreign matter attached to the substrate.

In the pattern forming apparatus, it is preferable that the optical axes of the first and second detection lights are inclined toward the substrate.
According to this pattern forming apparatus, the amount of light received by the corresponding light receiving unit can be increased by reflecting a part of the detection light emitted from each light projecting unit to the substrate. Therefore, when a foreign substance is attached to the substrate, the contrast between the part where the foreign substance is not attached and the part where the foreign substance is attached can be increased in the light receiving part that receives each detection light. As a result, foreign matter adhering to the substrate can be detected with high accuracy.

The pattern forming apparatus includes: a first substrate detection sensor that detects that the substrate is positioned immediately below the optical axis of the first detection light; and the substrate that is directly below the optical axis of the second detection light. And a second substrate detection sensor for detecting the position of the first substrate detection sensor, and driving and controlling the first foreign matter detection sensor based on a detection signal from the first substrate detection sensor. It is preferable to provide a foreign matter detection sensor control means for driving and controlling the second foreign matter detection sensor based on the detection signal.

According to this pattern forming apparatus, for example, the first detection light can be emitted from the first light projecting unit only when the substrate is located immediately below the optical axis of the first detection light. Further, the second detection light can be emitted from the second light projecting unit only when the substrate is located directly below the optical axis of the second detection light. That is, when a part of each detection light cannot be reflected by the substrate and the amount of light received by each light receiving unit decreases, the first and second foreign matter detection sensors can be stopped. Therefore, when there is no substrate directly under the detection light, it is possible to prevent erroneous detection of foreign matter due to a decrease in the amount of light received by the light receiving unit.

This pattern forming apparatus is preferably provided with a transport table foreign matter detection sensor for detecting foreign matter on the upper surface of the transport table.
According to this pattern forming apparatus, for example, the transfer table foreign object detection sensor can detect foreign objects such as tools left behind during the maintenance of the transfer stage. As a result, for example, when the transport table foreign matter detection sensor detects a foreign matter, the transport operation of the transport table is stopped, so that the carriage (droplet ejection head) is damaged due to the foreign matter on the upper surface of the transport table or the substrate is damaged. Can be prevented.

The pattern forming apparatus reciprocates in the main scanning direction independently of the transport table, and moves and is arranged immediately below the droplet discharge head to inspect the droplets discharged from the droplet discharge head. While providing the inspection unit to perform, you may provide the inspection unit foreign material detection sensor which detects the foreign material in the said inspection unit.

According to this pattern forming apparatus, before moving the inspection unit directly below the carriage (droplet discharge head), it is possible to detect foreign matters such as tools left behind during maintenance of the inspection unit. As a result, it is possible to prevent the carriage (droplet discharge head) from being damaged due to the foreign matter of the inspection unit.

The perspective view which shows schematic structure of a droplet discharge apparatus. The top view showing the relationship between a carriage plate and a carriage. (A) The perspective view which looked at the droplet discharge head from the substrate stage side, (b) The pump section sectional view of the droplet discharge head. The schematic diagram which shows the arrangement position of each foreign material detection sensor. The schematic diagram when a 1st foreign material detection sensor radiate | emits 1st detection light. The electric block diagram for demonstrating the electrical structure of a droplet discharge apparatus.

Hereinafter, an embodiment of a pattern forming apparatus embodying the present invention will be described with reference to the drawings.
FIG. 1 shows a schematic configuration of a droplet discharge device 1 as a pattern forming device for forming red, green, and blue color filters on a glass substrate on which a black matrix is formed. As shown in FIG. 1, in the droplet discharge device 1, a base 2 extending in the main scanning direction (X-axis direction) is installed on the floor surface, and a pair of X-axis guide rails 11 are mainly provided on the upper surface 2a. An X-axis moving table 1 that is laid in the scanning direction (X-axis direction) and that forms a transport table on the pair of X-axis guide rails 11.
2 is placed. The X-axis movement table 12 is mounted so as to be movable along the X-axis guide rail 11 in the main scanning direction. The pair of X-axis guide rails 11 includes an X-axis linear motor M
1 and the X-axis linear motor M1 reciprocates the X-axis moving table 12 mounted on the pair of X-axis guide rails 11 in the X-axis direction via an air slider (not shown).

In FIG. 1, the main scanning direction is the X-axis direction, the sub-scanning direction orthogonal to the main scanning direction (X-axis direction) is the Y-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction (vertical direction) is Z. The rotational direction around the axial direction and the Z-axis direction is denoted as the θ direction.

On the upper surface of the X-axis moving table 12, a substrate stage 14 constituting a transfer table is provided. The substrate stage 14 is a vacuum suction table, and a color filter substrate (referred to as a CF substrate) W made of a glass substrate is sucked and fixed on the upper surface thereof, and the CF substrate W is transported.
The substrate stage 14 is supported and fixed so as to be rotatable in the θ direction with respect to the X-axis movement table 12 by a stage rotation mechanism 16 indicated by a broken line provided between the X-axis movement table 12 and the substrate stage 14. .

Accordingly, the substrate stage 14 (CF substrate W) moves in the X-axis direction (main scanning direction) together with the X-axis moving table 12. Further, the substrate stage 14 (CF substrate W) rotates in the θ direction in parallel to the plane (XY plane (horizontal plane)) of the X-axis moving table 12.

A pair of Y-axis guide rails 18 are disposed so as to straddle the upper direction of the X-axis guide rail 11 in the Y-axis direction. A column 19 a at one end of the pair of Y-axis guide rails 18 is erected on one side of the upper surface 2 a of the base 2, and a column 19 b at the other end is erected on a floor separated from the base 2. Further, on the other side of the upper surface 2a of the base 2, a support column 19c is erected. The pair of Y-axis guide rails 18 are arranged in parallel at a predetermined interval in the X-axis direction. In this embodiment, in the pair of Y-axis guide rails 18 extending parallel to the Y-axis direction, the upper position of the base 2 is a work area, and the position away from the base 2 is a standby area.

A plurality (six in this embodiment) of carriage plates 21 are arranged between the pair of Y-axis guide rails 18 so as to pass. Each carriage plate 21 is
It is mounted so as to be movable along the Y-axis guide rail 18 in the sub-scanning direction (Y-axis direction). The pair of Y-axis guide rails 18 includes a Y-axis linear motor M2, and the Y-axis linear motor M2 includes air sliders (not shown) for the carriage plates 21 mounted on the pair of Y-axis guide rails 18, respectively. And reciprocate in the Y-axis direction. That is, each carriage plate 21 reciprocates between the work area on the Y-axis guide rail 18 and the standby area.

A functional liquid supply unit 22 and a head electrical unit 23 are placed on the upper surface of each carriage plate 21. The functional liquid supply unit 22 stores a predetermined amount of the functional liquid F (see FIG. 3B) and supplies the functional liquid F to each droplet discharge head 40 (see FIGS. 3A and 3B). Supply circuit device for The head electrical unit 23 is an electric circuit device for supplying an electric signal for driving each droplet discharge head 40.

The functional liquid F referred to here is red, green, and blue filter inks arranged in a black matrix frame formed on the CF substrate W. When the functional liquid F is placed in the frame of the black matrix formed on the CF substrate W and then dried, it becomes red, green, and blue filters.

As shown in FIG. 2, a suspension mechanism 25 is provided at the center position of the lower surface of each carriage plate 21, and the carriage 30 is attached to the lower end portion of the suspension mechanism 25.
The suspension mechanism 25 includes a suspension substrate 26, a suspension rotation frame 27, and a suspension support frame 28. The suspended substrate 26 is connected and fixed at the center of the lower surface of the carriage plate 21, and the suspended rotation frame 27 is connected to the lower end portion thereof. The suspension rotation frame 27 has a suspension support frame 28 at the lower end thereof.
It is connected and supported so as to be rotatable in the direction. The suspension rotation frame 27 has a θ-axis rotation motor (not shown).
The θ-axis rotation motor rotates the suspension support frame 28 in the θ direction with respect to the suspension substrate 26 (carriage plate 21). A carriage 30 is supported and fixed on the suspension support frame 28, and the carriage 30 suspended from the suspension mechanism 25 is rotated in the θ direction.

The carriage 30 has a substantially rectangular parallelepiped carriage frame 31. Carriage frame 31
Are provided with openings on both side surfaces in the X-axis direction and the Y-axis direction (the openings in the X-axis direction are not shown), and the surrounding air flows out to the inside of the carriage frame 31. You can enter. A unit plate 34 is fixed to a lower end portion of a substantially rectangular parallelepiped carriage frame 31 of the carriage 30 by screws or the like (not shown). Unit plate 3
4, the droplet discharge head 40 is detachably attached and fixed with high accuracy. In the present embodiment, three droplet discharge heads 40 arranged in parallel along the X-axis direction are attached in two rows in parallel to the Y-axis direction, that is, a total of six droplet discharge heads 40. In addition, although piping, wiring, etc. are arrange | positioned inside the carriage frame 31, illustration is abbreviate | omitted because it will become complicated if it displays.
(Droplet discharge head 40)
Next, the droplet discharge head 40 attached to the unit plate 34 will be described with reference to FIG. FIG. 3A is an external perspective view of the droplet discharge head 40 as viewed from the substrate stage 14 side. The droplet discharge head 40 includes a liquid introduction part 41 having two connection needles 42, a head substrate 43 that is continuous to the side of the liquid introduction part 41, a pump part 44 that is continuous to the liquid introduction part 41, and a pump part 44. A nozzle plate 45 is provided.

A pipe connection member (not shown) connected to the functional liquid supply unit 22 is connected to the connection needle 42 of the liquid introduction part 41. A pair of head connectors 43A is mounted on the head substrate 43, and a flexible flat cable (not shown) connected to the head electrical unit 23 is connected via the head connector 43A.

On the other hand, the pump portion 44 and the nozzle plate 45 constitute a square head main body 40A.
On the nozzle forming surface 45 a of the nozzle plate 45, two nozzle rows 47 including discharge nozzles 46 that discharge the droplets Fb are formed. The two nozzle rows 47 are arranged in parallel to each other, and each nozzle row 47 is configured by 180 (schematically illustrated) discharge nozzles 46 arranged in parallel at an equal pitch. Yes. That is, two nozzle rows 47 are symmetrically arranged on the nozzle forming surface 45a of the head main body 40A with the center line therebetween.

FIG. 3B shows the inside of the pump unit 44 of the droplet discharge head 40, and has a cavity 52, a diaphragm 53, and a piezoelectric element PZ above each discharge nozzle 46. Each cavity 52 is connected to the functional liquid supply unit 22 via a pipe connection member (not shown), stores the functional liquid F (filter ink) from the functional liquid supply unit 22, and discharges the filter ink. 46. The vibration plate 53 vibrates the meniscus of the discharge nozzle 46 in accordance with the expansion and contraction of the volume of the cavity 52 by vibrating the region facing each cavity 52 in the Z direction. When each piezoelectric element PZ receives a predetermined drive waveform signal, each piezoelectric element PZ contracts and expands in the Z direction to vibrate each region of the diaphragm 53 in the Z direction. Each of the cavities 52 is configured such that when the respective diaphragms 53 vibrate in the Z direction, a part of the filter ink to be stored is changed to a droplet Fb having a predetermined weight, and the discharge nozzle 46
Discharge from.

A flange portion 48 is formed in a square flange shape to receive the liquid introduction portion 41 on the base side of the pump portion 44, that is, on the base portion side of the head main body 40 </ b> A. The flange portion 48 serves as a retaining portion and serves as a coupling portion that is coupled and fixed to the unit plate 34 with a head retaining screw (not shown). A pair of screw holes (female screws) 49 for small screws for fixing the droplet discharge head 40 to the unit plate 34 are formed in the flange portion 48. That is, the droplet discharge head 40 has the head body 40A inserted through a through hole (not shown) formed at a predetermined position of the unit plate 34, the unit plate 34 is inserted, and the screw hole 4 is inserted.
9 is fixed to the unit plate 34 by a head set screw (not shown) that is screwed onto the unit plate 34.

The X-axis, Y-axis, and Z-axis shown in FIGS. 2 and 3 are the same as the X-axis, Y-axis, and Z-axis shown in FIG. That is, in a state where the unit plate 34 is attached to the droplet discharge device 1, the nozzle row 47 (see FIG. 3A) formed in the droplet discharge head 40 is configured to extend in the Y-axis direction. ing.
(Inspection unit 70)
Next, the inspection unit 70 that inspects the droplets ejected from the droplet ejection head 40 will be described.

As shown in FIG. 1, a pair of X-axis guide rails 11 laid on the base 2 is arranged with an inspection unit 70 movably along the X-axis guide rail 11 in the main scanning direction.
More specifically, the inspection unit 70 has a moving table 71, and the moving table 71 has an X
It is mounted so as to be movable along the axis guide rail 11 in the main scanning direction. The moving table 71 reciprocates in the X-axis direction via an air slider (not shown) by an X-axis linear motor M1 provided on the pair of X-axis guide rails 11.

An inspection table 72 is installed and fixed on the substrate stage 14 side of the upper surface of the moving table 71. The inspection table 72 extends long along the Y-axis direction, and a detected paper P, for example, coated with a film is disposed on the upper surface thereof. The detected paper P placed on the inspection table 72 is a droplet Fb discharged from each discharge nozzle 46 of the droplet discharge head 40 of each carriage 30 when the inspection table 72 is guided directly below the droplet discharge head 40. Has been landed.

As many flushing collection bases 73 as the number of the carriages 30 (six) are provided on the upper surface of the moving table 71 and adjacent to the inspection table 72, and the respective flushing collection bases 73 are arranged along the Y-axis direction. It is installed.

When the flushing collection base 73 is guided directly under the corresponding carriage 30, the droplets Fb are ejected from the ejection nozzles 46 of the droplet ejection heads 40 of the respective carriages 30 (flushing). And receiving and receiving the droplet Fb. That is, the flushing operation is performed before the color filter is drawn with the droplets Fb on the CF substrate W, and the droplets Fb based on the flushing are collected by the flushing collection stand 73.

The number of weight measurement units 74 (six) is provided in the upper surface of the moving table 71 and adjacent to the flushing collection base 73 arranged side by side, and each weight measurement unit 74 is arranged in the Y-axis direction. Are arranged side by side.

When the weight measuring unit 74 is guided directly under the corresponding carriage 30, the droplet Fb discharged from each discharge nozzle 46 of the droplet discharge head 40 of each carriage 30 lands and measures its weight. It has become. That is, before the pattern is formed with the droplets Fb on the CF substrate W, the discharge weight of the droplets Fb is measured from the discharge nozzles 46 of the droplet discharge heads 40 of the carriages 30. In the present embodiment, the inspection table 72, the flushing collection table 73, and the weight measurement unit 74 are provided so that their upper surfaces are substantially the same height.

Next, the first and second foreign matter detection sensors 81 and 82 that detect foreign matter attached to the CF substrate W will be described.
FIG. 4 is a schematic diagram showing the arrangement position of each foreign object detection sensor. As shown in FIG. 4, the first column 19a and 19c of the Y-axis guide rail 18 positioned on the substrate stage 14 side are used to make the first
A foreign matter detection sensor 81 is provided.

81 A of 1st light projection parts of the 1st foreign material detection sensor 81 are provided inside the support | pillar 19c, have a laser light source which is not shown in figure, and radiate | emit the 1st detection light L1 of the predetermined light quantity which consists of a laser beam. The first light receiving unit 81B is provided on the column 19a so as to face the first light projecting unit 81A, receives the first detection light L1 emitted from the first light projecting unit 81A, and detects the amount of received light To do.

As shown in FIG. 5, the first light projecting unit 81 </ b> A has a lower portion of the first detection light L <b> 1 facing the side surface Wb of the CF substrate W placed on the substrate stage 14 and is along the upper surface Wa of the CF substrate W. Thus, the first detection light L1 is emitted. That is, when a foreign substance adheres to the upper surface Wa of the CF substrate W, the first detection light L1 is blocked by the foreign substance, and the amount of light received by the first light receiving unit 81B is reduced. On the other hand, when a foreign substance is attached to the lower surface Wc of the CF substrate W, the CF substrate W in the vicinity where the foreign substance is attached is lifted with respect to the substrate stage 14. 1 detection light L1 is blocked,
The amount of light received by the first light receiving portion 81B is reduced.

In addition, the first light projecting unit 81A tilts the optical axis AX1 of the first detection light L1 so as to form a predetermined tilt angle θk on the CF substrate W side with respect to the horizontal direction. By tilting the optical axis AX1 of the first detection light L1, a part of the first detection light L1 is converted into the CF substrate W as shown by an arrow in FIG.
And the reflected first detection light L1 can be incident on the first light receiving unit 81B.
That is, the amount of the first detection light L1 incident on the first light receiving unit 81B can be increased. Therefore, when a foreign substance is attached to the CF substrate W, in the first light receiving portion 81B that receives the first detection light L1, a portion where the foreign substance is not attached to the CF substrate W and a portion where the foreign matter is attached to the CF substrate W. The contrast can be increased. That is, the influence of the diffusion of the first detection light L1 is reduced, and the foreign matter adhering to the CF substrate W can be accurately detected.

As shown in FIG. 2, a first substrate detection sensor 81 </ b> C is provided on a surface 18 a opposite to the upper surface of the substrate stage 14 in the Y-axis guide rail 18 on the substrate stage 14 side. As shown in FIG. 4, the first substrate detection sensor 81 </ b> C is a first substrate detection sensor 81 first.
The sensor is provided directly above the optical axis AX1 of the detection light L1, and detects whether or not the CF substrate W is disposed immediately below the optical axis AX1 of the first detection light L1. Then, the first substrate detection sensor 81
When the CF substrate W is detected immediately below the optical axis AX1 of the first detection light L1 by C, the first
The foreign object detection sensor 81 emits the first detection light L1 from the first light projecting unit 81A.

As shown in FIG. 4, a second foreign object detection sensor 82 is provided at a position adjacent to the first foreign object detection sensor 81. The second foreign object detection sensor 82 is simply provided with a second light projecting unit 82A on the support column 19a and a second light receiving unit 82B on the support column 19c so that the direction of the detection light is opposite to that of the first foreign object detection sensor 81. Therefore, detailed description thereof is omitted.

A second substrate detection sensor 82C is provided immediately above the optical axis of the second detection light L2 emitted from the second light projecting unit 82A (see FIGS. 2 and 4). The second substrate detection sensor 82C is
Similar to the first substrate detection sensor 81C, it is a sensor that detects whether or not the CF substrate W is disposed immediately below the optical axis of the second detection light L2 of the second foreign matter detection sensor 82. Since the relationship between the second foreign object detection sensor 82 and the second substrate detection sensor 82C is the same as the relationship between the first foreign object detection sensor 81 and the first substrate detection sensor 81C, detailed description thereof is omitted.

Next, a third foreign matter detection sensor 83 as a transport table foreign matter detection sensor that detects foreign matter on the upper surface of the substrate stage 14 will be described. The third foreign matter detection sensor 83 is a sensor that detects foreign matter that has adhered to the substrate stage 14 or a tool that has been misplaced during maintenance. As shown in FIG. 4, the third foreign object detection sensor 83 is provided at a position adjacent to the second foreign object detection sensor 82, and a light projecting / receiving part 83 </ b> A having a light projecting part and a light receiving part, and a light projecting part of the light projecting / receiving part 83 </ b> A. And a reflecting plate 83B that reflects the detection light L3 emitted from the light receiving portion of the light projecting / receiving portion 83A.

The light projecting unit of the light projecting / receiving unit 83A has a laser light source (not shown) and emits a predetermined amount of detection light L3 made of laser light toward the reflection plate 83B. The detection light L3 is emitted from the light projecting / receiving unit 83A.
When the substrate stage 14 passes between the reflecting plate 83 </ b> B and the reflecting plate 83 </ b> B, the light is emitted along the upper surface of the substrate stage 14. The reflection plate 83B reflects the detection light L3 emitted from the light projecting / receiving unit 83A toward the light receiving unit of the light projecting / receiving unit 83A. The light receiving unit of the light projecting / receiving unit 83A receives the detection light L3 reflected by the reflecting plate 83B and detects the amount of light. That is, when there is a foreign object on the upper surface of the substrate stage 14, the detection light L3 is blocked and the light projecting / receiving unit 83
The amount of light received by the light receiving portion A is reduced.

Next, a fourth foreign matter detection sensor 84 as an inspection unit foreign matter detection sensor that detects foreign matter in the inspection unit 70 will be described.
The fourth foreign object detection sensor 84 includes an inspection table 72 and a flushing collection table 73 of the inspection unit 70.
This is a device for detecting foreign matter adhering to the upper surface of the weight measuring unit 74, paper floating of the detected paper P on the inspection table 72, tools misplaced during maintenance, and the like.

Similarly to the third foreign object detection sensor 83, the fourth foreign object detection sensor 84 is configured to project the light projecting / receiving part 84A having a light projecting part and a light receiving part and the detection light L4 emitted from the light projecting part of the light projecting / receiving part 84A. And a reflecting plate 84B that reflects the light receiving portion of the light receiving portion 84A. As shown in FIG. 1, the light projecting / receiving unit 84A of the fourth foreign object detection sensor 84 is brought to a predetermined height by a fixing member 85a provided at a position adjacent to the column 19a of the Y-axis guide rail 18 on the inspection unit 70 side. It is provided to become. The reflection plate 84B is provided so as to oppose the light projecting / receiving unit 84A by a fixing member 85b provided at a position adjacent to the column 19c of the Y-axis guide rail 18 on the inspection unit 70 side.

The light projecting unit of the light projecting / receiving unit 84A has a laser light source (not shown) and emits a predetermined amount of detection light L4 made of laser light toward the reflection plate 84B. The detection light L4 is a light projecting / receiving unit 84A.
When the inspection unit 70 passes between the reflector 84B and the reflector 84B, the light is emitted along the upper surfaces of the inspection table 72, the flushing recovery table 73, and the weight measurement unit 74 of the inspection unit 70, respectively. The reflector 84B reflects the detection light L4 emitted from the light projecting / receiving unit 84A toward the light receiving unit of the light projecting / receiving unit 84A. The light receiving portion of the light projecting / receiving portion 84A is the reflecting plate 8.
The detection light L4 reflected by 4B is received, and the amount of light is detected. That is, when there is a foreign object on the upper surface of the inspection unit 70, the detection light L4 is blocked, and the amount of light received by the light receiving unit of the light projecting / receiving unit 84A is reduced.

Next, the electrical configuration of the droplet discharge device 1 will be described with reference to FIG. FIG. 6 shows a droplet discharge device 1
It is a block diagram which shows the electrical structure of.
6, the control device 100 includes a CPU 101, a ROM 102, a RAM 103, and the like. The control device 100 follows various stored data and various control programs.
A transport process for the X-axis moving table 12, a transport process for each carriage plate 21, a droplet discharge process for each droplet discharge head 40 provided on each carriage 30, and the like are executed. Also, the control device 10
0 executes the foreign substance detection processing of the CF substrate W, the substrate stage 14, and the inspection unit 70, and the like.

An input / output device 104 having various operation switches and a display is connected to the control device 100. The input / output device 104 displays the processing status of various processes executed by the droplet discharge device 1. The input / output device 104 generates drawing data (bitmap data BD) for forming a pattern with the droplets Fb on the CF substrate W, and uses the bitmap data BD as the control device 10.
Enter 0. In addition, the control device 100 stores the input bitmap data BD in the RAM 1
Store in 03.

The bitmap data BD is data that specifies whether each piezoelectric element PZ is turned on or off according to the value (0 or 1) of each bit. The bitmap data BD indicates whether or not the droplet Fb is ejected to each position specified in advance on the CF substrate W when the CF substrate W passes immediately below the droplet ejection head 40 (each ejection nozzle 46). The specified data.

That is, in order to form a color filter pattern with the droplets Fb on the CF substrate W, the bitmap data BD is repeatedly placed under the droplet ejection head 40 (each ejection nozzle 46) many times.
This is data defining whether or not the droplets Fb are ejected to the arrangement position prepared for forming the color filter pattern each time the substrate is reciprocated and moved forward and backward.

More specifically, the X-axis moving table 12 (CF substrate W) is prepared each time it moves forward and backward just below the droplet discharge head 40 (each discharge nozzle 46), and corresponds to each forward and backward movement. If the droplet Fb is ejected using the bitmap data BD, the color filter pattern is drawn on the CF substrate W.

In this embodiment, the pattern to be drawn on the CF substrate W is obtained by design or the like in advance.
Bitmap data BD is created from the obtained pattern.
An X-axis linear motor drive circuit 105 is connected to the control device 100. Control device 1
00 outputs a drive control signal to the X-axis linear motor drive circuit 105. In response to the drive control signal from the control device 100, the X-axis linear motor drive circuit 105 responds to the X-axis movement table 1
2 (CF substrate W) is driven to drive an X-axis linear motor M1. In addition, when the inspection unit 70 inspects the droplet Fb by the inspection unit 70, the control unit 100 performs the inspection unit 70.
Is output to the X-axis linear motor drive circuit 105. The X-axis linear motor drive circuit 105 responds to a drive control signal for moving the inspection unit 70 from the control device 100, and moves the moving table 71.
Drive.

A Y-axis linear motor drive circuit 106 is connected to the control device 100. Control device 1
00 outputs a drive control signal to the Y-axis linear motor drive circuit 106. In response to the drive control signal from the control device 100, the Y-axis linear motor drive circuit 106 drives the Y-axis linear motor M2 for moving each carriage plate 21.

A head driving circuit 108 provided for each droplet discharge head 40 is connected to the control device 100. The control device 100 generates a discharge timing signal LT synchronized with a predetermined discharge frequency.
Is output to the head drive circuit 108. The control device 100 synchronizes the drive voltage COM for driving each piezoelectric element PZ with a predetermined ejection frequency, and each corresponding head drive circuit 1.
Output to 08.

The control device 100 generates a pattern formation control signal SI synchronized with a predetermined frequency using the bitmap data BD, and serially transfers the pattern formation control signal SI to the head drive circuit 108. The head drive circuit 108 sequentially converts the pattern formation control signal SI from the control device 100 into serial / parallel conversion corresponding to each piezoelectric element PZ. Each time the head drive circuit 108 receives the ejection timing signal LT from the control device 100, the head drive circuit 108
The pattern forming control signal SI converted in parallel is latched and the pattern forming control signal SI is latched.
A drive voltage COM is supplied to each of the piezoelectric elements PZ selected by.

A substrate detection sensor drive circuit 110 is connected to the control device 100. Control device 10
0 outputs a control drive signal to the substrate detection sensor drive circuit 110. In response to the drive control signal from the control device 100, the substrate detection sensor drive circuit 110 responds to the first substrate detection sensor 81C.
And the second substrate detection sensor 82C are driven. When the first and second substrate detection sensors 81C and 82C detect that the CF substrate W is located immediately below the optical axis of the corresponding detection light, the substrate detection sensor drive circuit 110 detects the detection signals Sa, Control device 10 for Sb
Output to 0. In the present embodiment, the first and second substrate detection sensors 81C and 82C are driven and controlled whenever the droplet discharge device 1 is in operation.

A first foreign object detection sensor drive circuit 111 is connected to the control device 100. The control device 100 as the foreign matter detection sensor control means receives a detection signal Sa from the first substrate detection sensor 81C.
Is input to the first foreign object detection sensor drive circuit 111.
The first foreign object detection sensor drive circuit 111 is responsive to the drive control signal from the control device 100,
The first detection light L1 is emitted from the first light projecting unit 81A. First foreign matter detection sensor drive circuit 111
Outputs the detection value of the amount of received light received by the first light receiving unit 81B of the first foreign object detection sensor 81 to the control device 100. The control device 100 receives the detection result from the first foreign object detection sensor 81 and compares the detection value from the first foreign object detection sensor 81 with a first threshold value preset in the ROM 102. When the detection value from the first foreign matter detection sensor 81 is smaller than the first threshold value, the control device 100 determines that foreign matter is attached to the CF substrate W, and controls driving of the X-axis linear motor M1. The conveyance operation of the substrate stage 14 (X-axis movement table 12) is immediately stopped, and an alarm lamp (not shown) provided in the input / output device 104 is turned on.

A second foreign object detection sensor drive circuit 112 is connected to the control device 100. The control device 100 as the foreign matter detection sensor control means receives a detection signal Sb from the second substrate detection sensor 82C.
Is input to the second foreign matter detection sensor drive circuit 112.
The second foreign object detection sensor drive circuit 112 is responsive to the drive control signal from the control device 100,
The second detection light L2 is emitted from the second light projecting unit 82A. Second foreign matter detection sensor drive circuit 112
Outputs the detection value of the amount of received light received by the second light receiving unit 82B of the second foreign object detection sensor 82 to the control device 100. The control device 100 receives the detection result from the second foreign object detection sensor 82 and compares the detection value from the second foreign object detection sensor 82 with the first threshold value. Control device 100
When the detection value from the second foreign matter detection sensor 82 is smaller than the first threshold value, C
It is determined that foreign matter has adhered to the F substrate W, the X axis linear motor M1 is driven and controlled, and the transfer operation of the substrate stage 14 (X axis moving table 12) is immediately stopped, and the I / O device 104 is shown. Do not turn on the alarm lamp.

A third foreign matter detection sensor drive circuit 113 is connected to the control device 100. The control device 100 outputs a drive control signal to the third foreign object detection sensor drive circuit 113. The third foreign object detection sensor drive circuit 113 drives the third foreign object detection sensor 83 in response to the drive control signal from the control device 100, and emits the detection light L3 from the light projecting part of the light projecting / receiving part 83A. The third
The foreign object detection sensor drive circuit 113 outputs a detection value of the amount of received light received by the light receiving unit of the light projecting / receiving unit 83A to the control device 100. The control device 100 receives the detection result from the third foreign object detection sensor drive circuit 113 and compares the detection value from the third foreign object detection sensor 83 with a second threshold value preset in the ROM 102. When the detected value from the third foreign matter detection sensor 83 is smaller than the second threshold value, the control device 100 determines that foreign matter is present on the substrate stage 14,
The X axis linear motor M1 is driven and controlled to immediately stop the transport operation of the substrate stage 14 (X axis movement table 12), and an alarm lamp (not shown) provided in the input / output device 104 is turned on.
In the present embodiment, the control device 100 drives the third foreign object detection sensor 83 whenever the droplet discharge device 1 is in operation.

A fourth foreign object detection sensor drive circuit 114 is connected to the control device 100. The control device 100 outputs a drive control signal to the fourth foreign object detection sensor drive circuit 114. The fourth foreign object detection sensor drive circuit 114 drives the fourth foreign object detection sensor 84 in response to the drive control signal from the control device 100, and emits the detection light L4 from the light projecting part of the light projecting / receiving part 84A. 4th
The foreign object detection sensor drive circuit 114 outputs a detection value of the amount of received light received by the light receiving unit of the light projecting / receiving unit 84A to the control device 100. In response to the detection result from the fourth foreign object detection sensor drive circuit 114, the control device 100 compares the detection value from the fourth foreign object detection sensor 84 with the second threshold value. When the detection value from the fourth foreign object detection sensor 84 is smaller than the second threshold value, the control device 100 determines that there is a foreign object in the inspection unit 70 and controls the drive of the X-axis linear motor M1. Thus, the transfer operation of the moving table 71 is immediately stopped and the input / output device 104 is stopped.
An alarm lamp (not shown) provided in is turned on. In the present embodiment, the control device 100 is
The fourth foreign object detection sensor 84 is driven whenever the droplet discharge device 1 is in operation.

Next, a foreign matter detection method of the droplet discharge device 1 configured as described above will be described.
From this, the droplet discharge device 1 forms a pattern on the CF substrate W newly disposed on the substrate stage 14.

The control device 100 drives the X-axis linear motor M1 to move the substrate stage 14 (X-axis moving table 12) in the X-axis direction. Eventually, the first substrate detection sensor 81 </ b> C detects the CF substrate W and outputs the detection signal Sa to the control device 100. The control device 100 detects the detection signal S
When a is input, the first foreign matter detection sensor 8 is passed through the first foreign matter detection sensor drive circuit 111.
1 is driven, and the first detection light L1 is emitted from the first light projecting unit 81A toward the first light receiving unit 81B. The first light receiving unit 81B outputs the detected value of the received first detection light L1 to the control device 100 via the first foreign object detection sensor drive circuit 111. The control device 100 compares the detection value from the first foreign object detection sensor 81 with a first threshold value set in advance in the ROM 102, and detects foreign substances attached to the CF substrate W.

Subsequently, the second substrate detection sensor 82 </ b> C detects the CF substrate W and outputs a detection signal Sb to the control device 100. When the detection signal Sb is input, the control device 100 drives the second foreign object detection sensor 82 and emits the second detection light L2 from the second light projecting unit 82A toward the second light receiving unit 82B. The second light receiving unit 82B outputs the detection value of the received second detection light L2 to the control device 100 via the second foreign object detection sensor drive circuit 112. The control device 100 compares the detection value from the second foreign matter detection sensor 82 with a first threshold value preset in the ROM 102, and detects foreign matter attached to the CF substrate W.

When the first and second substrate detection sensors 81C and 82C no longer detect the CF substrate W immediately below, the output of the detection signals Sa and Sb to the control device 100 is stopped, and the control device 100 The first and second foreign matter detection sensors 81 and 82 are stopped via the first and second foreign matter detection sensor drive circuits 111 and 112.

Here, the first detection light L1 emitted from the first light projecting portion 81A of the first foreign matter detection sensor 81 is diffused as it approaches the first light receiving portion 81B, and the detection accuracy of the foreign matter attached to the CF substrate W is detected. Decreases. However, the second foreign object detection sensor 82 is provided in a region where the detection accuracy of the first foreign object detection sensor 81 is reduced due to the provision of the second foreign object detection sensor 82 whose detection light direction is opposite to that of the first foreign object detection sensor 81. However, it is possible to detect foreign matter with high accuracy. That means
By the cooperation of the first and second foreign matter detection sensors 81 and 82, foreign matter can be accurately detected in the entire region of the CF substrate W.

Further, when the CF substrate W is not located immediately below the optical axes of the first and second detection lights L1, L2, a part of the first and second detection lights L1, L2 is reflected by the CF substrate W, Since the light cannot enter the first and second light receiving portions 81B and 82B, the first and second light receiving portions 81B and 82 are not allowed to enter.
The amount of light received by B decreases. At this time, the detected value of the amount of light received by the first and second light receiving portions 81B and 82B falls below the first threshold, and the control device 100 erroneously detects that a foreign substance is attached to the CF substrate W. It may end up. However, the first and second substrate detection sensors 81
By providing C and 82C, it is possible to prevent erroneous detection of foreign matter due to a decrease in the amount of received light.

The control device 100 always drives the third foreign object detection sensor 83 via the third foreign object detection sensor drive circuit 113, and detects the detection light L3 from the light projecting part of the light projecting / receiving part 83A of the third foreign object detection sensor 83.
Is emitted. The light projecting / receiving unit 83A receives the detection light L3 reflected by the reflecting plate 83B by the light receiving unit of the light projecting / receiving unit 83A, and outputs the detected value to the control device 100 via the third foreign object detection sensor driving circuit 113. . The control device 100 detects the detected value from the third foreign object detection sensor 83 and R
The OM 102 is compared with a second threshold value determined in advance, and foreign matter adhering to the substrate stage 14 or a tool left behind during maintenance is detected.

That is, the foreign matter adhering to the CF substrate W is detected by the first and second foreign matter detection sensors 81 and 82, and the foreign matter adhering to the upper surface of the substrate stage 14 or a tool that has been misplaced at the time of maintenance is detected as the third.
The foreign object detection sensor 83 detects. Therefore, before the substrate stage 14 on which the CF substrate W is placed is moved directly below the carriage 30, foreign matter adhering to the CF substrate W, foreign matter adhering to the substrate stage 14, and tools misplaced during maintenance are detected. can do. As a result, damage to the carriage 30 (droplet discharge head 40) and the CF substrate W due to them can be prevented.

On the other hand, when inspecting droplets discharged from the droplet discharge head 40, the control device 100
The X-axis linear motor M1 is driven to transport the moving table 71 of the inspection unit 70 in the anti-X-axis direction. The control device 100 always drives the fourth foreign object detection sensor 84 via the fourth foreign object detection sensor drive circuit 114, and emits the detection light L4 from the light projecting part of the light projecting / receiving part 84A of the fourth foreign object detection sensor 84. ing. The light projecting / receiving unit 84A detects the detection light L4 reflected by the reflecting plate 84B.
Is received by the light receiving unit of the light projecting / receiving unit 84A, and the detected value is output to the control device 100 via the fourth foreign object detection sensor driving circuit 114. The control device 100 compares the detection value from the fourth foreign object detection sensor 84 with a second threshold value preset in the ROM 102, and the inspection table 72 of the inspection unit 70.
, Foreign matter adhering to the upper surface of the flushing recovery table 73 and the weight measuring unit 74, floating of the detected paper P on the inspection table 72, and foreign materials such as tools left behind during maintenance are detected.

Accordingly, before the inspection unit 70 is moved directly below the carriage 30 (droplet discharge head 40), the inspection table 72, the flushing recovery table 73, and the weight measurement unit 7 of the inspection unit 70.
4 can detect foreign matter adhering to the upper surface of 4, paper floating of the detected paper P on the inspection table 72, tools misplaced during maintenance, and the like. As a result, the carriage 30 resulting from them
Damage to the (droplet discharge head 40) can be prevented.

According to the above embodiment, the following effects can be obtained.
(1) According to the embodiment, the support column 19 of the Y-axis guide rail 18 on the substrate stage 14 side.
The first detection light L1 from the first light projecting part 81A provided in c to the first light receiving part 81B provided in the column 19a.
A first foreign matter detection sensor 81 that emits light is provided. In addition, the second detection light L2 is sent from the second light projecting unit 82A provided on the column 19a to the second light receiving unit 82B provided on the column 19a so that the direction of the detection light is opposite to that of the first foreign object detection sensor 81. A second foreign matter detection sensor 82 that emits light is provided. Further, when a foreign object is detected on the CF substrate W, the control device 100 drives and controls the X-axis linear motor M1 to immediately stop the transport operation of the substrate stage 14 (X-axis moving table 12).

Therefore, the first detection light L1 of the first foreign matter detection sensor 81 is diffused, and the foreign matter attached to the region where the detection accuracy of the foreign matter attached to the CF substrate W is reduced is detected as the second foreign matter having the opposite direction of the detection light. The detection sensor 82 can accurately detect the foreign matter. That is, the first and second
By the cooperation of the foreign matter detection sensors 81 and 82, the foreign matter can be accurately detected in the entire region of the CF substrate W. As a result, it is possible to prevent the carriage 30 (droplet discharge head 40) from being damaged due to foreign matters adhering to the CF substrate W.

(2) According to the above embodiment, the optical axis AX1 of the first detection light L1 emitted from the first light projecting unit 81A of the first foreign object detection sensor 81 is emitted while being inclined toward the CF substrate W side. Similarly, the second
The optical axis of the second detection light L2 emitted from the second light projecting part 82A of the foreign object detection sensor 82 was emitted while being inclined toward the CF substrate W side.

Accordingly, the first and second detection lights L1 and L1 emitted from the first and second light projecting units 81A and 82A.
By reflecting a part of L2 to the CF substrate W, the first and second light receiving portions 81B and 82 are reflected.
The amount of light received by B can be increased. As a result, when foreign matter is attached to the CF substrate W, no foreign matter is attached to the CF substrate W in the first and second light receiving portions 81B and 82B that receive the first and second detection lights L1 and L2. It is possible to increase the contrast between the portion and the portion to which foreign matter is attached. That is, the influence due to the diffusion of the detection light is reduced, and the foreign matter attached to the CF substrate W can be detected with high accuracy.

(3) According to the above embodiment, the CF substrate W is disposed immediately below the optical axis AX1 of the first detection light L1 emitted from the first light projecting unit 81A of the first foreign object detection sensor 81. A first substrate detection sensor 81C for detection is provided. Similarly, the second light projecting unit 82 of the second foreign object detection sensor 82.
A second substrate detection sensor 82C for detecting that the CF substrate W is disposed is provided immediately below the optical axis of the second detection light L2 emitted from A. When the first and second substrate detection sensors 81C and 82C detect the CF substrate W, the control device 100 detects the first and second light projecting units 81A,
Detection light was emitted from 82A.

Accordingly, when the first and second foreign matter detection sensors 81 and 82 are emitting the first and second detection lights L1 and L2, the CF is directly below the optical axes of the first and second detection lights L1 and L2. The substrate W can be positioned without fail. As a result, a part of the first and second detection lights L1 and L2 cannot be reflected by the CF substrate W, and the control device 100 is caused by a decrease in the amount of light received by the first and second light receiving units 81B and 82B. Can be prevented from being erroneously detected as foreign matter adhering to the CF substrate W.

(4) According to the above-described embodiment, the third foreign matter detection sensor 83 that detects foreign matter attached to the substrate stage 14 or foreign matter such as a tool left on the substrate stage 14 during maintenance is provided. Further, when a foreign object is detected on the substrate stage 14, the control device 100 drives and controls the X-axis linear motor M1 to immediately stop the transport operation of the substrate stage 14 (X-axis moving table 12).

Accordingly, the first and second foreign matter detection sensors 81 and 82 detect foreign matter adhering to the CF substrate W, and foreign matter such as foreign matter adhering to the substrate stage 14 or tools left on the substrate stage 14 during maintenance is detected as the third foreign matter. The detection sensor 83 can detect. as a result,
Before the substrate stage 14 on which the CF substrate W is placed is moved directly below the carriage 30, damage to the carriage 30 (droplet discharge head 40) due to foreign matters can be prevented more reliably.

(5) According to the above embodiment, the inspection table 72 of the inspection unit 70 and the flushing collection table 7
3. A fourth foreign matter detection sensor 84 is provided for detecting foreign matter adhering to the weight measuring unit 74, floating of the paper P to be detected on the inspection table 72, tools misplaced during maintenance, and the like. Also,
When a foreign object is detected in the inspection unit 70, the control device 100 detects the X-axis linear motor M.
1 was driven and the transfer operation of the moving table 71 was immediately stopped.

Therefore, before moving the inspection unit 70 directly below the carriage 30 (droplet discharge head 40), the foreign matter in the inspection unit 70, the paper float of the detected paper P on the inspection table 72, and the maintenance of the inspection unit 70 are misplaced. Can detect the tool. As a result, damage to the carriage 30 (droplet discharge head 40) due to them can be prevented more reliably.

In addition, you may change the said embodiment as follows.
In the above embodiment, the light projecting / receiving portion 84A of the fourth foreign matter detection sensor 84 that detects foreign matter of the inspection unit 70 is provided on the fixed member 85a, and the reflection plate 84B is provided on the fixed member 85b. However, the present invention is not limited thereto, and may be provided on the support 19a and support 19c of the Y-axis guide rail 18 on the inspection unit 70 side, for example.

In the above embodiment, the optical axes of the first and second detection lights L1 and L2 are emitted while being inclined toward the CF substrate W side. For example, the light may be emitted so as to be parallel to the upper surface of the CF substrate W.

In the above embodiment, the pattern forming device is embodied in the droplet discharge device 1 that forms the color filter on the CF substrate by discharging the filter ink as droplets. Not limited to this, a droplet discharge device for forming a metal wiring, a droplet discharge device for forming an insulating layer, a droplet discharge device for forming a liquid crystal layer or an alignment film, a liquid for forming a light emitting layer of an organic EL display device, etc. You may apply to pattern formation apparatuses, such as a droplet discharge apparatus.

In the embodiment described above, the invention is embodied in the droplet discharge device 1 having six carriages 30 on which six droplet discharge heads 40 are mounted. The arrangement and number of droplet discharge heads mounted on the carriage and the number of carriages mounted on the droplet discharge device may be changed as appropriate.

AX1 ... optical axis, BD ... bitmap data, COM ... drive waveform signal, F ... functional fluid, Fb
... droplet, LT ... discharge timing signal, L1 ... first detection light, L2 ... second detection light, L3 ... detection light, L4 ... detection light, M1 ... X-axis linear motor, M2 ... Y-axis linear motor, P ... Detected paper,
PZ ... piezoelectric element, Sa ... detection signal, Sb ... detection signal, SI ... control signal for pattern formation, W
... CF substrate, Wa ... upper surface, Wb ... side surface, Wc ... lower surface, θk ... tilt angle, 1 ... droplet ejection device,
DESCRIPTION OF SYMBOLS 2 ... Base, 2a ... Upper surface, 11 ... X-axis guide rail, 12 ... X-axis movement table, 14 ... Substrate stage, 16 ... Stage rotation mechanism, 18 ... Y-axis guide rail, 18a ... Surface, 19a ... Strut 19b ... support, 19c ... support, 21 ... carriage plate, 22 ... functional liquid supply unit, 23 ... head electrical unit, 25 ... suspending mechanism, 26 ... suspended substrate, 27 ... suspended rotating frame, 28 ... suspended Lower support frame, 30 ... carriage, 31 ... carriage frame, 34 ... unit plate, 40 ... droplet discharge head, 40A ... head body, 41 ... liquid introduction part, 42 ... connecting needle, 43
... Head substrate, 43A ... Head connector, 44 ... Pump section, 45 ... Nozzle plate, 45
a ... nozzle formation surface, 46 ... discharge nozzle, 47 ... nozzle row, 48 ... flange portion, 49 ... screw hole, 52 ... cavity, 53 ... diaphragm, 70 ... inspection unit, 71 ... moving table, 72
... Inspection table, 73 ... Flushing collection table, 73a ... Receiving port, 74 ... Weight measuring unit, 81
... 1st foreign matter detection sensor, 81A ... 1st light projection part, 81B ... 1st light-receiving part, 81C ... 1st board | substrate detection sensor, 82 ... 2nd foreign matter detection sensor, 82A ... 2nd light projection part, 82B ... 2nd Light receiving part 82
C: second substrate detection sensor, 83: third foreign matter detection sensor, 83A: light projecting / receiving unit, 83B: reflecting plate, 84: fourth foreign matter detection sensor, 84A: light projecting / receiving unit, 84B: reflecting plate, 100: control device 101 ... CPU, 102 ... ROM, 103 ... RAM, 104 ... I / O device, 105 ... X
Axis linear motor drive circuit, 106 ... Y axis linear motor drive circuit, 108 ... Head drive circuit, 110 ... Substrate detection sensor drive circuit, 111 ... First foreign matter detection sensor drive circuit, 112 ... Second foreign matter detection sensor drive circuit, 113 ... third foreign matter detection sensor drive circuit, 114 ... fourth foreign matter detection sensor drive circuit.

Claims (5)

The substrate placed on the transport table is transported in the main scanning direction, and the functional liquid is converted into droplets from each nozzle of a droplet discharge head provided on a carriage arranged in parallel in the sub-scanning direction orthogonal to the main scanning direction. A pattern forming apparatus for discharging and forming a pattern on the substrate,
A first light projecting unit that emits first detection light and a first light receiving unit that receives the first detection light are provided along the upper surface of the substrate across the transport path of the transport table. A first foreign matter detection sensor for detecting foreign matter attached to the substrate based on an amount of received light received by the light receiving unit;
A second light projecting unit that emits second detection light along the upper surface of the substrate across a transport path of the transport table and a second light receiving unit that receives the second detection light are provided, and the second light receiving unit receives the second detection light. A second foreign matter detection sensor for detecting foreign matter attached to the substrate based on the amount of received light received by the light receiving unit;
The pattern forming apparatus, wherein the first light projecting unit and the second light projecting unit are provided on opposite sides of the transport path. The pattern forming apparatus according to claim 1,
A pattern forming apparatus, wherein optical axes of the first and second detection lights are inclined toward the substrate. In the pattern formation apparatus of Claim 1 or 2,
A first substrate detection sensor for detecting that the substrate is located immediately below the optical axis of the first detection light;
A second substrate detection sensor for detecting that the substrate is located immediately below the optical axis of the second detection light;
The first foreign matter detection sensor is driven and controlled based on the detection signal from the first substrate detection sensor, and the second foreign matter detection sensor is driven and controlled based on the detection signal from the second substrate detection sensor. And a foreign matter detection sensor control means. In the pattern formation apparatus in any one of Claims 1-3,
A pattern forming apparatus comprising a transport table foreign matter detection sensor for detecting foreign matter on an upper surface of the transport table. In the pattern formation apparatus in any one of Claims 1-4,
In addition to reciprocating in the main scanning direction independently of the transport table, an inspection unit is provided that is moved and arranged directly below the droplet discharge head and inspects droplets discharged from the droplet discharge head. ,
An inspection unit foreign matter detection sensor for detecting foreign matter in the inspection unit is provided.

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