JP2010039384A - Method for manufacturing photomask, and drawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a photomask with high yield and to provide a drawing device applied to the method. <P>SOLUTION: The method for manufacturing the photomask includes: a pre-drawing inspection step, in which after a substrate for photomask formation having a photosensitive material layer formed on a substrate is mounted on a drawing stage in a drawing device, the substrate for photomask formation is inspected for foreign substances, and when a foreign substance is detected, the position of the foreign matter is detected and mapped to the drawing data for drawing an image by the drawing device; and a drawing step, in which after the pre-drawing inspection step, an image is drawn on the photosensitive material layer of the substrate for photomask formation. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a photomask manufacturing method having a step of inspecting foreign matter and a drawing apparatus applied thereto.

  Photomasks used for manufacturing semiconductor integrated circuits (LSIs), liquid crystal displays (LCDs), printed wiring boards (PWBs) and the like are required to form patterns with high accuracy and high quality. In recent years, as the size of liquid crystal panels has increased, the size of photomasks has also increased. Therefore, it takes a relatively long time to fabricate photomasks, and photomasks are expensive. ing.

  Conventionally, a photomask is formed by forming a metal thin film such as a chromium film on a transparent substrate such as a glass substrate, applying a resist sensitive to energy such as light or electron beam on the metal thin film, and then masking based on design data. It is manufactured by drawing pattern data with light or electron beam, developing to form a resist pattern, patterning the metal thin film by etching using this resist pattern as a mask, and then peeling the resist It was. Then, a photomask was obtained by inspecting dimensions / position accuracy, appearance, etc., and correcting defects as necessary.

  The quality of a photomask is greatly influenced by the quality of a substrate (photomask forming substrate) coated with a resist to be used for drawing. Therefore, conventionally, an inspection apparatus inspects a photomask forming substrate before placing the photomask forming substrate on a drawing apparatus.

  For example, Patent Document 1 discloses a photomask forming substrate for manufacturing a target product from among a group of photomask forming substrates used for drawing when manufacturing a photomask, particularly in terms of product quality. Substrate selection devices that can be selected successfully have been proposed.

JP 2002-55437 A

  However, there is a high possibility that foreign substances adhere to the photomask forming substrate when the photomask forming substrate is transported to or placed on the drawing apparatus. Therefore, even if the inspection apparatus inspects the photomask formation substrate before placing the photomask formation substrate on the drawing apparatus and determines that there is no foreign matter, the photo placed on the drawing apparatus There is a high possibility that a problem of foreign matter adhering to the mask forming substrate will occur.

  The present invention has been made in view of the above problems, and has as its main object to provide a method of manufacturing a photomask having a high yield and a drawing apparatus applied thereto.

  In order to achieve the above object, the present invention provides a method for removing foreign matter on a photomask forming substrate after placing the photomask forming substrate having a photosensitive material layer formed on the substrate on a drawing stage in a drawing apparatus. Inspecting, if a foreign object is detected, detecting the position of the foreign object, and a pre-drawing inspection process for associating the position of the foreign object with drawing data to be drawn by the drawing device, and after the pre-drawing inspection process, And a drawing step of drawing on the photosensitive material layer of the photomask forming substrate.

  According to the present invention, the foreign substance is inspected before the drawing starts after the photomask forming substrate is placed on the drawing stage in the drawing apparatus. It is possible to inspect foreign matter adhering to the photomask, and to improve the quality and yield of the photomask. Further, according to the present invention, since the foreign substance is inspected by the drawing apparatus, it is possible to accurately compare the drawing data and the detected position of the foreign substance.

  In the above invention, the foreign matter on the photomask forming substrate is inspected during the drawing process, and when the foreign matter is detected, the position of the foreign matter is detected, and the position of the foreign matter and the drawing data are determined. You may perform the inspection process during drawing made to respond | correspond. This is because foreign matters are inspected during drawing, and foreign matters attached during drawing can be inspected, and the quality and yield of the photomask can be further improved.

  In the present invention, if the position of the foreign matter overlaps the drawing data in the pre-drawing inspection step, the drawing data on the photomask forming substrate is added after the pre-drawing inspection step and before the drawing step. A position adjustment process for adjusting the position may be performed. This is because even when the position of the foreign matter overlaps with the drawing data, the overlap between the position of the foreign matter and the drawing data may be eliminated by adjusting the position of the drawing data with respect to the photomask forming substrate.

  Further, in the present invention, when the position of the foreign matter overlaps the drawing data in the pre-drawing inspection step, the use of the photomask forming substrate may be stopped. In this case, since it is not necessary to perform drawing on the rejected photomask forming substrate, the manufacturing cost can be reduced.

  Further, the present invention inspects foreign matter on the photomask forming substrate during the drawing process of drawing on the photosensitive material layer of the photomask forming substrate having the photosensitive material layer formed on the substrate, and detects the foreign matter. In such a case, a photomask manufacturing method is provided, in which a position of the foreign matter is detected, and an in-drawing inspection step is performed in which the position of the foreign matter is associated with the drawing data to be drawn.

  According to the present invention, since foreign matter is inspected during drawing, foreign matter attached during drawing can be inspected, and the quality and yield of the photomask can be improved. Further, according to the present invention, since the foreign substance is inspected by the drawing apparatus, it is possible to accurately compare the drawing data and the detected position of the foreign substance.

  Furthermore, the present invention provides a drawing stage for placing a photomask forming substrate having a photosensitive material layer formed on the substrate, and a drawing optical system for drawing on the photomask forming substrate placed on the drawing stage. The inspection unit that inspects the foreign matter on the photomask forming substrate and detects the position of the foreign matter, the position of the foreign matter detected by the inspection unit, and the drawing data to be drawn by the drawing optical system correspond to each other And a processing unit.

  According to the present invention, since the drawing apparatus has an inspection unit, foreign matter can be inspected immediately before the start of drawing, and foreign matter attached when the photomask forming substrate is transported to or placed on the drawing apparatus, It is possible to inspect foreign matter adhered during drawing. Therefore, the quality and yield of the photomask can be improved by using the drawing apparatus of the present invention. Further, according to the present invention, since the foreign object can be inspected by the drawing apparatus, it is possible to accurately compare the drawing data and the detected position of the foreign substance. Furthermore, according to the present invention, since the drawing optical system and the inspection unit can be made independent, it is possible to prevent the weight of the drawing optical system from increasing and to prevent the control from becoming difficult.

  In the present invention, since foreign matter is inspected by the drawing apparatus, there is an effect that the quality and yield of the photomask can be improved.

  Hereinafter, the photomask manufacturing method and drawing apparatus of the present invention will be described in detail.

A. First, a method for manufacturing a photomask of the present invention will be described.
The photomask manufacturing method of the present invention includes a first embodiment in which an inspection is performed before drawing after a photomask forming substrate is placed on a drawing stage in a drawing apparatus, and a second embodiment in which an inspection is performed during drawing. It can be divided into two embodiments. Hereinafter, each embodiment will be described separately.

I. First Embodiment A first embodiment of the photomask manufacturing method of the present invention is the above photomask after the photomask forming substrate having the photosensitive material layer formed on the substrate is placed on the drawing stage in the drawing apparatus. Inspecting foreign matter on the forming substrate, detecting the position of the foreign matter when the foreign matter is detected, and a pre-drawing inspection step for associating the position of the foreign matter with the drawing data to be drawn by the drawing device; And a drawing step of drawing on the photosensitive material layer of the photomask forming substrate after the pre-drawing inspection step.

A method for manufacturing a photomask according to this embodiment will be described with reference to the drawings.
FIG. 1 is a process diagram showing an example of a photomask manufacturing method according to this embodiment. First, a photomask forming substrate on which a photosensitive material layer (also simply referred to as a resist) is formed is placed on a drawing stage in a drawing apparatus (S1), and the position of the photomask forming substrate is detected (S1). S2). Next, the foreign matter on the photomask forming substrate is inspected (S3), and if it is confirmed that there is a foreign matter (S4), the position of the foreign matter is detected (S5). Next, the detected position (1) of the foreign matter is made to correspond to the drawing data (2) to be drawn by the drawing apparatus (S6), and the photomask forming substrate according to whether or not the position of the foreign matter and the drawing data overlap. A pass / fail decision is made (S7). If the position of the foreign object and the drawing data do not overlap (pass), then drawing is started (S21).
Further, the foreign matter on the photomask forming substrate is inspected (S3), and if it is confirmed that there is no foreign matter (S4), then drawing is started (S21).
On the other hand, the position of the foreign matter is associated with the drawing data (S6), and if the position of the foreign matter and the drawing data overlap (S7) (in the case of failure), the photomask forming substrate is removed from the drawing apparatus (S22). ).
In FIG. 1, S1 to S7 are pre-drawing inspection steps S11.

  The acceptance / rejection determination of the photomask forming substrate in this embodiment can be performed, for example, as shown in FIGS. First, the position of the foreign matter 12 detected on the photomask forming substrate 11 as illustrated in FIG. 2A and the drawing data 13 for drawing with the drawing apparatus as illustrated in FIG. As shown in FIG. 2C, it is confirmed by overlapping. 3A is an enlarged view of A in FIG. 2C, and FIG. 3B is an enlarged view of B in FIG. 2C. In the example shown in FIG. 3A, it is determined that the position of the foreign material 12 overlaps the drawing data 13. On the other hand, in the example shown in FIG. 3B, it is determined that the position of the foreign object 12 does not overlap the drawing data 13. The entire photomask forming substrate illustrated in FIGS. 2 and 3 is determined to be unacceptable because it is determined that the position of the foreign matter overlaps with the drawing data. On the other hand, when it is determined that the position of the foreign matter and the drawing data do not overlap with each other as a whole photomask forming substrate, it is determined as acceptable.

“Drawing data” refers to an exposure unit.
Here, an example of forming a patterned light-shielding portion will be described with respect to defects caused by foreign matter when the photosensitive material layer is a positive type or a negative type.
In general, in the case of a negative resist, if a foreign substance adheres to the photosensitive material layer serving as an exposed portion, exposure of the resist is hindered, the resist becomes underexposed, and a chipped pattern or a pinhole occurs in the developed resist pattern. As a result, the light-shielding portion is lost or pinholes (white defects) are generated on the photomask. On the other hand, in the non-exposed portion, even if there is a foreign matter on the photosensitive material layer, the foreign matter is easily removed along with the dissolution of the resist during development, and is not easily defective.
In general, in the case of a positive resist, if a foreign substance adheres on the photosensitive material layer serving as an exposed portion, exposure of the resist is hindered, the resist is underexposed, and a resist residue is generated in the developed resist pattern. As a result, an excessive light shielding portion (black defect) is generated on the photomask. On the other hand, in the non-exposed part, the resist remains at the time of development, so that even if there is a foreign substance, no defect is caused.
Therefore, the drawing data in the present invention refers to the exposure part.

  In the present embodiment, after the photomask forming substrate is placed on the drawing stage in the drawing apparatus, the foreign matter is inspected immediately before starting drawing, so when the photomask forming substrate is transported to the drawing apparatus, It is possible to inspect foreign matter adhering to the placement. Therefore, the quality of the photomask (product) and the yield are improved. Furthermore, since it is not necessary to perform drawing on a rejected photomask forming substrate, the manufacturing cost can be reduced.

  In this embodiment, since the foreign substance is inspected by the drawing apparatus after the photomask forming substrate is placed on the drawing stage in the drawing apparatus, the positional relationship between the position of the foreign substance and the drawing data is, for example, It can be confirmed in units of μm. Therefore, it is possible to compare the drawing data and the detection position of the foreign object with high accuracy, and to perform pass / fail determination with high accuracy.

When the inspection of the photomask forming substrate is performed in advance by the foreign matter inspection apparatus as in the past, the foreign matter position information on the photomask forming substrate by the foreign matter inspection device and the photomask by the inspection on the drawing stage of the drawing device It was difficult to match the foreign substance position information on the forming substrate with high accuracy. In order to match the measurement results in a plurality of position measurement systems, the reference position (reference point) must be made common, but the photomask forming substrate has no alignment mark or the like. Therefore, in general, two orthogonal sides of the end face of the photomask forming substrate are used as reference sides, and any measurement position (3 to 4 points on the two sides) on the two reference sides is detected and X -Determine the Y coordinate system and the reference point. At this time, if the reference sides and measurement positions handled by a plurality of position measurement systems do not match, a deviation occurs in the reference points. Specifically, out of two orthogonal sides of the photomask forming substrate end surface, the lower side and the left side are set as the reference side in one position measurement system, and the upper side and the right side are set as the reference side in the other position measurement system, There is a deviation in the coordinates of each position measurement system. This is because the external dimension accuracy of the photomask forming substrate cannot be expected to be in μm units, but is 0.1 mm units. Even if the same side is used as a reference side, an error occurs if the measurement positions are different. This is because there is a problem of the accuracy of the linearity and orthogonality of the sides.
Therefore, as in the present invention, the method of measuring the position at the same reference side and the same measurement position on the same drawing stage is a position measurement on a photomask forming substrate without a reference mark such as an alignment mark. This is useful in improving accuracy.
In the present invention, the accuracy of position measurement is maintained by measuring the calibration mark on the drawing stage by both of the two position measuring systems, the inspection unit for inspecting the foreign matter and the drawing optical system for drawing. can do.

FIG. 4 is a process diagram showing another example of the photomask manufacturing method of the present embodiment. First, the photomask forming substrate is placed on a drawing stage in the drawing apparatus (S1), and the position of the photomask forming substrate is detected (S2). Next, the foreign matter on the photomask forming substrate is inspected (S3), and if it is confirmed that there is a foreign matter (S4), the position of the foreign matter is detected (S5). Next, the detected position (1) of the foreign matter is made to correspond to the drawing data (2) to be drawn by the drawing apparatus (S6), and the photomask forming substrate according to whether or not the position of the foreign matter and the drawing data overlap. A pass / fail decision is made (S7). When the position of the foreign matter overlaps with the drawing data (S7) (in the case of failure), the position of the drawing data with respect to the photomask forming substrate is adjusted (S8), and the overlap between the position of the foreign matter and the drawing data can be eliminated. It is determined whether or not (S9). If the overlap of the position of the foreign matter and the drawing data can be eliminated by adjusting the position of the drawing data with respect to the photomask forming substrate, then drawing is started (S21).
Further, the position of the foreign object is made to correspond to the drawing data (S6), and if the position of the foreign object and the drawing data do not overlap (S7) (if it passes), then drawing is started (S21).
Further, the foreign matter on the photomask forming substrate is inspected (S3), and if it is confirmed that there is no foreign matter (S4), then drawing is started (S21).
On the other hand, if the overlap between the position of the foreign matter and the drawing data cannot be eliminated even by adjusting the position of the drawing data with respect to the photomask forming substrate (S9), the photomask forming substrate is removed from the drawing apparatus (S22). .
In FIG. 4, S1 to S7 are pre-drawing inspection steps S11, and S8 to S9 are position adjustment steps S12.

  Thus, in this embodiment, you may have a position adjustment process between the pre-drawing inspection process and the drawing process. This is because even when the position of the foreign matter overlaps with the drawing data, the overlap between the position of the foreign matter and the drawing data may be eliminated by adjusting the position of the drawing data with respect to the photomask forming substrate. According to this embodiment, as described above, since the positional relationship between the position of the foreign matter and the drawing data can be confirmed with high accuracy, the position of the drawing data with respect to the photomask forming substrate can be finely adjusted. is there.

  Hereafter, each process in the manufacturing method of the photomask of this embodiment is demonstrated.

1. Pre-drawing inspection step In the pre-drawing inspection step in this embodiment, the photomask forming substrate having the photosensitive material layer formed on the substrate is placed on the drawing stage in the drawing apparatus, and then the photomask forming substrate is placed on the photomask forming substrate. It is a step of inspecting the foreign matter, detecting the position of the foreign matter when the foreign matter is detected, and associating the position of the foreign matter with the drawing data to be drawn by the drawing device.

The photomask forming substrate used in this embodiment is not particularly limited as long as a photosensitive material layer is formed on the substrate, but usually on the substrate, the metal thin film formed on the substrate, and the metal thin film. And a formed photosensitive material layer.
As the substrate for forming a photomask, any substrate can be used as long as it is used for forming a photomask used for manufacturing a semiconductor integrated circuit, a liquid crystal display, a printed wiring board, a semiconductor element and the like. . In particular, those used for forming a photomask used for manufacturing a large-sized liquid crystal display are preferable.

  In this embodiment, after the photomask forming substrate is placed on the drawing stage in the drawing apparatus, first, the position of the photomask forming substrate is detected. Thereby, the position of the drawing data with respect to the photomask forming substrate is determined.

  At this time, for example, the position of the end face of the photomask forming substrate is detected by a substrate end face detecting sensor (also simply referred to as a position sensor) of the drawing optical system of the drawing apparatus. Can be detected.

  In the drawing optical system of the drawing apparatus illustrated in FIG. 5A, the first position sensor 72 and the second position sensor 73 are provided below the fixing portion 75 that fixes the drawing head 74 to the transport arm 71. Accordingly, the first position sensor 72 and the second position sensor 73 are integrally fixed to the drawing head 74. The first position sensor 72 is, for example, a joystick type contact position sensor. As shown in FIG. 5B, the first position sensor 72 and the second position sensor 73 both come into contact with the end surface of the photomask forming substrate 11 by the rod portion 77, and the rod portion 77 is moved by a predetermined value. The contact is recognized by the displacement. FIG. 5B is a cross-sectional view taken along the line AA in FIG.

  The drawing optical system of the drawing apparatus illustrated in FIG. 5 places the photomask forming substrate 11 on the drawing stage 53 so that the corners 81 of the photomask forming substrate 11 are in a predetermined direction on the drawing stage 53. In the case of the first case, in the vicinity of the corner 81, the positions of the two end faces sandwiching the corner 81 in the direction orthogonal to the end faces can be measured, and either one of the two end faces can be measured. The first position sensor 72 is provided which can measure the position in the direction perpendicular to the end face at two points away from each other and obtain first measurement data. Further, when the photomask forming substrate 11 is rotated 90 degrees on the drawing stage 53 (second case), the drawing optical system is arranged near the corner 81 of the photomask forming substrate 11 rotated 90 degrees. The positions of the two end faces sandwiching the corner portion 81 can be measured in the direction perpendicular to the respective end faces, and either one of the two end faces can be measured at two points away from each other in the direction perpendicular to the end faces. Is provided, and a second position sensor 73 for obtaining second measurement data is provided. In the first case, based on the first measurement data obtained by the measurement of the first position sensor, and in the second case, based on the second measurement data obtained by the measurement of the second position sensor. In addition, the rotation amount of the photomask forming substrate with respect to the XY coordinate system of the drawing apparatus and the reference position of the XY coordinate system can be obtained.

  For example, as shown in FIG. 6A, the photomask forming substrate 11 is placed on the drawing stage 53 so that the corner 81 is in a predetermined direction on the drawing stage 53 (here, the X minus direction and the Y minus direction). 2 (first case), the fixed portion 75 and the drawing stage 53 are moved, and the first position sensor 72 moves the two points P1 and P2 of the end surface 80A in the Y direction, and 1 of the end surface 80B. The position of the point P3 in the X direction is detected. This corresponds to the first case described above. For example, as shown in FIG. 6B, the photomask forming substrate 11 is placed on the drawing stage so that the corner 81 is in a predetermined direction on the drawing stage 53 (here, the X plus direction and the Y minus direction). 53 (second case), the fixing unit 75 and the drawing stage 53 are moved, and the second position sensor 73 causes the position of one point P4 on the end surface 80A in the X direction to be 2 on the end surface 80B. The positions in the Y direction of the points P5 and P6 are detected. This corresponds to the second case described above. As described above, in the first case, based on the first measurement data obtained by the measurement of the first position sensor, in the second case, the second value obtained by the measurement of the second position sensor. Based on the measurement data, the rotation amount of the photomask forming substrate with respect to the XY coordinate system of the drawing apparatus and the reference position of the XY coordinate system can be obtained.

  Next, the foreign matter on the photomask forming substrate is inspected. At this time, the foreign matter is inspected on the entire surface of the photomask forming substrate.

  Examples of the foreign substance inspection method include an inspection method using reflected light, transmitted light, scattered light, diffracted light, and the like. Specifically, a method of detecting the presence or absence of reflected light by irradiating light onto a photomask forming substrate can be used.

  In particular, since the foreign matter is inspected on the entire surface of the photomask forming substrate, the foreign matter inspection method is preferably a method capable of inspecting in a relatively short time. For example, the number of inspection light beams is preferably relatively large, and more preferably about 8 to 32.

  The inspection light used for the inspection of the foreign matter is not particularly limited as long as it does not affect the photosensitive material layer, but is preferably light having a wavelength different from that of the drawing light. This is because a photosensitive material layer (resist) that reacts to the wavelength of the drawing light is used, so that if inspection light having the same wavelength as that of the drawing light is used, it is exposed before drawing. For example, when the drawing light is g-line (436 nm), i-line (365 nm), KrF excimer laser (248 nm), ArF excimer laser (193 nm), etc., helium neon laser (633 nm), krypton ion is used as the inspection light. A laser (413 nm) or the like can be preferably used.

  As a result of the foreign object inspection, when it is confirmed that there is a foreign object, the position of the foreign object is detected. Specifically, the position coordinates and size of the foreign object are detected.

  The foreign object detection method is not particularly limited as long as it is a method capable of detecting the position coordinates and size of the foreign object, and the method for detecting the position coordinate and size of the foreign object simultaneously with the inspection of the foreign object, and the foreign object Any method for detecting the position coordinates and size of a foreign object can be applied in addition to the above inspection. As the former method, there is a method in which the position coordinates and size of the foreign matter are also specified using inspection light used for the foreign matter inspection. On the other hand, as the latter method, the position coordinates and size of the foreign matter are roughly specified using inspection light used for foreign matter inspection, and then the photomask forming substrate is locally elevated using a CCD camera or the like. There is a method of precisely specifying the position coordinates and size of a foreign object by observing at a resolution.

  Next, a pass / fail determination of the photomask forming substrate is performed. At this time, the pass / fail judgment of the photomask forming substrate may be performed based on whether the position of the foreign matter overlaps with the drawing data, whether the foreign matter position overlaps with the drawing data, and a defect caused by the foreign matter. The pass / fail determination of the photomask forming substrate may be performed based on whether or not correction is possible. In the pass / fail judgment of the photomask forming substrate based on whether or not the position of the foreign matter overlaps with the drawing data, as shown in FIGS. 1 and 4, when the position of the foreign matter and the drawing data do not overlap (S7). If it is determined to be acceptable and the position of the foreign matter and the drawing data overlap (S7), it is determined to be unacceptable. On the other hand, in the pass / fail judgment of the photomask forming substrate based on whether or not the position of the foreign matter overlaps with the drawing data and whether or not the defect caused by the foreign matter can be corrected, the position of the foreign matter is exemplified as shown in FIGS. And the drawing data do not overlap (S7), and if the position of the foreign matter and the drawing data overlap (S7) and if the defect can be corrected (S10), it is determined as acceptable, and the position of the foreign matter If the drawing data overlaps (S7) and the defect cannot be corrected (S10), it is determined as unacceptable.

The determination of whether or not the defect caused by the foreign object can be corrected is, for example, when the position of the foreign object overlaps a complicated pattern portion in the drawing data, the defect is determined not to be corrected, and the defect caused by the foreign object is a simple black dot or In the case of a pinhole, it can be determined that the defect can be corrected.
Note that a defect caused by a foreign substance can be corrected after the photomask is manufactured.

  As a result of the pass / fail judgment of the photomask forming substrate, if the result is acceptable, the photomask forming substrate is subsequently subjected to a drawing process. On the other hand, in the case of failure, the use of the photomask forming substrate may be stopped, and then the photomask forming substrate is subjected to a position adjusting step for adjusting the position of drawing data with respect to the photomask forming substrate. May be.

2. Drawing Step The drawing step in this embodiment is a step of drawing on the photosensitive material layer of the photomask forming substrate after the pre-drawing inspection step.

As a drawing method, a drawing method used for manufacturing a general photomask can be applied.
Examples of the drawing light include g-line (436 nm), i-line (365 nm), KrF excimer laser (248 nm), ArF excimer laser (193 nm), and electron beam.

In the present embodiment, during the drawing process, the foreign matter on the photomask forming substrate is inspected, and when the foreign matter is detected, the position of the foreign matter is detected and the position of the foreign matter is associated with the drawing data. An inspection process may be performed.
FIG. 9 is a process diagram showing an example of a drawing process in the present embodiment. First, drawing is started (S21), foreign matter on the photomask forming substrate is inspected during drawing (S22), and if there is foreign matter (S23), the position of the foreign matter is detected (S24). ). Next, the detected position (21) of the foreign matter is associated with the drawing data (22) (S25), and pass / fail judgment of the photomask forming substrate is performed based on whether the foreign matter position and the drawing data overlap (S26). ). If the position of the foreign object and the drawing data do not overlap (pass), the drawing is continued (S31).
In addition, foreign matter on the photomask forming substrate is inspected during drawing (S22), and drawing is continued even when it is confirmed that there is no foreign matter (S23) (S31).
After that, the inspection is performed while drawing, and if there is no foreign object or if the position of the foreign object and the drawing data do not overlap (pass), the drawing is finished (S32).
On the other hand, the position of the foreign object is associated with the drawing data (S25), and when the position of the foreign object and the drawing data overlap (S26) (in the case of failure), the drawing is stopped (S33).
In FIG. 9, S22 to S26 are in-drawing inspection process S29.

  The pass / fail determination of the photomask forming substrate in the in-drawing inspection step can be performed in the same manner as the pass / fail determination of the photomask forming substrate in the pre-drawing inspection step.

  As described above, when the inspection is performed during the drawing, it is possible to inspect the foreign matter attached to the photomask forming substrate during the drawing. Therefore, the quality of the photomask (product) and the yield are improved. Furthermore, since drawing can be stopped in the middle of drawing on a rejected photomask forming substrate, manufacturing cost can be reduced. In particular, when manufacturing a large photomask used for manufacturing a large liquid crystal panel or the like, since it takes a relatively long time to complete drawing, it is very useful to inspect during drawing. is there.

  Note that the in-drawing inspection step during the drawing step will be described in detail in a second embodiment to be described later, and thus the description thereof is omitted here.

3. Position Adjustment Step In this embodiment, when the position of the foreign matter and the drawing data overlap in the pre-drawing inspection step, the position of the drawing data with respect to the photomask forming substrate after the pre-drawing inspection step and before the drawing step. You may perform the position adjustment process which adjusts.

  In this step, it is determined whether or not the overlap between the position of the foreign matter and the drawing data can be eliminated. If the overlap of the position of the foreign matter and the drawing data can be eliminated by adjusting the position of the drawing data with respect to the photomask forming substrate, the photomask forming substrate is subsequently subjected to a drawing process. On the other hand, if the overlap between the position of the foreign matter and the drawing data cannot be eliminated even by adjusting the position of the drawing data with respect to the photomask forming substrate, the use of the photomask forming substrate is stopped.

For example, when the size of the foreign matter is relatively large, the overlap between the position of the foreign matter and the drawing data may not be resolved even if the position of the drawing data with respect to the photomask forming substrate is adjusted.
Further, for example, when the position of a foreign object overlaps a complicated pattern portion in the drawing data, the overlap between the position of the foreign object and the drawing data may not be eliminated. On the other hand, when the position of a foreign object overlaps a simple pattern portion in the drawing data, it is often possible to eliminate the overlap between the position of the foreign object and the drawing data.

  Therefore, when adjusting the position of the drawing data with respect to the photomask forming substrate, it is preferable to determine the priority order for adjusting the position of the drawing data in accordance with the size of the foreign matter, the complexity of the drawing data, and the like. In the end, it is preferable to adjust the position of the drawing data so that the position of the foreign matter does not overlap the drawing data. For example, first, the position of the foreign matter should not overlap the complicated pattern portion of the drawing data. It is possible to preferentially adjust the position of the drawing data.

4). Other Steps In the present embodiment, after the drawing step, a development step for developing the photosensitive material layer, a patterning step for etching the metal thin film, etc., a pattern inspection for inspecting the dimension and defects of the metal thin film, etc., and foreign matters The process, the correction process etc. which correct patterns, such as a metal thin film, can be performed.

  In the present embodiment, before placing the photomask forming substrate on the drawing stage in the drawing apparatus, the foreign matter on the photomask forming substrate is inspected by the foreign matter inspection device before the pre-drawing inspection step. A blank inspection process can be performed.

  In the present embodiment, it is preferable that the time lag between the inspection of foreign matter and the drawing is as short as possible. This is because the quality and yield of the photomask (product) can be further improved.

  In this embodiment, when drawing is performed on the photosensitive material layer a plurality of times, that is, when the drawing step is performed a plurality of times, a pre-drawing inspection step is performed before each drawing step.

II. Second Embodiment A second embodiment of the photomask manufacturing method of the present invention is the above photomask during a drawing step of drawing on the photosensitive material layer of the photomask forming substrate in which the photosensitive material layer is formed on the substrate. A foreign matter on the forming substrate is inspected, and when a foreign matter is detected, the position of the foreign matter is detected, and an inspection process during drawing is performed in which the position of the foreign matter is associated with the drawing data to be drawn. It is what.

FIG. 9 is a process diagram showing an example of a drawing process in the present embodiment. First, the photomask forming substrate is placed on a drawing stage in the drawing apparatus, drawing is started (S21), and foreign matter on the photomask forming substrate is inspected during drawing (S22). If confirmed (S23), the position of the foreign matter is detected (S24). Next, the detected position (21) of the foreign matter is associated with the drawing data (22) (S25), and pass / fail judgment of the photomask forming substrate is performed based on whether the foreign matter position and the drawing data overlap (S26). ). If the position of the foreign object and the drawing data do not overlap (pass), the drawing is continued (S31).
In addition, foreign matter on the photomask forming substrate is inspected during drawing (S22), and drawing is continued even when it is confirmed that there is no foreign matter (S23) (S31).
After that, the inspection is performed while drawing, and if there is no foreign object or if the position of the foreign object and the drawing data do not overlap (pass), the drawing is finished (S32).
On the other hand, the position (21) of the foreign object is associated with the drawing data (22) (S25), and when the position of the foreign object and the drawing data overlap (S26) (in the case of failure), the drawing is stopped (S33). ).
In FIG. 9, S22 to S26 are in-drawing inspection process S29.

  In this case, the pass / fail determination of the photomask forming substrate can be performed in the same manner as the pass / fail determination of the photomask forming substrate in the pre-drawing inspection process of the first embodiment.

  In this embodiment, after the photomask forming substrate is placed on the drawing stage in the drawing apparatus, the foreign matter is inspected during drawing, so the foreign matter attached to the photomask forming substrate during drawing is inspected. Is possible. Therefore, the result of foreign object inspection can be output in real time during drawing. Therefore, the quality of the photomask (product) and the yield are improved. Furthermore, since drawing can be stopped in the middle of drawing on a rejected photomask forming substrate, manufacturing cost can be reduced. In particular, when manufacturing a large photomask used for manufacturing a large liquid crystal panel or the like, since it takes a relatively long time to complete drawing, it is very useful to inspect during drawing. is there.

  In this embodiment, since the foreign substance is inspected by the drawing apparatus after the photomask forming substrate is placed on the drawing stage in the drawing apparatus, the positional relationship between the position of the foreign substance and the drawing data is, for example, It can be confirmed in units of μm. Therefore, it is possible to compare the drawing data and the detection position of the foreign object with high accuracy, and to perform pass / fail determination with high accuracy.

  Hereafter, each process in the manufacturing method of the photomask of this embodiment is demonstrated.

1. Drawing Step The drawing step in this embodiment is a step of drawing on the photosensitive material layer of the photomask forming substrate in which the photosensitive material layer is formed on the substrate, and inspects foreign matter on the photomask forming substrate. When a foreign object is detected, the position of the foreign object is detected, and an inspection process during drawing is performed in which the position of the foreign object is associated with the drawing data for drawing.

  Since the photomask forming substrate has been described in the first embodiment, description thereof is omitted here.

  In this embodiment, after the photomask forming substrate is placed on the drawing stage in the drawing apparatus, first, the position of the photomask forming substrate is detected. Thereby, the position of the drawing data with respect to the photomask forming substrate is determined.

  Next, drawing is started on the photomask forming substrate. Since drawing has been described in the first embodiment, description thereof is omitted here.

  Next, a foreign substance on the photomask forming substrate is inspected during drawing. At this time, it is preferable to inspect the foreign matter simultaneously with the drawing. This is because the time lag between inspection of foreign matter and drawing can be shortened. In this case, the portion to be drawn may be inspected immediately before drawing, or may be inspected immediately after drawing.

  Especially, since it is preferable to inspect a foreign substance simultaneously with drawing, the foreign substance inspection method is preferably a method capable of inspecting only a specific portion. For example, a method capable of inspecting for each scanning pitch of drawing is preferable.

Therefore, it is preferable that the beam diameter of the inspection light used for the inspection of the foreign matter is approximately the same as the drawing scanning pitch or larger than the drawing scanning pitch. In the example shown in FIG. 10, the beam diameter r of the inspection light is equal to the drawing scanning pitch p. In this case, by setting the number of inspection light beams to one, foreign matter can be inspected for each scanning pitch of drawing.
Specifically, the beam diameter of the inspection light is preferably about 2 μm to 5 μm. This is because if the beam diameter of the inspection light is too small, only an area narrower than the scanning range of drawing can be inspected. Further, since the size of the foreign matter is usually about several μm, it is difficult to detect the foreign matter if the beam diameter of the inspection light is too large.

  Since the other points of the foreign substance inspection are the same as those described in the first embodiment, description thereof is omitted here.

  As a result of the foreign object inspection, when it is confirmed that there is a foreign object, the position of the foreign object is detected. Since the detection of the position of the foreign matter is the same as that described in the first embodiment, the description thereof is omitted here.

Next, a pass / fail determination of the photomask forming substrate is performed. In the pass / fail determination of the photomask forming substrate, as illustrated in FIG. 9, when the position of the foreign matter does not overlap with the drawing data (S26), it is determined as pass, and the position of the foreign matter overlaps with the drawing data. You may determine with (S26) failing. In addition, as illustrated in FIG. 11, when the position of the foreign object does not overlap with the drawing data (S26) and when the position of the foreign object overlaps with the drawing data (S26), the defect can be corrected ( In S27), it is determined as acceptable, and when the position of the foreign matter and the drawing data overlap (S26) and the defect cannot be corrected (S27), it may be determined as unacceptable.
If it passes, continue drawing. On the other hand, in the case of failure, drawing is stopped.

2. Other Steps In the present embodiment, after the drawing step, a development step for developing the photosensitive material layer, a patterning step for etching the metal thin film, etc., a pattern inspection for inspecting the dimension and defects of the metal thin film, etc., and foreign matters The process, the correction process etc. which correct patterns, such as a metal thin film, can be performed.

  Further, in this embodiment, before placing the photomask forming substrate on the drawing stage in the drawing apparatus, the foreign matter on the photomask forming substrate is inspected for foreign matters on the photomask forming substrate before the drawing step. An inspection process can be performed.

  In the present embodiment, it is preferable that the time lag between the inspection of foreign matter and the drawing is as short as possible. This is because the quality and yield of the photomask (product) can be further improved.

B. Drawing Device Next, the drawing device of the present invention will be described.
The drawing apparatus of the present invention includes a drawing stage for placing a photomask forming substrate having a photosensitive material layer formed on the substrate, and a drawing optical for drawing on the photomask forming substrate placed on the drawing stage. An inspection unit for inspecting foreign matter on the photomask forming substrate and detecting the position of the foreign matter, the position of the foreign matter detected by the inspection unit, and drawing data for drawing by the drawing optical system; And a processing unit that corresponds to each other.

  FIG. 12 is a schematic diagram showing an example of the drawing apparatus of the present invention. A drawing apparatus 51 illustrated in FIG. 12 includes a drawing stage 53 on which the photomask forming substrate 11 is placed, a drawing optical system 54 that performs drawing on the photomask forming substrate 11 placed on the drawing stage 53, The inspection unit 55 that inspects the foreign matter on the photomask forming substrate 11 and detects the position of the foreign matter, and the position of the foreign matter detected by the inspection unit 55 correspond to the drawing data to be drawn by the drawing optical system 54. It has the processing part 56.

The inspection unit 55 includes an inspection light source 61 that emits laser light as inspection light, a beam splitter 62 that divides one beam of laser light into a plurality, a mirror 63 that reflects the laser light, and a voltage applied to refract the light. An acousto-optic element 64 that deflects laser light by changing the rate, a cylindrical lens 65 that changes elliptical laser light into a perfect circle, a telescope 66 that aligns the direction of the radially spreading laser light directly below, and an objective lens 67 and a light receiving portion 68. In the inspection unit 55, inspection light from the inspection light source 61 enters the beam splitter 62, and a part of the incident inspection light is a mirror 63, an acoustooptic device 64, a cylindrical lens 65, a telescope 66, and an objective lens 67. The substrate 11 for photomask formation is irradiated through When foreign matter exists on the photomask forming substrate 11, reflected light is generated by the foreign matter. This reflected light is collected by the objective lens 67, enters the beam splitter 62 via the telescope 66, the cylindrical lens 65, the acoustooptic device 64, and the mirror 63, and part of the reflected light that enters the beam splitter 62. Enters the light receiving unit 68. The light receiving unit 68 determines that there is a foreign object when receiving a signal equal to or greater than the threshold value, and detects the position coordinates and size of the foreign object.
The processing unit 56 takes in the drawing data from the drawing optical system 54 and takes in the position coordinates and size of the foreign matter from the light receiving unit 68 of the inspection unit 55. The processing unit 56 makes a pass / fail determination for the photomask forming substrate based on whether or not the drawing data and the position of the foreign matter overlap by associating the drawing data and the position of the foreign matter. Specifically, if the position of the foreign object does not overlap the drawing data, it is determined to be acceptable, and if the position of the foreign object overlaps the drawing data, it is determined to be unacceptable.

  In the drawing apparatus 51, the positional relationship between the inspection optical axis of the inspection unit 55 and the drawing optical axis of the drawing optical system 54 is that the calibration mark on the drawing stage 53 is measured by both the inspection unit 55 and the drawing optical system 54. Then, it is corrected. As a result, the processing unit 56 can compare the position of the foreign matter detected by the inspection unit with the drawing data to be drawn by the drawing optical system.

In the drawing apparatus 51 illustrated in FIG. 12, as illustrated in FIG. 13, the drawing optical system 54 and the inspection unit 55 can be moved in the X direction (arrow d1) by the transport arm 71, and the drawing stage 53 is in the Y direction. It can be moved to (arrow d2).
In such a drawing apparatus 51, as illustrated in FIG. 13, the drawing optical system 54 is linearly moved in the X direction, and the drawing light is given a predetermined width in the Y direction, which is a direction orthogonal to the X direction. The drawing operation can be performed by sequentially moving the drawing stage stepwise in the Y direction with a predetermined width corresponding to the scanning width.
Similarly, as illustrated in FIG. 13, the inspection unit 55 is linearly moved in the X direction, and the inspection light is scanned with a predetermined width in the Y direction, which is a direction orthogonal to the X direction. The foreign material can be inspected by performing the operation to sequentially move the drawing stage stepwise in the Y direction with a predetermined width corresponding to the scanning width.

  In the example illustrated in FIG. 13, regarding the positional relationship between the inspection unit 55 and the drawing optical system 54 on the transport arm 71, the inspection unit 55 is disposed in front of the drawing optical system 54 with respect to the movement direction in the X direction. . In this case, it is possible to inspect the portion to be drawn immediately before drawing.

  According to the present invention, since the drawing apparatus has the inspection unit, it is possible to inspect the foreign matter immediately before starting drawing after placing the photomask forming substrate on the drawing stage in the drawing apparatus. It is possible to inspect foreign matter adhered when the forming substrate is transported to or placed on the drawing apparatus. Furthermore, foreign matter adhering to the photomask forming substrate during drawing can be inspected, and the result of foreign matter inspection during drawing can be output in real time. Therefore, the quality and yield of a photomask (product) can be improved by using the drawing apparatus of the present invention. Also, it is not necessary to perform drawing on a photomask forming substrate in which foreign matter is detected before starting drawing, and drawing is performed in the middle of drawing on a photomask forming substrate in which foreign matter is detected during drawing. Since it can be stopped, the manufacturing cost can be reduced. In particular, when a large photomask used for manufacturing a large liquid crystal panel or the like is manufactured, it takes a relatively long time to complete drawing. Is very useful.

  Further, according to the present invention, since the inspection of the foreign matter can be performed by the drawing apparatus, the positional relationship between the position of the foreign matter and the drawing data can be confirmed in units of μm, for example. Therefore, it is possible to compare the drawing data and the detection position of the foreign object with high accuracy, and to perform pass / fail determination with high accuracy.

  Furthermore, according to the present invention, the drawing optical system and the inspection unit can be made independent, thereby preventing an increase in the weight of the drawing optical system, the head moving speed, the posture (vibration) during head running, and the like. It is possible to avoid that it becomes difficult to control.

  Hereinafter, each structure in the drawing apparatus of this invention is demonstrated.

1. Inspection part The inspection part in this invention inspects the foreign material on the board | substrate for photomask formation, and detects the position of a foreign material.

  The inspection unit is preferably independent of the drawing optical system. This is because, as described above, it is possible to prevent an increase in the weight of the drawing optical system and to avoid difficulty in controlling the head moving speed and the posture (vibration) during head traveling. As a result, it is possible to prevent, for example, uneven drawing. In this case, as illustrated in FIG. 13, it is preferable that the inspection unit 55 and the drawing optical system 54 are attached to the same transport arm 71. This is because foreign matter inspection and drawing can be performed simultaneously, and the time lag between foreign matter inspection and drawing can be shortened.

  The inspection unit is not particularly limited as long as it can inspect foreign matter and detect the position of the foreign matter, and a general inspection unit can be applied. For example, the inspection unit includes an inspection optical system including an inspection light source, a branching optical system such as a beam splitter, a modulation optical system such as an acousto-optic element, a condensing lens system, and a light receiving unit. The inspection unit may include a line sensor. This is because, when the inspection unit includes a line sensor, the entire surface of the photomask forming substrate can be inspected in a relatively short time before drawing starts.

  The inspection light source is not particularly limited as long as it does not affect the photosensitive material layer of the photomask forming substrate, but light having a wavelength different from that of the drawing light is preferable. This is because a photosensitive material layer (resist) that reacts to the wavelength of the drawing light is used, so that if inspection light having the same wavelength as that of the drawing light is used, it is exposed before drawing. For example, when the drawing light is g-line (436 nm), i-line (365 nm), KrF excimer laser (248 nm), ArF excimer laser (193 nm), etc., as the inspection light source, helium neon laser (633 nm), krypton An ion laser (413 nm) or the like can be preferably used.

  As illustrated in FIG. 14, the inspection unit may include an image sensor such as a CCD camera 69. This is because foreign matters can be observed with the CCD camera. It is also possible to roughly detect the position coordinates and size of the foreign matter with the inspection optical system, and to accurately detect the position coordinates and size of the foreign matter by locally capturing an image with a CCD camera.

  When the inspection unit and the drawing optical system are attached to the transfer arm, the positional relationship between the inspection unit and the drawing optical system on the transfer arm is inspected with respect to the movement direction in the X direction as illustrated in FIG. The unit 55 may be disposed in front of the drawing optical system 54, and although not illustrated, the inspection unit may be disposed after the drawing optical system with respect to the movement direction in the X direction. In the former case, it is possible to inspect the portion to be drawn immediately before drawing. On the other hand, in the latter case, it is possible to inspect the portion to be drawn immediately after drawing.

  In addition, since the inspection method of the foreign material by the inspection unit, the detection method of the foreign material, and the like are described in the above section “A. Photomask manufacturing method”, description thereof is omitted here.

2. Drawing Optical System The drawing optical system according to the present invention performs drawing on a photomask forming substrate placed on a drawing stage.

  The drawing optical system is not particularly limited as long as drawing can be performed on the photomask forming substrate, and a general drawing optical system can be applied. For example, the drawing optical system includes a drawing light source, a branching optical system such as a beam splitter, a condensing lens system, and an imaging lens system.

As a light source for drawing, a mercury lamp (g-line (436 nm), i-line (365 nm)), KrF excimer laser (248 nm), ArF excimer laser (193 nm), F ₂ laser (157 nm), Kr ₂ laser (146 nm) Ar ₂ laser (126 nm), YAG laser, solid-state laser, etc. can be used. An electron beam can also be used as a light source for drawing.

  The drawing optical system usually has a position sensor that detects the position of the end face of the photomask forming substrate. With this position sensor, the position of the photomask forming substrate can be detected.

In the drawing optical system illustrated in FIG. 5A, the first position sensor 72 and the second position sensor 73 are disposed below the fixing portion 75 that fixes the drawing head 74 to the transport arm 71. Thus, the first position sensor 72 and the second position sensor 73 are fixed integrally with the drawing head 74. The first position sensor 72 is, for example, a joystick type contact position sensor. As shown in FIG. 5B, the first position sensor 72 and the second position sensor 73 both come into contact with the end surface of the photomask forming substrate 11 by the rod portion 77, and the rod portion 77 is moved by a predetermined value. The contact is recognized by the displacement. FIG. 5B is a cross-sectional view taken along the line AA in FIG.
With the first position sensor 72 and the second position sensor 73, the rotation amount of the photomask forming substrate with respect to the XY coordinate system of the drawing apparatus and the reference position of the XY coordinate system can be obtained.

  In the example shown in FIG. 5, the first position sensor and the second position sensor are separated from each other. For example, in the four directions of X + direction, Y + direction, X− direction, and Y− direction, A joystick-type contact position sensor capable of detecting the position may be used, and one position sensor may be used as both the first position sensor and the second position sensor.

3. Processing Unit The processing unit in the present invention associates the position of the foreign matter detected by the inspection unit with the drawing data to be drawn by the drawing optical system.

  The processing unit is not particularly limited as long as it can associate the position of the foreign matter detected by the inspection unit with the drawing data to be drawn by the drawing optical system. For example, FIG. 2 and FIG. As shown in FIG. 5, the image processing can be performed such that the position of the foreign matter 12 with respect to the photomask forming substrate 11 and the position of the drawing data 13 with respect to the photomask forming substrate 11 can be viewed in an overlapping manner.

The processing unit can also adjust the position of the drawing data with respect to the photomask forming substrate when the position of the foreign matter overlaps the drawing data.
The adjustment of the position of the drawing data has been described in the above section “A. Photomask manufacturing method”, and thus the description thereof is omitted here.

4). Drawing Stage The drawing stage in the present invention is for mounting a photomask forming substrate.
The drawing stage is not particularly limited as long as a photomask forming substrate can be placed thereon, and a general one can be applied.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

It is process drawing which shows an example of the manufacturing method of the photomask of this invention. It is process drawing which shows an example of the inspection process before drawing in the manufacturing method of the photomask of this invention. It is a schematic diagram which shows an example of the inspection process before drawing in the manufacturing method of the photomask of this invention. It is process drawing which shows the other example of the manufacturing method of the photomask of this invention. It is a schematic diagram for demonstrating the detection of the position of the board | substrate for photomask formation. It is a schematic diagram for demonstrating the detection of the position of the board | substrate for photomask formation. It is process drawing which shows the other example of the manufacturing method of the photomask of this invention. It is process drawing which shows the other example of the manufacturing method of the photomask of this invention. It is process drawing which shows an example of the drawing process in the manufacturing method of the photomask of this invention. It is a schematic diagram which shows the relationship between inspection light and drawing light. It is process drawing which shows the other example of the drawing process in the manufacturing method of the photomask of this invention. It is a schematic diagram which shows an example of the drawing apparatus of this invention. It is a schematic diagram which shows the other example of the drawing apparatus of this invention. It is a schematic diagram which shows the other example of the drawing apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Photomask forming substrate 12 ... Foreign material 13 ... Drawing data 51 ... Drawing apparatus 53 ... Drawing stage 54 ... Drawing optical system 55 ... Inspection part 56 ... Processing part

Claims (6)

After the photomask forming substrate having the photosensitive material layer formed on the substrate is placed on the drawing stage in the drawing apparatus, the foreign matter on the photomask forming substrate is inspected, and when the foreign matter is detected, A pre-drawing inspection step for detecting the position of the foreign matter and associating the position of the foreign matter with the drawing data to be drawn by the drawing device;
And a drawing step of drawing on the photosensitive material layer of the photomask forming substrate after the pre-drawing inspection step.   During the drawing process, foreign matter on the photomask forming substrate is inspected, and when foreign matter is detected, the position of the foreign matter is detected, and the in-drawing inspection associates the position of the foreign matter with the drawing data. The method of manufacturing a photomask according to claim 1, wherein a process is performed.   Position adjustment for adjusting the position of the drawing data with respect to the photomask forming substrate after the pre-drawing inspection step and before the drawing step when the position of the foreign matter and the drawing data overlap in the pre-drawing inspection step The method of manufacturing a photomask according to claim 1, wherein a process is performed.   3. The photomask manufacturing method according to claim 1, wherein when the position of the foreign matter overlaps the drawing data in the pre-drawing inspection step, the use of the photomask forming substrate is stopped. Method.   During the drawing process of drawing on the photosensitive material layer of the photomask forming substrate having the photosensitive material layer formed on the substrate, the foreign matter on the photomask forming substrate is inspected, and if a foreign matter is detected, A method for manufacturing a photomask, comprising: detecting a position of a foreign substance, and performing an in-drawing inspection step for associating the position of the foreign substance with the drawing data to be drawn. A drawing stage for placing a photomask forming substrate having a photosensitive material layer formed on the substrate;
A drawing optical system for drawing on a photomask forming substrate placed on the drawing stage;
Inspecting foreign matter on the photomask forming substrate and detecting the position of the foreign matter;
A drawing apparatus, comprising: a processing unit that associates the position of the foreign matter detected by the inspection unit with drawing data to be drawn by the drawing optical system.

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