JP2010043803A - Heat exchanger for chemical liquid - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a maintenance cost and to contribute to improvement in reliability by reducing a risk of liquid leakage caused by deterioration of a seal ring. <P>SOLUTION: A heat exchanger 1 for chemical liquid carries out heat exchanging to the chemical liquid L circulating inside by cooling or heating heat exchanging surfaces formed on its outer surfaces. For composing the heat exchanger, it is integrally formed as a whole by sintering predetermined burning material M so as to provide a chemical liquid circulation passage R for circulating the chemical liquid L inside. The heat exchanging surfaces Cu, Cd are provided on at least upper surface 2u and a lower surface 2d which are to be the outer surfaces. The heat exchanger 1 is equipped with: a heat exchanging block 2 provided with an inlet port Ri and an outlet port Re facing to the chemical liquid circulation passage R on at least either the upper surface 2u or the lower surface 2d; and a connection header 3 fixed to at least one 2u (2d) of the upper surface 2u and the lower surface 2d and provided with an inlet side connection part Ji communicating with the inlet port Ri and an outlet side connection part Je communicating with the outlet port Re. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a chemical heat exchanger that exchanges heat with respect to a chemical flowing through the inside by cooling or heating a heat exchange surface formed on an outer surface.

  Conventionally, as a heat exchanger for a chemical solution that performs heat exchange with respect to a chemical solution that circulates inside by cooling or heating a heat exchange surface formed on the outer surface, a cooling and heating device for a semiconductor processing solution disclosed in Patent Document 1 It has been known. The semiconductor processing liquid cooling and heating device (chemical liquid heat exchanger) disclosed in the publication forms a cooling and heating chamber by sandwiching a side wall between a pair of heat exchange substrates, and a semiconductor processing liquid is formed in the cooling and heating chamber. In addition to circulating the liquid, the circulating semiconductor processing liquid is brought into contact with each heat exchange substrate and cooled or heated, and at least the processing liquid contact surface side of the heat exchange substrate is a graphite base material covered with an amorphous carbon layer. The configuration or the heat exchange substrate is made of amorphous carbon.

  However, this cooling and heating apparatus for semiconductor processing liquid uses amorphous carbon having low thermal conductivity for the heat exchange substrate, so the thickness of the heat exchange substrate is suppressed to about 1 to 3 mm, and the graphite base material It is necessary to ensure the mechanical strength as a composite plate combining a reinforcing plate and a reinforcing plate, the heat transfer performance decreases due to the contact thermal resistance between different materials, and there is a limit to increase the heat exchange efficiency, and a pair of heat In addition to the need to form a cooling and heating chamber by sandwiching the side wall with an exchange substrate, it is necessary to construct a composite plate combining amorphous carbon and a graphite base material. The structure becomes complicated, resulting in an increase in the number of parts and an increase in cost due to the complexity of the manufacturing process, and a problem in that the durability tends to decrease due to thermal expansion and contraction between different materials. In addition, when replacing a deteriorated seal ring (O-ring), it is necessary to remove the heat exchange board, the thermo module, the heat dissipation block, etc., and maintenance cannot be easily performed, and the maintenance cost cannot be ignored.

On the other hand, in order to solve this problem, the present applicant has already been a heat exchanger for a chemical solution that performs heat exchange with respect to a chemical solution circulating inside by cooling or heating the heat exchange surface formed on the outer surface. , Heat exchange that forms a plurality of chemical flow passages through which the chemical liquid flows, and that at least the upper and lower surfaces serving as outer surfaces are formed as heat exchange surfaces and that a predetermined firing material is sintered to form a whole A heat exchanger for chemicals provided with a block was proposed in Patent Document 2. Since this chemical heat exchanger comprises a heat exchange block that is integrally formed as a whole by sintering a predetermined firing material that becomes a single material, it eliminates the disadvantages when it is configured as a composite plate, The disadvantage that the heat transfer performance decreases due to the contact thermal resistance between different materials can be eliminated, and the heat exchange efficiency as a heat exchanger can be improved. In addition, the overall structure of the heat exchanger can be simplified, the number of parts can be greatly reduced, and the cost can be reduced due to the simplification of the manufacturing process. Can do.
Japanese Patent Laid-Open No. 9-229587 JP 2008-64382 A

  However, the conventional chemical heat exchanger in Patent Document 2 described above still has the following problems to be improved.

  First, chemicals used in semiconductor processing solutions, etc. have recently been increased in order to increase the processing speed, and the temperature of the solution has been increased from the normal temperature range to a medium to high temperature range, and the chemical solution has been highly purified (strong oxidation, strong alkali). ing. Therefore, the erodibility by the chemical solution becomes strong, and in particular, the seal ring interposed between the heat exchange block and the connection header is likely to deteriorate. In this case, the thickness (width) of the seal ring may be increased. However, the thickness (area) of the end face of the heat exchange block cannot be increased so much from the viewpoint of manufacturing technology and heat exchange efficiency. There is a limit to increasing the thickness (width). After all, it is necessary to replace the seal ring at an early stage, and the cost increase associated with maintenance cannot be ignored.

  Secondly, when a heat exchange block is made of a brittle material such as amorphous carbon, fixing bolts cannot be screwed directly to the heat exchange block, so the heat exchange block and connection block must be fixed at both ends of the heat exchange block. It is necessary to bridge and connect a fixing bolt between a pair of sandwiched connection blocks, such as a problem with such a fixing structure, that is, it is necessary to increase the parallelism between both end faces of the heat exchange block, and the parallelism is If it is low, liquid leakage is likely to occur. Since the number of fixing bolts is limited, the fixing strength cannot be increased. Since the fixing bolt becomes longer, the influence of expansion and contraction due to thermal expansion is increased. The length in the longitudinal direction becomes long, leading to an increase in the size of the entire heat exchanger. It is easy to cause various troubles.

  The object of the present invention is to provide a heat exchanger for chemicals that solves the problems existing in the background art.

  In order to solve the above-described problems, the present invention configures the chemical liquid heat exchanger 1 that performs heat exchange with respect to the chemical liquid L flowing inside by cooling or heating the heat exchange surface formed on the outer surface. By sintering a predetermined firing material M and integrally forming the whole, a chemical flow path R through which the chemical liquid L is circulated is provided, and at least the upper surface 2u and the lower surface 2d serving as outer surfaces are provided with heat exchange surfaces Cu and Cd. And at least one of the upper surface 2u and the lower surface 2d is fixed to at least one of the upper surface 2u and the lower surface 2d (2d), and the heat exchange block 2 provided with the inlet Ri and the outlet Re facing the chemical flow path R. And an inflow side connection portion Ji communicating with the inflow port Ri and a connection header 3 provided with an outflow side connection portion Je communicating with the outflow port Re.

  In this case, according to a preferred aspect of the invention, the heat exchange block 2 and the connection header 3 can be fixed by a plurality of fixing bolts 4 penetrating a portion where the chemical liquid flow path R does not exist. Moreover, an amorphous carbon material or a silicon carbide material (SiC) is suitable for the firing material M. Furthermore, the chemical liquid flow passage R can be configured by a combination of a plurality of linear flow holes Rx ... formed in one direction or a combination of a plurality of linear flow holes Rx ..., Ry ... formed in two directions. The openings Rh that face the side surface 2s of the heat exchange block 2 in the chemical flow passage R can be blocked by a closing member 5 that is formed of the same material as that of the heat exchange block 2 or a different material. The connection header 3 may be composed of two header parts, a first header part 3i having an inflow side connection part Ji and a second header part 3e having an outflow side connection part Je, or an inflow side connection. You may comprise integrally by the single header part 3m which has the part Ji and the outflow side connection part Je.

  The chemical solution heat exchanger 1 according to the present invention having such a configuration has the following remarkable effects.

  (1) Since the opposed area between the heat exchange block 2 and the connection header 3 is not particularly limited, the thickness (width) of the seal ring interposed between the heat exchange block 2 and the connection header 3 can be increased. Therefore, even if the chemicals used in semiconductor processing liquids are heated to high temperatures and have become highly purified (strong oxidation, strong alkalinity), the risk of leakage due to deterioration of the seal ring can be reduced. The period can be extended, maintenance costs can be reduced, and reliability can be improved.

  (2) Since a predetermined calcined material M, which is a single material, is sintered to provide the heat exchange block 2 integrally formed as a whole, contact heat between different materials, which is a demerit when it is configured as a composite plate Reduced heat transfer performance due to resistance and reduced durability due to thermal expansion and contraction between dissimilar materials, improving heat exchange efficiency as a heat exchanger and simplifying the structure of the entire heat exchanger A basic effect based on the use of the heat exchanging block 2 can be enjoyed, such as reduction in the number of points and cost reduction associated with simplification of the manufacturing process.

  (3) If the heat exchange block 2 and the connection header 3 are fixed by a plurality of fixing bolts 4 penetrating a portion where the chemical liquid flow passage R does not exist, the fixing bolts 4. While being able to shorten, the freedom degree of selection with respect to the usage-amount of fixing bolt 4 ... can be raised. Therefore, since parallelism between both end faces of the heat exchange block 2 is not required, it is easy to manufacture and can eliminate liquid leakage at this part, and the fixing bolts 4 can be shortened. Can be reduced. In addition, since the number of fixing bolts 4 can be increased, the fixing strength can be increased, and the overall length in the longitudinal direction can be shortened, so that the entire heat exchanger can be made compact and compact. Can solve the problem.

  (4) According to a preferred embodiment, when an amorphous carbon material or a silicon carbide material is used as the firing material M, at least chemically and physically strong chemical resistance with respect to a chemical solution, and further, leakage of generated gas is prevented. The heat exchange block 2 excellent in gas impermeability, that is, the optimum heat exchange block 2 constituting the chemical liquid heat exchanger 1 can be obtained.

  (5) According to a preferred embodiment, the chemical flow path R is configured by a combination of a plurality of linear flow holes Rx ... formed in one direction or a combination of a plurality of linear flow holes Rx ..., Ry ... formed in two directions. In this case, the chemical flow passage R can be easily and surely provided even when an amorphous carbon material or a silicon carbide material such as an amorphous carbon material is used as the firing material M, and the heat exchange area, the maximum flow rate, The heat exchanger can be easily designed in consideration of pressure loss and the like.

  (6) According to a preferred embodiment, the opening Rh... Facing the side surface 2 s of the heat exchange block 2 in the chemical flow passage R is blocked by a closing member 5 formed of the same material as that of the heat exchange block 2 or a different material. For example, the chemical flow passage R can be provided more easily and reliably in combination with the combination of the plurality of linear flow holes Rx... Ry.

  (7) According to a preferred embodiment, the connection header 3 is composed of two header parts, a first header part 3i having a separate inflow side connection part Ji and a second header part 3e having an outflow side connection part Je. Then, since the heat insulation between the 1st header part 3i and the 2nd header part 3e can be improved, normally between the 1st header part 3i and the 2nd header part 3e which have a temperature difference around 10 [degreeC]. It can prevent unnecessary heat transfer (heat leakage) and contribute to the improvement of heat exchange efficiency. Moreover, the thermal deformation which arises by a temperature difference can be suppressed and the liquid leakage from the inflow side connection part Ji and the outflow side connection part Je can be prevented.

  (8) According to a preferred embodiment, if the connection header 3 is integrally formed by the single header portion 3m having the inflow side connection portion Ji and the outflow side connection portion Je, the inflow side connection portion Ji and the outflow side connection portion Je. In applications where the temperature difference between them is small, it is possible to contribute to cost reduction and ease of manufacture by halving the number of parts.

  Next, the best embodiment according to the present invention will be given and described in detail with reference to the drawings.

  First, the heat exchange block 2 and the connection header 3 used in the chemical liquid heat exchanger 1 according to the present embodiment will be described with reference to FIGS.

  As shown in FIG. 4, the heat exchange block 2 is integrally formed in a flat rectangular parallelepiped shape (plate shape) with a predetermined firing material M, preferably an amorphous carbon material. The upper surface 2u and the lower surface 2d which are the outer surfaces of the heat exchange block 2 are formed as flat heat exchange surfaces Cu and Cd, and a chemical solution flow path R through which the chemical solution L is circulated is provided inside the heat exchange block 2. The chemical flow passage R is constituted by a combination of a plurality of linear flow holes Rx... Ry. 4 is formed in eight straight flow holes Rx formed along the longitudinal direction (X direction) and in a short direction (Y direction) orthogonal to the straight flow holes Rx. The four straight flow holes Ry... In this case, each linear flow hole Rx is formed with one end side as an opening Rh in the side surface 2s of the heat exchange block 2, and the other end side of the side surface 2s without facing the side surface 2s of the heat exchange block 2. A bag path is formed in the vicinity. Each linear flow hole Ry is arranged on one end side in the longitudinal direction, and one end side is formed as an opening Rh by facing the side surface 2s of the heat exchange block 2, and the other end side is a heat exchange block. It forms in the shape of a bag path in the vicinity of the side surface 2s without facing the second side surface 2s. Each straight flow hole Rx ..., Ry ... is formed in a circular cross section, and between each straight flow hole Rx ..., Ry ... and the heat exchange surface Cu, and between each straight flow hole Rx ..., Ry ... and the heat exchange surface Cd. It is desirable to select the thickness of the thinnest part in 2 [mm] or less. In this way, if the chemical flow passage R is configured by a combination of a plurality of linear flow holes Rx..., Ry... Formed in two directions, a material that is difficult to be molded such as an amorphous carbon material or a silicon carbide material as the fired material M. Even in the case of using the chemical liquid flow path R, it is possible to easily and reliably provide the chemical liquid flow path R, and in particular, it is possible to easily perform the heat exchanger design considering the heat exchange area, the maximum flow rate, the pressure loss, and the like.

  Each opening Rh is closed by a separately prepared closing member 5. In this case, as shown in FIG. 4, a cylindrical occlusion member 5 provided with screw holes Rhn... On the inner peripheral surface from the openings Rh. Seal. The closing members 5 may be formed of the same material as the heat exchange block 2 or may be formed of other materials. When the same material is used, before the heat exchange block 2 is sintered, the closing member 5 is screwed into each opening Rh, and then sintered together with the heat exchange block 2. Can be processed. Further, as other materials, it can be formed of a fluorine-based resin (PTFE, PFA, etc.) having excellent chemical resistance. Thus, if each opening part Rh ... is obstruct | occluded by the obstruction | occlusion member 5 ..., it combines with the structure of several linear flow hole Rx ..., Ry ... formed in the two directions mentioned above, and it is easier and more easily. The chemical liquid flow path R can be reliably provided.

  Further, on the upper surface 2u of the heat exchange block 2, on the other end side in the longitudinal direction, that is, on the opposite side to the side where each linear flow hole Ry is provided, the inlet Ri facing the chemical liquid flow path R and An outlet Re is provided. In this case, the inflow port Ri is formed in an elongated shape so as to straddle the four straight flow holes Rx arranged on one side in the short direction of the heat exchange block 2, and the outflow port Re is also formed in an elongated shape. It is provided so as to straddle the four straight flow holes Rx arranged on the other side in the short direction of the exchange block 2. In addition, four bolt insertion holes 11 penetrating the upper and lower surfaces are provided at positions where the inflow ports Ri are surrounded at equal intervals and the straight flow holes Rx are not present, and the outflow ports Re are surrounded at equal intervals. Four bolt insertion holes 11 penetrating the upper and lower surfaces are provided at positions where the straight flow holes Rx are not present. In addition, 12 ... is a plurality of bolt insertion holes formed in the center in the short direction of the heat exchange block 2, and is provided at regular intervals in the longitudinal direction.

  On the other hand, in the manufacture of the heat exchange block 2, a known manufacturing method related to an amorphous carbon material can be used. For example, a thermosetting resin represented by a phenol resin, a polyimide resin, an epoxy resin, a furan resin, or the like is molded using an injection molding machine or a compression molding machine. A heat exchange block 2 as a carbonized amorphous carbon molded body can be obtained by firing at a high temperature of several hundred degrees Celsius. Even if a silicon carbide material (a compound of silicon and carbide: SiC) is used as the firing material M in addition to the amorphous carbon material, good results can be obtained similarly to the amorphous carbon material. As described above, when an amorphous carbon material or a silicon carbide material is used as the firing material M, at least chemically and physically strong chemical resistance with respect to a chemical solution, and also impervious to gas that prevents leakage of generated gas. It is possible to obtain the heat exchange block 2 that is excellent in performance, that is, the optimum heat exchange block 2 that constitutes the chemical liquid heat exchanger 1.

  On the other hand, as shown in FIGS. 1 to 3, the connection header 3 is composed of two header parts, a first header part 3i having an inflow side connection part Ji and a second header part 3e having an outflow side connection part Je. To do. Since the first header part 3i and the second header part 3e can be configured identically, by preparing two first header parts 3i, 3i, one is the first header part 3i and the other is the second header part 3e. Use it. In this way, if the connection header 3 is constituted by two header parts, ie, the first header part 3i having the inflow side connection part Ji and the second header part 3e having the outflow side connection part Je, Since the heat insulation between the one header part 3i and the second header part 3e can be improved, normally unnecessary heat transfer between the first header part 3i and the second header part 3e having a temperature difference of about 10 [° C.]. (Heat leakage) can be prevented, contributing to the improvement of heat exchange efficiency, and further, the heat deformation caused by the temperature difference can be suppressed, and the liquid leakage from the inflow side connection portion Ji and the outflow side connection portion Je can be prevented. is there.

  In this case, the first header portion 3i is formed in a rectangular parallelepiped shape with, for example, a fluorine resin (PTFE, PFA, etc.) having excellent chemical resistance so that the first header portion 3i can come into surface contact with the upper surface 2u of the heat exchange block 2. One-piece molding. As shown in FIG. 3, the first header portion 3 i is connected to the inflow port Ri on the upper surface 2 u, and therefore, at the time of connection, the four bolt insertion holes 22, whose positions coincide with the four bolt insertion holes 11. Provide. Further, a liquid passage 23 penetrating in the vertical direction is provided in the center of the first header portion 3i. When the liquid passage 23 is assembled to the heat exchange block 2, the lower end portion is connected to the inflow port Ri, and the upper end portion of the liquid passage 23 serves as the inflow side connection portion Ji. The inflow side connection portion Ji is fitted with a tip of a chemical liquid tube Ti formed of a fluorine resin or the like, and can be fixed and connected with an adhesive or the like. Furthermore, a seal ring housing portion 24 is provided on the lower surface of the first header portion 3i. The seal ring accommodating portion 24 is formed between the opening edge of the inflow port Ri and each bolt insertion hole 11 along the opening edge of the inflow port Ri. In addition, although the inflow side was demonstrated, the outflow side using the 2nd header part 3e can also be comprised similarly to an inflow side.

  Next, a method for assembling the chemical heat exchanger 1 according to the present embodiment will be described with reference to FIGS.

  First, the connection header 3 (first header part 3i, second header part 3e) is assembled to the heat exchange block 2. First, two seal rings 41... Integrally formed of fluorine resin or the like are prepared and accommodated in the seal ring accommodating portions 24 of the header portions 3i, 3e, and the header portions 3i, 3e are provided in the heat exchange block 2. Is placed with the seal ring 41 side facing each other. At this time, the first header portion 3i is arranged so as to cover the inflow port Ri, and the second header portion 3e is arranged so as to cover the outflow port Re. As shown in FIGS. 1 and 2, a regulating plate 42 formed of a metal material is placed on the upper surface of the first header portion 3i, and a protective plate 43 formed of a resin material or the like on the lower surface 2d of the heat exchange block 2. Further, the nut plate 44 is applied to the lower surface of the intervening plate 43. In this case, the restriction plate 42 and the interposition plate 43 have four insertion holes whose positions coincide with the four bolt insertion holes 11, and the nut plate 44 has a position in the four bolt insertion holes 11. There are four screw holes 44n. In addition, an opening for passing the chemical liquid tube Ti is provided in the center of the regulation plate 42. On the other hand, four fixing bolts 4 are prepared, and each fixing bolt 4 is loaded with a spring 45, and each fixing bolt 4 is connected to the regulating plate 42, the first header portion 3i (bolt insertion hole) from the tip side. 22..., The heat exchange block 2 (bolt insertion holes 11...) And the protective plate 43 are inserted in this order, and the tip is screwed into the screw holes 44 n. The fixing bolts 4 are desirably made of metal such as stainless steel, but the material is not particularly limited. By sandwiching the first header portion 3i between the restriction plate 42 and the nut plate 44, thermal deformation of the first header portion 3i can be prevented, and an assembly structure that is resistant to thermal fluctuation can be configured. Although the 1st header part 3i side was demonstrated, the 2nd header part 3e side can also be assembled | attached similarly. Thereby, the heat exchange unit U which assembled | attached and integrated the header 3 for a connection (1st header part 3i, 2nd header part 3e) to the heat exchange block 2 can be obtained.

  As shown in FIGS. 5 and 6, a thermo module 51u using a Peltier element is attached to one heat exchanging surface Cu of the heat exchanging block 2, and a heat dissipating surface (heat absorbing surface) of the thermo module 51u. ) Is provided with a cooling part 52u. Similarly, a thermo module 51d using a Peltier element is attached to the other heat exchange surface Cd of the heat exchange block 2, and a cooling unit 52d is attached to the heat radiation surface (heat absorption surface) of the thermo module 51d. In this case, since the plurality of linear flow holes Rx..., Ry... Formed in two directions (X direction and Y direction) are provided in the heat exchange block 2, a plurality of rectangular thermo modules 51u. The heat exchange surfaces Cu and Cd can be efficiently disposed on almost the entire surface, and the cooling modules 52u and 52d having the same dimensions (same shape) are disposed on the thermo modules 51u. Cooling can be performed. In the figure, reference numerals 53u and 53d denote water distribution pipes for circulating cooling water through the cooling parts 52u and 52d. The cooling units 52u and 52d are water-cooled types that circulate cooling water, but can function as heating units by circulating hot water.

  Then, the cooling parts 52u and 52d are coupled by the fixing bolts 61. In the case of the illustration, fifteen fixing bolts 61 are prepared, and the five points in the center in the short direction and the five points on both sides are fixed. The fixing bolts 61 are loaded with springs 62, and the fixing bolts 61 are threaded into the screw holes provided in the cooling part 52d after passing through the insertion holes provided in the cooling part 52u from the tip side. . At this time, the fixing bolts 61 at the five positions in the center in the short direction are inserted into the five bolt insertion holes 12 provided in the heat exchange block 2, and the fixing bolts 61 at the five positions on both sides are shown in FIG. As shown in FIG. 3, the outside of the heat exchange block 2 can be passed. Thereby, the heat exchanger 1 for chemical | medical solutions shown in FIG.5 and FIG.6 can be obtained.

  Therefore, according to the chemical solution heat exchanger 1 according to the present embodiment, the facing area between the heat exchange block 2 and the connection header 3 is not particularly limited, and therefore, between the heat exchange block 2 and the connection header 3. The thickness (width) of the interposed seal rings 41 can be increased. Therefore, in order to increase the processing speed, even if the chemicals used in the semiconductor processing liquid or the like are heated to a high temperature or highly purified (strong oxidation, strong alkalinization), liquid leakage due to deterioration of the seal ring 41. Since the risk can be reduced, the use period of the seal rings 41 can be extended, the maintenance cost can be reduced, and the reliability can be improved. In addition, even when the seal rings 41 are exchanged, the work can be performed without removing the thermo modules 51 and the cooling units 52. Therefore, it is possible to contribute to the reduction of the maintenance cost from this viewpoint. Moreover, since the heat exchange block 2 is integrally formed as a whole by sintering a predetermined firing material M that is a single material, contact thermal resistance between different materials, which is a disadvantage when it is configured as a composite plate Reduced heat transfer performance due to heat, and reduced durability due to thermal expansion and contraction between different materials, thereby improving heat exchange efficiency as a heat exchanger and simplifying the structure of the entire heat exchanger The basic effects based on the use of the heat exchanging block 2 can be enjoyed, such as a reduction in cost due to the reduction of the cost and the simplification of the manufacturing process.

  Furthermore, since the chemical liquid heat exchanger 1 according to the present embodiment fixes the heat exchange block 2 and the connection header 3 with a plurality of fixing bolts 4 penetrating a portion where the chemical liquid flow path R does not exist, The fixing bolts 4 can be shortened as much as possible, and the degree of freedom in selecting the number of the fixing bolts 4 can be increased. Therefore, since parallelism between both end faces of the heat exchange block 2 is not required, it is easy to manufacture and can eliminate liquid leakage at this part, and the fixing bolts 4 can be shortened. Can be reduced. In addition, since the number of fixing bolts 4 can be increased, the fixing strength can be increased, and the overall length in the longitudinal direction can be shortened, so that the entire heat exchanger can be made compact and compact. Can solve the problem.

  Next, functions of the chemical liquid heat exchanger 1 according to the present embodiment will be described with reference to FIGS.

  When the chemical liquid L is cooled by the chemical liquid heat exchanger 1, the heat exchange surfaces Cu and Cd of the heat exchange block 2 are cooled by energizing the thermo modules 51u. At this time, the heat radiation from the heat radiation surfaces of the thermo modules 51u, 51d,... Is absorbed by the cooling parts 52u, 52d.

  On the other hand, the chemical liquid L flows into the inflow side connection portion 4i from the uncooled device (not shown) through the chemical liquid tube Ti and is arranged on one side in the short direction of the heat exchange block 2 through the inflow port Ri. It flows into the flow holes Rx. And the chemical | medical solution L which flowed through this linear flow hole Rx ... flows in into the four linear flow holes Rx ... arranged on the other side in the short direction of the heat exchange block 2 through the orthogonal linear flow holes Ry .... . Moreover, the chemical | medical solution L which flowed through this linear flow hole Rx ... reaches the outflow side connection part 4e via the outflow port Re, and is supplied to a to-be-cooled apparatus etc. not shown through the chemical | medical solution tube Te. In addition, in each figure, the distribution route of the chemical | medical solution L is shown with a dotted-line arrow. Accordingly, the chemical liquid L flowing through the chemical liquid flow path R through such a flow path is heat-exchanged with the cooling units 52u and 52d via the heat exchange surfaces Cu and Cd, and the chemical liquid L is cooled.

  On the other hand, when the chemical liquid L is heated, the heat exchange surfaces Cu and Cd of the heat exchange block 2 may be heated by energizing the thermo modules 51u. At this time, hot water is circulated through the cooling units 52u and 52d to heat (cool) the heat radiation surfaces of the thermo modules 51u.

  Next, the chemical heat exchanger 1 according to the modified embodiment of the present invention will be described with reference to FIGS.

  7A to 7C show a modification example of the heat exchange block 2. Although the heat exchange block 2 shown in FIGS. 1-6 showed the case where the chemical | medical solution flow path R was comprised by the U-shaped path | route, Fig.7 (a) has comprised the chemical | medical solution flow path R by two I-shaped paths. Indicates when to do. Accordingly, in the case of FIG. 7A, two inflow ports Ri and Ri are arranged in parallel on one end side in the longitudinal direction of the heat exchange block 2, and two outflow ports Re are disposed on the other end side in the longitudinal direction of the heat exchange block 2. , Re. In the case of Fig.7 (a), it becomes the form which does not provide the straight flow hole Ry ... of a transversal direction, and comprises the chemical | medical solution flow path R by the combination of several linear flow hole Rx ... formed in one direction. FIG. 7B shows a case where the chemical liquid flow path R is constituted by one I-shaped path. Accordingly, in the case of FIG. 7B, one inflow port Ri is provided on one end side in the longitudinal direction of the heat exchange block 2, and one outflow port Re is provided on the other end side in the longitudinal direction of the heat exchange block 2. In the case of FIG.7 (b), the linear flow hole Ry ... of a transversal direction is provided in the longitudinal direction one end side and other end side of the heat exchange block 2, respectively, and inflow port Ri and all straight lines are provided by this straight flow hole Ry ... One end side of the circulation holes Rx... Is communicated, and the other end side of the outflow port Re and all the straight circulation holes Rx. Furthermore, FIG.7 (c) shows the case where the chemical | medical solution flow path R comprises the same U-shaped path | route as the heat exchange block 2 shown in FIGS. 1-6, but the shape of the inflow port Ri and the outflow port Re is circular. Is formed. Accordingly, as in the case of FIG. 7B, straight flow holes Ry in the short direction are provided, and one end sides of the straight flow holes Rx corresponding to the inflow ports Ri are communicated with and correspond to the outflow ports Re. One end side of the straight flow holes Rx. Thus, the route pattern of the chemical liquid flow path R provided in the heat exchange block 2 can be implemented in various forms.

  In FIG. 8, the connection header 3 is integrally formed by a single header portion 3m having an inflow side connection portion Ji and an outflow side connection portion Je. Therefore, in applications where the temperature difference between the inflow side connection portion Ji and the outflow side connection portion Je is small, it is possible to contribute to cost reduction and manufacturability by halving the number of parts. FIG. 9 shows a modified example in which the orientation of the inflow side connection portion Ji in the first header portion 3i (the same for the 3e side) of the connection header 3 is changed. Although the 1st header part 3i shown in FIGS. 1-6 provided the linear liquid channel | path 23 penetrated to an up-down direction inside, the case where the direction of the inflow side connection part Ji was orient | assigned to the perpendicular direction upper direction was shown. The first header portion 3i shown in FIG. 9 is provided with an L-shaped liquid passage 23m inside and the inflow side connection portion Ji oriented in the horizontal direction. Thus, the direction of the inflow side connection portion Ji can be arbitrarily set by the form of the liquid passage 23 provided in the first header portion 3i.

  10 and 11 show a modification example of the connection form between the connection header 3 and the heat exchange block 2. The inflow ports Ri (same on the Re side) shown in FIGS. 1 to 6 are formed so as to straddle the plurality of linear flow holes Rx... Are provided for each of the straight flow holes Rx, and liquid passages (23w, 23f,...) Communicating with the inflow ports Ri are provided on the first header portion 3i side. In this case, FIG. 10 is provided with an elongated liquid passage 23w straddling each inflow port Ri ... on the lower surface of the first header portion 3i, and penetrates the liquid passage 23w up and down provided inside the first header portion 3i. FIG. 10 (b) shows a cross section of the first header portion 3i, and FIG. 10 (a) shows the upper surface 2u of the heat exchange block 2. The upper surface 2u of the heat exchange block 2 is shown in FIG. Further, FIG. 11 shows that the liquid passage 23 provided in the first header portion 3i is branched corresponding to each inflow port Ri ..., and a plurality of branched liquid passages 23f, 23f are provided to each inflow port Ri ... FIG. 11 (b) shows a cross section of the first header portion 3i, and FIG. 11 (a) shows the upper surface 2u of the heat exchange block 2.

  FIGS. 12A and 12B show a modification in which the basic form of the first header portion 3i (the same for the 3e side) in the connection header 3 is different. FIG. 12A shows a pipe-shaped inflow side connection portion Ji coupled to or integrally formed with a donut-shaped (ring board-shaped) attachment portion 3if. Accordingly, the first header portion 3i in FIG. 12A can be assembled to the heat exchange block 2 in FIG. In the first header portion 3i in FIG. 12A, the same material (baking material) as that of the heat exchange block 2 can be used as the material. In this case, since the same material is used, it is possible to prevent an adverse effect of thermal deformation due to a difference in thermal expansion coefficient. In addition, this inflow side connection part Ji can be directly inserted in a chemical | medical solution tube, or can be connected to a chemical | medical solution tube via a coupling. The attachment portion 3if is formed with a constant thickness, and a seal ring accommodating portion 24 is provided on the lower surface. FIG.12 (b) uses the attachment part 3ifs which made thickness thinner compared with Fig.12 (a). In the case of FIG. 12B, the seal ring accommodating portion 24 cannot be provided, and therefore the seal ring accommodating portion 24 may be provided on the upper surface 2 u of the heat exchange block 2. Thus, the form (shape) of the connection header 3 can be arbitrarily implemented.

  FIGS. 13A and 13B show a modification example of the assembly form of the connection header 3. FIG. 13A is a view in which the second header portion 3e is assembled to the lower surface 2d of the heat exchange block 2 in the form of FIGS. 7A and 7B. Therefore, in this case, the outlet Re may be provided on the lower surface 2d of the heat exchange block 2. Further, FIG. 13 (b) shows that in the form of FIG. 13 (a), another first header portion 3id is further provided on the lower surface of the first header portion 3i assembled on the upper surface 2u of the heat exchange block 2. This is in addition to 2d. Therefore, in this case, an inflow port Ric that penetrates the upper and lower surfaces of the heat exchange block 2 may be provided. In addition, Tid shows the chemical | medical solution tube connected to the 1st header part 3id.

  7 to 13, other configurations and functions can be implemented according to the embodiment shown in FIGS. 1 to 6. For this reason, in the embodiment of FIGS. 7 to 13, the same parts as those of the embodiment shown in FIGS. 1 to 6 are denoted by the same reference numerals to clarify the configuration, and detailed description thereof is omitted.

  Although various embodiments have been described in detail above, the present invention is not limited to such embodiments, and details, configurations, shapes, quantities, numerical values, materials, and the like do not depart from the spirit of the present invention. It can be changed, added, or deleted arbitrarily. For example, the chemical flow passage R can be made into a laminar flow or a turbulent flow by changing the quantity, and the turbulent flow effect can be further enhanced by roughening the inner surface of the chemical flow passage R. In addition, as the chemical solution L, various chemical solutions including a semiconductor processing solution can be applied, and if necessary, the chemical solution L can be used as it is for a solution other than the chemical solution such as water.

A partial cross-sectional side view of a heat exchange unit of a chemical heat exchanger according to the best embodiment of the present invention, A partial cross-sectional front view of the heat exchange unit, A plan view of the heat exchange unit, A partial cross-sectional plan view of the heat exchange block of the heat exchange unit, Top view of the heat exchanger for the chemical solution, Side view of the chemical liquid heat exchanger, The top view which shows the modification examples (a), (b) and (c) of the heat exchange block of the heat exchanger for chemicals according to the modified embodiment of the present invention, The top view which shows the example of a change of the header for connection of the heat exchanger for chemical | medical solutions, Partial cross-sectional side view showing another modification example of the connection header of the chemical liquid heat exchanger, (A) a plan view of the heat exchange block and (b) a sectional front view of the connection header, showing a modification of the connection form of the heat exchange block and the connection header of the chemical liquid heat exchanger, (A) a plan view of the heat exchange block and (b) a sectional front view of the connection header, showing another modification of the connection form of the heat exchange block and the connection header of the chemical liquid heat exchanger, The perspective view which shows the other modification (a) and (b) of the header for connection of the heat exchanger for chemical | medical solutions, Side views showing modified examples (a) and (b) of the assembly form of the connection header of the chemical liquid heat exchanger,

Explanation of symbols

  1: heat exchanger for chemical solution, 2: heat exchange block, 2u: upper surface, 2d: lower surface, 2s: side surface, 3: header for connection, 3i: first header portion, 3e: second header portion, 3m: single Header part, 4 ...: Fixing bolt, 5 ...: Blocking member, L: Chemical liquid, M: Firing material, R: Chemical liquid flow path, Ri: Inlet, Ro: Outlet, Rx ...: Straight flow hole, Ry ...: Straight flow hole, Rh ...: opening, Cu: heat exchange surface, Cd: heat exchange surface, Ji: inflow side connection portion, Je: outflow side connection portion

Claims (7)

  In the heat exchanger for the chemical liquid that performs heat exchange for the chemical liquid circulating inside by cooling or heating the heat exchange surface formed on the outer surface, by sintering a predetermined firing material and integrally forming the whole, Provided with a chemical flow passage for flowing a chemical solution therein, and provided with at least one of the upper surface and the lower surface serving as the outer surface and the heat exchange surface, and an inlet and an outlet facing the chemical flow passage on at least one of the upper surface and the lower surface And a connection header that is fixed to at least one of the upper surface and the lower surface and has an inflow side connection portion that communicates with the inflow port and an outflow side connection portion that communicates with the outflow port. A heat exchanger for chemicals, comprising:   2. The chemical heat exchanger according to claim 1, wherein the heat exchange block and the connection header are fixed by a plurality of fixing bolts penetrating a portion where the chemical flow passage does not exist.   The chemical heat exchanger according to claim 1 or 2, wherein an amorphous carbon material or a silicon carbide material is used as the firing material.   The said chemical | medical solution flow channel | path is comprised by the combination of the some linear flow hole formed in one direction, or the combination of the some linear flow hole formed in two directions. Heat exchanger for chemicals.   The opening part which faces the side surface of the said heat exchange block in the said chemical | medical solution flow path is obstruct | occluded by the obstruction | occlusion member formed with the raw material same as the said heat exchange block, or a different raw material. The heat exchanger for chemical | medical solutions as described.   The said connection header is comprised with two header parts of the 1st header part which has the said inflow side connection part, and the 2nd header part which has the said outflow side connection part, The any one of Claims 1-5 characterized by the above-mentioned. A heat exchanger for chemicals according to 1.   The said connection header is comprised integrally by the single header part which has the said inflow side connection part and the outflow side connection part, The heat exchanger for chemical | medical solutions in any one of Claims 1-5 characterized by the above-mentioned.

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