JP2010033857A - Filament lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a filament lamp capable of minimizing non-light-emitting areas between adjacent filaments while arranging an internal lead capable of carrying out independent power supply to each filament. <P>SOLUTION: The filament lamp is characterized in that the internal lead 13d disposed between adjacent filaments 12a, 12b has a positioning part 17a extending in an axial direction of an arc tube 2 on a tip 15a, and a bride part 16a formed continuously with the positioning part 17a and bent in a radial direction of the arc tube 2, a sub coil 18a comprising tungsten is wound on the positioning part 17a, and the filament 12a is connected to the positioning part 17a wound with the sub coil 18a. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a filament lamp used for semiconductor wafer heating, solar cell heating, or liquid crystal heating treatment.

  Light irradiation-type heating devices in semiconductor manufacturing processes are used over a wide range, such as film formation, diffusion, annealing, etc., and any process can rapidly heat a semiconductor wafer such as a plate-shaped object. The temperature is raised to 1000 ° C. or higher for several seconds to several tens of seconds. In recent years, it has been required to raise the temperature at a higher speed, and the power supplied to the lamp has been increased. This is called spike annealing, and the temperature is raised at a high speed exceeding 200 ° C./second, and the cooling is performed as soon as the target temperature is reached. By this spike annealing, a very thin diffusion layer (shallow junction) can be formed, and the performance of the semiconductor element can be improved.

  Further, if the temperature distribution of the semiconductor wafer becomes non-uniform during heating, a phenomenon called slip, that is, a defect of crystal transition may occur in the semiconductor wafer, resulting in a defective product. Therefore, when a semiconductor wafer is heat-treated using a light irradiation type heating device, it is necessary to heat, hold at a high temperature, and cool so that the temperature distribution of the semiconductor wafer becomes uniform. As a proposal for making the temperature distribution uniform, Japanese Patent Laid-Open No. 2006-279008 proposes a filament lamp having a plurality of filaments that can be fed independently to a single arc tube, so that the filament is partially input to the filament. The electric power can be changed and can be adjusted so as to obtain a highly uniform temperature distribution.

FIG. 5 is a perspective view showing a conventional filament lamp 1.
Coiled filaments 12a and 12b are sequentially arranged side by side so as to extend in the tube axis direction of the arc tube 2 in the straight tubular arc tube 2 whose both ends are hermetically sealed by the end sealing portions 3a and 3b. The power supply internal leads 13a, 13b, 13c, and 13d are connected to both ends of the filaments 12a and 12b, respectively.

The internal leads of the filaments described above extend to the sealing portions at both ends, and are individually electrically connected to the external leads via metal foil.
That is, the internal leads 13a and 13b on one end side of the filaments 12a and 12b are electrically connected to the external leads 14a and 14b on one end side through the metal foils 11a and 11b of the one end side sealing portion 3a, respectively. .
Similarly, the internal leads 13c and 13d on the other end side are electrically connected to the external leads 14c and 14d on the end side through the metal foils 11c and 11d of the other end side sealing portion 3b, respectively.
JP 2006-279008 A

  However, in order to supply power independently, internal filaments are individually wired to a plurality of filaments arranged in one arc tube of the filament lamp, so adjacent filaments are closely arranged. Can not do it. Since there is no member that emits light between adjacent filaments, it becomes a non-light emitting portion. Even if heating is performed so as to obtain a uniform temperature distribution by providing the filaments that can be fed independently, the temperature between the adjacent filaments may become a non-light emitting portion, and the temperature may locally decrease. Therefore, it is necessary to keep the area of the non-light emitting portion between adjacent filaments small while arranging the internal leads so that power can be supplied to each filament independently.

  An object of the present invention is to provide a filament lamp that can suppress a non-light-emitting region between adjacent filaments while keeping internal leads around each filament so that power can be supplied to each filament independently. And

In the first invention of the present application, a plurality of filaments are sequentially arranged in the tube axis direction of the arc tube, and the inside of the arc tube formed of tungsten at both ends of each filament. In filament lamps with connected leads,
The internal lead arranged between the adjacent filaments is bent at the tip in the radial direction of the arc tube formed following the positioning portion, and the positioning portion extending in the axial direction of the arc tube. And having a passing section,
A sub-coil made of tungsten is wound around the positioning portion,
A filament is connected to a positioning portion around which the subcoil is wound.

  The second invention of the present application is characterized in that, in the first invention, a concave portion is formed on the outer peripheral surface of the positioning portion.

  According to a third aspect of the present invention, in the second aspect, the axial length of the subcoil is larger than the axial length of the recess.

  According to a fourth invention of the present application, in the first invention, the internal lead is formed with a ring portion subsequent to the transfer portion.

  According to the first invention of the present application, a positioning portion extending in the axial direction of the arc tube at the tip of the internal lead, and a passing portion bent in the radial direction of the arc tube formed following the positioning portion, The sub-coil made of tungsten is wound around the positioning portion, and the filament made of tungsten is connected to the positioning portion around which the sub-coil is wound, so that the diameter of the internal lead can be increased regardless of the winding diameter of the filament. I can decide. Therefore, it is possible to bend in the radial direction in the immediate vicinity of the filament using internal leads with relatively small diameters, and arrange the internal leads between the filaments for power supply while winding the internal leads so that power can be supplied to each filament independently. The axial length required for the formed internal lead can be shortened, and the non-light-emitting region between adjacent filaments can be kept small.

  According to the second invention of the present application, since the subcoil disposed at the position where the recess is formed sinks, a step is generated between the subcoil disposed at the positioning portion where the recess is not formed. Since the step of the subcoil becomes caught, the filament can be inserted and fixed to the positioning portion around which the subcoil is wound.

  According to the third invention of the present application, by making the length of the subcoil in the axial direction longer than the length of the recess in the axial direction, the subcoil is pressed while being inserted into the positioning portion. The subcoil arranged at the position where it enters enters the recess and is crushed. The subcoil expands and contracts as the filament lamp is turned on / off. However, the subcoil that sinks in the concave portion hits the side surface of the concave portion and suppresses axial movement, so that the concave portion has a role of preventing the displacement of the subcoil.

  According to the fourth invention of the present application, by providing the ring portion subsequent to the transfer portion, the position of the internal lead inside the arc tube is determined by the ring portion coming into contact with the inner surface of the arc tube. Therefore, if the positioning portion with respect to the ring portion is configured to coincide with the axial center of the arc tube, positioning inside the arc tube can be performed. The filament can be arranged at the axial center of the arc tube. In addition, the filament held only at the sealing portion at one end tends to be a sag in which the other end hangs down during lighting, but the internal lead holding the other end is not displaced in the arc tube by the ring portion. Thus, sag can be prevented.

FIG. 1 is a perspective view showing a filament lamp 1 of the first embodiment.
The filament lamp 1 includes an arc tube 2 made of a light transmissive material such as quartz glass. Sealing portions 3a and 3b are formed by pinch seals in which metal foils 11a, 11b, 11c and 11d are embedded at both ends of the arc tube 2, and the inside of the arc tube is hermetically sealed. Inside the arc tube 2, filaments 12 a and 12 b made of, for example, tungsten and divided into two in the axial direction of the arc tube 2 are arranged on the same axis with a space L along the axis of the arc tube 2. It is installed.

  Since the space L is a space where the filaments 12a and 12b do not exist and is a non-light emitting region, when the total length of the space L is too large, the intensity distribution of the irradiation light on the object to be processed varies. Therefore, it is desirable that the total length of the space L is as small as possible.

  However, the filament lamp 1 is characterized in that the filaments 12a and 12b divided into two are fed independently. Therefore, since the internal leads 13a, 13b, 13c, and 13d are individually wired to the filaments 12a and 12b, the adjacent filaments 12a and 12b cannot be disposed in close contact with each other.

The filament 12a has one end side electrically connected to an internal lead 13a connected to the metal foil 11a, and the other end side electrically connected to an internal lead 13d connected to the metal foil 11d.
In the same manner as the filament 12a, the filament 12b is electrically connected to the internal lead 13c connected to the metal foil 11c on one end side and electrically connected to the internal lead 13b connected to the metal foil 11b on the other end side. Has been. The internal lead 13b is connected to the other end side of the filament 12b.

  Furthermore, external leads 14a and 14b led out from the sealing portion 3a to the outside are respectively electrically connected to the metal foils 11a and 11b on the sealing portion 3a side, and are connected to the metal foils 11c and 11d on the sealing portion 3b side. Similarly, the external leads 14c and 14d are electrically connected to each other. Thereby, the filament 12a is electrically connected to the external leads 14a and 14d, and the filament 12b is electrically connected to the external leads 14b and 14c.

FIG. 2 is an enlarged cross-sectional view for explaining the form of internal leads 13b and 13d arranged between adjacent filaments 12a and 12b in the filament lamp 1 of the first embodiment.
The internal leads 13b and 13d are formed of the same tungsten as the filament material. In the heating process that requires high energy, the internal leads 13b and 13d are exposed to a very high temperature. When the molybdenum material heated to a high temperature exists inside the arc tube, the molybdenum reacts with the halogen gas, and a red-brown discolored substance adheres to the surface inside the arc tube. When the inner surface of the arc tube 2 changes color, non-uniform illuminance of light emitted from the filament lamp 1 occurs. For this reason, it is necessary to use the same tungsten as the filament material for the internal leads 13b and 13d.

  However, since tungsten is very poor in workability, it is difficult to bend it with a thick one. In addition, in a lamp having a plurality of circuits such as a multifilament heater, the handling of the internal leads 13b and 13d is complicated, so that the thick internal leads cannot be arranged inside the arc tube 2.

  Therefore, it is required to use the thin internal leads 13b and 13d having a small diameter to realize the bending process in the immediate vicinity of the filaments 12a and 12b and to shorten the non-light emitting portion L. Even in the internal leads 13b and 13d formed of tungsten, the diameter of the inner leads 13b and 13d extending in the axial direction in the vicinity of the arc tube is bent in the radial direction of the arc tube 2 to the bridging portion. 16a and 16b are formed, and the positioning portions 17a and 17b are formed by bending again in the axial direction at a position corresponding to the axial center of the arc tube 2 of the transfer portions 16a and 16b. In this manner, by forming the positioning portions 17a and 17b extending in the vicinity of the axial center of the arc tube 2 at the tips 15a and 15b of the internal leads 13b and 13d extending in the axial direction in the vicinity of the arc tube, Therefore, the axial length required by the internal leads 13b and 13d disposed between the filaments 12a and 12b can be shortened, and the non-light emitting region can be suppressed small.

  Sub-coils 18a and 18b are wound around the positioning portions 17a and 17b of the internal leads 13b and 13d, and the filaments 12a and 12b are inserted and fixed to the positioning portions 17a and 17b around which the sub-coils 18a and 18b are wound. Become. The winding diameters of the filaments 12a and 12b cannot be fixed unless they match the diameters of the positioning portions 17a and 17b including the subcoils 18a and 18b, but by appropriately selecting the wire diameters of the subcoils 18a and 18b. The diameters of the positioning portions 17a and 17b including the subcoils 18a and 18b can be adjusted. By winding the subcoils 18a and 18b around the positioning portions 17a and 17b, the winding diameter of the filaments 12a and 12b can be selected regardless of the diameter of the internal leads 13b and 13d.

  However, if the internal leads 13b and 13d are too thin, light is emitted in the same manner as the filaments 12a and 12b, which is not preferable. In particular, since the internal leads 13b and 13d are arranged in the vicinity of the arc tube avoiding the filaments 12a and 12b, the light load in the vicinity of the arc tube also increases the heat load on the arc tube 2, thereby improving the controllability. It gets worse. Accordingly, the diameters of the internal leads 13b and 13d are larger than the filament strand diameter, and preferably are twice or more the filament strand diameter.

  The subcoils 18a and 18b are inserted into the positioning portions 17a and 17b of the internal leads 13b and 13d, and are pressed and fixed from above. In the center of the outer peripheral surfaces of the positioning portions 17a and 17b, concave portions 19a and 19b whose surfaces are shaved and slightly depressed are formed. At the positions where the recesses 19a and 19b are formed, the positioning portions 17a and 17b are substantially semicircular in cross section. On the other hand, the recesses 19a and 19b are not formed at the tips and ends of the positioning portions 17a and 17b, but are circular in cross section. The concave portions 19a and 19b may be formed on the outer peripheral surfaces of the positioning portions 17a and 17b, and may be formed so that the openings of the concave portions 19a and 19b face in either direction.

  The axial lengths of the subcoils 18a and 18b are combined so as to be longer than the axial lengths of the recesses 19a and 19b formed in the positioning portions 17a and 17b. Since the subcoils 18a and 18b are pressed while being inserted into the positioning portions 17a and 17b, the subcoils 18a and 18b disposed at positions corresponding to the recesses 19a and 19b enter the recesses 19a and 19b and are crushed. The subcoils 18a and 18b expand and contract as the filament lamp 1 is turned on / off, but the subcoils 18a and 18b sunk in the recesses 19a and 19b come into contact with the side surfaces of the recesses 19a and 19b to suppress axial movement. , 19b have a role of preventing displacement of the subcoils 18a, 18b.

  By providing the recessed portions 19a and 19b in the positioning portions 17a and 17b, the internal leads 13b and 13d, the subcoils 18a and 18b, and the filaments 12a and 12b are assembled separately even with a tungsten material that has poor workability and cannot be welded. Can do. By separating the internal leads 13b and 13d, the subcoils 18a and 18b, and the filaments 12a and 12b from each other, the wire diameter and winding diameter can be designed regardless of the dimensions of other members.

  Since the subcoils 18a and 18b arranged at the positions where the concave portions 19a and 19b are formed sink, there is a step between the subcoils 18a and 18b arranged at the positioning portions 17a and 17b where the concave portions 19a and 19b are not formed. Arise. Since the step between the subcoils 18a and 18b is caught, the filaments 12a and 12b can be inserted and fixed to the positioning portions 17a and 17b around which the subcoils 18a and 18b are wound.

  The ends of the filaments 12a and 12b fitted to the subcoils 18a and 18b become non-light-emitting regions because the internal leads 13b and 13d serve as heat escape paths and heat is taken away to lower the temperature. However, by using the relatively thin inner leads 13b and 13d, the inner leads 13b and 13d extending in the axial direction in the vicinity of the arc tube can be bent in the radial direction in the immediate vicinity of the filaments 12a and 12b. Further, the positioning portions 17a and 17b having a short axial length are formed by bending again in the axial direction at the central axis of the arc tube 2. By connecting the filaments 12a and 12b to the portion using the subcoils 18a and 18b, the non-light emitting region can be reduced.

Specific numerical values are exemplified below.
Lead wire diameter R: φ0.7 mm to 1.0 mm
Positioning part length: 3.0 mm to 4.0 mm
Handing section length: 3.0 mm to 8.0 mm
Concave portion (depth) h: 0.3 mm
(Length) j: 2 mm
Sub-coil wire diameter: φ0.15mm to 0.4mm
Screwing length k: 3 to 5 mm
Filament wire diameter: φ0.3-0.5mm
Winding diameter m: φ2.1 ~ 2.7mm
Adjacent leads are disposed so that the interval P is 2 mm, and the axial length I of the positioning portion is 3 mm. Therefore, the axial length L of the non-light emitting region can be suppressed to 10 mm.

  FIG. 3 is a perspective view showing the filament lamp 1 of the second embodiment. In the arc tube 2, three filaments 24, 25, and 26 are arranged side by side in the tube axis direction. Internal leads 24a, 24b, 26a, 26b respectively connected to both ends of two filaments 24, 26 arranged in the immediate vicinity of each sealing part 3a, 3b are directed in the same sealing part direction near the filaments 24, 26. Internal leads 25a and 25b that extend and are held by the sealing portions 3a and 3b and are connected to both ends of the filament 25 disposed between the two filaments 24 and 26 are connected to the axis of the arc tube 2 It extends in directions different from each other in the direction and is held by the sealing portions 3a and 3b at both ends.

  Specifically, the internal leads 24 a and 24 b of the filament 24 that are closest to the sealing portion 3 a at one end extend from the sealing portion 3 a and are respectively connected to the end of the filament 24. These internal leads 24a and 24b are both held so as to be connected to the metal foils 21a and 21b in the same sealing portion 3a.

On the other hand, the inner leads 25a and 25b of the filament 25 located in the center portion extend in the direction of the sealing portions 3a and 3b at both ends, and are held so as to be connected to the metal foils 22a and 22b by the sealing portions 3a and 3b. Has been.
As for the filament 26 closest to the sealing portion 3b on the other end side, like the filament 24, the internal leads 26a and 26b are connected to the metal foils 23a and 23b in the sealing portion 3b on the other end portion. Is retained.

  External leads 27a, 27b, 28a, 28b, 29a, and 29b are connected to the metal foils 21a, 21b, 22a, 22b, 23a, and 23b, respectively.

  A glass bridge 36 is provided in the vicinity of the sealing portions 3 a and 3 b inside the arc tube 2. The glass bridge 36 is composed of a pair of cylindrical glass members, and the internal leads 24a, 24b, 25a and the internal leads 25b, 26a, 26b are sandwiched between the glass bridges 36, respectively.

  With the above configuration, the internal lead does not extend in the vicinity of the filament 25 at the center, and the irradiation light from the filament 25 positioned immediately above the object to be processed is blocked by the internal lead. And uniform irradiation is achieved.

  Since a plurality of supporters 37 are attached to the filament 25 located at the center, the filament 25 itself has a function of being arranged at the axial center of the arc tube 2. Therefore, both ends of the filament 25 are merely connected to and held by the bent internal leads 25 a and 25 b, but the filament 25 can be arranged with its axial center aligned with the axial center of the arc tube 2.

  On the other hand, since the filaments 24 and 26 arranged at both ends are arranged with the internal leads 24b, 25a, 25b and 26b in parallel with the filaments 24 and 26, a supporter cannot be attached to the filaments 24 and 26. Accordingly, the positions where the filaments 24 and 26 are arranged inside the arc tube 2 are determined by the positions of the tips of the internal leads 24a, 24b, 26a and 26b.

  The internal leads 24 a and 26 a led out from the sealing portions 3 a and 3 b can be positioned relatively easily by being drawn out to the axial center of the arc tube 2, but are routed close to the filament 25 located in the center. Since the internal leads 24b and 26b are formed by bending their tips, positioning is difficult.

FIG. 4 is an enlarged perspective view for explaining the shape of the internal lead 26b arranged in the non-light-emitting region in the filament lamp 1 of the second embodiment.
The internal lead 26b that is disposed between and connected to the adjacent filament 25 to the filament 26 that is disposed in the immediate vicinity of the sealing portion 3b will be described. The filament 26 is also held by the positioning portion 33 extending in the axial direction via the subcoil 35 in the internal lead 26b. The positioning portion 33 is followed by a transfer portion 32 bent in the radial direction of the arc tube 2 to guide the internal lead 26b to the vicinity of the arc tube. Following the transfer portion 32, a ring portion 34 that is curved so as to be in contact with the inner surface of the arc tube 2 is formed. A line extending in the axial direction from the ring portion 34 is connected to the metal foil 23b.

  When the ring portion 34 contacts the inner surface of the arc tube 2, the position of the internal lead 26b inside the arc tube is determined. Therefore, if the positioning portion 33 with respect to the ring portion 34 is configured to coincide with the axial center of the arc tube 2, positioning inside the arc tube 2 can be performed. The filament 26 can be disposed at the axial center of the arc tube 2.

  Further, since the filament 26 is held only by the sealing portion 3b at one end, a phenomenon called a sag in which the other end hangs down during lighting is likely to occur. However, the internal lead 26b holding the other end is formed inside the arc tube by the ring portion 34. Since the position at is not shifted, sag can be prevented.

The filament lamp shown in the first embodiment and the filament lamp shown in the second embodiment are those in which the sealing portions 3a and 3b are pinch-sealed. However, the filament is a shrink seal instead of the pinch seal. The configuration of the internal lead of the present invention can also be applied to the lamp. This is because the internal lead of the present invention is arranged inside the arc tube and can be applied regardless of the structure of the sealing portion.

The perspective view which shows the filament lamp of this invention The expanded sectional view for demonstrating the form of the internal lead arrange | positioned between the adjacent filaments of the filament lamp of this invention The perspective view which shows the filament lamp of this invention The expanded sectional view for demonstrating the connection of the internal lead and filament of the filament lamp of this invention Perspective view showing a conventional filament lamp

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Filament lamp 2 Arc tube 3a, 3b Sealing part 11a, 11b, 11c, 11d Metal foil 12a, 12b Filament 13a, 13b, 13c, 13d Internal lead 14a, 14b, 14c, 14d External lead 15a, 15b Tip 16a, 16b Delivery portions 17a, 17b Positioning portions 18a, 18b Subcoils 19a, 19b Recesses 21a, 21b, 22a, 22b, 23a, 23b Metal foils 24, 25, 26 Filaments 24a, 24b Internal leads 27a, 27b, 28a, 28b, 29a, 29b External lead 31 Tip 32 Transfer part 33 Positioning part 34 Ring part 35 Subcoil

Claims (4)

A filament lamp in which a plurality of filaments are sequentially arranged in the tube axis direction of the arc tube, and internal leads made of tungsten are connected to both ends of the filament inside the arc tube having sealing portions formed at both ends. In
The internal lead arranged between the adjacent filaments is bent at the tip in the radial direction of the arc tube formed following the positioning portion, and the positioning portion extending in the axial direction of the arc tube. And having a passing section,
A sub-coil made of tungsten is wound around the positioning portion,
A filament lamp, wherein a filament is connected to a positioning portion around which the subcoil is wound. The filament lamp according to claim 1, wherein a concave portion is formed on an outer peripheral surface of the positioning portion. The filament lamp according to claim 2, wherein the axial length of the sub-coil is larger than the axial length of the recess. The filament lamp according to claim 1, wherein the internal lead is formed with a ring portion following the transfer portion.

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