JP2010030033A5 - - Google Patents

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JP2010030033A5
JP2010030033A5 JP2009146448A JP2009146448A JP2010030033A5 JP 2010030033 A5 JP2010030033 A5 JP 2010030033A5 JP 2009146448 A JP2009146448 A JP 2009146448A JP 2009146448 A JP2009146448 A JP 2009146448A JP 2010030033 A5 JP2010030033 A5 JP 2010030033A5
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JP
Japan
Prior art keywords
coolant
regeneration method
addition step
distillation
slurry
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JP2009146448A
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Japanese (ja)
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JP2010030033A (en
JP5173945B2 (en
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Priority to JP2009146448A priority Critical patent/JP5173945B2/en
Priority claimed from JP2009146448A external-priority patent/JP5173945B2/en
Priority to PCT/JP2009/062126 priority patent/WO2010001961A1/en
Publication of JP2010030033A publication Critical patent/JP2010030033A/en
Publication of JP2010030033A5 publication Critical patent/JP2010030033A5/ja
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Publication of JP5173945B2 publication Critical patent/JP5173945B2/en
Expired - Fee Related legal-status Critical Current
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Claims (5)

砥粒と水溶性クーラントを含むスラリーを用いたシリコンインゴットの切断の際に排出される使用済みスラリーを少なくとも蒸留工程に付し、得られた蒸留クーラントから再生クーラントを得るクーラント再生方法であって、
前記蒸留クーラントが少なくとも５重量％の水と少なくとも８０重量％のプロピレングリコールを含有し、前記蒸留クーラントに対して酸を加える酸添加工程とアルカリを加えるアルカリ添加工程を少なくとも１回ずつ行って前記蒸留クーラントのｐＨを４以上９以下に調整する工程を含むクーラント再生方法。 A coolant regeneration method in which a used slurry discharged at the time of cutting a silicon ingot using a slurry containing abrasive grains and a water-soluble coolant is subjected to at least a distillation step, and a regenerated coolant is obtained from the obtained distilled coolant,
The distillation coolant contains at least 5 % by weight of water and at least 80 % by weight of propylene glycol, and the distillation is performed by performing an acid addition step of adding an acid and an alkali addition step of adding an alkali to the distillation coolant at least once. A coolant regeneration method comprising a step of adjusting the pH of the coolant to 4 or more and 9 or less . 前記蒸留クーラントに対して前記酸添加工程を行い、次いで前記アルカリ添加工程を行う場合において、前記酸添加工程後であって前記アルカリ添加工程前の蒸留クーラントのｐＨが４未満である請求項１に記載のクーラント再生方法。 It performs the acid addition step to said distilling coolant, then in the case of performing the alkali addition step, to claim 1 pH distillation coolant before the alkali addition step even after the acid addition step is less than 4 The coolant regeneration method described. 前記蒸留クーラントに対して前記酸添加工程および前記アルカリ添加工程を行う前に微粒子除去処理および還元処理の少なくとも一方を施す前処理工程をさらに含む請求項１または２に記載のクーラント再生方法。 The coolant regeneration method according to claim 1 or 2 , further comprising a pretreatment step of performing at least one of a fine particle removal treatment and a reduction treatment before the acid addition step and the alkali addition step are performed on the distillation coolant. 前記微粒子除去処理が、活性炭処理、濾過および再蒸留のうちの少なくとも１つである請求項３に記載のクーラント再生方法。 The coolant regeneration method according to claim 3 , wherein the particulate removal treatment is at least one of activated carbon treatment, filtration, and redistillation. 砥粒と水溶性クーラントを含むスラリーを用いたシリコンインゴットの切断の際に排出される使用済みスラリーから再生スラリーを得るスラリー再生方法であって、
請求項１〜４のいずれか１つに記載のクーラント再生方法を用いて得られた再生クーラントに対し、新たな砥粒および／または前記使用済みスラリーから回収した回収砥粒を混合する混合工程を含むスラリー再生方法。 A slurry regeneration method for obtaining a regenerated slurry from a used slurry discharged at the time of cutting a silicon ingot using a slurry containing abrasive grains and a water-soluble coolant,
A mixing step of mixing new abrasive grains and / or recovered abrasive grains recovered from the used slurry with the recycled coolant obtained by using the coolant regeneration method according to any one of claims 1 to 4. Slurry regeneration method including.
JP2009146448A 2008-07-02 2009-06-19 Coolant regeneration method and slurry regeneration method Expired - Fee Related JP5173945B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009146448A JP5173945B2 (en) 2008-07-02 2009-06-19 Coolant regeneration method and slurry regeneration method
PCT/JP2009/062126 WO2010001961A1 (en) 2008-07-02 2009-07-02 Method of regenerating coolant and method of regenerating slurry

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008173355 2008-07-02
JP2008173355 2008-07-02
JP2009146448A JP5173945B2 (en) 2008-07-02 2009-06-19 Coolant regeneration method and slurry regeneration method

Publications (3)

Publication Number Publication Date
JP2010030033A JP2010030033A (en) 2010-02-12
JP2010030033A5 true JP2010030033A5 (en) 2011-02-03
JP5173945B2 JP5173945B2 (en) 2013-04-03

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JP2009146448A Expired - Fee Related JP5173945B2 (en) 2008-07-02 2009-06-19 Coolant regeneration method and slurry regeneration method

Country Status (2)

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JP (1) JP5173945B2 (en)
WO (1) WO2010001961A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5332914B2 (en) * 2009-05-29 2013-11-06 信越半導体株式会社 Cutting method of silicon ingot
JP5640260B2 (en) * 2010-06-25 2014-12-17 日本碍子株式会社 Coolant recovery method
JP5844135B2 (en) * 2010-12-24 2016-01-13 花王株式会社 Method for producing polishing composition
JP5756423B2 (en) * 2011-09-07 2015-07-29 ジー・フォースジャパン株式会社 Separation and recovery equipment
WO2013054577A1 (en) * 2011-10-12 2013-04-18 株式会社村田製作所 Waste machining fluid circulation device and waste machining fluid circulation method
CN104024366A (en) * 2011-12-27 2014-09-03 旭硝子株式会社 Additive for polishing agent, and polishing method
JP2013248706A (en) * 2012-05-31 2013-12-12 Panasonic Corp Method for regenerating waste coolant, method and system for treating waste coolant, and method for producing regenerated coolant
JP5860026B2 (en) * 2013-12-12 2016-02-16 アミタ株式会社 Silicon slurry waste liquid recycling system, coolant recovery liquid, recovered abrasive grains, and recovered cutting powder

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4497767B2 (en) * 2001-09-06 2010-07-07 ユシロ化学工業株式会社 Water-soluble machining fluid composition for fixed abrasive wire saw
JP2005313030A (en) * 2004-04-27 2005-11-10 Sharp Corp Slurry regeneration method
JP4493454B2 (en) * 2004-09-22 2010-06-30 株式会社カサタニ Water-soluble cutting agent composition for silicon processing and processing method
ITRM20050329A1 (en) * 2005-06-24 2006-12-25 Guido Fragiacomo PROCEDURE FOR TREATING ABRASIVE SUSPENSIONS EXHAUSTED FOR THE RECOVERY OF THEIR RECYCLABLE COMPONENTS AND ITS PLANT.
JP2007246366A (en) * 2006-03-17 2007-09-27 Sharp Corp Method for recovering silicon-containing material

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